Pressure control device and equipment control system

Abstract

A pressure control device according to the present invention has an air supply valve that is connected to an input channel, and an exhaust valve that is connected to the air supply valve via a connection channel. The pressure control device has a control board unit that includes a memory in which a feedback control program is stored and controls the air supply valve and the exhaust valve. The pressure control device has a first communication port that is connected to the control board unit via a first communication line and receives target pressure data used by the feedback control program. The pressure control device has a second communication port that is connected to the control board unit via a second communication line and receives rewrite data of a user setting value included in the feedback control program.

Description

Pressure control devices and equipment control systems

[0001] The present disclosure relates to a pressure control device and an equipment control system.

[0002] A pressure control device called an electropneumatic regulator has been proposed to control the pressure of a fluid supplied to a controlled device such as a wafer polishing device (see Patent Document 1). By using such a pressure control device to control the pressure of the fluid, the controlled device such as a wafer polishing device can be controlled.

[0003] JP 2022-37588 A

[0004] In order to properly control a controlled device, it is necessary to quickly converge the pressure of the fluid supplied to the controlled device toward a target pressure. Furthermore, to quickly converge the fluid pressure toward the target pressure, it is important to adjust the feedback control program according to the configuration of the equipment in which the pressure control device is incorporated. In other words, the feedback control program includes user-set values ​​such as proportional gain, and it is important to appropriately adjust the user-set values ​​according to the equipment configuration. However, it has been difficult to incorporate a mechanism for adjusting user-set values ​​into pressure control devices, which require compact size. Therefore, there is a need for a system that allows the user-set values ​​to be adjusted while avoiding an increase in the size of the pressure control device.

[0005] According to the present disclosure, a pressure control device has a main body including an input flow path communicating with an input port, an output flow path communicating with an output port, and an exhaust flow path communicating with an exhaust port. The pressure control device has an air intake valve attached to the main body and connected to the input flow path. The pressure control device has an exhaust valve attached to the main body and connected to the air intake valve via a connection flow path. The pressure control device has a control board unit including a memory in which a feedback control program is stored and controlling the air intake valve and the exhaust valve. The pressure control device has a first communication port connected to the control board unit via a first communication line and for receiving target pressure data used in the feedback control program. The pressure control device has a second communication port connected to the control board unit via a second communication line and for receiving rewrite data for a user setting value included in the feedback control program.

[0006] According to the present disclosure, an equipment control system includes a pressure control device that controls the pressure of a fluid flowing from an input port to an output port based on a feedback control program. The equipment control system includes a controlled device connected to the output port via a fluid pipe. The equipment control system includes a first control device communicatively connected to the pressure control device and transmitting target pressure data used in the feedback control program. The equipment control system includes a second control device communicatively connected to the pressure control device and transmitting rewrite data for a user setting value included in the feedback control program. The pressure control device includes a main body including an input flow path communicating with the input port, an output flow path communicating with the output port, and an exhaust flow path communicating with an exhaust port. The pressure control device is attached to the main body and includes an air intake valve connected to the input flow path. The pressure control device is attached to the main body and includes an exhaust valve connected to the air intake valve via a connection flow path. The pressure control device includes a memory that stores the feedback control program and a control board that controls the air intake valve and the exhaust valve. The pressure control device is connected to the control board via a first communication line and has a first communication port to which the first control device is communicatively connected, and the pressure control device is connected to the control board via a second communication line and has a second communication port to which the second control device is communicatively connected.

[0007] According to the present disclosure, the pressure control device has a first communication port and a second communication port, which allows for adjustment of a user setting value while avoiding an increase in the size of the pressure control device.

[0008] FIG. 1 is a diagram showing a pressure control device according to an embodiment of the present disclosure. FIG. 2 is a cross-sectional view showing the pressure control device along line II-II of FIG. 1. FIG. 3 is a diagram showing an enlarged view of a portion of an air intake valve and an exhaust valve. FIG. 4 is a diagram showing an enlarged view of a portion of an air intake valve and an exhaust valve. FIG. 5 is a diagram showing an example configuration of an internal controller. FIG. 6 is a diagram showing an equipment control system according to an embodiment of the present disclosure. FIG. 7 is a diagram showing an equipment control system during parameter adjustment. FIG. 8 is a diagram showing the relationship between proportional gain and pressure measurement data. FIG. 9 is a diagram showing the relationship between differential gain and pressure measurement data. FIG. 10 is a diagram showing the relationship between integral gain and pressure measurement data. FIG. 11 is a diagram showing an equipment control system according to another embodiment of the present disclosure.

[0009] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, identical or substantially identical configurations and elements will be designated by the same reference numerals and repeated description will be omitted.

[0010] <First Embodiment> <Pressure Control Device> FIG. 1 is a diagram illustrating a pressure control device 10 according to an embodiment of the present disclosure. FIG. 2 is a cross-sectional view showing the pressure control device 10 along line II-II in FIG. 1. As shown in FIGS. 1 and 2, the pressure control device 10 has a main body 13 composed of a flow path block 11 and a housing 12. As shown in FIG. 2, the flow path block 11 is formed with an air intake port (input port) 14, an output port 15, and an exhaust port 16. The flow path block 11 also is formed with an air intake flow path (input flow path) 20 communicating with the air intake port 14, an output flow path 21 communicating with the output port 15, and an exhaust flow path 22 communicating with the exhaust port 16. The flow path block 11 also is formed with connection flow paths 21a and 21b communicating with the output flow path 21, and a sensor flow path 23 branching from the output flow path 21.

[0011] Fittings 26, 27 for connecting air tubes 24, 25 are attached to the air supply port 14 and the output port 15 of the flow path block 11. A female thread 16a is formed in the exhaust port 16 of the flow path block 11 for connecting a muffler 85, which will be described later. The pressure control device 10 is a proportional control valve that controls the pressure of the fluid flowing from the air supply port 14 to the output port 15 based on a voltage signal or a current signal input from an external controller 82, which will be described later. This pressure control device 10 is also called an electro-pneumatic regulator.

[0012] 2, the pressure control device 10 has an air intake valve 30 and an exhaust valve 40 attached to the flow path block 11. The air intake valve 30 is connected to the air intake flow path 20, and the exhaust valve 40 is connected to the air intake valve 30 via connection flow paths 21a and 21b. In addition, the connection flow paths 21a and 21b connecting the air intake valve 30 and the exhaust valve 40 communicate with the output flow path 21.

[0013] The upper surface of the flow path block 11 is formed with a mounting recess 31 for mounting the intake valve 30 and a mounting recess 41 for mounting the exhaust valve 40. A valve seat 32 attached to the end of a connecting flow path 21a extending from the output flow path 21 is disposed in the mounting recess 31 on the upper surface of the flow path block, and the end of the intake flow path 20 is open. Furthermore, a valve seat 42 attached to the end of an exhaust flow path 22 is disposed in the mounting recess 41 on the upper surface of the flow path block, and the end of a connecting flow path 21b extending from the output flow path 21 is open.

[0014] 3A and 3B are enlarged views of portions of the air intake valve 30 and the exhaust valve 40. As shown in Fig. 3A, the air intake valve 30 has a coil 34 wound around a bobbin 33, a fixed core 35 fixed inside the bobbin 33, and a movable core 36 movably provided inside the bobbin 33. The movable core 36 has a valve body 37 facing the valve seat 32. The air intake valve 30 also has a spring 38 that urges the movable core 36 toward the valve seat 32.

[0015] 3A, when the supply of electricity to the coil 34 of the air intake valve 30 is cut off, the movable iron core 36 is pushed by the spring 38 and moves in the direction of the arrow a1, and the valve body 37 of the movable iron core 36 comes into contact with the valve seat 32 to close the connecting flow path 21a, i.e., the output flow path 21. On the other hand, as shown in FIG. 3B, when the supply of electricity to the coil 34 of the air intake valve 30 is turned on, the movable iron core 36 is attracted to the fixed iron core 35 and moves in the direction of the arrow b1, and the valve body 37 of the movable iron core 36 moves away from the valve seat 32 to open the connecting flow path 21a, i.e., the output flow path 21.

[0016] That is, the intake valve 30, which is an on-off valve, operates in a communicating state that connects the intake flow path 20 and the output flow path 21 when the coil is energized, and operates in a blocking state that blocks the intake flow path 20 and the output flow path 21 when the coil is not energized. Note that by controlling the intake valve 30 to the communicating state, fluid flows from the intake flow path 20 to the output flow path 21, and the pressure of the fluid discharged from the output flow path 21 can be increased.

[0017] 3A , the exhaust valve 40 has a coil 44 wound around a bobbin 43, a fixed core 45 fixed inside the bobbin 43, and a movable core 46 movably provided inside the bobbin 43. The movable core 46 has a valve body 47 facing the valve seat 42. The exhaust valve 40 also has a spring 48 that urges the movable core 46 toward the valve seat 42.

[0018] 3A, when the supply of electricity to the coil 44 of the exhaust valve 40 is cut off, the movable iron core 46 is pushed by the spring 48 and moves in the direction of arrow a2, and the valve body 47 of the movable iron core 46 comes into contact with the valve seat 42 to close the exhaust flow path 22. On the other hand, as shown in Fig. 3B, when the coil 44 of the exhaust valve 40 is energized, the movable iron core 46 is attracted to the fixed iron core 45 and moves in the direction of arrow b2, and the valve body 47 of the movable iron core 46 moves away from the valve seat 42 to open the exhaust flow path 22.

[0019] That is, the exhaust valve 40, which is an on-off valve, operates in a communicating state that connects the output flow path 21 and the exhaust flow path 22 when the coil is energized, and operates in a blocking state that blocks the output flow path 21 and the exhaust flow path 22 when the coil is not energized. Note that by controlling the exhaust valve 40 to the communicating state, fluid flows from the output flow path 21 to the exhaust flow path 22, and the pressure of the fluid discharged from the output flow path 21 can be reduced.

[0020] 2, the pressure control device 10 has an internal controller (control board) 50 for controlling the air intake valve 30 and the exhaust valve 40. The internal controller 50 has a printed circuit board 51 housed in the housing 12, a microcontroller 52 mounted on the printed circuit board 51, an external memory 53 mounted on the printed circuit board 51, and various elements 54 mounted on the printed circuit board 51. The microcontroller 52 incorporates a processor 55 and a main memory 56. The internal controller 50 is also connected to the coil 34 of the air intake valve 30 via an electrical line 57, which is an electric wire, and to the coil 44 of the exhaust valve 40 via an electrical line 58, which is an electric wire.

[0021] A pressure sensor 60 that blocks the sensor flow path 23 is attached to the upper surface of the flow path block 11. This pressure sensor 60 has a pressure receiving portion 61 that is exposed to the sensor flow path 23. The pressure receiving portion 61 of the pressure sensor 60 is configured, for example, by a diaphragm equipped with a strain gauge. The pressure sensor 60 is connected to the internal controller 50 via a communication line 62, which is an electric wire, and is able to transmit pressure measurement data, which is a pressure signal, from the pressure sensor 60 to the internal controller 50.

[0022] The housing 12 of the pressure control device 10 is also provided with a control port (first communication port) 63 and a communication port (second communication port) 64. The control port 63 is connected to the internal controller 50 via a control line (first communication line) 65, and the communication port 64 is connected to the internal controller 50 via a communication line (second communication line) 66. As will be described later, the control port 63 is a port that receives transmission data from the external controller 82, and the communication port 64 is a port that receives transmission data from the adjustment controller 90. The control line 65 can be configured using multiple electric wires. For example, the control line 65 can be configured using a power supply line, an input signal line, and an output signal line, or the control line 65 can be configured using a power supply line and a communication line. The communication line 66 can also be configured using one or multiple electric wires. For example, the communication line 66 can be configured using an input signal line, or the communication line 66 can be configured using an input signal line and an output signal line. Needless to say, a power supply line can be added to the communication line 66 in addition to the signal lines.

[0023] Fig. 4 is a diagram showing an example of the configuration of the internal controller 50. As shown in Fig. 4, target pressure data P1, which is a control target, is input to the internal controller 50 from an external controller 82 (described later) via an A / D converter 70, and pressure measurement data P2, which is the control result, is input from the pressure sensor 60 via an A / D converter 71. The internal controller 50 also has a PID controller 72, PWM conversion circuits 73 and 74, and drive circuits 75 and 76 for controlling the air intake valve 30 and the exhaust valve 40 so that the pressure measurement data P2 converges to the target pressure data P1.

[0024] The PID controller 72 performs PID control based on the deviation e between the pressure data P1 and P2, and outputs the control amount calculated through the PID control to the PWM conversion circuits 73 and 74. The PWM conversion circuit 73 also calculates a pulse signal to be used for PWM control of the intake valve 30 based on the control amount, and outputs this pulse signal to the drive circuit 75. The drive circuit 75 then controls the energization state of the intake valve 30 based on the pulse signal. Similarly, the PWM conversion circuit 74 calculates a pulse signal to be used for PWM control of the exhaust valve 40 based on the control amount, and outputs this pulse signal to the drive circuit 76. The drive circuit 76 then controls the energization state of the exhaust valve 40 based on the pulse signal.

[0025] As described above, the internal controller 50 has a microcontroller 52 equipped with a processor 55 and a main memory 56. The main memory (memory) 56 also stores a feedback control program for controlling the intake valve 30 and the exhaust valve 40. Execution of this feedback control program by the processor 55 causes the PID controller 72 and other components of the microcontroller 52 to function. That is, the processor 55 executes the feedback control program using the target pressure data P1 and the pressure measurement data P2, thereby performing feedback control of the fluid pressure to converge the pressure measurement data P2 to the target pressure data P1.

[0026] The feedback control program includes parameters as user-set values ​​that can be rewritten by an operator. That is, the feedback control program includes, as parameters (user-set values), a proportional gain Kp for the proportional action, an integral gain Ki for the integral action, and a derivative gain Kd for the derivative action. Note that, when the pressure control device 10 is shipped from the factory, predetermined initial values ​​are set for the proportional gain Kp and other parameters. Also, in the above description, the feedback control program is stored in the main memory 56 of the microcontroller 52, but this is not limiting, and the feedback control program may also be stored in the external memory 53 of the internal controller 50.

[0027] <Equipment Control System> Next, an equipment control system 80 using the pressure control device 10 will be described. FIG. 5 is a diagram illustrating the equipment control system 80 according to an embodiment of the present disclosure. As shown in FIG. 5, the equipment control system 80 includes the pressure control device 10, an air cylinder (controlled equipment) 81, and an external controller 82. The air cylinder 81, controlled by the pressure control device 10, is a cylinder for adjusting the tension of the sheet material 83 being wound. In order to appropriately control the tension of the sheet material 83, it is necessary to control the pressure of the air (fluid) supplied to the air pressure chamber 81a of the air cylinder 81 with high precision. Note that the controlled equipment is not limited to the air cylinder 81; it is also possible to use an air motor, a chemical supply tank, a pilot valve, a process chamber, etc. as the controlled equipment.

[0028] 5, a pressure supply source 84 such as an air compressor or an air tank is connected to the air intake port 14 of the pressure control device 10 via an air tube 24, and a muffler 85 is connected to the exhaust port 16 of the pressure control device 10. Furthermore, an air pressure chamber 81a of an air cylinder 81 is connected to the output port 15 of the pressure control device 10 via an air tube (fluid piping) 25. In this way, the air intake port 14 of the pressure control device 10 is a port for connecting the pressure supply source 84, and the output port 15 of the pressure control device 10 is a port for connecting the air pressure chamber 81a of the air cylinder 81.

[0029] An external controller (first control device) 82 is communicatively connected to the control port 63 of the pressure control device 10 via a control line 87, such as a communication cable. The external controller 82 may be, for example, a programmable logic controller (PLC). The programmable logic controller includes a microcontroller (not shown) incorporating a processor and memory, an input circuit (not shown) that receives signals from various sensors and input devices, and an output circuit (not shown) that outputs signals to the internal controller 50 of the pressure control device 10. The external controller 82, such as a programmable logic controller, functions to supply power to the internal controller 50. The external controller 82 transmits target pressure data P1 to the pressure control device 10 according to a predetermined control program to appropriately control the tension of the sheet material 83 using the air cylinder 81. In other words, the external controller 82 transmits the target pressure data P1 to be input into the feedback control program.

[0030] In this way, when the target pressure data P1 is transmitted from the external controller 82 to the internal controller 50, the internal controller 50 controls the operating states of the air intake valve 30 and the exhaust valve 40 so that the pressure of the air supplied to the air pressure chamber 81 a of the air cylinder 81 converges to the target pressure data P1. In other words, the internal controller 50 feedback-controls the air intake valve 30 and the exhaust valve 40 using the PID controller 72 so that the pressure measurement data P2 input from the pressure sensor 60 converges to the target pressure data P1 input from the external controller 82.

[0031] <Parameter Adjustment> As described above, the internal controller 50 uses the PID controller 72 to feedback control the intake valve 30 and the exhaust valve 40 so that the pressure measurement data P2 converges to the target pressure data P1. Here, in order to quickly converge the pressure measurement data P2 to the target pressure data P1, it is necessary to adjust the feedback control program to match the configuration of the equipment control system 80. In other words, when constructing the equipment control system 80, it is necessary to adjust the parameters of the feedback control program to match the configuration of the air cylinder 81, air tubes 24 and 25, pressure supply source 84, etc. Therefore, the pressure control device 10 incorporated in the equipment control system 80 has, in addition to the control port 63 for connecting the external controller 82, a communication port 64 for connecting the adjustment controller 90, which will be described later.

[0032] Here, Fig. 6 is a diagram showing the device control system 80 during parameter adjustment. As shown in Fig. 6, when adjusting the parameters of the feedback control program, an external controller 82 is connected to the control port 63 of the pressure control device 10, and an adjustment controller (second control device) 90 is connected to the communication port 64 of the pressure control device 10. In other words, the adjustment controller 90 is communicably connected to the communication port 64 of the pressure control device 10 via a communication line 91.

[0033] The adjustment controller 90 has a display unit 92 for displaying parameters, and an operation unit 93 for selecting parameters, changing their values, etc. The adjustment controller 90 also has a microcontroller (not shown) incorporating a processor and memory, an input circuit (not shown) to which signals from the operation unit 93 are input, and an output circuit (not shown) that outputs signals to the internal controller 50 and the display unit 92. The adjustment controller 90 then transmits parameter rewrite data Dp to the pressure control device 10 in accordance with a predetermined control program in order to rewrite the parameters stored in the main memory 56 of the internal controller 50. That is, the adjustment controller 90 transmits parameter rewrite data Dp included in the feedback control program.

[0034] As shown in FIG. 4, the adjustment controller 90 transmits rewrite data Dp to the PID controller 72 of the internal controller 50. The rewrite data Dp that can be transmitted from the adjustment controller 90 includes rewrite data for the proportional gain Kp, rewrite data for the integral gain Ki, and rewrite data for the derivative gain Kd. The operator operating the adjustment controller 90 selects the gain to be rewritten from the various gains Kp, Ki, and Kd, and determines the value of the selected gain by increasing or decreasing it. This causes the rewrite data Dp to be transmitted from the adjustment controller 90 to the internal controller 50, and the internal controller 50 rewrites the gain in the main memory 56 based on the rewrite data Dp.

[0035] Fig. 7A is a diagram showing the relationship between proportional gain Kp and pressure measurement data P2, Fig. 7B is a diagram showing the relationship between differential gain Kd and pressure measurement data P2, and Fig. 7C is a diagram showing the relationship between integral gain Ki and pressure measurement data P2. Note that Figs. 7A to 7C show the convergence of pressure measurement data P2 with respect to target pressure data P1. In Figs. 7A to 7C, the pressure measurement data are labeled P2p1, P2p2, P2d1, P2d2, P2i1, and P2i2 to distinguish between multiple pieces of pressure measurement data P2.

[0036] 7A, when the value of proportional gain Kp is adjusted to be larger, the pressure measurement data P2p1 is more likely to oscillate but rises faster, whereas when the value of proportional gain Kp is adjusted to be smaller, the pressure measurement data P2p2 is less likely to oscillate but rises slower.

[0037] 7B, when the value of the differential gain Kd is adjusted to a smaller value, the pressure measurement data P2d1 rises faster but is more likely to oscillate, whereas when the value of the differential gain Kd is adjusted to a larger value, the pressure measurement data P2d2 rises slower but is less likely to oscillate.

[0038] 7C, when the value of proportional gain Kp is adjusted to be larger, the pressure measurement data P2i1 becomes more likely to exceed the target pressure data P1, but the pressure measurement data P2i1 quickly converges to the target pressure data P1. On the other hand, when the value of proportional gain Kp is adjusted to be smaller, the pressure measurement data P2i1 becomes less likely to exceed the target pressure data P1, but the pressure measurement data P2i1 significantly decelerates before reaching the target pressure data P1.

[0039] In this way, by adjusting the values ​​of the proportional gain Kp, the integral gain Ki, and the differential gain Kd, the characteristics of the PID controller 72, i.e., the characteristics of the feedback control program, can be adjusted. In other words, the parameters of the feedback control program can be adjusted to match the configuration of the equipment control system 80, allowing the pressure measurement data P2 to quickly converge to the target pressure data P1. Furthermore, the pressure control device 10 has a control port 63 for connecting the external controller 82 as well as a communication port 64 for connecting the adjustment controller 90. This allows the pressure control device 10 to eliminate the operation unit, display unit, and other components required for parameter adjustment, thereby preventing the pressure control device 10 from becoming larger and more expensive. As mentioned above, when the pressure control device 10 is shipped from the factory, predetermined initial values ​​are set for parameters such as the proportional gain Kp. Therefore, depending on the configuration of the equipment control system 80, it is conceivable that the pressure control device 10 will operate appropriately without adjusting parameters such as the proportional gain Kp.

[0040] Rather than adjusting values ​​such as the proportional gain Kp using an external controller 82 such as a programmable logic controller, the values ​​such as the proportional gain Kp can be adjusted using an adjustment controller 90 equipped with an operation unit 93 or the like. This allows for easy adjustment of the characteristics of the feedback control program. Furthermore, because both the external controller 82 and the adjustment controller 90 are connected to the pressure control device 10, the values ​​such as the proportional gain Kp can be adjusted using the adjustment controller 90 while checking the operation of the pressure control device 10 controlled by the external controller 82. This allows for appropriate adjustment of the characteristics of the feedback control program. Furthermore, it is also possible to connect the adjustment controller 90 to the pressure control device 10 without attaching the external controller 82 to the pressure control device 10, and adjust values ​​such as the proportional gain Kp using the adjustment controller 90. This allows for easy adjustment of the characteristics of the feedback control program, even when adjustment work is performed on-site where it is difficult to secure space, by simply connecting the adjustment controller 90 to the pressure control device 10.

[0041] 5, after the parameters have been adjusted in conjunction with the construction of the equipment control system 80, the adjustment controller 90 will be removed from the pressure control device 10, but it is possible to attach the adjustment controller 90 to the pressure control device 10 as necessary. This makes it possible to readjust parameters such as the proportional gain Kp, and once again to properly control the air pressure using the pressure control device 10, even if a response delay or hunting occurs in the pressure measurement data P2 due to aging of the equipment control system 80.

[0042] In the above description, the proportional gain Kp, the integral gain Ki, and the derivative gain Kd are rewritten by the adjustment controller 90, but this is not limiting, and the adjustment controller 90 may be configured to rewrite at least one of the proportional gain Kp, the integral gain Ki, and the derivative gain Kd. Also, in the above description, the proportional gain Kp, the integral gain Ki, and the derivative gain Kd are exemplified as user-set values ​​included in the feedback control program, but this is not limiting. For example, the initial values ​​of various variables, which are user-set values, or the control period, which is also a user-set value, may be rewritten by the adjustment controller 90.

[0043] Furthermore, although the internal controller 50 executes PID control using a feedback control program, this is not limiting. For example, the internal controller 50 may execute P control, PI control, or PD control using a feedback control program. Note that rewriting the proportional gain Kp, integral gain Ki, and differential gain Kd also means rewriting the proportional gain Kp, integral time, and differential time. In other words, the integral gain Ki may be rewritten by rewriting the integral time, and the differential gain Kd may be rewritten by rewriting the differential time.

[0044] Second Embodiment The pressure control device 10 shown in Figures 2 and 5 directly controls the pressure of the fluid flowing to the output port 15 using the intake valve 30 and the exhaust valve 40, but this is not limited to this, and the intake valve 30 and the exhaust valve 40 may indirectly control the pressure of the fluid flowing to the output port 15. In other words, the technology of the present disclosure is not limited to the direct-acting pressure control device 10, and may also be applied to a pilot-acting pressure control device. Here, Figure 8 is a diagram showing an equipment control system 100 according to another embodiment of the present disclosure. Note that in Figure 8, components and parts similar to those shown in Figure 5 are designated by the same reference numerals, and their description will be omitted.

[0045] As shown in FIG. 8 , the equipment control system 100 includes a pressure control device 101, an air cylinder 81, an external controller 82, and an adjustment controller 90. A main body 102 of the pressure control device 101 includes an air intake port (input port) 103, an output port 104, an exhaust port 105, and an exhaust port 106. The main body 102 is formed with an air intake flow path (input flow path) 110 communicating with the air intake port 103 and a branch flow path (input flow path) 110a branching from the air intake flow path 110. The main body 102 also includes an output flow path 111 communicating with the output port 104 and a sensor flow path 112 branching from the output flow path 111. The main body 102 is also formed with an exhaust flow path 113 communicating with the exhaust port 105 and an exhaust flow path 114 communicating with the exhaust port 106.

[0046] The pressure control device 101 has a main valve 120 disposed between the air intake passage 110 and the output passage 111 to control the communication state among the air intake passage 110, the output passage 111, and the exhaust passage 113. The main valve 120 has a diaphragm (not shown) that controls the communication state among the air intake passage 110, the output passage 111, and the exhaust passage 113, and a pilot chamber 121 defined on one side of the diaphragm. By increasing the pressure of the air supplied to the pilot chamber 121, the air intake passage 110 and the output passage 111 can be communicated via the main valve 120. On the other hand, by decreasing the pressure of the air supplied to the pilot chamber 121, the output passage 111 and the exhaust passage 113 can be communicated via the main valve 120.

[0047] To control this main valve 120, the pressure control device 101 has an intake valve 30 and an exhaust valve 40. The intake valve 30 is disposed between the branch flow path 110a and the connecting flow path 115, and the exhaust valve 40 is disposed between the connecting flow path 115 and the exhaust flow path 114. In other words, the intake valve 30 is connected to the intake flow path 110 via the branch flow path 110a, the exhaust valve 40 is connected to the intake valve 30 via the connecting flow path 115, and the exhaust valve 40 is connected to the exhaust flow path 114. In addition, a pilot flow path 116 extending from a pilot chamber 121 is connected to the connecting flow path 115 connecting the intake valve 30 and the exhaust valve 40. In other words, the connecting flow path 115 connecting the intake valve 30 and the exhaust valve 40 is connected to the pilot chamber 121, which operates the main valve 120.

[0048] By controlling the intake valve 30 to a communicating state, fluid flows from the branch flow path 110a to the connecting flow path 115, thereby increasing the pressure of the fluid supplied from the pilot flow path 116 to the pilot chamber 121. On the other hand, by controlling the exhaust valve 40 to a communicating state, fluid flows from the connecting flow path 115 to the exhaust flow path 114, thereby decreasing the pressure of the fluid supplied from the pilot flow path 116 to the pilot chamber 121. In other words, by controlling the intake valve 30 and the exhaust valve 40, it is possible to indirectly control the main valve 120 via the pilot fluid in the pilot chamber 121.

[0049] Even this type of pilot-type pressure control device 101 has a control port 63 for connecting the external controller 82, as well as a communication port 64 for connecting the adjustment controller 90. As a result, similar to the direct-acting pressure control device 10 described above, user-set values ​​such as the proportional gain Kp can be adjusted to match the configuration of the equipment control system 100, allowing the pressure measurement data P2 to quickly converge to the target pressure data P1. In other words, the pressure control device 101 can be appropriately controlled to match the configuration of the equipment control system 100.

[0050] <Other Embodiments> The present disclosure is not limited to the above-described embodiments, and various modifications are possible without departing from the spirit and scope of the present disclosure. For example, in the example shown in Figures 1 and 2, the communication port 64 is provided on the top surface 12a of the housing 12, but the installation location of the communication port 64 is not limited to the top surface 12a. For example, as indicated by arrow α in Figure 1, the communication port 64 for connecting the adjustment controller 90 may be provided on the side surface 12b of the housing 12.

[0051] In the above description, the internal controller 50 is configured using a microcontroller 52, but this is not limited thereto, and the internal controller 50 may be configured using an analog circuit made up of elements such as an operational amplifier. In the above description, power is supplied to the internal controller 50 from the external controller 82, but this is not limited thereto. For example, a power supply port may be provided in the housing 12, and a power supply may be connected directly to the pressure control device 10.

[0052] In the above description, the fluid pressure in the output flow paths 21, 111 is controlled by executing PWM control on the intake valve 30 and the exhaust valve 40, but this is not limiting. For example, the intake valve 30 and the exhaust valve 40 may be configured as proportional control valves. Note that the proportional control valve may be a flow proportional control valve that can adjust the opening of the valve element by controlling the current or voltage applied to the coil. Also, the proportional control valve may be a piezoelectric flow proportional control valve that can adjust the opening of the valve element using a piezoelectric element.

[0053] In the example shown in FIG. 2 , air tubes 24 and 25 are connected to the intake port 14 and the output port 15, but this is not limited thereto, and steel pipes may be connected to the intake port 14 and the output port 15. In the above description, a muffler 85 is attached to the exhaust port 16, but this is not limited thereto, and an air tube or steel pipe may be connected to the exhaust port 16. In the examples shown in FIGS. 2 , 6 , and 8 , the pressure sensor 60 is provided in the pressure control device 10 or 101, but this is not limited thereto, and a pressure sensor provided separately from the pressure control device 10 or 101 may be used. In the above description, the pressure control device 10 or 101 controls the pressure of a fluid, i.e., air, which is a gas. However, this is not limited thereto, and the pressure control device 10 or 101 may control the pressure of a fluid other than air.

[0054] 10... Pressure control device, 13... Main body, 14... Air supply port (input port), 15... Output port, 20... Air supply flow path (input flow path), 21... Output flow path, 21a, 21b... Connection flow paths, 25... Air tube (fluid piping), 30... Air supply valve, 40... Exhaust valve, 50... Internal controller (control board), 56... Main memory (memory), 63... Control port (first communication port), 64... Communication port (second communication port), 65... Control line (first communication line), 66... ​​Communication line (second communication line), 80... Equipment control system, 81... Air cylinder (control target) target device), 82...external controller (first control device), 90...adjustment controller (second control device), 100...device control system, 101...pressure control device, 102...main body, 103...air supply port (input port), 104...output port, 110...air supply flow path (input flow path), 110a...branch flow path (input flow path), 111...output flow path, 115...connection flow path, 120...main valve, 121...pilot chamber, P1...target pressure data, Dp...rewrite data, Kp...proportional gain (user set value), Ki...integral gain (user set value), Kd...differential gain (user set value)

Claims

1. A pressure control device that controls the pressure of a fluid flowing from an input port to an output port, comprising: a main body having an input flow path communicating with the input port, an output flow path communicating with the output port, and an exhaust flow path communicating with an exhaust port; an air intake valve attached to the main body and connected to the input flow path; an exhaust valve attached to the main body and connected to the air intake valve via a connection flow path; a control board having a memory in which a feedback control program is stored and controlling the air intake valve and the exhaust valve; a first communication port connected to the control board via a first communication line and receiving target pressure data used in the feedback control program; and a second communication port connected to the control board via a second communication line and receiving rewrite data for a user setting value included in the feedback control program.

2. A pressure control device as described in claim 1, wherein the first communication port is a port for connecting a first control device that transmits the target pressure data, and the second communication port is a port for connecting a second control device that transmits the rewrite data.

3. The pressure control device according to claim 1, wherein the user set value is at least one of a proportional gain of a proportional action, an integral gain of an integral action, and a differential gain of a differential action.

4. A pressure control device according to claim 1, wherein the connection flow passage communicates with the output flow passage.

5. A pressure control device as claimed in claim 1, further comprising a main valve provided between said input flow path and said output flow path for controlling the state of communication between said input flow path and said output flow path, said connecting flow path being connected to a pilot chamber for operating said main valve.

6. A pressure control device that controls the pressure of a fluid flowing from an input port to an output port based on a feedback control program; a controlled device connected to the output port via a fluid piping; a first control device communicatively connected to the pressure control device and transmitting target pressure data used in the feedback control program; and a second control device communicatively connected to the pressure control device and transmitting rewrite data of a user set value included in the feedback control program, wherein the pressure control device comprises: a main body having an input flow path communicating with the input port, an output flow path communicating with the output port, and an exhaust flow path communicating with an exhaust port; an air supply valve attached to the main body and connected to the input flow path; an exhaust valve attached to the main body and connected to the air supply valve via a connection flow path; a control board unit having a memory in which the feedback control program is stored, and controlling the air supply valve and the exhaust valve; a first communication port connected to the control board unit via a first communication line, to which the first control device is communicatively connected; a second communication port connected to the control board portion via a second communication line, the second control device being communicatively connected thereto.

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