Cutting device using multi-wire

Abstract

The present invention provides a cutting device using a multi-wire, the cutting device comprising: a bed; a fixed holder rotatably disposed on one side of the bed so as to support one side of a spool; a transfer holder disposed to be spaced apart from the fixed holder on the other side of the bed and disposed to be movable in the direction of the fixed holder so as to support the other side of the spool; a first inclined surface provided on the side of either the fixed holder or the transfer holder so as to interfere with the one side or the other side of the spool; and a transfer means for linearly moving the transfer holder from the other side of the bed toward or away from the fixed holder.

Description

Cutting device using multi-wire

[0001] The present invention relates to a cutting device using a multi-wire, and more particularly, to a cutting device using a multi-wire that can easily replace a spool on which wire is wound.

[0002] Silicon substrates, sapphire substrates, quartz substrates (accessories), silicon parts (accessories) used in semiconductor processes are generally cut using multi-wires from large samples.

[0003] For example, a wafer is a thin silicon plate made from silicon, which is widely used as a material for manufacturing semiconductor devices, and is composed of a slicing process for cutting a grown silicon ingot into a wafer shape, a lapping process for uniformizing and flattening the thickness of the wafer, an etching process for removing or alleviating damage caused by mechanical polishing, a polishing process for mirror-finishing the wafer surface, and a washing process for washing the polished wafer and removing foreign substances attached to the surface. Among these, the slicing process is a process for grinding the outer surface of a silicon single crystal ingot to form a cylindrical shape of a predetermined size, and cutting this into wafers in individual sheet units.

[0004] A variety of slicing devices are commonly used for the slicing process, one of which is the wire saw. A wire saw device cuts by applying high-speed friction to a wire against the cutting material, resulting in cutting by friction between the wire and the material. These wire saw devices are widely used because they can simultaneously cut an ingot into multiple wafers, resulting in an excellent production yield per unit time.

[0005] Recently, there has been a lot of use of coating the wire itself with diamonds and using this to cut products.

[0006] Since these wire saw devices are devices that process wire by winding and unwinding it while maintaining a constant tension on the rotating body, the spool that supplies and retrieves the wire must be replaced periodically.

[0007] However, the spool replacement method, which requires manual replacement by the operator, has raised concerns about variations in spool concentricity and operating time depending on the operator's skill level. Furthermore, because the spool is secured with bolts, the tightening torque associated with periodic replacement can cause the bolts to break.

[0008] The present invention is intended to solve such problems, and more specifically, to provide a cutting device using a multi-wire that allows easy replacement of a spool and concentric fastening of the spool regardless of skill level.

[0009] The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the description below.

[0010] In order to achieve the above object, the present invention provides a cutting device using a multi-wire, comprising: a bed; a fixed holder rotatably arranged on one side of the bed to support one side of a spool; a transport holder spaced apart from the fixed holder on the other side of the bed and movably arranged in the direction of the fixed holder to support the other side of the spool; a first inclined surface provided on one side of the fixed holder or the transport holder to interfere with one side or the other side of the spool; and a transport means for linearly moving the transport holder closer to or farther from the fixed holder on the other side of the bed.

[0011] The first inclined surface may be provided on the outer surface of one side of the fixed holder facing the transfer holder, and a second inclined surface may be provided on the outer surface of one side of the transfer holder facing the fixed holder.

[0012] The first and second inclined surfaces may be arranged symmetrically with respect to the center of rotation of the spool.

[0013] The cutting device using the above multi-wire may further include a first shaft connected to the rotation center of the fixed holder to transmit driving force; and a first housing that supports the first shaft so as to surround it on the bed.

[0014] The cutting device using the above multi-wire may further include a second shaft connected to the rotation center of the transfer holder; and a second housing that supports the transfer means so as to surround it on the bed.

[0015] The above-mentioned transport means may include a rod that supports the second shaft so as to be rotatable and is arranged to be linearly movable along the axial direction of the second shaft together with the transport holder, and an elastic member that elastically presses the rod in the direction of the fixed holder between the second housing and the rod.

[0016] The above load may include a piston protruding from an outer surface toward an inner surface of the second housing in an area overlapping the second housing.

[0017] The second housing may include a pressure space for accommodating the piston, and a pressure inlet formed to inject or discharge fluid into or from the pressure space.

[0018] When air or fluid is introduced through the pressure inlet, the pressure transmitted to the piston causes the load to compress the elastic member, thereby causing the transfer holder to move away from the fixed holder.

[0019] The above-mentioned transport means can fix the spool concentrically with respect to the axial direction between the first inclined surface and the second inclined surface while horizontally transporting the transport holder in the direction of the fixed holder.

[0020] The cutting device using the above multi-wire may further include a holder placed between the fixed holder and the transport holder on the bed and raised before the spool is mounted.

[0021] The above holder may be height-adjustable so that it can be positioned at the center of the fixed holder or the transport holder corresponding to the diameter of the spool.

[0022] Specific details of other embodiments are included in the detailed description and drawings.

[0023] According to a cutting device using a multi-wire according to an embodiment of the present invention,

[0024] First, the spool can be automatically clamped to the cutting device using multi-wire,

[0025] Second, during the automatic clamping process of the spool, the spool can be automatically aligned in a concentric position between the fixed holder and the transfer holder through the first and second inclined surfaces.

[0026] Third, the spool replacement time is significantly reduced as the transfer holder is automatically unclamped by the transfer means.

[0027] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0028] The above summary, as well as the detailed description of preferred embodiments of the present application described below, will be better understood when read in conjunction with the accompanying drawings. For the purpose of illustrating the present invention, preferred embodiments are depicted in the drawings. However, it should be understood that the present application is not limited to the precise arrangements and means illustrated.

[0029] FIG. 1 is a cross-sectional view illustrating a cutting device using a multi-wire according to an embodiment of the present invention.

[0030] Fig. 2 is a cross-sectional view showing a state in which the spool is removed from the cutting device using the multi-wire shown in Fig. 1.

[0031] Fig. 3 is a cross-sectional view showing a state in which a spool is placed on a stand in a cutting device using a multi-wire as shown in Fig. 2.

[0032] Fig. 4 is a cross-sectional view showing a state in which a spool is in close contact with a fixed holder in a cutting device using a multi-wire as shown in Fig. 3.

[0033] Fig. 5 is a cross-sectional view showing a state in which a spool is clamped while the transfer holder is pressed in the direction of the fixed holder in the cutting device using the multi-wire shown in Fig. 4.

[0034] FIG. 6 is a cross-sectional view illustrating a cutting device using a multi-wire according to another embodiment of the present invention.

[0035] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention, and methods for achieving them, will become clear with reference to the embodiments described in detail below together with the attached drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

[0036] The present invention can have various modifications and embodiments, and specific embodiments are illustrated and described in the drawings.

[0037] However, this is not intended to limit the present invention to a specific embodiment, but should be understood to include all modifications, equivalents, or substitutes included in the spirit and technical scope of the present invention.

[0038] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms.

[0039] The above terms are used solely to distinguish one component from another.

[0040] For example, without departing from the scope of the present invention, the second component may be referred to as the first component, and similarly, the first component may also be referred to as the second component.

[0041] The term and / or includes any combination of a plurality of related described items or any one of a plurality of related described items.

[0042] When it is said that a component is "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but there may also be other components in between.

[0043] On the other hand, when it is said that a component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0044] The terminology used in this application is for the purpose of describing specific embodiments only and is not intended to limit the present invention.

[0045] Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0046] In this application, terms such as “include” or “have” are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0047] Hereinafter, embodiments will be described in detail with reference to the attached drawings. Regardless of the drawing numbers, identical or corresponding components are given the same reference numbers, and redundant descriptions thereof will be omitted.

[0048] FIG. 1 is a cross-sectional view illustrating a cutting device using a multi-wire according to an embodiment of the present invention.

[0049] Referring to FIG. 1, a cutting device (100) using a multi-wire according to an embodiment of the present invention can be configured to unwind or wind a wire wound on a spool (10) by rotating spools (10) arranged parallel to each other on both sides. At this time, since the structure for rotating the spools (10) on both sides has the same structure, one of the structures will be described in detail.

[0050] Of course, although not shown in the drawing, the cutting device (100) using a multi-wire according to an embodiment of the present invention may have a structure in which the wire is unwound from one spool and wound onto another spool.

[0051] Since the cutting device (100) using a multi-wire according to an embodiment of the present invention has a structure that easily clamps a spool (10), the overall configuration will be briefly described, and the structure for mounting or removing the spool (10) will be described in detail with reference to the drawings below.

[0052] A cutting device (100) using a multi-wire may include a bed (110), a fixed holder (120), a transport holder (130), and a transport means (140).

[0053] First, the bed (110) is configured to be the base of a cutting device (100) using a multi-wire, and a fixed holder (120), a transport holder (130), and a transport means (140) can be installed on the upper part.

[0054] The fixed holder (120) can be positioned on one side of the bed (110) and can be positioned so as to be rotatable. For example, the fixed holder (120) can transmit the power required to rotate the spool (10) while transmitting the rotational power of a motor (not shown).

[0055] A fixed holder (120) is installed on the tip of a first shaft (122) that is arranged to be rotatable within the first housing (121) installed on one side of the bed (110). Within the first housing (121), the first shaft (122) may be supported to be rotatable by at least one bearing (123).

[0056] Accordingly, when the first shaft (122) rotates, the fixed holder (120) rotates together, and the first shaft (122) is connected to the rotational axis (20) of the motor to transmit power to rotate the spool (10).

[0057] The fixed holder (120) protrudes from the tip of the first shaft (122) along the circumferential direction of the first shaft (122), and a first inclined surface (124) may be formed on the outer surface that contacts the spool (10). The first inclined surface (124) is formed along the outer surface of the fixed holder (120), and may be formed so that the outer diameter becomes uniformly smaller toward the center of the spool (10).

[0058] In addition, the spool (10) is formed in a hollow cylindrical shape, and wire (not shown) can be tightly wound around the outer surface. The spool (10) can have a step (11) formed at both ends that protrudes further in the circumferential direction than the outer surface. The step can prevent the wire from escaping from the outer surface of the spool (10), or can limit the height at which the wire is wound around the outer surface of the spool (10).

[0059] In addition, the transfer holder (130) can be arranged on the other side of the bed (110) so as to be rotatable. The transfer holder (130) can be arranged side by side so as to face the fixed holder (120).

[0060] The transfer holder (130) is installed on the tip of a second shaft (132) that is rotatably arranged inside the second housing (131) on the second housing (131) installed on the other side of the bed (110). The second shaft (132) may be rotatably supported inside the second housing (131) by at least one bearing (133). The transfer holder (130) may rotate around the spool (10) by the power generated when the fixed holder (120) rotates. Of course, the transfer holder (130) may be configured to have a structure in which the power is generated in the transfer holder (130) and transmitted to the fixed holder (120). In this embodiment, the power being transmitted from the fixed holder (120) to the transfer holder (130) will be described as an example.

[0061] The transfer holder (130) protrudes from the tip of the second shaft (132) along the circumferential direction of the second shaft (132), and a second inclined surface (134) may be formed on the outer surface that contacts the spool (10). The second inclined surface (134) is formed along the outer surface of the transfer holder (130), and may be formed so that the outer diameter becomes uniformly smaller toward the center of the spool (10). The second inclined surface (134) may be formed symmetrically with respect to the first inclined surface (124) and the center of the spool (10).

[0062] At this time, the spool (10) can have an inclined surface (see Fig. 2, 12) formed on the inner surface of both ends where the step is formed, corresponding to the first inclined surface (124) or the second inclined surface (134).

[0063] Accordingly, the spool (10) can be arranged concentrically with the fixed holder (120) and the transport holder (130) because both ends are mounted so as to contact the first inclined surface (124) and the second inclined surface (134).

[0064] At this time, a transport means (140) may be placed inside the second housing (131).

[0065] The transport means (140) may include a load (141) and an elastic member (142).

[0066] The rod (141) may be arranged to be horizontally movable within the second housing (131). That is, the second housing (131) and the rod (141) may be arranged in a cylinder and piston structure. Accordingly, the rod (141) may be moved linearly within the second housing (131) along the longitudinal direction of the second housing (131).

[0067] Here, the elastic member (142) can be interposed between the rod (141) and the second housing (131) to provide pressure to press the rod (141) toward the fixed holder (120). That is, the transfer holder (130) is arranged to be rotatable within the rod (141) that does not rotate together with the second shaft (132), and pressure can be constantly provided toward the spool (10) together with the rod (141) by the elastic member (142).

[0068] And, the second housing (131) may be formed with a pressure inlet / outlet (135), and a piston (143) may be provided on the outer circumferential surface of the rod (141). More specifically, in the area where the second housing (131) and the rod (141) overlap, a pressure space (136) is formed inside the second housing (131) to limit the movement area of ​​the piston (143), and when the pressure inlet / outlet (135) is arranged on one or both sides of the pressure space (136), and when air or oil is supplied to the pressure inlet / outlet (135), the rod (141) together with the piston (143) may be moved while being pressurized by the pressure toward the elastic member (142) (or, in the direction away from the fixed holder (120).

[0069] In an embodiment of the present invention, a structure in which pressure inlets (135) are formed on both sides of a pressure space (136) as the center, air or oil is injected on one side and air or oil is discharged on the other side so that a rod (141) can move toward an elastic member (142) is described as an example. In addition, in an embodiment of the present invention, a structure in which air is supplied to and from the pressure inlet (135) to provide pressure to a piston (143) through pneumatic pressure is described as an example.

[0070] Accordingly, when removing the spool (10) for replacement, air can be injected into the pressure inlet (135) so that the rod (141) compresses the elastic member (142) and the transport holder (130) moves away from the fixed holder (120), thereby releasing the mounting state of the spool (10). Conversely, when mounting the spool (10), air can be discharged from the pressure inlet (135) so that the rod (141) joins the transport holder (130) toward the fixed holder (120) by the elastic restoring force of the elastic member (142), thereby allowing the spool (10) to be mounted.

[0071] In addition, the stand (150) can be placed between the fixed holder (120) and the transport holder (130) on the bed (110) to provide a lifting function before the spool (10) is mounted.

[0072] For example, the holder (150) may have a cross-section in the shape of a "V" or a "U". The spool (10) may be stably placed by being placed on a groove formed in the center of the holder (150). The distance from the upper surface of the holder (150) where the spool (10) comes into contact to the center of rotation (c) when the spool (10) is mounted on the cutting device (100) may correspond to at least the radius of the spool (10) or may be greater than this. That is, the height of the holder (150) may be set to correspond to the height at which the spool (10) is fixed to the cutting device (100).

[0073] However, a separation distance corresponding to a predetermined assembly tolerance may be required to prevent the spool (10) and the holder (150) from coming into contact when the spool (10) is mounted between the fixed holder (120) and the transfer holder (130) and rotates.

[0074] In addition, the stand (150) may have steps (151) formed at both ends with respect to the mounting direction of the spool (10) on the upper surface where the spool (10) comes into contact. In addition, the distance between the steps (151) at both ends of the stand (150) may be formed to be at least greater than the width of the spool (10).

[0075] Here, it is preferable that the distance between the stand (150) and the rotation center (c) of the spool (10) be smaller than the sum of the maximum radius of the spool (10) and the height change amount of the first inclined surface (124) or the second inclined surface (134) (e.g., the height between the maximum radius and the minimum radius of the inclined surface). In addition, it is preferable that the separation distance be smaller than the maximum height change amount of the first inclined surface (124) or the second inclined surface (134).

[0076] Fig. 2 is a cross-sectional view showing a state in which the spool is removed from the cutting device using the multi-wire shown in Fig. 1.

[0077] Referring to Fig. 2, the spool (10) is removed from the cutting device (100) using a multi-wire. At this time, the used spool (10) can be replaced with a spool (10) on which a new wire is wound.

[0078] In a state where the spool (10) is removable, the transfer holder (130) moves away from the fixed holder (120), and at this time, air is injected into the pressure space (136) through the pressure inlet (135), and the elastic member (142) can be compressed to the maximum between the rod (141) and the second housing (131).

[0079] Accordingly, a space can be secured so that the spool (10) can be removed by spacing the fixed holder (120) and the transfer holder (130) apart from each other.

[0080] Fig. 3 is a cross-sectional view showing a state in which a spool is placed on a stand in a cutting device using a multi-wire as shown in Fig. 2.

[0081] Referring to FIG. 3, the spool (10) can be placed on the stand (150) while the transfer holder (130) is moved away from the fixed holder (120) and the elastic member (142) is still compressed. Of course, a space may be secured between the fixed holder (120) and the transfer holder (130) in which the spool (10) can be mounted, as shown in FIG. 2.

[0082] At this time, the spool (10) is placed on the stand (150), so it may not yet come into contact with the fixed holder (120) or the transfer holder (130).

[0083] Fig. 4 is a cross-sectional view showing a state in which a spool is in close contact with a fixed holder in a cutting device using a multi-wire as shown in Fig. 3.

[0084] Referring to Fig. 4, the spool (10) moves toward the fixed holder (120) on the stand (150) and is in contact with the fixed holder (120). Therefore, the spool (10) is not completely mounted, and only one side corresponding to the fixed holder (120) can be mounted.

[0085] Of course, the spool (10) can be in the state of Fig. 4 when the user presses it toward the fixed holder (120) while it is placed on the stand (150).

[0086] Fig. 5 is a cross-sectional view showing a state in which a spool is clamped while the transfer holder is pressed in the direction of the fixed holder in the cutting device using the multi-wire shown in Fig. 4.

[0087] Referring to FIG. 5, complete mounting of the spool (10) can be achieved by pressing the transfer holder (130) toward the fixed holder (120).

[0088] At this time, as air is discharged from the pressure inlet (135), the rod (141) moves in a straight line toward the fixed holder (120) by the elastic restoring force of the elastic member (142), and the second shaft (132) and the transfer holder (130) together with the rod (141) pressurize the spool (10) toward the fixed holder (120) to fix and mount the spool (10).

[0089] At this time, the fixed holder (120) and the transfer holder (130) can be aligned so that the spool (10) is concentrically arranged along each inclined surface while compressing the spool (10) through the first inclined surface (124) and the second inclined surface (134), respectively, and through this, the spool (10) can be arranged around the same rotation axis so as not to rotate eccentrically.

[0090] Fig. 6 is a cross-sectional view illustrating a cutting device using a multi-wire according to another embodiment of the present invention. In the following, the same reference numerals as those previously mentioned may indicate the same components.

[0091] A cutting device (100) using a multi-wire according to another embodiment of the present invention has a difference in that the height of the stand (150) changes as the diameter of the spool (30) changes.

[0092] For example, when the radius of the spool (30) increases, the distance between the stand (150) and the center of rotation (c) of the spool (30) may increase to correspond to the changed radius of the spool (30). That is, the stand may be height-adjustable.

[0093] Of course, although not shown in the drawing, if the radius of the spool (30) becomes smaller, the distance between the stand (150) and the center of rotation (c) of the spool (30) may decrease to correspond to the changed radius of the spool (30).

[0094] Therefore, according to the cutting device using a multi-wire according to an embodiment of the present invention, a spool can be automatically clamped to the cutting device using a multi-wire, and during the automatic clamping process of the spool, the spool can be automatically aligned in a concentric position between the fixed holder and the transfer holder through the first inclined surface and the second inclined surface, and the transfer holder is automatically unclamped by the transfer means, thereby significantly reducing the spool replacement time.

[0095] While specific embodiments have been illustrated and described above to illustrate the technical concepts of the present invention, the present invention is not limited to the configuration and operation of the specific embodiments described above, and various modifications may be implemented without departing from the scope of the present invention. Therefore, such modifications should be considered within the scope of the present invention, and the scope of the present invention should be determined by the claims set forth below.

[0096] 10, 30: Spool

[0097] 20: Motor rotation axis

[0098] 100: Cutting device using multi-wire

[0099] 110: Bed

[0100] 120: Fixed holder

[0101] 121: First housing 122: First shaft

[0102] 123: Bearing 124: First inclined plane

[0103] 130: Transfer Holder

[0104] 131: Second housing 132: Second shaft

[0105] 133: Bearing 134: Second inclined plane

[0106] 140: Means of transport

[0107] 141: Rod 142: Elastic member

[0108] 150: Stand

Claims

1. Bed; A fixed holder rotatably arranged on one side of the above bed to support one side of the spool; A transfer holder that is spaced apart from the fixed holder on the other side of the bed and is arranged so as to be movable in the direction of the fixed holder to support the other side of the spool; A first inclined surface provided on one side of the fixed holder and the transfer holder so as to interfere with one side or the other side of the spool; and A transfer means for linearly moving the transfer holder closer to or further away from the fixed holder on the other side of the bed; A cutting device using a multi-wire, including:

2. In paragraph 1, The above first inclined surface is provided on the outer surface of one side of the fixed holder facing the transfer holder, A cutting device using a multi-wire, wherein a second inclined surface is provided on an outer surface of one side of the above-mentioned transfer holder facing the fixed holder.

3. In paragraph 2, A cutting device using a multi-wire, wherein the first and second inclined surfaces are arranged symmetrically with respect to the center of rotation of the spool.

4. In paragraph 1, A first shaft connected to the center of rotation of the above fixed holder and transmitting driving force; A first housing that supports the first shaft so as to surround it on the bed; A cutting device using a multi-wire, further comprising:

5. In paragraph 2, A second shaft connected to the center of rotation of the above transfer holder; A second housing that supports the above-mentioned transport means so as to surround it on the bed; A cutting device using a multi-wire, further comprising:

6. In paragraph 5, The above means of transport is, A rod that supports the second shaft so as to be rotatable and is arranged so as to be able to move linearly along the axial direction of the second shaft together with the transfer holder; A cutting device using a multi-wire, comprising an elastic member that elastically presses the load toward a fixed holder between the second housing and the load.

7. In paragraph 6, The above load is, A cutting device using a multi-wire, comprising a piston protruding from an outer surface toward an inner surface of the second housing in an area overlapping the second housing.

8. In paragraph 7, The above second housing, A pressure space accommodating the piston, A cutting device using a multi-wire, comprising a pressure inlet and outlet formed to inject or discharge fluid into the pressure space.

9. In paragraph 8, A cutting device using a multi-wire, wherein when air or fluid is introduced through the pressure inlet or outlet, the load compresses the elastic member through the pressure transmitted to the piston, and the transfer holder moves in a direction away from the fixed holder.

10. In paragraph 6, The above means of transport is, A cutting device using a multi-wire, which horizontally moves the above-mentioned transfer holder in the direction of the fixed holder and fixes the spool concentrically with respect to the axial direction between the first inclined surface and the second inclined surface.

11. In paragraph 1, A cutting device using a multi-wire, further comprising a holder disposed between the fixed holder and the transport holder on the bed and raised before the spool is mounted.

12. In paragraph 5, The above stand is, A cutting device using a multi-wire, the height of which can be adjusted so that it can be positioned at the center of the fixed holder or the transport holder corresponding to the diameter of the spool.

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