Substrate storage container

Abstract

This substrate storage container comprises: a container body for storing plate-shaped substrates W having at least one corner in the plan view, with a substrate storage space 27 formed therein in which the substrates W can be stored in parallel, in which there is an opening peripheral part at one end in which a container body opening communicating with the substrate storage space 27 is formed, and the other end is closed; a lid body that is detachable from the container body opening and that can close the container body opening; and side substrate support parts 5 arranged in pairs inside the substrate storage space 27, and in a state in which adjacent substrates W are arranged in parallel separated by a prescribed interval, are able to support the edge of the substrates W. The side substrate support part 5 has a plurality of plate parts 51 arranged between adjacent substrates W, and a plate support part 52 that supports the plate parts 51. The plate support part 52 has an opening part 53 that opens in a direction intersecting a vertical direction D2 which is a direction in which the plate parts 51 are parallel, and a non-opening part 54 that is arranged at least between the plate parts 51 and the opening part 53 in the vertical direction D2.

Description

Substrate storage container

[0001] The present invention relates to a substrate storage container used for storing, transporting, keeping, shipping, etc., plate-shaped substrates (for example, rectangular plate-shaped) having corners in a plan view.

[0002] Conventionally, substrate storage containers for storing and transporting substrates such as semiconductor wafers have been known, each of which includes a container body and a lid (see, for example, Patent Document 1). The substrates stored therein are not limited to circular plate-shaped substrates, but may also be plate-shaped substrates having corners (tops, corners) in a plan view, such as rectangular plate-shaped substrates.

[0003] One end of the container body has an opening periphery where a container body opening is formed. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is formed by being surrounded by the wall and is capable of storing multiple substrates. The lid is detachable from the opening periphery and is capable of closing the container body opening. The side substrate support portions are provided on the wall portions in pairs within the substrate storage space. The side substrate support portions have multiple plate portions arranged between adjacent substrates and plate support portions that support the plate portions. The side substrate support portions are capable of supporting the edges of the multiple substrates while arranging adjacent substrates in parallel with a predetermined distance between them.

[0004] A front retainer is provided on a portion of the lid that faces the substrate storage space when the container body opening is closed. The front retainer is capable of supporting the edges of multiple substrates when the container body opening is closed by the lid. A rear-side substrate support portion is provided on the wall portion so as to form a pair with the front retainer. When the container body opening is closed by the lid, the rear-side substrate support portion cooperates with the front retainer to support the edges of the multiple substrates while arranging adjacent substrates in parallel with a predetermined distance apart.

[0005] Patent No. 6445027

[0006] Incidentally, it is desired to improve the cleaning and drying properties of the side substrate support parts when the side substrate support parts are cleaned while being assembled to the container body.

[0007] The present invention aims to provide a substrate storage container for plate-shaped substrates that have corners when viewed in a plane, which can improve the cleaning and drying properties of the side substrate support parts when the side substrate support parts are cleaned while assembled to the container body.

[0008] (1) The present invention relates to a substrate storage container for storing plate-shaped substrates having at least one corner in a planar view, the substrate storage container including: a substrate storage space formed therein capable of storing a plurality of the substrates in parallel; a container body having an opening periphery at one end where a container body opening communicating with the substrate storage space is formed; and a closed other end; a lid that is detachable from the container body opening and capable of closing the container body opening; and side substrate support portions that are arranged in pairs within the substrate storage space and are capable of supporting the edges of the plurality of substrates while adjacent substrates among the plurality of substrates are arranged in parallel with a predetermined distance between them, the side substrate support portions having a plurality of plate portions arranged between the adjacent substrates and plate support portions that support the plate portions, the plate support portions having an opening that opens in a direction intersecting the vertical direction in which the plurality of plate portions are arranged in parallel, and a non-opening portion that is arranged at least between the plate portions and the opening in the vertical direction.

[0009] (2) The substrate storage container according to (1), wherein the non-opening has a height above and / or below the opening that restricts movement of the substrate that hits the non-opening.

[0010] (3) The substrate storage container according to (1) or (2), wherein the opening has a shape that allows a corner of the substrate arranged between adjacent plate portions to be inserted therethrough.

[0011] (4) A substrate storage container according to any one of (1) to (3), wherein the height of the non-opening portion located below the opening portion is 0.5 mm or more.

[0012] (5) A substrate storage container according to any one of (1) to (4), wherein the height of the non-opening portion located above the opening portion is 0.5 mm or more.

[0013] According to the present invention, a substrate storage container can be provided for a substrate storage container for plate-shaped substrates that have corners when viewed in a plane, which can improve the cleaning and drying properties of the side substrate support parts when the side substrate support parts are cleaned while assembled to the container body.

[0014] 6B is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. FIG. 2 is a perspective view showing a container body 2 of a substrate storage container 1 according to an embodiment of the present invention, viewed from below. FIG. 3 is a cross-sectional view of FIG. 2. FIG. 4 is a perspective view showing a lid 3 of a substrate storage container 1 according to an embodiment of the present invention. FIG. 5 is a plan view showing one form of a substrate W. FIG. 6C is a perspective view of a left-side lateral substrate support portion 5 as viewed from the right. FIG. 6D is a right side view of a left-side lateral substrate support portion 5. FIG. 6E is a partial enlarged view of FIG. 6B. FIG. 7 is a vertical cross-sectional view of a vertical cross-section taken along plane D2-D3 of FIG. 7, viewed in the rear direction D12. FIG. 6F is a partial enlarged view of a left-side lateral substrate support portion 5 of FIG. 3. FIG. 7A is a view showing another form of an opening 53 in a plate support portion 52 (corresponding to FIG. 7). FIG. 5B is a view showing another form of a planar shape of a substrate W (corresponding to FIG. 5).

[0015] A substrate storage container 1 according to one embodiment of the present invention will now be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to one embodiment of the present invention. FIG. 2 is a perspective view showing a container body 2 of a substrate storage container 1 according to one embodiment of the present invention, viewed from below. FIG. 3 is a cross-sectional view of FIG. 2. FIG. 4 is a perspective view showing a lid 3 of a substrate storage container 1 according to one embodiment of the present invention. FIG. 5 is a plan view showing one embodiment of a substrate W. FIG. 6A is a perspective view of a left-side lateral substrate support portion 5 as viewed from the right. FIG. 6B is a right side view of the left-side lateral substrate support portion 5. FIG. 7 is a partially enlarged view of FIG. 6B. FIG. 8 is a vertical cross-sectional view of FIG. 7 taken along plane D2-D3, viewed in the rear direction D12. FIG. 9 is a partially enlarged view of the left-side lateral substrate support portion 5 of FIG. 3. FIG. 10 is a view showing another embodiment of the opening 53 of a plate support portion 52 (corresponding to FIG. 7). FIG. 11 is a view showing another embodiment of the planar shape of a substrate W (corresponding to FIG. 5).

[0016] For ease of explanation, the direction from the container body 2 (described below) toward the lid 3 (the direction from the upper right to the lower left in FIG. 1 ) is defined as the front direction D11 or front side D11, and the opposite direction is defined as the rear direction D12 or rear side D12, and these are collectively defined as the front-to-rear direction D1. Furthermore, the direction from the lower wall 24 (described below) toward the upper wall 23 (the upward direction in FIG. 1 ) is defined as the upward direction D21 or upper side D21, and the opposite direction is defined as the downward direction D22 or lower side D22, and these are collectively defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 (described below) toward the first side wall 25 (the direction from the lower right to the upper left in FIG. 1 ) is defined as the left direction D31 or left side D31, and the opposite direction is defined as the right direction D32 or right side D32, and these are collectively defined as the left-right direction D3 or lateral direction D3. Some of the drawings include arrows indicating these directions.

[0017] As shown in Figures 1, 3, and 5, in one embodiment, the substrates W stored in the substrate storage container 1 are plate-shaped substrates having at least one corner W4 in a planar view (for example, substrates having an overall circular or elliptical shape are not considered to be stored items). The planar view shape of such substrates W is typically a polygon consisting of only multiple straight line segments without curved edges, and is typically a rectangle. The corner W4 does not have to be perfectly sharp. The corner W4 may be C-chamfered, as in the corner W41 shown in the lower left of Figure 5, or may be R-chamfered, as in the corner W42 shown in the lower right of Figure 5. Note that the C-chamfer of the corner W41 and the R-chamfer of the corner W42 are exaggerated. The corner W4 may be subjected to various deburring processes, such as light chamfering. The planar view shape of the substrate W may also have a partially curved (e.g., circular or elliptical) edge W5, as shown in Figure 11. In this embodiment, the shape of the substrate W in plan view is a rectangle (including a square) having four corners W4.

[0018] The substrate W is a thin substrate used in industry, such as a silicon wafer, a glass wafer, or a sapphire wafer. The substrate W may be cut from a circular shape in a plan view to a shape having at least one corner in a plan view. The substrate W may be mirror-finished and then further post-processed.

[0019] 1 to 4, the substrate storage container 1 is used as a container for storing substrates W and for storing, transporting, storing, shipping, etc. the substrates W by various means, and includes a container body 2, a lid 3, side substrate support portions 5, a rear substrate support portion 6 (see FIG. 3), and a front retainer 7 (see FIG. 4). The lid 3 includes the front retainer 7 (see FIG. 4).

[0020] The container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Side substrate support portions 5 are arranged in the portion of the wall portion 20 that forms the substrate storage space 27. The substrate storage space 27 can store a plurality of substrates W (substrates W are shown by two-dot chain lines in Figures 1 and 3).

[0021] The side substrate support portions 5 are provided on the wall portion 20 in pairs in the left-right direction D3 within the substrate storage space 27. The side substrate support portions 5 abut against the edges of the substrates W, thereby supporting the edges of the substrates W while arranging adjacent substrates W in parallel with a predetermined distance between them. In this embodiment, the side substrate support portions 5 can support two linear sides (edges) of a rectangular substrate W that are opposed to each other in the left-right direction D3.

[0022] The side substrate support parts 5 can be configured as follows: (1) when the container body opening 21 is not closed by the lid 3, the side substrate support parts 5 abut against the edges of the substrates W, thereby supporting the edges of the substrates W in a state in which adjacent substrates W are spaced apart from each other at a predetermined interval and arranged in parallel (the side substrate support parts 5 do not abut against the edges of the substrates W when the container body opening 21 is closed by the lid 3), or (2) whether the container body opening 21 is closed or not by the lid 3, the side substrate support parts 5 abut against the edges of the substrates W, thereby supporting the edges of the substrates W in a state in which adjacent substrates W are spaced apart from each other at a predetermined interval and arranged in parallel. The side substrate support parts 5 in this embodiment have the configuration (2).

[0023] The rear substrate support portion 6 is provided in the substrate storage space 27 so as to form a pair with the front retainer 7 (see FIG. 4) in the front-to-rear direction D1. When the container body opening 21 is closed by the lid 3, the rear substrate support portion 6 cooperates with the front retainer 7 to abut against the edges of the substrates W, thereby supporting the rear portions of the edges of the substrates W. In this embodiment, the rear substrate support portion 6 can support the edge of the rear side D12 of a rectangular substrate W.

[0024] 1 and 4 , the lid 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer 7 is provided on a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The front retainer 7 is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support portion 6 in the front-to-rear direction D1.

[0025] When the container body opening 21 is closed by the lid 3, the front retainer 7 can support the front portions of the edges of the substrates W by abutting against the edges of the substrates W. In this embodiment, it can support one linear side (edge) of the front side D11 of the rectangular substrate W. When the container body opening 21 is closed by the lid 3, the front retainer 7 supports the substrates W in cooperation with the rear substrate support part 6, thereby holding adjacent substrates W in a parallel arrangement with a predetermined distance between them.

[0026] The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, and alloys of these resins.

[0027] 1 to 3, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25 (left side wall), and a second side wall 26 (right side wall). The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally molded.

[0028] The first side wall 25 and the second side wall 26 face each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 face each other in the up-down direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22 and constitute an opening periphery 28 that forms the substantially rectangular container body opening 21.

[0029] The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the wall 20. The inner surfaces of the wall 20, i.e., the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded thereby. The container body opening 21 formed in the opening periphery 28 is in communication with the substrate storage space 27 surrounded by the wall 20 and formed inside the container body 2. The substrate storage space 27 can store, for example, 25 substrates W.

[0030] Latch engagement recesses 231A, 231B, 241A, and 241B are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28, and are recessed outward in the up-down direction D2 of the board storage space 27. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0031] A top flange 236 is fixed to the outer surface of the upper wall 23. The top flange 236 is a member that is hung on and suspended from the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automated wafer transport system), a PGV (wafer substrate transport vehicle), or the like.

[0032] Next, the side board support portions 5 and the rear board support portion 6 will be described in detail. The side board support portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are interior portions arranged in pairs in the left-right direction D3 within the board storage space 27. Specifically, as shown in Figures 6A to 9, the side board support portions 5 have a plate portion 51 and a plate support portion 52. The plate portion 51 and the plate support portion 52 are formed by integrally molding a resin material. The plate portion 51 is supported by the plate support portion 52.

[0033] The plate portions 51 are plate-shaped and extend in the D1-D3 plane and protrude inward in the lateral direction D3. A total of 50 plate portions 51 are provided, 25 on each of the first side walls 25 and the second side walls 26 in the vertical direction D2. Adjacent plate portions 51 are spaced apart from each other by 10 mm to 12 mm in the vertical direction D2 and arranged in a parallel positional relationship. One substrate W is placed between adjacent plate portions 51. Above the plate portion 51 located on the uppermost side D21, another plate-shaped member 59 (see FIGS. 6A and 6B) is arranged parallel to the plate portion 51. The plate-shaped member 59 serves as a guide for the substrate W inserted above the plate portion 51 located on the uppermost side D21.

[0034] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. The 50 plate portions 51 and the plate-like members 59 that serve as plate-like guides parallel to the plate portions 51 are positioned parallel to the D1-D3 plane. The top surfaces of the plate portions 51 are provided with a protrusion 511 and a protrusion 512 that is located behind the protrusion 511 on the rear side D12.

[0035] The convex portion 511 protrudes in the upward direction D21 and extends in the left-right direction D3, and the upper end of the convex portion 511 is inclined slightly downward in the downward direction D22 toward the center of the substrate storage space 27. This minimizes the contact area between the upper end of the convex portion 511 and the substrate W placed on the convex portion 511, thereby suppressing the generation of particles due to friction between the upper end of the convex portion 511 and the substrate W.

[0036] The protrusion 512 has a portion that protrudes in the upward direction D21 and extends in the left-right direction D3 to abut against the substrate W, and a plate-like portion that extends from that portion in the rearward direction D12. The substrate W supported by the plate portion 51 comes into contact only with the protruding ends of the protrusions 511, 512, and does not come into surface contact with the protrusions 511, 512.

[0037] The plate support portions 52 are plate-shaped and extend substantially along the D1-D2 plane. The plate support portions 52 have a predetermined length in the longitudinal direction of the plate portions 51 (front-rear direction D1) and are connected to the outer edges of the plate portions 51 in the lateral direction D3. That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the plate support portions 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the plate support portions 52 provided on the second side wall 26 side.

[0038] 3, 6A, 6B, and 9, the plate support portion 52 has a front fixing portion 56 on the front side D11 and a rear fixing portion 57 on the rear side D12. By engaging the front fixing portion 56 with the wall fixing portions 201 of the first side wall 25 and the second side wall 26 and by engaging the rear fixing portion 57 with the wall fixing portions 202 of the first side wall 25 and the second side wall 26, the left and right side board support portions 5 are fixed to the first side wall 25 and the second side wall 26, respectively.

[0039] The lateral substrate support portions 5 are capable of supporting the edges of the plurality of substrates W while keeping adjacent substrates W among the plurality of substrates W spaced apart at a predetermined interval and parallel to each other.

[0040] As shown in Figure 3, the rear-side board support parts 6 are arranged in the board storage space 27. A pair of rear-side board support parts 6 are provided spaced apart in the left-right direction D3. The pair of rear-side board support parts 6 are configured by being integrally molded with the plate parts 51 and plate support parts 52 at the rear ends of the plate parts 51 of the side board support parts 5 on both the left and right sides. Therefore, the side board support parts 5 and the rear-side board support part 6 configure a single combined interior part that is fixed to the container body 2 inside the container body 2.

[0041] A pair of rear substrate support parts 6 are provided in the left-right direction D3, the number of which corresponds to each substrate W that can be stored in the substrate storage space 27, specifically 25 on each side, for a total of 50. The rear substrate support parts 6 are positioned in a paired relationship with the front retainer 7 in the front-rear direction D1. The rear substrate support parts 6 are capable of supporting the edges of multiple substrates W.

[0042] Next, the lid 3 and the front retainer 7 will be described in detail. As shown in FIGS. 1 and 4 , the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and when the lid 3 is attached to the opening periphery 28, the lid 3 can close the container body opening 21. An annular sealing member 4 is attached to a portion of the lid 3 that faces a surface (sealing surface) of a step formed at a position D12 immediately behind the opening periphery 28 when the lid 3 closes the container body opening 21. The sealing member 4 is made of various thermoplastic elastomers, such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. The sealing member 4 is arranged around the outer periphery of the lid 3.

[0043] When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, so that the lid 3 hermetically closes the container body opening 21. By removing the lid 3 from the opening periphery 28, it becomes possible to load and unload the substrates W into and from the substrate storage space 27 inside the container body 2.

[0044] The lid 3 has a lid body 30 that forms the outer shape of the lid body 3, and a latch mechanism is provided on the lid body body 30. The latch mechanism is provided near both left and right ends of the lid body body 30, and includes two upper latch portions 32A that can protrude in an upward direction D21 from the upper edge of the lid body body 30, and two lower latch portions 32B that can protrude in a downward direction D22 from the lower edge of the lid body body 30. The two upper latch portions 32A are located near both left and right ends of the upper edge of the lid body body 30, and the two lower latch portions 32B are located near both left and right ends of the lower edge of the lid body body 30.

[0045] An operating unit is provided on the outer surface of the lid body main body 30. By operating the operating unit from the front side of the lid body main body 30, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid body main body 30, respectively, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body main body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body main body 30 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid body 3 to the opening peripheral edge 28 of the container body 2.

[0046] A recess 34 is formed on the inside (rear side D12) of the lid body 30, recessed toward the outside (front side D11) of the board storage space 27. The front retainer 7 is fixed to the recess 34.

[0047] When the container body opening 21 is closed by the lid 3, the front retainer 7 is positioned in the part of the lid 3 facing the substrate storage space 27 and can support the edges of multiple substrates W.

[0048] The front retainer 7 has receiving portions 73. The receiving portions 73 are arranged in pairs, two apart at a predetermined interval in the left-right direction D3. The receiving portions 73 arranged in pairs in this manner are arranged in 25 pairs in parallel in the up-down direction D2, and each is supported by an elastically deformable leg portion 72. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the elastic force of the legs 72 causes the receiving portions 73 to clamp and support the edge of the substrate W while biasing it toward the center of the substrate storage space 27.

[0049] The receiving portion 73 has a lower inclined surface and an upper inclined surface, which form a substantially V-shaped groove. When the container body opening 21 is closed with the lid 3, the substrate W slides up against the lower inclined surface, and when the substrate W reaches the apex of the V-shaped groove, the edge of the substrate W is supported by the receiving portion 73.

[0050] Next, the openings 53 and non-openings 54 arranged between adjacent plate portions 51, 51 in the vertical direction D2 in the plate portion support portion 52 will be described in detail with reference to Figures 7 to 9. As shown in Figures 7 to 9, the plate portion support portion 52 has openings 53 that open in a direction intersecting the vertical direction D2 in which the multiple plate portions 51 are arranged side by side, and non-openings 54 that are arranged at least between the plate portions 51 and the openings 53 in the vertical direction D2.

[0051] The non-opening portion 54 is a non-opening portion of the plate portion support portion 52 that is disposed between the plate portions 51, 51 adjacent to each other in the up-down direction D2.

[0052] The opening 53 has a shape that allows a corner W4 of a substrate W placed between adjacent plate portions 51, 51 in the vertical direction D2 to be inserted therethrough. When the opening 53 has such a shape, the opening area of ​​the opening 53 can be set large, thereby improving the cleanability and drying properties of the side substrate support portions 5 when the side substrate support portions 5 are cleaned while assembled to the container body 2. In order for the corner W4 of the substrate W to be able to be inserted through the opening 53, it is basically necessary that at least the height H53 (in the vertical direction D2) of the opening 53 is greater than the thickness HW of the substrate W (see FIG. 8 ).

[0053] In this embodiment, the opening 53 has a long groove shape that penetrates the plate support portion 52 in the left-right direction D3 and extends in the front-rear direction D1. The opening direction of the opening 53 is not limited as long as it is a direction that intersects with the up-down direction D2.

[0054] The non-opening portion 54 has a height, on the upper side D21 and / or lower side D22 of the opening portion 53, that restricts the movement of the substrate W that has abutted against the non-opening portion 54. In this embodiment, the non-opening portion 54 has a height, on the upper side D21 and lower side D22 of the opening portion 53, that restricts the movement of the substrate W that has abutted against the non-opening portion 54. The "height that restricts the movement of the substrate W that has abutted against the non-opening portion 54" is preferably greater than the thickness HW of the substrate W, but may be smaller than the thickness HW of the substrate W as long as it can restrict the movement of the substrate W. The height that is smaller than the thickness HW of the substrate W is, for example, 0.3 mm or less.

[0055] As shown in FIG. 7, at the position where the opening 53 is arranged, the plate portion 51, the non-opening portion 54, the opening 53, the non-opening portion 54, and the plate portion 51 are arranged in this order in the vertical direction D2.

[0056] The height H542 of the non-opening portion 54 (542) located on the lower side D22 of the opening portion 53 is preferably 1.0 mm or more, and more preferably 0.5 mm or more. The height H541 of the non-opening portion 54 (541) located on the upper side D21 of the opening portion 53 is preferably 1.0 mm or more, and more preferably 0.5 mm or more.

[0057] The substrate storage container 1 according to one embodiment can provide the following effects: The substrate storage container 1 according to this embodiment is a substrate storage container 1 for storing plate-shaped substrates W having at least one corner W4 in a plan view, and includes a substrate storage space 27 formed therein that can store a plurality of substrates W in parallel, a container body 2 having an opening periphery 28 at one end where a container body opening 21 communicating with the substrate storage space 27 is formed, and the other end is closed, and a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21, and is arranged in a pair within the substrate storage space 27, and multiple and lateral substrate support portions 5 capable of supporting the edges of a plurality of substrates W while arranging adjacent substrates W in parallel with a predetermined distance apart from one another, the lateral substrate support portions 5 having a plurality of plate portions 51 arranged between adjacent substrates W and plate support portions 52 supporting the plate portions 51, the plate support portions 52 having openings 53 opening in a direction intersecting the vertical direction D2 in which the plurality of plate portions 51 are arranged in parallel, and non-opening portions 54 arranged at least between the plate portions 51 and the openings 53 in the vertical direction D2.

[0058] According to the substrate storage container 1 of this embodiment, the plate support portions 52 have openings 53 as well as non-openings 54 between multiple plate portions 51 adjacent in the up-down direction D2. This improves the cleanability and drying properties of the side substrate support portions 5 when the side substrate support portions 5 are cleaned while assembled to the container body 2 in a substrate storage container 1 for plate-shaped substrates W having corners W4 in a planar view. Furthermore, because the plate support portions 52 have non-openings 54 between multiple adjacent plate portions 51, when a plate-shaped substrate W having corners W4 is inserted and positioned between a pair of side substrate support portions 5, the corners W4 of the substrate W are prevented from getting caught on or penetrating the openings 53. This reduces damage to the substrate W (particularly damage to the corners W4).

[0059] Furthermore, the non-opening 54 has a height at the upper side D21 and / or lower side D22 of the opening 53 that restricts the movement of the substrate W that has struck the non-opening 54. In particular, the non-opening 54 has a height H541 of the non-opening 54 (541) located on the upper side D21 of the opening 53 and a height H542 of the non-opening 54 (542) located on the lower side D22 of the opening 53, as heights that restrict the movement of the substrate W that has struck the non-opening 54 at the upper side D21 and lower side D22 of the opening 53. Therefore, the corner W4 of the substrate W is less likely to enter the opening 53.

[0060] The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope defined in the claims.

[0061] For example, in the above embodiment, as shown in Fig. 7, the plate portion 51, the non-opening portion 54, the opening portion 53, the non-opening portion 54, and the plate portion 51 are arranged in this order in the vertical direction D2 at the position where the opening portion 53 is disposed, but this is not limiting. For example, as shown in Fig. 10, the non-opening portion 54 (541) may not be provided on the upper side D21 of the opening portion 53, and the plate portion 51 may be adjacent to the upper side D21 of the opening portion 53.

[0062] The rear-side substrate support portion 6 may be configured separately from the side substrate support portions 5 (the plate portions 51 thereof) and may constitute a single interior component that is fixed to the container body 2 inside the container body 2. The rear-side substrate support portion 6 may be configured by being molded integrally with the container body 2.

[0063] REFERENCE SIGNS LIST 1 substrate storage container 2 container body 21 container body opening 27 substrate storage space 28 opening periphery 3 lid 5 lateral substrate support portion 51 plate portion 52 plate portion support portion 53 opening portion 54 non-opening portion D2 vertical direction W substrate W4 corner portion

Claims

1. A substrate storage container for storing a plate-shaped substrate having at least one corner portion in a plan view, wherein a substrate storage space capable of storing a plurality of the substrates in parallel is formed inside, and an opening peripheral portion having a container body opening communicating with the substrate storage space is formed at one end portion, and the other end portion is closed. A container body, a lid that is detachable from the container body opening and can close the container body opening, and a plurality of the substrates are arranged in pairs in the substrate storage space, and the edges of the plurality of substrates are supported in a state where adjacent substrates among the plurality of substrates are spaced apart at a predetermined interval and arranged in parallel. A side substrate support portion, the side substrate support portion having a plurality of plate portions disposed between adjacent substrates and a plate portion support portion for supporting the plate portions, the plate portion support portion having an opening that opens in a direction intersecting the vertical direction, which is the direction in which the plurality of plate portions are arranged in parallel, and at least a non-opening portion disposed between the plate portion and the opening in the vertical direction. A substrate storage container.

2. The substrate storage container according to claim 1, wherein the non-opening portion has a height that restricts movement of the substrate that abuts against the non-opening portion above and / or below the opening.

3. The substrate storage container according to claim 1 or 2, wherein the opening has a shape through which a corner portion of the substrate disposed between adjacent plate portions can be inserted.

4. The substrate storage container according to any one of claims 1 to 3, wherein the height of the non-opening portion located below the opening is 0.5 mm or more.

5. The substrate storage container according to any one of claims 1 to 4, wherein the height of the non-opening portion located above the opening is 0.5 mm or more.

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