Cover plate, module and electronic device

By setting up a multi-layer optical enhancement layer and super hard layer on the glass cover, the problem of conflict between high hardness and high transmittance in electronic equipment is solved, and the balance of high hardness and high transmittance is achieved.

WO2025112846A1PCT designated stage expired Publication Date: 2025-06-05HUAWEI TECH CO LTD
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Patent Information

Application Number
PCT/CN2024/120738
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-11-27
Filing Date
2024-09-24
Publication Date
2025-06-05

AI Technical Summary

Technical Problem

When glass is used in electronic devices, high hardness and high transmittance conflict, resulting in a decrease in transmittance when the hardness increases, affecting the display clarity and touch experience.

Method used

By providing a multi-layer first optically induced emissive layer and superhard layer on the transparent substrate surface of the glass cover plate, the transmittance and hardness of the cover plate are improved by using sub-induced emissive layer and superhard layer materials of different refractive indices.

Benefits of technology

It achieves the improvement of the cover plate hardness and scratch resistance while ensuring the cover plate hardness and scratch resistance, and meets the dual demands of electronic equipment for high hardness and high transmittance.

✦ Generated by Eureka AI based on patent content.

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Abstract

A cover plate (300), a module and an electronic device. The cover plate (300) comprises a transparent substrate (310), wherein a primer layer (320), at least one first optical anti-reflection layer (330) and a superhard layer (340) are sequentially provided on a surface of one side of the transparent substrate (310); the first optical anti-reflection layer (330) comprises a first anti-reflection sub-layer (331) and a second anti-reflection sub-layer (332), the refractive index of the first anti-reflection sub-layer (331) being greater than the refractive index of the second anti-reflection sub-layer (332); the first anti-reflection sub-layer (331) has a first refractive index; and the second anti-reflection sub-layer (332) has a second refractive index, the first refractive index being different from the second refractive index. The cover plate (300) can improve the hardness and the transmittance.
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Description

Covers, modules and electronic equipment

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on November 27, 2023, with application number 202311613039.6 and application name “Cover, module and electronic device”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of glass technology, and in particular to a cover plate, a module and an electronic device. Background Art

[0003] Glass is an amorphous inorganic solid material primarily composed of silicate compounds. Due to its relatively high hardness and good transparency, we often use various glass products in our daily lives. These glass products are widely used in various industrial fields, such as electronics, optics, and construction.

[0004] Ordinary glass typically has a hardness of approximately 5.5-6 on the Mohs scale. Scratches can easily occur during daily use and production. This is especially true for demanding products, such as mobile phones, tablets, and televisions. Scratches on the display screens not only affect the appearance, but large scratches can also increase light scattering, resulting in reduced display clarity and brightness. Severe scratches can also affect the touch experience. Furthermore, scratches can reduce glass strength and, in severe cases, even lead to outright breakage, significantly impacting its usability. Increasing glass thickness to increase hardness can also reduce its transmittance.

[0005] Summary of the Invention

[0006] In view of this, the present application provides a cover plate, a module, and an electronic device to solve the conflict between high hardness and high transmittance of glass.

[0007] Some embodiments of the present application provide a cover plate. The present application is described below from multiple aspects, and the embodiments and beneficial effects of the following aspects can be referenced to each other.

[0008] In a first aspect, the present application provides a cover plate comprising a transparent substrate, wherein a base layer, at least one first optical anti-reflection layer and a super-hard layer are sequentially provided on the surface of one side of the transparent substrate; the first optical anti-reflection layer comprises a first sub-anti-reflection layer and a second sub-anti-reflection layer, the first sub-anti-reflection layer has a first refractive index, the second sub-anti-reflection layer has a second refractive index, and the first refractive index and the second refractive index are different.

[0009] The cover plate of the present invention employs a multi-layered first optical anti-reflection layer, wherein the two sub-anti-reflection layers within each first optical anti-reflection layer have different refractive indices. This structure effectively improves the transmittance of the cover plate. Furthermore, while the transmittance can be adjusted, increasing the thickness of the super-hard layer and combining it with the anti-reflection layer can also ensure good hardness. This improves both the hardness and scratch resistance of the cover plate and its transmittance.

[0010] As an embodiment of the first aspect, the first sub-antireflection layer is a compound containing silicon or aluminum, and the second sub-antireflection layer is a compound containing silicon or aluminum. This silicon and aluminum compound not only has a certain hardness, which can improve the hardness of the cover plate, but also has good transmittance.

[0011] As an embodiment of the first aspect, the first sub-antireflection layer or the second sub-antireflection layer comprises at least one of silicon nitride, aluminum nitride, silicon oxide, aluminum oxide, silicon oxynitride, and aluminum oxynitride. Such silicon and aluminum compounds have higher hardness and better transmittance.

[0012] As an embodiment of the first aspect, the first sub-antireflection layer of the first optical antireflection layer has a Vickers hardness greater than 1500 HV, and the second sub-antireflection layer has a Vickers hardness greater than 900 HV. The cover plate of this structure can achieve a transmittance of over 90% and a Mohs hardness of 7.

[0013] As an embodiment of the first aspect, a transition layer and a hydrophobic layer are provided on the surface of the superhard layer, wherein the transition layer is provided between the superhard layer and the hydrophobic layer and includes at least a nitride layer, the nitride layer being adjacent to the superhard layer. The nitride layer can isolate the hydrophobic layer from the superhard layer, and the nitride layer does not contain oxygen, thereby preventing CO bonds from forming with the superhard layer and reducing the hardness of the superhard layer.

[0014] As an embodiment of the first aspect, the transition layer also includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer. Because the silicon in the silicon oxide layer and the oxygen in the hydrophobic layer can generate Si-O bonds, the adhesive force of the hydrophobic layer can be improved, and the friction resistance of the hydrophobic layer can be effectively improved. The cover plate has an eraser wear resistance of more than 5000 times, and a steel wool wear resistance of more than 5000 times. Even have an eraser wear resistance of more than 10000 times, and a steel wool wear resistance of more than 10000 times.

[0015] As an embodiment of the first aspect, the nitride layer includes silicon nitride, aluminum nitride and silicon aluminum nitride, which not only has a certain degree of transparency but also has a high hardness.

[0016] As an embodiment of the first aspect, the thickness of the transition layer is between 1 nm and 20 nm. The transition layer of this thickness can isolate the hydrophobic layer and the superhard layer without affecting the hardness of the cover plate due to the transition layer being too thick.

[0017] As an embodiment of the first aspect, the cover plate further includes at least one second optical anti-reflection layer, the second optical anti-reflection layer including a third sub-anti-reflection layer, and the third sub-anti-reflection layer has a different refractive index from the adjacent first or second sub-anti-reflection layer. In this manner, transmittance can be improved by using not only an even number of sub-anti-reflection layers but also an odd number of sub-anti-reflection layers.

[0018] As an embodiment of the first aspect, the superhard layer includes at least one diamond-like carbon film layer, and the diamond-like carbon material has a relatively high hardness.

[0019] As an embodiment of the first aspect, the superhard layer contains at least one of amorphous carbon, tetrahedral amorphous carbon, hydrogen-doped amorphous carbon, non-metal-doped amorphous carbon and non-metal-doped tetrahedral amorphous carbon. These materials not only have high hardness but also have good transmittance.

[0020] As an embodiment of the first aspect, the thickness of the first optical anti-reflection layer is between 100 nm and 1000 nm. This thickness of the first optical anti-reflection layer can meet the user's transmittance requirements for the cover plate without significantly affecting the overall thickness of the cover plate.

[0021] As an embodiment of the first aspect, the thickness of the super-hard layer is between 5 nm and 50 nm, which not only meets the thickness requirement, but also satisfies the hardness requirement of the cover plate.

[0022] As an embodiment of the first aspect, the base layer comprises one or both of silicon oxide and silicon oxynitride, which has good hardness.

[0023] As an embodiment of the first aspect, the thickness of the base layer is between 2 nm and 30 nm, which provides good support for the entire cover plate and is also of moderate thickness.

[0024] As an embodiment of the first aspect, the transparent substrate is glass, transparent microcrystalline glass or transparent ceramic.

[0025] As an embodiment of the first aspect, the cover plate has an average transmittance greater than 88% under conditions where the visible light wavelength is 400-700 nm, and a transmittance greater than 88% under conditions where the visible light wavelength is 940 nm.

[0026] As an embodiment of the first aspect, the Mohs hardness of the cover plate is 7, and the load is 1000 g.

[0027] As an embodiment of the first aspect, the eraser of the cover plate can be abraded more than 5,000 times, and the steel wool can be abraded more than 5,000 times.

[0028] As an embodiment of the first aspect, the dynamic friction coefficient of the cover plate is less than 0.05.

[0029] As an embodiment of the first aspect, the difference between the first refractive index and the second refractive index is greater than 0.3. This difference can ensure that the cover plate has good transmittance when the sub-antireflection layer is relatively thin, which is conducive to controlling the overall thickness of the cover plate.

[0030] In a second aspect, the present application also discloses a cover plate comprising a transparent substrate, with a base layer, a superhard layer, a transition layer, and a hydrophobic layer sequentially disposed on one surface of the transparent substrate. The transition layer comprises at least a nitride layer, which is adjacent to the superhard layer. The nitride layer, located between the superhard layer and the hydrophobic layer, provides a good insulating effect, thereby protecting the superhard layer and stabilizing the overall hardness of the cover plate.

[0031] As an embodiment of the second aspect, the transition layer further includes a silicon oxide layer, and the silicon oxide layer is adjacent to the hydrophobic layer. This structure effectively improves the friction resistance of the cover plate.

[0032] In a third aspect, the present application further provides a module comprising the cover plate of the first or second embodiment, wherein the module is a display module or a camera module. The module according to the embodiment of the present application has good hardness, strong scratch resistance, and high transparency.

[0033] In a fourth aspect, the present application further discloses an electronic device, comprising the cover plate of the embodiment of the first aspect, or the cover plate of the embodiment of the second invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] FIG1 is a schematic structural diagram of a cover plate in some embodiments;

[0035] FIG2 is a schematic structural diagram of a cover plate in some other embodiments;

[0036] FIG3A is an application scenario of a cover plate according to an embodiment of the present application;

[0037] FIG3B is another application scenario of the cover plate according to the embodiment of the present application;

[0038] FIG4 is a schematic structural diagram of a cover plate according to an embodiment of the present application;

[0039] FIG5 is a schematic structural diagram of a cover plate corresponding to an optical anti-reflection layer having a two-layer structure according to an embodiment of the present application;

[0040] FIG6 is a schematic structural diagram of a cover plate with a transition layer according to an embodiment of the present application;

[0041] FIG7 is a schematic structural diagram of a cover plate in which the transition layer is a two-layer structure according to an embodiment of the present application;

[0042] FIG8 is another structural schematic diagram of a cover plate according to an embodiment of the present application;

[0043] FIG9 is a graph showing how the transmittance of the cover plate varies with wavelength in Example 1 of the present application;

[0044] FIG10 is a graph showing the variation of the transmittance of the cover plate with wavelength in Example 2 of the present application;

[0045] FIG11 is a graph showing how the transmittance of the cover plate varies with wavelength in Example 3 of the present application.

[0046] Reference numerals:

[0047] In some embodiments: cover plate 100; substrate 110; primer layer 120; diamond-like carbon film 130;

[0048] In some other embodiments: cover plate 200; substrate 210; base layer 220; tetrahedral amorphous carbon layer 230; nitride protective layer 240;

[0049] In the embodiment of the present application: a cover plate 300; a transparent substrate 310; a primer layer 320; an optical antireflection layer 330; a first sub-antireflection layer 331; a second sub-antireflection layer 332; a superhard layer 340; a transition layer 350; a silicon oxide layer 351; a nitride layer 352; and a hydrophobic layer 360. DETAILED DESCRIPTION

[0050] The following will provide a clear and complete description of the various embodiments of the present application in conjunction with the accompanying drawings.

[0051] In order to facilitate understanding of the technical solution of the present application, the technical problems to be solved by the embodiments of the present application are first described below in conjunction with some embodiments.

[0052] Referring to Figure 1, a schematic diagram of the cover plate structure of some embodiments is shown. As shown in Figure 1, the cover plate includes a substrate 110, a base layer 120 disposed on the surface of the substrate 110, and a diamond-like carbon film 130 disposed on the surface of the base layer 120. The substrate 110 may be glass or transparent ceramic, the base layer 120 primarily comprises a silicon dioxide (SiO2) layer, and the diamond-like carbon film 130 may be a single layer or multiple layers. The hardness of this cover plate 100 is relatively low, reaching a Mohs hardness of 6 but not 7.

[0053] Referring to Figure 2, Figure 2 shows a schematic structural diagram of the cover plate of some other embodiments. As shown in Figure 2, the cover plate 200 includes a substrate 210, a base layer 220 is provided on the surface of the substrate 210, and a tetrahedral amorphous carbon layer 230 (tetrahedral amorphous carbon, ta-C), which is a type of diamond-like carbon, is provided on the surface of the base layer 220. A nitride protective layer 240 is provided on the surface of the tetrahedral amorphous carbon layer 230, and the nitride protective layer 240 prevents the tetrahedral amorphous carbon from contacting with oxygen atoms, thereby reducing the hardness of the tetrahedral amorphous carbon and thereby increasing the hardness. However, the Mohs hardness of the cover plate 200 of this structure only reaches 7, and the load is 500g. In addition, the transmittance of this cover plate 200 is poor, and the transmittance can only reach 80-90%.

[0054] It should be noted that the cover plate in the above embodiment can be understood as ordinary glass or ceramic glass. For example, ordinary glass is specially treated on its surface through chemical or physical processes, such as depositing a SiO2 layer, a diamond-like layer, etc., and the resulting glass plate can also be understood as specially treated glass.

[0055] Since the hardness (Mohs hardness and Vickers hardness) of the cover plate of the above embodiment (such as the cover plate shown in Figures 1 and 2) is average and the transmittance is relatively low, the embodiment of the present application provides a cover plate to solve the problem of conflict between high hardness and high transmittance of the cover plate. The cover plate is added with an optical anti-reflection layer, which is used to offset the problem of reduced transmittance due to the thick thickness of the super-hard layer. Thus, while ensuring the overall hardness of the cover plate, the transmittance of the cover plate can be guaranteed, which effectively solves the problem of conflict between high hardness and high transmittance of the cover plate.

[0056] The cover plate of the embodiment of the present application can be applied to electronic devices, buildings, and other fields. The electronic devices may include, but are not limited to, tablet phones, foldable phones, tablet personal computers, e-book readers, laptop computers, personal digital assistants (PDAs), personal computers, notebook computers, in-vehicle devices, wearable devices (e.g., watches and bracelets), speakers, headphones, and other electronic devices.

[0057] In some scenarios, the cover plate of the embodiment of the present application can be applied to various components and modules of electronic devices. The following description will be given using mobile phones and watches as examples of electronic devices.

[0058] Referring to Figures 3A and 3B, Figure 3A shows an application scenario of the cover plate, and Figure 3B shows another application scenario of the cover plate of an embodiment of the present application. As shown in Figure 3A, the cover plate can be applied to a mobile phone 10 as part of the display screen 11, part of the camera module, or the camera back cover 12. It can also be used as the back cover of the mobile phone (also called the battery cover), or part of the button 14, or the side wall protective shell 15. In addition, it can also be used as the cover plate 21 or display screen of the dial of the watch 20 as shown in Figure 3B. In some embodiments, it can also be applied to other devices or fields, which are no longer listed one by one in the embodiments of the present application.

[0059] The cover plate of the embodiment of the present application is described below with reference to the accompanying drawings.

[0060] With reference to Figure 4, Figure 4 shows a schematic structural diagram of a cover plate of an embodiment of the present application. As shown in Figure 4, the cover plate 300 includes a transparent substrate 310, and a base layer 320, at least one optical anti-reflection layer 330 (first optical anti-reflection layer) and a super-hard layer 340 sequentially arranged on the surface of the transparent substrate. Among them, the optical anti-reflection layer 330 can improve the transmittance of the cover plate, and the super-hard layer 340 can improve the hardness of the cover plate 300. Since the hardness of the cover plate 300 is closely related to the thickness of the super-hard layer 340, increasing the thickness of the super-hard layer 340 helps to improve the hardness of the cover plate 300. However, when the thickness of the super-hard layer 340 increases, the overall transmittance of the cover plate 300 is reduced. Therefore, when the thickness of the super-hard layer 340 is increased in order to improve the hardness of the cover plate 300, the transmittance of the cover plate 300 can be effectively improved by providing a multi-layer optical anti-reflection layer 330. In addition, as the number of optical anti-reflection layers 330 increases, the thickness of the super-hard layer 340 can be increased, thereby improving both the transmittance and the hardness of the cover plate 300 .

[0061] It should be noted that, in the actual process of preparing the cover plate 300, the number of optical anti-reflection layers 330 can be reasonably set according to the actual requirements for the transmittance and hardness of the cover plate, and the thickness of the super-hard layer 340 can be set to a reasonable level. In the embodiments of the present application, there is no limitation on the thickness of the super-hard layer and the number of optical anti-reflection layers.

[0062] In an embodiment of the present application, each optical transmittance-enhancing layer 330 can be subdivided into a two-layer structure, and the refractive indices of the two-layer structure are different. The principle that the refraction angle and direction of light in materials with different refractive indices change can offset the dark parts between the layers, thereby improving the transmittance. In this way, the difference in refractive indices between layers can be used to increase the transmittance of the cover plate 300 as much as possible under limited thickness.

[0063] Reference is now made to Figure 5, which shows a schematic structural diagram of the cover plate corresponding to the optical anti-reflection layer with a two-layer structure in an embodiment of the present application. As shown in Figure 5, the cover plate 300 includes a transparent substrate 310, a base layer 320, an optical anti-reflection layer 330 and an ultra-hard layer 340. Among them, the transparent substrate 310 can be ordinary glass or transparent ceramics, and the base layer can be deposited on the surface of the transparent substrate by a deposition process, so as to better protect the ordinary glass and facilitate the deposition of other layers. The optical anti-reflection layer is used to improve the transmittance of the cover plate, so that the transmittance of the entire cover plate is greatly improved. The ultra-hard layer 340 is used to increase the hardness of the cover plate 300. The structure, component composition and working principle of each layer are explained below in conjunction with the accompanying drawings.

[0064] As shown in FIG5 , the optical anti-reflection layer 330 may include a first anti-reflection sub-layer 331 and a second anti-reflection sub-layer 332. The first anti-reflection sub-layer 331 and the second anti-reflection sub-layer 332 serve as components of the optical anti-reflection layer. The refractive index (first refractive index) of the first anti-reflection sub-layer 331 is greater than the refractive index (second refractive index) of the second anti-reflection sub-layer 332, or the refractive index of the first anti-reflection sub-layer 331 is less than the refractive index of the second anti-reflection sub-layer 332. This combination of high and low refractive indices forms a layer structure that enables the optical anti-reflection layer to have better transmittance.

[0065] In addition, the first sub-antireflection layer 331 may include silicon or aluminum nitride, and the second sub-antireflection layer 332 may include silicon or aluminum oxide or oxynitride. Alternatively, the first sub-antireflection layer 331 may include silicon or aluminum oxide, and the second sub-antireflection layer 332 may include silicon or aluminum nitride. Because the refractive index of the silicon or aluminum nitride layer is higher than the refractive index of the silicon or aluminum oxide or oxynitride layer, and the silicon and aluminum compound has a certain hardness, the cover plate with such a structure has both good transmittance and high hardness.

[0066] In one embodiment of the present application, the difference between the first refractive index and the second refractive index is greater than 0.3. This difference value can satisfy the requirement that the cover plate has good transmittance when the sub-anti-reflection layer is relatively thin, which is conducive to controlling the overall thickness of the cover plate.

[0067] In one embodiment of the present application, the first anti-reflection layer may be silicon nitride, aluminum nitride, or silicon oxynitride, and the second sub-anti-reflection layer may be silicon oxide, aluminum oxide, silicon oxynitride, or aluminum oxynitride. The optical anti-reflection layer 330 may include a two-layer or multi-layer structure of silicon nitride and silicon oxide, or a two-layer or multi-layer structure of silicon nitride and silicon oxynitride, or a two-layer or multi-layer structure of silicon nitride and aluminum oxide, etc. Thus, multiple optical anti-reflection layers with different transmittances are formed. The optical anti-reflection layer obtained by combining two materials with different transmittances has better transmittance and higher hardness.

[0068] In an embodiment of the present application, the Vickers hardness of the first sub-antireflection layer material of the first optical antireflection layer may be greater than 1500 HV, and the Vickers hardness of the second sub-antireflection layer material may be greater than 900 HV. Such materials are conducive to improving the overall hardness of the cover plate.

[0069] In some embodiments, the first optical anti-reflection layer 330 may be silicon oxide, and the second sub-anti-reflection layer 332 may be silicon nitride. In other embodiments, the first sub-anti-reflection layer 331 may also be silicon nitride, and the second sub-anti-reflection layer 332 may be silicon oxide. In addition, the first sub-anti-reflection layer 331 may also be one of aluminum nitride, aluminum oxide, silicon oxynitride, and aluminum oxynitride, and the corresponding second sub-anti-reflection layer 332 may be one of aluminum nitride, aluminum oxide, silicon oxynitride, and aluminum oxynitride, so as to make a reasonable selection to meet the different refractive indices.

[0070] This application does not limit the order of arrangement of the two. When the optical anti-reflection layer has a multi-layer structure, it is equivalent to alternating silicon oxide and silicon nitride to form an optical anti-reflection layer with two, three, four, or more layers. This can improve the transmittance of the optical anti-reflection layer through the principles of light refraction and interference. The specific principles can be referred to the explanation of the prior art and will not be further explained in this application.

[0071] In some embodiments, the cover plate may further include a single-layer optical anti-reflection layer (second optical anti-reflection layer) having a single-layer structure, which may include only one sub-anti-reflection layer (third sub-anti-reflection layer). The material of this sub-anti-reflection layer may be the same as that of the first sub-anti-reflection layer 331 and the second sub-anti-reflection layer 332, and may be arranged with other adjacent sub-anti-reflection layers to form a high and low refractive index arrangement to improve the transmittance of the optical anti-reflection layer. This application does not impose a sole limitation on the odd or even number of layers in the overall layout of the optical anti-reflection layer.

[0072] In the embodiments of the present application, the thickness of the optical anti-reflection layer 330 can be set between 100 nm and 1000 nm, for example, 200 nm, 300 nm, 400 nm, 500 nm, 600 nm, 700 nm, 800 nm, or 900 nm. In some embodiments, the thickness of the optical anti-reflection layer 330 can be set between 200 nm and 500 nm, for example, 250 nm, 350 nm, or 450 nm. An optical anti-reflection layer 330 of such thickness can meet the user's requirements for the transmittance of the cover plate without significantly affecting the overall thickness of the cover plate 300.

[0073] In some embodiments of the present application, the superhard layer 340 may include at least one diamond-like film layer. The diamond-like film is a thin film with properties close to those of natural diamond. It has a hardness close to that of natural diamond and has a high light transmittance within a wide spectrum, which is beneficial to improving the hardness of the cover.

[0074] In an embodiment of the present application, the diamond-like carbon film layer may include at least one of amorphous carbon (α-C), tetrahedral amorphous carbon (ta-C), hydrogen-doped amorphous carbon (α-C:H), non-metal-doped amorphous carbon (α-C:X, X=Si, N, B), and non-metal-doped tetrahedral amorphous carbon. The superhard layer of these materials has a relatively high hardness.

[0075] It should be noted that, as shown in FIG5 , when the superhard layer 340 is a single layer, it can be any of the above-mentioned amorphous carbons. When the superhard layer 340 is multi-layered, it can be a superhard layer of a multi-layer structure obtained by stacking one of the above-mentioned amorphous carbons with another substance. For example, the superhard layer can be composed of a thin film layer formed by amorphous carbon (α-C), a tetrahedral amorphous carbon (ta-C) thin film layer, and a hydrogen-doped amorphous carbon (α-C:H) thin film layer. The specific number of layers is not limited in this application.

[0076] In embodiments of the present application, the thickness of the superhard layer 340 can be between 5 nm and 50 nm. For example, 10 nm, 20 nm, 30 nm, or 40 nm. In some embodiments, the thickness of the superhard layer 340 is between 5 nm and 20 nm. For example, 8 nm, 10 nm, 13 nm, 15 nm, or 18 nm. A superhard layer 340 of this thickness can meet the hardness requirements of the cover plate 300, for example, a Mohs hardness of 7 or higher, and a load of 1000 g or higher.

[0077] In the embodiment of the present application, the base layer 320 may include silicon oxide (SiO X ), such as SiO2, and one or both of silicon oxynitride (SiOxNy), such as SiON, etc.

[0078] In the embodiment of the present application, the thickness of the base layer 320 may be between 2 nm and 30 nm, which has a good supporting effect on the cover plate 300 as a whole and is also of moderate thickness.

[0079] In the embodiment of the present application, the transparent substrate 310 may be ordinary glass, transparent microcrystalline glass, transparent ceramics, or the like.

[0080] In some application scenarios, such as the display screens, cameras or back covers of mobile phones and computers, in order to improve the touch experience of the cover, a hydrophobic layer is usually provided on the outermost layer of the cover. The hydrophobic layer has strong hydrophobicity and functions such as anti-oil and anti-fingerprint, which can improve the user experience. However, in some solutions, a silicon oxide transition layer and a hydrophobic layer are directly provided on the surface of the diamond-like material, which will cause the hardness of the diamond-like material to decrease, thereby reducing the hardness of the entire cover. Without wishing to be limited by any particular theory, the diamond-like film layer will oxidize at high temperatures, affecting its performance. Similarly, if an oxide layer is directly deposited on an adjacent layer of the diamond-like film layer, when experiencing some high-temperature scenarios, the oxygen in the oxide layer will also diffuse into the diamond-like layer, causing the diamond-like film layer to oxidize, resulting in a decrease in its performance, and thus affecting the overall hardness of the cover.

[0081] To further mitigate the impact of the hydrophobic layer on the hardness of the entire cover plate, in an embodiment of the present application, a transition layer is further provided between the superhard layer (such as superhard layer 340 in Figure 4) and the hydrophobic layer. The transition layer isolates the oxide layer from direct contact with the superhard layer, thereby preventing the superhard layer from reacting with oxygen and causing a decrease in the hardness of the superhard layer. The cover plate of the embodiment of the present application is further described in detail below in conjunction with the specific structure of the cover plate.

[0082] Referring to Figure 6, Figure 6 shows a schematic structural diagram of a cover plate with a transition layer according to an embodiment of the present application. As shown in Figure 6, the cover plate 300 includes a transparent substrate 310, a base layer 320, an optically anti-reflective layer 330 and a super-hard layer 340, as well as a transition layer 350 and a hydrophobic layer 360 arranged on the surface of the super-hard layer 340, wherein the transition layer 350 is arranged between the super-hard layer 340 and the hydrophobic layer 360. Among them, the transition layer 350 includes at least a nitride layer. Since the nitride layer does not contain oxygen elements, it will not produce a CO bond with the super-hard layer to reduce the hardness of the super-hard layer. The nitride layer plays a good insulating role between the super-hard layer and the hydrophobic layer, which is beneficial to protecting the super-hard layer and stabilizing the hardness of the cover plate as a whole.

[0083] It should be noted that the transparent substrate 310, base layer 320, optical anti-reflection layer 330 and super-hard layer 340 in the cover plate described in FIG6 have the same structure, component composition and function as those in the cover plate in FIG4 and will not be repeated here.

[0084] Referring to FIG7 , FIG7 shows a schematic structural diagram of a cover plate in which the transition layer of an embodiment of the present application is a two-layer structure. As shown in FIG7 , the transition layer 350 includes a silicon oxide layer 351 and a nitride layer 352. The nitride layer 352 is disposed adjacent to the superhard layer 340, and the silicon oxide layer 351 is disposed adjacent to the hydrophobic layer 360. Since the silicon in the silicon oxide layer 351 and the oxygen in the hydrophobic layer 360 form Si-O bonds, the adhesion of the hydrophobic layer is increased, effectively improving the friction resistance of the hydrophobic layer 360. This results in the cover plate 300 having a wear resistance of more than 5,000 times that of an eraser or more than 5,000 times that of steel wool. The wear resistance can even be as good as that of more than 10,000 times that of an eraser or more than 10,000 times that of steel wool.

[0085] For comparison, in some examples, we deposited only silicon oxide as a transition layer as a comparative solution. This solution exhibited good initial hardness and wear resistance, but after certain environmental tests, such as high-temperature and high-humidity testing for 10 days, both hardness and wear resistance decreased significantly. In contrast, the embodiment in which the transition layer included both a nitride layer and a silicon oxide layer showed no performance degradation. See the comparative example below for details.

[0086] In some embodiments, the nitride layer 352 includes silicon nitride, aluminum nitride, and silicon aluminum nitride. Such a transition layer 350 can not only protect the super-hard layer 340 but also has a high hardness itself, thereby avoiding affecting the overall hardness of the cover plate.

[0087] Because the thickness of the transition layer 350 cannot be too thick, as this would affect the overall hardness of the cover plate 300, in some embodiments, the thickness of the transition layer 350 can be between 1 nm and 20 nm. For example, 3 nm, 5 nm, 8 nm, 10 nm, 13 nm, 15 nm, or 18 nm. In some embodiments, the thickness of the transition layer 350 is between 2 nm and 5 nm. For example, 2.5 nm, 3 nm, 3.5 nm, 4 nm, or 4.5 nm. A transition layer 350 of this thickness serves to isolate the hydrophobic layer 360 and the superhard layer 340 while preventing the hardness of the cover plate from being affected by excessive thickness of the transition layer 350.

[0088] In some embodiments, the thickness of the hydrophobic layer 360 can be 10-50 nm, for example, 15 nm, 20 nm, 25 nm, 30 nm, 35 nm, 40 nm, or 45 nm. Preferably, the thickness of the hydrophobic layer 360 is 20-40 nm, for example, 22 nm, 24 nm, 26 nm, or 28 nm. This thickness can provide a good hydrophobic effect, and after being abraded with steel wool for more than 10,000 times, the friction angle of the water droplet can still be greater than 100°.

[0089] The cover plate 300 of the embodiment of the present application has an average transmittance greater than 88% under visible light wavelengths of 400-700nm, and a transmittance greater than 88% under visible light wavelengths of 940nm. Hardness test: The Mohs hardness of the cover plate is 7, and the load is 1000g. Friction resistance test: The cover plate 300 can withstand more than 10,000 eraser abrasions and more than 10,000 steel wool abrasions, with a water drop angle greater than 100°. Dynamic friction coefficient test: The dynamic friction coefficient of the cover plate 300 is less than 0.05, and even less than 0.03.

[0090] Referring to FIG8 , FIG8 shows another schematic structural diagram of a cover plate according to an embodiment of the present application. Compared with FIG6 , this cover plate does not have an optical anti-reflection layer (such as the optical anti-reflection layer 330 in FIG6 ). As shown in FIG8 , the cover plate 300 includes a transparent substrate 310, and a base layer 320, an ultra-hard layer 340, a transition layer 350, and a hydrophobic layer 360 sequentially arranged on the surface of the transparent substrate 310. Among them, the structures and components of the transparent substrate 310, the base layer 320, the ultra-hard layer 340, the transition layer 350, and the hydrophobic layer 360 correspond to the layers described in FIG6 . For details, please refer to the description of the corresponding layers in FIG6 , which will not be repeated here.

[0091] Since the cover plate 300 of the embodiment of the present application has a transition layer 350 disposed between the hydrophobic layer 360 and the super-hard layer 340 , the super-hard layer 340 can be better protected, which is beneficial to improving the hardness of the cover plate 300 .

[0092] 6 , when the transition layer 350 is configured as a two-layer structure, the friction resistance test results of the cover plate 300 are as follows: the eraser wear resistance of the cover plate reaches more than 10,000 times, the steel wool wear resistance reaches more than 10,000 times, and the friction angle of water droplets is greater than 100°.

[0093] The cover plate and the preparation method of the embodiment of the present application are further described below with reference to specific embodiments.

[0094] The following first describes the test methods used in each embodiment:

[0095] Hardness test method: Use a Mohs hardness pen and an automatic hardness tester, apply a certain load, a loading angle of 45°, a moving speed of 4-6mm / s, and a scratch length of 6-7cm. After the test, observe the cover visually or with a microscope at 100 times magnification to see if there are any scratches.

[0096] Friction resistance test method: Use an eraser (6mm diameter) or #0000 steel wool (indenter area 10*10mm), a load of 1000g, a speed of 40cycle / min, and a test stroke of 40mm. After a certain number of reciprocating tests on the coated surface of the cover, measure the water drop angle using a water drop angle tester.

[0097] Test method for dynamic friction coefficient: Use the MXD-02 test instrument, 200g load, and fix the test sample. After the instrument is started, record the data generated by the movement of the loaded solid.

[0098] Example 1:

[0099] 1) Use transparent microcrystalline glass as the substrate. Place the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine is evacuated to 5E-3Pa, use an ion source to further clean the substrate surface. The ion source power is 1-2kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning. The cleaning time is 10-30 minutes.

[0100] 2) Using a high-purity Si target as the target material, argon as the sputtering gas, O2 and N2 as the reaction gases, the bottom layer SiO2 and the multi-layer optical anti-reflection layer SiN and SiO2 are deposited by reactive sputtering.

[0101] 3) Next, a superhard C layer is deposited using a high-purity graphite target as the target material, argon as the sputtering gas, and N2 as the reaction gas.

[0102] 4) Then, Si3N4 and SiO2 transition layers are deposited.

[0103] 5) Finally, a hydrophobic layer is deposited by evaporation to obtain the cover plate S1.

[0104] In a comparative example, only the SiO2 layer was deposited during the transition layer deposition corresponding to Example 1, and the preparation process of the remaining layers was the same as that of Example 1, to obtain a cover plate sample R1.

[0105] The thickness of each layer in the cover plate S1 and the cover plate R1 is set as shown in Table 1:

[0106] Table 1 Composition and thickness of each layer corresponding to sample S1

[0107] Cover S1 and cover R1 were tested, and the test results were as follows:

[0108] Referring to Figure 9, which shows a graph of the transmittance of the cover S1 of the present application as a function of wavelength, the average transmittance of the cover S1 is 94.3% at a wavelength of 400-700 nm and 91.3% at 940 nm.

[0109] First, the initial performance of cover plate S1 and cover plate R1 was tested.

[0110] The initial hardness data of the cover plate S1 and the cover plate R1 measured using the above hardness test method are: Mohs hardness of 7, load of 1000g.

[0111] The friction resistance data of cover panels S1 and R1 measured using the aforementioned friction resistance test method showed that after 10,000 rubber rubs, the water drop angle was greater than 100°, and after 10,000 steel wool rubs, the water drop angle was greater than 100°. The dynamic friction coefficient of cover panel S1 measured using the aforementioned dynamic friction coefficient test method was 0.015-0.025.

[0112] Next, the cover S1 and the cover R1 were subjected to a temperature chamber test.

[0113] Cover plate S1 and cover plate R1 were placed in a temperature chamber with a humidity of 85°C and a temperature of 85°C for 10 days and then taken out to measure the performance of cover plate S1 and cover plate R1 again. Cover plate S1 can maintain its initial hardness and wear resistance, but the hardness of cover plate R1 drops to Mohs hardness 6, and the load is 750g. The eraser wear resistance and steel wool wear resistance can only pass 4000 times and 3000 times respectively. The hardness and friction resistance of cover plate R1 are obviously unstable. Therefore, the cover plate S1 in this embodiment has good hardness and friction resistance, and the hardness and wear resistance can still maintain the original measurement data after high temperature and high humidity testing. It is resistant to high temperature and high humidity and has stronger stability.

[0114] Example 2

[0115] Compared with Example 1, the main differences are: adjusting the thickness of the sub-anti-reflection layer in the optical anti-reflection layer, and increasing the number and thickness of the super-hard layer. The specific preparation process is as follows:

[0116] 1) Use transparent microcrystalline glass as the substrate. Place the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine is evacuated to 5E-3Pa, use an ion source to further clean the substrate surface. The ion source power is 1-2kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning. The cleaning time is 10-30 minutes.

[0117] 2) Using a high-purity Si target as the target material, argon as the sputtering gas, O2 and N2 as the reaction gases, the bottom layer SiO2 and the multi-layer optical anti-reflection layer Si3N4 and SiO2 are deposited by reactive sputtering.

[0118] 3) Then, a superhard C layer is deposited using a high-purity graphite target and a graphite-doped silicon target as target materials, argon as sputtering gas, and N2 as reaction gas.

[0119] 4) Then, Si3N4 and SiO2 transition layers are deposited.

[0120] 5) Finally, a hydrophobic layer is deposited by evaporation to obtain the cover plate S2.

[0121] The thickness of each layer in the cover plate S2 is set as shown in Table 2:

[0122] Table 2 Composition and thickness of each layer corresponding to cover plate S2

[0123] The cover S2 was tested and the test results were as follows:

[0124] Referring to Figure 10, which shows a graph of the transmittance of the cover plate S2 of the present application as a function of wavelength, the average transmittance of the cover plate S2 is 92.8% at a wavelength of 400-700 nm and 92.7% at 940 nm.

[0125] The hardness data of the cover plate S2 measured using the above hardness test method is: Mohs hardness is 7, and the load is 1200g.

[0126] The friction resistance data of the cover S2 measured using the above-mentioned friction resistance test method are as follows: after 10,000 times of rubber friction, the water drop angle is greater than 100°; after 10,000 times of steel wool friction, the water drop angle is greater than 100°.

[0127] The dynamic friction coefficient of the cover plate S2 measured by the above dynamic friction coefficient test method is 0.015-0.025.

[0128] This shows that, compared to cover S1 and cover S2, the increased thickness of the superhard layer improves the hardness data. Furthermore, even with the corresponding adjustment of the thickness of the optical antireflection layer, the transmittance remains high, with an average transmittance of 92.8% at wavelengths of 400-700nm and 91.3% at 940nm.

[0129] Example 3

[0130] Compared with Example 1 and Example 2, Example 3 mainly differs in that the thickness and number of the sub-anti-reflection layers in the optical anti-reflection layer are increased, and the thickness of the super-hard layer is increased.

[0131] 1) Use transparent microcrystalline glass as the substrate. Place the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine is evacuated to 5E-3Pa, use an ion source to further clean the substrate surface. The ion source power is 1-2kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning. The cleaning time is 10-30 minutes.

[0132] 2) Using a high-purity Si target as the target material, argon as the sputtering gas, O2 and N2 as the reaction gases, the bottom layer SiO2 and the multi-layer optical anti-reflection layer Si3N4 and SiO2 are deposited by reactive sputtering.

[0133] 3) Next, an ultra-hard C layer is deposited by filtered cathode vacuum arc technology.

[0134] 4) Then, Si3N4 and SiO2 transition layers are deposited by magnetron sputtering.

[0135] 5) Finally, a hydrophobic layer is deposited by evaporation to obtain the cover plate S3.

[0136] The thickness of each layer in the cover plate S3 is set as shown in Table 3:

[0137] Table 3 Composition and thickness of each layer corresponding to cover plate S3

[0138] The cover S3 was tested and the test results were as follows:

[0139] Referring to Figure 11, which shows a graph of the transmittance of the cover plate S3 of the present application as a function of wavelength, the average transmittance of the cover plate S3 is 91.5% at a wavelength of 400-700 nm and 89.9% at 940 nm.

[0140] The hardness data of the cover plate S3 measured using the above hardness test method is: Mohs hardness is 7, and the load is 1500g.

[0141] The friction resistance data of the cover S3 measured using the above-mentioned friction resistance test method are as follows: after 10,000 times of rubber friction, the water drop angle is greater than 100°; after 10,000 times of steel wool friction, the water drop angle is greater than 100°.

[0142] The dynamic friction coefficient of the cover plate S3 measured by the above dynamic friction coefficient test method is 0.015-0.025.

[0143] Combining Table 3 with the test results of the cover plate S3, it can be seen that when the thickness of the superhard layer increases, by increasing the number of optical anti-reflection layers, not only the hardness of the cover plate S3 is effectively improved, but also a high transmittance can be maintained.

[0144] Example 4

[0145] Compared with Example 1, the main difference between Example 4 is that the transition layer is set to a layer of Si3N4.

[0146] 1) Use transparent microcrystalline glass as the substrate. Place the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine is evacuated to 5E-3Pa, use an ion source to further clean the substrate surface. The ion source power is 1-2kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning. The cleaning time is 10-30 minutes.

[0147] 2) Using high-purity Si target as target material, argon as sputtering gas, O2 and N2 as reaction gases, the bottom layer SiO2 and multi-layer optical anti-reflection layer Si3N4 and SiON are deposited by reactive sputtering.

[0148] 3) Next, an ultra-hard C layer is deposited by filtered cathode vacuum arc technology.

[0149] 4) Then, a Si3N4 transition layer is deposited by magnetron sputtering.

[0150] 5) Finally, a hydrophobic layer is deposited by evaporation to obtain the cover plate S4.

[0151] The thickness of each layer in the cover plate S4 is set as shown in Table 4:

[0152] Table 4 Composition and thickness of each layer corresponding to cover plate S4

[0153] The cover S4 was tested and the test results were as follows:

[0154] The average transmittance of the cover plate S4 at a wavelength of 400-700 nm is 92.6%, and the transmittance at a wavelength of 940 nm is 90.4%.

[0155] The Mohs hardness of the cover plate S4 measured by the above hardness test method is 7, and the load is 1500g.

[0156] The cover S4 was tested using the above-mentioned friction resistance test method. After being rubbed with rubber 7500 times, the water drop angle was greater than 100°. After being rubbed with steel wool 7500 times, the water drop angle was greater than 100°.

[0157] The dynamic friction coefficient of the cover plate S4 measured by the above dynamic friction coefficient test method is 0.015-0.025.

[0158] Combining Table 4 with the test results for cover plate S4 shows that, when the transition layer consists solely of Si3N4, the friction resistance of cover plate S4 decreases slightly, but the hardness remains high. This slight decrease in friction resistance is because SiO2, compared to Si3N4, can better bond with the hydrophobic layer, thereby improving the bonding strength between the hydrophobic layer and the transition layer, resulting in better friction resistance.

[0159] Example 5

[0160] Compared with Example 4, Example 5 is mainly different in that the transition layer is replaced with AlN and the number of optical anti-reflection layers is increased.

[0161] 1) Use transparent microcrystalline glass as the substrate. Place the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine is evacuated to 5E-3Pa, use an ion source to further clean the substrate surface. The ion source power is 1-2kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning. The cleaning time is 10-30 minutes.

[0162] 2) Using high-purity Si and Al targets as target materials, argon as sputtering gas, O2 and N2 as reaction gases, the bottom layer SiO2 and the multi-layer optical anti-reflection layer AlN and Al2O3 are deposited by reactive sputtering.

[0163] 3) Next, an ultra-hard C layer is deposited by filtered cathode vacuum arc technology.

[0164] 4) Then, an AlN transition layer is deposited by magnetron sputtering.

[0165] 5) Finally, a hydrophobic layer is deposited by evaporation to obtain the cover plate S5.

[0166] The thickness of each layer in the cover plate S5 is set as shown in Table 5:

[0167] Table 5 Composition and thickness of each layer corresponding to cover plate S5

[0168] The cover S5 was tested and the test results were as follows:

[0169] The average transmittance of the cover S5 at a wavelength of 400-700 nm is 91.4%, and the transmittance at 940 nm is 91.6%.

[0170] The cover plate S5 has a Mohs hardness of 7 measured using the above hardness test method, with a load of 1500 g.

[0171] The cover S5 was tested using the above-mentioned friction resistance test method. After being rubbed with rubber 7500 times, the water drop angle was greater than 100°. After being rubbed with steel wool 7500 times, the water drop angle was greater than 100°.

[0172] The dynamic friction coefficient of the cover plate S5 measured by the above dynamic friction coefficient test method is 0.015-0.025.

[0173] Combining Table 5 with the test results of cover S5, we can see that after the transition layer is replaced with AlN, the hardness and friction resistance of cover S5 are comparable to those of cover S5, indicating that the transition layer can be made of aluminum-containing compounds or silicon-containing compounds, which can both keep the cover hardness high. In addition, the increase in the number of optical anti-reflection layers makes the transmittance at a wavelength of 940nm higher, reaching 91.6%.

[0174] In summary, the cover panels of the embodiments of the present application achieve an average transmittance exceeding 90.0% at wavelengths of 400-700nm, and a transmittance exceeding 90.0% at 940nm. They also have a Mohs hardness of 7 and can withstand a load of 1500g. Friction resistance data shows that after 10,000 rubbing cycles with rubber, the water drop angle is greater than 100°, and after 10,000 rubbing cycles with steel wool, the water drop angle is greater than 100°. This cover panel can meet users' high requirements for both transmittance and hardness.

[0175] In addition, some embodiments of the present application further disclose a module, which can be a display module or a camera module. The display screen or lens cover of these modules can include the cover illustrated in Figures 3 to 7 of the above embodiments. This module has high transmittance and hardness.

[0176] Some embodiments of the present application further disclose an electronic device, including the cover 300 illustrated in Figures 4-8 of the above embodiments. The electronic device may be a mobile phone or watch as shown in Figure 3, or other electronic devices such as a computer, tablet, vehicle-mounted device, or wristband. The present application does not limit the type of electronic device.

[0177] The specific structure and preparation method of the cover can be referred to the description of the above embodiment, which will not be repeated here. The electronic device has good filterability, mode hardness, etc.

[0178] It should be noted that the ratio of raw materials and the preparation process not mentioned above can all be referred to the existing technology and will not be described in detail here.

[0179] It should be understood that in the various embodiments of the present application, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. Some or all of the steps can be executed in parallel or sequentially. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0180] Although the present application has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the application.

Claims

1. A cover plate, characterized in that: It comprises a transparent substrate, on the surface of one side of which a primer layer, at least one first optical anti-reflection layer and a superhard layer are sequentially provided; The first optical anti-reflection layer includes a first sub-anti-reflection layer and a second sub-anti-reflection layer, the first sub-anti-reflection layer has a first refractive index, the second sub-anti-reflection layer has a second refractive index, and the first refractive index and the second refractive index are different.

2. The cover plate according to claim 1, characterized in that: The first anti-reflection sub-layer is a compound containing silicon or aluminum, and the second anti-reflection sub-layer is a compound containing silicon or aluminum.

3. The cover plate according to claim 1, characterized in that: The first anti-reflection sub-layer or the second anti-reflection sub-layer includes at least one of silicon nitride, aluminum nitride, silicon oxide, aluminum oxide, silicon oxynitride and aluminum oxynitride.

4. The cover plate according to any one of claims 1 to 3, characterized in that: The Vickers hardness of the material of the first sub-anti-reflection layer of the first optical anti-reflection layer is greater than 1500 HV, and the Vickers hardness of the material of the second sub-anti-reflection layer is greater than 900 HV.

5. The cover plate according to any one of claims 1 to 3, characterized in that: A transition layer and a hydrophobic layer are provided on the surface of the superhard layer, wherein the transition layer is provided between the superhard layer and the hydrophobic layer; The transition layer includes a nitride layer, and the nitride layer is adjacent to the superhard layer.

6. The cover plate according to claim 5, characterized in that: The transition layer further includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer.

7. The cover plate according to claim 5 or 6, characterized in that: The nitride layer includes silicon nitride, aluminum nitride, silicon aluminum nitride and aluminum oxynitride.

8. The cover plate according to claim 5, characterized in that: The thickness of the transition layer is between 1 nm and 20 nm.

9. The cover plate according to claim 5, characterized in that: The invention also includes at least one second optical anti-reflection layer, wherein the second optical anti-reflection layer includes a third sub-anti-reflection layer, and the refractive index of the third sub-anti-reflection layer is different from that of the first sub-anti-reflection layer or the second sub-anti-reflection layer adjacent to the third sub-anti-reflection layer.

10. The cover plate according to any one of claims 1 to 9, characterized in that: The superhard layer includes at least one diamond-like carbon film layer.

11. The cover plate according to claim 10, characterized in that: The superhard layer comprises at least one of amorphous carbon, tetrahedral amorphous carbon, hydrogen-doped amorphous carbon, non-metal-doped amorphous carbon and non-metal-doped tetrahedral amorphous carbon.

12. The cover plate according to claim 8, characterized in that: The thickness of the first optical anti-reflection layer is between 100 nm and 2000 nm.

13. The cover plate according to claim 8, characterized in that: The thickness of the superhard layer is between 5nm and 50nm.

14. The cover plate according to any one of claims 1 to 13, characterized in that: The primer layer includes one or both of silicon oxide and silicon oxynitride.

15. The cover plate according to any one of claims 1 to 14, characterized in that: The thickness of the primer layer is between 2nm and 30nm.

16. The cover plate according to any one of claims 1 to 15, characterized in that: The transparent substrate is glass, transparent microcrystalline glass or transparent ceramic.

17. The cover plate according to any one of claims 1 to 16, characterized in that: The average transmittance of the cover plate under the condition that the visible light wavelength is 400-700nm is greater than 88%, and the transmittance under the condition that the visible light wavelength is 940nm is greater than 88%.

18. The cover plate according to any one of claims 5 to 17, characterized in that: The Mohs hardness of the cover plate is 7, and the load is 1000 g.

19. The cover plate according to any one of claims 5 to 17, characterized in that: The eraser of the cover plate can withstand abrasion for more than 5,000 times, and the steel wool can withstand abrasion for more than 5,000 times.

20. The cover plate according to any one of claims 1 to 19, characterized in that: The dynamic friction coefficient of the cover plate is less than 0.

05.

21. The cover plate according to any one of claims 1 to 20, characterized in that: The difference between the first refractive index and the second refractive index is greater than 0.

3.

22. A cover plate, characterized in that: The invention comprises a transparent substrate, on the surface of one side of which a primer layer, a superhard layer, a transition layer and a hydrophobic layer are arranged in sequence, wherein the transition layer comprises a nitride layer, and the nitride layer is adjacent to the superhard layer.

23. The cover plate according to claim 22, characterized in that The transition layer further includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer.

24. A module, characterized in that: It comprises the cover plate according to any one of claims 1 to 21, or the cover plate according to claim 22 or 23, wherein the module is a display screen module or a camera module.

25. An electronic device, characterized in that: It comprises the cover plate according to any one of claims 1 to 21, or the cover plate according to claim 22 or 23.

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