Charged particle beam system and charged particle beam system operation method

Abstract

The present disclosure provides a charged particle beam system that quantifies the influence of vibration of at least one charged particle beam device on a feature amount of a sample obtained by the charged particle beam device in order to quantify the degree of influence on a feature amount of vibration, the charged particle beam system comprising a storage device that stores information obtained from the feature amount of the sample and a computer that executes processing for quantifying the influence of vibration on the feature amount, wherein the computer executes processing for acquiring a vibration-free image of the sample from at least one charged particle beam device, processing for generating a vibration-inclusive image of the sample on the basis of a desired vibration condition, processing for acquiring a feature amount of the vibration-free image, processing for acquiring a feature amount of the vibration-inclusive image, and processing for obtaining a difference value between the feature amount of the vibration-inclusive image and the feature amount of the vibration-free image and using the difference value as an index indicating the influence of the vibration on the feature amount (see fig. 2).

Description

Charged particle beam system and method for operating the charged particle beam system

[0001] The present disclosure relates to a charged particle beam system and a method of operating the charged particle beam system.

[0002] Charged particle beam devices such as scanning electron microscopes (SEMs) used for observing, inspecting, or measuring samples using electron beams accelerate electrons emitted from an electron source, and then focus and irradiate the sample surface using electrostatic or electromagnetic lenses. These electrons are called primary electrons.

[0003] When primary electrons are incident on the sample, secondary electrons are emitted (low-energy electrons are sometimes called secondary electrons, and high-energy electrons are sometimes called backscattered electrons). By detecting these secondary electrons while scanning with a deflected electron beam, it is possible to obtain scanned images of fine patterns and composition distribution on the sample. It is also possible to form an absorbed current image by detecting electrons absorbed by the sample.

[0004] Among charged particle beam devices, critical dimension-scanning electron microscopes (CD-SEMs) measure the dimensions of fine patterns on semiconductors and other devices from acquired images. These devices generate and execute operating programs (recipe) for each sample to be observed.

[0005] In this length-measuring SEM device, if the device vibrates or an external magnetic field is present around the primary electrons when acquiring an image, the sharpness of the acquired SEM image may decrease or image distortion may occur, making it difficult to stably measure the sample.

[0006] The vibrations and external magnetic fields described above are caused by disturbances that disrupt the relative deflection of the electron beam with respect to the sample when the device is installed in a poor external environment, or by magnetic fields and vibrations generated by the device itself when the installation conditions are poor.

[0007] Furthermore, it is desirable for the differences in measurement values ​​between multiple CD-SEM devices (machine errors) to be small, and efforts have been made to reduce machine errors to an acceptable range by adjusting hardware or software. As patterns in semiconductors and the like become increasingly finer, existing methods for reducing machine errors are approaching their limits, and it is desirable to minimize the effects of the above-mentioned vibrations as much as possible.

[0008] In order to reduce the influence of vibrations and magnetic fields, for example, Patent Document 1 discloses a method of performing one-dimensional scanning in the scanning line direction (X direction) by setting the scanning gain in the Y direction to zero when acquiring an SEM image, creating a two-dimensional image by chronologically arranging the image information obtained by the scanning in the Y direction, and measuring the magnetic field, vibration, etc. contained in the image by frequency analyzing the displacement amount data of the two-dimensional image using a correlation function. According to Patent Document 1, it becomes possible to measure vibrations with high accuracy.

[0009] JP 2012-151053 A

[0010] However, even with the technology disclosed in Patent Document 1, it is not possible to know the extent to which vibrations applied to a CD-SEM device affect image features (e.g., measurement values) (the degree of influence of vibrations on image features). The degree of influence of vibrations can only be estimated by comparing a state with and without vibration, and it is difficult to create a CD-SEM device in a vibration-free state. Reasons why it is difficult to create a CD-SEM device without vibration include the fact that vibrations are caused by a wide variety of factors, such as the device and the environment, and that countermeasures take time, that no countermeasures exist, or that the causes are unknown. Furthermore, there are a wide variety of pattern types to be measured by CD-SEM, and the degree of influence of vibrations, i.e., sensitivity, may vary depending on the pattern type.

[0011] As described above, since the impact of vibration on the feature values ​​cannot be quantified, it is difficult to determine whether or not countermeasures against vibrations applied to equipment are necessary. Therefore, the issue is how to quantify the impact of vibration on the feature values.

[0012] In view of these circumstances, the present disclosure provides a technology for quantifying the impact of vibration on feature quantities, and also provides an operation system that stores the quantified impact values ​​in a database and utilizes the database.

[0013] In order to solve the above problems, the present disclosure provides, as an example, a charged particle beam system that quantifies the effect of vibration of at least one charged particle beam device on feature quantities of a sample obtained by the device, the charged particle beam system including: a storage device that stores information obtained from the feature quantities of the sample; and a computer that executes processing to quantify the effect of vibration on the feature quantities, wherein the computer executes processing to acquire an image of the sample without vibration from the at least one charged particle beam device; a processing to generate an image of the sample with vibration based on desired vibration conditions; a processing to acquire the feature quantities of the image without vibration; a processing to acquire the feature quantities of the image with vibration; and a processing to calculate a difference value between the feature quantities of the image with vibration and the feature quantities of the image without vibration, and use the difference value as an index indicating the effect of vibration on the feature quantities.

[0014] Further features related to the present disclosure will become apparent from the description of this specification and the accompanying drawings. Also, aspects of the present disclosure are achieved and realized by the elements and combinations of various elements and the aspects of the following detailed description and the appended claims. The description of this specification is merely exemplary and does not limit the scope or application of the claims of the present disclosure in any way.

[0015] The present disclosure makes it possible to calculate the effect of vibrations on the characteristics of various samples, and to determine whether or not measures are required to deal with the vibrations applied to the device.

[0016] In addition, it will be possible to consider measures to address differences in measurement values ​​(machine differences) between multiple devices, determine whether an automatic program (recipe) that takes vibration into account can be executed, and dynamically correct the effects of vibration during sample measurement.

[0017] 7 is a diagram showing the concept of creating a database of the effects of vibration on feature quantities. FIG. 7 is a flowchart for explaining the database creation process (overall overview). FIG. 7 is a flowchart for explaining details of the vibration-exposed image generation process (steps S204 and S208 in FIG. 2). FIG. 7 is a diagram for explaining a specific example of vibration-exposed image generation. ... the process of determining whether or not vibration countermeasures are necessary. FIG. 7 is a flowchart for explaining the process of examining measures to deal with inter-device differences in feature quantities (one example). FIG. 7 is a diagram showing an example configuration of a recipe execution feasibility determination system 700 that takes inter-device differences in feature quantities into consideration. FIG. 7 is a flowchart for explaining the process of building a vibration-exposed feature quantity change amount DB and a feature quantity machine difference management DB at the time of system installation. FIG. 7 is a diagram for explaining a specific example (concept) of a vibration-exposed feature quantity change amount DB 713. FIG. 7 is a diagram for explaining a specific example (concept) of a feature quantity machine difference management DB 714. FIG. 7 is a flowchart for explaining the recipe execution feasibility determination process (processing during normal operation).

[0018] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In the accompanying drawings, functionally identical elements may be designated by the same numerals. Note that the accompanying drawings illustrate specific embodiments and implementation examples according to the principles of the present disclosure, but these are for understanding the present disclosure and are not to be used to interpret the present disclosure in any way as being limiting.

[0019] Although the present embodiment has been described in sufficient detail to enable those skilled in the art to implement the present disclosure, it should be understood that other implementations and forms are possible, and that configurations and structures can be changed and various elements can be substituted without departing from the scope and spirit of the technical ideas of the present disclosure. Therefore, the following description should not be interpreted as being limited thereto. Furthermore, when referring to the number of elements (including the number, numerical value, amount, range, etc.), unless otherwise specified or when clearly limited to a specific number in principle, it is not limited to that specific number, and may be greater than or less than the specific number.

[0020] Furthermore, in this embodiment, when necessary for convenience, the description will be divided into multiple sections or embodiments, but unless otherwise expressly stated, they are not unrelated to each other, and one is a partial or complete variation, detail, supplementary explanation, etc. of the other.

[0021] Furthermore, it goes without saying that in the following embodiments, the components (including element steps, etc.) are not necessarily essential unless otherwise specified or considered to be clearly essential in principle.

[0022] Similarly, in the following embodiments, when referring to the shapes, positional relationships, etc. of components, etc., it is intended to include those that are substantially similar or similar to those shapes, etc., unless otherwise specified or when it is considered that this is clearly not the case in principle. This also applies to the above numerical values ​​and ranges.

[0023] In addition, in all the drawings for explaining the embodiments, the same components are generally designated by the same reference numerals, and repeated explanations thereof will be omitted.

[0024] <Database Creation of Impact of Vibration on Feature Amounts> First, the concept of creating a database of the degree of impact of vibration on feature amounts (vibration impact degree) and the database creation process (overall overview) will be described.

[0025] Figure 1 shows the concept of creating a database of the effects of vibration on feature quantities. An image with vibration (one frame) and an image without vibration (one frame) are prepared. The feature quantities of each prepared image are calculated, and the differences between these feature quantities are stored in a database. Note that one frame of image means, for example, images acquired in one imaging operation under predetermined imaging conditions (scanning speed, imaging magnification, field of view size, number of pixels, etc.).

[0026] In this embodiment, the influence of vibration is calculated by calculating the difference between the feature amounts corresponding to the presence or absence of vibration, "Δ feature amount ｎｏｉｓｅ ". In other words, the influence of vibration (Δ feature ｎｏｉｓｅ ) is "Δ feature ｎｏｉｓｅ= feature with vibration - feature without vibration. As shown in this formula, Δ feature ｎｏｉｓｅ is the difference between the feature value when the device has vibration and the feature value when the device does not have vibration, so Δ feature value ｎｏｉｓｅ The larger the value of is, the greater the degree of influence that vibration has on the feature amount (the degree of influence of vibration).

[0027] The database in FIG. 1 (corresponding to the vibration dependency DB 712 of the feature quantity: see FIG. 7) does not have specific numerical values ​​entered in each column of FIG. 1, but it contains the Δ feature quantity corresponding to each vibration condition (pair of vibration frequency and vibration amplitude). ｎｏｉｓｅ will be held.

[0028] 2 is a flowchart for explaining the database creation process (overall overview). The processing entity of each step can be, for example, a computer constituting the determination system unit 715 (see FIG. 7 ), which will be described later. In the following, each step will be explained assuming that the processing entity is the determination system unit 715.

[0029] (i) Step S201 When an operator (user) prepares a sample to be compiled into a database and instructs the determination system unit 715 to start the database compilation process using the device management user system (computer) 701, the determination system unit 715 initializes the system (prepares to start the process: for example, cleans up unnecessary processes).

[0030] (ii) Step S202: The determination system unit 715 determines whether one frame of an image has already been acquired for the target sample. For example, the determination may be made based on information input by the user (e.g., input of acquired information on a GUI), or by checking whether an image corresponding to an identifier of the target sample (e.g., designated or input by the user) is stored in a storage device (not shown).

[0031] If one frame of images has already been acquired for the target sample (YES in step S202), the process proceeds to step S203. On the other hand, if one frame of images has not yet been acquired for the target sample (NO in step S202), the process proceeds to step S206.

[0032] (iii) Step S203: The determination system unit 715 prepares (generates) a vibration-free image (an image in the absence of vibration). Details of the vibration-free image generation process will be described later (see FIG. 3).

[0033] (iv) Step S204: The determination system unit 715 prepares (generates) an image with vibration (an image when vibration is present). Details of the process for generating an image with vibration will be described later (see FIG. 4).

[0034] (v) Step S205 The judgment system section 715 judges whether images of the target sample are prepared for all vibration conditions (for example, at least one frequency value and / or at least one amplitude value, which can be set by the user).

[0035] If images with vibration are prepared for all vibration conditions (YES in step S205), the process proceeds to step S210. On the other hand, if images with vibration are not prepared for all vibration conditions (NO in step S205), the process proceeds to step S204.

[0036] (vi) Step S206 The determination system unit 715 instructs the measurement unit 721 to acquire one frame of an image of the target sample. After the user sets the sample in one of the SEM devices (e.g., a critical dimension SEM) of the measurement unit 721, in response to the image acquisition instruction, the SEM device images the target sample and transfers the acquired image to the determination system unit 715. The determination system unit 715 stores the acquired one frame of the sample image in a storage device (not shown).

[0037] (vii) Step S207: The determination system unit 715 prepares (generates) a vibration-free image (an image when there is no vibration). The process of step S207 is the same as the process of step S203. Details of the vibration-free image generation process will be described later (see FIG. 3).

[0038] (viii) Step S208 The determination system unit 715 prepares (generates) an image with vibration (an image when vibration is present). The process of step S208 is the same as the process of step S204. The process of generating an image with vibration will be described later in detail (see FIG. 4).

[0039] (ix) Step S209: The determination system unit 715 determines whether images of the target sample are prepared for all vibration conditions (e.g., at least one frequency value and / or at least one amplitude value, which can be set by the user). The process of step S209 is the same as the process of step S205.

[0040] If images with vibration are prepared for all vibration conditions (YES in step S209), the process proceeds to step S210. On the other hand, if images with vibration are not prepared for all vibration conditions (NO in step S209), the process proceeds to step S208.

[0041] (x) Step S210 The determination system section 715 calculates each feature amount (for example, measurement value) for all of the images without vibration and the images with vibration.

[0042] (xi) Step S211: The determination system unit 715 determines a Δ feature amount for each image and each feature amount by subtracting the feature amount without vibration. noise Calculate.

[0043] (xii) Step S212 The determination system unit 715 associates the target sample with each vibration condition and calculates the calculated Δ feature quantity. noise is stored as the degree of influence of vibration in a database (vibration dependency database 712 of feature quantities: see FIG. 7).

[0044] (xiii) Step S213: The determination system unit 715 determines whether all samples have been compiled into a database based on user instructions (input information). If all samples have been compiled into a database (YES in step S213), the database compilation process ends. On the other hand, if there are samples that have not yet been compiled into a database (NO in step S213), the process proceeds to S201.

[0045] <Details of vibration-free image generation processing> Details of the vibration-free image generation processing will be described with reference to Fig. 3. Fig. 3A is a flowchart for explaining details of the vibration-containing image generation processing (steps S204 and S208 in Fig. 2). Fig. 3B is a diagram showing a specific example of vibration cancellation. As with Fig. 2, the processing of each step will be described assuming that the determination system unit 715 is the processing subject.

[0046] (i) Step S301: The determination system unit 715 acquires one frame of an image (one frame image) of the target sample. Specifically, the determination system unit 715 acquires from a storage device (not shown) an image that has already been acquired before starting the database creation process (FIG. 2) or an image acquired in step S206. Note that, when executing vibration-free image generation processing independently of the database creation process (FIG. 2), the determination system unit 715 may instruct the measurement unit 721 to capture an image of the target sample and acquire one frame of the image of the target sample directly from the measurement unit 721.

[0047] (ii) Step S302: The determination system unit 715 measures the vibration (frequency and amplitude) specific to the device that captured the acquired one frame image. Any measurement method can be used, but for example, a vibration measurement function installed in the target CD-SEM device may be used, or any other vibration measurement method may be used.

[0048] (iii) Step S303 The determination system unit 715 determines whether the vibration value measured in step S302 is equal to or less than a certain value (a preset threshold value: this may be determined arbitrarily by the user or may be determined based on a specification value). If the vibration value is equal to or less than the certain value (YES in step S303), the process proceeds to step S305. If the vibration value is greater than the certain value (NO in step S303), the process proceeds to step S304.

[0049] (iv) Step S304: The determination system unit 715 generates a vibration-free image by adjusting the position in the X and / or Y directions for each line so as to cancel the vibration in the one frame image acquired in step S301. Specifically, as shown in Fig. 3B, the position in the X direction of the one frame image with vibration is adjusted for each line (in this specific example, there is a shift only in the X direction, but if there is a shift in the Y direction as well, position adjustment in both the X and Y directions will be necessary). Therefore, as can be seen from Fig. 3B, in the one frame image after adjustment, the image at both ends will be affected by the vibration, but the influence of the vibration in the line portion of the image will be canceled out more than before the adjustment.

[0050] (v) Step S305 The determination system unit 715 generates a vibration-free image by accumulating N one-frame images without vibration generated in step S305. When generating an image in a critical dimension SEM device, N images are usually accumulated to output a final image. Therefore, when generating a vibration-free image, N images are also accumulated to generate a vibration-free accumulated image.

[0051] <Details of the vibration-existing image generation process> Details of the vibration-existing image generation process will be described with reference to Fig. 4. Fig. 4A is a flowchart for explaining details of the vibration-existing image generation process (steps S204 and S208 in Fig. 2). Fig. 4B is a diagram for explaining a specific example of vibration-existing image generation. As with Fig. 2, the description will be given assuming that the processing entity of each step is the determination system unit 715.

[0052] (i) Step S401 The determination system unit 715 acquires the vibration-free image (one frame) generated in the vibration-free image generation process (see FIG. 3: details of steps S203 and S207) from a storage device (not shown).

[0053] (ii) Step S402: The determination system unit 715 specifies (selects) one vibration condition (any frequency and amplitude) from at least one set vibration condition. At this time, the method of specifying the frequency and amplitude does not matter, and they may be listed in advance and selected in order, or the user may specify them on the GUI.

[0054] (iii) Step S403 The determination system unit 715 generates a plurality of frames of images with vibration by shifting the image without vibration (one frame image) in the X direction for each line based on the vibration conditions designated in step S402.

[0055] As shown in FIG. 4B (S403), a first frame of an image with vibration is first generated from one frame of an image without vibration. When one frame of an image is generated by shifting each line based on the vibration conditions (vibration period and vibration amplitude), the shift position of the last line does not necessarily coincide exactly with the leftmost pixel of the first line. Therefore, the shift position of the first line of the image with vibration in the second frame is aligned with the shift position of the last line of the first frame, and the vibration is reflected in the image of the second frame. In other words, the shift amount for frames two and beyond is set so that the shift amount continues from the previous frame. This makes it possible to simulate (reproduce) a state in which vibration is actually applied to the device.

[0056] (iv) Step S404 The determination system unit 715 accumulates the images from the first frame to the Nth frame in which vibration is reflected, and generates an image with vibration (an accumulated image with vibration).

[0057] <Technical effect of creating a database of vibration effects> As described above, by quantifying the effects of vibration on feature quantities (vibration effects) and creating a database, the operator (user) can quantitatively grasp (evaluate) the effects of vibration on each feature quantity of various samples.

[0058] <Vibration Countermeasure Necessity Determination Function> FIG. 5 is a flowchart for explaining the vibration countermeasure necessity determination process.

[0059] (i) Step S501 The determination system unit 715 acquires apparatus vibration data (vibration frequency and amplitude) measured, for example, using the vibration measurement function of the SEM apparatus. Since apparatus vibration data may vary each time even for a single SEM apparatus, the determination system unit 715 may acquire apparatus vibration data obtained by multiple measurements. Note that the vibration measurement may be performed by any method, and may be performed using the vibration measurement function built into the apparatus or by any other vibration measurement method.

[0060] (ii) Step S502 The judgment system unit 715 compares the vibration data of each device acquired in step S501 with the vibration dependency database of feature quantities (database in FIG. 1). The input information for comparison at this time is the type of sample, the vibration frequency, and the vibration amplitude. The output information is the influence of vibration on the feature quantities (Δ feature quantities ｎｏｉｓｅ ) and the Δ feature quantity corresponding to each device vibration data ｎｏｉｓｅ is obtained.

[0061] (iii) Step S503 The determination system unit 715 determines at least one Δ feature quantity corresponding to each device vibration data. noise Based on this, the influence of the feature quantity of vibration of the SEM device (degree of influence of vibration) is calculated (the average value or maximum value can be used as the degree of influence of vibration of the SEM device).

[0062] (iv) Step S504: The determination system unit 715 compares the degree of influence of vibration calculated in step S503 with a preset threshold value to determine whether vibration countermeasures are necessary. Specifically, the determination system unit 715 determines that vibration countermeasures are necessary if the value of the vibration influence degree is greater than the threshold value, and determines that vibration countermeasures are not necessary if the value is less than the threshold value. The determination result may be displayed on the display device (on the display screen) of the device management user system 701.

[0063] <Technical effect of vibration countermeasure necessity judgment> By utilizing the vibration countermeasure necessity judgment function, for example, if the impact on feature values ​​is tolerable even if vibration is present, there is no need to take countermeasures against vibration. In addition, for example, using this vibration countermeasure necessity judgment function on multiple units can help determine the priority of countermeasures, and using it in this way can lead to early operation of the equipment.

[0064] <Consideration of Countermeasures for Differences in Feature Amount Between Devices> FIG. 6 is a flowchart for explaining an example of processing for considering countermeasures for differences in feature amounts between devices.

[0065] (i) Step S601 When an operator (user) prepares a sample to be compiled into a database and instructs the determination system unit 715 to start the database compilation process using the device management user system (computer) 701, the determination system unit 715 initializes the system (prepares to start the process: for example, cleans up unnecessary processes).

[0066] (ii) Step S602: The determination system unit 715 measures the inter-instrument difference in the feature amount. The inter-instrument difference in the feature amount can be calculated by the formula "inter-instrument difference in feature amount = feature amount of the target sample on the target instrument (SEM instrument) - feature amount of the target." Here, the feature amount of the target may be, for example, the average or median value of feature amounts calculated from multiple SEM instruments, or may be the feature amount of a specific SEM instrument.

[0067] (iii) Step S603: The determination system unit 715 determines whether the inter-instrument difference in the feature amount calculated in step S602 satisfies a determination criterion. Here, the determination criterion value differs depending on the instrument, sample, and measurement conditions, and is a value arbitrarily designated by the user.

[0068] If the inter-device difference satisfies the judgment criterion (judgment threshold) (YES in step S603), no countermeasure is required, and the process of examining countermeasures for inter-device differences in feature quantities ends. On the other hand, if the inter-device difference does not satisfy the judgment criterion (NO in step S603), the process proceeds to step S604.

[0069] (iv) Step S604: The determination system unit 715 acquires apparatus vibration data (vibration frequency and amplitude) measured using, for example, the vibration measurement function of the SEM apparatus. Since apparatus vibration data may vary each time even for a single SEM apparatus, the determination system unit 715 may acquire apparatus vibration data obtained by multiple measurements. Note that the vibration measurement may be performed by any method, and may be performed using the vibration measurement function built into the apparatus or by any other vibration measurement method.

[0070] (v) Step S605 The judgment system unit 715 compares each device vibration data acquired in step S501 with the vibration dependency database of feature quantities (database in FIG. 1). The input information for comparison at this time is the type of sample, the vibration frequency, and the vibration amplitude. The output information is the influence of vibration on the feature quantities (Δ feature quantities ｎｏｉｓｅ ) and the Δ feature quantity corresponding to each device vibration data ｎｏｉｓｅ is obtained.

[0071] (vi) Step S606 The determination system unit 715 determines at least one Δ feature quantity corresponding to each device vibration data. ｎｏｉｓｅ Based on this, the influence of the feature quantity of vibration of the SEM device (degree of influence of vibration) is calculated (the average value or maximum value can be used as the degree of influence of vibration of the SEM device).

[0072] (vii) Step S607: The determination system unit 715 subtracts the influence of vibration acquired in step S606 from the inter-device difference of the feature amount acquired in step S602 to obtain the inter-device difference without vibration, from which the influence of vibration has been removed. The determination system unit 715 then determines whether the inter-device difference without vibration satisfies the above determination criterion.

[0073] If the inter-device difference without vibration satisfies the judgment criterion (judgment threshold) (YES in step S607: if the inter-device difference without vibration is equal to or less than the judgment threshold), the process proceeds to step S608. On the other hand, if the inter-device difference without vibration does not satisfy the judgment criterion (judgment threshold) (NO in step S607: if the inter-device difference without vibration is greater than the judgment threshold), the process proceeds to step S609.

[0074] (viii) Step S608 The determination system unit 715 transmits a message recommending vibration countermeasures to the device management user system 701. Upon receiving the message, the device management user system 701 displays the received message on the display device (on the display screen).

[0075] (ix) Step S609: The determination system unit 715 transmits a message to the device management user system 701 to urge it to consider measures other than vibration countermeasures (such as whether or not work to identify the cause is necessary or improving resolution), because the inter-device difference in feature quantities cannot be corrected by vibration countermeasures. The device management user system 701, having received the message, displays the received message on the display device (on the display screen).

[0076] <Technical Effect of Processing to Examine Countermeasures for Differences between Devices in Feature Amounts> By examining countermeasures for differences between devices in feature amounts, it is possible to determine that countermeasures for the vibrations should be taken if, for example, eliminating the effect on the feature amount satisfies the judgment criterion 603. On the other hand, if the judgment criterion is not satisfied even after eliminating the effect on the feature amount, it is possible to determine that countermeasures other than vibrations should be taken, which means that the causes of the differences between devices are further isolated, and the examination of countermeasures for differences between devices can proceed to the next stage.

[0077] 7 is a diagram showing an example of the configuration of a recipe execution feasibility determination system 700 that takes into account inter-device differences in feature quantities. The purpose of this system is to manage changes in inter-device differences in feature quantities due to vibration, and to determine whether or not a feature quantity measurement recipe can be executed only for devices where the feature quantities satisfy certain criteria for inter-device differences.

[0078] The recipe execution feasibility determination system 700 is roughly divided into a user or apparatus management user system 701, a recipe execution feasibility determination unit 711 that utilizes the vibration dependency of a feature amount (hereinafter referred to as the recipe execution feasibility determination unit 711), and a measurement unit 721.

[0079] The recipe execution feasibility determination unit 711 includes a feature vibration dependency DB 712, a feature change amount due to vibration DB 713, a feature machine difference management DB 714, and a determination system unit 715. The feature vibration dependency DB 712 can be the database shown in FIG. 1 generated by the process of FIG. 2. The feature change amount due to vibration DB 713 is a database that stores and manages feature amounts due to changes in vibration calculated based on information from the feature vibration dependency DB 712. The feature machine difference management DB 714 is a database that stores and manages feature differences between devices. The determination system unit 715 determines whether or not a recipe is executable based on changes in feature amounts due to changes in vibration, based on information stored in the feature machine difference management DB 714. The determination system unit also has a function to establish determination criteria in cooperation with the device management user system 701 and a function to share the determined recipe execution feasibility with the measurement unit 721.

[0080] The measurement unit 721 is composed of at least one device (SEM device). Each device measures vibrations and executes a recipe. The measurement unit 721 also has the function of sharing data and information with the device management user system 701 and the recipe execution feasibility determination unit 711, for example, by transmitting information on vibration measurements of the SEM device and receiving information on whether or not the recipe can be executed as determined by this system.

[0081] <Process for Building a DB of Feature Amount Changes Due to Vibration and a DB for Managing Machine-to-Machine Feature Differences> Next, a flow at the time of installation of the recipe execution feasibility determination system 700 that takes into account inter-machine differences in feature amounts will be described. Fig. 8 is a flowchart for explaining the process for building a DB of feature amount changes due to vibration and a DB for managing machine-to-machine feature differences at the time of installation of the system.

[0082] (i) Step S801: The determination system unit 715 performs the process shown in FIG. 2 to obtain the vibration-dependent DB of the feature (Δ feature ｎｏｉｓｅ ) 712 is created.

[0083] (ii) Step S802 The determination system unit 715 acquires from the device management user system 701 information on the device (SEM device) for which the recipe execution feasibility is to be determined and the target recipe (for example, the target device and target recipe are designated by the user).

[0084] (iii) Step S803 The determination system section 715 acquires vibration data (such as the type of sample, the frequency of vibration, and the amplitude of vibration) measured in the selected device.

[0085] (iv) Step S804 The determination system unit 715 refers to the vibration dependency DB 712 of the feature amount, acquires the feature amount due to vibration corresponding to the selected device and recipe, and calculates the change (Δ feature amount Δｎｏｉｓｅ ) and calculate the change in the feature quantity due to the change in vibration (Δ feature quantity ｎｏｉｓｅ ) is compiled into a database (construction of a DB 713 for the amount of change in feature quantity due to vibration). Δｎｏｉｓｅ is the current Δ feature ｎｏｉｓｅ and the previous Δ feature ｎｏｉｓｅ It is calculated by comparing with

[0086] (v) Step S805 The determination system unit 715 calculates the change amount Δ of the feature amount corresponding to the vibration data measured by all the devices. Δｎｏｉｓｅ The Δ feature values ​​corresponding to all vibration data are calculated. Δｎｏｉｓｅ If the Δ feature amount has been calculated (YES in step S805), the process of constructing the feature amount variation DB 713 is completed, and the process proceeds to step S806 (process of constructing the feature amount machine difference management DB 714). Δｎｏｉｓｅ If there is any vibration data remaining for which calculation is to be performed (NO in step S805), the process returns to step S803.

[0087] (vi) Step S806: The judgment system unit 715 collects measurement results of the feature quantities of each target measurement recipe for each target device. The measurement results may be collected from the device management user system 701 or directly from each device. The collected feature quantities may be only the most recent results of each recipe for each device, or the most recent N feature quantities may be collected and the average or median may be calculated to obtain the measurement results, or a period may be set and the average or median of the feature quantities within that period may be calculated to obtain the measurement results.

[0088] (vii) Step S807: The judgment system unit 715 calculates a reference measurement value for each measurement recipe based on the measurement results collected in step S806. This reference measurement value may be the value of one representative device among the devices for which measurement results have been collected, i.e., the measurement result of a reference device, or it may be the average or median of the collected measurement values ​​for each device.

[0089] (viii) Step 808: The determination system unit 715 calculates the inter-device feature difference for each measurement recipe using the reference measurement value calculated in step S807 and the feature value of each device. The feature value difference between devices can be calculated by "inter-device feature value difference = feature value of each device - reference measurement value". The determination system unit 715 constructs the feature value machine difference management DB 714 using the calculated inter-device feature value difference. Note that the change in feature value (Δ feature value) calculated in step S804 is used to calculate the inter-device feature value difference. ｎｏｉｓｅ ) is included in the inter-device feature difference.

[0090] As an example, the dimensions of semiconductor patterns that are frequently measured by CD-SEM are given as follows: ＴＴＴＭ　Ｎ is 0.30 nm, Δ feature amount ｎｏｉｓｅ When is 0.10 nm, ΔCD ＴＴＴＭ　Ｎ It can be seen that 0.10 nm of the 0.30 nm is caused by vibration, and 0.20 nm is caused by factors other than vibration.

[0091] 9 is a diagram for explaining a specific example (concept) of the vibration-induced feature amount change DB 713. The vibration-induced feature amount change DB 713 stores a Δ feature amount ｎｏｉｓｅＮ and Δ feature ΔｎｏｉｓｅIf the current periodic vibration measurement is the Nth time, the vibration-induced feature change amount DB 713 stores the feature change amount Δ feature amount due to the Nth vibration measurement for each device and each recipe. ｎｏｉｓｅ　Ｎ and the feature change Δ feature due to the vibration change from the (N-1)th time to the Nth time Δｎｏｉｓｅ Here, the Δ feature quantity Δｎｏｉｓｅ is "Δ feature Δｎｏｉｓｅ = Δ feature amount ｎｏｉｓｅ　Ｎ -Δ feature amount noise(N-1)”.

[0092] <Concept of feature quantity machine difference management DB 714> Fig. 10 is a diagram for explaining a specific example (concept) of the feature quantity machine difference management DB 714. The feature quantity machine difference management DB 714 is updated every time a feature quantity is measured, and is also updated every time vibration is measured. The feature quantity difference between devices at a certain timing is represented as Δ feature quantity ＴＴＴＭ　Ｔ The inter-device feature difference updated by the measurement is Δ feature TTTM T(Mea.), and the inter-device feature difference after the vibration measurement is Δ feature TTTM T(Est.). The feature change amount in the Nth vibration measurement is Δ feature TTTM T(Est.). Δｎｏｉｓｅ Then, the Δ feature amount TTTM T(Est.) calculated from the Nth vibration measurement is expressed as follows: Δ feature amount TTTM T(Est.)=Δ feature amount ＴＴＴＭ（Ｔ－１） +Δ feature amount Δｎｏｉｓｅ This Δ feature ＴＴＴＭ　Ｔ does not satisfy the allowable value (Spec: a preset value (range)), the judgment system unit 715 judges that the recipe cannot be executed (NG).

[0093] <Recipe Execution Possibility Determination Process> Here, a flow during normal operation of the recipe execution possibility system that takes into account differences in feature quantities between devices will be described. Here, normal operation refers to after the system is installed. Fig. 11 is a flowchart for explaining the recipe execution possibility determination process (processing during normal operation).

[0094] (i) Step S1101 The determination system unit 715 acquires the results of vibration measurement periodically performed by the measurement unit 721. Note that any method of vibration measurement may be used. For example, a user may perform the vibration measurement manually and provide the results to the determination system unit 715, a system linked to a recipe may be constructed to perform the vibration measurement automatically, or the vibration measurement may be set to be performed periodically using the system of the device.

[0095] (ii) Step S1102 The determination system unit 715 calculates the feature amount change (Δ feature amount) from the periodic vibration measurement result obtained in step S1101. ｎｏｉｓｅ ) is calculated, and the calculation result is added to the vibration dependency DB 712 of the feature amount (updating the DB).

[0096] (iii) Step S1103 The determination system unit 715 determines the current Δ feature quantity ｎｏｉｓｅ and the previous Δ feature ｎｏｉｓｅ The difference between the feature change due to the vibration change and the Δｎｏｉｓｅ For example, if this periodic vibration measurement is the Nth time, then the Δ feature quantity Δｎｏｉｓｅ is "Δ feature Δｎｏｉｓｅ = Δ feature amount ｎｏｉｓｅＮ -Δ feature quantity noise(N-1)".

[0097] (iv) Step S1104: Δ feature amount calculated in step S1103 Δｎｏｉｓｅ is a value associated with each recipe for each device. Δｎｏｉｓｅ is added to the feature change amount DB, and the feature change amount DB is updated every time a periodic vibration measurement is performed.

[0098] (v) Step S1105 The determination system unit 715 calculates the Δ feature quantity calculated in step S1103. Δｎｏｉｓｅ are shared (stored) in the feature machine difference management DB 714.

[0099] (vi) Step S1106 The determination system unit 715 determines the shared Δ feature quantity ΔｎｏｉｓｅThe feature amount difference between the devices due to vibration changes is recalculated from the feature amount difference between the devices stored as above, and is stored again in the feature amount difference management DB 714. As an example, taking the dimensions of a semiconductor pattern that is frequently measured by a CD-SEM, for example, the feature amount difference between a certain device, Δ feature amount ＴＴＴＭ　Ｎ－１ is 0.30 nm, Δ feature amount Δｎｏｉｓｅ When the difference in feature quantity between the devices due to vibration change is -0.10 nm, the difference in feature quantity between the devices due to vibration change is ＴＴＴＭ　Ｎ is 0.20 nm.

[0100] (vii) Step S1107 The determination system unit 715 determines the allowable difference Δ between the feature amounts between the devices, which is set in the user system or the like. ＴＴＴＭ　Ｓｐｅｃ and the inter-device feature difference Δ feature ＴＴＴＭ　Ｎ By comparing the feature amount difference between the devices, it is determined whether the recipe can be executed. ＴＴＴＭ　Ｎ is the Δ feature ＴＴＴＭ　Ｓｐｅｃ If it is larger, the execution decision is NG, and if it is smaller, the execution decision is OK.

[0101] (viii) Step S1108 The determination system unit 715 transmits the determination result in step S1107 to the device management user system 701 and the measurement unit 721, and shares the information.

[0102] The determination system unit 715 maintains the determination result until the periodic vibration measurement (step S1101) is performed again. After the periodic vibration measurement is performed again, the determination system unit 715 also performs steps S1102 to S1108 again. By periodically performing this recipe execution feasibility determination process (processing during normal operation), it becomes possible to operate multiple devices while taking into account changes in feature quantities due to changes in vibration.

[0103] <Technical effect of recipe execution feasibility determination processing> By utilizing a recipe execution feasibility system that takes into account differences in feature quantities between devices, it is possible to stop device execution only for recipes where the difference in measurement values ​​between devices becomes NG due to, for example, changes in the device state or changes in the device installation environment, making it possible to operate devices while minimizing decreases in device availability.

[0104] <Summary of the embodiment> (i) According to one embodiment of the present disclosure, the determination system unit (computer) 715 acquires a vibration-free image of the target sample from the measurement unit (including at least one charged particle beam device) 721, and generates a vibration-affected image of the sample by reflecting desired vibration conditions on the vibration-free image. Then, the determination system unit 715 calculates a difference value (Δ feature amount) between the feature amount of the vibration-free image and the feature amount of the vibration-absorbed image. ｎｏｉｓｅ ) is calculated and used as an index showing the effect of vibration on the feature quantity (see Figure 2). In this way, the effect of vibration can be quantified, allowing the operator (user) to easily understand the effect that vibration of the charged particle beam device (e.g., CD-SEM) has on the measurement results (feature quantity) of the sample.

[0105] Furthermore, the determination system unit 715 obtains the above-mentioned indices corresponding to a plurality of vibration conditions and constructs a vibration dependency database 712 of feature quantities, which includes a plurality of vibration conditions and indices corresponding to each of the plurality of vibration conditions and indicating the influence of vibration on the feature quantities (see FIG. 1 ). In this way, by creating a database of the influence (degree of influence of vibration) of the vibration of each charged particle beam device on the feature quantities of each sample, the operator can grasp the degree of influence of vibration from each device in advance (before measuring the sample).

[0106] The vibration-free image can be generated by canceling the vibration component measured by the vibration measurement function of the charged particle beam device from the image of the sample, and the vibration-exposed image can be generated by shifting the vibration-free image in units of at least one line constituting the vibration-free image in accordance with the vibration conditions.

[0107] (ii) According to another embodiment of the present disclosure, the determination system unit 715 determines whether vibration countermeasures are necessary for the charged particle beam devices 722, 723, 724, ... (see FIG. 5 ). More specifically, the determination system unit 715 acquires vibration data at the time of the determination of whether vibration countermeasures are necessary for at least one charged particle beam device (e.g., CD-SEM) included in the measurement unit 721, compares the vibration data at the time of the determination of whether vibration countermeasures are necessary with the vibration dependency database 712 of feature quantities, and acquires the value of an index indicating the influence of vibration corresponding to the vibration data. Then, the determination system unit 715 determines whether vibration countermeasures are necessary based on the value of the index indicating the influence of vibration.

[0108] When multiple charged particle beam devices are operated in the measurement unit 721, the determination system unit 715 acquires multiple sets of vibration data at the time of necessity determination. The determination system unit 715 compares the multiple sets of vibration data at the time of necessity determination with the vibration dependency database 712 of feature quantities, and acquires values ​​of multiple indices (indices indicating the influence of vibration) corresponding to the multiple sets of vibration data at the time of necessity determination. Then, based on the values ​​of the multiple indices, the determination system unit 715 determines a representative index (such as an average value, representative value, minimum value, or maximum value of the values ​​of the multiple indices) for determining whether vibration countermeasures are necessary, and compares the representative index with a predetermined threshold to determine whether vibration countermeasures are necessary.

[0109] By doing so, the operator can take measures against vibration only when the effect on the feature amount (measurement value) is unacceptable, and the system can be put into operation early.

[0110] (iii) According to yet another embodiment of the present disclosure, the determination system unit 715 determines whether maintenance (including not only vibration countermeasures but also measures such as resolution improvement) is required for the charged particle beam devices 722, 723, 724, etc. (see FIG. 6 ). More specifically, the determination system unit 715 acquires feature quantities of the target sample in at least one charged particle beam device (e.g., CD-SEM) included in the measurement unit 721. The determination system unit 715 also determines whether the comparison result between the feature quantity of the target sample and a predetermined reference feature quantity (deviation from the reference) is equal to or less than a reference value for determining inter-device differences. If the comparison result is greater than the reference value for determining inter-device differences, the determination system unit 715 determines that maintenance is required for at least one charged particle beam device.

[0111] Furthermore, the determination system unit 715 also determines whether vibration countermeasures are necessary as maintenance or whether countermeasures other than vibration countermeasures are necessary. Specifically, the determination system unit 715 compares the vibration data of at least one charged particle beam device with the feature vibration dependency database 712, obtains an index indicating the corresponding vibration impact, compares the comparison result with the index, and determines whether vibration countermeasures are effective as maintenance. In other words, it determines whether taking vibration countermeasures reduces the comparison result (deviation from the standard) and makes it equal to or less than the inter-device difference determination standard value. In this way, it becomes possible to sort out factors that affect feature quantities, such as vibration and resolution, and take countermeasures accordingly.

[0112] (iv) According to another embodiment, the determination system unit 715 determines whether or not a recipe can be executed in the charged particle beam devices 722, 723, 724, .... More specifically, the determination system unit 715 acquires index values ​​(first index value and second index value) corresponding to vibration data at a first timing (N-1th time) and vibration data at a second timing (Nth time) in at least one charged particle beam device included in the measurement unit 721, by referring to the feature vibration dependency database 712. The determination system unit 715 also acquires a feature change amount (Δfeature amount Δｎｏｉｓｅ) is calculated. Furthermore, the determination system unit 715 acquires feature quantities of the target sample in at least one charged particle beam device using a predetermined recipe, and calculates an inter-device feature quantity difference, which is a result of comparing the feature quantity with a predetermined reference feature quantity. Then, the determination system unit 715 determines whether or not the recipe can be executed based on the inter-device feature quantity difference and the feature quantity change amount. Specifically, the sum of the inter-device feature quantity difference and the feature quantity change amount and a predetermined recipe execution feasibility determination threshold (Δ feature quantity ＴＴＮ　Ｓｐｅｃ ) and determines whether or not to execute the recipe based on the comparison result.

[0113] In addition, if the measurement unit 721 includes multiple charged particle beam devices, the judgment system unit 715 calculates the inter-device feature difference for each charged particle beam device, and determines whether the recipe can be executed in each charged particle beam device based on each inter-device feature difference and each feature change amount.

[0114] (v) The functions of this embodiment and each example can also be realized by software program code. In this case, a storage medium on which the program code is recorded is provided to a system or device, and the computer (or CPU or MPU) of that system or device reads the program code stored in the storage medium. In this case, the program code itself read from the storage medium realizes the functions of the above-mentioned embodiments, and the program code itself and the storage medium on which it is stored constitute the present disclosure. Examples of storage media for providing such program code include flexible disks, CD-ROMs, DVD-ROMs, hard disks, optical disks, magneto-optical disks, CD-Rs, magnetic tape, non-volatile memory cards, and ROMs.

[0115] Furthermore, an operating system (OS) running on a computer may perform some or all of the actual processing based on instructions in the program code, and the functions of the above-described embodiments may be realized by this processing.Furthermore, after the program code is read from a storage medium and written to memory on the computer, a CPU of the computer may perform some or all of the actual processing based on instructions in the program code, and the functions of the above-described embodiments may be realized by this processing.

[0116] Furthermore, the program code of the software that realizes the functions of the embodiments and each example may be distributed via a network and stored in a storage means such as a hard disk or memory of the system or device, or in a storage medium such as a CD-RW or CD-R, so that when used, the computer (or CPU or MPU) of the system or device reads and executes the program code stored in the storage means or storage medium.

[0117] The processes and techniques described herein are not inherently related to any specific device and can be implemented by a combination of components. Various types of general-purpose devices can also be added. A dedicated device may be constructed to perform the functions of this embodiment and each example. Various functions can also be formed by appropriately combining multiple components disclosed in this embodiment and each example. For example, some components may be omitted from all the components shown in the embodiment and each example, or components from different examples may be appropriately combined.

[0118] Although specific examples are described in this disclosure, they are in all respects for the purpose of explanation (understanding the technology of the present disclosure) and not for the purpose of limitation. Those skilled in the art will recognize that there are many combinations of hardware, software, and firmware suitable for implementing the technology of the present disclosure. For example, the software described can be implemented in a wide variety of programming or scripting languages, such as assembler, C / C++, Perl, Shell, PHP, Java (registered trademark), etc.

[0119] Furthermore, in the above-described embodiment, the control lines and information lines are those that are considered necessary for the explanation, and not all control lines and information lines in the product are necessarily shown. All components may be interconnected.

[0120] In addition, other implementations of the present disclosure will be apparent to those skilled in the art from consideration of the present embodiments and examples. The specification and examples are exemplary only, with the scope and spirit of the present disclosure being indicated by the following claims.

[0121] 700 Recipe execution possibility determination system 701 Equipment management user system 711 Recipe execution possibility determination unit 712 Vibration dependency DB (database) of feature amount 713 Feature amount change amount DB (database) due to vibration 714 Feature amount machine difference management DB (database) 715 Determination system unit 721 Measurement unit 722 to 724 Charged particle beam device (length measurement SEM)

Claims

1. A charged particle beam system for quantifying the influence of vibrations of a charged particle beam apparatus on a characteristic quantity of a sample obtained by at least one charged particle beam apparatus, the system comprising: a storage device for storing information obtained from the characteristic quantity of the sample; and a computer for executing a process of quantifying the influence of the vibrations on the characteristic quantity, wherein the computer executes: a process of acquiring an image of the sample without vibrations from the at least one charged particle beam apparatus; a process of generating an image of the sample with vibrations based on a desired vibration condition; a process of acquiring a characteristic quantity of the image without vibrations; a process of acquiring a characteristic quantity of the image with vibrations; and a process of obtaining a difference value between the characteristic quantity of the image with vibrations and the characteristic quantity of the image without vibrations, and using the difference value as an index indicating the influence of vibrations on the characteristic quantity.

2. The charged particle beam system according to claim 1, wherein the computer obtains indices corresponding to a plurality of vibration conditions, and constructs, in the storage device, a vibration dependency database of characteristic quantities including the plurality of vibration conditions and the indices indicating the influence of vibrations on the characteristic quantity corresponding to each of the plurality of vibration conditions.

3. The charged particle beam system according to claim 1, wherein the computer acquires the image of the sample without vibrations generated by canceling components of vibrations measured by a vibration measurement function of the charged particle beam apparatus from the image of the sample.

4. The charged particle beam system according to claim 1, wherein the computer generates the image of the sample with vibrations by shifting the image of the sample without vibrations in units of at least one line constituting the image of the sample without vibrations according to the vibration condition.

5. A charged particle beam system having a function of determining the necessity of vibration countermeasures for a charged particle beam apparatus, comprising: at least one charged particle beam apparatus; a vibration dependency database of feature amounts that holds an index indicating the influence of vibration of the at least one charged particle beam apparatus on the feature amounts of a sample obtained by the at least one charged particle beam apparatus; and a computer that determines the necessity of vibration countermeasures, wherein the vibration dependency database of feature amounts holds, as an index indicating the influence of vibration, a difference value between the feature amounts of an image of the sample with vibration and the feature amounts of an image of the sample without vibration corresponding to a plurality of vibration conditions, and the computer executes: a process of acquiring vibration data at the time of necessity determination in the at least one charged particle beam apparatus; a process of collating the vibration data at the time of necessity determination with the vibration dependency database of feature amounts to acquire a value of the index indicating the influence of the vibration corresponding to the vibration data; and a process of determining the necessity of vibration countermeasures based on the value of the index indicating the influence of the vibration.

6. The charged particle beam system according to claim 5, wherein in the process of acquiring vibration data at the time of necessity determination, the computer acquires a plurality of sets of vibration data at the time of necessity determination, in the process of acquiring a value of the index indicating the influence of vibration, the computer acquires a plurality of values of the index corresponding to the plurality of sets of vibration data at the time of necessity determination, the computer further executes a process of determining a representative index for the necessity of vibration countermeasures based on the plurality of values of the index, and in the process of determining the necessity of vibration countermeasures, the computer determines the necessity of vibration countermeasures by comparing the representative index with a predetermined threshold value.

7. A charged particle beam system having a function of determining the necessity of maintenance for a charged particle beam apparatus, comprising: at least one charged particle beam apparatus; and a computer for determining the necessity of maintenance, wherein the computer executes: a process of acquiring a feature amount of a target sample in at least one charged particle beam apparatus; a process of acquiring a comparison result between the feature amount of the target sample and a predetermined reference feature amount; and a process of determining whether the comparison result is equal to or less than a predetermined inter-apparatus difference determination reference value, and determines that maintenance of the at least one charged particle beam apparatus is necessary when the comparison result is greater than the predetermined inter-apparatus difference determination reference value.

8. The charged particle beam system according to claim 7, further comprising: a feature amount vibration dependency database that holds an index indicating the influence of vibration of the at least one charged particle beam apparatus on the feature amount of a sample obtained by the at least one charged particle beam apparatus, wherein the index indicating the influence of vibration indicates a difference value between the feature amount of an image of the sample with vibration and the feature amount of an image of the sample without vibration corresponding to a plurality of vibration conditions, and the computer executes: a process of collating the vibration data of the at least one charged particle beam apparatus with the feature amount vibration dependency database to acquire an index indicating the influence of vibration corresponding to the vibration data; and a process of comparing the comparison result with the index indicating the influence of vibration to determine whether vibration countermeasures are effective as the maintenance.

9. A charged particle beam system having a function of determining whether a recipe can be executed in a charged particle beam apparatus, comprising: at least one charged particle beam apparatus; a characteristic amount vibration dependency database that holds an index indicating the influence of vibration of the at least one charged particle beam apparatus on a characteristic amount of a sample obtained by the at least one charged particle beam apparatus; and a computer that determines whether the recipe can be executed. The characteristic amount vibration dependency database holds, as an index indicating the influence of the vibration, a difference value between a characteristic amount of an image of the sample with vibration and a characteristic amount of an image of the sample without vibration corresponding to a plurality of vibration conditions. The computer executes: a process of acquiring vibration data at a first timing and vibration data at a second timing in the at least one charged particle beam apparatus; a process of referring to the characteristic amount vibration dependency database and acquiring a first index value that is a value of an index corresponding to the vibration data at the first timing and a second index value that is a value of an index corresponding to the vibration data at the second timing; a process of calculating a characteristic amount change amount that is a difference value between the first index value and the second index value; a process of acquiring a characteristic amount of a target sample in the at least one charged particle beam apparatus using the recipe; a process of calculating a device-to-device characteristic amount difference that is a comparison result between the characteristic amount of the target sample and a predetermined reference characteristic amount; and a process of determining whether the recipe can be executed based on the device-to-device characteristic amount difference and the characteristic amount change amount.

10. The charged particle beam system according to claim 9, wherein the computer determines whether the recipe can be executed based on a comparison result between the sum of the device-to-device characteristic amount difference and the characteristic amount change amount and a predetermined recipe execution determination threshold value.

11. The charged particle beam system according to claim 9, wherein the vibration data includes a frequency value of vibration and an amplitude value of vibration.

12. The charged particle beam system according to claim 9, wherein the at least one charged particle beam apparatus images an image of the target sample under set imaging conditions including a scanning speed of a charged particle beam on the target sample, an imaging magnification, an imaging field size, and the number of imaging pixels, and acquires a characteristic amount of the target sample from the image.

13. In claim 9, the target sample is a semiconductor wafer, and the feature amount of the target sample is the feature amount of the semiconductor wafer pattern, a charged particle beam system.

14. In claim 13, the feature amount of the semiconductor wafer pattern is the measured length value of the semiconductor wafer pattern, a charged particle beam system.

15. In claim 9, a charged particle beam system comprising a first charged particle beam device and a second charged particle beam device, wherein the computer performs: a process of acquiring vibration data at a first timing and vibration data at a second timing in the first charged particle beam device, and vibration data at a third timing and vibration data at a fourth timing in the second charged particle beam device; a process of referring to the vibration dependency database of the feature amount and acquiring a first index value which is the value of the index corresponding to the vibration data at the first timing, a second index value which is the value of the index corresponding to the vibration data at the second timing, a third index value which is the value of the index corresponding to the vibration data at the third timing, and a fourth index value which is the value of the index corresponding to the vibration data at the fourth timing; a process of calculating a first feature amount change amount which is the difference value between the first index value and the second index value; a process of calculating a second feature amount change amount which is the difference value between the third index value and the fourth index value; a process of acquiring a first feature amount of the target sample in the first charged particle beam device and a second feature amount of the target sample in the second charged particle beam device using the recipe; a process of calculating a first inter-device feature amount difference which is the comparison result between the first feature amount and a predetermined reference feature amount, and a second inter-device feature amount difference which is the comparison result between the second feature amount and the predetermined reference feature amount; a process of determining whether the recipe can be executed in the first charged particle beam device based on the first inter-device feature amount difference and the first feature amount change amount; and a process of determining whether the recipe can be executed in the second charged particle beam device based on the second inter-device feature amount difference and the second feature amount change amount.

16. A method for operating a charged particle beam system that quantifies the influence of vibrations of the charged particle beam apparatus on a characteristic quantity of a sample obtained by at least one charged particle beam apparatus, the method comprising: a computer that executes a process for quantifying the influence of the vibrations on the characteristic quantity of the sample obtains a vibration-free image of the sample from the at least one charged particle beam apparatus; the computer generates a vibration-present image of the sample based on a desired vibration condition; the computer obtains the characteristic quantity of the vibration-free image; the computer obtains the characteristic quantity of the vibration-present image; the computer obtains a difference value between the characteristic quantity of the vibration-present image and the characteristic quantity of the vibration-free image, and generates an index indicating the influence of the vibrations on the characteristic quantity using the difference value.

17. A method for operating a charged particle beam system that determines the necessity of vibration countermeasures for the charged particle beam apparatus, the method comprising: a computer that determines the necessity of vibration countermeasures obtains vibration data at the time of necessity determination in at least one charged particle beam apparatus; the computer collates the vibration data at the time of necessity determination with a database of vibration dependencies of characteristic quantities, and obtains a value of an index indicating the influence of the vibrations corresponding to the vibration data; the computer determines the necessity of vibration countermeasures based on the value of the index indicating the influence of the vibrations, wherein the database of vibration dependencies of characteristic quantities holds difference values between the characteristic quantities of vibration-present images of the sample and the characteristic quantities of vibration-free images of the sample corresponding to a plurality of vibration conditions, as indices indicating the influence of vibrations of the at least one charged particle beam apparatus on the characteristic quantities of the sample obtained by the at least one charged particle beam apparatus.

18. A charged particle beam system operation method for determining the necessity of maintenance for a charged particle beam device, comprising: a computer for determining the necessity of maintenance acquiring a characteristic quantity of a target sample in at least one charged particle beam device; the computer acquiring a comparison result between the characteristic quantity of the target sample and a predetermined reference characteristic quantity; the computer determining whether the comparison result is equal to or less than a predetermined device-to-device difference determination reference value; and determining that maintenance of the at least one charged particle beam device is necessary when the comparison result is greater than the predetermined device-to-device difference determination reference value.

19. In claim 18, further comprising: providing a characteristic quantity vibration dependency database that holds a difference value between a characteristic quantity of an image of the sample with vibration and a characteristic quantity of an image of the sample without vibration corresponding to a plurality of vibration conditions as an index indicating the influence of vibration of the at least one charged particle beam device on the characteristic quantity of the sample obtained by the at least one charged particle beam device; the computer collating the vibration data of the at least one charged particle beam device with the characteristic quantity vibration dependency database to acquire an index indicating the influence of the vibration corresponding to the vibration data; and the computer comparing the comparison result with the index indicating the influence of the vibration to determine whether vibration countermeasures are effective as the maintenance.

20. A method for operating a charged particle beam system for determining whether a recipe can be executed in a charged particle beam apparatus, comprising: providing a database of vibration dependence of feature amounts that holds difference values between feature amounts of an image of a sample with vibration and feature amounts of an image of the sample without vibration corresponding to a plurality of vibration conditions as an index indicating an influence of vibration of at least one charged particle beam apparatus on a feature amount of a sample obtained by the at least one charged particle beam apparatus; a computer for determining whether the recipe can be executed obtains vibration data at a first timing and vibration data at a second timing in at least one charged particle beam apparatus; the computer refers to the database of vibration dependence of feature amounts and obtains a first index value that is a value of an index corresponding to the vibration data at the first timing and a second index value that is a value of an index corresponding to the vibration data at the second timing; the computer calculates a feature amount change amount that is a difference value between the first index value and the second index value; the computer obtains a feature amount of a target sample in at least one charged particle beam apparatus using the recipe; the computer calculates a feature amount difference between apparatuses that is a comparison result between the feature amount of the target sample and a predetermined reference feature amount; and the computer determines whether the recipe can be executed based on the feature amount difference between apparatuses and the feature amount change amount.

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