Contact combustion type hydrogen sensor and manufacturing method therefor

Abstract

The present invention relates to a contact combustion type hydrogen sensor comprising: a substrate; a first sensor chip disposed on the substrate; and a second sensor chip disposed to be spaced apart from the first sensor chip in the height direction, wherein each of the first sensor chip and the second sensor chip includes a support body, and a detection element and a compensation element disposed on the top of the support body.

Description

Contact combustion type hydrogen sensor and manufacturing method thereof

[0001] This specification claims the benefit of Korean Patent Application No. 10-2023-0186824, filed with the Korean Intellectual Property Office on December 20, 2023, the entire contents of which are incorporated herein by reference.

[0002] The present invention relates to a contact combustion type hydrogen sensor and a method for manufacturing the same.

[0003] Interest in hydrogen as an environmentally friendly alternative energy source is steadily increasing. Consequently, research is being conducted in diverse fields, including automobiles, fuel cells, and internal combustion engines, rapidly replacing existing fossil fuels. The number of related industries receiving research and development is also expanding. However, hydrogen's high diffusivity raises concerns about leakage and explosion, making it essential to establish safety measures to prevent hydrogen leaks.

[0004] Therefore, safety measures are being prepared around hydrogen storage and hydrogen-related devices using various hydrogen sensors, and research and development related to hydrogen sensors are being actively conducted.

[0005] In general, hydrogen sensors are divided into semiconductor, contact combustion, FET (Field Effect Transistor), electrolytic (electrochemical), fiber optic, and thermoelectric types depending on the detection method. Among them, the contact combustion hydrogen sensor is equipped with a heater and is stable to external environments such as external temperature changes and humidity, and uses a platinum group catalyst with high selectivity for hydrogen, which has been confirmed to be effective in selectivity and stability.

[0006] In general, a contact combustion hydrogen sensor has a structure in which a substrate and a detection element and a compensation element are each arranged on the upper portion of the substrate.

[0007] In this case, there is a problem in that it is impossible to know whether hydrogen detection was performed accurately if either of the detection element and compensation element deteriorates.

[0008] In particular, hydrogen is a gas that is prone to spontaneous combustion or explosion when combined with oxygen in the atmosphere, and although its ignition temperature is high compared to other combustibles, its minimum ignition energy is very low, so it can be easily ignited by ignition sources such as static electricity.

[0009] If the detection element and compensation element of a contact combustion hydrogen sensor cannot accurately detect hydrogen leakage due to deterioration, serious stability problems may occur.

[0010] Therefore, research is needed on a contact combustion type hydrogen sensor that can prevent accidents caused by hydrogen leaks while ensuring a longer replacement cycle for the hydrogen sensor.

[0011] The technical problem to be achieved by the present invention is to provide a contact combustion type hydrogen sensor and a method for manufacturing the same, which can prevent accidents caused by hydrogen leakage while ensuring a longer replacement cycle of the hydrogen sensor.

[0012] However, the problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

[0013] According to one embodiment of the present invention, a contact combustion type hydrogen sensor is provided, comprising: a substrate; a first sensor chip disposed on the substrate; and a second sensor chip disposed spaced apart from the first sensor chip in the height direction; wherein the first sensor chip and the second sensor chip each include a support and a detection element and a compensation element disposed on the support.

[0014] The support of the first sensor chip and the second sensor chip is characterized in that a through hole is arranged, and a pillar structure is inserted into the through hole of the first sensor chip and the through hole of the second sensor chip facing the through hole of the first sensor chip, so that the second sensor chip is connected to the first sensor chip in a state where it is spaced apart in the height direction.

[0015] The through holes arranged in the support of the first sensor chip and the second sensor chip are characterized in that they are arranged at each end edge of the support.

[0016] The above pillar structure is characterized by including a non-conductive material.

[0017] The detection element included in each of the first sensor chip and the second sensor chip is characterized in that it includes a platinum group catalyst and ceramic powder.

[0018] The compensation element included in each of the first sensor chip and the second sensor chip is characterized in that it includes ceramic powder and does not include a catalyst.

[0019] Another embodiment of the present invention provides a method for manufacturing a catalytic combustion type hydrogen sensor, comprising: providing a first sensor chip including a first support and a detection element and a compensation element arranged on an upper portion of the first support; providing a second sensor chip including a second support and a detection element and a compensation element arranged on an upper portion of the second support; forming through holes at edges of the first and second supports of the first and second sensor chips; inserting a pillar structure into the through hole of the first sensor chip and the through hole of the second sensor chip facing the through hole of the first sensor chip to combine the second sensor chip with the first sensor chip in a state spaced apart from the first sensor chip in the height direction; and arranging the combined first and second sensor chips on a substrate.

[0020] In one embodiment of the present invention, a contact combustion type hydrogen sensor is provided, which includes a first sensor chip and a second sensor chip each including a detection element and a compensation element, and wherein the second sensor chip is arranged to be spaced apart from the first sensor chip in the height direction, thereby enabling a longer replacement cycle compared to a conventional contact combustion type hydrogen sensor, and preventing accidents caused by hydrogen leakage in advance.

[0021] In particular, according to one embodiment of the present invention, since the first sensor chip and the second sensor chip each include a detection element and a compensation element, each of the first sensor chip and the second sensor chip constitutes one contact combustion type hydrogen sensor, and it is easy to determine whether a failure has occurred due to deterioration of either the first sensor chip or the second sensor chip, so that the replacement cycle can be longer than that of a conventional contact combustion type hydrogen sensor, and hydrogen can be detected accurately, so that it is excellent in terms of stability.

[0022] Specifically, a contact combustion type hydrogen sensor according to one embodiment of the present invention includes a first sensor chip and a second sensor chip that are arranged to be spaced apart from each other in the height direction, and normally, power is connected to only one of the two sensor chips to wait for detection, and when leaked hydrogen is detected, power is also connected to the other sensor chip to quickly check whether a failure has occurred due to deterioration of the existing chip.

[0023] Due to this, the replacement cycle can be longer than that of existing contact combustion hydrogen sensors, and accidents caused by hydrogen leakage can be prevented in advance.

[0024] In addition, the contact combustion type hydrogen sensor according to one embodiment of the present invention can check whether there is a leak in the process of storing hydrogen produced in a hydrogen production facility, can check whether there is a leak in the process of charging hydrogen in a hydrogen fuel cell vehicle at a hydrogen charging station, and can check whether there is a leak of hydrogen in the process of using hydrogen during operation in a hydrogen fuel electric vehicle, and can quickly check whether there is a failure of the sensor chip in the process of checking whether there is a hydrogen leak, thereby improving economy and stability such as replacement cycle.

[0025] The effects of the present invention are not limited to the effects described above, and effects not mentioned will be clearly understood by those skilled in the art from the present specification and the attached drawings.

[0026] Figure 1 is a schematic plan view of a contact combustion type hydrogen sensor according to one embodiment of the present invention as viewed from above.

[0027] Fig. 2 is a schematic plan view showing the form in which the first sensor chip and the second sensor chip of the contact combustion type hydrogen sensor of Fig. 1 are connected.

[0028] FIG. 3 is a schematic side view of the contact combustion type hydrogen sensor of FIG. 1, in which the first sensor chip and the second sensor chip are connected.

[0029] In this specification, when a part is said to "include" a certain component, this does not mean that it excludes other components, but rather that it may include other components, unless otherwise specifically stated.

[0030] In this specification, when it is said that a member is located “on” another member, this includes not only cases where the member is in contact with the other member, but also cases where another member exists between the two members.

[0031] In this specification, the terms “step of” and “step of” do not mean “step for”.

[0032]

[0033] The specific details for implementing the present invention will be described in detail with reference to the attached drawings below.

[0034] Fig. 1 is a schematic plan view of a contact combustion type hydrogen sensor according to one embodiment of the present invention, viewed from above. Fig. 2 is a schematic plan view showing a configuration in which a first sensor chip and a second sensor chip are connected among the contact combustion type hydrogen sensor of Fig. 1. Fig. 3 is a schematic side view of a configuration in which a first sensor chip and a second sensor chip are connected among the contact combustion type hydrogen sensor of Fig. 1.

[0035] Referring to FIGS. 1 to 3, a contact combustion type hydrogen sensor (100) according to one embodiment of the present invention includes a substrate (110); a first sensor chip (120) disposed on the substrate (110); and a second sensor chip (130) disposed spaced apart in the height direction from the first sensor chip (120). The first sensor chip (120) and the second sensor chip (130) each include a support (121, 131) and a detection element (122, 132) and a compensation element (123, 133) disposed on the support (121, 131).

[0036] The above substrate (110) is not particularly limited and may be, for example, a glass substrate or an ITO substrate, and may be composed of a material having electrical insulation properties such as alumina or silicon oxide.

[0037] A contact combustion type hydrogen sensor (100) according to one embodiment of the present invention includes a first sensor chip (120) arranged on the substrate (110) and a second sensor chip (130) arranged spaced apart in the height direction from the first sensor chip (120).

[0038] In general, a contact combustion hydrogen sensor has a structure in which a substrate and a detection element and a compensation element are each arranged on the upper portion of the substrate.

[0039] In this case, there is a problem in that it is impossible to know whether hydrogen detection was performed accurately if either of the detection element and compensation element deteriorates.

[0040] In particular, hydrogen is a gas that is prone to spontaneous combustion or explosion when combined with oxygen in the atmosphere, and although its ignition temperature is high compared to other combustibles, its minimum ignition energy is very low, so it can be easily ignited by ignition sources such as static electricity.

[0041] If the detection element and compensation element of a contact combustion hydrogen sensor cannot accurately detect hydrogen leakage due to deterioration, serious stability problems may occur.

[0042] However, according to one embodiment of the present invention, since one contact combustion type hydrogen sensor includes two sensor chips, even if one detection element and compensation element break down due to deterioration as described above, hydrogen can be detected by the remaining sensor chip.

[0043] That is, according to one embodiment of the present invention, since it includes a first sensor chip (120) arranged on the substrate (110) and a second sensor chip (130) arranged spaced apart in the height direction from the first sensor chip (120), even if either the first sensor chip (120) or the second sensor chip (130) breaks down due to deterioration, the remaining sensor chip can detect hydrogen, so accidents due to hydrogen leakage can be prevented, and the replacement cycle of the contact combustion type hydrogen sensor can also be extended, so there is an excellent effect in terms of economic efficiency.

[0044] Meanwhile, if two sensor chips are included in one contact combustion hydrogen sensor, there may be a problem of increasing the sensor area.

[0045] However, in one embodiment of the present invention, since the second sensor chip (130) is arranged to be spaced apart in the height direction from the first sensor chip (120), there is no problem of the sensor area increasing as described above, and the sensor area can be implemented to be the same as that of a conventional contact combustion type hydrogen sensor.

[0046] In addition, since the second sensor chip (130) is positioned to be spaced apart in the height direction from the first sensor chip (120), a space can be formed between the first sensor chip (120) and the second sensor chip (130), so that interference between the two sensor chips can be prevented, and thus there can be no problem in each sensor chip performing its hydrogen detection role.

[0047] According to one embodiment of the present invention, the first sensor chip (120) and the second sensor chip (130) each include a support (121, 131) and a detection element (122, 132) and a compensation element (123, 133) arranged on the support (121, 131).

[0048] The first sensor chip (120) and the second sensor chip (130) each have the structure of a contact combustion type hydrogen sensor and can perform the same hydrogen detection function.

[0049] Accordingly, the first sensor chip (120) and the second sensor chip (130) each include a support (121, 131) and a detection element (122, 132) and a compensation element (123, 133) arranged on the support (121, 131) in the same structure as the contact combustion type hydrogen sensor.

[0050] The above support (121, 131) can be applied without limitation as long as it can form a detection element and a compensation element in a contact combustion type hydrogen sensor, and may be, for example, a silicon substrate or a metal oxide film. For example, if the support (121, 131) is a metal oxide film, it may be a silicon or aluminum oxide film, but is not necessarily limited thereto.

[0051] A detection element (122, 132) and a compensation element (123, 133) are arranged on the upper part of the above support (121, 131).

[0052] The first sensor chip (120) includes a detection element (122) and a compensation element (123) arranged on the upper part of the support (121), and the second sensor chip (130) includes a detection element (132) and a compensation element (133) arranged on the upper part of the support (131).

[0053] In order to place the detection elements (122, 132) and the compensation elements (123, 133) on the upper portion of the support (121, 131) of the first sensor chip (120) and the second sensor chip (130), a metal wire may be placed on each of the support (121, 131), and the metal wire may be a platinum (Pt) wire, but is not necessarily limited thereto.

[0054] A platinum heater that detects hydrogen and performs a heating function may be further disposed on the support (121, 131), but is not necessarily limited thereto. When the platinum heater is further disposed on the support (121, 131), the platinum heater may be formed in a coil shape.

[0055] The detection elements (122, 132) included in each of the first sensor chip (120) and the second sensor chip (130) are characterized by including a platinum group catalyst and ceramic powder.

[0056] The detection elements (122, 132) included in each of the first sensor chip (120) and the second sensor chip (130) are configured to perform the function of detecting hydrogen and may include a platinum group catalyst and ceramic powder.

[0057] The above platinum group catalyst may be platinum (Pd) or palladium (Pd), and may be provided in a form dispersed on an alumina carrier.

[0058] The above detection element (122, 132) may include a platinum group catalyst and ceramic powder, and the ceramic powder may be included for the purpose of increasing the interparticle bonding force of the platinum group catalyst dispersed in the alumina carrier. The ceramic powder is not particularly limited and may be, for example, a glass-based powder.

[0059] The compensation elements (123, 133) included in each of the first sensor chip (120) and the second sensor chip (130) are characterized in that they include ceramic powder and do not include a catalyst.

[0060] The compensation elements (123, 133) included in each of the first sensor chip (120) and the second sensor chip (130) are characterized in that, unlike the detection elements (122, 132), they include ceramic powder and do not include a catalyst.

[0061] The above ceramic powder may be the same material as that contained in the above detection element (122, 132), and may be, for example, a glass-based powder.

[0062]

[0063] According to one embodiment of the present invention, a through hole (140) is arranged in the support (121, 131) of the first sensor chip (120) and the second sensor chip (130), and a pillar structure (150) is inserted into the through hole (140) of the first sensor chip (120) and the through hole (140) of the second sensor chip (130) facing the through hole (140) of the first sensor chip (120), so that the second sensor chip (130) is coupled to the first sensor chip (120) in a state spaced apart in the height direction.

[0064] The through holes (140) arranged in the supports (121, 131) of the first sensor chip (120) and the second sensor chip (130) are characterized in that they are arranged at the end corners of the supports (121, 131), respectively.

[0065] According to one embodiment of the present invention, a through hole (140) is arranged in the support (121, 131) of the first sensor chip (120) and the second sensor chip (130), and a pillar structure (150) is inserted into the through hole (140) of the first sensor chip (120) and the through hole (140) of the second sensor chip (130) facing the through hole (140) of the first sensor chip (120), so that the second sensor chip (130) can be combined and supported while being spaced apart from the first sensor chip (120) in the height direction.

[0066] The above through hole (140) is formed to couple and support the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction, and is characterized in that it is arranged at each end corner of the support (121, 131).

[0067] The above through-hole (140) may be formed at the end corners of the support (121, 131) for the purpose of coupling and supporting the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction. The through-hole may be formed at each of the four end corners of the support (121, 131), and may be formed in multiple numbers in the length direction of each end as needed, or may be formed only at a part of the end corners. Preferably, forming the through-hole at each of the four end corners of the support (121, 131) enables the first sensor chip (120) and the second sensor chip (130) to be stably coupled and supported while being spaced apart in the height direction.

[0068] In order to stably couple and support the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction, a pillar structure (150) is inserted into the through hole (140) of the second sensor chip (130) facing the through hole (140) of the first sensor chip (120).

[0069] The shape, length, thickness, etc. of the above pillar structure (150) are not particularly limited, and can be designed to suit the purpose of stably combining and supporting the first sensor chip (120) and the second sensor chip (130) while spacing them apart in the height direction.

[0070] For example, the shape of the pillar structure (150) may be determined according to the shape of the through hole (140), and when the shape of the through hole (140) is a circle, the shape of the pillar structure (150) may be a cylinder, but is not necessarily limited thereto.

[0071] The thickness of the above pillar structure (150) can be determined according to the shape of the through hole (140), and the thickness of the above pillar structure (150) can be manufactured to a thickness that can be inserted into the through hole (140).

[0072] The length of the above-mentioned pillar structure (150) is not particularly limited, but may have a length that does not cause interference between the first sensor chip (120) and the second sensor chip (130) when the first sensor chip (120) and the second sensor chip (130) are arranged to be spaced apart from each other in the height direction. In this case, in order to prevent interference between the first sensor chip (120) and the second sensor chip (130), it is preferable that the length of the pillar structure (150) be long. However, since the size of the contact combustion hydrogen sensor may increase, considering the allowed size of the contact combustion hydrogen sensor, it is preferable that the pillar structure (150) have a minimum length that does not cause interference between the first sensor chip (120) and the second sensor chip (130).

[0073] The above pillar structure (150) may have a micro pillar shape, but is not necessarily limited thereto.

[0074] The above pillar structure (150) is characterized by including a non-conductive material, and the non-conductive material is not particularly limited, but may be, for example, quartz.

[0075]

[0076] Another embodiment of the present invention comprises the steps of: providing a first sensor chip (120) including a first support (121) and a detection element (122) and a compensation element (123) arranged on the first support (121); providing a second sensor chip (130) including a second support (131) and a detection element (132) and a compensation element (133) arranged on the second support (131); forming a through hole (140) at the corners of the first support (121) and the second support (131) of the first sensor chip (120) and the second sensor chip (130); A method for manufacturing a contact combustion type hydrogen sensor (100) is provided, including the steps of: inserting a pillar structure (150) into a through hole (140) of the first sensor chip (120) and a through hole (140) of the second sensor chip (130) facing the through hole (140) of the first sensor chip (120) to couple the second sensor chip (130) to the first sensor chip (120) in a state spaced apart from the first sensor chip in the height direction; and arranging the coupled first sensor chip (120) and second sensor chip (130) on a substrate (110).

[0077] A method for manufacturing a contact combustion type hydrogen sensor according to another embodiment of the present invention first includes a step of preparing a first sensor chip (120) including a first support (121) and a detection element (122) and a compensation element (123) arranged on the first support (121).

[0078] The first support (121) and the second support (131) described below are not particularly limited as long as they are materials capable of forming a detection element and a compensation element in a contact combustion type hydrogen sensor, and may be, for example, an alumina substrate.

[0079] The method for forming a detection element (122) on the first support (121) can be achieved by preparing a paste containing a platinum group catalyst and ceramic powder dispersed on an alumina carrier and then coating the paste on the first support (121), thereby forming the detection element (122). In this case, the method can also be achieved by forming a metal line on the first support (121) by printing or deposition and then coating the metal line with the paste.

[0080] The method for forming a compensation element (123) on the first support (121) can be as follows: a paste containing ceramic powder is manufactured and then coated on the first support (121), thereby forming the compensation element (123). In this case, the method can also be formed by forming a metal line on the first support (121) by printing or deposition and then coating the metal line with the paste.

[0081] Next, by heat-treating the first support (121) having the detection element (122) and the compensation element (123) formed on the upper portion, a first sensor chip (120) including the detection element (122) and the compensation element (123) arranged on the upper portion of the first support (121) can be prepared.

[0082] Next, a step of preparing a second sensor chip (130) including a second support (131) and a detection element (132) and a compensation element (133) arranged on the second support (131) is performed.

[0083] Since the second sensor chip (130) is a separate sensor chip with the same configuration as the first sensor chip (120), it can be manufactured in the same manner as the manufacturing method of the first sensor chip (120).

[0084] Next, a step of forming a through hole (140) at the corner of the first support (121) and the second support (131) of the first sensor chip (120) and the second sensor chip (130) is performed.

[0085] The step of forming a through hole (140) at the corners of the first support (121) and the second support (131) is a configuration for inserting a pillar structure (150) to support the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction, and can be formed at a level that can stably support the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction. It is preferable to form the through hole (140) at all four corners of the first support (121) and the second support (131) in order to stably support the first sensor chip (120) and the second sensor chip (130) while being spaced apart in the height direction.

[0086] Next, a step is performed in which a pillar structure (150) is inserted into the through hole (140) of the first sensor chip (120) and the through hole (140) of the second sensor chip (130) facing the through hole (140) of the first sensor chip (120) to combine the second sensor chip (130) with the first sensor chip (120) in a state of being spaced apart in the height direction.

[0087] Finally, a step of placing the combined first sensor chip (120) and second sensor chip (130) on the substrate (110) is performed.

[0088] In order to manufacture a contact combustion type hydrogen sensor according to one embodiment of the present invention, a step of preparing a substrate is performed, and the substrate is not particularly limited, but may be, for example, a silicon substrate.

[0089] By the above steps, a contact combustion type hydrogen sensor according to one embodiment of the present invention can be manufactured.

[0090]

[0091] In one embodiment of the present invention, a contact combustion type hydrogen sensor is provided, which includes a first sensor chip and a second sensor chip each including a detection element and a compensation element, and wherein the second sensor chip is arranged to be spaced apart from the first sensor chip in the height direction, thereby enabling a longer replacement cycle compared to a conventional contact combustion type hydrogen sensor, and preventing accidents caused by hydrogen leakage in advance.

[0092] In particular, according to one embodiment of the present invention, since the first sensor chip and the second sensor chip each include a detection element and a compensation element, each of the first sensor chip and the second sensor chip constitutes one contact combustion type hydrogen sensor, and it is easy to determine whether a failure has occurred due to deterioration of either the first sensor chip or the second sensor chip, so that the replacement cycle can be longer than that of a conventional contact combustion type hydrogen sensor, and hydrogen can be detected accurately, so that it is excellent in terms of stability.

[0093] Specifically, a contact combustion type hydrogen sensor according to one embodiment of the present invention includes a first sensor chip and a second sensor chip that are arranged to be spaced apart from each other in the height direction, and normally, power is connected to only one of the two sensor chips to wait for detection, and when leaked hydrogen is detected, power is also connected to the other sensor chip to quickly check whether a failure has occurred due to deterioration of the existing chip.

[0094] Due to this, the replacement cycle can be longer than that of existing contact combustion hydrogen sensors, and accidents caused by hydrogen leakage can be prevented in advance.

[0095] In addition, the contact combustion type hydrogen sensor according to one embodiment of the present invention can check whether there is a leak in the process of storing hydrogen produced in a hydrogen production facility, can check whether there is a leak in the process of charging hydrogen in a hydrogen fuel cell vehicle at a hydrogen charging station, and can check whether there is a leak of hydrogen in the process of using hydrogen during operation in a hydrogen fuel electric vehicle, and can quickly check whether there is a failure of the sensor chip in the process of checking whether there is a hydrogen leak, thereby improving economy and stability such as replacement cycle.

[0096]

[0097] The present invention described above is not limited to the above-described embodiments, as various substitutions and changes can be made within the scope of the technical idea of ​​the present invention by a person having ordinary skill in the art to which the present invention pertains.

[0098] [Explanation of symbols]

[0099] 100: Catalytic combustion hydrogen sensor

[0100] 110: Substrate

[0101] 120: First sensor chip

[0102] 130: Second sensor chip

[0103] 121, 131: Support

[0104] 122, 132: Detector element

[0105] 123, 133: Compensation element

[0106] 140: Through hole

[0107] 150: Column structure

Claims

1. Substrate; A first sensor chip disposed on the substrate; and A second sensor chip is disposed spaced apart from the first sensor chip in the height direction; The above first sensor chip and the second sensor chip are a contact combustion type hydrogen sensor, each including a support and a detection element and a compensation element arranged on the upper part of the support.

2. In paragraph 1, A contact combustion type hydrogen sensor characterized in that through holes are arranged in the supports of the first sensor chip and the second sensor chip, and a pillar structure is inserted into the through hole of the first sensor chip and the through hole of the second sensor chip facing the through hole of the first sensor chip, so that the second sensor chip is connected in a state where it is spaced apart from the first sensor chip in the height direction.

3. In paragraph 2, A contact combustion type hydrogen sensor, characterized in that the through holes arranged in the support of the first sensor chip and the second sensor chip are each arranged at an end edge of the support.

4. In paragraph 2, A contact combustion type hydrogen sensor, characterized in that the above pillar structure includes a non-conductive material.

5. In paragraph 1, A contact combustion type hydrogen sensor, wherein each of the first sensor chip and the second sensor chip includes a detection element including a platinum group catalyst and ceramic powder.

6. In paragraph 1, A contact combustion type hydrogen sensor in which each of the first sensor chip and the second sensor chip includes a compensation element comprising ceramic powder and does not include a catalyst.

7. A step of providing a first sensor chip including a first support and a detection element and a compensation element arranged on the first support; A step of providing a second sensor chip including a second support and a detection element and a compensation element arranged on the second support; A step of forming a through hole at the corners of the first support and the second support of the first sensor chip and the second sensor chip; A step of inserting a pillar structure into the through hole of the first sensor chip and the through hole of the second sensor chip facing the through hole of the first sensor chip to connect the second sensor chip with the first sensor chip in a state spaced apart in the height direction; and A method for manufacturing a contact combustion type hydrogen sensor, comprising: a step of arranging the combined first sensor chip and second sensor chip on a substrate.

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