Multi-gas detection sensor array and multi-gas detection method using same

Abstract

The present invention provides a multi-gas detection sensor array comprising: a substrate; and a plurality of sensor units arranged on the substrate, wherein each of the plurality of sensor units includes a detection unit therein, a microfluidics channel open to the outside is disposed in an upper portion of the detection unit, and each of the plurality of sensor units selectively detects one of a gas atom and a gas compound, which are target materials, from gas introduced into the microfluidics channel.

Description

Multi-gas detection sensor array and multi-gas detection method using the same

[0001] This invention claims the benefit of Korean Patent Application No. 10-2023-0186784 filed with the Korean Intellectual Property Office on December 20, 2023, the entire contents of which are incorporated herein by reference.

[0002] The present invention relates to a multi-gas detection sensor array and a multi-gas detection method using the same.

[0003]

[0004] There are several methods for detecting gases, but the most commonly used methods include potentiostatic electrolysis, infrared absorption, catalytic combustion, and semiconductor methods.

[0005] Among these, the resistive change type gas sensor, which measures the change in resistivity of metal oxides due to gas adsorption and oxidation / reduction reactions, is one of the most widely used electronic nose systems due to its simple principle and relatively low manufacturing cost.

[0006] Since electronic noses are a type of chemical sensor, sensitivity, selectivity, speed, and stability, known as the "4S" (sensitivity, selectivity, speed, and stability), are crucial factors. For precise diagnosis, ultra-high sensitivity sensing characteristics must be secured. Furthermore, superior selectivity, which enables accurate analysis of the desired target gas in environments where multiple gases are present simultaneously, is essential for enhancing the accuracy of electronic noses.

[0007] Meanwhile, although the function of a gas sensor is to detect a specific gas, most sample gases are mixed with gases other than the gas to be measured. In this case, using an array of multiple sensors rather than a single element allows for more reliable detection of the presence of a specific gas from the response pattern of each individual element.

[0008] In this way, the use of a sensor array not only significantly increases selectivity, which is a key requirement for gas sensors, but also enables the implementation of a device useful for detecting complex gases.

[0009] However, existing electronic noses have limitations in terms of sensor sensitivity and stability, which are lower than the human sense of smell, making it difficult to accurately analyze specific gases. Furthermore, the sensor's selectivity is low when mixed with gases other than the target gas, making it susceptible to the influence of other substances in complex environments. This leads to low sensor accuracy and a shortened sensor lifespan.

[0010] Therefore, there is a need to develop an electronic nose system that can solve the selectivity and stability problems of existing electronic noses and reduce the poisoning of the sensor itself.

[0011] ※ Patent literature

[0012] Korean Patent Publication No. 10-2007-0017752

[0013]

[0014] In order to solve the above problems, the present invention provides a multi-gas detection sensor array and a multi-gas detection method using the same.

[0015]

[0016] According to one embodiment of the present invention, a multi-gas detection sensor array is provided, comprising: a substrate; and a plurality of sensor units arranged on the substrate; wherein each of the plurality of sensor units includes a detection unit therein, and a microfluidic tube open to the outside is arranged above the detection unit, and wherein each of the plurality of sensor units selectively detects one of a gas atom and a gas compound, which is a target substance, from a gas that has flowed into the microfluidic tube.

[0017] By making the lengths of the microfluidic tubes arranged in at least one of the plurality of sensor sections different from each other, it may be possible to selectively detect either a gas atom or a gas compound, which is the target substance.

[0018] In the gas introduced into the microfluidic tube, the gas atoms and gas compounds, which are the target substances, are characterized in that the distances of movement inside the microfluidic tube differ depending on the atomic weight or molecular weight.

[0019] The target material, gas atoms and gas compounds, are characterized in that the movement distance inside the microfluidic tube is determined by the following equation 1.

[0020] [Formula 1]

[0021]

[0022] Here, λ is the mean free path, n is the density of molecules, and r is the radius assuming that the molecules are spherical.

[0023] The inner wall of the microfluidic tube disposed in at least one of the plurality of sensor sections may be coated with a coating material, and the coating material may be made different from each other to selectively detect either a gas atom or a gas compound, which is the target material.

[0024] The coating material coated on the inner wall of the above microfluidic tube is characterized by being polar.

[0025] In the gas introduced into the microfluidic tube, a gas compound other than the target substance is characterized in that it combines with any one of the coating materials coated on the inner wall of the microfluidic tube.

[0026] It is characterized in that an atmospheric carbon dioxide removal unit is further arranged on the upper portion of the above plurality of sensor units.

[0027] The above carbon dioxide removal unit is characterized by being a carbon dioxide capture filter.

[0028] The above-mentioned plurality of sensor units are characterized by being electronic nose sensors.

[0029] Another embodiment of the present invention provides a multi-gas detection method using the multi-gas detection sensor array, wherein each of the plurality of sensor units selectively detects one of a gas atom and a gas compound, which is a target substance, from a gas introduced into the microfluidic tube.

[0030]

[0031] In one embodiment of the present invention, a multi-gas detection sensor array including a plurality of sensor sections in which microfluidic tubes are arranged is provided, thereby making it possible to selectively detect either a gas atom or a gas compound, which is a target substance, even when a small amount of a reagent or detection substance is used.

[0032] In addition, compared to conventional electronic nose sensors, it exhibits superior performance in terms of fast response, selectivity, and stability even when analyzing small amounts of samples, and also has excellent analysis accuracy.

[0033] In particular, according to one embodiment of the present invention, a microfluidic tube is placed where gas enters the electronic nose sensor, and substances other than the target substance among the gas reaching the sensor through the length of the microfluidic tube can be filtered.

[0034] In addition, by applying different coating materials to the inner wall of a microfluidic tube or by extending the length of the tube and then coating different coating materials at different locations on the inner wall, the selectivity of the sensor can be increased by pre-selecting unwanted gases.

[0035] In addition, the length of the microfluidic tube or the coating material attached to the inner wall can prevent unwanted gases from reaching the sensor, thereby reducing the poisoning rate of the sensor itself, thereby increasing the stability of the electronic nose sensor.

[0036] In addition, according to one embodiment of the present invention, by differently controlling the length or internal coating material of the microfluidic tube disposed in each sensor section, a target substance can be selected and detected, and gas atoms and gas compounds can be distinguished and detected.

[0037] In addition, according to one embodiment of the present invention, by adding a carbon dioxide capture filter or spraying a hydroxide solution as a carbon dioxide removal unit in the atmosphere on the upper portion of the plurality of sensor units, carbon dioxide, which is a non-polar gas component in the atmosphere, can be filtered in advance, so that polar gas atoms and gas compounds in the atmosphere can be selectively detected.

[0038] According to one embodiment of the present invention, by providing a multi-gas detection sensor array including a plurality of sensor sections in which microfluidic tubes are arranged, it is applicable to the food, medical, and environmental fields, especially to detecting toxic substances dangerous to humans, and shows tremendous potential for expansion across industries.

[0039] FIG. 1 is a perspective view showing a multi-gas detection sensor array including a plurality of sensor units according to one embodiment of the present invention.

[0040] Fig. 2 is an enlarged perspective view of one of the plurality of sensor units of Fig. 1.

[0041] Figure 3 is a plan view showing the hole of a microfluidic tube as viewed from above of one of the plurality of sensor units.

[0042] Figure 4 is a cross-sectional view in the thickness direction of a microfluidic tube arranged in each of a plurality of sensor sections.

[0043] ※ Explanation of symbols

[0044] 100: Multi-gas detection sensor array

[0045] 110: substrate 120: sensor part

[0046] 200: Microfluidics tube 300: Detection unit

[0047]

[0048] In this specification, when a part is said to "include" a certain component, this does not mean that it excludes other components, but rather that it may include other components, unless otherwise specifically stated.

[0049] In this specification, when it is said that a member is located “on” another member, this includes not only cases where the member is in contact with the other member, but also cases where another member exists between the two members.

[0050] In this specification, the terms “step of” and “step of” do not mean “step for”.

[0051] The specific details for implementing the present invention will be described in detail with reference to the attached drawings below.

[0052] FIG. 1 is a perspective view showing a multi-gas detection sensor array including a plurality of sensor units according to one embodiment of the present invention. FIG. 2 is an enlarged perspective view of one of the plurality of sensor units of FIG. 1. FIG. 3 is a plan view showing the holes of a microfluidic tube viewed from above from one of the plurality of sensor units. FIG. 4 is a cross-sectional view in the thickness direction of a microfluidic tube arranged in each of the plurality of sensor units.

[0053] Referring to FIGS. 1 to 4, a multi-gas detection sensor array (100) according to an embodiment of the present invention includes a substrate (110); and a plurality of sensor units (120) arranged on the substrate (110), each of the plurality of sensor units (120) including a detection unit (300) therein, and a microfluidic tube (200) open to the outside is arranged above the detection unit (300), and each of the plurality of sensor units (120) is characterized in that it selectively detects either a gas atom or a gas compound, which is a target substance, from a gas that has flowed into the microfluidic tube (200).

[0054] The substrate (110) is not particularly limited and may be, for example, a glass substrate or an ITO substrate, and may be composed of a material having electrical insulation properties such as alumina or silicon oxide.

[0055] According to one embodiment of the present invention, a plurality of sensor units (120) are arranged on the substrate (110).

[0056] Each of the plurality of sensor units (120) above serves to detect gas atoms and gas compounds, which are target substances in the inflowing gas, and may be a resistance-change type gas sensor that measures changes in the resistivity of a metal oxide due to gas adsorption and oxidation / reduction reactions, but is not necessarily limited thereto. Each of the plurality of sensor units (120) above may be an electronic nose sensor.

[0057] In a multi-gas detection sensor array including a plurality of sensor units according to one embodiment of the present invention, the number of the plurality of sensor units (120) arranged on the substrate (110) is not particularly limited, and may be arranged in a 4X4 array as in FIG. 1, and the number of sensor units (120) may be determined according to the type and number of gas atoms or gas compounds to be detected, such as a 3X3, 5X5, or 6X6 array.

[0058] Each of the plurality of sensor units (120) includes a detection unit (300) therein. Each of the plurality of sensor units (120) can detect gas atoms and gas compounds, which are target substances within the inflowing gas, through the detection unit (300).

[0059] The above detection unit (300) may be the same as a general detection unit used in a resistance change type gas sensor that measures the change in resistivity of a metal oxide due to gas adsorption and oxidation / reduction reaction.

[0060] For example, the sensing unit (300) may include one or more metal oxide semiconductor materials selected from SnO2, TiO2, ZnO, VO2, In2O3, NiO, MoO3, SrTiO3, Fe2O3, WO3, and CuO, and may particularly include carbon nanotubes and graphene, but is not necessarily limited thereto.

[0061] When the above metal oxide semiconductor materials are in particle form, a chemically induced change in resistance occurs on the surface of the metal oxide particles. When a reducing gas such as H2 or CO or an oxidizing gas such as NOX or Cl2 is adsorbed on the surface of the metal oxide exposed to the atmosphere, the electron depletion layer becomes thinner or thicker, respectively, resulting in a decrease or increase in resistance, which is the principle behind sensor operation.

[0062] The average thickness of the above detection unit (300) is preferably 10 nm to 100 nm, and more preferably, it may have a thickness of 10 nm to 20 nm, which corresponds to the thickness of the depletion layer with the best gas response characteristics.

[0063] Each of the plurality of sensor units (120) includes a detection unit (300) therein, and a microfluidic tube (200) open to the outside is arranged above the detection unit (300), and each of the plurality of sensor units (120) is characterized in that it selectively detects either a gas atom or a gas compound, which is a target substance, from a gas that has flowed into the microfluidic tube (200).

[0064] According to one embodiment of the present invention, a microfluidic tube (200) open to the outside is arranged above the detection unit (300) in each of the plurality of sensor units (120).

[0065] In one embodiment of the present invention, by providing a multi-gas detection sensor array (100) including a plurality of sensor sections (120) in which microfluidic tubes (200) are arranged, it is possible to selectively detect either a gas atom or a gas compound, which is a target substance, even when using a small amount of a reagent or detection substance.

[0066] In addition, compared to conventional electronic nose sensors, it exhibits superior performance in terms of fast response, selectivity, and stability even when analyzing small amounts of samples, and also has excellent analysis accuracy.

[0067] The above microfluidic tube (200) is not particularly limited, and a general microfluidic tube can be applied, and can be placed on the upper side of the detection unit (300) with one end open to the outside.

[0068] The above microfluidic tube (200) is a channel formed as a closed passage, and has a structure in which gas atoms and gas compounds introduced through the long tube can move.

[0069] The above microfluidic tubes (200) can be arranged in a plurality of aligned forms in each sensor section (120) as shown in FIGS. 3 and 4.

[0070] A method for arranging a microfluidic tube (200) above the sensing portion (300) can be, for example, a polymer material applied to a sensing film and then surface patterned to form a plurality of aligned microfluidic tubes (200).

[0071] Alternatively, a plurality of aligned microfluidic tubes (200) can be formed by a nanoimprinting method on a polymer material applied on a sensing film.

[0072] According to one embodiment of the present invention, the lengths of the microfluidic tubes (200) arranged in at least one of the plurality of sensor units (120) may be different from each other to selectively detect either the gas atoms or the gas compounds, which are the target substances.

[0073] In a multi-gas detection sensor array (100) including a plurality of sensor units (120) in which microfluidic tubes (200) are arranged according to one embodiment of the present invention, by applying the length of the microfluidic tubes (200) differently to each sensor unit (120), it is possible to selectively detect one of the target substances, gas atoms and gas compounds, which are different from each other for each sensor unit (120).

[0074] According to one embodiment of the present invention, a microfluidic tube is placed where gas enters an electronic nose sensor, and substances other than a target substance among the gas reaching the sensor through the length of the microfluidic tube can be filtered.

[0075] In the gas introduced into the microfluidics tube (200), the gas atoms and gas compounds, which are the target substances, are characterized in that the distances of movement inside the microfluidics tube (200) differ depending on the atomic weight or molecular weight.

[0076] Accordingly, when the length of the microfluidic tube (200) is applied differently for each sensor unit (120), only one of the target substances, the gas atom or the gas compound, can be detected by the detection unit for each sensor unit (120), and substances other than the target substances can be filtered out.

[0077] Therefore, compared to conventional electronic nose sensors, it exhibits superior performance in terms of fast response, selectivity, and stability even when analyzing small amounts of samples, and also has excellent analysis accuracy.

[0078] The target material, gas atoms and gas compounds, are characterized in that the movement distance inside the microfluidic tube (200) is determined by the following equation 1.

[0079] [Formula 1]

[0080]

[0081] Here, λ is the mean free path, n is the density of molecules, and r is the radius assuming that the molecules are spherical.

[0082] Table 1 below shows the travel distances of gas components in the atmosphere.

[0083]

[0084] In the above Table 1, P represents pressure, and the movement distance of gas components can be calculated under various pressure conditions. In the present invention, since it is under atmospheric pressure conditions, P is 1, and therefore the movement distance in Table 1 can be used as is.

[0085] According to one embodiment of the present invention, the inner wall of the microfluidic tube (200) disposed in at least one of the plurality of sensor units (120) is coated with a coating material, and by making the coating material different from each other, it is possible to selectively detect either a gas atom or a gas compound, which is the target material.

[0086] The coating material coated on the inner wall of the above microfluidic tube (200) is characterized by being polar.

[0087] In the gas flowing into the microfluidics tube (200), a gas compound other than the target material is characterized in that it combines with any one of the coating materials coated on the inner wall of the microfluidics tube (200).

[0088] That is, according to one embodiment of the present invention, the coating material coated on the inner wall of the microfluidic tube (200) combines with a substance other than the target substance among the gas reaching the sensor, so that only the intended target substance can be detected by the sensor.

[0089] In addition, the inner wall of the microfluidic tube (200) disposed in at least one of the plurality of sensor units (120) is coated with a coating material, and since the coating material has polarity, it is possible to distinguish between the gas atoms and gas compounds, which are the target substances.

[0090] The above coating material can be coated on the inner wall of the microfluidic tube (200), and by increasing the length of the microfluidic tube (200), different coating materials can be coated at different positions on the inner wall. When different coating materials are coated at different positions on the inner wall of the microfluidic tube (200), gas atoms or gas compounds other than the target material can be filtered out by combining with gas atoms or gas compounds other than the target material.

[0091] In addition, by applying different coating materials to the inner wall of a microfluidic tube or by extending the length of the tube and then coating different coating materials at different locations on the inner wall, the selectivity of the sensor can be increased by pre-selecting unwanted gases.

[0092] In addition, the length of the microfluidic tube or the coating material attached to the inner wall can prevent unwanted gases from reaching the sensor, thereby reducing the poisoning rate of the sensor itself, thereby increasing the stability of the electronic nose sensor.

[0093] In addition, according to one embodiment of the present invention, by differently controlling the length or internal coating material of the microfluidic tube disposed in each sensor section, a target substance can be selected and detected, and gas atoms and gas compounds can be distinguished and detected.

[0094] According to one embodiment of the present invention, a carbon dioxide removal unit is further arranged above the plurality of sensor units (120).

[0095] In general, there are approximately 25 types of gas atoms and gas compounds that exist in a gaseous state in the atmosphere at room temperature. All of the above gas compounds, except carbon dioxide, are polar and can therefore bind to the coating material.

[0096] However, in the case of carbon dioxide as described above, since it is non-polar, it cannot combine with the coating material and is therefore difficult to filter, so in one embodiment of the present invention, a carbon dioxide removal unit in the atmosphere is further arranged above the plurality of sensor units (120).

[0097] The above carbon dioxide removal unit is characterized by being a carbon dioxide capture filter, but is not necessarily limited thereto, and carbon dioxide may be filtered by introducing a gas sample from which carbon dioxide has been removed by spraying a hydroxide solution into the atmosphere without installing a separate carbon dioxide removal unit into the microfluidic tube.

[0098] In one embodiment of the present invention, a multi-gas detection sensor array including a plurality of sensor sections in which microfluidic tubes are arranged is provided, thereby making it possible to selectively detect either a gas atom or a gas compound, which is a target substance, even when a small amount of a reagent or detection substance is used.

[0099] In addition, compared to conventional electronic nose sensors, it exhibits superior performance in terms of fast response, selectivity, and stability even when analyzing small amounts of samples, and also has excellent analysis accuracy.

[0100] In particular, according to one embodiment of the present invention, a microfluidic tube is placed at a location where gas enters an electronic nose sensor, and substances other than a target substance among the gas reaching the sensor through the length of the microfluidic tube can be filtered.

[0101] In addition, by applying different coating materials to the inner wall of a microfluidic tube or by extending the length of the tube and then coating different coating materials at different locations on the inner wall, the selectivity of the sensor can be increased by pre-selecting unwanted gases.

[0102] In addition, the length of the microfluidic tube or the coating material attached to the inner wall can prevent unwanted gases from reaching the sensor, thereby reducing the poisoning rate of the sensor itself, thereby increasing the stability of the electronic nose sensor.

[0103] In addition, according to one embodiment of the present invention, by differently controlling the length or internal coating material of the microfluidic tube arranged in each sensor section, a target substance can be selected and detected, and gas atoms and gas compounds can be distinguished and detected.

[0104] According to one embodiment of the present invention, by providing a multi-gas detection sensor array including a plurality of sensor sections in which microfluidic tubes are arranged, it is applicable to the food, medical, and environmental fields, especially to detecting toxic substances dangerous to humans, and shows tremendous potential for expansion across industries.

[0105] The present invention described above is not limited to the above-described embodiments, as various substitutions and changes can be made within the scope of the technical idea of ​​the present invention by a person having ordinary skill in the art to which the present invention pertains.

Claims

1. Substrate; and It comprises a plurality of sensor parts arranged on the above substrate; Each of the above plurality of sensor sections includes a detection section inside, and a microfluidic tube open to the outside is arranged on the upper portion of the detection section. A multi-gas detection sensor array, characterized in that each of the plurality of sensor sections selectively detects either a gas atom or a gas compound, which is a target substance, from the gas flowing into the microfluidics tube.

2. In paragraph 1, A multi-gas detection sensor array that selectively detects one of gas atoms and gas compounds, which are target substances, by making the lengths of the microfluidic tubes arranged in at least one of the plurality of sensor sections different from each other.

3. In paragraph 2, A multi-gas detection sensor array, characterized in that, in the gas introduced into the microfluidics tube, the gas atoms and gas compounds, which are the target substances, have different travel distances inside the microfluidics tube depending on the atomic weight or molecular weight.

4. In paragraph 3, A multi-gas detection sensor array characterized in that the moving distance of the target substance, which is a gas atom or a gas compound, inside the microfluidic tube is determined by the following equation 1. [Formula 1] Here, λ is the mean free path, n is the density of molecules, and r is the radius assuming that the molecules are spherical.

5. In paragraph 1, A multi-gas detection sensor array in which the inner wall of the microfluidic tube disposed in at least one of the plurality of sensor sections is coated with a coating material, and the coating materials are made different from each other to selectively detect either a gas atom or a gas compound, which is the target substance.

6. In paragraph 5, A multi-gas detection sensor array characterized in that the coating material coated on the inner wall of the microfluidics tube has polarity.

7. In paragraph 5, A multi-gas detection sensor array, characterized in that, in the gas introduced into the microfluidics tube, a gas compound other than a target substance binds to any one of the coating materials coated on the inner wall of the microfluidics tube.

8. In paragraph 1, A multi-gas detection sensor array characterized in that an atmospheric carbon dioxide removal unit is further arranged on the upper portion of the plurality of sensor units.

9. In paragraph 8, A multi-gas detection sensor array characterized in that the above carbon dioxide removal unit is a carbon dioxide capture filter.

10. In paragraph 1, A multi-gas detection sensor array, characterized in that the plurality of sensor units are electronic nose sensors.

11. A multi-gas detection method using a multi-gas detection sensor array according to any one of claims 1 to 10, A multi-gas detection method, characterized in that each of the plurality of sensor sections selectively detects either a gas atom or a gas compound, which is a target substance, from the gas flowing into the microfluidics tube.

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