Substrate suction device

Abstract

This substrate suction device comprises: a stage including first suction holes and an insertion hole, and having an upper surface on which a product can be placed; and a mask having substantially the same shape as the product, and including second suction holes, wherein when the mask is inserted into the stage along the insertion hole, the second suction holes correspond to some of the first suction holes in a planar view.

Description

Substrate adsorption device

[0001] The present invention relates to a substrate adsorption device.

[0002] As information technology advances, the importance of display devices, which serve as a link between users and information, is growing. In response, the use of display devices such as liquid crystal displays (LCDs) and organic light-emitting display devices (OLEDs) is increasing.

[0003] The manufacturing process for display devices begins with the substrate being secured to a stage. As display device sizes diversify, the size and shape of the substrates used for display devices also diversify. Changing the stage for each display device substrate can incur costs related to stage flatness adjustments and stage replacement.

[0004] Embodiments of the present invention are directed to providing a substrate adsorption device that employs substrates of various sizes and shapes.

[0005] A substrate adsorption device according to an embodiment of the present disclosure comprises a stage having an upper surface on which a product can be placed, the stage including first adsorption holes and an insertion port; a mask having a shape substantially identical to a shape of the product and including second adsorption holes, wherein when the mask is inserted into the stage along the insertion port, the second adsorption holes can coincide with some of the first adsorption holes on a plane.

[0006] In an embodiment, the first adsorption holes are located on the upper surface of the stage, and the first adsorption holes can be connected to the interior of the insertion port.

[0007] In an embodiment, the stage further includes a vacuum hole, the vacuum hole is located on a lower surface of the stage, and the vacuum hole can be connected to the interior of the insertion port.

[0008] In an embodiment, the holes among the first adsorption holes that match the second adsorption holes can form a vacuum region corresponding to the shape of the product.

[0009] In an embodiment, the size of each of the first adsorption holes may be substantially the same as the size of each of the second adsorption holes, and the arrangement spacing of each of the first adsorption holes may be substantially the same as the arrangement spacing of each of the second adsorption holes.

[0010] In an embodiment, the first adsorption holes may be arranged parallel along the first direction and the second direction.

[0011] In an embodiment, the insertion hole can be etched in the first direction.

[0012] In an embodiment, the first adsorption holes and the second adsorption holes may be etched in a third direction that is perpendicular to the first direction and the second direction.

[0013] A substrate adsorption device according to an embodiment of the present disclosure comprises a stage having adsorption holes and an insertion port, a product being placed on an upper surface of the stage, and a mask having an opening having a shape substantially the same as a shape of the product, wherein when the mask is inserted into the stage along the insertion port, the opening can overlap the adsorption holes on a plane.

[0014] In an embodiment, the adsorption holes are located on the upper surface of the stage, and the adsorption holes can be connected to the interior of the insertion port.

[0015] In an embodiment, the stage further includes a vacuum hole, the vacuum hole is located on a lower surface of the stage, and the vacuum hole can be connected to the interior of the insertion port.

[0016] In an embodiment, the substrate adsorption device further includes a vacuum pump for sucking gas from the stage, and the vacuum hole can be connected to the vacuum pump.

[0017] In an embodiment, among the above adsorption holes, holes overlapping the opening on a plane can be opened to form a vacuum region corresponding to the shape of the product.

[0018] In an embodiment, holes among the above adsorption holes that do not overlap with the opening on a plane can be closed.

[0019] In an embodiment, the adsorption holes may be arranged parallel along the first direction and the second direction.

[0020] In an embodiment, the insertion hole can be etched in the first direction.

[0021] In an embodiment, the stage may further include a fastening hole etched in the first direction, and the substrate adsorption device may further include a stopper fastened to the fastening hole.

[0022] In an embodiment, the adsorption holes and the openings may be etched in a third direction that is perpendicular to the first direction and the second direction.

[0023] In an embodiment, the stage may further include a rail formed along the first direction inside the insertion port, and the mask may further include a roller rolling on the rail.

[0024] In an embodiment, the rail may have a slope at the end of the rail in the first direction inside the insertion hole.

[0025] According to the substrate adsorption device of the present invention, manpower and stage replacement costs according to stage flatness setting can be reduced.

[0026] The above and other aspects, features and advantages of specific embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings.

[0027] FIG. 1 is a perspective view of a substrate adsorption device according to one embodiment of the present disclosure.

[0028] Figure 2 is a plan view of the stage of Figure 1.

[0029] Figure 3 is a cross-sectional view of the stage taken along line I-I' shown in Figure 2.

[0030] Figure 4 is a plan view of a stage with a mask inserted.

[0031] Figure 5 is a cross-sectional view of the stage taken along line Ⅱ-Ⅱ' shown in Figure 4.

[0032] Figure 6 is a perspective view of a substrate adsorption device according to one embodiment of the present invention.

[0033] Figures 7 and 8 are plan views of a stage with a mask inserted according to embodiments.

[0034] Figure 9 is a cross-sectional view of the stage taken along line Ⅲ-Ⅲ' shown in Figure 8.

[0035] FIG. 10 is a perspective view of a stage according to one embodiment of the present disclosure.

[0036] Figure 11 is a plan view of the stage illustrated in Figure 10.

[0037] Fig. 12 is a cross-sectional view of the stage taken along line Ⅳ-Ⅳ' shown in Fig. 11.

[0038] Hereinafter, various embodiments of the present disclosure will be described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present disclosure. The present disclosure may be implemented in various different forms and is not limited to the embodiments described below.

[0039] Parts unrelated to the present invention in the drawings may be omitted to clarify the description of the present disclosure, and the same drawing reference numerals may be assigned to similar parts throughout the specification.

[0040] In this application, terms such as "include" or "have" are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but should be understood to not preemptively exclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof. In addition, when a part such as a layer, film, region, or plate is said to be "on" another part, this includes the case where it is "directly above" the other part or the case where there is another part in between. In addition, in this specification, when it is said that a part such as a layer, film, region, or plate is formed on another part, the direction in which it is formed is not limited to the upper direction, but also includes the case where it is formed in the side or lower direction. Conversely, when it is said that a part such as a layer, film, region, or plate is "under" another part, this includes not only the case where it is "directly below" the other part, but also the case where there is another part in between.

[0041] The term "and / or" includes any combination of one or more of the associated constructs. For example, "A and / or B" can be understood to mean "A, B, or A and B."

[0042] For the purposes of this disclosure, the phrase "at least one of A and B" may be interpreted as A alone, B alone, or any combination of A and B. Additionally, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as X alone, Y alone, Z alone, or any combination of two or more of X, Y, and Z.

[0043] In the present disclosure, when two elements "communicate" with each other, the two elements may be connected to each other so that a passage is formed through the two elements.

[0044] Unless otherwise defined or implied herein, all terms (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art relevant to this disclosure. Terms defined in commonly used dictionaries should be interpreted to have a meaning consistent with their meaning in the context of the relevant technology and disclosure, and should not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0045] FIG. 1 is a perspective view of a substrate adsorption device according to one embodiment of the present disclosure.

[0046] Referring to FIG. 1, a substrate adsorption device (10) according to one embodiment of the present disclosure includes a stage (100) and a mask (200a).

[0047] The stage (100) can provide a space where a product can be placed. For example, the product can be a substrate of a display device.

[0048] A product can be mounted on the upper surface of the stage (100). For example, if the product is a substrate of a display device, the substrate can be mounted on the upper surface of the stage (100) to perform a process of forming a thin film or pattern on the substrate, a process of mounting electronic components on the substrate, or a process of moving the substrate.

[0049] The stage (100) may include first adsorption holes (HL1), an insertion hole (110), and a vacuum hole (120). The first adsorption holes (HL1) may be arranged on the upper surface of the stage (100) along a first direction or a second direction. The first adsorption holes (HL1) may be etched in a third direction. The first direction, the second direction, and the third direction may be mutually perpendicular directions. Here, the third direction may be a direction perpendicular to the first direction and the second direction.

[0050] The insertion hole (110) can be etched along the first direction on the side of the stage (100). The interior of the insertion hole (110) can be connected to each of the first adsorption holes (HL1).

[0051] A vacuum hole (120) can be etched along a third direction on the lower surface of the stage (100). The vacuum hole (120) can be connected to the interior of the insertion hole (110).

[0052] In one embodiment, the first adsorption holes (HL1), the interior of the insertion hole (110), and the vacuum hole (120) may be connected to each other to form a passage that allows gas to be discharged from the interior of the stage (100). The interior of the stage (100) may refer to a space such as the interior of the insertion hole (110) etched in the first direction.

[0053] In one embodiment, the substrate adsorption device (10) may further include a vacuum pump (not shown) that sucks gas inside the stage (100). The vacuum pump (not shown) is connected to a vacuum hole (120) and can discharge gas inside the stage (100) to the outside.

[0054] The mask (200a) may have a shape substantially identical to or similar to that of a product mounted on the upper surface of the stage (100). The mask (200a) may be inserted into the stage (100) along the insertion port (110).

[0055] The mask (200a) may include second adsorption holes (HL2). The second adsorption holes (HL2) may be arranged on the upper surface of the mask (200a) along the first direction or the second direction. The second adsorption holes (HL2) may be etched in the third direction.

[0056] The size of each of the first adsorption holes (HL1) may be the same as the size of each of the second adsorption holes (HL2), and the arrangement intervals of each of the first adsorption holes (HL1) may be the same as the arrangement intervals of each of the second adsorption holes (HL2).

[0057] Fig. 2 is a plan view of the stage of Fig. 1. Fig. 3 is a cross-sectional view of the stage taken along line I-I' shown in Fig. 2.

[0058] Referring to FIG. 2, the first adsorption holes (HL1) of the stage (100) are illustrated. Referring to FIG. 3, the first adsorption holes (HL1), the interior of the insertion port (110), and the vacuum hole (120) are connected. Since the first adsorption holes (HL1), the interior of the insertion port (110), and the vacuum hole (120) can be connected to each other, a passage that enables gas discharge from the interior of the stage (100) can be formed.

[0059] Figure 4 is a plan view of a stage with a mask inserted.

[0060] Referring to FIGS. 1 and 4, the mask (200a) can be inserted into the stage (100) along the insertion hole (110) etched in the first direction. When the mask (200a) is inserted into the stage (100), the second adsorption holes (HL2) of the mask (200a) can coincide with some of the first adsorption holes (HL1) of the stage (100) on a plane.

[0061] Accordingly, some of the second adsorption holes (HL2) and the first adsorption holes (HL1) that coincide with the second adsorption holes (HL2) may form open holes (OH). The open holes (OH) may be connected to the interior of the insertion hole (110) and the vacuum hole (120), thereby forming a passage that enables gas discharge from the interior of the stage (100).

[0062] Figure 5 is a cross-sectional view of the stage taken along line Ⅱ-Ⅱ' shown in Figure 4.

[0063] Referring to FIG. 5, a mask (200a) can be inserted into a stage (100), and a product (OB) can be placed on the upper surface of the stage (100).

[0064] The mask (200a) may have a shape substantially identical to or similar to the shape of the product (OB).

[0065] The second adsorption holes (HL2) may be connected to some of the first adsorption holes (HL1) to form passages. For example, the first adsorption hole (HL1_1) may be connected to the second adsorption hole (HL2_1), the first adsorption hole (HL1_2) may be connected to the second adsorption hole (HL2_2), and the first adsorption hole (HL1_3) may be connected to the second adsorption hole (HL2_3) to form passages. For example, on a plane, some of the first adsorption holes (HL1) may coincide with the second adsorption holes (HL2).

[0066] When the product (OB) is placed on a passage formed by connecting the second adsorption holes (HL2) and some of the first adsorption holes (HL1), and the gas inside the stage (100) is discharged through the vacuum hole (120), a vacuum region corresponding to the shape of the product (OB) can be formed.

[0067] For example, among the first adsorption holes (HL1), the holes (HL1_1 to HL1_3) that match the second adsorption holes (HL2) can form a vacuum region corresponding to the shape of the product (OB).

[0068] While three second adsorption holes (HL2_1 to HL2_3) are illustrated in FIG. 5, the number of second adsorption holes (HL2) may vary depending on the shape of the product (OB). In addition, as the number of second adsorption holes (HL2) may vary, the number of holes that match the second adsorption holes (HL2) among the first adsorption holes (HL1) may vary.

[0069] By inserting a mask (200a) having a shape substantially identical to or similar to the shape of the product (OB) into the stage (100) without replacing the stage (100) on which the product (OB) is placed, the product (OB) can be absorbed while maintaining the flatness of the stage (100) even if the shape of the product (OB) changes.

[0070] Since the product (OB) can be absorbed while maintaining the flatness of the stage (100) even when the shape of the product (OB) changes, the cost of manpower for setting the flatness of the stage (100) and replacement of the top plate of the stage (100) can be reduced whenever the shape of the product (OB) changes.

[0071] Figure 6 is a perspective view of a substrate adsorption device according to one embodiment of the present invention.

[0072] Referring to FIG. 6, a substrate adsorption device (10) according to an embodiment of the present invention includes a stage (100) and a mask (200b). The stage (100) of FIG. 6 is similar to the stage (100) of FIG. 1, and therefore, a redundant description will be omitted.

[0073] The mask (200b) may have an opening (210). The opening (210) may have a shape substantially identical to or similar to the shape of a product mounted on the upper surface of the stage (100). The opening (210) may be etched in a third direction.

[0074] Figures 7 and 8 are plan views of a stage with a mask inserted according to embodiments.

[0075] Referring to FIGS. 6 to 8, the mask (200b) can be inserted into the stage (100) along the insertion hole (110) etched in the first direction. Referring to FIGS. 7 and 8, a mask (200b) having an opening (210) corresponding to the shape of a product (OB) is illustrated. In FIG. 7, an opening (210) corresponding to a product (OB) having a polygonal shape is illustrated, and in FIG. 8, an opening (210) corresponding to a product (OB) having a circular shape is illustrated. However, the present disclosure is not limited thereto, and the mask (200b) can include an opening (210) corresponding to a product (OB) having various shapes.

[0076] When the mask (200b) is inserted into the stage (100), the opening (210) of the mask (200b) on the plane may overlap with some of the first adsorption holes (HL1) of the stage (100).

[0077] More specifically, some of the first adsorption holes (HL1) may overlap with the opening (210) to form open holes (OH). The open holes (OH) may be connected to the interior of the insertion port (110) and the vacuum hole (120), thereby forming a passage that allows gas discharge from the interior of the stage (100). For example, among the first adsorption holes (HL1), the holes that overlap with the opening (210) may be open to form a vacuum region corresponding to the shape of the product (OB).

[0078] Some of the first adsorption holes (HL1) may form closed holes (CH) as they do not overlap with the opening (210). The closed holes (CH) may not be connected to the interior of the insertion hole (110) and the vacuum hole (120). For example, among the first adsorption holes (HL1), holes that do not overlap with the opening (210) may be closed.

[0079] Figure 9 is a cross-sectional view of the stage taken along line Ⅲ-Ⅲ' shown in Figure 8.

[0080] Referring to FIG. 9, a mask (200b) can be inserted into the stage (100), and a product (OB) can be placed on the upper surface of the stage (100).

[0081] The mask (200b) may have a shape substantially identical to or similar to the shape of the product (OB).

[0082] The opening (210) may be connected to some of the first adsorption holes (HL1) to form a passage. For example, some of the holes (HL1_1 to HL1_3) among the first adsorption holes (HL1) may be open holes (OH), and some of the holes (HL1_4 to HL1_7) among the first adsorption holes (HL1) may be closed holes (CH).

[0083] When a product (OB) is placed on a passage formed by overlapping some of the holes (HL1_1 to HL1_3) among the opening (210) and the first adsorption holes (HL1), and gas inside the stage (100) is discharged through the vacuum hole (120), a vacuum region corresponding to the shape of the product (OB) can be formed.

[0084] For example, the opening (210) and some of the holes (HL1_1 to HL1_3) among the first adsorption holes (HL1) can form a vacuum region corresponding to the shape of the product (OB).

[0085] In FIG. 9, a mask (200b) having an opening (210) illustrated in FIG. 8 is inserted so that some of the holes (HL1_1 to HL1_3) among the first adsorption holes (HL1) are open holes (OH), and some of the holes (HL1_4 to HL1_7) among the first adsorption holes (HL1) are closed holes (CH). However, the present disclosure is not limited thereto, and since the shape of the opening (210) may be changed depending on the shape of the product (OB), the number of open holes (OH) and closed holes (CH) may be changed.

[0086] For example, when a mask (200b) having an opening (210) as illustrated in FIG. 7 is inserted, some of the first adsorption holes (HL1_1 to HL1_3, HL1_6 to HL1_7) may be opened, and some of the first adsorption holes (HL1_4, HL1_5) may be closed. For example, by inserting a mask (200b) having an opening (210) substantially identical to or similar to the shape of the product (OB) into the stage (100) without replacing the stage (100) on which the product (OB) is mounted, the opening and closing of the first adsorption holes (HL1) may be controlled according to the shape of the product (OB).

[0087] Since the product (OB) can be absorbed while maintaining the flatness of the stage (100) even when the shape of the product (OB) changes, the cost of manpower for setting the flatness of the stage (100) and replacement of the top plate of the stage (100) can be reduced whenever the shape of the product (OB) changes.

[0088] Figure 10 is a perspective view of a stage according to one embodiment of the present invention.

[0089] Referring to Fig. 10, a stage (100) including a fastening hole (130) and a rail (140) is illustrated. The stage (100) of Fig. 10 may be similar to the stage (100) of Fig. 1, and therefore, a redundant description is omitted.

[0090] The stage (100) may include a fastening hole (130) etched in the first direction. The fastening hole (130) may be fastened with a stopper (not shown) to prevent external gas from being sucked into the interior of the stage (100).

[0091] Referring to FIG. 1, the substrate adsorption device (10) may further include a stopper (not shown). In one embodiment, when the mask (200a) is inserted into the stage (100), the stopper (not shown) may be fastened to the fastening hole (130).

[0092] The stage (100) may further include a rail (140) formed along the first direction inside the insertion port (110). The mask (200a) may further include a roller (not shown) rolling on the rail (140).

[0093] Figure 11 is a plan view of the stage illustrated in Figure 10.

[0094] Referring to FIG. 11, a stage (100) including first suction holes (HL1), fastening holes (130), and rails (140) is illustrated. On a plane, the first suction holes (HL1), fastening holes (130), and rails (140) can all be spaced apart.

[0095] Although a stage (100) including one fastening hole (130) and one rail (140) is illustrated in FIGS. 10 and 11, the present disclosure is not limited thereto, and the stage (100) may include one or more fastening holes and one or more rails.

[0096] Fig. 12 is a cross-sectional view of the stage taken along line IV-IV' shown in Fig. 11. Referring to Figs. 1 and 12, a cross-sectional view of a stage (100) including a rail (140) is shown.

[0097] In one embodiment, the rail (140) may have an incline at the end in the first direction inside the insertion opening (110). When the mask (200a) includes a roller (not shown), the roller (not shown) rolls along the incline of the rail (140), so that the mask (200a) can be easily placed at the upper end inside the insertion opening (110).

[0098] The above description is merely an example of the technical features of the present disclosure, and those skilled in the art will appreciate various modifications and variations. Accordingly, the embodiments of the present disclosure described above may be implemented individually or in combination with one another.

[0099] The embodiments disclosed in this disclosure do not limit the technical concepts of this disclosure, but rather serve to illustrate the technical concepts of this disclosure. The scope of the technical concepts of this disclosure is not limited by these embodiments. The scope of protection of this disclosure should be interpreted by the following claims, and all technical concepts within the equivalent scope should be construed as being included within the scope of this disclosure.

Claims

1. A stage having an upper surface including first adsorption holes and an insertion port, and capable of placing a product on the upper surface; A mask having a shape substantially identical to the shape of the above product and including second adsorption holes, A substrate adsorption device in which the second adsorption holes coincide with some of the first adsorption holes on a plane when the mask is inserted into the stage along the insertion port.

2. In paragraph 1, A substrate adsorption device wherein the first adsorption holes are located on the upper surface of the stage, and the first adsorption holes are connected to the interior of the insertion port.

3. In paragraph 1, The above stage further includes a vacuum hole, A substrate adsorption device in which the vacuum hole is located on the lower surface of the stage, and the vacuum hole is connected to the interior of the insertion port.

4. In paragraph 1, A substrate adsorption device in which the holes among the first adsorption holes, which coincide with the second adsorption holes, form a vacuum region corresponding to the shape of the product.

5. In paragraph 1, The size of each of the first adsorption holes is substantially the same as the size of each of the second adsorption holes, A substrate adsorption device wherein the arrangement spacing of each of the first adsorption holes is substantially the same as the arrangement spacing of each of the second adsorption holes.

6. In paragraph 1, A substrate adsorption device in which the first adsorption holes are arranged parallel along the first direction and the second direction.

7. In paragraph 6, The above insertion hole is a substrate adsorption device etched in the first direction.

8. In paragraph 6, A substrate adsorption device in which the first adsorption holes and the second adsorption holes are etched in a third direction that is perpendicular to the first direction and the second direction.

9. A stage including suction holes and an insertion port, wherein a product is placed on an upper surface of the stage; A mask comprising an opening having a shape substantially identical to the shape of the above product, A substrate adsorption device in which the opening overlaps with the adsorption holes on a plane when the mask is inserted into the stage along the insertion port.

10. In paragraph 9, A substrate adsorption device wherein the adsorption holes are located on the upper surface of the stage, and the adsorption holes are connected to the interior of the insertion port.

11. In paragraph 9, The above stage further includes a vacuum hole, A substrate adsorption device in which the vacuum hole is located on the lower surface of the stage, and the vacuum hole is connected to the interior of the insertion port.

12. In paragraph 11, The above substrate adsorption device further includes a vacuum pump for sucking gas from the stage, The above vacuum hole is a substrate adsorption device connected to the above vacuum pump.

13. In paragraph 9, A substrate adsorption device in which, among the above adsorption holes, holes overlapping the opening on a plane are opened to form a vacuum region corresponding to the shape of the product.

14. In paragraph 9, A substrate adsorption device in which, among the above adsorption holes, holes that do not overlap with the opening on a plane are closed.

15. In paragraph 9, A substrate adsorption device in which the above adsorption holes are arranged parallel along the first direction and the second direction.

16. In paragraph 15, The above insertion hole is a substrate adsorption device etched in the first direction.

17. In paragraph 16, The above stage further includes a fastening hole etched in the first direction, A substrate adsorption device further comprising a plug connected to the fastening hole.

18. In paragraph 15, A substrate adsorption device in which the adsorption holes and the opening are etched in a third direction that is perpendicular to the first direction and the second direction.

19. In paragraph 15, The above stage further includes a rail formed along the first direction within the insertion port, The above mask is a substrate adsorption device further including a roller rolling on the rail.

20. In paragraph 19, The above rail is a substrate adsorption device having an incline at the end of the rail in the first direction inside the above insertion port.

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