Packaging layer structure of perovskite solar cell module and packaging method thereof

Abstract

The present invention relates to the technical field of solar cell packaging, and in particular, to a packaging layer structure of a perovskite solar cell module and a packaging method therefor. The packaging layer structure is obtained by means of a vapor deposition method, has a simple process flow, is easy to manufacture, and reduces the production costs. The uppermost second inorganic layer of a perovskite solar cell module achieves the effect of blocking oxygen, and a protection layer between the second inorganic layer and a metal electrode layer achieves the effect of protecting the structure and efficiency of a device. A first inorganic layer is provided between an electron transport layer and the metal electrode layer, so as to inhibit the increase in the defect state density and non-radiative recombination caused by internal ion migration, thereby increasing an open-circuit voltage, and thus playing a positive role in improving the energy conversion efficiency of the perovskite solar cell module, and also blocking water. In addition, for a perovskite cell module packaged using the packaging method provided in the present invention, the stability of water and oxygen is greatly improved, and the working stability of the perovskite cell module is also improved.

Description

A packaging layer structure of a perovskite solar cell module and a packaging method thereof Technical Field

[0001] The present invention belongs to the technical field of solar cell packaging, relates to a perovskite solar cell, and specifically relates to an encapsulation layer structure of a perovskite solar cell module and a packaging method thereof. Background Art

[0002] The basic structure of a current perovskite solar cell module is based on a transparent conductive glass substrate (usually ITO or FTO), followed by a hole transport layer (HTL), a perovskite layer, an electron transport layer (ETL), and electrodes. After the perovskite solar cell module is completed, it must be encapsulated to isolate it from water and oxygen, extending its lifespan. Because the module components are sensitive to oxygen and water, prolonged exposure to air can lead to rapid degradation or even inoperability.

[0003] Existing packaging processes involve applying encapsulant, applying a cover, and curing the glue simultaneously. Due to the large contact area between the encapsulant and the device substrate or cover, moisture and oxygen can penetrate the device's active layer through the gaps between the encapsulant and the upper and lower substrates, affecting device performance and packaging effectiveness. Furthermore, this encapsulant packaging method places high demands on the glue quality, application, and curing process. Residual bubbles in the glue or discontinuous glue coverage can lead to unsatisfactory packaging results.

[0004] In view of this, the present invention is proposed. Summary of the Invention

[0005] The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and provide an encapsulation layer structure of a perovskite solar cell module and its encapsulation method, so as to prevent water and oxygen in the air from entering the interior of the device and adversely affecting the perovskite layer, thereby improving the stability of the perovskite solar cell and extending its service life.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] In one aspect, the present invention provides an encapsulation layer structure of a perovskite solar cell module, comprising a first inorganic layer, a metal electrode layer, a protective layer, and a second inorganic layer sequentially stacked on the perovskite solar cell module;

[0008] The protective layer is at least one of alkali metal fluoride and alkaline earth metal fluoride.

[0009] Optionally, the alkali metal fluoride includes at least one of lithium fluoride, sodium fluoride, potassium fluoride, rubidium fluoride, and cesium fluoride;

[0010] The alkaline earth metal fluoride includes at least one of beryllium fluoride, magnesium fluoride, calcium fluoride, strontium fluoride and barium fluoride.

[0011] Furthermore, the first inorganic layer is a metal oxide layer; the metal oxide layer includes silicon oxide (SiOx), zinc oxide (ZnO), aluminum oxide (AlOx), antimony trioxide (Sb2O3), molybdenum oxide (MoO x ), tungsten oxide (WO x ), indium oxide (In2O3), tin oxide (SnO2), and a mixture of one or more of indium tin oxide (ITO).

[0012] Furthermore, the second inorganic layer includes one or more of aluminum, silver, zinc, nickel, and magnesium.

[0013] Furthermore, the metal electrode layer includes one or more of gold (Au), silver (Ag), copper (Cu), and aluminum (Al), and has a thickness of 200 to 400 nm.

[0014] Furthermore, the thickness of the first inorganic layer is 2 to 200 nm; the first inorganic layer is a mixture of molybdenum dioxide and molybdenum trioxide or a mixture of tungsten dioxide and tungsten trioxide. The first inorganic layer formed by the above mixture has a dense morphology, can prevent water penetration, and effectively improve the humidity stability and working stability of the module device. At the same time, due to its relatively thin thickness, the metal oxide layer can better transfer carriers and will not adversely affect the energy conversion efficiency of the module device. In addition, the metal oxide layer can block the internal I - , Ag + The migration of plasma is of great help to the long-term working stability of the device.

[0015] Furthermore, the thickness of the protective layer is 2 to 100 nm, which can protect the device structure and efficiency.

[0016] Furthermore, the thickness of the second inorganic layer is 10 to 1000 nm, and it includes one or more of aluminum, silver, zinc, nickel, and magnesium, which can react with oxygen in the air to form a dense metal oxide protective layer to block the penetration of oxygen in the air into the interior of the module device.

[0017] It should be noted that the thickness of the first inorganic layer can be adaptively prepared to be 5nm, 10nm, 20nm, 30nm, 40nm, 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, 120nm, 140nm, 160nm, 180nm, 200nm, etc. according to actual packaging requirements, and they are not listed one by one; the thickness of the protective layer can be adaptively prepared to be 2nm, 5nm, 10nm, 20nm, 30nm, 40nm, 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, etc. according to actual packaging requirements, and they are not listed one by one; the thickness of the second inorganic layer can also be adaptively prepared to be 10nm, 50nm, 100nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm, 600nm, 800nm, 1000nm, etc. according to actual packaging requirements, and they are not listed one by one.

[0018] Furthermore, the perovskite solar cell module includes a hole transport layer, a perovskite layer, and an electron transport layer sequentially stacked on a transparent conductive glass substrate, and the first inorganic layer is located between the electron transport layer and the metal electrode layer.

[0019] On the other hand, the present invention also provides a packaging method for the packaging layer structure of a perovskite solar cell module, the specific steps are as follows:

[0020] Step 1: pre-treating the transparent conductive glass substrate;

[0021] Step 2: sequentially preparing a hole transport layer, a perovskite layer, and an electron transport layer on the pretreated transparent conductive glass substrate;

[0022] Step 3, evaporating a first inorganic layer on the electron transport layer;

[0023] Step 4: evaporating a metal electrode layer on top of the first inorganic layer;

[0024] Step 5, evaporating a protective layer on the metal electrode layer;

[0025] Step 6: Vapor-depositing a second inorganic layer on the protective layer to achieve encapsulation of the encapsulation layer structure.

[0026] Further, in step 1, the pre-processing is:

[0027] First, the transparent conductive glass substrate is ultrasonically cleaned using deionized water, ITO cleaning solution or anhydrous ethanol, with an ultrasonic power of 800-1000W and an ultrasonic time of 20-30 minutes.

[0028] Then, a nitrogen gun is used to uniformly spray air on the surface of the cleaned transparent conductive glass substrate, and then the transparent conductive glass substrate is subjected to ultraviolet ozone treatment for 10 to 30 minutes.

[0029] Furthermore, the evaporation in step 3, step 4, step 5, and step 6 is all carried out in a vacuum evaporation machine, wherein:

[0030] In step 3, the air pressure in the vacuum evaporation chamber is controlled at 5×10 -4 Pa below, and the evaporation current is applied to 80~120A, the evaporation rate is The thickness of the first inorganic layer is 2 to 200 nm. The lower evaporation rate in this step can ensure that a sufficiently dense metal oxide layer is obtained, thereby effectively achieving a barrier effect on water penetration and I - , Ag + Plasma migration barrier;

[0031] In step 4, the pressure in the vacuum evaporation chamber is controlled at 5×10 -4 Pa below, and the evaporation current is applied to 100 ~ 140A, the evaporation rate is The thickness of the metal electrode layer is 200 to 400 nm;

[0032] In step 5, the air pressure in the vacuum evaporation chamber is controlled at 5×10 -4 Pa below, and the evaporation current is applied to 40~60A, the evaporation rate is The protective layer has a thickness of 2 to 100 nm. The protective layer protects the metal electrode below from being affected by the oxidation process of the second inorganic layer above, thereby reducing the overall energy conversion efficiency of the module device. At the same time, the dense layer formed can prevent water and oxygen from damaging the perovskite solar module.

[0033] In step 6, the air pressure in the vacuum evaporation chamber is controlled at 5×10 -4 Pa below, and the evaporation current is applied to 100-150A, the evaporation rate is The thickness of the second inorganic layer is 10-1000 nm. The thickness of the second inorganic layer is relatively thick, so as to achieve the effect of fully blocking the penetration of oxygen in the air.

[0034] Compared with the prior art, the technical solution provided by the present invention has the following advantages: the encapsulation layer structure designed by the present invention is obtained by evaporation method, the process flow is simple, easy to prepare and the production cost is reduced. Specifically:

[0035] (1) The second inorganic layer at the top of the perovskite solar cell module blocks oxygen, while the protective layer between the second inorganic layer and the metal electrode layer protects the device structure and efficiency.

[0036] (2) The first inorganic layer is arranged between the electron transport layer and the metal electrode layer, which can inhibit the increase of defect state density and non-radiative recombination caused by internal ion migration, increase the open circuit voltage, and play a positive role in improving the energy conversion efficiency of the perovskite solar cell module; at the same time, it can also play a role in blocking water.

[0037] In addition, the perovskite battery module encapsulated using the encapsulation method provided by the present invention has greatly improved stability against water and oxygen, and its own working stability is also improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The accompanying drawings are incorporated in and constitute a part of this specification and, together with the description, serve to explain the principles of the invention.

[0039] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0040] FIG1 is a complete schematic diagram of the encapsulation layer structure of the perovskite solar cell module provided by the present invention;

[0041] FIG2 is a current density-voltage curve diagram of the perovskite solar cell modules prepared in Example 1 of the present invention and Comparative Example 1 under standard sunlight;

[0042] FIG3 is a graph showing changes in energy conversion efficiency over time of the perovskite solar cell modules prepared in Example 1 of the present invention and Comparative Example 1 under an external air environment;

[0043] FIG4 is a current density-voltage curve diagram of the perovskite solar cell modules prepared in Example 2 of the present invention and Comparative Example 2 under standard sunlight;

[0044] FIG5 is a graph showing changes in energy conversion efficiency over time of the perovskite solar cell modules prepared in Example 2 of the present invention and Comparative Example 2 under external air conditions. DETAILED DESCRIPTION

[0045] Here, exemplary embodiments will be described in detail, and the embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Instead, they are only examples consistent with some aspects of the present invention described in detail in the appended claims.

[0046] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention is described in further detail below with reference to the accompanying drawings and embodiments.

[0047] Example 1

[0048] 1 , this embodiment provides an encapsulation layer structure of a perovskite solar cell module, comprising a first inorganic layer, a metal electrode layer, a protective layer, and a second inorganic layer sequentially stacked on the perovskite solar cell module;

[0049] The first inorganic layer is molybdenum oxide (MoO x ), MoO x represents a mixture layer of MoO2 and MoO3, wherein the thickness of the first inorganic layer is 50 nm;

[0050] The metal electrode layer is Ag, and the thickness of the metal electrode layer is 300 nm;

[0051] The protective layer is lithium fluoride, and the thickness of the protective layer is 10 nm;

[0052] The second inorganic layer is aluminum, and the thickness of the second inorganic layer is 500 nm.

[0053] Specifically, the perovskite solar cell module includes a hole transport layer, a perovskite layer, and an electron transport layer stacked in sequence on a transparent conductive glass substrate, and the first inorganic layer is located between the electron transport layer and the metal electrode layer.

[0054] In addition, this embodiment also provides a packaging method for the packaging layer structure of a perovskite solar cell module, and the specific steps are as follows:

[0055] Step 1: pre-treating the transparent conductive glass substrate: subjecting the transparent conductive glass substrate to ultrasonic treatment in anhydrous ethanol at an ultrasonic power of 900 W for 20 minutes; then using a nitrogen gun to uniformly spray the surface of the transparent conductive glass substrate, and then subjecting the transparent conductive glass substrate to ultraviolet ozone treatment for 15 minutes;

[0056] Step 2: sequentially preparing a hole transport layer, a perovskite layer, and an electron transport layer on the pretreated transparent conductive glass substrate. The preparation process is the same as the conventional preparation process in the art and will not be repeated here;

[0057] Step 3: Place the prepared perovskite solar cell module in a vacuum evaporation machine and evaporate the first inorganic layer (molybdenum oxide, i.e. MoO) on top of the electron transport layer. x ), and the pressure in the chamber was pumped down to 5×10 -4 Pa below and the evaporation current is applied to 100A, the evaporation rate is The evaporation thickness (thickness of the first inorganic layer) is 50 nm;

[0058] Step 4: Deposit a metal electrode layer (Ag) on ​​top of the first inorganic layer and pump the pressure in the chamber to 5×10 -4 Pa below and the evaporation current is applied to 120A, the evaporation rate is The evaporation thickness (thickness of the metal electrode layer) is 300 nm;

[0059] Step 5: Evaporate a protective layer (lithium fluoride) on the metal electrode layer and pump the pressure in the chamber to 5×10 -4 Pa below and the evaporation current is applied to 50A, the evaporation rate is The evaporation thickness (protective layer thickness) is 10 nm;

[0060] Step 6: Evaporate the second inorganic layer (aluminum) on the protective layer and pump the pressure in the chamber to 5×10 -4 Pa below and the evaporation current is applied to 120A, the evaporation rate is The vapor deposition thickness (thickness of the second inorganic layer) was 500 nm.

[0061] After efficiency and stability testing, the perovskite battery module prepared in this embodiment has a maximum energy conversion efficiency of 20.94%, and after being placed in an external environment for 2400 hours, it still maintains an initial energy conversion efficiency of 90%.

[0062] Example 2

[0063] The implementation of this embodiment is the same as that of embodiment 1, except that: the material of the encapsulation layer structure, wherein the material of the first inorganic layer is tungsten oxide (WO x ), and tungsten oxide (WO x ) is a mixture of WO2 and WO3; the protective layer is magnesium fluoride; and the second inorganic layer is magnesium.

[0064] After efficiency and stability testing, the perovskite battery module prepared in this embodiment has a maximum energy conversion efficiency of 18.60%, and after being placed in an external environment for 3600 hours, it still maintains an initial energy conversion efficiency of 90%.

[0065] Example 3

[0066] The implementation of this embodiment is the same as that of embodiment 1, except that: the material of the encapsulation layer structure, wherein the material of the first inorganic layer is tungsten oxide (WO x ), and tungsten oxide (WO x ) is a mixture of WO2 and WO3; the protective layer is sodium fluoride; and the second inorganic layer is silver.

[0067] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 19.47%, and after being placed in an external environment for 3200 hours, it still maintains an initial energy conversion efficiency of 90%.

[0068] Example 4

[0069] The implementation of this embodiment is the same as that of embodiment 1, except that: the material of the encapsulation layer structure, wherein the material of the first inorganic layer is tungsten oxide (WO x ), and tungsten oxide (WO x ) is a mixture of WO2 and WO3; the protective layer is a mixture of calcium fluoride and sodium fluoride; and the second inorganic layer is zinc.

[0070] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 17.23%, and after being placed in an external environment for 3000 hours, it still maintains an initial energy conversion efficiency of 90%.

[0071] Example 5

[0072] The implementation of this embodiment is the same as that of Example 1, except that the thickness of the encapsulation layer structure is different: the thickness of the first inorganic layer is 100 nm, the thickness of the protective layer is 20 nm, and the thickness of the second inorganic layer is 800 nm.

[0073] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 16.89%, and after being placed in an external environment for 3600 hours, it still maintains an initial energy conversion efficiency of 90%.

[0074] Example 6

[0075] The implementation of this embodiment is the same as that of Example 1, except that the thickness of the encapsulation layer structure is different: the thickness of the first inorganic layer is 10 nm, the thickness of the protective layer is 2 nm; and the thickness of the second inorganic layer is 200 nm.

[0076] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 20.05%, and after being placed in an external environment for 3600 hours, it still maintains an initial energy conversion efficiency of 90%.

[0077] Example 7

[0078] The implementation of this embodiment is the same as that of embodiment 1, except that: the method for preparing the perovskite solar cell module, wherein the evaporation rate of the first inorganic layer is

[0079] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 20.14%, and after being placed in an external environment for 3600 hours, it still maintains an initial energy conversion efficiency of 90%.

[0080] Example 8

[0081] The implementation of this embodiment is the same as that of embodiment 1, except that: the method for preparing the perovskite solar cell module, wherein the evaporation rate of the first inorganic layer is

[0082] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 20.45%, and after being placed in an external environment for 3200 hours, it still maintains an initial energy conversion efficiency of 90%.

[0083] Comparative Example 1

[0084] The packaging method of this embodiment is the same as that of Example 1, except that the packaging layer structure of the perovskite solar cell module includes a protective layer and a second inorganic layer above the metal electrode layer, that is, it does not include the first inorganic layer between the electron transport layer and the metal electrode layer.

[0085] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 17.93%. After being placed in an external environment for 2400 hours, it only maintains an initial energy conversion efficiency of 60%.

[0086] Comparative Example 2

[0087] The packaging method of this embodiment is the same as that of Example 2, except that the packaging layer structure of the perovskite solar cell module includes a first inorganic layer placed between the electron transport layer and the metal electrode layer, and a protective layer above the metal electrode layer, that is, it does not include a second inorganic layer.

[0088] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 18.28%. After being placed in an external environment for 2400 hours, it only maintains an initial energy conversion efficiency of 60%.

[0089] Comparative Example 3

[0090] The packaging method of this embodiment is the same as that of Example 1, except that the packaging layer structure of the perovskite solar cell module includes a first inorganic layer placed between the electron transport layer and the metal electrode layer, and a second inorganic layer above the metal electrode layer, that is, no protective layer is included.

[0091] After efficiency and stability testing, the perovskite battery module device prepared in this embodiment has a maximum energy conversion efficiency of 16.54%. After being placed in an external environment for 1800 hours, it only maintains an initial energy conversion efficiency of 60%.

[0092] Comparative Example 4

[0093] The packaging method of this embodiment is the same as that of Example 1, except that the packaging layer structure of the perovskite solar cell module is arranged above the metal electrode layer and includes, from bottom to top, a first inorganic layer, a protective layer, and a second inorganic layer, that is, the first inorganic layer is arranged above the metal electrode layer.

[0094] After efficiency and stability testing, the perovskite battery module prepared in this embodiment has a maximum energy conversion efficiency of 16.89%. After being placed in an external environment for 2000 hours, it only maintains 60% of the initial energy conversion efficiency.

[0095] In summary, the IV curve test was performed on the perovskite battery modules in Examples 1-2 and Comparative Examples 1-2, and the test method was as follows:

[0096] The IV curve (photocurrent-voltage curve) was measured using an NREL-calibrated Si cell with a light source density of 1 sun. A 450W xenon lamp was used as the light source to illuminate the perovskite cell module through an AM 1.5 filter. The IV curve of the cell was recorded with a digital multimeter, and the open-circuit voltage, short-circuit current, fill factor, and efficiency were calculated based on the IV curve.

[0097] The PCE-t curve (normalized efficiency versus time) was measured using a solar simulator with a light intensity of 100 mA / cm 2 ,The experimental conditions were light at atmospheric pressure, temperature 20℃, and humidity 30%.

[0098] The parameters in Table 1 below can be calculated by combining Figures 2 and 4.

[0099] Table 1

[0100] As shown in Table 1, the perovskite battery module prepared in Example 1 achieved a maximum energy conversion efficiency of 20.94% in the case of 6 sub-batteries, an open circuit voltage of 6.582 V, and a short circuit current density of 4.13 mA / cm 2 , the fill factor is 77.03%; while the corresponding perovskite battery module device prepared in Comparative Example 1 obtained an energy conversion efficiency of 17.93% under the same conditions, an open circuit voltage of 5.994V, and a short circuit current density of 4.09mA / cm 2, with a fill factor of 73.14%. A comparison of parameters shows that the addition of the first inorganic layer can suppress the increase in defect state density and non-radiative recombination caused by internal ion migration, thereby improving the open-circuit voltage. This shows that the introduction of the first inorganic layer in the present invention has a unique effect on improving the energy conversion efficiency of perovskite solar cell modules.

[0101] As shown in Table 1, the perovskite module device prepared in Example 2 achieved a maximum energy conversion efficiency of 18.60% with 6 sub-cells, an open circuit voltage of 6.521 V, and a short circuit current density of 3.98 mA / cm 2 , the fill factor is 71.67%; while the corresponding perovskite battery module device prepared in Comparative Example 2 obtained an energy conversion efficiency of 18.28% under the same conditions, an open circuit voltage of 6.408V, and a short circuit current density of 4.01mA / cm 2 The fill factor is 71.14%. The energy conversion efficiency of the device shown in Example 2 is not much different from that of Comparative Example 2, indicating that the introduction of the second inorganic layer has little effect on the efficiency of the perovskite solar cell module, and the role of this layer is more to improve the stability of the device.

[0102] As shown in Figure 3, the perovskite module prepared in Example 1 maintained over 90% of its initial energy conversion efficiency after 2400 hours in an external air environment, while the energy conversion efficiency of the perovskite solar cell module in Comparative Example 1 dropped to 60% of its initial value. A comparison of device stability shows that the first inorganic layer's ability to suppress internal carrier migration plays a significant role in improving device stability.

[0103] As shown in Figure 5 , the perovskite cell module with a second inorganic layer, prepared in Example 2, maintained 90% of its initial energy conversion efficiency after 3600 hours in air, while the module device in Comparative Example 2, without the protection of the second inorganic layer, dropped to 60% of its initial energy conversion efficiency after approximately 2400 hours. This comparison fully demonstrates the protective effect of the second inorganic layer on device stability.

[0104] The foregoing description is intended only to provide specific embodiments of the present invention, which will enable those skilled in the art to understand and implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention.

[0105] It should be understood that the present invention is not limited to the above description and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A packaging layer structure of a perovskite solar cell module, characterized in that It includes a first inorganic layer, a metal electrode layer, a protective layer, and a second inorganic layer that are sequentially stacked on top of the perovskite solar cell module; The protective layer is at least one of alkali metal fluorides or alkaline earth metal fluorides.

2. The encapsulation layer structure of the perovskite solar cell module according to claim 1, wherein The first inorganic layer is a metal oxide layer, and the metal oxide layer includes one or a mixture of silica, zinc oxide, aluminum oxide, antimony trioxide, molybdenum trioxide, tungsten trioxide, indium oxide, tin oxide, indium tin oxide.

3. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that, The second inorganic layer includes one or more of aluminum, silver, zinc, nickel, and magnesium.

4. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that The thickness of the first inorganic layer is 2 - 200 nm.

5. The encapsulation layer structure of the perovskite solar cell module according to claim 1, wherein, The thickness of the protective layer is 2 - 100 nm.

6. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that, The thickness of the second inorganic layer is 10 - 1000 nm.

7. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that, The first inorganic layer is a mixture of molybdenum dioxide and molybdenum trioxide, or a mixture of tungsten dioxide and tungsten trioxide.

8. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that, The perovskite solar cell module includes a hole transport layer, a perovskite layer, and an electron transport layer that are sequentially stacked on top of a transparent conductive glass substrate, and the first inorganic layer is located between the electron transport layer and the metal electrode layer.

9. The encapsulation layer structure of the perovskite solar cell module according to claim 1, characterized in that, The alkali metal fluorides include at least one of lithium fluoride, sodium fluoride, potassium fluoride, rubidium fluoride, and cesium fluoride; the alkaline earth metal fluorides include at least one of beryllium fluoride, magnesium fluoride, calcium fluoride, strontium fluoride, and barium fluoride.

10. A packaging method for a packaging layer structure of a perovskite solar cell module according to any one of claims 1 to 9, characterized in that, The specific steps are as follows: Step 1: Pretreat the transparent conductive glass substrate; Step 2: Sequentially prepare a hole transport layer, a perovskite layer, and an electron transport layer on the pretreated transparent conductive glass substrate; Step 3: Evaporate the first inorganic layer above the electron transport layer; Step 4: Evaporate the metal electrode layer above the first inorganic layer; Step 5: Evaporate the protective layer above the metal electrode layer; Step 6: Evaporate the second inorganic layer above the protective layer to achieve the encapsulation of the encapsulation layer structure.

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