Processing device, work device, and work method

Abstract

This processing device includes a flange to which a processing wheel used for grinding or polishing is fastened using a bolt. The bolt has a cylindrical portion and a screw portion. A screw hole that engages with the screw portion is provided in the processing wheel. The flange includes a through hole having a diameter larger than the diameters of the cylindrical portion and the screw portion, and includes, in the inner wall surface of the through hole, a ring groove in which an elastic ring for gripping the cylindrical portion is mounted.

Description

Processing device, working device, and working method

[0001] The present disclosure relates to a processing device, a working device, and a working method.

[0002] The grinding means described in Patent Document 1 includes a spindle, a wheel mount disposed at the lower end of the spindle, and a grinding wheel removably mounted on the underside of the wheel mount. The grinding wheel has an annular base and a plurality of grinding stones disposed in an annular pattern on the underside of the annular base. The grinding wheel is fastened to the wheel mount with bolts.

[0003] Japanese Patent Application Publication No. 2015-178149

[0004] One embodiment of the present disclosure provides a technique that allows bolts that fasten a processing wheel used for grinding or polishing to a flange to be temporarily fastened to the flange.

[0005] According to one embodiment of the present disclosure, a processing device includes a flange to which a processing wheel used for grinding or polishing is fastened with a bolt. The bolt has a cylindrical portion and a threaded portion, and the processing wheel is provided with a threaded hole that engages with the threaded portion. The flange has a through hole with a diameter larger than the cylindrical portion and the threaded portion, and a ring groove on the inner wall surface of the through hole into which an elastic ring that grips the cylindrical portion is attached.

[0006] According to one embodiment of the present disclosure, the bolts that fasten the processing wheel used for grinding or polishing to the flange can be temporarily fastened to the flange.

[0007] Fig. 1 is a cross-sectional view showing a processing device and an exchange device according to one embodiment. Fig. 2 is a cross-sectional view showing a drive mechanism of the processing device according to one embodiment. Fig. 3 is a cross-sectional view showing an enlarged portion of Fig. 1. Fig. 4 is a cross-sectional view showing another enlarged portion of Fig. 1.

[0008] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that in each drawing, the same or similar components are denoted by the same reference numerals, and descriptions thereof may be omitted. In this specification, the X-axis direction, Y-axis direction, and Z-axis direction are perpendicular to each other. The X-axis direction and Y-axis direction are horizontal directions, and the Z-axis direction is vertical. The X-axis direction includes the positive X-axis direction and the negative X-axis direction that is opposite to the positive X-axis direction. The Y-axis direction includes the positive Y-axis direction and the negative Y-axis direction that is opposite to the positive Y-axis direction. The Z-axis direction includes the positive Z-axis direction and the negative Z-axis direction that is opposite to the positive Z-axis direction.

[0009] The processing apparatus 10 shown in FIG. 1 grinds or polishes an object. The object is, for example, a substrate W (see FIG. 2). The substrate W includes a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer, or a glass substrate. The substrate W may further include a device layer formed on the surface of the semiconductor substrate or the glass substrate. The device layer includes an electronic circuit. The substrate W may also be a laminated substrate formed by bonding multiple substrates.

[0010] The processing apparatus 10 includes, for example, a drive mechanism 11 that drives the processing wheel 20, a holding mechanism 16 that holds an object (e.g., a substrate W), and a rotation mechanism 17 that rotates the holding mechanism 16. The rotation mechanism 17 rotates the object together with the holding mechanism 16. The processing apparatus 10 also includes an exterior cover 18. The exterior cover 18 houses the drive mechanism 11 and the holding mechanism 16 inside and prevents particles such as processing debris from escaping to the outside.

[0011] 2, the drive mechanism 11 presses the processing wheel 20 against an object (e.g., a substrate W) to grind the object. The processing wheel 20 includes, for example, a ring-shaped base 21 and a plurality of grinding wheels 22 arranged in a ring shape on the underside of the base 21. In this embodiment, the processing wheel 20 is used for grinding, but it may also be used for polishing. In the latter case, a polishing pad is used instead of the grinding wheels 22.

[0012] The drive mechanism 11 includes, for example, a flange 12 to which the processing wheel 20 is fastened with bolts 30, a rotation mechanism 13 that rotates the flange 12, and an elevation mechanism 14 that raises and lowers the flange 12. The rotation mechanism 13 includes, for example, a rotation motor 13a and a vertical rotation shaft 13b that is rotated by the rotation motor 13a. The flange 12 is provided at the lower end of the rotation shaft 13b. The flange 12 is disposed horizontally, and the processing wheel 20 is attached to its lower surface. The rotation motor 13a rotates the flange 12 and the processing wheel 20 together with the rotation shaft 13b.

[0013] The lifting mechanism 14 includes, for example, a vertical Z-axis guide 14a, a Z-axis slider 14b that moves along the Z-axis guide 14a, and a lifting motor 14c that moves the Z-axis slider 14b. A rotary motor 13a is fixed to the Z-axis slider 14b via a motor holder 15. The lifting mechanism 14 includes a ball screw (not shown) that converts the rotational motion of the lifting motor 14c into linear motion of the Z-axis slider 14b.

[0014] The lifting mechanism 14 lowers the processing wheel 20 from the standby position. The processing wheel 20 rotates while descending, and comes into contact with the upper surface of the substrate W, which rotates separately from the processing wheel 20, to grind the entire upper surface of the substrate W. When the thickness of the substrate W reaches a set value, the lifting mechanism 14 stops the lowering of the processing wheel 20. Thereafter, the lifting mechanism 14 raises the processing wheel 20 to the standby position.

[0015] 1, the processing device 10 includes a control circuit 19. The control circuit 19 includes, for example, a calculation unit 19a such as a CPU (Central Processing Unit) and a storage unit 19b such as a memory. The storage unit 19b stores programs that control various processes executed in the processing device 10. The control circuit 19 controls the operation of the processing device 10 by causing the calculation unit 19a to execute the programs stored in the storage unit 19b.

[0016] The control circuit 19 includes electronic circuits such as a CPU, a GPU (Graphics Processing Unit), an FPGA (Field Programmable Gate Array), or an ASIC (Application Specific Integrated Circuit), and performs the various control operations described in this specification by executing instruction codes stored in a memory or by being a circuit designed for a specific application.

[0017] The working device 60 performs at least one of the following operations: attaching the processing wheel 20 to the flange 12 and removing the processing wheel 20 from the flange 12. The working device 60 may be a fixed robot or a self-propelled robot. In the latter case, the working device 60 may perform maintenance on a plurality of processing devices 10 in sequence. The maintenance includes at least one of the following operations: attaching the processing wheel 20 to the flange 12 and removing the processing wheel 20 from the flange 12.

[0018] The maintenance device 60 includes a control circuit 69. The control circuit 69 includes, for example, a calculation unit 69a such as a CPU (Central Processing Unit) and a storage unit 69b such as a memory. The storage unit 69b stores programs that control various processes executed by the maintenance device 60. The control circuit 69 controls the operation of the maintenance device 60 by causing the calculation unit 69a to execute the programs stored in the storage unit 69b.

[0019] The control circuit 69 includes electronic circuits such as a CPU, a GPU (Graphics Processing Unit), an FPGA (Field Programmable Gate Array), or an ASIC (Application Specific Integrated Circuit), and performs the various control operations described in this specification by executing instruction codes stored in a memory or by being a circuit designed for a specific application.

[0020] As shown in Fig. 3, the processing wheel 20 is fastened to the flange 12 with a bolt 30. The bolt 30 has, for example, a shank 31 and a head 32 having a diameter larger than that of the shank 31. The head 32 may have a polygonal blind hole 32a on the surface opposite to the shank 31. A tool 40 is inserted into the blind hole 32a. The tool 40 is used to loosen or tighten the bolt 30.

[0021] The shaft portion 31 has a threaded portion 31a and a cylindrical portion 31b. The threaded portion 31a is inserted into the threaded hole 20a of the processing wheel 20 and engages with the threaded hole 20a. The cylindrical portion 31b is provided between the head 32 and the threaded portion 31a. Unlike the threaded portion 31a, the cylindrical portion 31b does not have a thread groove on its outer circumferential surface. The outer diameter of the cylindrical portion 31b is preferably equal to or greater than the outer diameter of the threaded portion 31a. However, the difference between the outer diameter of the cylindrical portion 31b and the outer diameter of the threaded portion 31a is preferably 1.0 mm or less.

[0022] The flange 12 has a through hole 12a with a diameter larger than that of the threaded portion 31a and the cylindrical portion 31b. The through hole 12a has a diameter smaller than that of the head 32 of the bolt 30. No thread grooves are formed on the inner wall surface of the through hole 12a. Although not shown, the through hole 12a may have a large diameter hole with a diameter larger than that of the head 32 of the bolt 30 and a small diameter hole with a diameter smaller than that of the head 32 of the bolt 30. The head 32 of the bolt 30 can be accommodated in the large diameter hole.

[0023] A plurality of through holes 12a and bolts 30 may be provided at intervals in the rotational direction of the flange 12. The through holes 12a and bolts 30 are preferably provided rotationally symmetrically about the rotational center line of the flange 12. The rotational center line of the flange 12 is the rotational center line of the rotation shaft 13b. One bolt 30 is inserted into each of the plurality of through holes 12a.

[0024] The flange 12 has a ring groove 12b on the inner wall surface of the through hole 12a. An elastic ring 50 is fitted into the ring groove 12b. The elastic ring 50 is, for example, an O-ring. The cross-sectional shape of the elastic ring 50 is not limited to a circle. The cross-sectional shape of the ring groove 12b is not particularly limited, but is preferably a trapezoid or T-shape. As the depth from the inner wall surface of the through hole 12a increases, the groove width of the ring groove 12b increases continuously or in stages, thereby preventing the elastic ring 50 from detaching.

[0025] The elastic ring 50 is made of, for example, rubber. The elastic ring 50 grips the cylindrical portion 31b of the bolt 30 by its elastic restoring force. The bolt 30 can be temporarily fastened to the flange 12 by the static friction force between the elastic ring 50 and the bolt 30. For example, even if the through hole 12a and the bolt 30 are provided vertically, the bolt 30 can be temporarily fastened against gravity.

[0026] By loosening the bolts 30 and separating the processing wheel 20 from the flange 12, and then temporarily fastening the bolts 30 to the flange 12, there is no need to prepare a dedicated place to store the bolts 30. This also eliminates the time required to transport the bolts 30 to a storage location, improving work efficiency. This also eliminates the time required to return the bolts 30 from the storage location to the flange 12, improving work efficiency. Furthermore, this also prevents the bolts 30 from being lost.

[0027] Another method for temporarily fastening the bolt 30 to the flange 12 is to form a screw hole in the through hole 12a and temporarily fasten the threaded portion 31a through the screw hole. However, this would complicate the structure of the bolt 30. The cylindrical portion 31b needs to be machined to have a smaller diameter than the threaded portion 31a that engages with the screw hole in the through hole 12a so as not to interfere with the screw hole. Furthermore, the threaded portion 31a needs to be configured so that it does not engage with both the screw hole in the through hole 12a and the screw hole 20a in the processing wheel 20 at the same time.

[0028] When the bolt 30 is temporarily fastened to the flange 12 by the static friction force between the elastic ring 50 and the bolt 30, the following advantages (A) and (B) can be obtained compared to when the bolt 30 is temporarily fastened to the flange 12 by the screw hole of the through-hole 12a (not shown) and the threaded portion 31a of the bolt 30. (A) The structure of the bolt 30 can be simplified, allowing a normal structure to be adopted. (B) There is no need to strictly control the orientation of the threaded portion 31a in order to engage the threaded portion 31a with the two screw holes in sequence.

[0029] The length L1 of the through hole 12a of the flange 12 is preferably longer than the length L2 of the threaded portion 31a of the bolt 30 (L1 > L2). Furthermore, the distance L3 from the surface of the flange 12 facing the machining wheel 20 to the ring groove 12b is preferably longer than the length L2 of the threaded portion 31a of the bolt 30 (L3 > L2). Note that, because the ring groove 12b is provided midway through the through hole 12a, L1 is greater than L3 (L1 > L3 > L2).

[0030] When (L1 > L3 > L2) is established, the elastic ring 50 grips the cylindrical portion 31b of the bolt 30, thereby maintaining the following state: As shown in Fig. 3, the threaded portion 31a of the bolt 30 can be maintained in a state spaced apart from the threaded hole 20a of the processing wheel 20. In other words, the entire threaded portion 31a of the bolt 30 can be maintained in a state housed in the through-hole 12a of the flange 12, as shown in Fig. 3.

[0031] As a result, interference between the threaded portion 31a and the screw hole 20a can be suppressed when replacing the machining wheel 20. For example, as shown in Fig. 3, the machining wheel 20 can be separated from the flange 12 with the threaded portion 31a of the bolt 30 separated from the screw hole 20a of the machining wheel 20. Furthermore, as shown in Fig. 3, the machining wheel 20 can be abutted against the flange 12 with the entire threaded portion 31a of the bolt 30 housed in the through-hole 12a of the flange 12.

[0032] As shown in Fig. 3, the working device 60 includes a first arm 61. The first arm 61 is, for example, an articulated robot. The working device 60 includes a first drive mechanism 63 and a second drive mechanism 64 at the tip of the first arm 61. The first drive mechanism 63 uses a tool 40 to loosen or tighten the bolt 30. The second drive mechanism 64 moves the threaded portion 31a away from the threaded hole 20a after the first drive mechanism 63 has removed the threaded portion 31a from the threaded hole 20a.

[0033] The first drive mechanism 63 has, for example, a rotation motor 63a that rotates the bolt 30 together with the tool 40, and a movement motor 63b that moves the bolt 30 axially (for example, in the Z-axis direction) together with the tool 40. The amount of axial movement of the bolt 30 per rotation of the bolt 30 is equal to the pitch of the threads of the threaded portion 31a. The tool 40 has, for example, a polygonal rod. The rod is fitted into the bottomed hole 32a of the head 32. The tool 40 may have a socket (not shown). The socket may fit onto the outer periphery of the head 32.

[0034] The second drive mechanism 64 has, for example, a first movement motor 64a that moves the second tool 41 in the axial direction of the bolt 30 (for example, the Z-axis direction), and a second movement motor 64b that moves the second tool 41 in a direction perpendicular to the axis of the bolt 30 (for example, the Y-axis direction). The second tool 41 is, for example, a bifurcated fork that holds the cylindrical portion 31b of the bolt 30 between its two tines and lifts the head 32 of the bolt 30 with the two tines.

[0035] As shown in Fig. 4, the working device 60 includes a second arm 62. The second arm 62 operates independently of the first arm 61. The second arm 62 is, for example, an articulated robot. The working device 60 includes, for example, a gripper 65 and a rotation mechanism 66 at the tip of the second arm 62. The gripper 65 grips the processing wheel 20. The rotation mechanism 66 rotates the gripper 65. The rotation mechanism 66 rotates the processing wheel 20 together with the gripper 65.

[0036] The gripper 65 has, for example, a plurality of telescopic cylinders 65a. The plurality of telescopic cylinders 65a grip the ring-shaped base 21 of the processing wheel 20 from the inside. The plurality of telescopic cylinders 65a are provided at intervals in the circumferential direction of the base 21. The gripper 65 may also grip the ring-shaped base 21 of the processing wheel 20 from the outside. The gripper 65 does not grip the grinding wheel 22 in order to prevent damage to the grinding wheel 22.

[0037] The gripper 65 includes a pad 65b provided at the tip of the telescopic cylinder 65a. The pad 65b abuts against the inner circumferential surface of the ring-shaped base 21. The inner circumferential surface of the base 21 slopes upward as it moves radially inward of the base 21. The pad 65b has a tapered surface 65b1 that abuts against the inner circumferential surface of the base 21. The pad 65b abuts against the lower surface of the ring-shaped base 21. The lower surface of the base 21 is arranged horizontally. The pad 65b has a horizontal surface 65b2 that abuts against the lower surface of the base 21.

[0038] The first arm 61 and the second arm 62 each enter from the outside of the exterior cover 18 to the inside thereof and perform at least one of the following operations: attaching the processing wheel 20 to the flange 12; and removing the processing wheel 20 from the flange 12. The arrangement of the first drive mechanism 63, the second drive mechanism 64, the gripper 65, and the rotation mechanism 66 is not particularly limited. For example, the first drive mechanism 63, the second drive mechanism 64, the gripper 65, and the rotation mechanism 66 may all be provided at the tip of the first arm 61.

[0039] 3 and 4 again, an example of the operation of the operating device 60, i.e., an operating method, will be described below. Since the operating device 60 performs the operation on behalf of a human, it is possible to prevent the human from becoming soiled by deposits inside the exterior cover 18. The operation of the operating device 60 is performed under the control of a control circuit 69. It is also possible for a human to perform the operation.

[0040] First, an example of the operation of removing the processing wheel 20 from the flange 12 (hereinafter also referred to as the removal operation) will be described. The removal operation includes the following steps (A1) to (A6): (A1) The gripper 65 grips the processing wheel 20. (A2) The first drive mechanism 63 loosens one bolt 30. (A3) After the first drive mechanism 63 loosens one bolt 30, the second drive mechanism 64 moves the threaded portion 31a of one bolt 30 away from the threaded hole 20a. (A4) The elastic ring 50 grips the cylindrical portion 31b of the bolt 30, thereby maintaining the threaded portion 31a of the bolt 30 away from the threaded hole 20a. (A5) The rotation mechanism 66 rotates the processing wheel 20 together with the gripper 65, and then steps (A2) to (A4) are performed again, and the threaded portions 31a of the remaining bolts 30 move away from the threaded holes 20a. (A6) With the threaded portions 31a of all the bolts 30 separated from the screw holes 20a and all the bolts 30 remaining in the flange 12, the second arm 62 lowers the gripper 65 and separates the processing wheel 20 from the flange 12 together with the gripper 65.

[0041] The above (A6) is preferably performed in a state in which the rotation of the flange 12 is restricted by holding one bolt 30 with the first drive mechanism 63 or the second drive mechanism 64 in order to restrict free rotation of the flange 12. The first drive mechanism 63 can restrict the rotation of the flange 12 by hanging a tool 40 on one bolt 30. Furthermore, the second drive mechanism 64 can restrict the rotation of the flange 12 by hanging a second tool 41 on one bolt 30.

[0042] The removal operation may include the following (A7) between (A3) and (A4). (A7) The first drive mechanism 63 pushes the bolt 30 axially to narrow the gap between the threaded portion 31a and the threaded hole 20a. However, the threaded portion 31a is maintained spaced apart from the threaded hole 20a. According to (A7), the height of the bolt 30 can be adjusted, and the tool 40 can be accurately positioned relative to the head 32 of the bolt 30 when tightening the bolt 30.

[0043] Next, an example of the work of attaching the processing wheel 20 to the flange 12 (hereinafter also referred to as the attachment work) will be described. The attachment work includes the following steps (B1) to (B5). (B1) With the entire threaded portions 31a of all bolts 30 inserted into the through-holes 12a of the flange 12 and all bolts 30 remaining in the flange 12, the second arm 62 raises the gripper 65 and, together with the gripper 65, brings the processing wheel 20 into contact with the flange 12. (B2) The first drive mechanism 63 pushes one bolt 30 axially to bring the threaded portion 31a into contact with the threaded hole 20a. (B3) The first drive mechanism 63 tightens one bolt 30. (B4) The rotation mechanism 66 rotates the processing wheel 20 together with the gripper 65, and then steps (B2) to (B3) are repeated to tighten the remaining bolts 30. (B5) The gripper 65 releases its grip on the processing wheel 20. According to this embodiment, the bolts 30 are temporarily fastened to the flange 12 in advance, so that the work time can be reduced.

[0044] The above (B1) is preferably performed in a state in which the rotation of the flange 12 is restricted by holding one bolt 30 with the first drive mechanism 63 or the second drive mechanism 64 in order to restrict free rotation of the flange 12. The first drive mechanism 63 can restrict the rotation of the flange 12 by hanging a tool 40 on one bolt 30. Furthermore, the second drive mechanism 64 can restrict the rotation of the flange 12 by hanging a second tool 41 on one bolt 30.

[0045] The above (B3) may include having the first arm 61 tighten the bolt 30 with a preset torque after the first drive mechanism 63 has tightened the bolt 30. The first arm 61 can tighten the bolt 30 by rotating around the bolt 30. The first arm 61 has a load cell (not shown), and manages the torque by tightening the bolt 30 so that the detected value of the load cell becomes a set value. Note that torque management can also be performed by the first drive mechanism 63.

[0046] The following supplementary notes are disclosed regarding the above embodiments, etc. [Supplementary Note 1] A method of removing the processing wheel from the flange of the processing device, comprising: (a1) loosening the bolt; (a2) separating the threaded portion of the bolt from the screw hole after loosening the bolt; (a3) ​​maintaining the threaded portion of the bolt separated from the screw hole by the elastic ring gripping the cylindrical portion of the bolt; (a4) rotating the rotating wheel and performing steps (a1), (a2), and (a3) ​​again; and (a5) separating the processing wheel from the flange in a state in which the threaded portions of all the bolts have separated from the screw holes and all the bolts remain on the flange. [Appendix 2] A method of attaching the processing wheel to the flange of the processing device, comprising: (b1) abutting the processing wheel against the flange with the entire threaded portions of all of the bolts housed in the through holes and all of the bolts remaining on the flange; (b2) pushing the bolts in the axial direction to abut the threaded portions against the screw holes; (b3) tightening the bolts; and (b4) rotating the rotating wheel and then performing steps (b2) and (b3) again.

[0047] The processing device, working device, and working method according to the present disclosure have been described above, but the present disclosure is not limited to the above-described embodiments. Various changes, modifications, substitutions, additions, deletions, and combinations are possible within the scope of the claims. These naturally fall within the technical scope of the present disclosure.

[0048] This application claims priority based on Japanese Patent Application No. 2024-009916 filed with the Japan Patent Office on January 26, 2024, the entire contents of which are incorporated herein by reference.

[0049] REFERENCE SIGNS LIST 10 Processing device 12 Flange 12a Through hole 12b Ring groove 20 Processing wheel 20a Screw hole 30 Bolt 31a Threaded portion 31b Cylindrical portion 50 Elastic ring 60 Working device 63 First driving mechanism 64 Second driving mechanism 65 Gripper

Claims

1. A processing apparatus, comprising a flange to which a processing wheel used for grinding or polishing is fastened by bolts, wherein the bolts have a cylindrical portion and a threaded portion, a threaded hole engaging with the threaded portion is provided in the processing wheel, the flange has a through hole having a diameter larger than that of the cylindrical portion and the threaded portion, and a ring groove in which an elastic ring for gripping the cylindrical portion is mounted is provided on an inner wall surface of the through hole.

2. The processing apparatus according to claim 1, wherein a length of the through hole is longer than a length of the threaded portion, and a distance from a surface of the flange facing the processing wheel to the ring groove is longer than the length of the threaded portion.

3. The processing apparatus according to claim 1, wherein the flange is provided horizontally, the through hole is provided vertically, and the processing wheel is attached to a lower surface of the flange.

4. The processing apparatus according to claim 1, further comprising a rotating shaft for rotating the flange, wherein a plurality of the through holes and the bolts are provided at intervals along a rotation direction of the flange.

5. A working apparatus for performing an operation of removing the processing wheel from the flange of the processing apparatus according to any one of claims 1 to 4, the working apparatus comprising: a gripper for gripping the processing wheel; a first driving mechanism for loosening the bolts; and a second driving mechanism for separating the threaded portion from the threaded hole after the threaded portion is pulled out of the threaded hole by the first driving mechanism.

6. The working apparatus according to claim 5, further comprising a control circuit for controlling the gripper, the first driving mechanism, and the second driving mechanism, wherein the control circuit performs control to separate the processing wheel from the flange in a state where the threaded portion is separated from the threaded hole by the elastic ring gripping the cylindrical portion of the bolt.

7. The processing apparatus according to claim 5, further comprising a rotating shaft for rotating the flange, the working apparatus further comprising a control circuit for controlling the gripper, the first driving mechanism, and the second driving mechanism, wherein the control circuit performs control to separate the processing wheel from the flange in a state where rotation of the flange is restricted by pressing the bolts by the first driving mechanism or the second driving mechanism.

8. The working device includes a control circuit that controls the gripper, the first drive mechanism, and the second drive mechanism. The control circuit performs control to bring the processing wheel into contact with the flange in a state where the entire threaded portion is accommodated in the through hole by the elastic ring gripping the cylindrical portion of the bolt. The working device according to claim 5.

9. The control circuit performs control to tighten the bolt with the first drive mechanism in a state where the processing wheel is in contact with the flange. The working device according to claim 8.

10. A working method for performing an operation of removing the processing wheel from the flange of the processing device according to any one of claims 1 to 4, the method including loosening the bolt, after loosening the bolt, separating the threaded portion of the bolt from the threaded hole, and separating the processing wheel from the flange in a state where the threaded portion is separated from the threaded hole by the elastic ring gripping the cylindrical portion of the bolt.

11. The processing device includes a rotating shaft for rotating the flange. The working method according to claim 10 includes separating the processing wheel from the flange in a state where the rotation of the flange is restricted by a tool for loosening the bolt or a bifurcated fork applied to the bolt.

12. The working method according to claim 10 includes bringing the processing wheel into contact with the flange in a state where the entire threaded portion is accommodated in the through hole by the elastic ring gripping the cylindrical portion of the bolt, pressing the bolt in the axial direction to bring the threaded portion into contact with the threaded hole, and tightening the bolt.

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