Stage calibration device and stage calibration method using same

Abstract

Disclosed are a stage calibration device capable of calibrating a positional error of a target sample placed on a stage in case of an error in the position of the stage, and a stage calibration method using same. The stage calibration device comprises: a stage on which a reference sample is placed; a scanner which is provided over the stage and on which a target sample is placed; a first measurement device that scans the reference sample to generate a first vision image including position information of the stage; a second measurement device that scans the target sample to generate a second vision image including surface information of the target sample; and a controller that controls the movement of the scanner on the basis of the position information of the stage.

Description

Stage calibration device and stage calibration method using the device

[0001] The present invention relates to a stage calibration device and a stage calibration method using the device, and more particularly, to a stage calibration device for positioning a target sample at a target position when performing a unit process of the target sample, and a stage calibration method using the device.

[0002] In the manufacture of integrated circuit devices such as semiconductor devices and display devices, a movable stage requiring high-precision specifications is used, and a target sample such as a wafer or substrate is placed on a stage that can freely move up, down, left, and right in the XY plane, and a unit process is performed on the target sample through a work device for a unit process, or the surface of the target sample is scanned using a vision device such as a camera or microscope, or an atomic force microscope or electron microscope such as an AFM (Atomic Force Microscope) or SEM (Scanning Electron Microscope) to generate a vision image, and the generated vision image is analyzed to derive surface information or steps of the target sample, and through this, whether the target sample is defective is determined.

[0003] Meanwhile, when a unit process is continuously performed while the target sample is placed on a movable stage, deformation of the stage may occur due to environmental factors such as temperature, humidity, etc. or aging of the device, and as a result, an error in the position of the stage may occur, which may cause the target sample to deviate from the target position. If the unit process is continuously performed without compensating for the error due to the change in the position of the stage, the unit process may not be performed accurately for the target sample placed on the stage, which may result in a situation where a process defect may occur. Accordingly, in the past, the error in the position of the stage that occurs due to the continuous use of the stage was compensated for through a separate alignment device or method.

[0004] However, conventional alignment devices or methods are unable to correct errors in the position of the stage before they occur, and when errors in the position of the stage occur, they correct the errors in the position of the stage by using a separate member, such as a calibration jig.

[0005] In addition, conventional alignment devices or methods had the inconvenience of having to be recalibrated every time the position of the camera or stage was changed.

[0006] In addition, conventional alignment devices or methods, as mentioned above, have the problem that the overall productivity and work efficiency of the product or system are lowered due to these shortcomings, as the alignment or calibration work is cumbersome and time-consuming.

[0007] An object of the present invention to solve the above-described problem is to provide a stage calibration device capable of calibrating the positional error of a target sample while the target sample is placed on the stage when an error in the position of the stage occurs, and a stage calibration method using the device.

[0008] Another object of the present invention is to provide a stage calibration device capable of calibrating the positional error of a target sample without using a separate member when a positional error occurs in the stage, and a stage calibration method using the device.

[0009] Another object of the present invention is to provide a stage calibration device and a stage calibration method using the device, which improve productivity and work efficiency by calibrating the position of a target sample so that the target sample is positioned at a target position while performing a unit process of the target sample.

[0010] In order to achieve the above-described object, a stage calibration device according to one embodiment of the present invention includes a stage on which a reference sample is placed, a scanner provided on an upper side of the stage and on which a target sample is placed, a first measuring device that scans the reference sample to generate a first vision image including positional information of the stage, a second measuring device that scans the target sample to generate a second vision image including surface information of the target sample, and a control device that controls movement of the scanner, wherein the control device moves the scanner according to a positional change of the stage calculated based on the positional information of the stage to position the target sample at a target position.

[0011] The first measuring device scans the reference sample to acquire position information of the stage when the second measuring device scans the target sample, and the control device moves the scanner to acquire surface information of the target sample and position the target sample at the target position when the second measuring device scans the target sample.

[0012] The stage is provided to be movable in the X-axis direction and the Y-axis direction on the XY plane, and the reference sample and the target sample move together with the stage with a displacement equal to the displacement resulting from the movement of the stage, and the scanner is provided to be movable in the X-axis direction and the Y-axis direction on the XY plane independently of the movement of the stage above the stage, and the target sample moves together with the scanner with a displacement equal to the displacement resulting from the movement of the scanner.

[0013] The control device performs a first movement process to control the movement of the stage to position the target sample at the target position, and then performs a second movement process to control the movement of the scanner to position the target sample at the target position.

[0014] It further includes a stage moving device for moving the stage and a scanner moving device for moving the scanner, wherein the displacement of the scanner moved by the scanner moving device is relatively smaller than the displacement of the stage moved by the stage moving device.

[0015] At least one marker is provided at a specific location on the reference sample, the first measuring device scans the marker to generate a first vision image including position information of the stage, and the second measuring device scans the upper surface of the target sample to generate a second vision image including surface information of the target sample.

[0016] The stage includes an upper frame on which the scanner is placed, a fixed frame having a hollow space into which the first measuring device is inserted, and a connecting frame that connects the upper frame and the fixed frame and provides a space for the first measuring device to scan the reference sample, wherein the target sample is placed on top of the scanner, and the reference sample is placed on the bottom of the upper frame.

[0017] The above reference sample includes the marker on the lower surface facing the hollow, and the first measuring device is inserted through the hollow of the fixed frame toward the space between the upper frame and the fixed frame provided by the connecting frame, and scans the marker included on the lower surface of the reference sample from the lower portion of the reference sample.

[0018] The above reference sample is built into the upper frame and fixedly placed.

[0019] The stage includes an upper frame on which the scanner is placed, a lower frame on which the reference sample is placed, and a connecting frame that connects the upper frame and the lower frame so that at least one side of the stage is open and provides a space for the first measuring device to scan the reference sample, and the target sample is placed on top of the scanner.

[0020] The above reference sample includes the marker on the upper surface facing the upper frame, and the first measuring device is inserted into the space between the upper frame and the lower frame provided by the connecting frame through the open side of the stage, and scans the marker included on the upper surface of the reference sample from the upper portion of the reference sample.

[0021] The above reference sample is built into the lower frame and fixedly placed.

[0022] In order to achieve the above-described object, a stage calibration device according to one embodiment of the present invention includes a stage, a scanner provided on an upper side of the stage and on which a reference sample and a target sample are placed, a first measuring device that scans the reference sample to generate a first vision image including positional information of the stage, a second measuring device that scans the target sample to generate a second vision image including surface information of the target sample, and a control device that controls movement of the scanner, wherein the control device moves the scanner according to a positional change of the stage calculated based on the positional information of the stage to position the target sample at a target position.

[0023] In order to achieve the above-described object, a stage calibration method according to one embodiment of the present invention includes a stage movement step in which a stage is moved so that a target sample is positioned at a target position, a stage position information acquisition step in which a first measuring device scans a reference sample placed on the stage to acquire position information of the stage, a calibration step in which a scanner provided to be movable above the stage is moved based on the position information of the stage so that a target sample placed on the scanner is positioned at the target position, and a sample shape acquisition step in which a second measuring device scans the target sample located at the target position.

[0024] After the sample shape acquisition step in which the second measuring device scans the target sample located at the target position, the second stage position information acquisition step in which the first measuring device rescans the reference sample placed on the stage to acquire position information of the stage, the second calibration step in which the scanner moves a second time based on the position information of the stage acquired by the first measuring device rescanning the reference sample so that the target sample placed on the scanner is located at the target position, and the second sample shape acquisition step in which the second measuring device rescans the target sample located at the target position.

[0025] According to the stage calibration device of the present invention and the stage calibration method using the device, when an error occurs in the position of the stage, the position error of the target sample can be calibrated while the target sample is placed on the stage.

[0026] According to the stage calibration device of the present invention and the stage calibration method using the device, when a positional error occurs in the stage, the positional error of the target sample can be calibrated without using a separate member.

[0027] According to the stage calibration device of the present invention and the stage calibration method using the device, the position of the target sample is calibrated so that the target sample is positioned at the target position along with the performance of the unit process of the target sample, thereby improving productivity and work efficiency.

[0028] FIG. 1 is a drawing schematically showing a stage calibration device according to one embodiment of the present invention.

[0029] Figure 2 is a simplified illustration of a control device according to the present invention moving a scanner based on position information of a stage.

[0030] FIG. 3 is a drawing showing a stage according to one embodiment of the present invention.

[0031] FIG. 4 is a schematic drawing showing a stage calibration device according to another embodiment of the present invention.

[0032] FIG. 5 is a schematic drawing showing a stage calibration device according to another embodiment of the present invention.

[0033] Figure 6 is a drawing showing a plurality of markers arranged on a reference sample according to the present invention.

[0034] Figures 7 to 10 are flowcharts of a stage calibration method according to the present invention.

[0035] Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. When designating components in each drawing, it should be noted that, where possible, identical components are given the same reference numerals, even if they appear in different drawings.

[0036] And when describing an embodiment of the present invention, if it is determined that a specific description of a related known configuration or function hinders understanding of the embodiment of the present invention, the detailed description is omitted.

[0037] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and the nature, order, or sequence of the components are not limited by the terms.

[0038] In this specification, the singular includes the plural unless specifically stated otherwise. The terms “comprises” and / or “comprising” as used herein do not exclude the presence or addition of one or more other components in addition to the components mentioned.

[0039] Hereinafter, the present invention will be described in more detail with reference to the attached drawings.

[0040]

[0041] FIG. 1 is a drawing briefly showing a stage calibration device (1000) according to one embodiment of the present invention, FIG. 2 is a drawing briefly showing a control device according to the present invention moving a scanner (1200) based on position information of a stage (1100), and FIG. 3 is a drawing showing a stage (1100) according to one embodiment of the present invention.

[0042] A stage calibration device (1000) according to one embodiment of the present invention includes a stage (1100), a scanner (1200), a first measuring device (1300), and a second measuring device (1400), with reference to FIGS. 1 to 3.

[0043] The stage calibration device (1000) further includes a reference sample (1101) placed on the stage (1100). The reference sample (1101) is provided with a plurality of markers (1103) for obtaining positional information of the stage (1100), and the markers (1103) are photographed by the first measuring device (1300).

[0044] The stage calibration device (1000) further includes a control device (not shown) that controls the movement of the stage (1100) and the scanner (1200), and a calculation device (not shown) that calculates the position of the stage (1100) and the change in its position, although not shown in the drawing.

[0045]

[0046] A reference sample (1101) is placed on the stage (1100). More specifically, the reference sample (1101) is placed on the upper frame (1110) of the stage (1100). Specifically, the reference sample (1101) may be placed inverted on the lower surface of the upper frame (1110). A detailed description of the upper frame (1110) will be provided below.

[0047] A target sample (10) on which a unit operation is performed is placed on the upper side of the stage (1100). More specifically, a scanner (1200) is provided on the upper side of the stage (1100), and a target sample (10) is placed on the scanner (1200). The target sample (10) includes a wafer, a substrate, etc.

[0048] The first measuring device (1300) scans a reference sample (1101) placed on a stage (1100) to generate a first vision image. The first vision image includes a plurality of markers (1103) containing positional information of the stage (1100). The first vision image generated by the first measuring device (1300) is calculated by a calculation device to derive positional information of the stage (1100).

[0049] The calculation device derives position information of the stage (1100) based on a plurality of markers (1103) included in the first vision image. The calculation device calculates positional fluctuations of the stage (1100) based on the derived positional information of the stage (1100). The calculation device calculates positional fluctuations of the stage (1100) by comparing the first vision image generated by the first measurement device with a first vision image that is previously stored or generated.

[0050] The control device controls the movement of the scanner (1200) according to the positional change of the stage (1100) calculated based on the positional information of the stage (1100). The control device controls the movement of the scanner (1200) to position the target sample (10) placed on the scanner (1200) at the target position.

[0051] The second measuring device (1400) scans the target sample (10) placed on the scanner (1200) to generate a second vision image. The second measuring device (1400) scans the target sample (10) located at the target position to generate a second vision image. The second vision image includes surface information of the target sample (10). The computing device derives surface information, such as surface roughness and surface step, of the target sample (10) based on the surface information of the target sample (10) included in the second vision image. Whether the target sample (10) is defective or not can be derived through the surface information of the target sample (10) derived by the computing device analyzing the second vision image.

[0052]

[0053] The first measuring device (1300) scans the surface of the reference sample (1101) to generate a first vision image when the second measuring device (1400) scans the target sample (10) to generate a second vision image, or before or after generating the second vision image (hereinafter, referred to as “performing a unit process of the second measuring device (1400)”). The first vision image generated by the first measuring device (1300) is calculated by the calculation device to obtain position information of the stage (1100). The first measuring device (1300) scans the reference sample (1101) to obtain position information of the stage (1100) together with the second measuring device (1400) performing the unit process of scanning the target sample (10).

[0054] When a change in the position of the stage (1100) occurs based on the position information of the stage (1100) during the execution of the unit process of the second measuring device (1400), the control device moves the scanner (1200) to position the target sample (10) at the target position. The control device can calibrate the position of the target sample (10) along with the execution of the unit process of the target sample (10) by moving the scanner (1200) based on the position information of the stage (1100) acquired by the first measuring device (1300) along with the acquisition of surface information of the target sample (10) by the second measuring device (1400).

[0055]

[0056] Below, the stage calibration device (1000) according to the present invention is described in more detail.

[0057] The stage (1100) is provided so as to be freely movable in the X-axis and Y-axis on the XY plane. More specifically, a scanner (1200) is placed on the upper frame (1110) of the stage (1100), and the upper frame (1110) is provided so as to be freely movable in the X-axis and Y-axis on the XY plane.

[0058] The position of the scanner (1200) changes according to the movement of the stage (1100), more specifically, the upper frame (1110). Alternatively, as the unit process is continuously performed while the target sample (10) is placed on the stage (1100), the stage (1100) moves due to environmental factors such as the external environment or device aging, thereby changing the positions of the stage (1100) and the scanner (1200). As the position of the stage (1100) changes, the position of the target sample (10) changes along with the scanner (1200).

[0059] As the stage (1100) moves, the positions of the reference sample (1101) and the target sample (10) change along with the stage (1100). The reference sample (1101) and the target sample (10) move along with the stage (1100) with the same displacement as the displacement due to the movement of the stage (1100).

[0060] The scanner (1200) is provided so as to be able to move freely in the X-axis and Y-axis on the XY plane. The scanner (1200) is provided so as to be able to move in the X-axis and Y-axis independently of the movement of the stage (1100) above the stage (1100).

[0061] As the scanner (1200) moves, the target sample (10) also moves. The target sample (10) moves together with the scanner (1200) with the same displacement as the displacement due to the movement of the scanner (1200).

[0062]

[0063] The stage (1100) changes the position of the target sample (10) so that the target sample (10) is located at the target position according to the X-axis and Y-axis movements. The stage (1100) can move along the X-axis and the Y-axis by stage moving devices (1111, 1121) driven according to a control signal of a control device. The stage moving devices (1111, 1121) include a stage X-axis moving device (1121) and a stage Y-axis moving device (1111) driven according to a control signal of the control device. The stage (1100) can move along the X-axis and the Y-axis by driving the stage X-axis moving device (1121) and the stage Y-axis moving device (1111), respectively.

[0064] A scanner (1200) is installed on the upper side of the stage (1100). A target sample (10) is placed on the scanner (1200). The target sample (10) may be a sample for performing a unit process. As the stage (1100) moves along the X-axis and the Y-axis, the scanner (1200) and the target sample (10) also move along the X-axis and the Y-axis. As the scanner (1200) and the target sample (10) move along the Y-axis due to the movement of the stage (1100), the target sample (10) can be positioned at the target position.

[0065] Above the target sample (10), a unit process performing device that performs a unit process on the target sample (10) is disposed. According to one embodiment, a second measuring device (1400) that photographs the target sample (10) is disposed above the target sample (10). The second measuring device (1400) scans and / or photographs the target sample (10) located at the target position to generate a second vision image including surface information such as surface roughness and steps of the target sample (10). The second vision image acquired by the second measuring device (1400) may be analyzed through a separate calculation device (not shown) to acquire surface information of the target sample (10).

[0066]

[0067] A reference sample (1101) is placed inside the stage (1100). Specifically, the reference sample (1101) is placed on the lower side of the upper frame (1110). The reference sample (1101) also moves along the X-axis and Y-axis according to the X-axis movement and Y-axis movement of the stage (1100), specifically the upper frame (1110). The position of the reference sample (1101) changes according to the movement and position change of the stage (1100) due to the stage moving device (1111, 1121) and / or environmental factors.

[0068] A plurality of markers (1103) are formed on at least one surface of a reference sample (1101). In one embodiment, the reference sample (1101) is fixedly arranged in an inverted manner on the lower surface of a stage (1100), specifically, an upper frame (1110). When the reference sample (1101) is fixedly arranged in an inverted manner on the lower surface of the stage (1100), a plurality of markers (1103) are arranged on the lower surface of the reference sample (1101).

[0069] A first measuring device (1300) for photographing the reference sample (1101) is arranged at the bottom of the stage (1100). The first measuring device (1300) photographs the reference sample (1101) to obtain positional information of the stage (1100). The first measuring device (1300) photographs markers (1103) arranged on the reference sample (1101) to obtain positional information of the stage (1100). The first measuring device (1300) photographs at least one surface of the reference sample (1101) to generate a first vision image including at least one surface of the reference sample (1101). The first vision image generated by the first measuring device (1300) includes markers (1103) arranged on the reference sample (1101). A first vision image generated by a first measuring device (1300) includes a specific marker (1103) among a plurality of markers (1103) indicating position information of a stage (1100). The computing device analyzes the vision image generated by the first measuring device (1300) to derive position information of the stage (1100). The computing device analyzes the type and / or position of the marker (1103) included in the vision image generated by the first measuring device (1300) to derive position information of the reference sample (1101) and the stage (1100).

[0070] The control device moves the scanner (1200) based on the position information of the stage (1100) acquired by the first measuring device (1300), specifically, the position information of the stage (1100) derived by the calculation device.

[0071] The scanner (1200) is provided to be able to move independently from the movement of the stage (1100). The scanner (1200) is provided on the upper side of the stage (1100) to be able to freely move in the X-axis and Y-axis on the XY plane. The scanner (1200) is able to move independently on the stage (1100) by a scanner moving device (not shown) provided separately from the stage moving device (1111, 1121) that freely moves the stage (1100) on the XY plane. The scanner moving device includes a scanner X-axis moving device (not shown) and a scanner Y-axis moving device (not shown) that move the scanner (1200) in the X-axis and Y-axis, respectively.

[0072] The scanner (1200) can be independently moved on the stage (1100) by a scanner X-axis moving device and a scanner Y-axis moving device that are provided separately from the stage X-axis moving device (1121) and the stage Y-axis moving device (1111) that move the stage (1100) along the X-axis and Y-axis. The stage moving devices (1111, 1121) and the scanner moving device each include a known motor and a rail that can move the stage (1100) and the scanner (1200), respectively. The scanner moving device can be applied with the same motor and rail as the stage moving devices (1111, 1121).

[0073] The control device drives the scanner X-axis movement device and the scanner Y-axis movement device to move the scanner (1200) so that the target sample (10) is positioned at the target position. The control device changes the position of the target sample (10) through the movement of the scanner (1200).

[0074] When a position error of the stage (1100) occurs due to environmental factors, etc., the control device can control the movement of the scanner (1200) through the scanner movement device based on the position error of the stage (1100) to position the target sample (10) at the target position.

[0075] The control device can perform a first movement process of positioning the target sample (10) at the target position by controlling the movement of the stage (1100) through the stage movement device (1111, 1121), and then perform a second movement process of positioning the target sample (10) at the target position by controlling the movement of the scanner (1200) through the scanner movement device.

[0076] The displacement of the scanner (1200) moved by the scanner moving device may be relatively smaller than the displacement of the stage (1100) moved by the stage moving device (1111, 1121).

[0077]

[0078] Referring to FIG. 2, the control device moves the scanner (1200) so that the target sample (10) placed on the scanner (1200) is positioned at the target position. The control device moves the scanner (1200) by driving the scanner X-axis movement device and the scanner Y-axis movement device based on the position information of the stage (1100).

[0079] The calculation device compares the first position information of the stage (1100) with the second position information of the current stage (1100) based on the first position information of the stage (1100) when the target sample (10) is positioned at the target position, and derives the difference between the first position information and the second position information as position error information of the stage (1100). The control device changes the position of the target sample (10) so that the target sample (10) is positioned at the target position by moving the scanner (1200) in the opposite direction by the position error according to the difference between the first position information and the second position information derived by the calculation device. For example, if the error information derived by the calculation device is +1 mm in the X-axis direction, the control device moves the scanner (1200) -1 mm in the X-axis direction.

[0080]

[0081] The stage (1100) and the scanner (1200) can be freely moved in the X-axis and Y-axis by the stage moving device (1111, 1121) and the scanner moving device, respectively. As described above, the movement of the scanner (1200) by the scanner moving device allows for more precise movement than the movement of the stage (1100) by the stage moving device (1111, 1121).

[0082] As the stage (1100) moves, the scanner (1200) and the target sample (10) move together so that the target sample (10) is positioned at the target position. As the stage (1100) and the entire scanner (1200) move together, it is difficult to move the stage (1100) so that the target sample (10) is positioned accurately at the target position. On the other hand, as the scanner (1200) moves only the scanner (1200) positioned at the top of the stage (1100), it is easier to move the stage (1100) so that the target sample (10) is positioned accurately at the target position.

[0083] Therefore, after the first movement process of moving the stage (1100) to position the target sample (10) at the target position, the position error resulting from the movement of the stage (1100) is calculated, and based on the calculated position error, the scanner (1200) is moved a second time through the process to more easily position the target sample (10) at the target position for calibration.

[0084] In addition, when a position error of the stage (1100) occurs due to environmental factors such as external environment, device aging, or vibration during the unit process of the target sample (10), the scanner (1200) can be moved based on the position error of the stage (1100) to calibrate the target sample (10) so that it is positioned at the target position during the unit process of the target sample (10).

[0085]

[0086] When the second measuring device (1400) photographs the target sample (10) to obtain surface information of the target sample (10), the first measuring device (1300) simultaneously photographs the reference sample (1101) to obtain position information of the stage (1100), and the control device moves the scanner (1200) based on the acquired position information of the stage (1100).

[0087] In detail, the first measuring device (1300) performs a photographing of a reference sample (1101) while the second measuring device (1400) performs a unit process, the calculation device derives position information of the stage (1100) by analyzing the vision image photographed by the first measuring device (1300), and the control device moves the scanner (1200) based on the position information of the stage (1100). Therefore, while the second measuring device (1400) performs a unit process on the target sample (10), it is possible to calibrate the position of the target sample (10) along with acquiring surface information of the target sample (10) according to the movement of the scanner (1200).

[0088] The operating device derives the difference between the second position information of the stage (1100) when the target sample (10) is positioned at the target position according to the movement of the scanner (1200) and the position information of the stage (1100) acquired by the first measuring device (1300) re-photographing the reference sample (1101) as the position error of the new stage (1100), and moves the scanner (1200) in the opposite direction by the newly derived position error to re-calibrate the position of the target sample (10) during the unit process of the target sample (10).

[0089]

[0090] At least one marker (1103) is provided at a specific location on the reference sample (1101), and the first measuring device (1300) scans the marker (1103) provided on the reference sample (1101) to acquire location information of the stage (1100). The reference sample (1101) can be built into the stage (1100) and fixedly positioned. As the reference sample (1101) is built into the stage (1100), movement and positional change of the reference sample (1101) can occur in unison with movement and positional change of the stage (1100). As the target sample (10) is placed on the upper side of the scanner (1200) arranged on the stage (1100), the reference sample (1101) and the target sample (10) move together unless the scanner (1200) moves independently.

[0091] The target sample (10) is placed on top of the scanner (1200), and the reference sample (1101) is placed on the bottom of the stage (1100), so that the target sample (10) and the reference sample (1101) move together by the movement of the stage (1100). The second measuring device (1400) is placed on top of the scanner (1200) and the target sample (10) to scan the upper surface of the target sample (10). The first measuring device (1300) is placed on the bottom of the reference sample (1101) and photographs the marker (1103) of the reference sample (1101) to obtain positional information of the stage (1100).

[0092]

[0093] A stage (1100) according to one embodiment of the present invention includes an upper frame (1110), a connecting frame (1120), and a fixed frame (1130).

[0094] According to one embodiment of the present invention, a scanner (1200) is placed on the upper part of an upper frame (1110), and a reference sample (1101) is placed on the lower part of the upper frame (1110). A target sample (10) and a second measuring device (1400) installed toward the target sample (10) are placed on the upper part of the scanner (1200).

[0095] A target sample (10) is placed on the upper part of the stage (1100), and a reference sample (1101) is placed inside the stage (1100). The target sample (10) and the reference sample (1101) move integrally with the upper frame (1110) according to the movement of the stage (1100), more specifically, according to the movement of the upper frame (1110).

[0096] A fixed frame (1130) according to one embodiment of the present invention can be fixedly installed on the ground or a separate device, etc. The fixed frame (1130) has a hollow space (1131) that is open to the inside and outside. At least a portion of the first measuring device (1300) is inserted into the hollow space (1131) of the fixed frame (1130). At least a portion of the first measuring device (1300) can be fixed to the fixed frame (1130).

[0097] A connecting frame (1120) according to one embodiment of the present invention connects an upper frame (1110) and a fixed frame (1130), and provides a space (1105) through which a first measuring device (1300) can scan and / or photograph at least one side of a reference sample (1101). Through the space (1105) provided by the connecting frame (1120), the first measuring device (1300) scans and / or photographs a marker (1103) of the reference sample (1101).

[0098] According to one embodiment of the present invention, a reference sample (1101) can be fixedly disposed by being embedded in an upper frame (1110). The reference sample (1101) is fixedly disposed inverted so that one surface on which a plurality of markers (1103) are arranged is arranged toward the hollow (1131) of the fixed frame (1130). The plurality of markers (1103) of the reference sample (1101) are arranged along the lower surface of the reference sample (1101). The first measuring device (1300) is inserted toward the space (1105) provided by the connecting frame (1120) through the hollow (1131) of the fixed frame (1130), and scans and / or photographs the markers (1103) included in the lower surface of the reference sample (1101) from the lower portion of the reference sample (1101).

[0099]

[0100] According to one embodiment of the present invention, a stage (1100), referring to FIG. 3, may be an XY stage (1100) having an open shape at the center of a fixed frame (1130) and an upper frame (1110). A first measuring device (1300) is inserted through the open hollow (1131) of the fixed frame (1130), and the lower surface of a reference sample (1101) fixedly arranged and inverted on the lower surface of the upper frame (1110) can be photographed in the space (1105) between the fixed frame (1130) and the upper frame (1110).

[0101] The connection between the connecting frame (1120) and the fixed frame (1130) may be by a rail. By driving the stage X-axis moving device (1121), the connecting frame (1120) can move in the X-axis direction through the rail on the fixed frame (1130). When the connecting frame (1120) moves in the X-axis direction on the fixed frame (1130) by driving the stage X-axis moving device (1121), the upper frame (1110) can move in the X-axis direction together with the connecting frame (1120).

[0102] The connection between the connecting frame (1120) and the upper frame (1110) may be by a rail. By driving the stage Y-axis moving device (1111), the upper frame (1110) can move in the Y-axis direction through the rail on the connecting frame (1120).

[0103] The upper frame (1110) can freely move in the X-axis and Y-axis on the XY plane by driving the stage X-axis moving device (1121) and the stage Y-axis moving device (1111). By moving the upper frame (1110), the reference sample (1101) and the target sample (10) directly or indirectly placed on the upper frame (1110) can also freely move in the X-axis and Y-axis together with the upper frame (1110). A reference sample (1101) has a plurality of markers (1103) arranged on the lower surface facing the hollow (1131), and a first measuring device (1300) is fixed in such a state that it is inserted toward the space (1105) between the upper frame (1110) and the fixed frame (1130) provided by the connecting frame (1120) through the hollow (1131) of the fixed frame (1130), thereby obtaining positional information of the stage (1100), and more specifically, the upper frame (1110).

[0104]

[0105] FIG. 4 is a drawing briefly showing a stage calibration device (2000) according to another embodiment of the present invention.

[0106] A stage calibration device (2000) according to another embodiment of the present invention includes a stage (2100), a scanner (2200), a first measuring device (2300), and a second measuring device (2400), as shown in FIG. 4.

[0107] A stage (2100) according to another embodiment of the present invention includes an upper frame (2110), a lower frame (2140), a connecting frame (2120), and a fixed frame (2130).

[0108] According to another embodiment of the present invention, a scanner (2200) is placed on the upper part of an upper frame (2110), and a reference sample (2101) is placed on the upper part of a lower frame (2140). The reference sample (2101) is placed in a positive direction so that a plurality of markers (2103) are arranged on the upper surface facing the upper frame (2110). The reference sample (2101) can be built into the lower frame (2140) and fixedly placed.

[0109] According to another embodiment of the present invention, a connecting frame (2120) connects an upper frame (2110) and a lower frame (2140). The connecting frame (2120) is provided so that at least one side of the stage (2100) is open when connecting the upper frame (2110) and the lower frame (2140). A first measuring device (2300) that scans and / or photographs a marker (2103) of a reference sample (2101) is inserted through the open side of the connecting frame (2120). The first measuring device (2300) can be fixedly positioned through a fixing member (2310) that is fixedly installed on the ground or a separate device, etc. The connecting frame (2120) provides a space (2105) through which the first measuring device (2300) scans and / or photographs the reference sample (2101) between the upper frame (2110) and the lower frame (2140).

[0110] According to another embodiment of the present invention, a first measuring device (2300) is inserted into a space (2105) between an upper frame (2110) and a lower frame (2140) provided by a connecting frame (2120) through an open side of a stage (2100) to scan and / or photograph a plurality of markers (2103) arranged on an upper surface of a reference sample (2101).

[0111] According to another embodiment of the present invention, unlike the stage (1100) according to the above-described embodiment of the present invention, a stage (2100) has a plurality of markers (2103) of a reference sample (2101) arranged on the upper surface of the reference sample (2101), and a first measuring device (2300) that scans and / or photographs the markers (2103) of the reference sample (2101) is inserted into the stage (2100) through an opening provided on one side of the stage (2100) and then scans and / or photographs the upper surface of the reference sample (2101).

[0112] In another embodiment of the present invention, since the first measuring device (2300) is inserted into the internal space (2105) of the stage (2100) through the open side of the stage (2100), there is no need to form a hollow (1131) in the fixed frame (1130) as in the above-described embodiment of the present invention, and thus the stability of the stage (2100) can be secured.

[0113] According to another embodiment of the present invention, a lower frame (2140) may include a first lower frame (2141) and a second lower frame (2143). The first lower frame (2141) and the second lower frame (2143) may be installed to be movable in directions intersecting each other on the XY plane.

[0114] A stage (2100) according to another embodiment of the present invention may further include a fixed frame (2130) that is fixedly installed on the ground or a separate device. A first lower frame (2141) may be connected and installed on the upper surface of the fixed frame (2130) via a rail.

[0115] The first lower frame (2141) can move in the X-axis direction along the rail on the upper surface of the fixed frame (2130) according to the operation of the stage X-axis movement device (not shown). As the first lower frame (2141) moves in the X-axis direction, the second lower frame (2143), the connecting frame (2120), the upper frame (2110), and the scanner (2200) connected to the first lower frame (2141) can move together in the X-axis direction. As the first lower frame (2141), the second lower frame (2143), the connecting frame (2120), the upper frame (2110), and the scanner (2200) move together in the X-axis direction due to the X-axis movement of the first lower frame (2141), the reference sample (2101) and the target sample (10) can move together in the X-axis direction.

[0116] A second lower frame (2143) can be connected and installed on the upper part of the first lower frame (2141) via a rail. The second lower frame (2143) can move in the Y-axis direction along the rail on the upper surface of the first lower frame (2141) according to the operation of a stage Y-axis movement device (not shown). As the second lower frame (2143) moves in the Y-axis direction, the connecting frame (2120), the upper frame (2110), and the scanner (2200) connected to the second lower frame (2143) can move together in the Y-axis direction. As the second lower frame (2143), the connecting frame (2120), the upper frame (2110), and the scanner (2200) move together in the Y-axis direction due to the Y-axis movement of the second lower frame (2143), the target sample (10) and the reference sample (2101) can move together in the Y-axis direction. The first measuring device (2300) can scan and / or photograph a reference sample (2101) to generate a first vision image, the computing device can analyze the first vision image, and the control device can move the scanner (2200) independently from the stage (2100) to position the target sample (10) at a target position. The first measuring device (2300) can further include a separate lens (2301) that changes the direction of movement of a light source for scanning and / or photographing the reference sample (2101).

[0117] The stage calibration device (2000) illustrated in FIG. 4 and the stage calibration device (1000) described with reference to FIGS. 1 to 3 include components that are applied identically to each other, and therefore, descriptions of the components that are applied identically are omitted or briefly described. For example, the scanner (2200) and the second measuring device (2400) can be applied identically to the scanner (1200) and the second measuring device (1400) described with reference to FIGS. 1 to 3.

[0118]

[0119] FIG. 5 is a drawing briefly showing a stage calibration device (300) according to another embodiment of the present invention.

[0120] A stage calibration device (3000) according to another embodiment of the present invention includes a base (3010), a stage (3100), a scanner (3200), a first measuring device (3300), and a second measuring device (3400), as shown in FIG. 5.

[0121] The stage (3100) is placed on the upper side of the base (3010). The stage (3100) is provided to be freely movable in the X-axis and Y-axis on the XY plane, like the stage (1100) described above.

[0122] A scanner (3200) is provided on the upper side of the stage (3100), and a reference sample (3101) and a target sample (10) are placed thereon. The scanner (3200) is provided to be able to move freely in the X-axis and Y-axis on the XY plane, like the scanner (1200) described above.

[0123] The reference sample (3101) is used to obtain position information of the stage (3100), like the reference samples (1101, 2101) described above. A plurality of markers (3103) are arranged on the reference sample (3101), and the markers (3103) are photographed by the first measuring device (3300).

[0124] The first measuring device (3300), like the first measuring device (1300) described above, scans a reference sample (3101) to generate a first vision image including positional information of the stage (3100). The first vision image generated by the first measuring device (3300) is calculated by the above-described calculation device to derive positional information of the stage (3100).

[0125] The second measuring device (3400), like the second measuring device (1400) described above, scans the target sample (10) to generate a second vision image including surface information of the target sample (10). As described above, the computing device derives surface information such as surface roughness and surface step of the target sample (10) based on the surface information of the target sample (10) included in the second vision image. Whether the target sample (10) is defective or not can be derived through the surface information of the target sample (10) derived by the computing device analyzing the second vision image.

[0126] The first measuring device (3300) and the second measuring device (3400) are fixed by a support structure (not shown) connected from the base (3010) and can acquire surface information of the reference sample (3101) and the target sample (10), respectively, from the upper portion of the scanner (3200).

[0127] The stage calibration device (3000) includes a control device that controls the movement of the stage and scanner, although not shown in the drawing. As described above, the control device can move the scanner (3200) according to the positional change of the stage (3100) calculated based on the positional information of the stage (3100), thereby positioning the target sample (10) at the target position.

[0128] The stage calibration device (3000) illustrated in FIG. 5 and the stage calibration device (1000) described with reference to FIGS. 1 to 3 include configurations that are applied identically to each other, and therefore, descriptions of the configurations that are applied identically are omitted or briefly described. For example, the stage (3100), the scanner (3200), the first measuring device (3300), the second measuring device (3400), the control device, and the calculation device may each have configurations that are identical or equivalent to those of the stage (1100), the scanner (1200), the first measuring device (1300), the second measuring device (1400), the control device, and the calculation device described with reference to FIGS. 1 to 3.

[0129]

[0130] FIG. 6 is a drawing showing a plurality of markers (1103, 2103, 3103) arranged on a reference sample (1101, 2101, 3101) according to the present invention.

[0131] On at least one side of the reference sample (1101, 2101, 3101), a plurality of markers (1103, 2103, 3103) are arranged, as shown in FIG. 6. Address information indicating the location of each marker (1103, 2103, 3103) may be arranged at the bottom of the marker. Among a plurality of markers (1103, 2103, 3103) in a first vision image captured by a first measuring device (1300, 2300, 3300), a specific marker (1103, 2103, 3103) is included along with address information of the marker (1103, 2103, 3103), and a computing device analyzes the first vision image to derive address information of the corresponding marker (1103, 2103, 3103), and through position information where the marker (1103, 2103, 3103) is located in the first vision image, position information of the stage (1100, 2100, 3100), and more specifically, the upper frame (1110, 2110), can be derived. Each marker (1103, 2103, 3103) may be arranged at intervals of, for example, 5 mm, and horizontal arrangement information and vertical arrangement information may be arranged together at the bottom of each marker (1103, 2103, 3103).

[0132]

[0133] Figures 7 to 10 are flowcharts of a stage calibration method according to the present invention.

[0134] The stage calibration method according to the present invention, with reference to FIGS. 7 and 8, includes a stage movement step (S100) in which a stage (1100, 2100, 3100) moves so that a target sample (10) is positioned at a target position, a stage position information acquisition step (S200) in which a first measuring device (1300, 2300, 3300) scans and / or photographs a reference sample (1101, 2101, 3101) placed on the stage (1100, 2100, 3100) to acquire position information of the stage (1100, 2100, 3100), and a scanner (1200, 2200, 3200) that is provided to be movable on the upper side of the stage (1100, 2100, 3100) moves based on the position information of the stage (1100, 2100, 3100). It includes a calibration step (S300) in which a target sample (10) placed on a scanner (1200, 2200, 3200) is positioned at a target position, and a sample shape acquisition step (S400) in which a second measuring device (1400, 2400, 3400) scans and / or photographs the target sample (10) positioned at the target position.

[0135] The stage calibration method, referring to FIGS. 9 and 10, includes a second stage position information acquisition step (S500) in which the first measuring device (1300, 2300, 3300) acquires position information of the stage (1100, 2100, 3100) by rescanning and / or re-photographing the reference sample (1101, 2101, 3101) placed on the stage (1100, 2100, 3100) after step S400, and a scanner (1200, 2200, 3200) moves for the second time based on the position information of the stage (1100, 2100, 3100) acquired by the first measuring device (1300, 2300, 3300) by rescanning and / or re-photographing the reference sample (1101, 2101, 3101). It further includes a second calibration step (S600) in which a target sample (10) placed on a scanner (1200, 2200, 3200) is positioned at a target position, and a second sample shape acquisition step (S700) in which a second measuring device (1400, 2400, 3400) rescans and / or rephotographs the target sample (10) positioned at the target position.

[0136] Since the detailed description of the operation of each component at each stage is as described above, only the features of the stage calibration method according to the present invention are briefly described.

[0137]

[0138] Referring to FIG. 7, in step S100, the stage (1100, 2100, 3100) moves on the XY plane by driving the stage (1100, 2100, 3100) moving device. In step S100, the stage (1100, 2100, 3100) moves so that the target sample (10) placed on the scanner (1200, 2200, 3200) is positioned at the target position.

[0139] In step S200, the first measuring device (1300, 2300, 3300) captures a plurality of markers (1103, 2103, 3103) arranged on at least one surface of a reference sample (1101, 2101, 3101) arranged on a stage (1100, 2100, 3100) to generate a first vision image. The computing device analyzes the first vision image generated by the first measuring device (1300, 2300, 3300) and acquires position information of the stage (1100, 2100, 3100) through the markers (1103, 2103, 3103) included in the first vision image.

[0140] In step S300, the scanner (1200, 2200, 3200) moves on the XY plane by the scanner movement device. The movement of the scanner (1200, 2200, 3200) can be more finely moved than the movement of the stage (1100, 2100, 3100). Therefore, the movement of the scanner (1200, 2200, 3200) in step S300 can position the target sample (10) at the target position more accurately than the movement of the stage (1100, 2100, 3100) in step S100.

[0141] At step S400, the second measuring device (1400, 2400, 3400) photographs the target sample (10) located at the target position to generate a second vision image containing surface information of the target sample (10), and the calculation device analyzes the second vision image to obtain the surface shape and step, etc. of the target sample (10).

[0142]

[0143] Referring to FIG. 8, step S400 may be performed together with steps S100, S200, and S300, or after each step (S100, S200, S300). That is, the unit process for the target sample (10) in step S400 may be performed together with the calibration of the target sample (10) by the first measuring device (1300, 2300, 3300). In addition, step S500 may be performed together with the unit process for each target sample (10) in step S400.

[0144]

[0145] Referring to FIG. 9, in step S500, the first measuring device (1300, 2300, 3300) continuously photographs the reference sample (1101, 2101, 3101) placed on the stage (1100, 2100, 3100) while performing a unit process for the target sample (10) to reacquire position information such as positional changes of the stage (1100, 2100, 3100). If a positional change occurs in the stage (1100, 2100, 3100) in step S500, step S600 is performed together with step S400.

[0146] In step S600, the first measuring device (1300, 2300, 3300) re-photographs the reference sample (1101, 2101, 3101), and according to the position information such as the position change of the stage (1100, 2100, 3100) acquired, the scanner (1200, 2200, 3200) moves a second time again, and the target sample (10) placed on the scanner (1200, 2200, 3200) is re-positioned at the target position.

[0147] At step S700, the second measuring device (1400, 2400, 3400) performs a unit process on a target sample (10) located at the target position.

[0148]

[0149] Referring to FIG. 10, step S700 can be performed together with steps S500 and S600, or after each step (S500, S600). Accordingly, acquisition of position information of the stage (1100, 2100, 3100) and calibration of the scanner (1200, 2200, 3200) by the first measuring device (1300, 2300, 3300) can be performed together with the performance of the unit process by the second measuring device (1400, 2400, 3400), so that the target sample (10) can be positioned at the target position without interruption to the unit process.

[0150]

[0151] In this specification, the first measuring device (1300, 2300, 3300) and the second measuring device (1400, 2400, 3400) may be applied with a camera, sensor, optical microscope, etc. that can photograph the surface of a reference sample (1101, 2101, 3101). However, it is not limited thereto, and the first measuring device (1300, 2300, 3300) and the second measuring device (1400, 2400, 3400) may be applied with an electron microscope or a scanning probe microscope, for example, the first measuring device (1300, 2300, 3300) and the second measuring device (1400, 2400, 3400) may be applied with a cantilever and probe of an AFM (Atomic Force Microscope), or an electron gun, focusing lens, objective lens, and scanning coil of an SEM (Scanning Electron Microscope).

[0152] In this specification, the computing and control units may be processors that execute sequential execution processes stored in memory. Alternatively, they may operate as software modules driven and controlled by the processor. Furthermore, the processor may be a hardware device.

[0153] The scope of protection of the present invention is not limited to the description and expression of the embodiments explicitly described above. Furthermore, it should be noted that the scope of protection of the present invention may not be limited by obvious modifications or substitutions within the technical field to which the present invention pertains.

Claims

1. Stage where the reference sample is placed; A scanner provided on the upper side of the stage and on which a target sample is placed; A first measuring device that scans the reference sample to generate a first vision image including positional information of the stage; A second measuring device that scans the target sample to generate a second vision image including surface information of the target sample; and Includes a control device that controls the movement of the scanner, A stage calibration device, characterized in that the control device moves the scanner according to a change in the position of the stage calculated based on the position information of the stage to position the target sample at the target position.

2. In claim 1, The first measuring device acquires position information of the stage by scanning the reference sample when the second measuring device scans the target sample, The above control device is a stage calibration device that, when the second measuring device scans the target sample, moves the scanner to acquire surface information of the target sample and position the target sample at the target position.

3. In claim 1, The above stage is provided so as to be able to move in the X-axis direction and the Y-axis direction on the XY plane, The above reference sample and the above target sample move together with the stage with a displacement equal to the displacement caused by the movement of the stage, The above scanner is provided so as to be able to move in the X-axis direction and the Y-axis direction on the XY plane independently of the movement of the stage above the stage, The above target sample is a stage calibration device that moves together with the scanner with a displacement equal to the displacement caused by the movement of the scanner.

4. In claim 3, The above control device, A stage calibration device that performs a first movement process of controlling the movement of the stage to position the target sample at the target position, and then performs a second movement process of controlling the movement of the scanner to position the target sample at the target position.

5. In claim 4, A stage moving device for moving the above stage; and It further includes a scanner moving device for moving the above scanner, A stage calibration device, characterized in that the displacement of the scanner moved by the scanner moving device is relatively smaller than the displacement of the stage moved by the stage moving device.

6. In claim 1, The above reference sample is provided with at least one marker at a specific location, The first measuring device scans the marker to generate a first vision image including position information of the stage, A stage calibration device wherein the second measuring device scans the upper surface of the target sample to generate a second vision image including surface information of the target sample.

7. In claim 6, The above stage is, An upper frame on which the scanner is placed; A fixed frame having a hollow into which the first measuring device is inserted; and A connecting frame that connects the upper frame and the fixed frame and provides a space for the first measuring device to scan the reference sample; Includes, The above target sample is placed on the upper part of the scanner, A stage calibration device, wherein the above reference sample is placed at the lower portion of the upper frame.

8. In claim 7, The above reference sample includes the marker on the lower surface facing the hollow, A stage calibration device wherein the first measuring device is inserted through the hollow of the fixed frame toward the space between the upper frame and the fixed frame provided by the connecting frame, and scans the marker included in the lower surface of the reference sample from the lower portion of the reference sample.

9. In claim 8, A stage calibration device, characterized in that the reference sample is built into the upper frame and fixedly placed.

10. In claim 6, The above stage is, An upper frame on which the scanner is placed; A lower frame on which the above reference sample is placed; and A connecting frame that connects the upper frame and the lower frame so that at least one side of the stage is open, and provides a space for the first measuring device to scan the reference sample; The above target sample is a stage calibration device placed on the upper part of the scanner.

11. In claim 10, The above reference sample includes the marker on the upper surface facing the upper frame, The first measuring device is a stage calibration device that is inserted into the space between the upper frame and the lower frame provided by the connecting frame through an open side of the stage, and scans the marker included in the upper surface of the reference sample from the upper side of the reference sample.

12. In claim 11, A stage calibration device, characterized in that the reference sample is built into the lower frame and fixedly placed.

13. Stage; A scanner provided on the upper side of the stage, in which a reference sample and a target sample are placed; A first measuring device that scans the reference sample to generate a first vision image including positional information of the stage; A second measuring device that scans the target sample to generate a second vision image including surface information of the target sample; and Includes a control device that controls the movement of the scanner, A stage calibration device, characterized in that the control device moves the scanner according to a change in the position of the stage calculated based on the position information of the stage to position the target sample at the target position.

14. Stage movement step in which the stage moves so that the target sample is positioned at the target position; A stage position information acquisition step in which a first measuring device scans a reference sample placed on the stage to acquire position information of the stage; A calibration step in which a scanner, which is provided to be movable on the upper side of the stage based on the position information of the stage, moves so that a target sample placed on the scanner is positioned at the target position; and A stage calibration method, comprising a sample shape acquisition step in which a second measuring device scans the target sample located at the target position.

15. In claim 14, After the sample shape acquisition step in which the second measuring device scans the target sample located at the target position, A second stage position information acquisition step in which the first measuring device rescans a reference sample placed on the stage to acquire position information of the stage; A second calibration step in which the scanner is moved a second time based on the position information of the stage acquired by the first measuring device rescanning the reference sample so that the target sample placed on the scanner is positioned at the target position; and A stage calibration method further comprising a second sample shape acquisition step in which a second measuring device rescans the target sample located at the target position.

Images