Substrate including pattern
The substrate with wavy electrode patterns addresses the starburst issue by alternating unit patterns with varying starting points and widths, enhancing visibility and transparency in devices like touch sensors and transparent antennas.
Patent Information
- Application Number
- PCT/KR2025/099333
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-05
- Filing Date
- 2025-02-06
- Publication Date
- 2025-08-14
AI Technical Summary
Existing electrode patterns in substrates suffer from a starburst phenomenon, where light spreads or stretches at the corners, causing visibility issues and obstruction of screens or camera views, particularly in devices requiring transparency and visibility.
A substrate with an electrode layer featuring wavy patterns, where unit patterns are repeated in alternating directions with varying starting points and widths, preventing the starburst phenomenon and enhancing visibility.
The wavy pattern design effectively prevents pattern recognition and starburst, improving visibility and transparency in devices such as touch sensors, fingerprint sensors, and transparent antennas.
Smart Images

Figure KR2025099333_14082025_PF_FP_ABST
Abstract
Description
substrate containing a pattern
[0001] The present invention relates to a substrate including a pattern.
[0002]
[0003] In general, electronic devices perform functions by using various input devices, such as display devices, portable transmission devices, and other information processing devices, and input and perform signals including electrode patterns.
[0004] In addition, in the construction industry or the transportation industry such as automobiles, railways, and aviation, a surface heating element including a heating electrode pattern can be applied to solve the problem of poor visibility due to fogging or frost caused by temperature differences inside and outside of a vehicle, helmet, or building.
[0005] When including such electrode patterns, in many cases a metal mesh pattern is formed and used to satisfy optical characteristics and resistance values, but there is a problem in that a starburst phenomenon occurs in which light spreads or stretches at the corners of the standardized mesh pattern, and the pattern is visible. This can cause problems in terms of information processing, obstruction of the transmission screen view, obstruction of the driver's view, and problems in terms of the camera's software.
[0006] In relation to this, Korean Patent Publication No. 10-1523325 attempts to prevent sparkling by forming a heating element in the form of a metal mesh through a nano-imprint process without using a surface-type transparent electrode material with high surface resistance and applying a blackening material to the metal mesh pattern. However, there is still a problem that it is insufficient in preventing the starburst phenomenon among the metal mesh patterns.
[0007] Therefore, there is a need for the development of a substrate that can secure excellent visibility by suppressing the phenomenon of pattern recognition and starburst phenomenon that can occur when including an electrode pattern.
[0008]
[0009] The present invention aims to provide a substrate having a non-degraded visibility by including a wavy pattern that can prevent a starburst phenomenon and a phenomenon in which a pattern is visible.
[0010] In addition, the present invention aims to provide a sensor having excellent visibility, such as a touch sensor, a fingerprint sensor, a pressure sensor, a camera sensor for an automobile, a radar sensor, etc., and a device requiring transparency, such as a transparent antenna, and a surface heating element, by including the substrate, thereby improving the starburst phenomenon and preventing the phenomenon of a pattern being recognized.
[0011] However, the problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.
[0012]
[0013] In order to solve the above problem, the present invention provides a substrate including a substrate and an electrode layer formed on the substrate, wherein the electrode layer includes a plurality of wavy patterns in which unit patterns are repeated, the wavy patterns including a first pattern in which unit patterns are repeated in a first direction and a second pattern in which unit patterns are repeated in a direction parallel to the first pattern, and wherein the first pattern and the second pattern are characterized in that the starting points of each unit pattern are not the same with respect to the first direction.
[0014] The above first pattern and second pattern may have a distance difference (ΔSp) of greater than 0 based on the first direction of the starting point of each unit pattern.
[0015] The first pattern and the second pattern may have a distance (P) between virtual lines passing through the starting point of each unit pattern in the first direction of 30 to 2500 μm.
[0016] The above first pattern and the second pattern may be repeated alternately, or the first pattern may be repeated in multiple rows and then the second pattern may be repeated in multiple rows.
[0017] The first pattern and the second pattern may each have a unit pattern having a width in a first direction (first width, W1) of 120 to 40,000 μm and a width in a second direction perpendicular to the first direction (second width, W2) of 60 to 5,000 μm.
[0018] The ratio (W1 / W2) of the first width (W1) to the second width (W2) may be 0.5 to 10.
[0019] The first pattern and the second pattern may have the same width in the first direction (first width, W1) and the same width in the second direction perpendicular to the first direction (second width, W2) of each unit pattern.
[0020] The above first pattern and second pattern may not touch or intersect each other.
[0021] The first pattern and the second pattern may have different widths in the first direction (first width, W1) and in the second direction perpendicular to the first direction (second width, W2) of each unit pattern.
[0022] The above first pattern and second pattern may be in contact or intersecting.
[0023] The above wavy pattern may have a line width of 0.3 μm to 30 μm.
[0024] The present invention provides a substrate comprising a substrate and an electrode layer formed on the substrate, wherein the electrode layer includes a plurality of wavy patterns in which unit patterns are repeated, the wavy patterns including a first pattern in which unit patterns are repeated in a first direction; and a third pattern in which unit patterns are repeated in a direction other than parallel to the first direction, and a plurality of geometric shapes formed by intersecting the first pattern and the third pattern.
[0025] The above-mentioned other direction is a third direction in which the third pattern progresses, and the angle between the tangents of each pattern at the point where the first pattern and the third pattern intersect may be greater than 0° and less than or equal to 90°.
[0026] The first pattern and the third pattern may each have a width (first width, W1) of the unit pattern in the first direction and a width (third width, W3) of the third pattern in the third direction of 120 to 40,000 μm, and a width (second width, W2) of the unit pattern in the second direction perpendicular to the first direction and a width (fourth width, W4) of the unit pattern in the fourth direction perpendicular to the third direction of 60 to 5,000 μm.
[0027] The ratio of the first width (W1) to the second width (W2) (W1 / W2) and the ratio of the third width (W3) to the fourth width (W4) (W3 / W4) may be 0.5 to 10.
[0028] The above wavy pattern may have a line width of 0.3 μm to 30 μm.
[0029] The above substrate may include a bus bar connected to the electrode layer.
[0030] The above electrode layer and bus bar may be formed of the same material.
[0031] The above electrode layer and bus bar may be formed on the same layer.
[0032] The above electrode layer and bus bar may be formed integrally in the same process step.
[0033] The above electrode layer and bus bar may have a thickness of 0.1 to 1 μm.
[0034] The above bus bar may include a first bus bar connected to both ends of the electrode layer; and a second bus bar formed on the first bus bar.
[0035] The above substrate may further include at least one selected from the group consisting of a blackening layer, a separation protective layer, and an overcoating layer.
[0036] In addition, the present invention provides a planar heating element including the substrate.
[0037] Additionally, the present invention provides a sensor including the substrate.
[0038] The present invention also provides a transparent antenna including the substrate.
[0039]
[0040] The present invention can prevent a phenomenon in which a pattern is recognized and prevent the occurrence of starburst, thereby providing a substrate with excellent visibility.
[0041] In addition, the present invention can provide a sensor having improved pattern recognition and starburst phenomenon and excellent visibility, such as a touch sensor, a fingerprint sensor, a pressure sensor, a camera sensor for an automobile, a radar sensor, and the like, by including the substrate, and a device requiring transparency, such as a transparent antenna, and a surface heating element.
[0042]
[0043] Figure 1 is a plan view of a substrate according to a preferred embodiment of the present invention.
[0044] Figure 2 is a diagram showing a more enlarged version of the pattern in Figure 1.
[0045] Figure 3 is a diagram showing a pattern according to another preferred embodiment of the present invention.
[0046] Figure 4 is a plan view of a substrate according to another preferred embodiment of the present invention.
[0047] Figure 5 is a cross-sectional view of Figure 4.
[0048] Figures 6 to 11 are cross-sectional views of a substrate according to another embodiment of the present invention.
[0049] FIGS. 12 and 13 are plan views of a heating substrate according to some embodiments of the present invention connected to an external power source.
[0050] Fig. 14 is a cross-sectional view of a surface heating element according to the present invention.
[0051] Figure 15 is a photograph showing the results of pattern shape and visibility evaluation according to Examples 1 to 8.
[0052] Figure 16 is a photograph showing the results of pattern shape and visibility evaluation according to comparative examples 1 to 4.
[0053]
[0054] What each symbol represents is as follows:
[0055] 10: Substrate 20: External member adhesive layer
[0056] 30: External Absence 40: External Power
[0057] 100: substrate 200: electrode layer
[0058] 210-1: First pattern 210-2: Second pattern
[0059] 300: Busbar 300-1: 1st busbar
[0060] 300-2: Second bus bar 500: Blackening layer
[0061] 600: Separation protection layer 700: Overcoating layer
[0062]
[0063] The present invention relates to a substrate including a pattern, and provides a substrate having excellent visibility by preventing starburst occurrence.
[0064] More specifically, the present invention provides a substrate comprising a substrate and an electrode layer formed on the substrate, wherein the electrode layer includes a plurality of wavy patterns in which unit patterns are repeated, the wavy patterns including a first pattern in which unit patterns are repeated in a first direction and a second pattern in which unit patterns are repeated in a direction parallel to the first pattern, and wherein the first pattern and the second pattern are characterized in that the starting points of each unit pattern are not the same with respect to the first direction.
[0065] In addition, the present invention provides a substrate including a substrate; and an electrode layer formed on the substrate, wherein the electrode layer includes a plurality of wavy patterns in which unit patterns are repeated, the wavy pattern including a first pattern in which unit patterns are repeated in a first direction; and a third pattern in which unit patterns are repeated in a direction other than parallel to the first direction, and a plurality of geometric shapes formed by intersecting the first pattern and the third pattern.
[0066] In addition, the present invention provides a planar heating element, a sensor and a transparent antenna including the substrate.
[0067]
[0068] Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. However, the following drawings attached to this specification illustrate preferred embodiments of the present invention and, together with the contents of the invention described above, serve to further understand the technical concept of the present invention. Therefore, the present invention should not be interpreted as being limited to the matters described in such drawings.
[0069] In this specification, the substrate is described as a heating substrate, but this is merely an example of a preferred embodiment of the present invention, and the technical concept of the present invention is not limited thereto. For example, the substrate can be applied to sensors such as touch sensors, fingerprint sensors, pressure sensors, automotive camera sensors, radar sensors, and devices requiring transparency, such as transparent antennas.
[0070] In this specification, singular forms also include plural forms, unless specifically stated otherwise. Throughout the specification, the same reference numerals refer to the same elements. For example, as used herein, "wavy pattern" may refer to at least one of the first pattern, the second pattern, and the third pattern, and "busbar" may refer to at least one of the first busbar and the second busbar.
[0071] As used herein, the terms “comprises” and / or “comprising” are used to mean that they do not exclude the presence or addition of one or more other components, elements and / or devices other than the components, elements and / or devices mentioned.
[0072] Spatially relative terms such as "below," "below," "underside," "above," "top," and "upper side" can be used to easily describe the relationship between one element or component and another element or component, as depicted in the drawings. Spatially relative terms should be understood to include different directions of the elements during use or operation in addition to the directions depicted in the drawings. For example, if an element depicted in a drawing is flipped over, an element described as "below" or "below" another element may end up being placed "above" the other element. Thus, the exemplary term "below" can include both below and above directions.
[0073] As used herein, the term "connection" is used to mean both indirectly connecting and directly connecting multiple components, and to mean both physically connecting and electrically connecting.
[0074]
[0075] < Substrate >
[0076] FIG. 1 and FIG. 2 are a plan view and an enlarged view of a pattern of a substrate according to a preferred embodiment of the present invention, FIG. 3 is an enlarged view of a pattern according to another preferred embodiment of the present invention, and FIG. 4 and FIG. 5 are a plan view and a cross-sectional view of a substrate according to another preferred embodiment of the present invention.
[0077] Referring to FIGS. 1 to 2 and 4, a substrate (10) according to a preferred embodiment of the present invention includes a substrate (100), an electrode layer (200) formed on the substrate (100), and the electrode layer (200) includes a plurality of wavy patterns (210) in which the same unit pattern is repeated in a first direction, and the wavy pattern includes a first pattern in which the unit pattern is repeated in the first direction and a second pattern in which the unit pattern is repeated in a direction parallel to the first pattern, and the first pattern and the second pattern are characterized in that the starting points of the respective unit patterns are not the same with respect to the first direction.
[0078] In the present invention, the wavy pattern means a curve formed by alternating one or more mountains and valleys, and includes, but is not limited to, a partially protruding shape or a deformed shape.
[0079] In the present invention, the starting point of the wavy pattern refers to the point where the mountain starts among the boundaries between the mountain and the valley, but is not limited thereto.
[0080] In the present invention, the first direction means the direction in which the wavy pattern progresses, i.e., the direction in which the unit pattern is repeated and extended. For example, when the substrate of the present invention includes bus bars (300) described below at both ends of the electrode layer (200), the first direction may mean the direction from the bus bar on one side to the bus bar on the other side.
[0081] In the present invention, the second direction means a direction perpendicular to the first direction in the plane on which the wavy pattern progresses.
[0082] Additionally, in the present invention, the unit pattern means one unit of a wavy pattern repeated in the first direction, and means the smallest unit that is repeated.
[0083] In the present invention, the first width (W1) means the width in the first direction with respect to the unit patterns of the first pattern and the second pattern, and the second width (W2) means the width in the second direction perpendicular to the first direction with respect to the unit patterns of the first pattern and the second pattern.
[0084]
[0085] The electrode layer (200) included in the substrate of the present invention includes a wavy pattern (210) in which unit patterns are continuously repeated, and the wavy pattern includes a first pattern (210-1) that proceeds in a first direction and a second pattern (210-2) in which unit patterns are repeated in a direction parallel to the wavy pattern.
[0086] In particular, the wavy pattern (210-1, 210-2) included in the above plurality of rows is characterized in that the starting points of the unit patterns in each row, particularly the starting points (Sp1, Sp2) of each of two adjacent rows, are not identical with respect to the first direction.
[0087] That is, the unit pattern may have a distance difference (ΔSp) in the first direction greater than 0 between the two closest starting points (Sp1, Sp2) of two adjacent rows, and preferably greater than 0 and less than or equal to W1 / 2.
[0088] If the above starting points (Sp1, Sp2) are at the same position in the first direction in the corresponding pattern row, that is, if the distance difference (ΔSp) in the first direction of each starting point of two adjacent rows is 0, the positions of the peaks and valleys in each of the wavy patterns formed by the plurality of rows all match, and in this case, there is a problem that a starburst occurs when a light source is shined on them.
[0089] In terms of resistance, visibility and transmittance, it is preferable that the distance (P) between the virtual lines passing through the starting point of each unit pattern in the first direction is 30 to 2500 ㎛, preferably 50 to 1800 ㎛, for the first pattern and the second pattern.
[0090] The above first pattern and the second pattern may be repeated alternately, or the first pattern may be repeated in multiple rows and then the second pattern may be repeated in multiple rows, and the repetition ratio of each pattern is not particularly limited.
[0091] The above unit pattern has a width in a first direction (first width, W1) of 120 to 40,000 µm, preferably 200 to 24,000 µm, and a width in a second direction perpendicular to the first direction (second width, W2) of 60 to 5,000 µm, preferably 100 to 3,000 µm.
[0092] When the above range is satisfied, resistance and transmittance can be satisfied at the same time, and the visibility of the pattern can also be improved. The smaller the first width and the second width, the more advantageous the resistance is while the transmittance is disadvantageous, but when the above range is satisfied, there is no problem in achieving the desired transmittance. In addition, the larger the first width and the second width, the more advantageous the transmittance is while the resistance is disadvantageous, but there is no problem in providing resistance for performing the desired function.
[0093] In addition, pattern visibility tends to be less visible as the first and second widths are smaller, and when the above ranges are satisfied, the desired excellent visibility can be provided.
[0094] Furthermore, considering resistance, transmittance and pattern visibility, the ratio of the first width (W1) to the second width (W2) (W1 / W2) may be 0.5 to 10, preferably 1 to 5.
[0095] The first pattern and the second pattern may have a width (first width, W1) in a first direction and a width (second width, W2) in a second direction perpendicular to the first direction of each unit pattern, which are each equal to each other. That is, the first width and the second width of the unit pattern of the first pattern may be equal to the first width and the second width of the unit pattern of the second pattern, and in this case, the first pattern and the second pattern may not touch or intersect each other, so that the occurrence of the starburst phenomenon can be more effectively prevented and visibility is excellent.
[0096] In addition, the first pattern and the second pattern may not have the same width in the first direction (first width, W1) and the same width in the second direction perpendicular to the first direction (second width, W2) of each unit pattern. That is, the first width and the second width of the unit pattern of the first pattern may not be the same as the first width and the second width of the unit pattern of the second pattern, respectively. In this case, the first pattern and the second pattern may have a point where they touch or intersect, but even in this case, the starburst phenomenon can be prevented to the extent that it does not cause a problem in visibility.
[0097] The above wavy pattern (210) can be adjusted in consideration of visibility and surface resistance according to the distance (P) between virtual lines passing through the starting point of each unit pattern in the first direction, and the line width can be 0.3 µm to 30 µm, preferably 1 µm to 10 µm. When the above range is satisfied, sufficient heat generation performance can be exhibited without lowering visibility, which is preferable.
[0098] The electrode layer (200) of the present invention may have a surface resistance of 0.5Ω / □ to 10Ω / □, preferably 0.5 to 8Ω / □. If it exceeds the above range, the heat generation rate may be slowed down, and if it is below the above range, the heat generation rate may be fast, but the current consumption may increase, which may cause a problem of increased power consumption.
[0099]
[0100] Meanwhile, the present invention, referring to FIG. 3, provides a substrate including a substrate and an electrode layer formed on the substrate, wherein the electrode layer includes a plurality of wavy patterns in which unit patterns are repeated, the wavy patterns including a first pattern (210-1) in which unit patterns are repeated in a first direction; and a third pattern (210-3) in which unit patterns are repeated in a direction other than parallel to the first direction, and includes a plurality of geometric shapes formed by intersecting the first pattern and the third pattern.
[0101] The above-mentioned other direction is the direction in which the third pattern (210-3) progresses, and the angle between the tangents of each pattern at the point where the first pattern (210-1) and the third pattern (210-3) intersect may be greater than 0° and less than 90°.
[0102] In the present invention, the third width (W3) means the width in the third direction with respect to the unit pattern of the third pattern (210-3), and the fourth width (W4) means the width in the fourth direction perpendicular to the third direction with respect to the unit pattern of the third pattern (210-3).
[0103] The first pattern and the third pattern may each have a width (first width, W1) of the unit pattern in the first direction and a width (third width, W3) of the third pattern in the third direction of 120 to 40,000 μm, and a width (second width, W2) of the unit pattern in the second direction perpendicular to the first direction and a width (fourth width, W4) of the unit pattern in the fourth direction perpendicular to the third direction of 60 to 5,000 μm.
[0104] When the above range is satisfied, the pattern is not visible and starbursts are not generated by evenly dispersing light, thereby improving visibility. Meanwhile, the light transmittance can be adjusted to partially block light, thereby blocking ultraviolet rays and heat, and can be applied to devices requiring a small area while controlling power consumption.
[0105] Additionally, considering visibility and transmittance, the ratio of the third width (W3) to the fourth width (W4) (W3 / W4) may be 0.5 to 10, preferably 1 to 5.
[0106] The first width and the second width of the unit pattern of the first pattern may be the same as or different from the third width and the fourth width of the unit pattern of the third pattern, respectively.
[0107] The above wavy pattern may have a line width of 0.3 μm to 30 μm, preferably 1 μm to 10 μm. When the above range is satisfied, sufficient heat generation performance can be exhibited without reducing visibility, which is preferable.
[0108]
[0109] The above substrate (100) serves to structurally support the electrode layer (200) and maintain its position, and any substrate commonly used in the field can be used without limitation. The above substrate (100) may be a transparent substrate that can transmit light, and may be one having flexible properties.
[0110] In one embodiment, the substrate (100) may include at least one selected from the group consisting of polymeric materials such as glass, cyclic olefin polymer (COP), polyethylene terephthalate (PET), polyacrylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyallylate, polyimide (PI), cellulose acetate propionate (CAP), polyethersulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer (COC), polymethyl methacrylate (PMMA); and / or inorganic insulating materials such as silicon oxide, silicon nitride, silicon oxynitride, and metal oxide.
[0111] The thickness of the above substrate (100) may be 1 to 500 μm, and preferably 5 to 75 μm. When the thickness of the substrate (100) satisfies the above range, it is preferable because it has the advantage of maintaining a stable structure while having transparent and flexible characteristics, making it easy to handle in the process.
[0112]
[0113] The material for forming the above electrode layer (200) is not particularly limited, but a component having transparency may be preferable.
[0114] It may include at least one selected from the group consisting of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc tin oxide (IZTO), cadmium tin oxide (CTO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), carbon nanotubes (CNT), graphene, and metals, and the metals are not particularly limited. Examples thereof include silver (Ag), gold (Au), aluminum (Al), copper (Cu), molybdenum (Mo), nickel (Ni), zinc (Zn), tungsten (W), titanium (Ti), tellurium (Te), chromium (Cr), etc. and preferably copper (Cu). These can be used alone or in combination of two or more.
[0115]
[0116] The substrate of the present invention may include a bus bar (300) connected to the electrode layer (200), as shown in FIGS. 4 to 13.
[0117]
[0118] The electrode layer (200) is physically directly connected to the bus bars (300) at both ends, so that current flows between the anode and cathode and heat is generated. In order to uniformly generate heat throughout the electrode layer (200), a pair of bus bars (300) facing each other with respect to the electrode layer (200) may be formed to be parallel to each other, but is not limited thereto. In one embodiment of the present invention, the bus bars (300) may form a straight line, and the electrode layer (200) may have a rectangular shape, but is not limited thereto, and may have a suitable shape depending on the shape of the transportation means, device, or building to which the substrate (10) is applied.
[0119]
[0120] The thickness of the electrode layer (200) may be 0.1 to 1 μm, and preferably 0.3 to 0.8 μm. When the electrode layer (200) satisfies the above thickness, there is an advantage in that the taper of the electrode layer (200) can be appropriately adjusted, and accordingly, the defect rate in the heating substrate manufacturing process can be reduced, and the ESD (electrostatic discharge) durability can be improved, thereby increasing the reliability of the product, which is preferable.
[0121] The taper of the electrode layer (200) may be a forward taper, and preferably may have an angle of 20 to 50°. As the thickness of the electrode layer (200) increases, the taper angle may deviate from the appropriate range, and if a reverse taper or a sharp taper is formed, there may be problems such as an unintentional short circuit in the electrical connection between the upper and lower layers, or the formation of microbubbles between each layer during the lamination process.
[0122] The above bus bar (300) provides a path through which current (or electrons) supplied from an external power source (40) moves. In one embodiment of the present invention, the bus bar (300) is connected to an external power source (40), and the current (or electrons) supplied from the external power source (40) may flow from one end of the electrode layer (200) to the other end through the bus bar (300) and generate heat.
[0123] The above bus bar (300) may include at least one selected from the group consisting of carbon (C), silver (Ag), gold (Au), aluminum (Al), copper (Cu), molybdenum (Mo), nickel (Ni), zinc (Zn), tungsten (W), titanium (Ti), tellurium (Te), and chromium (Cr). The carbon may be, but is not limited to, carbon nanotubes (CNT) or graphene.
[0124]
[0125] The electrode layer (200) and the bus bar (300) may be formed of the same material. By forming the electrode layer (200) and the bus bar (300) of the same material, the occurrence of contact resistance due to contact between two different materials can be prevented. Accordingly, by reducing the current bottleneck phenomenon caused by the occurrence of uneven resistance at the connection between the bus bar (300) and the electrode layer, uniform heat generation performance can be exhibited throughout the electrode layer (200), and there is an advantage in that heat generation time delay and heat loss due to decreased electron mobility between dissimilar metals can be prevented.
[0126]
[0127] In addition, the electrode layer (200) and the bus bar (300) may be formed on the same layer. For example, in a conventional heating substrate, an electrode layer is first formed on a substrate, and a bus bar is formed as a separate layer on top of both ends of the formed electrode layer. However, when the electrode layer and the bus bar are formed on different layers and connected in this way, contact resistance may occur between the bus bar and the electrode layer, and the resulting increase in resistance may deteriorate the heating performance. In addition, when the heating substrate is bonded to a cover glass or the like through a heat-sealing or laminating process, an electrical short circuit may occur with the bus bar, which is an upper layer, due to the tapered step of the mesh-shaped electrode layer, and thus, a problem of increased overall resistance may occur.
[0128]
[0129] In addition, the electrode layer (200) and the bus bar (300) may be formed integrally in the same process step. If the electrode layer (200) and the bus bar (300) are formed in different layers in different process steps and then connected, the above-described problem may occur. In addition, if the electrode layer (200) and the bus bar (300) are formed in different process steps and then connected in the same layer, a problem may occur in which a local overheating phenomenon or uneven heat generation performance occurs due to uneven contact area or poor contact. In addition, as described above, if the bus bar and the electrode layer are formed in separate layers and then connected, the resistance may increase due to an increase in contact resistance and an electrical short circuit between the upper and lower layers.
[0130]
[0131] The thickness of the above bus bar (300) is the same as the thickness of the electrode layer (200), and may be 0.1 to 1 μm, and preferably 0.3 to 0.8 μm. When the bus bar (300) satisfies the above thickness, there is an advantage in that the taper can be appropriately adjusted, and accordingly, the defect rate in the heating substrate manufacturing process can be reduced, and the ESD (electrostatic discharge) durability can be improved, thereby increasing the reliability of the product, which is preferable.
[0132]
[0133] The width of the busbars (300) may be independently 50 mm or less, but is not limited thereto, and may be appropriately adjusted depending on the form of the means of transportation, device, or building to which the heating substrate (10) is applied. For example, when the diagonal width of the heating substrate (10) is 20 inches or less, the width of the busbars (300) may be independently 1 mm to 6 mm, and when the diagonal width of the heating substrate (10) is 20 inches or more, the width of the busbars (300) may be independently 2 mm to 50 mm. When the width of the busbars (300) satisfies the above range, there is an advantage in that current (electrons) can be stably supplied to the electrode layer (200) without a problem of visibility. When the width of the busbars (300) exceeds the above range, the area through which current flows increases, which may reduce the surface resistance, but there is a problem in that the visibility of the busbars increases, making it difficult to apply to actual products.
[0134]
[0135] The above electrode layer (200) and bus bar (300) can be formed by a method known in the art, for example, screen printing, photolithography, electroplating, or metal bonding, but are not limited thereto.
[0136] The bus bar (300) of the present invention may include, as illustrated in FIG. 6, a first bus bar (300-1) connected to both ends of the electrode layer (200); and a second bus bar (300-2) formed on the first bus bar (300-1).
[0137] The description of the above-described bus bar (300) can be applied equally to the first bus bar (300-1).
[0138] In the case where the above bus bar (300) is multi-layered, the second bus bar (300-2) is connected to an external power source (40), and current (or electrons) supplied from the external power source (40) may sequentially flow from one end of the electrode layer (200) to the other end through the second bus bar (300-2) and the first bus bar (300-1) and generate heat.
[0139] The first bus bar (300-1) and the second bus bar (300-2) may each independently include at least one selected from the group consisting of carbon (C), silver (Ag), gold (Au), aluminum (Al), copper (Cu), molybdenum (Mo), nickel (Ni), zinc (Zn), tungsten (W), titanium (Ti), tellurium (Te), and chromium (Cr). The carbon may be, but is not limited to, carbon nanotubes (CNT) or graphene.
[0140] The second bus bar (300-2) may be formed using a conductive paste. The conductive paste may include at least one selected from the group consisting of carbon (C), silver (Ag), gold (Au), aluminum (Al), copper (Cu), molybdenum (Mo), nickel (Ni), zinc (Zn), tungsten (W), titanium (Ti), tellurium (Te), and chromium (Cr). In terms of implementing low surface resistance, it is preferable to include silver (Ag) or gold (Au), and it is most preferable to include silver (Ag).
[0141]
[0142] In addition, the electrode layer (200) and the second bus bar (300-2) may not be in physical contact with each other. As shown in FIG. 6, the electrode layer (200) and the first bus bar (300-1) are formed on the same layer on the substrate (100) and are in physical contact with each other, and the second bus bar (300-2) is formed on the first bus bar (300-1) and is in physical contact with the first bus bar (300-1). However, the electrode layer (200) and the second bus bar (300-2) are not in physical contact with each other.
[0143] As described above, the second bus bar (300-2) is formed in a double layer on the first bus bar (300-1), and the second bus bar (300-2) exhibits a resistance similar to or lower than that of the first bus bar (300-1), thereby forming a parallel resistance, thereby assisting the smooth flow of current (electrons) applied from an external power source, thereby reducing the resistance of the current flowing throughout the bus bar. By reducing the resistance of the entire bus bar in this way, local overheating due to current bottlenecks in some sections can be prevented, and equipotential can be maintained throughout the electrode layer (200) connected to the first bus bar (300-1). However, when the electrode layer (200) and the second bus bar (300-2) are in physical contact with each other, a problem may occur in which the electrical connection with the second bus bar (300-2) is short-circuited due to the tapered step of the electrode layer (200).
[0144] It is preferable that the second bus bar (300-2) does not exceed the width and length of the first bus bar (300-1), and in order to minimize resistance, it is more preferable that the second bus bar (300-2) has the same width and length as the first bus bar (300-1).
[0145]
[0146] The second bus bar (300-2) may have a surface resistance similar to or lower than that of the first bus bar (300-1). By forming the second bus bar (300-2) having a surface resistance similar to or lower than that of the first bus bar (300-1) on the first bus bar (300-1), it is possible to prevent local overheating due to a current bottleneck at a connection portion connected to an external power source, and by supplying a stable and uniform current (electron) to the entire first bus bar (300-1), it is possible to exhibit uniform heat generation performance throughout the entire electrode layer (200).
[0147]
[0148] The thickness of the second bus bar (300-2) may be 5 to 100 times greater than the thickness of the first bus bar (300-1), and preferably 10 to 50 times greater. When the second bus bar (300-2) satisfies the above thickness ratio, it is preferable because it is easy to adjust it to exhibit resistance similar to or lower than that of the first bus bar (300-1).
[0149] The thickness of the second bus bar (300-2) may be 3 to 30 μm, and preferably 5 to 25 μm. When the second bus bar (300-2) satisfies the above thickness, it exhibits sufficiently low surface resistance, which has the advantage of preventing local overheating and supplying uniform current.
[0150]
[0151] The ratio (Rs1 / Rs2) of the surface resistance (Rs1) of the first bus bar (300-1) to the surface resistance (Rs2) of the second bus bar (300-2) may be 0.1 to 5, preferably 0.2 to 3, and more preferably 0.4 to 1.7. When the above-mentioned ratio of surface resistances is satisfied, uniform heat generation performance can be achieved throughout the entire heat generation substrate by reducing the potential difference between the first and second bus bars, which is preferable.
[0152] The surface resistance of the second bus bar (300-2) may be 0.5Ω / □ or less, preferably 0.1Ω / □ or less, and more preferably 0.01 to 0.1Ω / □.
[0153]
[0154] The heating substrate of the present invention may further include at least one selected from the group consisting of a blackening layer, a separation protective layer, and an overcoating layer.
[0155]
[0156] The heating substrate (10) according to FIG. 7 further includes a blackening layer (500) on one side of the electrode layer (200). The heating substrate (10) according to FIG. 8 further includes a blackening layer (500) on both sides of the electrode layer (200). Thus, the description given for the heating substrate according to FIGS. 1 to 6 can be equally applied to the heating substrate illustrated in FIGS. 7 and 8, and detailed descriptions of substantially identical or similar configurations are omitted.
[0157]
[0158] If the electrode layer (200) includes a material that reflects light in the visible light range, such as metal, problems such as glare may occur due to the electrode layer (200) being visible to the human eye and its high reflectivity to external light.
[0159] Accordingly, the heating substrate (10) of the present invention may further include a blackening layer (500) on one or both sides of the electrode layer (200), thereby reducing the reflectivity of the electrode layer (200) and preventing problems such as visibility and glare. When the bus bar is formed in multiple layers, the first bus bar (300-1) and the second bus bar (300-2) may be formed in parallel with the blackening layer (500) interposed therebetween.
[0160] In this case, the second bus bar (300-2) may be formed at a position corresponding to the upper portion of the first bus bar (300-1) on the blackening layer (500). The first bus bar (300-1) and the second bus bar (300-2) provide a path through which current (or electrons) supplied from an external power source (40) travel. In one embodiment of the present invention, the second bus bar (300-2) may be connected to an external power source (40), and the current (or electrons) supplied from the external power source (40) may sequentially flow from one end of the electrode layer (200) to the other end through the second bus bar (300-2), the blackening layer (500), and the first bus bar (300-1) to generate heat.
[0161] The above blackening layer (500) can be formed of a material that does not hinder the movement of current (electrons) supplied from an external power source from the second bus bar (300-2) to the first bus bar (300-1).
[0162] The above blackening layer (500) can be formed, for example, using a composition for forming a blackening layer. The composition for forming a blackening layer can include at least one selected from the group consisting of manganese (Mn), cobalt (Co), nickel (Ni), iron (Fe), copper (Cu), titanium (Ti), and vanadium (V). More specifically, the blackening layer can be formed by including an oxide containing the metal. Examples of the oxide containing the metal include Al2O3, Fe2O3, TiO2, MnO3, Cr2O3, Cu2O, CuO, Cu2O3, ZnO, NiO, etc.
[0163] As described above, by forming a blackening layer (500) on the electrode layer (200), the problem of contact resistance occurring due to oxidation of the surface of the electrode layer (200) can be improved, thereby improving the reliability of the electrode.
[0164] The above blackening layer (500) may be formed, for example, using a composition for forming a blackening layer, deposited through a deposition process such as sputtering, or formed by electrolytic plating, but is not limited thereto.
[0165] When the heating substrate (10) of the present invention includes a blackening layer (500), the blackening layer (500) may have a thickness of 0.01 to 1 ㎛ in order to prevent problems such as visibility and glare of the electrode layer while not reducing the heating performance.
[0166]
[0167] The heating substrate (10) according to FIG. 9 further includes a separation protective layer (600) between the substrate (100) and the electrode layer (200). Accordingly, the description described for the heating substrate according to FIGS. 1 to 4 can be equally applied to the heating substrate illustrated in FIG. 7, and detailed descriptions of substantially identical or similar configurations are omitted.
[0168]
[0169] The heating substrate (10) of the present invention may further include a separation protective layer (600) therebetween to improve the adhesive strength between the substrate (100) and the electrode layer (200). The separation protective layer (600) may be formed using an adhesive, and it is preferable that it have appropriate adhesive strength to prevent peeling, bubbles, etc. from occurring when handling the heating substrate (10), while also having transparency and thermal stability.
[0170] The above adhesive may be any adhesive used in the present field without limitation, and for example, a photocurable adhesive may be used. The photocurable adhesive exhibits strong adhesive strength by being crosslinked and cured by receiving active energy rays such as ultraviolet (UV) rays and electron beams (EB), and may include polyester resins, polyether resins, polyurethane resins, epoxy resins, polyacrylic resins, and silicone resins.
[0171] When the heating substrate (10) of the present invention includes a separation protection layer (600), the separation protection layer (600) may have a thickness of 0.1 to 10 µm, preferably 1 to 5 µm, in order to secure sufficient adhesive strength and minimize its thickness.
[0172]
[0173] The heating substrate (10) according to FIGS. 10 and 11 further includes an overcoating layer (700) at the uppermost portion. Accordingly, the description described for the heating substrate according to FIGS. 1 to 9 can be equally applied to the heating substrate illustrated in FIGS. 10 and 11, and detailed descriptions of substantially identical or similar configurations are omitted.
[0174]
[0175] The heating substrate (10) of the present invention may include an overcoating layer (700) at the uppermost part of the heating substrate (10) to prevent damage to the electrode layer (200) and further improve mechanical durability.
[0176] The above overcoating layer (700) may include at least one selected from the group consisting of polyacrylic resin, polyurethane resin, polyolefin resin, polyester resin, epoxy resin, melamine resin, polyamide resin, polycarbonate resin, cellulose resin, and combinations thereof.
[0177] When the heating substrate (10) of the present invention includes an overcoating layer (700), the overcoating layer (700) may have a thickness of 0.1 to 10 µm, preferably 1 to 5 µm, in order to secure sufficient mechanical durability while preventing cracks due to bending, etc.
[0178]
[0179] Figures 12 and 13 are plan views of a heating substrate (10) according to some embodiments of the present invention connected to an external power source (40).
[0180]
[0181] As described above, the external power source (40) can be electrically connected to the second bus bar (300-2). The power applied from the external power source (40) to the second bus bar (300-2) is applied to the electrode layer (200) via the first bus bar (300-1), and the electrode layer (200) is heated through the flow of current (electrons) resulting therefrom.
[0182]
[0183] As shown in Fig. 12, the external power source (40) may be connected to both ends of the bus bar (300). When the heating substrate (10) of the present invention is applied to a means of transportation or a device, by connecting the external power source (40) to the ends of the bus bar (300), the wiring from the external power source (40) to the bus bar (300) can be connected at the shortest distance, thereby increasing design efficiency.
[0184] Meanwhile, the heating substrate (10) according to the present invention can reduce the longest path for current to travel as described above even when the external power source (40) is connected to the end of the bus bar (300), thereby reducing the potential difference across the entire electrode layer (200), and thus exhibiting uniform heating performance.
[0185]
[0186] As shown in Fig. 13, the external power source (40) may be connected to the center of both sides of the bus bar (300). When the external power source (40) is connected to the center of the bus bar (300), the longest path along which current (electrons) travels can be shortened compared to when the external power source (40) is connected to the end of the bus bar (300), and accordingly, it is easy to exhibit an equipotential across the entire electrode layer (200), so there is an advantage in that more uniform heat generation performance can be exhibited.
[0187]
[0188] <Face heating element>
[0189] Fig. 14 is a cross-sectional view of a surface heating element according to the present invention.
[0190] Referring to FIG. 14, the surface heating element of the present invention may include the substrate (10), the external member adhesive layer (20), and the external member (30) of the present invention.
[0191] The above external member adhesive layer (20) is for bonding the substrate (10) and the external member (30), and may be formed using EVB (Ethyl vinyl benzene), PVA, EVA, PU, etc.
[0192] The above external member (30) may be a glass or plastic substrate, and the contents of the aforementioned substrate (100) may be equally applied. The external member (30) is a target where fog or frost is generated, and when the substrate (10) of the present invention is applied, fog or frost formed inside and outside the external member (30) can be removed in a short period of time.
[0193] The surface heating element of the present invention can be applied to various fields such as, but not limited to, the construction industry such as building windows; transportation means such as vehicles, railways or aviation; helmets; and smart glasses.
[0194]
[0195] In addition, the substrate of the present invention can be applied to sensors such as touch sensors, fingerprint sensors, pressure sensors, automotive camera sensors, radar sensors, and devices requiring transparency such as transparent antennas, in addition to the surface heating element described above.
[0196]
[0197] Hereinafter, the present invention will be described in more detail through examples. However, the following examples are intended to further illustrate the present invention, and the scope of the present invention is not limited by the following examples.
[0198]
[0199] Examples and Comparative Examples: Manufacturing of Heating Substrates
[0200] A 6000Å thick copper layer (Cu) was formed on a 150 X 150mm glass substrate (0.5T Soda lime Eagle XG Glass, Corning) through vapor deposition, and the electrode layer and bus bars at both ends of the electrode layer were formed as one piece.
[0201] After patterning an etching resist material through a photolithography process on a copper layer (Cu) corresponding to the electrode layer, an electrode layer having a wavy pattern was formed through an etching process. The electrode layer was formed by patterning so that the first width (W1), the second width (W2) of the unit pattern of the electrode layer, the ratio of the first width (W1) to the second width (W2) (W1 / W2), the distance difference (ΔSp) in the first direction with respect to the two closest starting points of two rows, the distance (P) between imaginary lines passing through the starting points of each unit pattern in the first direction, and the line width had the values shown in Table 1 below.
[0202] Example 8 formed an electrode layer including a first pattern and a third pattern as unit patterns, and the third width (W3) and the fourth width (W4) of the third pattern were formed to be the same as the first width (W1) and the second width (W2) of the first pattern, respectively, and the ratio (W3 / W4) of the third width (W3) to the fourth width (W4) is shown together in Table 1 below.
[0203] (㎛)W1W2W1 / W2W3 / W4ΔSpP line width Example 1886.027216.5064.09-216.5072504.5 Example 2886.027216.5064.09-433.0142504.2 Example 3886.027216.5064.09-433.0142212.95 Example 4886.0273092.87-433.0142504.6 Example 5886.027245.5053.61-433.0142504.5 Example 6886.027242.4983.65-433.0142504.7Example 7433.014216.5062.00-216.5072504.8Example 85002502.002.00--3.8Example 92001002-501104Example 10350035010-500033010Example 11 2000027007.41-301502Example 12100502-25553.8Example 131000011009.09-12000100010Comparative Example 1886.027216.5064.09-02504.6Comparative Example 21732.056216.5068.00-02504.3Comparative Example 3Random MeshRandom Mesh--- -4.3Comparative Example 4866.027216.5064.09-0 707.14.5Comparative Example 5433.014216.5062.00-02503.8
[0204]
[0205] Experimental example
[0206] 1. Surface resistance measurement
[0207] For the electrode layers of the heating substrates of the examples and comparative examples, the surface resistance was measured using RESISTAGE RG-80 (analysis stage probing) and RESISTEST RT-80 (analyzer) from NAPSON CORPORATION, and the results are shown in Table 2 below.
[0208]
[0209] 2. Transmittance and haze measurement
[0210] For the heating substrates of the examples and comparative examples, the total light transmittance (Tt) and haze were measured using a haze meter HM-150N (Murakami), and the results are shown in Table 2 below.
[0211]
[0212] 3. Visibility Evaluation
[0213] After fixing the heating substrate of the examples and comparative examples to the evaluation stand, an LED light source (Galaxy S22 flash LED) was installed in front of the sample at a distance of 15 cm to reflect light, and then the pattern visibility and starburst visibility were evaluated with the naked eye at a distance of 30 cm from the front of the sample according to the evaluation criteria below, and the results are shown in Table 2 and Figures 15 and 16 below.
[0214] < Visibility Evaluation Criteria >
[0215] ◎: Patterns and starbursts are not recognized
[0216] ○: Pattern or starburst weakly recognized
[0217] ×: Pattern or starburst is recognized
[0218] Surface resistance (Ω / □), transmittance (%), haze (%), visibility, examples 14.890.40.5○Embodiment 24.290.60.6◎Embodiment 34.190.30.7◎Embodiment 44.790.10.8○Embodiment 54.590.20.8○Embodiment 64.690.150.8◎Embodiment 75.589.90.9◎Embodiment 87.6901◎Embodiment 91.6187.11.2○Embodiment 109.47880.3○Embodiment 112.187.50.5○Embodiment 120.986.21.9○Embodiment 131089.10.2○Comparative Example 14.990.40.7×Comparative Example 2487.70.6×Comparative Example 33.4881.2×Comparative Example 412.72891.3×Comparative example 56.9900.9×
[0219]
[0220] With respect to the surface resistance, transmittance and haze values of Table 2 above, the preferred result values in the present invention are as follows.
[0221] Surface resistance (electrode layer): 0.5 to 10 Ω / □ (more preferably, 0.5 to 5 Ω / □)
[0222] Transmittance: The higher the better, over 85%
[0223] Haze: ~1.5
[0224]
[0225] Referring to Table 2 and FIG. 15, it can be confirmed that the substrates including the electrode patterns of the present invention of Examples 1 to 13 have a surface resistance sufficient to allow the current of the supplied power to flow without a problem, have appropriate transmittance and haze, and have excellent visibility as the starburst phenomenon does not occur and the pattern is not visible or, even if visible, is only very slight enough to not be obstructed. In addition, the substrate including the electrode pattern of Example 8 did not cause the starburst phenomenon and had excellent visibility.
[0226] In this regard, referring to Table 2 and FIG. 16, it can be confirmed that the substrates including the electrode patterns of Comparative Examples 1 to 5 have not only reduced visibility due to the recognition of the electrode pattern of Cu metal, but also a starburst phenomenon occurs.
[0227]
[0228] A substrate including a pattern according to one embodiment of the present invention has excellent visibility by suppressing a phenomenon in which a pattern is visible and a starburst phenomenon that may occur when including an electrode pattern, and can be applied to sensors such as a touch sensor, a fingerprint sensor, a pressure sensor, a camera sensor for an automobile, a radar sensor, devices requiring transparency such as a transparent antenna, and a surface heating element.
Claims
1. Description; and Including an electrode layer formed on the above substrate, The above electrode layer includes multiple wavy patterns in which unit patterns are repeated, The above wavy pattern is a first pattern in which a unit pattern is repeated in a first direction; and A second pattern in which a unit pattern is repeated in a direction parallel to the first pattern, A substrate, wherein the first pattern and the second pattern are characterized in that the starting points of each unit pattern are not identical with respect to the first direction.
2. In claim 1, The above first pattern and the second pattern are substrates in which the distance difference (ΔSp) of the starting point of each unit pattern relative to the first direction is greater than 0.
3. In claim 1, The above first pattern and the second pattern are a substrate in which the distance (P) between virtual lines passing through the starting point of each unit pattern in the first direction is 30 to 2500 μm.
4. In claim 1, A substrate wherein the first pattern and the second pattern are alternately repeated, or the first pattern is repeated in multiple rows and then the second pattern is repeated in multiple rows.
5. In claim 1, The substrate of the first pattern and the second pattern, wherein each unit pattern has a width in a first direction (first width, W1) of 120 to 40,000 μm and a width in a second direction perpendicular to the first direction (second width, W2) of 60 to 5,000 μm.
6. In claim 5, A substrate, wherein the ratio (W1 / W2) of the first width (W1) to the second width (W2) is 0.5 to 10.
7. In claim 1, A substrate, wherein the first pattern and the second pattern are characterized in that the width of each unit pattern in the first direction (first width, W1) and the width in the second direction perpendicular to the first direction (second width, W2) are each equal to each other.
8. In claim 7, A substrate, characterized in that the first pattern and the second pattern do not touch or intersect.
9. In claim 1, A substrate, wherein the first pattern and the second pattern are characterized in that the width of each unit pattern in the first direction (first width, W1) and the width in the second direction perpendicular to the first direction (second width, W2) are not equal to each other.
10. In claim 9, A substrate, characterized in that the first pattern and the second pattern are in contact or intersect.
11. In claim 1, The above wavy pattern is a substrate having a line width of 0.3 ㎛ to 30 ㎛.
12. Description; and Including an electrode layer formed on the above substrate, The above electrode layer includes multiple wavy patterns in which unit patterns are repeated, The above wavy pattern is a first pattern in which a unit pattern is repeated in a first direction; and A third pattern in which the unit pattern is repeated in a direction other than parallel to the first direction is included, A substrate including a plurality of geometric shapes formed by intersecting the first pattern and the third pattern.
13. In claim 12, The above-mentioned different direction is the direction in which the third pattern progresses, and the substrate is such that the angle between the tangents of each pattern at the point where the first pattern and the third pattern intersect is greater than 0° and less than or equal to 90°.
14. In claim 12, The substrate of the first pattern and the third pattern, wherein each unit pattern has a width in a first direction (first width, W1) and a width in a third direction (third width, W3) of the third pattern of 120 to 40,000 µm, and a width in a second direction perpendicular to the first direction (second width, W2) and a width in a fourth direction perpendicular to the third direction (fourth width, W4) of 60 to 5,000 µm.
15. In claim 14, A substrate, wherein the ratio of the first width (W1) to the second width (W2) (W1 / W2) and the ratio of the third width (W3) to the fourth width (W4) (W3 / W4) are 0.5 to 10.
16. In claim 12, The above wavy pattern is a substrate having a line width of 0.3 ㎛ to 30 ㎛.
17. In claim 1 or 12, A substrate, characterized in that the substrate includes a bus bar connected to the electrode layer.
18. In claim 17, A substrate wherein the electrode layer and bus bar are formed of the same material.
19. In claim 17, A substrate wherein the electrode layer and bus bar are formed on the same layer.
20. In claim 17, A substrate wherein the electrode layer and bus bar are formed integrally in the same process step.
21. In claim 17, A substrate wherein the electrode layer and bus bar have a thickness of 0.1 to 1 μm.
22. In claim 17, The above bus bar is a first bus bar connected to both ends of the electrode layer; and A substrate comprising a second bus bar formed on the first bus bar.
23. In claim 1 or 12, A substrate, wherein the substrate further comprises at least one selected from the group consisting of a blackening layer, a separation protective layer, and an overcoating layer.
24. A planar heating element comprising the substrate of claim 1 or 12.
25. A sensor comprising the substrate of claim 1 or 12.
26. A transparent antenna comprising the substrate of claim 1 or 12.
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