Elastic hinge block and pressing device comprising same

Abstract

Provided are an elastic hinge block and a pressing device comprising same, the elastic hinge block extending in one direction, being deformed by means of external force, and comprising a translational joint part and an upper spherical joint part. The translational joint part includes at least one elastic hinge part, and thus is compressed in the extension direction by means of the external force. The upper spherical joint part is positioned at the top of the translational joint part, and includes at least one upper hinge part, and thus rotates with respect to the extension direction by means of the external force. The upper spherical joint part and the translational joint part are integrated.

Description

Elastic hinge block and pressurizing device including the same

[0001] The present invention relates to an elastic hinge block and a pressurizing device including the same, and more particularly, to an elastic hinge block and a pressurizing device including the same, which perform elastic deformation or rotational deformation according to pressure applied from the outside and implement an elastic hinge mechanism, and are capable of effectively absorbing vibration even on an uneven surface.

[0002] In the case of conventionally developed elastic hinge blocks, a mechanism for absorbing or responding to external force is implemented by deforming within a predetermined range in response to external force through a block structure having a predetermined shape.

[0003] For example, international application WO2017-092000 discloses a technology for an elastic fixed rod that forms a structure by forming a 'U'-shaped block with a groove formed inside, thereby performing elastic deformation within a predetermined range to absorb external force or adapt to various deformation states.

[0004] In addition, Japanese Patent Publication No. 2021-534995 discloses a technology for an elastic joint having a structure in which a predetermined groove is formed inside to respond to external force or vibration.

[0005] Furthermore, Republic of Korea Patent No. 10-0514991 discloses a structure including an elastic hinge structure that absorbs or responds to vibration in a vibration cutting device.

[0006] As described above, hinge structures that absorb vibrations or external forces in various structures are being developed, but their scope of application is very limited as they are designed to be applied only to specific structures or environments.

[0007] In particular, when pressurization is performed through a pressurizing plate in a pressurizing process of a sintering bonder or an imprint process, a structure that allows tilting of the pressurizing plate is required in order to uniformly pressurize multiple target chips, but the related technology has not yet been developed.

[0008] Furthermore, the need for a hinge structure capable of effectively absorbing vibration or external force even when the surface of the structure is uneven is increasing.

[0009] Related prior art documents include International Application No. WO2017-092000, Japanese Patent Publication No. 2021-534995, and Korean Patent Registration No. 10-0514991.

[0010] Accordingly, the technical problem of the present invention is conceived from this point, and the purpose of the present invention is to provide an elastic hinge block that performs elastic deformation or rotational deformation according to pressure applied from the outside, implements an elastic hinge mechanism, effectively absorbs external force within a certain range, and effectively returns to its original state when the external force disappears, and is capable of effectively absorbing vibration even on an uneven surface.

[0011] In addition, another object of the present invention is to provide a pressurizing device including the elastic hinge block.

[0012] In order to achieve the above object of the present invention, an elastic hinge block according to one embodiment extends in one direction and is deformed by an external force, and includes a translational joint portion and an upper spherical joint portion. The translational joint portion includes at least one elastic hinge portion and is compressed in the extension direction by the external force. The upper spherical joint portion is located above the translational joint portion and includes at least one upper hinge portion and rotates with respect to the extension direction by the external force. The upper spherical joint portion and the translational joint portion are formed integrally.

[0013] In one embodiment, the elastic hinge portion may include at least one opening formed through the translational joint portion, and an extension extending from an outer surface of the elastic hinge portion toward the opening.

[0014] In one embodiment, the openings may be formed in a plurality of pieces spaced apart at regular intervals along the extension direction of the translational joint portion.

[0015] In one embodiment, the opening may include a first opening formed through the first and third faces of the translational joint portion, which face each other, and a second opening formed through the second and fourth faces of the translational joint portion, which face each other.

[0016] In one embodiment, the upper spherical joint portion includes at least one upper opening formed through the upper spherical joint portion, wherein the upper opening may include a curved surface or have a circular, elliptical, or capsule-shaped cross-sectional shape.

[0017] In one embodiment, the upper spherical joint portion further includes an upper extension portion extending straightly from an outer surface of the upper spherical joint portion toward the upper opening, and an upper inclined portion extending from an end of the upper extension portion toward the upper opening, wherein an extension direction of the upper inclined portion can be changed from an extension direction of the upper extension portion.

[0018] In one embodiment, the upper opening may include a first upper opening formed through the first and third faces facing each other of the upper spherical joint portion, and a second upper opening formed through the second and fourth faces facing each other of the upper spherical joint portion.

[0019] In one embodiment, the lower spherical joint portion is positioned at the lower portion of the translational joint portion and includes at least one lower hinge portion, and rotates with respect to the extension direction by the external force, and the lower spherical joint portion can be formed integrally with the upper spherical joint portion and the translational joint portion.

[0020] In one embodiment, the lower spherical joint portion may be formed with the same shape as the upper spherical joint portion.

[0021] According to another embodiment of the present invention for realizing the above-described object, an elastic hinge block extends in one direction, is deformed by an external force, and includes a translational joint portion and a spherical joint portion. The translational joint portion includes at least two elastic hinge portions and is compressed in the extension direction by the external force. The spherical joint portion is formed integrally with the translational joint portion at an upper or lower portion of the translational joint portion, and includes at least two spherical hinge portions and rotates with respect to the extension direction by the external force.

[0022] In one embodiment, the translational joint portion may include first and second elastic hinge portions, each having the same shape and arranged adjacent to each other in a horizontal direction perpendicular to the extension direction.

[0023] In one embodiment, each of the first and second elastic hinge portions may include at least one elastic opening formed through the translational joint portion, an elastic extension extending from an outer surface of the translational joint portion toward the elastic opening, and an elastic connection extending between adjacent elastic hinge portions.

[0024] In one embodiment, the spherical joint portion may include first to fourth spherical hinge portions, each having the same shape and arranged adjacent to each other in a horizontal direction perpendicular to the extension direction.

[0025] In one embodiment, the first and second spherical hinge portions may be formed to penetrate a pair of mutually facing surfaces of the spherical joint portion, and the third and fourth spherical hinge portions may be formed on another pair of mutually facing surfaces of the spherical joint portion.

[0026] In one embodiment, each of the first to fourth spherical hinge portions may include at least one spherical opening and a spherical extension extending from an outer surface of the spherical joint portion toward the spherical opening.

[0027] In one embodiment, the spherical opening may extend from the spherical extension portion to have a variable width, and each of the first to fourth spherical hinge portions may further include a spherical end portion extending from an end of the spherical opening with a predetermined length and the same width.

[0028] In one embodiment, the spherical opening may include a curved surface or have a circular, elliptical, capsular or linear cross-sectional shape.

[0029] In one embodiment, the spherical joint portion may be formed integrally with at least two overlapping portions along the extension direction.

[0030] According to one embodiment of the present invention, a pressurizing device for realizing another object of the present invention includes a pressurizing plate for bonding a die on a substrate and applying an external force, and an elastic hinge block connected to a lower surface of the pressurizing plate for pressing the die.

[0031] In one embodiment, the elastic hinge block is aligned with the die in a direction that presses the die, and when a plurality of dies are positioned on the substrate, each of the plurality of elastic hinge blocks can be aligned one-to-one with the dies.

[0032] According to embodiments of the present invention, when an external force is applied, the elastic hinge block including a translational joint portion and a spherical joint portion is compressed or rotated, thereby allowing the shape or posture to be changed within a predetermined range depending on the magnitude or direction of various external forces.

[0033] Through this, when the elastic hinge block is provided on the press plate of the press device, it can effectively respond to changes in the posture of the press plate during the press process or imprint process of the sintering bonder, thereby performing uniform pressurization on multiple objects.

[0034] In particular, in the case of the elastic hinge block, since a spherical joint portion is formed on the upper or lower portion of the translational joint portion, the translational joint portion is compressively deformed as a translational joint, and the spherical joint portion is rotationally deformed as a universal joint, thereby enabling effective deformation response to various sizes or directions of external forces.

[0035] At this time, the translational joint part and the spherical joint part are both arranged with at least two or more dual structures in parallel, thereby enabling the elastic hinge block to change its posture to match the shape of the surface it comes into contact with, thereby achieving higher contactability and structural stability.

[0036] This is advantageous in that, when the elastic hinge block is applied to a pressurizing device, the posture can be changed to effectively respond to the minute curves formed on the surface of the substrate located on the lower surface of the elastic hinge block, thereby performing uniform pressurization.

[0037] Furthermore, in the case of the elastic hinge block, in the case of a square block, both the elastic hinge portion as well as the upper and lower hinge portions are formed to penetrate the faces facing each other, so that the entire square block is manufactured to have a symmetrical structure, so that the same deformation can be implemented in all directions without distortion with respect to the direction of the external force.

[0038] In addition, in the case of the elastic hinge portion and the upper and lower hinge portions, the ease of processing of the hinge portions can be improved by including an extension portion extending from the outer surface of the elastic hinge portion, thereby improving the convenience of manufacturing. Of course, if the upper and lower hinge portions are formed without an extension portion, similarly easy manufacturing can be possible through processing such as drilling.

[0039] In particular, in the case of the upper and lower hinge parts, rotational deformation in response to an external force can be freely possible through a structure in which the shape of the hinge part includes a curved shape or extends from the extension part to the hinge part through a sloped part.

[0040] FIG. 1 is a perspective view illustrating an elastic hinge block according to one embodiment of the present invention.

[0041] Figures 2a and 2b are front views showing the first and second surfaces of the elastic hinge block of Figure 1, respectively.

[0042] Figure 3 is a schematic diagram illustrating a kinematic model for explaining the elastic hinge block of Figure 1.

[0043] Fig. 4 is an image illustrating the deformation state of the elastic hinge block of Fig. 1 when an external force is applied.

[0044] FIGS. 5A and 5B are front views illustrating elastic hinge blocks according to other embodiments of the present invention.

[0045] Figure 6 is a perspective view showing an elastic hinge block according to another embodiment of the present invention.

[0046] Fig. 7a is a perspective view showing an example of a pressure plate equipped with the elastic hinge block of Fig. 1, and Fig. 7b is a perspective view showing another example of a pressure plate equipped with the elastic hinge block of Fig. 1.

[0047] Fig. 8 is a cross-sectional view illustrating a pressurizing device including the pressurizing plate of Fig. 7a.

[0048] Fig. 9 is a perspective view showing an elastic hinge block according to another embodiment of the present invention.

[0049] Figures 10a and 10b are front and side views illustrating the elastic hinge block of Figure 9.

[0050] Fig. 11 is a schematic diagram illustrating a kinematic model for explaining the elastic hinge block of Fig. 9.

[0051] Fig. 12 is an image illustrating the deformation state of the elastic hinge block of Fig. 9 when an external force is applied.

[0052] Fig. 13 is a perspective view showing an elastic hinge block according to another embodiment of the present invention.

[0053] Figures 14a to 14c are front views illustrating elastic hinge blocks according to further embodiments of the present invention.

[0054] <Explanation of symbols>

[0055] 1: Pressurization device

[0056] 10, 11, 12, 15, 16, 17, 18, 19: Elastic hinge blocks

[0057] 20: Cover part 30: Pressing plate

[0058] 42: Adhesive layer 43: Die

[0059] 100, 1100: Translation joint part 110, 1110: First elastic hinge part

[0060] 120, 1120: Second elastic hinge part 200: Upper spherical joint part

[0061] 210, 230, 240, 260: First upper hinge part

[0062] 220: Second upper hinge part 300: Lower spherical joint part

[0063] 310, 330, 340, 350, 360: First lower hinge part

[0064] 320: Second lower hinge part

[0065] 1200, 1205, 1300, 1400, 1500, 1600, 1700: Spherical joint

[0066] 1210, 1310, 1410, 1510: First spherical hinge part

[0067] 1220, 1320, 1420, 1520: Second spherical hinge part

[0068] 1230, 1310, 1410, 1510: Third spherical hinge

[0069] 1320, 1420, 1520: 4th spherical hinge

[0070] 1250: Fifth spherical hinge part 1260: Sixth spherical hinge part

[0071] 1270: 7th spherical hinge

[0072] The present invention is susceptible to various modifications and takes various forms, and thus embodiments are described in detail herein. However, this is not intended to limit the present invention to a specific disclosed form, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention. Similar reference numerals have been used to designate similar components throughout the description of each drawing. While terms such as "first," "second," etc. may be used to describe various components, these components should not be limited by these terms.

[0073] The above terms are used solely to distinguish one component from another. The terms used in this application are used solely to describe specific embodiments and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0074] In this application, it should be understood that terms such as “comprise” or “consist of” are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0075] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and will not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0076] Hereinafter, with reference to the attached drawings, a preferred embodiment of the present invention will be described in more detail.

[0077] Fig. 1 is a perspective view illustrating an elastic hinge block according to one embodiment of the present invention. Figs. 2a and 2b are front views illustrating a first side and a second side of the elastic hinge block of Fig. 1, respectively.

[0078] Referring to FIGS. 1 to 2b, the elastic hinge block (10) according to the present embodiment includes a translational joint portion (100), an upper spherical joint portion (200), and a lower spherical joint portion (300). In this case, although the drawings illustrate that both the upper and lower spherical joint portions (200, 300) are formed, the elastic hinge block (10) may be provided with only one of the upper and lower spherical joint portions (200, 300). However, for the convenience of explanation, the following description will describe an embodiment in which both the upper and lower spherical joint portions (200, 300) are provided as illustrated.

[0079] Furthermore, the elastic hinge block (10) may have an overall square block shape as illustrated. However, it is not limited thereto, and the elastic hinge block (10) may have various polygonal block shapes such as a triangular block or a pentagonal block, and may further have a circular block shape.

[0080] Meanwhile, as described above, if the elastic hinge block (10) has a shape other than a square block, the joint parts (100, 200, 300) described below may be formed on only one side of the polygonal block or on a pair of sides facing each other, or in the case of a circular block, the outer surface may be divided into four parts to form a symmetrical structure like that of the square block described below.

[0081] However, depending on the shape of the block of the elastic hinge block (10), the structure in which the joint parts (100, 200, 300) are formed can be designed and changed within an obvious range based on the structure in which the joint parts (100, 200, 300) are formed in the elastic hinge block (10) described with reference to FIG. 1 described below.

[0082] Hereinafter, the elastic hinge block (10) illustrated in Fig. 1, which extends in one direction in a square block shape, will be described in detail.

[0083] As illustrated, the elastic hinge block (10) has a rectangular block shape that extends in one direction, i.e., the third direction (Z), and the cross-section of the elastic hinge block (10) in the horizontal direction, i.e., the length of one side in the XY plane, is relatively smaller than the length extending along the third direction (Z). Of course, in this case, the extension length of the elastic hinge block (10) and the width of the cross-section in the horizontal direction can be designed to be variously variable, but as illustrated in FIG. 4, in a situation where an external force (F) is applied in the extension length direction (third direction), the elastic hinge block (10) must be formed to be relatively long in the third direction, as illustrated.

[0084] Specifically, the translation joint portion (100) is formed at the center of the elastic hinge block (10), and elastic deformation such as compression in the third direction (Z) is implemented according to an external force (F) in the third direction.

[0085] That is, through the translational joint portion (100), the elastic hinge block (10) is compressed in the third direction (Z) when an external force is applied, and when the external force disappears, the compressed structure is restored to its original state, so that the displacement of the elastic hinge block (10) in the third direction (Z) changes depending on the external force in the third direction (Z).

[0086] The above translation joint part (100) includes a first elastic hinge part (110) formed in a direction penetrating a first surface (101) and a third surface (not shown) facing each other in the second direction (Y) of the elastic hinge block (10), and a second elastic hinge part (120) formed in a direction penetrating a second surface (102) and a fourth surface (not shown) facing each other in the first direction (X) of the elastic hinge block (10).

[0087] As shown, the first elastic hinge portion (110) includes a first elastic opening portion (111) and a first elastic extension portion (112).

[0088] The first elastic opening (111) is formed to penetrate the elastic hinge block (10) from the first surface (101) toward the third surface, and the cross-section may have a plate shape with a relatively thin thickness as illustrated. Furthermore, the first elastic openings (111) may be formed in a form in which a plurality of them are stacked on each other along the third direction (Z) and spaced apart from each other at equal intervals. At this time, the thickness of each of the first elastic openings (111) may be the same, and the thickness of the elastic opening formed at the center may be formed relatively larger.

[0089] As described above, since the first elastic openings (111) are formed in a plurality of layers at regular intervals toward the third direction (Z), when an external force (F) is applied in the third direction (Z), the first elastic openings (111) can undergo a predetermined compressive deformation.

[0090] As shown, the first elastic extension (112) forms a groove that opens from the second surface (102) and extends to the first elastic opening (111), or opens from a fourth surface (not shown) facing the second surface (102) and extends to the first elastic opening (111).

[0091] At this time, the first elastic extension portion (112) may be a groove that is substantially formed during the process of processing the first elastic opening portion (111). That is, when processing the first elastic opening portion (111), a processing method such as EDM may be applied, and for such EDM processing, a processing path for approaching the first elastic opening portion (111) is required. Accordingly, by forming the first elastic extension portion (112), processing of the first elastic opening portion (111) can be performed.

[0092] Of course, as shown, some of the first elastic openings (111) may be formed so as not to be connected to the first elastic extension (112), in which case they may be manufactured through a processing method such as separate drilling.

[0093] In the present embodiment, in order to improve the symmetry of the elastic hinge block (10) as a whole, a first elastic extension (112) extending from the second surface (102) is connected toward the first elastic opening (111) located at the center and having a relatively large thickness, and a first elastic extension (112) extending from the fourth surface is connected toward the first elastic opening (111) located at the upper and lower ends.

[0094] As described above, the first elastic hinge portion (110) has an overall symmetrical structure so as to penetrate the first surface (101) and the third surface, and is formed at the center of the elastic hinge block (10).

[0095] The second elastic hinge portion (120) has substantially the same structure and arrangement as the first elastic hinge portion (110), with the only difference being the position at which it is formed. Therefore, only the position at which it is formed will be described.

[0096] The second elastic hinge part (120) may be positioned above the first elastic hinge part (110) to minimize interference with the first elastic hinge part (110).

[0097] Additionally, the second elastic hinge portion (120) also includes a second elastic opening portion (121) and a second elastic extension portion (122).

[0098] The second elastic openings (121) are formed in multiple numbers to penetrate from the second surface (102) to the fourth surface (not shown) along the first direction (X), and the laminated structure is as described above.

[0099] In addition, in the case of the second elastic extension (122), in order to improve the symmetry of the elastic hinge block (10) as a whole, the second elastic extension (122) extending from the third surface is connected toward the second elastic opening (121) located at the center and having a relatively large thickness, and the second elastic extension (122) extending from the first surface (101) is connected toward the second elastic openings (121) located at the upper and lower ends.

[0100] Thus, the second elastic hinge portion (120) also has an overall symmetrical structure so as to penetrate the second surface (102) and the fourth surface and is formed at the center of the elastic hinge block (10).

[0101] As described above, since the first and second elastic hinge parts (110, 120) are formed to penetrate different surfaces, the elastic hinge block (10) can have an overall uniform structure along the horizontal direction of the square block shape, and thus the degree of compression, i.e., elastic deformation, in the third direction (Z) according to the direction of the external force can be maintained uniformly.

[0102] The upper spherical joint portion (200) is formed on the upper portion of the elastic hinge block (10), i.e., on the upper portion of the translational joint portion (100), and, depending on the external force (F) in the third direction (Z), a deformation such as rotation about the rotational center axis in the first direction (X) or the second direction (Y) is implemented.

[0103] That is, through the upper spherical joint portion (200), the elastic hinge block (10) rotates about the rotational center axis in the first direction (X) or the second direction (Y) when an external force is applied, and when the external force disappears, the rotated structure is restored to its original state, so that the elastic hinge block (10) changes its extension posture in the third direction (Z) depending on the direction of the external force in the third direction (Z).

[0104] The upper spherical joint portion (200) includes a first upper hinge portion (210) formed in a direction penetrating the first surface (201) and the third surface (not shown) facing each other in the second direction (Y) of the elastic hinge block (10), and a second upper hinge portion (220) formed in a direction penetrating the second surface (202) and the fourth surface (not shown) facing each other in the first direction (X) of the elastic hinge block (10).

[0105] At this time, the first upper hinge portion (210) includes a first upper opening portion (211), a first upper inclined portion (212), and a first upper extension portion (213), as shown.

[0106] The first upper opening (211) is formed to penetrate the elastic hinge block (10) from the first surface (201) toward the third surface, and the cross-section may have an elongated circular shape, i.e., a capsule shape, as illustrated. Furthermore, the capsule shape of the first upper opening (211) may be formed so that a pair is spaced apart from each other in a symmetrical structure, as illustrated.

[0107] In addition, the first upper inclined portion (212) is formed to extend downward in an inclined direction from the first upper opening (211), and similarly to penetrate the elastic hinge block (10) from the first surface (201) toward the third surface. At this time, the first upper inclined portion (212) also extends symmetrically from each of the pair of first upper openings (211) toward the outside, that is, toward the outer surface. Accordingly, overall, on the first surface (201), ' It can be formed to have the shape of an ‘inverted V’.

[0108] Furthermore, the first upper extension portion (213) forms a groove that opens from the second surface (202) as shown and extends to the first upper inclined portion (212), or opens from a fourth surface (not shown) facing the second surface (202) and extends to the first upper inclined portion (212).

[0109] At this time, as described above, the groove formed by the first upper extension (213) is a groove required in the process of processing the first upper inclined portion (212) and the first upper opening (211).

[0110] As described above, the first upper hinge portion (210) as a whole has a capsule-shaped shape in the center and a first upper opening (211) formed as a relatively wide space, and a first upper inclined portion (212) extending in an inclined direction therefrom, thereby forming a structure capable of rotating at a predetermined angle with the second direction (Y) as the rotational center axis, according to the application of a so-called external force.

[0111] In particular, since the first upper hinge portion (210) has a structure that is symmetrical to each other as described above, it can rotate in both a clockwise and counterclockwise direction with the second direction (Y) as the rotation center axis depending on the direction in which the external force (F) is applied.

[0112] Through this, rotational deformation of the elastic hinge block (10) can be implemented.

[0113] The second upper hinge portion (220) has substantially the same structure and arrangement as the first upper hinge portion (210), with the only difference being the position at which it is formed. Therefore, only the formation position will be described.

[0114] The second upper hinge portion (220) may be positioned above the first upper hinge portion (210) to minimize interference with the first upper hinge portion (210).

[0115] Additionally, the second upper hinge portion (220) also includes a second upper opening portion (221), a second upper inclined portion (222), and a second upper extension portion (223).

[0116] The second upper opening (221) is formed in pairs to penetrate from the second surface (202) to the fourth surface (not shown) along the first direction (X), and its shape is the same as that of the first upper opening (211) described above.

[0117] However, in the case of the second upper inclined portion (222), in order to improve the symmetry of the elastic hinge block (10) as a whole and to improve space utilization, it extends in an inclined direction upward from the second upper opening (221). Accordingly, the second upper inclined portion (222) as a whole is formed to have a 'V' shape on the second surface (202).

[0118] In addition, the second upper extension portion (223) is formed from the first surface (201) and the third surface, respectively, toward the second upper inclined portion (222).

[0119] As described above, the second upper hinge portion (220) as a whole has a second upper opening (221) formed as a relatively wide space with a capsule shape in the center, and a second upper inclined portion (222) extending in an inclined direction therefrom, thereby forming a structure capable of rotating at a predetermined angle with the first direction (X) as the rotational center axis, according to the application of a so-called external force.

[0120] At this time, since the second upper hinge part (220) also has a structure that is symmetrical to each other as described above, it can rotate in both the clockwise and counterclockwise directions with the first direction (X) as the rotation center axis depending on the direction in which the external force (F) is applied.

[0121] Through this, the rotational deformation of the elastic hinge block (10) can be implemented. In particular, if it is deformed together with the first upper hinge portion (210) described above, in addition to the rotational deformation with only the first direction (X) and the second direction (Y) as the rotational axes, the rotational deformation with any direction between the first and second directions (X, Y) as the rotational axis is implemented, so that the elastic hinge block (10) can implement a rotational deformation in any direction in response to an external force.

[0122] The lower spherical joint part (300) has the same structure as the upper spherical joint part (200), except that it is formed symmetrically with the upper spherical joint part (200) at the lower part centered on the translational joint part (100).

[0123] That is, the first and second lower hinge parts (310, 320) of the lower spherical joint part (300) have the same structure and shape as the first and second upper hinge parts (210, 220), except that they are symmetrical. Therefore, a description of the overlapping detailed structure is omitted.

[0124] Furthermore, through the first and second lower hinge parts (310, 320), the elastic hinge block (10) can implement a rotational deformation with an arbitrary direction between the first and second directions (X, Y) as the rotation axis in response to an external force.

[0125] In particular, since the first and second lower hinge parts (310, 320) are arranged at the lower part of the translation joint part (100), it is possible to implement an appropriate rotational deformation corresponding to the external force (F) not only when it is applied to the upper surface (205) but also when it is applied to the lower surface (305, see FIG. 6).

[0126] As described above, compression, i.e., elastic deformation, in response to an external force is implemented through the central translational joint portion (100), and rotational deformation is implemented to respond to an external force applied from the upper as well as the lower portion through the upper spherical joint portion (200) and the lower spherical joint portion (300) located at the upper and lower portions, so that in situations where various external forces are applied, the elastic hinge block can be deformed within a predetermined range to correspond to the size and direction of the external force.

[0127] Fig. 3 is a schematic diagram illustrating a kinematic model for explaining the elastic hinge block of Fig. 1. Fig. 4 is an image illustrating a deformation state of the elastic hinge block of Fig. 1 when an external force is applied.

[0128] First, referring to FIG. 3, in the elastic hinge block (10), the translational joint portion (100) formed in the center functions as a linear elastic body such as a spring, as shown, the upper spherical joint portion (200) located at the top functions as an upper spherical joint, and the lower spherical joint portion (300) located at the bottom functions as a lower spherical joint.

[0129] Thus, the elastic hinge block (10) has a structure in which a translational joint is interposed between a pair of universal joints.

[0130] However, since implementing a universal joint as an elastic hinge can be very complex in structure, in the case of this embodiment, a spherical joint is implemented instead of a universal joint, and through this, the spherical joint is capable of movement in a three-axis rotational direction, but since a force that induces rotation in the axial direction is not applied, a tilt movement in a two-axis direction as described above can be implemented.

[0131] For example, as shown in FIG. 4, when a predetermined force (F) is applied to the upper surface (205) while the lower surface (305) is tilted at a predetermined angle, tilt deformation can be induced through the upper and lower spherical joint parts (200, 300) as shown, and compressive deformation can be induced through the translational joint part (100) as shown.

[0132] FIGS. 5A and 5B are front views illustrating elastic hinge blocks according to other embodiments of the present invention.

[0133] The upper and lower spherical joint parts (200, 300) described above can be formed in various shapes.

[0134] For example, as in FIG. 5a, in the elastic hinge block (11), the first upper hinge portion (230) of the upper spherical joint portion (200) may include a pair of first upper opening portions (231) formed in the center and having a symmetrical circular or capsule shape, and a pair of first upper extension portions (232) extending from the first upper opening portions (231) toward both sides.

[0135] At this time, the first upper extension (232) can extend in a straight direction along the first direction (X) toward the first upper opening (231).

[0136] Likewise, the first lower hinge portion (330) of the lower spherical joint portion (300) may also include a pair of first lower openings (331) formed in the center and having a symmetrical circular or capsule shape, and a pair of first lower extension portions (332) extending from the first lower openings (331) toward both sides.

[0137] At this time, the first lower extension (332) can extend in a straight direction along the first direction (X) toward the first lower opening (331).

[0138] That is, even through a structure like the above, the upper and lower spherical joint parts (200, 300) can implement the so-called tilting deformation.

[0139] Furthermore, in Fig. 5a, only the first surface (101, 201, 301) is illustrated, and as described with reference to Fig. 1, it is obvious that hinge parts having the same structure can be formed on the second surface (102, 202, 302). The formation of hinge parts having the same structure is also the same in the embodiment of Fig. 5b below.

[0140] In addition, as in FIG. 5b, in the elastic hinge block (12), the first upper hinge portion (240) of the upper spherical joint portion (200) may be formed as a pair of extension structures extending from both sides to the center with a predetermined thickness.

[0141] Likewise, the first lower hinge portion (340) of the lower spherical joint portion (300) may also be formed as a pair of extension structures extending from both sides to the center with a predetermined thickness.

[0142] At this time, since the thickness of the first upper and lower hinge parts (240, 340) is formed to be relatively thicker than the thickness of the first elastic opening part (111), the upper and lower spherical joint parts (200, 300) can implement so-called tilting deformation.

[0143] As described above, the structure or shape of the spherical joint portions of the elastic hinge block, in particular, can be varied in various ways, and if formed to have a relatively thick thickness along the third direction (Z), tilting deformation of the elastic hinge block can be induced in response to an external force.

[0144] Figure 6 is a perspective view showing an elastic hinge block according to another embodiment of the present invention.

[0145] The elastic hinge block (10) according to the present embodiment has the same block structure as the elastic hinge block (10) described with reference to FIG. 1, and a cover part (20) is additionally formed at the bottom.

[0146] That is, as shown in Fig. 6, the cover part (20) covers the lower surface (305) of the elastic hinge block (10) so as to cover the lower surface of the elastic hinge block (10).

[0147] At this time, when the elastic hinge block (10) has a square block shape, the cover part (20) includes a bottom surface having a square shape and extends from the bottom surface in the lateral direction by a predetermined length, so that it can have an overall square support shape.

[0148] At this time, the cover part (20) may include a material that is heat resistant and has elasticity and viscosity at the same time, so that the lower surface of the elastic hinge block (10) can be stably fixed by the cover part (20).

[0149] Meanwhile, in the case of the cover part (20), since it includes a predetermined elasticity and viscosity, it can play a role of filling a predetermined gap between the elastic hinge block (10) and a separate plate to which it is fixed or connected and buffering it.

[0150] Thus, the cover portion (20) fills and buffers the micro-gap between the surfaces due to the micro-curvatures as a predetermined buffer. At this time, the cover portion (20) is mounted so as to cover the lower surface, and can be replaced after being used several to several hundred times.

[0151] Meanwhile, as shown in FIG. 6, the elastic hinge block (10) may have a pin portion (206) formed on the upper surface (205), and through the pin portion (206), coupling and positioning with a structure such as a predetermined plate on the upper surface (205) may be performed.

[0152] Fig. 7a is a perspective view showing an example of a pressure plate equipped with the elastic hinge block of Fig. 1, and Fig. 7b is a perspective view showing another example of a pressure plate equipped with the elastic hinge block of Fig. 1.

[0153] Referring to FIG. 7a, at least one elastic hinge block (10) can be connected to the center of one side of the pressure plate (30) having a predetermined area, as shown.

[0154] At this time, the number of the elastic hinge blocks (10) is not limited, and if four are connected as shown, they can be arranged in a 2*2 matrix form and connected to the pressure plate (30).

[0155] In addition, the pressure plate (30) and the elastic hinge block (10) may be connected to each other through the pin portion (206), as described with reference to FIG. 6, and the cover portion (20) may be interposed as a buffer that buffers the minute surface curvature between the pressure plate (30) and the elastic hinge block (10).

[0156] As described above, as the pressure plate (30) is connected through the elastic hinge block (10), the elastic hinge block (10) is deformed into various positions and postures according to the application of an external force, and through this, the extension surface of the pressure plate (30) can be arranged to have various positions and postures.

[0157] In contrast, referring to FIG. 7b, a plurality of elastic hinge blocks (10) may be arranged and connected at equal intervals across one surface of the pressure plate (30).

[0158] At this time, the number of the elastic hinge blocks (10) is not limited, and the number or arrangement interval can be designed to be variable in consideration of the area of ​​the pressure plate (30).

[0159] Likewise, as described above, since the pressure plate (30) is connected through the elastic hinge block (10), the elastic hinge block (10) is deformed into various positions and postures according to the application of an external force, and through this, the extension surface of the pressure plate (30) can be arranged to have various positions and postures.

[0160] In particular, since they are arranged on the entire surface of the pressure plate (30) at regular intervals, they can respond to more minute position or posture changes of the pressure plate (30).

[0161] Fig. 8 is a cross-sectional view illustrating a pressurizing device including the pressurizing plate of Fig. 7a.

[0162] Referring to Fig. 8, the pressurizing device (1) can be used, for example, as a pressurizing device for a sinter bonder. Of course, the pressurizing device (1) can also be used as a pressurizing device for imprinting, but the following description will exemplify its use as a pressurizing device for a sinter bonder, as illustrated in Fig. 8. In this case, the pressurizing device can have substantially the same structure even when used as a pressurizing device for imprinting.

[0163] Specifically, the pressurizing device (1) includes a pressurizing plate (30) and an elastic hinge block (10), and bonds a die (43) onto a substrate (41).

[0164] That is, in general, the substrate (41) is positioned on the stage (40), and when bonding a plurality of dies (43) to the substrate (41), the pressurizing device (1) is used. At this time, an adhesive layer (42) may be interposed between the substrate (41) and the die (43) for bonding the dies (43), and a separate heating unit (44) may be provided on the stage (40) to improve adhesive strength during the bonding process.

[0165] When performing the so-called sinter bondering as described above, a plurality of elastic hinge blocks (10) can be fixed on the pressure plate (30) in the same arrangement as the arrangement of the dies.

[0166] Thus, along the third direction (Z), the elastic hinge blocks (10) and the dies (43) are aligned one-to-one with each other. Accordingly, pressure can be applied to the die so that one die is bonded to the substrate (41) by one elastic hinge block.

[0167] That is, the pressurized plate (30) is pressed along the third direction (Z), and thus each elastic hinge block provides a predetermined pressing force to the dies below, and thus the dies are bonded on the substrate (41).

[0168] In this case, each die can be placed in a different posture and position during the process of being bonded to the substrate (41), and thus the elastic hinge block (10) can perform a predetermined posture change with respect to the pressure plate (30), so that stable and uniform pressure can be performed regardless of the various postures or positions of the die.

[0169] That is, in the conventional case, since the pressurizing was performed by the pressurizing plate (30) directly contacting the dies (43) without the intervention of the elastic hinge block (10), uneven pressurizing was performed on the plurality of dies. However, as in the present embodiment, since the elastic hinge blocks are aligned for each die to perform individual pressurizing, and the elastic hinge blocks individually change their postures with respect to the pressurizing plate (30), the plurality of dies can be relatively uniformly pressed.

[0170] Through this, the dies (43) can be more stably and uniformly bonded to the substrate (41).

[0171] Fig. 9 is a perspective view illustrating an elastic hinge block according to one embodiment of the present invention. Figs. 10a and 10b are a front view and a side view illustrating the elastic hinge block of Fig. 9.

[0172] Referring to FIGS. 9 to 10b, the elastic hinge block (15) according to the present embodiment includes a translational joint portion (1100) and a spherical joint portion (1200). In this case, although the drawing illustrates that the spherical joint portion (1200) is shown at the lower portion of the translational joint portion (1100), the spherical joint portion (1200) may also be formed at the upper portion of the translational joint portion (1100). However, for the convenience of explanation, the following description will describe an embodiment in which the spherical joint portion (1200) is integrally formed at the lower portion of the translational joint portion (1100) as illustrated.

[0173] As illustrated, the elastic hinge block (15) may have an overall square block shape. In addition, when the elastic hinge block (15) has a square block shape, as illustrated, the width of the second side (1102, 1202) may be formed to be relatively larger than the width of the first side (1101, 1201). This is because, as described below, the elastic hinge block (15) includes so-called dual-structure elastic hinge parts or spherical hinge parts.

[0174] However, the shape of the elastic hinge block (15) is not limited thereto, and the elastic hinge block (15) may have various polygonal block shapes such as a triangular block or a pentagonal block, and may further have a circular block shape.

[0175] Meanwhile, as described above, if the elastic hinge block (15) has a shape other than a square block, the translational joint portion (1100) and the spherical joint portion (1200) may be formed on only one side of the polygonal block or on a pair of sides facing each other, or in the case of a circular block, the outer surface may be divided into four equal parts to form a symmetrical structure as in the square block described below.

[0176] That is, depending on the shape of the block of the elastic hinge block (15), the structure in which the joint parts (1100, 1200) are formed can be designed and changed within an obvious range based on the structure in which the joint parts (1100, 1200) are formed in the elastic hinge block (15) described with reference to FIG. 9 described below.

[0177] Hereinafter, the elastic hinge block (15) illustrated in Fig. 9, which extends in one direction in a square block shape, will be described in detail.

[0178] As illustrated, the elastic hinge block (15) has a rectangular block shape that extends in one direction, i.e., a third direction (Z, extension direction), and the cross-section of the elastic hinge block (15) in the horizontal direction, i.e., the length of one side in the XY plane, is relatively smaller than the length extending along the third direction (Z). Of course, in this case, the extension length of the elastic hinge block (15) and the width of the cross-section in the horizontal direction can be designed to be variously variable.

[0179] Specifically, the translation joint portion (1100) is formed on the upper portion of the elastic hinge block (15), and elastic deformation such as compression in the third direction (Z) is implemented according to an external force (F) in the third direction.

[0180] That is, through the translation joint portion (1100), the elastic hinge block (15) is compressed in the third direction (Z) when an external force is applied, and when the external force disappears, the compressed structure is restored to its original state, so that the displacement of the elastic hinge block (15) in the third direction (Z) changes depending on the external force in the third direction (Z).

[0181] As shown, the above translation joint portion (1100) includes a pair of first and second elastic hinge portions (1110, 1120), wherein the first and second elastic hinge portions (1110, 1120) are formed to be adjacent to each other in the second direction (Y, horizontal direction).

[0182] At this time, each of the first and second elastic hinge parts (1110, 1120) is formed to penetrate the second surface (1202) and the fourth surface (not shown) facing each other in the translational joint part (1100), and has a structure that extends long along the third direction (Z).

[0183] In addition, the first and second elastic hinge parts (1110, 1120) are formed symmetrically with respect to the center of the second surface (1202), and thus have the same symmetrical structure.

[0184] Specifically, the first elastic hinge portion (1110) includes a first elastic opening portion (1111) and a first elastic extension portion (1112).

[0185] The first elastic opening (1111) is formed to penetrate the elastic hinge block (15) from the second surface (1102) toward the fourth surface, and the cross-section may have a plate shape with a relatively thin thickness as illustrated. Furthermore, the first elastic opening (1111) may be formed in a form in which a plurality of first elastic openings are stacked on each other along the third direction (Z), and the stacked structures may be formed to be spaced apart from each other while having the same interval between them. At this time, the thickness of each of the first elastic openings (1111) may be the same, and the thickness of the elastic opening formed at the center may be formed to be relatively larger.

[0186] As shown, the first elastic extension portion (1112) forms a groove that opens from the first surface (1101) and extends to the first elastic opening portion (1111).

[0187] At this time, the first elastic extension portion (1112) may be a groove that is substantially formed in the process of processing the first elastic opening portion (1111). That is, when processing the first elastic opening portion (1111), a processing method such as EDM may be applied, and for such EDM processing, a processing path for approaching the first elastic opening portion (1111) is required. Accordingly, by forming the first elastic extension portion (1112), processing of the first elastic opening portion (1111) can be performed.

[0188] Accordingly, the first elastic extension portion (1112) may be formed in multiple numbers, taking into account the number of the first elastic opening portions (1111). Thus, among the first elastic opening portions (1111) that are stacked, the first elastic opening portions (1111) may extend to the elastic opening portions located at the uppermost, lowermost, and middle positions.

[0189] Of course, some of the first elastic openings (1111) may be formed so as not to be connected to the first elastic extension (1112), in which case they may be manufactured through a processing method such as separate drilling.

[0190] As described above, the first elastic hinge portion (1110) has an overall symmetrical structure so as to penetrate the second surface (1102) and the fourth surface, and is formed on one side of the elastic hinge block (15).

[0191] The second elastic hinge portion (1120) has substantially the same structure and arrangement as the first elastic hinge portion (1110), with the only difference being the position at which it is formed. Therefore, only the position at which it is formed will be described.

[0192] The second elastic hinge portion (1120) is formed to be adjacent to the first elastic hinge portion (1110) along the second direction (Y), and includes a second elastic opening portion (1121) and a second elastic extension portion (1122).

[0193] The second elastic openings (1121) are also formed in multiple numbers to penetrate from the second surface (1102) to the fourth surface (not shown) along the first direction (X), and the stacked structure is as described above.

[0194] In addition, in the case of the second elastic extension portion (1122), it is formed to extend in a groove-like shape from the third surface toward the second elastic opening portion (1121), and the number of the second elastic extension portions (1122) may also be formed in multiple numbers.

[0195] Thus, the second elastic hinge portion (1120) also has an overall symmetrical structure so as to penetrate the second surface (1102) and the fourth surface and is formed on the other side of the elastic hinge block (15).

[0196] Meanwhile, an elastic connection (1130) can be formed between the first elastic opening (1111) and the second elastic opening (1121).

[0197] The above elastic connecting portion (1130) is formed in a groove-like shape, like the first elastic extension portion (1112) and the second elastic extension portion (1122) described above, to connect the first and second elastic opening portions (1111, 1121) to each other.

[0198] The elastic connecting portion (1130) also corresponds to a continuous connecting groove for processing the second elastic opening (1121) after processing the first elastic opening (1111) by connecting the first and second elastic openings (1111, 1121). Thus, as illustrated, the elastic connecting portion (1130) may be formed between any of a plurality of adjacent first and second elastic openings (1111, 1121) as a structure of connecting grooves for processing each other. That is, although the drawing illustrates two elastic connecting portions (1130) extending between the adjacent first and second elastic openings (1111, 1121), the number is not limited thereto.

[0199] As described above, the first and second elastic hinge parts (1110, 1120) are formed as a pair, so-called dual structures, and are formed parallel to each other along the third direction (Z), so that when compression is performed in the third direction (Z), the pair can be compressed independently. That is, the first and second elastic hinge parts (1110, 1120) may be compressed with the same displacement depending on the provision of a compressive force, but may also be compressed with different displacements, which may be determined depending on the magnitude or direction of the applied force (F).

[0200] Thus, compression variation in a wider range of postures is possible, and through this, effective elastic deformation can be performed in response to various external forces.

[0201] Meanwhile, the drawing illustrates a structure in which two, i.e., a pair of elastic hinge parts (1110, 1120) extend parallel to each other, but the number of elastic hinge parts may be three or more, and accordingly, effective external force absorption can be performed through elastic deformation in a wider variety of postures.

[0202] The above spherical joint part (1200) is formed integrally with the translation joint part (1100) at the lower part of the elastic hinge block (15), i.e., at the lower part of the translation joint part (1100), and a rotational deformation, such as rotation about the rotational center axis in the first direction (X) or the second direction (Y), is implemented according to an external force (F) in the third direction (Z).

[0203] That is, through the spherical joint portion (1200), the elastic hinge block (15) rotates about the rotational center axis in the first direction (X) or the second direction (Y) when an external force is applied, and when the external force disappears, the rotated structure is restored to its original state, so that the elastic hinge block (15) changes its extension posture in the third direction (Z) depending on the direction of the external force in the third direction (Z).

[0204] The above spherical joint portion (1200) includes a first spherical hinge portion (1210) and a second spherical hinge portion (1220) formed in a direction penetrating a second surface (1202) and a fourth surface (not shown) facing each other in the first direction (X) of the elastic hinge block (15), and further includes a third spherical hinge portion (1230) and a fourth spherical hinge portion (not shown) formed on the first surface (1201) and the third surface (not shown) facing each other in the second direction (Y) of the elastic hinge block (15).

[0205] At this time, the first spherical hinge portion (1210) includes a first spherical opening portion (1211), a first spherical end portion (1212), and a first spherical extension portion (1213), as illustrated.

[0206] The first spherical opening (1211) is formed to penetrate the elastic hinge block (15) from the second surface (1202) toward the fourth surface, and the cross-section may have a right-angled triangular shape with a width that decreases from the bottom to the top as illustrated. Furthermore, the triangular shape of the first spherical opening (1211) may be formed so that a pair is spaced apart from each other in a symmetrical structure as illustrated.

[0207] In addition, the first spherical end portion (1212) may be further extended upward from the end of the first spherical opening (1211) and may be extended with the same width and a predetermined length. At this time, the first spherical end portion (1212) is also formed to penetrate the elastic hinge block (15) from the second surface (1202) toward the fourth surface. At this time, the first spherical end portion (1212) also extends symmetrically upward from each of the pair of first spherical openings (1211).

[0208] In addition, the first spherical extension portion (1213) has a similar symmetrical structure, as shown, by opening from the first surface (1201) and extending to the first spherical opening (1211). Accordingly, one side of the first spherical extension portion (1213) extends from the first surface (1201) to the first spherical opening (1211) on one side, and the other side of the first spherical extension portion (1213) extends from the adjacent second spherical hinge portion (1220) to the first spherical opening (1211) on the other side.

[0209] At this time, the groove formed by the first spherical extension (1213) is, as previously described, a groove required in the process of processing the first spherical opening (1211) and the first spherical end (1212), and accordingly, depending on the position of the first spherical opening (1211), it can be extended while being bent in the vertical direction as shown.

[0210] As described above, the first spherical hinge portion (1210) has a right-angled triangle shape and has a first spherical opening (1211) formed as a relatively wide space, and a first spherical end portion (1212) further extending upward from the opening, thereby having a structure that can rotate according to the application of a so-called external force.

[0211] The second spherical hinge portion (1220) has substantially the same structure and arrangement as the first spherical hinge portion (1210), with the only difference being the position at which it is formed. Therefore, only the formation position will be described.

[0212] The second spherical hinge portion (1220) is positioned adjacent to the first spherical hinge portion (1210) along the second direction (Y). Thus, the second spherical hinge portion (1220) is formed as a pair with the first spherical hinge portion (1210), that is, has a dual structure. Of course, although the drawing illustrates that they are formed as a pair, three or more spherical hinge portions may be positioned adjacent to each other along the second direction (Y).

[0213] Additionally, the second spherical hinge portion (1220) also includes a second spherical opening portion (1221), a second spherical end portion (1222), and a second spherical extension portion (1223).

[0214] The structure in which the second spherical openings (1221) are formed in pairs symmetrically to each other and the structure penetrating from the second surface (1202) to the fourth surface (not shown) along the first direction (X) are the same as the first spherical opening (1211) described above.

[0215] In addition, the extension length and shape of the second spherical end portion (1222) and the extension state of the second spherical extension portion (1223) are also as described above.

[0216] As described above, the second spherical hinge portion (1220) also has a second spherical opening (1221) formed as a relatively wide space in the shape of a right triangle, and a second spherical end portion (1222) further extending upward therefrom, so as to have a structure that can rotate according to the application of an external force.

[0217] In particular, in the case of the present embodiment, since a pair of the first and second spherical hinge parts (1210, 1220) are formed to penetrate the second surface (1202) and the fourth surface, rotation is possible in both the clockwise and counterclockwise directions with the first direction (X) as the rotational center axis depending on the direction of application of the external force (F), and through this, rotational deformation of the elastic hinge block (11 (15)) can be implemented.

[0218] The third spherical hinge portion (1230) has substantially the same structure and arrangement as the first and second spherical hinge portions (1210, 1220), with only differences in the position and penetration state in which it is formed.

[0219] The third spherical hinge portion (1230) is formed on the first surface (1201) and forms a direction perpendicular to the formation positions of the first and second spherical hinge portions (1210, 1220). At this time, the third spherical hinge portion (1230) is formed only in the form of a groove of a certain depth on the first surface (1201) in order to prevent interference with the first and second spherical hinge portions (1210, 1220) that penetrate the second surface (1202) and the fourth surface, and does not have a structure that penetrates the first surface (1201) and the fourth surface.

[0220] Additionally, the third spherical hinge portion (1230) also includes a third spherical opening portion (1231), a third spherical end portion (1232), and a third spherical extension portion (1233).

[0221] The structure in which the third spherical opening (1231) is formed in pairs symmetrically is the same as the first and second spherical openings (1211, 1221) described above. In addition, the extension length and shape of the third spherical end portion (1232) and the extension state of the second spherical extension portion (1233) are also as described above.

[0222] However, the overall structure of the third spherical opening (1231), the third spherical end portion (1232), and the third spherical extension portion (1233) has a structure opposite to the overall structure of the first spherical opening (1211), the first spherical end portion (1212), and the first spherical extension portion (1213). That is, the third spherical hinge portion (1230) has a structure of a reverse shape with respect to the first and second spherical hinge portions (1210, 1220).

[0223] Furthermore, although not shown, a fourth spherical hinge portion may be formed on a third surface (not shown) that faces the first surface (1201). At this time, the fourth spherical hinge portion may be formed in a groove shape of a predetermined depth from the third surface so as to have the same structure as the third spherical hinge portion (1230).

[0224] As described above, in the case of the present embodiment, since a pair of the third and fourth spherical hinge portions are additionally formed on the first surface (1201) and the third surface, the elastic hinge block (15) can rotate in both the clockwise and counterclockwise directions with the second direction (Y) as the rotational center axis depending on the direction of application of the external force (F), thereby implementing rotational deformation of the elastic hinge block (15).

[0225] As described above, compression, i.e., elastic deformation, corresponding to an external force is implemented through the translational joint portion (1100), and rotational deformation is implemented to correspond to the external force through the spherical joint portion (1200) located below the translational joint portion (1100). Therefore, in situations where various external forces are applied, the elastic hinge block can be deformed within a predetermined range to correspond to the magnitude and direction of the external force.

[0226] Furthermore, since both the translational joint part (1100) and the spherical joint part (1200) have a so-called dual structure, the elastic hinge block (15) may be compressed and rotated unbalanced on the left and right depending on the direction of the external force, and thus deformation into a wider variety of postures may be implemented.

[0227] Fig. 11 is a schematic diagram illustrating a kinematic model for explaining the elastic hinge block of Fig. 9. Fig. 12 is an image illustrating a deformation state of the elastic hinge block of Fig. 9 when an external force is applied.

[0228] First, referring to Fig. 11, in the elastic hinge block (15), the translational joint portion (1100) formed at the top functions as a linear elastic body such as a spring, as shown, and the spherical joint portion (1200) located at the bottom functions as a spherical joint.

[0229] Thus, the elastic hinge block (15) has a structure in which a prismatic joint and a universal joint are continuously connected.

[0230] At this time, since implementing a universal joint as an elastic hinge can be very complex in structure, in the case of this embodiment, a spherical joint is implemented instead of a universal joint, and through this, the spherical joint is capable of movement in a three-axis rotational direction, but since a force that induces rotation in the axial direction is not applied, a tilt movement in a two-axis direction as described above can be implemented.

[0231] Furthermore, in the present embodiment, the spherical joint portion (1200) has a structure including a pair of first and second spherical hinge portions (1210, 1220), and the first and second spherical hinge portions (1210, 1220) each serve as a universal joint that is driven individually.

[0232] Accordingly, the spherical joint part (1200) can be adapted and the contact state can be varied depending on the shape (1205, 1206) of the surface that contacts the lower surface of the spherical joint part (1200), and even when there is a slight curvature of the surface, the elastic hinge block (15) can implement stable contact depending on the curvature of the surface.

[0233] Thus, as shown in FIG. 12, even when the lower surface (1205) of the first spherical hinge portion (1210) and the lower surface (1206) of the second spherical hinge portion (1220) are in contact with each other in different postures, when a predetermined force (F) is applied to the upper surface (1105), tilt deformation can be induced through the spherical joint portion (1200) as shown, and compressive deformation can be induced through the translational joint portion (1100) as shown.

[0234] Fig. 13 is a perspective view showing an elastic hinge block according to another embodiment of the present invention.

[0235] The elastic hinge block (16) according to the present embodiment is substantially the same as the elastic hinge block (15) described with reference to FIG. 9, except for the structure in which the spherical joint portions (1205) are formed to overlap, so the same reference numbers are used for the same components and any duplicate descriptions are omitted.

[0236] Referring to FIG. 13, the elastic hinge block (16) according to the present embodiment includes spherical hinge parts (1210, 1220, 1230, 1250, 1260, 1270) formed so that the spherical joint part (1205) overlaps.

[0237] That is, the first to third spherical hinge parts (1210, 1220, 1230) and the fourth spherical hinge part (not shown) are formed integrally at the lower portion of the translational joint part (1100) in the same manner as the elastic hinge block (15) in FIG. 9. However, the fifth to seventh spherical hinge parts (1250, 1260, 1270) having the same structure are formed to overlap at the lower portions of the first to third spherical hinge parts (1210, 1220, 1230), and similarly, the eighth spherical hinge part having the same structure is formed to overlap at the lower portion of the fourth spherical hinge part (not shown).

[0238] That is, the fifth spherical hinge portion (1250) is integrally formed on the lower portion of the first spherical hinge portion (1210), and is formed to have a structure that is symmetrical in the shape and vertical direction of the first spherical hinge portion (1210).

[0239] Likewise, the sixth spherical hinge portion (1260) is integrally formed on the lower portion of the second spherical hinge portion (1220), and is formed to have a structure that is symmetrical in the shape and vertical direction of the second spherical hinge portion (1220).

[0240] In addition, the seventh spherical hinge portion (1270) is also formed integrally on the lower portion of the third spherical hinge portion (120), and is formed to have a structure that is symmetrical in the vertical direction with the shape of the first spherical hinge portion (1210).

[0241] Furthermore, although not shown, the eighth spherical hinge portion is formed at the lower portion of the fourth spherical hinge portion with a structure that is symmetrical in the shape of the fourth spherical hinge portion in the vertical direction.

[0242] As described above, since the fifth to eighth spherical hinge parts are formed to overlap the lower portions of the first to fourth spherical hinge parts, as described above, rotational deformation is implemented through the spherical joint part (1201), enabling various posture changes according to external force.

[0243] Figures 14a to 14c are front views illustrating elastic hinge blocks according to other embodiments of the present invention.

[0244] The spherical joint portion described above can be formed in various shapes.

[0245] For example, as in FIG. 14a, in the spherical joint portion (1300) of the elastic hinge block (17), each of the first and second spherical hinge portions (1310, 1320) may be formed with a structure having a capsule-shaped spherical opening (1311, 1321) extending in the third direction (Z) at the center and a spherical extension portion (1312, 1322) extending to the spherical opening (1311, 1321).

[0246] At this time, the spherical extension portion (1312, 1322) may be extended a certain length from the side along the second direction (Y) as shown, and then further extended in a diagonal direction to extend to the spherical opening portion (1311, 1321).

[0247] Thus, each of the first and second spherical hinge parts (1310, 1320) has an overall 'V' shaped structure.

[0248] Additionally, third and fourth spherical hinge parts (1330, 1340) having a structure symmetrical with the first and second spherical hinge parts (1310, 1320) along the third direction (Z) may be additionally formed at the lower portions of the first and second spherical hinge parts (1310, 1320).

[0249] At this time, the detailed shape of each of the third and fourth spherical hinge parts (1330, 1340) is substantially the same as that of the first and second spherical hinge parts (1310, 1320), and thus each of the third and fourth spherical hinge parts (1330, 1340) is ' It has a (inverted V) shape.

[0250] Thus, the spherical joint portion (1300) may have a structure in which the overall shape of the letter 'W' and the shape of the letter 'reverse W' are formed in the vertical direction.

[0251] Meanwhile, only the first and second spherical hinge parts (1310, 1320) having a structure penetrating the second surface (1202) and the fourth surface (not shown) facing thereto are illustrated in FIG. 14a, but as described above, the spherical joint part (1300) may additionally have a spherical hinge part having the same groove shape formed on the first surface (1201) and the third surface facing thereto. Furthermore, the additional formation of a spherical hinge part having the same shape as a groove shape on the first surface and the third surface is also the same in FIG. 14b and FIG. 14c below.

[0252] In contrast, referring to FIG. 14b, in the spherical joint portion (1400) of the elastic hinge block (18), each of the first and second spherical hinge portions (1410, 1420) may be formed with a structure having a capsule-shaped spherical opening (1411, 1421) extending in the third direction (Z) at the center and a spherical extension portion (1412, 1422) extending to the spherical opening (1411, 1421).

[0253] At this time, the spherical extension portion (1412, 1422) can extend in a straight line shape from the side along the second direction (Y) as shown, and extend to the spherical opening portion (1411, 1421).

[0254] Additionally, third and fourth spherical hinge parts (1430, 1440) having the same shape as the first and second spherical hinge parts (1410, 1420) may be additionally formed at the lower portions of the first and second spherical hinge parts (1410, 1420).

[0255] At this time, the detailed shapes of each of the third and fourth spherical hinge parts (1430, 1440) are substantially the same as those of the first and second spherical hinge parts (1410, 1420).

[0256] Thus, the spherical joint portion (1400) as a whole may have a structure that forms a predetermined space in the center of each of the first to fourth spherical hinge portions (1410, 1420, 1430, 1440) and may have a structure that extends as a pair of parallel straight lines along the second direction (Y).

[0257] In addition, through a structure such as the above, the spherical joint part (1400) can implement the so-called tilting deformation.

[0258] In contrast, as in FIG. 14c, in the spherical joint portion (1500) of the elastic hinge block (19), each of the first and second spherical hinge portions (1510, 1520) may be formed only with a structure extending in the second direction (Y).

[0259] That is, the first spherical hinge portion (1510) has a structure that extends from both sides and is spaced apart from each other at a predetermined distance in the center, and similarly, the second spherical hinge portion (1520) may also have a structure that extends from both sides and is spaced apart from each other at a predetermined distance in the center.

[0260] At this time, the first and second spherical hinge parts (1510, 1520) can be extended to open to each other.

[0261] Likewise, third and fourth spherical hinge parts (1530, 1540) having the same shape as the first and second spherical hinge parts (1510, 1520) may be additionally formed at the lower portions of the first and second spherical hinge parts (1510, 1520).

[0262] Thus, the spherical joint portion (1500) as a whole may have a structure extending as a pair of straight lines along the second direction (Y) while having a predetermined separation structure at the center of each of the first and second spherical hinge portions (1510, 1520), and a predetermined separation structure at the center of each of the third and fourth spherical hinge portions (1530, 1540). In addition, through the structure described above, the spherical joint portion (1500) may implement a so-called tilting deformation.

[0263] As described above, in the elastic hinge block as in FIGS. 14a to 14c, the spherical hinge parts included in the spherical joint parts are formed to overlap each other in the vertical direction, thereby forming a structure that substantially implements tilting deformation more effectively.

[0264] Meanwhile, each of the elastic hinge blocks (15, 16, 17, 18, 19) described with reference to FIGS. 9, 13, and 14a to 14c may be provided on a pressure plate as in FIGS. 7a and 7b, and since this is the same as previously described, a duplicate description will be omitted.

[0265] In addition, each of the elastic hinge blocks (15, 16, 17, 18, 19) can be configured as a pressurizing device as in FIG. 8 when provided on a pressurizing plate as in FIG. 7a, and a duplicate description thereof will be omitted.

[0266] According to the embodiments of the present invention as described above, when an external force is applied, the elastic hinge block including the translational joint part and the spherical joint part is compressed or rotated, so that the shape or posture can be changed within a predetermined range depending on the magnitude or direction of various external forces.

[0267] Through this, when the elastic hinge block is provided on the press plate of the press device, it can effectively respond to changes in the posture of the press plate during the press process or imprint process of the sintering bonder, thereby performing uniform pressurization on multiple objects.

[0268] In particular, in the case of the elastic hinge block, since a spherical joint portion is formed on the upper or lower portion of the translational joint portion, the translational joint portion is compressively deformed as a translational joint, and the spherical joint portion is rotationally deformed as a universal joint, thereby enabling effective deformation response to various sizes or directions of external forces.

[0269] At this time, the translational joint part and the spherical joint part are both arranged with at least two or more dual structures in parallel, thereby enabling the elastic hinge block to change its posture to match the shape of the surface it comes into contact with, thereby achieving higher contactability and structural stability.

[0270] This is advantageous in that, when the elastic hinge block is applied to a pressurizing device, the posture can be changed to effectively respond to the minute curves formed on the surface of the substrate located on the lower surface of the elastic hinge block, thereby performing uniform pressurization.

[0271] Furthermore, in the case of the elastic hinge block, in the case of a square block, both the elastic hinge portion as well as the upper and lower hinge portions are formed to penetrate the faces facing each other, so that the entire square block is manufactured to have a symmetrical structure, so that the same deformation can be implemented in all directions without distortion with respect to the direction of the external force.

[0272] In addition, in the case of the elastic hinge portion and the upper and lower hinge portions, the ease of processing of the hinge portions can be improved by including an extension portion extending from the outer surface of the elastic hinge portion, thereby improving the convenience of manufacturing. Of course, if the upper and lower hinge portions are formed without an extension portion, similarly easy manufacturing can be possible through processing such as drilling.

[0273] In particular, in the case of the upper and lower hinge parts, rotational deformation in response to an external force can be freely possible through a structure in which the shape of the hinge part includes a curved shape or extends from the extension part to the hinge part through a sloped part.

[0274] Although the present invention has been described above with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various modifications and changes may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below.

Claims

1. In an elastic hinge block that extends in one direction and is deformed by an external force, A translational joint portion including at least one elastic hinge portion, which is compressed in the extension direction by the external force; and It comprises an upper spherical joint portion located on the upper portion of the above translational joint portion and including at least one upper hinge portion, and which rotates with respect to the extension direction by the external force, An elastic hinge block characterized in that the upper spherical joint portion and the translational joint portion are formed integrally.

2. In the first paragraph, the elastic hinge part, At least one opening formed through the above translational joint portion; and An elastic hinge block characterized by including an extension portion extending from the outer surface of the elastic hinge portion toward the opening.

3. In the second paragraph, the opening is An elastic hinge block characterized in that a plurality of the above-mentioned translational joint portions are formed to be spaced apart at regular intervals along the extension direction.

4. In the second paragraph, the opening is A first opening formed by penetrating the first and third surfaces facing each other of the above translational joint portion; and An elastic hinge block characterized by including a second opening formed through the second and fourth surfaces facing each other of the translational joint portion.

5. In the first paragraph, the upper spherical joint part, At least one upper opening formed through the upper spherical joint portion, An elastic hinge block characterized in that the upper opening includes a curved surface or has a circular, oval or capsule-shaped cross-sectional shape.

6. In the fifth paragraph, the upper spherical joint part, An upper extension extending in a straight line from the outer surface of the upper spherical joint portion toward the upper opening; and Further comprising an upper inclined portion extending from the end of the upper extension portion toward the upper opening, An elastic hinge block characterized in that the upper inclined portion has an extension direction that is changed from the extension direction of the upper extension portion.

7. In the fifth paragraph, the upper opening is A first upper opening formed by penetrating the first and third surfaces facing each other of the upper spherical joint portion; and An elastic hinge block characterized by including a second upper opening formed by penetrating the second and fourth surfaces facing each other of the upper spherical joint portion.

8. In paragraph 1, A lower spherical joint portion is located at the lower portion of the above translational joint portion, and includes at least one lower hinge portion, and rotates with respect to the extension direction by the external force, An elastic hinge block characterized in that the lower spherical joint portion is formed integrally with the upper spherical joint portion and the translational joint portion.

9. In the 8th paragraph, the lower spherical joint part, An elastic hinge block characterized by being formed in the same shape as the upper spherical joint portion.

10. In an elastic hinge block that extends in one direction and is deformed by an external force, A translational joint portion including at least two elastic hinge portions, which is compressed in the extension direction by the external force; and An elastic hinge block including a spherical joint portion that is formed integrally with the translational joint portion at the upper or lower portion of the translational joint portion and that rotates in the extension direction by the external force, including at least two spherical hinge portions.

11. In the 10th paragraph, the translation joint part, An elastic hinge block characterized in that it includes first and second elastic hinge parts, each having the same shape and arranged adjacent to each other in a horizontal direction perpendicular to the extension direction.

12. In the 11th paragraph, each of the first and second elastic hinge parts, At least one elastic opening formed through the above translational joint portion; An elastic extension extending from the outer surface of the above translational joint portion toward the elastic opening; and An elastic hinge block characterized by including an elastic connecting portion extending between adjacent elastic hinge portions.

13. In the 10th paragraph, the spherical joint part, An elastic hinge block characterized in that it includes first to fourth spherical hinge parts, each having the same shape and arranged adjacent to each other in a horizontal direction perpendicular to the extension direction.

14. In paragraph 13, The first and second spherical hinge portions are formed to penetrate a pair of mutually facing surfaces of the spherical joint portion, An elastic hinge block characterized in that the third and fourth spherical hinge portions are formed on a pair of opposite surfaces of the spherical joint portion.

15. In the 13th paragraph, each of the first to fourth spherical hinge parts, at least one spherical aperture; and An elastic hinge block characterized by including a spherical extension portion extending from the outer surface of the spherical joint portion toward the spherical opening.

16. In paragraph 15, The above spherical opening extends from the above spherical extension portion so that its width is variable, An elastic hinge block, characterized in that each of the first to fourth spherical hinge portions further includes a spherical end portion extending from an end of the spherical opening with a predetermined length and the same width.

17. In the 15th paragraph, the spherical opening is An elastic hinge block characterized by including a curved surface or having a circular, elliptical, capsule-shaped or linear cross-sectional shape.

18. In the 10th paragraph, the spherical joint part, An elastic hinge block characterized in that at least two of them are overlapped and formed integrally along the above extension direction.

19. In a pressurizing device for bonding a die onto a substrate, A pressure plate to which an external force is applied; and A pressurizing device including an elastic hinge block according to claim 1 or claim 10, which is connected to the lower surface of the pressurizing plate and pressurizes the die.

20. In paragraph 19, The above elastic hinge block is aligned with the die in the direction of pressing the die, A pressurizing device characterized in that, when a plurality of dies are positioned on the substrate, each of the plurality of elastic hinge blocks is aligned one-to-one with the dies.

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