Vacuum-type experimental device

Abstract

The present invention relates to a vacuum-type experimental device which prevents contamination of a sample for inspection by maintaining a glove box and a measuring device under the same atmospheric conditions when the sample is inserted into the measuring device inside the glove box.

Description

Vacuum-type experimental device

[0001] The present invention relates to a vacuum-type experimental device, and more particularly, to a vacuum-type experimental device that can prevent contamination of a sample by maintaining the glove box and the measuring device in the same atmosphere when a sample for inspection is placed in a measuring device such as an electron microscope inside the glove box.

[0002]

[0003] In general, electron microscopes, focused ion beam milling devices, ion milling devices, mass spectrometers, and other instruments must operate under a vacuum. For example, after placing a sample in a vacuum chamber, measurement or measurement of the sample can be performed under a vacuum.

[0004] Specifically, in the case of an experimental device requiring a vacuum, a sample is mounted on the stage of the device in the air, placed in a vacuum chamber, and then the vacuum chamber is maintained at a vacuum using a vacuum pump connected to the vacuum chamber.

[0005] Additionally, in chemical or biological experiments, it is very important to transfer samples to the microscope in a glove box or glove bag because contamination can occur when certain samples are exposed to air.

[0006] However, the conventional vacuum experimental device as described above has a problem in that accurate analysis is difficult due to contamination of the sample, as the sample for inspection may be exposed to air during the process of moving from a glove box to a measuring device such as a microscope.

[0007] [Prior Art Literature]

[0008] Republic of Korea Patent No. 10-1991134 (Announcement date: June 19, 2019)

[0009]

[0010] The present invention was created to solve the problems of the prior art as described above, and its purpose is to provide a vacuum-type experimental device that can prevent contamination of a sample by maintaining the same atmosphere between the glove box and the measuring device when a sample for inspection is introduced into the measuring device inside the glove box.

[0011]

[0012] In order to achieve the above object, a vacuum-type experimental device according to one aspect of the present invention is characterized by including: a glove box having a sealed working space for handling a sample; a measuring device coupled to the glove box so that the sample can be selectively introduced, and decompressed to a vacuum state for handling the sample for inspection through the working space; and a stage unit movably provided on the measuring device so that the sample can be placed in the working space, and sealing the measuring device while introducing the sample into the interior of the measuring device through movement.

[0013] In addition, in the present invention, the measuring device is characterized by being any one of an electron microscope, an ion beam milling device, an ion miller, and a mass spectrometer.

[0014] In addition, in the present invention, the measuring device is characterized in that it has a sample inlet that is selectively sealed by the stage unit and communicates with the working space unit through the sample inlet.

[0015] In addition, in the present invention, the glove box has a door for introducing the sample, and after the sample is introduced into the working space through the door, the working space is maintained in a vacuum;

[0016] The above stage unit is characterized by opening the sample inlet in a vacuum state of the glove box.

[0017] In addition, in the present invention, the stage unit is characterized by including: an input port opening / closing guide part located below the sample input port and moving linearly back and forth; an opening / closing block part coupled to and moving the input port opening / closing guide part to correspond to the sample input port and selectively opening / closing the sample input port; and a sample settling module provided on the opening / closing block part so that the sample is introduced into the measuring device through the sample input port and on which the sample is set.

[0018] In addition, in the present invention, the inlet opening / closing guide part is characterized by including an opening / closing guide rail part coupled to the measuring device; and a moving plate movably provided on the opening / closing guide rail part and to which the opening / closing block part is coupled.

[0019] In addition, the sample settling module of the present invention is characterized by including: a sample tray on which the sample is settling; and a stage position adjusting unit provided in the opening / closing block unit so that the sample tray is coupled and changes the position of the sample tray.

[0020] In addition, in the present invention, the stage position control unit is characterized by moving the sample tray back and forth, left and right, up and down, or rotating the sample tray.

[0021] In addition, in the present invention, the stage position control unit is characterized by including a first sample position driving unit that is provided so that the sample tray can be rotatably moved back and forth in the X-axis direction; a second sample position driving unit that is coupled to the first sample position driving unit and that reciprocates the first sample position driving unit in the Y-axis direction; and a third sample position driving unit that is coupled to the second sample position driving unit and that reciprocates the second sample position driving unit in the Z-axis direction.

[0022] In addition, in the present invention, the stage position control unit is characterized by further including a fourth sample position driving unit provided in the first sample position driving unit to rotate the sample tray.

[0023]

[0024] As described above, the vacuum-type experimental device according to one aspect of the present invention, unlike the conventional technology, can maintain the glove box and the measuring device in the same atmosphere when a sample for inspection is introduced into the measuring device inside the glove box, thereby preventing contamination of the sample, thereby having the effect of enabling accurate analysis while maintaining the stability of the sample.

[0025] More specifically, a vacuum-type experimental device according to one aspect of the present invention can load a sample without contamination through a glove box that is hermetically connected to a vacuum chamber of a measuring device such as an electron microscope.

[0026] In addition, the vacuum type experimental device of the present invention is different from installing the measuring device itself, such as an electron microscope, inside a glove box, and the measuring device part that is not affected even when positioned in the atmosphere can be placed in the atmosphere, while only the sliding stage configuration for loading and unloading a sample into and from the measuring device vacuum chamber can be placed inside the vacuum type experimental device of the present invention.

[0027] In this way, since the entire measuring device, such as the electron microscope, does not need to be placed within the glove box, it is easy to maintain and manage the measuring device, takes up less space in the entire facility, and has the advantage of being able to increase expandability by being hermetically connected to separate global boxes.

[0028] Furthermore, by configuring a controllable controller to control the pressure by injecting or discharging an inert gas such as argon into the vacuum type experimental device of the present invention, the vacuum type experimental device of the present invention can be used alone, or the vacuum type experimental device of the present invention can be used without a separate controller by hermetically connecting it with a separate glove box equipped with a gas control system.

[0029] In addition, according to a vacuum-type experimental device according to one aspect of the present invention, the position of the sample tray of the sample settling module for settling the sample can be adjusted, so that the sample can be easily introduced and analyzed stably.

[0030] In addition, according to a vacuum-type experimental device according to one aspect of the present invention, when introducing a sample into a measuring device, the sample can be introduced directly using the stage unit of the measuring device without using a separate device such as a transfer shuttle or a vacuum exchange chamber, so that sample size constraints can be minimized and samples of various sizes can be analyzed, thereby improving usability.

[0031]

[0032] Figure 1 is a perspective view illustrating a vacuum-type experimental device according to one embodiment of the present invention.

[0033] Figure 2 is an exploded perspective view illustrating a vacuum-type experimental device according to one embodiment of the present invention.

[0034] Figure 3 is an enlarged view illustrating a vacuum-type experimental device according to one embodiment of the present invention.

[0035] FIG. 4 is a front perspective view illustrating a stage unit according to one embodiment of the present invention.

[0036]

[0037] ※Explanation of symbols※

[0038] 100: Glove box 110: Work space

[0039] 120: Door part 200: Measuring device

[0040] 210: Sample inlet 220: Sealing clamp section

[0041] 300: Stage unit 310: Inlet opening / closing guide unit

[0042] 311: Opening / closing guide rail 313: Moving plate

[0043] 320: Opening block part 321: Sealing member

[0044] 330: Sample placement module 340: Sample tray

[0045] 350: Stage position control unit 351: First sample position driving unit

[0046] 353: Second sample position driving unit 355: Third sample position driving unit

[0047] 357: 4th sample position drive unit

[0048]

[0049] Hereinafter, preferred embodiments of a vacuum-type experimental apparatus according to the present invention will be described with reference to the attached drawings. The present invention can be modified in various ways and can take various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, but it should be understood that the invention includes all modifications, equivalents, and substitutes included in the spirit and technical scope of the present invention. In describing each drawing, similar reference numerals are used to indicate similar components. In the attached drawings, the dimensions of structures are shown larger than actual size to ensure clarity of the present invention.

[0050] While terms like "first" and "second" may be used to describe various components, these components should not be limited by these terms. These terms are used solely to distinguish one component from another. For example, without departing from the scope of the present invention, a first component could be referred to as a "second component," and similarly, a second component could also be referred to as a "first component."

[0051] The terminology used in this application is only used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, it should be understood that the terms "comprise" or "have" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0052] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by those of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning within the context of the relevant technology, and shall not be construed in an idealized or overly formal sense unless explicitly defined herein.

[0053] FIG. 1 is a perspective view illustrating a vacuum type experimental device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view illustrating a vacuum type experimental device according to an embodiment of the present invention, FIG. 3 is an enlarged view of a main part illustrating a vacuum type experimental device according to an embodiment of the present invention, and FIG. 4 is a front perspective view illustrating a stage unit according to an embodiment of the present invention.

[0054] Referring to FIGS. 1 to 4, a vacuum-type experimental device according to an embodiment of the present invention may largely include a glove box (100), a measuring device (200), and a stage unit (300). The glove box (100) and the measuring device (200) may be connected to each other, and the stage unit (300) may be movably provided on the measuring device (200).

[0055] According to this embodiment of the vacuum experimental device, the glove box (100) and the measuring device (200) are completely sealed from the outside, and the same atmosphere is created between the glove box (100) and the measuring device (200), and a sample for inspection can be placed on the stage unit (300) and introduced into the measuring device (200). For example, analysis can be performed after the measuring device (200) is maintained in a vacuum state, and when ventilating, an inert gas such as argon is injected inside to create the same gas atmosphere as the glove box (100), and then the sample can be moved. This allows the glove box (100) and the measuring device (200) to be introduced using the stage unit (300) while maintaining them sealed from the outside, so the time for introducing the sample can be reduced, and samples of more diverse types and sizes can be analyzed.

[0056] The glove box (100) according to the present embodiment has a sealed work space (110) for handling samples, and may be provided with a door (120) on one side for introducing and withdrawing samples. In addition, the glove box (100) may have a viewing window formed on the front so that an experimenter can check the samples, and the samples in the work space (110) can be checked through the viewing window and handled easily and stably.

[0057] In this glove box (100), when a sample is introduced into the work space (110) through the door (120), the door (120) is sealed and the work space (110) can be maintained in a vacuum. To this end, the door (120) is provided with an external space-side door that isolates the door (120) from the external space, and a work space-side door (not shown) that isolates the door (120) from the work space (110). A separate pump (not shown) may be provided to create the same vacuum atmosphere inside the door (120) as the work space (110) of the glove box (100). A sample can be placed inside the door section (120), and after the inside of the door section (120) is made the same as the working space section (110) by using a pump, the sample can be moved from the door section (120) to the working space section (110). Through this configuration, the sample can be introduced and withdrawn without releasing the vacuum atmosphere of the working space section (110) in the glove box (100).

[0058] Meanwhile, separately from the door section (120), a hollow pipe-shaped connecting section (not shown) connecting a separate main glove box (not shown) and the working space section (110) of the glove box (100) may be provided.

[0059] And the glove box (100) can be placed on one side of the work space (110) so that a measuring device (200) can be connected thereto.

[0060] The measuring device (200) corresponds to any one of an electron microscope, an ion beam milling device, an ion miller, and a mass spectrometer, and refers to a device that measures a sample in a vacuum. Here, the term “measurement” comprehensively refers to the operation of the measuring device (200), and for example, in the case of an electron microscope, it can be used to encompass the operation of imaging a sample.

[0061] The measuring device (200) is coupled to the glove box (100) so that a sample placed on the stage unit (300) can be selectively introduced, and can be decompressed to a vacuum state for the purpose of examining a sample introduced into the working space (110). In addition, the measuring device (200) may be provided with a sample inlet (210) so that a sample placed on the stage unit (300) can be introduced into the interior. The measuring device (200) may be communicated with the working space (110) through the sample inlet (210), and the sample inlet (210) may be sealed by the stage unit (300) as the sample of the stage unit (300) is introduced into the interior.

[0062] A SEM (Scanning Electron Microscope) can be used as the measuring device (200) according to the present embodiment.

[0063] The stage unit (300) according to the present embodiment is movably provided on the measuring device (200) so that a sample can be placed in the work space (110), and the sample inlet (210) of the measuring device (200) can be sealed while the sample is introduced into the measuring device (200) through movement. At this time, the measuring device (200) may be provided with a sealing clamp (220) so as to tightly seal the stage unit (300).

[0064] In addition, the stage unit (300) can open the sample inlet (210) when the working space (110) of the glove box (100) is maintained in a vacuum state. This stage unit (300) can include an inlet opening / closing guide part (310) coupled to the measuring device (200), an opening / closing block part (320) movably coupled to the inlet opening / closing guide part (310), and a sample settling module (330) provided in the opening / closing block part (320) for settling a sample.

[0065] The input opening / closing guide part (310) is coupled to the measuring device (200) so as to be positioned below the sample input port (210), and the opening / closing block part (320) can be fixed so as to be able to move linearly back and forth. The input opening / closing guide part (310) may include an opening / closing guide rail part (311) coupled to the measuring device (200), and a moving plate (313) movably provided on the opening / closing guide rail part (311).

[0066] The opening and closing guide part (310) of the injection port can be moved back and forth by the experimenter's manipulation of the moving plate (313). For example, the experimenter can open or close the sample injection port (210) by moving the opening and closing block part (320).

[0067] The movable plate (313) can be movably connected to the opening / closing guide rail part (311) in an LM guide manner, and an opening / closing block part (320) can be fixed to the upper surface.

[0068] The opening / closing block (320) is coupled to the moving plate (313) to correspond to the sample inlet (210) and moves, and can selectively open / close the sample inlet (210) when in contact with the measuring device (200). This opening / closing block (320) can seal the sample inlet (210) by being attached to the sealing clamp (220) and coming into close contact with the outer surface of the measuring device (200).

[0069] Additionally, the opening / closing block (320) may have a sealing member (321) attached to the inner surface to more tightly seal the sample inlet (210).

[0070] Through the above configuration, in a vacuum-type experimental device according to one embodiment of the present invention, a sample can be loaded without contamination through a glove box (100) having a working space (110) that is hermetically connected to a vacuum chamber inside a sample inlet (210) of a measuring device (200) such as an electron microscope.

[0071] More specifically, the vacuum type experimental device of the present invention can be configured so that the working space (110) of the glove box (100) and the vacuum chamber of the measuring device (200) can be hermetically connected through the sample inlet (210) of the measuring device (200) without installing the entire measuring device (200) such as an electron microscope inside the glove box (100).

[0072] Accordingly, as illustrated in FIGS. 1 and 2, among the components constituting the measuring device (200), the measuring device part that is not affected even when positioned in the air can be positioned in the air, while the opening / closing block part (320) and the sample settling module (330) for loading and unloading samples into the vacuum chamber of the measuring device (200) can be configured to be positioned inside the vacuum-type experimental device of the present invention.

[0073] In this way, since the entire measuring device (200) such as the electron microscope does not have to be placed within the glove box (100), the measuring device (200) is easy to maintain and manage, takes up less space in the entire facility, and can be connected hermetically to separate global boxes to increase expandability, which is advantageous.

[0074] Furthermore, a controllable controller (not shown) can be configured to control the pressure by injecting or discharging an inert gas such as argon into or out of the vacuum-type experimental device of the present invention.

[0075] To this end, a gas inlet and outlet may be installed in the glove box (100), and a pipe and pump may be provided for injecting an inert gas such as argon from the inlet and discharging the gas from the outlet. A tank containing the inert gas may be connected to this pipe, and a valve may be provided at a predetermined position in the pipe to control the flow direction and / or flow amount of the gas.

[0076] These pumps and valves are connected to a controller to control the atmosphere within the working space (110) of the vacuum-type experimental device of the present invention.

[0077] The present invention is not limited thereto, and it is also possible to use the vacuum type test device of the present invention by hermetically connecting it with a separate glove box equipped with a gas control system without a separate controller for controlling the atmosphere within the work space (110).

[0078] A sample settling module (330) may be provided inside the sealing member (321) of the opening / closing block (320).

[0079] The sample settling module (330) may be provided in the opening / closing block (320) so that, after the sample is settling, it is introduced into the interior of the measuring device (200) through the sample inlet (210). This sample settling module (330) may be configured to adjust the position at which the sample is settling or the position of the settling sample.

[0080] For example, the sample settling module (330) may include a sample tray (340) for settling a sample, and a stage position adjusting unit (350) provided in the opening / closing block unit (320) to allow the sample tray (340) to be combined and to vary the position of the sample tray (340).

[0081] The sample tray (340) can be adjusted in position by moving forward, backward, left, right, up and down, and rotating by the stage position adjustment unit (350).

[0082] The stage position adjustment unit (350) can be coupled to the opening / closing block unit (320) so that the sample tray (340) can be moved back and forth, left and right, up and down, and rotated. To this end, the stage position adjustment unit (350) can include a first sample position driving unit (351), a second sample position driving unit (353), a third sample position driving unit (355), and a fourth sample position driving unit (357), and the sample tray (340) can be provided to be rotatable in the first sample position driving unit (351).

[0083] Meanwhile, in this embodiment, the first sample position driving unit (351), the second sample position driving unit (353), and the third sample position driving unit (355) of the stage position control unit (350) are driven in an LM guide manner as an example, but the first sample position driving unit (351), the second sample position driving unit (353), and the third sample position driving unit (355) may also use a rack and pinion or cylinder driving method.

[0084]

[0085] The vacuum-type experimental device according to the present invention, configured as described above, can create a vacuum in the working space (110) of the glove box (100) that is the same atmosphere as the measuring device (200) when a sample for inspection is introduced into the measuring device (200) inside the glove box (100). This prevents contamination when introducing the sample into the measuring device (200), thereby enabling accurate analysis while maintaining the stability of the sample.

[0086] In addition, in the vacuum-type experimental device according to the present invention, the sample tray (340) of the sample settling module for settling a sample can be reciprocally moved in the X-axis, Y-axis, and Z-axis by the stage position adjusting unit (350), and its position can be adjusted while being rotated. Therefore, the sample can be introduced simply and accurately, and the sample can be analyzed stably.

[0087] In addition, since the vacuum-type experimental device according to the present invention can conduct the test in a glove box (100) that is connected to the measuring device (200) when introducing the sample into the measuring device (200), the sample can be directly installed on the stage unit (300) of the measuring device (200) without using a separate device such as a transfer shuttle or a vacuum exchange chamber. Accordingly, not only can sample size constraints be minimized, but samples of various sizes can be analyzed, thereby expanding the application field and increasing usability.

[0088] Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom.

[0089] Therefore, the true technical protection scope of the present invention should be determined by the patent claims.

Claims

1. A glove box having a sealed working space for handling samples; A measuring device coupled to the glove box so that the sample can be selectively introduced, and decompressed to a vacuum state for handling the sample for inspection through the working space; and A vacuum-type experimental device characterized by comprising a stage unit that is movably provided on the measuring device so that the sample can be placed in the working space, and seals the measuring device while introducing the sample into the measuring device through movement.

2. In paragraph 1, A vacuum-type experimental device characterized in that the measuring device is any one of an electron microscope, an ion beam milling device, an ion miller, and a mass spectrometer.

3. In paragraph 1, A vacuum-type experimental device characterized in that the measuring device has a sample inlet that is selectively sealed by the stage unit and communicates with the work space section through the sample inlet.

4. In paragraph 1 or paragraph 3, The above glove box has a door for introducing the sample, and after the sample is introduced into the working space through the door, the working space is maintained in a vacuum; The above stage unit is a vacuum-type experimental device characterized in that it opens the sample inlet in a vacuum state of the glove box.

5. In paragraph 4, The above stage unit is located at the lower side of the sample inlet, and includes an inlet opening / closing guide part that moves linearly back and forth; An opening / closing block unit that is coupled to and moves in response to the sample inlet opening / closing guide unit and selectively opens / closes the sample inlet; and A vacuum-type experimental device characterized by including a sample settling module provided in the opening / closing block section so that the sample is introduced into the interior of the measuring device through the sample inlet, and in which the sample is settling.

6. In paragraph 5, The above-mentioned opening / closing guide part comprises an opening / closing guide rail part coupled to the measuring device; and A vacuum-type experimental device characterized by including a movable plate that is movably provided on the opening / closing guide rail section and to which the opening / closing block section is coupled.

7. In paragraph 5, The above sample settling module comprises: a sample tray on which the sample is settling; and A vacuum-type experimental device characterized by including a stage position adjustment unit provided in the opening / closing block unit so that the sample tray is combined and changes the position of the sample tray.

8. In paragraph 7, A vacuum-type experimental device characterized in that the stage position control unit moves the sample tray back and forth, left and right, up and down, or rotates the sample tray.

9. In paragraph 7, The stage position adjustment unit comprises a first sample position driving unit that is provided so that the sample tray can rotate and moves the sample tray reciprocally in the X-axis direction; A second sample position driving unit coupled to the first sample position driving unit and reciprocating the first sample position driving unit in the Y-axis direction; and A vacuum-type experimental device characterized in that it includes a third sample position driving unit to which the second sample position driving unit is coupled and which reciprocates the second sample position driving unit in the Z-axis direction.

10. In paragraph 9, A vacuum-type experimental device characterized in that the stage position control unit further includes a fourth sample position driving unit provided in the first sample position driving unit to rotate the sample tray.

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