Flexible metal film laminate structure for human body and manufacturing method therefor

Abstract

A flexible metal film laminate structure for a human body, according to an embodiment, comprises: an insulating film including a liquid crystal polymer; and a metal film laminated on at least one surface of the insulating film, wherein the metal film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), and is in direct contact with the insulating film.

Description

Flexible metal film laminated structure for human body and method for manufacturing the same

[0001] The present invention relates to a flexible metal film laminate structure, and more particularly to a flexible metal film laminate structure for the human body and a method for manufacturing the same.

[0002] In general, liquid crystal polymer films (LCP films) are widely used as films for circuit boards because they have excellent heat resistance, mechanical strength, and electrical properties.

[0003] In addition, a flexible metal film laminate structure having a liquid crystal polymer film bonded thereto is provided by bonding a copper (Cu) layer to at least one surface of a liquid crystal polymer film. For example, a single-sided flexible metal film laminate structure having a copper layer bonded to one surface of a liquid crystal polymer film, or a double-sided flexible metal film laminate structure having a copper layer bonded to both surfaces of a liquid crystal polymer film are commercially available.

[0004] However, it is difficult to manufacture a human body electrode structure using the cross-sectional flexible metal film laminate structure and the double-sided flexible metal film laminate structure described above.

[0005] That is, a metal layer containing copper is laminated in a general flexible metal film laminate structure. At this time, it is difficult for a flexible metal film laminate structure containing copper to satisfy the resistance value required for a human body electrode structure.

[0006] Therefore, conventionally, an additional metal layer containing gold (Au) is formed on a flexible metal film laminate structure in which a metal layer containing copper is laminated. However, when forming an additional metal layer containing gold on a metal layer containing copper, there is a problem in that it is difficult to ensure a uniform thickness of the additional metal layer. This causes a problem in that the electrical reliability of the electrode structure is reduced. For example, a human body electrode structure includes a plurality of fine electrode lines, and when forming the above-described additional metal layer, there is a limit to miniaturizing the plurality of electrode lines, and furthermore, there is a problem in that the plurality of electrode lines are electrically short-circuited or opened with each other.

[0007] In addition, conventionally, a metal layer containing copper is removed from a flexible metal film laminate structure to form a metal layer containing gold directly on a liquid crystal polymer film. In this case, there are problems in that the process for manufacturing a human body electrode structure becomes complicated, the process time increases, the process cost increases, and the product yield decreases.

[0008] Accordingly, a new flexible metal film laminate structure suitable for manufacturing human body electrode structures is required.

[0009] The embodiment provides a flexible metal film laminate structure suitable for manufacturing a human body electrode structure and a method for manufacturing the same.

[0010] The technical tasks to be achieved in the proposed embodiment are not limited to the technical tasks mentioned above, and other technical tasks not mentioned can be clearly understood by a person having ordinary skill in the technical field to which the proposed embodiment belongs from the description below.

[0011] A flexible metal film laminate structure for human use according to an embodiment includes an insulating film including a liquid crystal polymer, and a metal film laminated on at least one surface of the insulating film, wherein the metal film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film.

[0012] Additionally, the metal film has a thickness of 3 μm to 20 μm.

[0013] Additionally, the insulating film has a thickness of 50 μm to 100 μm.

[0014] In addition, the metal film includes a first metal film laminated on the upper surface of the insulating film, and a second metal film laminated on the lower surface of the insulating film, and the first metal film and the second metal film include gold (Au).

[0015] Additionally, the metal film has a resistance of 0.8 Ω to 1.2 Ω in a unit area of ​​510 mm*420 mm.

[0016] Additionally, the metal film has a 10-point average roughness (Rz) of 0.1 ㎛ or less.

[0017] In addition, the insulating film and the metal film have a resistance of 0.6 kgf / cm at room temperature of 25℃ based on a unit area of ​​510mm*420mm. 2 It has the above adhesion.

[0018] Meanwhile, a method for manufacturing a flexible metal film laminate structure for human use according to an embodiment includes the steps of: arranging an insulating film and a metal film on at least one surface of the insulating film; and the step of providing heat and pressure to the insulating film and the metal film to manufacture a flexible metal film laminate structure in which the metal film is laminated on at least one surface of the insulating film, wherein the metal film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film, and the metal film has a thickness of 3 μm to 20 μm, and the insulating film has a thickness of 50 μm to 100 μm.

[0019] Meanwhile, a method for manufacturing a human electrode structure according to an embodiment includes a step of preparing the manufactured flexible metal film laminate structure; and a step of forming an electrode pattern including a plurality of electrode lines by laser processing or wet etching a metal film of the prepared flexible metal film laminate structure.

[0020] The embodiment provides a flexible metal film laminate structure including an insulating film and a metal film laminated on at least one surface of the insulating film. In this case, the metal film includes a metal material suitable for the human body and may further have a certain level of resistance value and adhesion so as to be usable for the human body.

[0021] Through this, the embodiment can manufacture a human electrode structure using a flexible metal film laminate structure, thereby simplifying the process for manufacturing the human electrode structure, reducing the process time, and improving the product yield accordingly.

[0022] In particular, the embodiment can omit the process of removing a metal layer laminated on a liquid crystal polymer film according to the prior art or plating an additional metal layer on a metal layer laminated on a liquid crystal polymer film. Accordingly, a novel flexible metal film laminate structure suitable for manufacturing a human body electrode structure can be provided.

[0023] Additionally, the metal film in the flexible metal film laminate structure of the embodiment may have a resistance value in the range of 0.8 Ω to 1.2 Ω. Accordingly, the embodiment can manufacture a human body electrode structure using the flexible metal film laminate structure, thereby enabling more accurate detection of human body signals within the human body.

[0024] In addition, the insulating film and metal film of the flexible metal film laminate structure have a strength of 0.6 kgf / cm at room temperature of 25℃. 2 The above adhesion strength (e.g., peel strength, peel test) can be achieved. Therefore, the embodiment can easily manufacture a human electrode structure using a flexible metal film laminate structure, thereby providing an electrode structure that can operate stably within the human body while having improved electrical reliability and / or physical reliability.

[0025] FIG. 1 is a schematic diagram illustrating a manufacturing process of a flexible metal film laminate structure according to a first embodiment.

[0026] FIG. 2 is a drawing schematically illustrating a manufacturing process of a flexible metal film laminate structure according to a second embodiment.

[0027] FIG. 3 and FIG. 4 are schematic drawings illustrating a manufacturing process of a flexible metal film laminate structure according to a third embodiment.

[0028] FIG. 5 is a schematic drawing of a flexible metal film laminate structure according to an embodiment.

[0029] FIG. 6 is a drawing showing an electrode structure manufactured using a flexible metal film laminate structure according to an embodiment.

[0030] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. However, the technical concept of the present invention is not limited to the described embodiments, but may be implemented in various different forms. Within the scope of the technical concept of the present invention, one or more of the components of the embodiments may be selectively combined or substituted for use.

[0031] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0032] In addition, the terms used in the embodiments of the present invention are for the purpose of describing the embodiments and are not intended to limit the present invention. In this specification, the singular may also include the plural unless specifically stated in the phrase, and when it is described as “and (and) at least one (or more) of B, C,” it may include one or more of all combinations that can be combined with A, B, and C.

[0033] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0034] And, when a component is described as being 'connected', 'coupled' or 'connected' to another component, it may include not only cases where the component is directly connected, coupled or connected to the other component, but also cases where the component is 'connected', 'coupled' or 'connected' by another component between the component and the other component.

[0035] Additionally, when it is described as being formed or disposed "above or below" each component, above or below includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or disposed between the two components.

[0036] Additionally, when expressed as “upper or lower,” it can include the meaning of not only the upward direction but also the downward direction based on one component.

[0037]

[0038] Hereinafter, a flexible metal film laminate structure and a manufacturing process thereof according to an embodiment will be described with reference to the attached drawings.

[0039] FIG. 1 is a drawing schematically illustrating a manufacturing process of a flexible metal film laminate structure according to a first embodiment, FIG. 2 is a drawing schematically illustrating a manufacturing process of a flexible metal film laminate structure according to a second embodiment, FIGS. 3 and 4 are drawings schematically illustrating a manufacturing process of a flexible metal film laminate structure according to a third embodiment, FIG. 5 is a drawing schematically illustrating a flexible metal film laminate structure according to an embodiment, and FIG. 6 is a drawing showing an electrode structure manufactured using a flexible metal film laminate structure according to an embodiment.

[0040] Referring to FIG. 1, according to the first embodiment, a flexible metal film laminate structure (60) can be manufactured through a thermal compression lamination method using a roller. In particular, the flexible metal film laminate structure (60) can be a single-sided flexible metal film laminate structure in which a metal film (50) is laminated on one surface of an insulating film (40).

[0041] In the first embodiment, a thermal compression process using a roller can be continuously performed on one side of an insulating film (40) to form a metal film (50), and a flexible metal film laminate structure (60) is manufactured through this thermal compression process.

[0042] The insulating film (40) includes an insulating material suitable for the human body. In addition, the insulating film (40) has flexibility to ensure adhesion with the metal film (50). Preferably, the insulating film (40) may include a liquid crystal polymer (LCP). For example, the liquid crystal polymer may include any one of a liquid crystal polymer including ethylene terephthalate and parahydroxybenzoic acid, a liquid crystal polymer including phenol and phthalic acid and parahydroxybenzoic acid, and a liquid crystal polymer including 6-hydroxy-2-naphthoic acid and parahydroxybenzoic acid.

[0043] The thickness of the insulating film (40) may be 25 µm to 100 µm. Preferably, the thickness of the insulating film (40) may be 35 µm to 100 µm. More preferably, the thickness of the insulating film (40) may be 50 µm to 100 µm. If the thickness of the insulating film (40) is less than 25 µm, it may be difficult to stably laminate the metal film (50) on the insulating film (40), and the processability in the process of laminating the metal film (50) may be degraded. If the thickness of the insulating film (40) exceeds 100 µm, it may be difficult to use it to manufacture an electrode structure suitable for the human body. For example, if the thickness of the insulating film (40) exceeds 100 µm, the thickness of the human electrode structure manufactured using the same increases, which may cause discomfort or rejection to the user. Therefore, in order to solve the above-described problem, it is more preferable that the thickness of the insulating film (40) be 50 µm to 100 µm.

[0044] The metal film (50) constitutes a metal layer of a flexible metal film laminate structure (60). The metal film (50) may include a metal material suitable for the human body. Preferably, the metal film (50) may include at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag). More preferably, the metal film (50) may include gold (Au).

[0045] The thickness of the metal film (50) may be 1 µm to 20 µm. Preferably, the thickness of the metal film (50) may be 2 µm to 20 µm. More preferably, the thickness of the metal film (50) may be 3 µm to 20 µm. If the thickness of the metal film (50) is less than 1 µm, the processability in the process of manufacturing the electrode structure using the flexible metal film laminate structure (60) may be degraded. For example, the electrode structure may be formed by etching the metal film (50) of the flexible metal film laminate structure (60). At this time, if the thickness of the metal film (50) is less than 1 µm, the processability in the etching process may be degraded, and thus, electrical reliability problems such as electrical open of the electrode line of the electrode structure may occur. In addition, if the thickness of the metal film (50) exceeds 20 µm, the processability in the process of forming the electrode line of the electrode structure may be degraded. For example, if the thickness of the metal film (50) exceeds 20 μm, electrical reliability issues such as electrical short-circuiting may occur when the electrode lines of the electrode structure are electrically connected to each other. Therefore, in order to solve the above-described problem, it is more preferable that the metal film (50) have a thickness of 3 μm to 20 μm.

[0046] In addition, the embodiment includes a drawing unit (10), a heat-pressing unit (20), and a winding unit (30), and by using these, a flexible metal film laminate structure (60) in which an insulating film (40) and a metal film (50) are heat-pressed can be manufactured.

[0047] The withdrawal section (10) includes a first withdrawal roller (11) and a second withdrawal roller (12).

[0048] The first pull-out roller (11) can store the insulating film (40) and supply the stored insulating film (40). For example, the insulating film (40) can be wound around the first pull-out roller (11) in a roll shape, and as the manufacturing process of the flexible metal film laminate structure (60) progresses, it can be pulled out from the first pull-out roller (11) and supplied to the heat pressing unit (20).

[0049] The second extraction roller (12) can store the metal film (50) and supply the stored metal film (50). For example, the metal film (50) can be wound around the second extraction roller (12) in a roll shape, and as the manufacturing process of the flexible metal film laminate structure (60) progresses, it can be extracted from the second extraction roller (12) and supplied to the heat pressing unit (20) together with the insulating film (40).

[0050] The thermal compression unit (20) may include a plurality of thermal compression drums. For example, the thermal compression unit (20) may include a first thermal compression drum (21) and a second thermal compression drum (22).

[0051] The first thermal compression drum (21) and the second thermal compression drum (22) can be spaced apart from each other with the insulating film (40) and the metal film (50) pulled out from the pull-out portion (10) interposed therebetween. The first thermal compression drum (21) and the second thermal compression drum (22) can provide heat and pressure to the insulating film (40) and the metal film (50) pulled out from the first pull-out roller (11) and the second pull-out roller (12), respectively. For example, the first thermal compression drum (21) and the second thermal compression drum (22) can thermally compress the insulating film (40) and the metal film (50), so that the metal film (50) is laminated on the insulating film (40).

[0052] The winding unit (30) can recover the flexible metal film laminate structure (60) that has been thermally compressed through the thermal compression unit (20). For example, the winding unit (30) includes a winding roller, and thus can wind the flexible metal film laminate structure (60) that has been thermally compressed in the thermal compression unit (20) into a roll shape.

[0053] Through this, a flexible metal film laminate structure (60) in which a metal film (50) is laminated on one side of an insulating film (40) can be manufactured using the extraction section (10), the heat compression section (20), and the winding section (30) according to the first embodiment.

[0054] Meanwhile, according to the second embodiment of FIG. 2, the flexible metal film laminate structure (60) may be a double-sided flexible metal film laminate structure.

[0055] Additionally, the metal film (50) can be provided on both sides of the insulating film (40) with the insulating film (40) interposed therebetween.

[0056] For example, the withdrawal portion (10) may include a first withdrawal roller (11), a second withdrawal roller (12), and a third withdrawal roller (13).

[0057] An insulating film (40) is wound around the first pull-out roller (11), and accordingly, the first pull-out roller (11) can pull out the insulating film (40) and supply it to the heat pressing unit (20).

[0058] The second pull-out roller (12) has a first metal film (50A) wound around it, and accordingly, the second pull-out roller (12) can supply the first metal film (50A) to the heat pressing unit (20).

[0059] A second metal film (50B) is wound around the third pull-out roller (13), and accordingly, the third pull-out roller (13) can supply the second metal film (50B) to the heat pressing unit (20).

[0060] Accordingly, the insulating film (40), the first metal film (50A) disposed on one surface of the insulating film (40), and the second metal film (50B) disposed on the other surface of the insulating film (40) can be continuously supplied to the heat pressing unit (20) through the first pull-out roller (11), the second pull-out roller (12), and the third pull-out roller (13).

[0061] And, the first thermal compression drum (21) and the second thermal compression drum (22) of the thermal compression unit (20) can be spaced apart from each other with the insulating film (40), the first metal film (50A), and the second metal film (50B) pulled out from the pull-out unit (10) therebetween. The first thermal compression drum (21) and the second thermal compression drum (22) can provide heat and pressure to the insulating film (40), the first metal film (50A), and the second metal film (50B) pulled out from the first pull-out roller (11), the second pull-out roller (12), and the third pull-out roller (13), respectively. For example, the first thermal compression drum (21) and the second thermal compression drum (22) can thermally compress the insulating film (40), the first metal film (50A), and the second metal film (50B), so that the first metal film (50A) and the second metal film (50B) are laminated on both sides of the insulating film (40), respectively.

[0062] The winding unit (30) can recover the flexible metal film laminate structure (60) that has been thermally compressed through the thermal compression unit (20). Through this, using the extraction unit (10), thermal compression unit (20), and winding unit (30) according to the second embodiment, a flexible metal film laminate structure (60) in which a first metal film (50A) and a second metal film (50B) are laminated on both sides of an insulating film (40) can be manufactured.

[0063] Meanwhile, a flexible metal film laminate structure can be manufactured using a thermal compression method using a film cutting process, rather than a thermal compression method using rollers and drums. To this end, in the third embodiment, a flexible metal film laminate structure can be manufactured through a first process of performing a film cutting process, and a second process of applying heat and pressure to vertically stack the cut films and thermally compress them.

[0064] Referring to FIG. 3, in order to manufacture a flexible metal film laminate structure, a process of cutting films according to a set standard can be performed.

[0065] For example, referring to (a) of FIG. 3, the embodiment may perform a process of cutting a metal film (110) according to a predetermined standard. At this time, the standard may be determined based on a product manufactured using the flexible metal film laminate structure of the embodiment. Preferably, the flexible metal film laminate structure of the embodiment may be used to manufacture a human body electrode structure. Accordingly, the first direction width and the second direction width of the metal film (50) may each be 500 mm to 530 mm.

[0066] In addition, referring to (b) of FIG. 3, the embodiment may perform a process of cutting the insulating film (120) according to a set standard. At this time, the standard of the insulating film (120) may be determined based on a product manufactured using the flexible metal film laminate structure of the embodiment, corresponding to the standard of the metal film (110). Preferably, the flexible metal film laminate structure of the embodiment may be used to manufacture a human body electrode structure, and accordingly, each of the first direction width and the second direction width of the insulating film (120) may be 500 mm to 530 mm.

[0067] In addition, referring to (c) of FIG. 3, the embodiment can proceed with a process of cutting a protective film (130). At this time, the protective film (130) can be used to manufacture a plurality of flexible metal film laminate structures at once.

[0068] For example, the embodiment may perform a thermal compression process while alternately arranging insulating films (120) and metal films (110) in a vertical direction to manufacture a plurality of flexible metal film laminate structures at once. At this time, the protective film (130) may prevent the plurality of flexible metal film laminate structures from adhering to each other when the thermal compression process is performed while alternately arranging the insulating films (120) and the metal films (110). At this time, the size of the protective film (130) is not significantly restricted. However, in order for the insulating film (120) and the metal film (110) to be stably thermally compressed, the size of the protective film (130) may be greater than or equal to the size of the metal film (110) and the insulating film (120). At this time, the protective film (130) may include a material that does not adhere to the metal film (110) and the insulating film (120) during the thermal compression process. For example, the protective film (130) may be, but is not limited to, Teflon (PTFE).

[0069] Thereafter, referring to FIG. 4, the embodiment can perform a thermal compression process while vertically stacking an insulating film (120), a metal film (110), and a protective film (130).

[0070] For example, referring to (a) of FIG. 4, in order to manufacture a cross-sectional flexible metal film laminate structure, an embodiment may alternately laminate a protective film (130), an insulating film (120), and a metal film (110) along a vertical direction and perform a thermal compression process. Through this, the embodiment may perform thermal compression of the insulating film (120) and the metal film (110) disposed between a plurality of protective films (130), thereby manufacturing a cross-sectional flexible metal film laminate structure. At this time, a protective film (130) is disposed between each of the plurality of flexible metal film laminate structures laminated along the vertical direction, thereby preventing the plurality of flexible metal film laminate structures from adhering to each other.

[0071] In addition, referring to (b) of FIG. 4, in an embodiment, a double-sided flexible metal film laminate structure can be manufactured by performing a thermal compression process in a state where a plurality of insulating films (120) and a plurality of metal films (110) are laminated between a plurality of protective films (130). That is, in the area between the plurality of protective films (130), a plurality of flexible metal film laminate structures in which a metal film (110) is disposed on each of both sides of an insulating film (120) can be laminated in a vertical direction, and thus a plurality of flexible metal film laminate structures can be thermally compressed at one time. At this time, in the case of a flexible metal film laminate structure having a structure in which a metal film (110) is laminated on both sides of an insulating film (120), even if a thermal compression process is performed, the metal films (110) do not adhere to each other, and thus a protective film (130) may not be disposed between the plurality of flexible metal film laminate structures.

[0072] Through this, the embodiment can manufacture a flexible metal film laminate structure.

[0073] Meanwhile, the flexible metal film laminate structure manufactured with reference to FIGS. 1 to 4 may be as shown in FIG. 5.

[0074] Fig. 5 (a) may be a perspective view of a flexible metal film laminate structure cut to a specific standard, and Fig. 5 (b) may be a cross-sectional view of the flexible metal film laminate structure cut along line A-A' of Fig. 5 (a).

[0075] Referring to (a) and (b) of FIG. 5, metal films (220, 230) may be laminated on both sides of the insulating film (210). For example, the flexible metal film laminate structure may include an insulating film (210), a first metal film (220) laminated on the upper surface of the insulating film (210), and a second metal film (230) laminated on the lower surface of the insulating film (210). However, the embodiment is not limited thereto, and the flexible metal film laminate structure may be a single-sided flexible metal film laminate structure, and thus, the metal film may be laminated on only one of the upper and lower surfaces of the insulating film (210).

[0076] At this time, the flexible metal film laminate structure may have specific specifications. The flexible metal film laminate structure may have a width (W1) in the first direction of 500 mm to 530 mm, and a width (W2) in the second direction of 500 mm to 530 mm.

[0077] Additionally, as described above, the insulating film (210) may include a liquid crystal polymer (LCP) and preferably have a thickness of 50 μm to 100 μm.

[0078] Additionally, the metal film (220, 230) may include at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), preferably may include gold (Au), and may have a thickness of 3 μm to 20 μm.

[0079] At this time, the flexible metal film laminate structure may have specific characteristic values ​​for manufacturing a human body electrode structure within the above-described width (W1, W2) and thickness conditions. For example, the flexible metal film laminate structure may have a resistance value and adhesion that make it suitable for the human body.

[0080] Preferably, the flexible metal film laminate structure may have a resistance value of 0.8 Ω to 1.2 Ω per unit area. That is, the metal film (220, 230) of the flexible metal film laminate structure may have a resistance value in the range of 0.8 Ω to 1.2 Ω per unit area. At this time, the unit area may be 510 mm*420 mm. That is, the resistance value of the metal film (220, 230) of the flexible metal film laminate structure in the unit area of ​​510 mm*420 mm may be 0.8 Ω to 1.2 Ω.

[0081] Through this, the embodiment enables the flexible metal film laminate structure to be used to manufacture a human body electrode structure using a metal film (220, 230) laminated on at least one surface of an insulating film (210).

[0082] That is, the human electrode structure must be able to transmit signals to a specific region of the human body after being inserted into the human body, thereby enabling accurate detection of human body signals. In particular, the human electrode structure must be able to transmit signals to a specific region of the brain after being inserted into the shoulder or chest of the human body, thereby enabling detection of brain wave signals. To this end, the length of the electrode line in the electrode structure may be further lengthened to detect stable human body signals. Accordingly, the metal film (220, 230) of the flexible metal film laminate structure applied to the human body electrode structure is required to have a resistance value of 400 Ω or less, 350 Ω or less, 300 Ω or less, 200 Ω or less, or 100 Ω or less at a certain length.

[0083] Accordingly, the metal film (220, 230) of the flexible metal film laminate structure of the embodiment can have a resistance value in the range of 0.8 Ω to 1.2 Ω, so as to be used in the manufacture of a human body electrode structure. Through this, the embodiment can manufacture a human body electrode structure using the flexible metal film laminate structure, thereby enabling more accurate detection of human body signals within the human body.

[0084] In addition, the flexible metal film laminate structure may have a certain level of adhesion or higher. Here, the adhesion may mean the adhesion between the insulating film (210) and the metal film (220, 230) of the flexible metal film laminate structure. Preferably, the insulating film (210) and the metal film (220, 230) have a adhesion of 0.6 kgf / cm at 25°C, which is room temperature, based on a specific unit area. 2 The above adhesion strength (e.g., peel strength, peel test) can be achieved. Here, the unit area can be 510 mm x 420 mm. That is, the flexible metal film laminate structure in a unit area of ​​510 mm x 420 mm can have a peel strength of 0.6 kgf / cm at room temperature of 25℃. 2 It can have the above adhesion strength (e.g. peel strength, peel test).

[0085] That is, the flexible metal film laminate structure is used to manufacture a human electrode structure to be inserted into the human body, and therefore, it must have a certain level of adhesion to ensure stable operation within the human body. Therefore, in the embodiment, the insulating film (210) and the metal film (220, 230) of the flexible metal film laminate structure have a adhesion strength of 0.6 kgf / cm at a room temperature of 25°C. 2 It is possible to have the above adhesion strength (e.g., peel strength, peel test) and thereby enable use in manufacturing a human body electrode structure, while enabling stable operation within the human body.

[0086] In addition, the metal film (220, 230) of the flexible metal film laminate structure may have a 10-point average roughness (Rz) of 0.1 μm or less. If the metal film (220, 230) of the flexible metal film laminate structure has a 10-point average roughness (Rz) exceeding 0.1 μm, when used as an electrode structure used in the human body, signal loss may increase, and thus the electrical reliability of the electrode structure may deteriorate.

[0087] Meanwhile, the flexible metal film laminate structure manufactured as described above can be used to manufacture a human body electrode structure.

[0088] By way of example, the embodiment can form an electrode pattern of a human electrode structure by removing a metal film (220, 230) of a flexible metal film laminate structure by etching. At this time, the metal film (220, 230) can be disposed only on one side of an insulating film (210), or can be disposed on both sides of the insulating film (210). Hereinafter, a human electrode structure manufactured using a single-sided flexible metal film laminate structure in which the metal film (220, 230) is disposed only on one side of the insulating film (210) will be described.

[0089] Referring to FIG. 6, the human electrode structure of the embodiment can be manufactured using the flexible metal film laminate structure described through FIGS. 1 to 5. For example, the flexible metal film laminate structure includes an insulating film and a metal film disposed on one surface of the insulating film. In addition, the embodiment can form an electrode pattern of the electrode structure using the metal film disposed on one surface of the insulating film.

[0090] That is, the electrode structure includes an insulating film (310) and an electrode pattern (EL) disposed on the insulating film (310). The electrode pattern (EL) can be manufactured using a metal film laminated on the insulating film (310). For example, the electrode pattern (EL) can be formed using at least one of a Laser Direct Patterning (LDP) method or a wet etching method using a dry film resist and a photoresist.

[0091] The electrode pattern (EL) may include multiple electrode lines. For example, the electrode pattern (EL) may detect human body signals through multiple channels. In this case, the electrode pattern (EL) may be provided as four channels, but is not limited thereto.

[0092] The electrode pattern (EL) may include first to fourth electrode patterns (320, 330, 340, 350). The first to fourth electrode patterns (320, 330, 340, 350) may be spaced apart from each other and arranged on the insulating film (310).

[0093] The first electrode pattern (320) includes a detection area (321) for detecting a human body signal and a signal transmission area (322) that extends from the detection area (321) and transmits the detected signal. At this time, the area of ​​the detection area (321) may be larger than the area of ​​the signal transmission area (322), thereby enabling a more stable and accurate signal to be detected through the first electrode pattern (320).

[0094] Furthermore, each of the second to fourth electrode patterns (330, 340, 350) may include a detection area and a signal transmission area corresponding to the first electrode pattern (320).

[0095] The embodiment provides a flexible metal film laminate structure including an insulating film and a metal film laminated on at least one surface of the insulating film. In this case, the metal film includes a metal material suitable for the human body and may further have a certain level of resistance value and adhesion so as to be usable for the human body.

[0096] Through this, the embodiment can manufacture a human electrode structure using a flexible metal film laminate structure, thereby simplifying the process for manufacturing the human electrode structure, reducing the process time, and improving the product yield accordingly.

[0097] In particular, the embodiment can omit the process of removing a metal layer laminated on a liquid crystal polymer film according to the prior art or plating an additional metal layer on a metal layer laminated on a liquid crystal polymer film. Accordingly, a novel flexible metal film laminate structure suitable for manufacturing a human body electrode structure can be provided.

[0098] Additionally, the metal film in the flexible metal film laminate structure of the embodiment may have a resistance value in the range of 0.8 Ω to 1.2 Ω. Accordingly, the embodiment can manufacture a human body electrode structure using the flexible metal film laminate structure, thereby enabling more accurate detection of human body signals within the human body.

[0099] In addition, the insulating film and metal film of the flexible metal film laminate structure have a strength of 0.6 kgf / cm at room temperature of 25℃. 2 The above adhesion strength (e.g., peel strength, peel test) can be achieved. Therefore, the embodiment can easily manufacture a human electrode structure using a flexible metal film laminate structure, thereby providing an electrode structure that can operate stably within the human body while having improved electrical reliability and / or physical reliability.

[0100] The features, structures, effects, etc. described in the above-described embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to just one embodiment. Furthermore, the features, structures, effects, etc. exemplified in each embodiment can be combined or modified in other embodiments by those skilled in the art to which the embodiments pertain. Therefore, the contents related to such combinations and modifications should be construed as being included within the scope of the present invention.

[0101] In addition, although the above description focuses on embodiments, these are merely examples and do not limit the present invention. Those skilled in the art to which the present invention pertains will appreciate that various modifications and applications not exemplified above are possible without departing from the essential characteristics of the present embodiment. For example, each component specifically shown in the embodiments can be modified and implemented. In addition, differences related to such modifications and applications should be interpreted as being included within the scope of the present invention defined in the appended claims.

Claims

1. An insulating film containing a liquid crystal polymer, and Including a metal film laminated on at least one surface of the insulating film, A flexible metal film laminate structure for human body, wherein the metal film comprises at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film.

2. In paragraph 1, The above metal film is a flexible metal film laminate structure for human body, having a thickness of 3㎛ to 20㎛.

3. In paragraph 1, The above insulating film is a flexible metal film laminate structure for human body, having a thickness of 50㎛ to 100㎛.

4. In paragraph 1, The above metal film, A first metal film laminated on the upper surface of the above insulating film, and Including a second metal film laminated on the lower surface of the above insulating film, A flexible metal film laminate structure for a human body, wherein the first metal film and the second metal film contain gold (Au).

5. In any one of paragraphs 1 to 4, The above metal film is a flexible metal film laminate structure for human body, having a resistance of 0.8 Ω to 1.2 Ω in a unit area of ​​510 mm*420 mm.

6. In any one of paragraphs 1 to 4, The above metal film is a flexible metal film laminate structure for human body, having a 10-point average roughness (Rz) of 0.1㎛ or less.

7. In any one of paragraphs 1 to 4, The above insulating film and the above metal film have a resistance of 0.6 kgf / cm at room temperature of 25℃ based on a unit area of ​​510mm*420mm. 2 A flexible metal film laminate structure having the above adhesion strength 8. A step of placing an insulating film and a metal film on at least one side of the insulating film; and A step of providing heat and pressure to the insulating film and the metal film to manufacture a flexible metal film laminate structure in which the metal film is laminated on at least one surface of the insulating film, The metal film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film, The above metal film has a thickness of 3㎛ to 20㎛, A method for manufacturing a flexible metal film laminate structure for human body, wherein the insulating film has a thickness of 50 ㎛ to 100 ㎛.

9. In paragraph 8, A method for manufacturing a flexible metal film laminate structure for the human body, wherein the metal film has a resistance of 0.8 Ω to 1.2 Ω in a unit area of ​​510 mm*420 mm.

10. In paragraph 8, The above insulating film and the above metal film have a resistance of 0.6 kgf / cm at room temperature of 25℃ based on a unit area of ​​510mm*420mm. 2 A method for manufacturing a flexible metal film laminate structure for human body having the above adhesive strength.

Images