Pressure controller structure for pressure regulator

Abstract

The present invention relates to a pressure controller structure for a pressure regulator, which allows vertical movement and support of a valve stem in the pressure regulator to be implemented through magnetic force, and comprises: a main body having formed therein a chamber having a certain space, a vertical recess extending vertically to be in communication with the chamber, an inlet having an inlet flow path and an outlet having an outlet flow path, the inlet flow path and the outlet flow path being respectively in communication with the chamber and the vertical recess; a valve seat which is coupled to the front end of the vertical recess of the main body, on the chamber, and has an inlet recess that is in communication with the chamber and the vertical recess; a valve stem comprising a vertical movement shaft which comes into contact with a diaphragm after passing through the valve seat via the inlet recess, a tapered portion which is formed on one side of the vertical movement shaft and selectively opens / closes the inlet recess, and a vertical movement rod which extends from the tapered portion and has provided therein a vertical movement magnet to be moved vertically on the vertical recess by magnetic force; and a pushing magnet which is arranged in the main body and pushes the vertical movement rod with magnetic force.

Description

Pressure control unit structure for pressure regulator

[0001] The present invention relates to a pressure control unit structure for a pressure regulator, and more particularly, to a pressure control unit structure for a pressure regulator that enables the raising and lowering and supporting of a pressure regulator valve stem to be implemented by magnetic force.

[0002] In general, a pressure regulator is used to supply the supply gas by maintaining or lowering the pressure suitable for use in gas-using equipment.

[0003] Here, an example of a conventional pressure regulator (100) will be briefly described with reference to FIG. 1. It includes a housing (120) having an adjustment handle (110) that is rotatably installed and has an adjustment screw (112) protruding from the center, a pressure member (123) that is screw-connected with the adjustment screw (112) and elastically protrudes the adjustment screw (112) toward the inside of the body (122), a pressure control unit (130) that is screw-connected with the body (122) and has a chamber (136) and a vertical groove (138) formed downwardly to communicate with the chamber (136) as a joint surface, an inlet (132) having a flow path (132a) communicating with the vertical groove (138) and an outlet (134) having a flow path (134a) communicating with the chamber (136), and a pressure control unit (130). At the bottom, a diaphragm (142) that moves according to the pressure state is installed so as to constantly control the pressure of the gas being introduced, and the pressure control unit (130) is provided with a valve seat (146) that is screw-connected to the upper part of a vertical groove (138) and has an inlet groove (146a) formed in the center, a valve stem (148) that is formed by a lifting shaft (148b) that is vertically connected through the valve seat (146) and a tapered portion (148a) that is connected to one side of the lifting shaft (148b) and selectively opens and closes the inlet groove (146a), and a spring (149) that elastically supports the valve stem (148).

[0004] The pressure regulator (100) configured as above pressurizes the pressurizing member (123) installed in the body (122) of the housing (120) in conjunction with the control handle (110) so as to control the pressure of the gas flowing in through the inlet (132) of the pressure control unit (130), thereby lowering the valve stem (148), so that the inlet groove (146a) of the valve seat (146), which was maintained in a sealed state by being fitted into the inlet groove (146a) of the valve seat (146), is opened by the lowering of the valve stem, so that the pressure and inlet amount of the gas can be discharged through the outlet (134) in a state where they are controlled to a selected pressure.

[0005] However, the pressure regulator above has the following problems:

[0006] The springs inside the control unit undergo continuous and repetitive contraction to adjust pressure, which creates the problem of generating microscopic particles during this contraction process. This is particularly true when pressure regulators are installed in semiconductor manufacturing processes, which typically require cleanroom environments. Furthermore, with semiconductors shrinking to 2.5 nanometers in size, the resulting particles are inevitably more damaging.

[0007] In addition, the spring must be installed in a state where the vertical groove and clearance are maintained for operation, and as a result, the elasticity of the spring supporting the valve stem is not constant, so the uprightness of the valve stem cannot be guaranteed, and the valve stem operates in a tilted state, causing uneven wear of the valve seat inlet hole and generating particles.

[0008] The present invention has been devised to solve the above problems and technical biases, and the purpose of the present invention is to provide a pressure control structure for a pressure regulator that can fundamentally block the generation of particles due to the spring and valve stem by eliminating the spring that supports the valve stem and improving the structure so that the valve stem can always be maintained in an upright state.

[0009] In order to achieve the above object, the pressure control unit structure for a pressure regulator of the present invention may include a main body having a chamber of a predetermined space, a vertical groove extending vertically to communicate with the chamber, an inlet having an inlet passage communicating with the chamber and the vertical groove, and an outlet having an outlet passage communicating with the chamber and the vertical groove, respectively; a valve seat coupled to the top of the vertical groove of the main body on the chamber, and having an inlet groove communicating with the chamber and the vertical groove; a valve stem comprising a lifting shaft penetrating the valve seat through the inlet groove and in contact with a diaphragm, a tapered portion formed on one side of the lifting shaft to selectively open and close the inlet groove, and a lifting rod extending from the tapered portion and having a lifting magnet provided on the inside to lift on the vertical groove by magnetic force; and a pushing magnet disposed on the main body to push the lifting rod by magnetic force.

[0010] At this time, the pushing magnet is preferably arranged adjacent to the vertical groove along the same line as the central axis of the vertical groove, and is preferably arranged facing the lifting magnet with the same polarity so that a mutual repulsive force can occur.

[0011] In addition, it is preferable that an upright guide groove be formed in the vertical groove by combining the lifting rod of the valve stem to guide upright lifting while aligning the central axis of the valve stem with the central axis of the vertical groove.

[0012] In addition, it is preferable that the main body further includes a plurality of sub-magnets radially arranged and spaced apart along the circumference of the lifting magnet.

[0013] Lastly, it is preferable that the above-mentioned lifting magnet, pushing magnet and sub-magnetic are fixed by a closing cap.

[0014] According to the pressure control unit structure for a pressure regulator of the present invention having the above configuration, a magnet is placed inside the valve stem, and the magnet inside the valve stem is supported on a vertical groove by the repulsive force of other magnets, thereby fundamentally blocking the generation of particles by a spring as in the past, and at the same time, the uprightness of the valve stem is guaranteed, thereby having an excellent effect of preventing uneven wear of the valve seat inlet groove.

[0015] Figure 1 is a cross-sectional view showing a conventional pressure regulator,

[0016] Figure 2 is a bottom perspective view showing the pressure control unit of the present invention installed in a pressure regulator.

[0017] Figure 3 is a cross-sectional view of Figure 2,

[0018] Figure 4 is an exploded perspective view of Figure 2 excluding the main body.

[0019] Figure 5 is an enlarged view of the magnetic portion of the configuration of the present invention.

[0020] Fig. 6 is a cross-sectional view showing the valve stem lowered in the state of Fig. 3.

[0021] FIG. 2 is a bottom perspective view showing a pressure control unit of the present invention installed in a pressure regulator, FIG. 3 is a cross-sectional view of a main part of FIG. 2, FIG. 4 is an exploded perspective view of FIG. 2 excluding the main body, FIG. 5 is an enlarged view of a main part showing a magnetic portion of the configuration of the present invention, and FIG. 6 is a cross-sectional view of a main part showing a state in which the valve stem is lowered in the state of FIG. 3.

[0022] As shown in FIGS. 2 to 6, the pressure control unit (200) for the pressure regulator (100) of the present invention has a structure including a main body (210) having a chamber (211) of a predetermined space, a vertical groove (212) extending vertically to communicate with the chamber (211), an inlet (213) having an inlet passage (213a) communicating with the chamber (211) and the vertical groove (212), and an outlet (214) having an outlet passage (214a); a valve seat (220) coupled to the tip of the vertical groove (212) of the main body (210) on the chamber (211) and having an inlet groove (221) communicating with the chamber (211) and the vertical groove (212); It may include a valve stem (220) comprising a lifting shaft (231) that penetrates the valve seat (220) through the inlet groove (221) and comes into contact with the diaphragm (142), a tapered portion (232) formed on one side of the lifting shaft (231) to selectively open and close the inlet groove (221), and a lifting rod (233) that extends from the tapered portion (232) and has a lifting magnet (234) provided on the inside to lift on the vertical groove (212) by magnetic force; and a pushing magnet (240) that is disposed on the main body (210) and pushes the lifting rod (233) by magnetic force.

[0023] Before the explanation, the characteristic of the present invention is that the valve stem (220) can be raised and lowered through a plurality of magnetic arrangements without applying a spring to support the valve stem (220) as in the past, thereby preventing the generation of particles.

[0024] The pressure control unit (200) of the present invention is arranged on the lower side of the housing (120) of the pressure regulator (100), and controls the supply of gas at a set pressure and the flow rate (flow rate) of the supplied gas according to the adjustment of the control handle (110) provided on the upper side of the pressure regulator (100) (see FIG. 1).

[0025] Since the configuration of the control knob (110), housing (120), and diaphragm (142) constituting the pressure regulator (100) has already been described in the prior art, only the structure of the pressure control unit (200) arranged below the housing (120) will be described below.

[0026] The pressure control unit (200) may include a main body (210), a valve seat (220), a valve stem (220), and a pushing magnet (240) as shown in FIGS. 2 to 5.

[0027] The main body (210) maintains the shape of a cylinder with a predetermined length so that the supplied gas can be discharged to the supply side at a set pressure and set flow rate.

[0028] In the drawing of the main body (210), a chamber (211) is formed in the upper part, which is sunken inward and has a predetermined space through which gas passes so that the supplied gas can be discharged.

[0029] In addition, at the center of the bottom surface of the chamber (211), a cylindrical vertical groove (212) is formed that extends vertically to a predetermined depth in a downward direction in the drawing in a state of being connected to the chamber (211) on the central axis of the main body (210) as shown in FIG. 3.

[0030] In addition, the main body (210) is formed with an inlet (213) and an outlet (214) to enable gas supply and discharge as shown in FIG. 3, and the inlet (213) is connected to the chamber (211) through an inlet passage (213a), and the outlet (214) is connected to the vertical groove (212) through an outlet passage (214a).

[0031] That is, the gas supplied through the inlet (213) flows into the chamber (211) through the inlet path (213a), flows through the chamber (211) into the vertical groove (212), and then passes through the connected outlet path (214a) and is discharged through the outlet (214).

[0032] The valve seat (220) is selectively blocked by the valve stem (220) described later so that the gas supplied to the chamber (211) through the inlet (213) can flow into the vertical groove (212), and is connected to the upper end of the vertical groove (212) in the drawing on the chamber (211) of the main body (210) in a spiral manner as shown in FIG. 3.

[0033] Inside the valve seat (220), an inlet groove (221) is formed which is connected to the vertical groove (212) at the lower side in the drawing, is connected to the chamber (211) at the upper side in the drawing, and is aligned with the central axis of the vertical groove (212).

[0034] That is, the inlet groove (221) of the valve seat (220) is selectively closed by the valve stem (220), thereby allowing gas to be selectively introduced into the vertical groove (212).

[0035] In addition, a sealing member (222) may be provided on the lower surface of the valve seat (220) to maintain airtightness between the inlet groove (221) and the vertical groove (212).

[0036] Here, the sealing member (222) may be made of elastic silicone or synthetic resin material.

[0037] Meanwhile, on the upper side of the valve seat (220), a thin film diaphragm (142) that is elastically deformed by a pressurizing member while sealing the chamber (211) is placed as shown in FIG. 3.

[0038] The valve stem (220) is supported by the magnetic force of the magnet so that the gas pressure and flow rate flowing into the vertical groove (212) can be selectively controlled, and may include an elevation shaft (231), a tapered portion (232), and an elevation rod (233) as shown in FIGS. 3 to 6.

[0039] The lifting shaft (231) has a cylindrical shape and maintains a predetermined length, and is positioned so that it penetrates the valve seat (220) and comes into contact with the bottom surface of the diaphragm (142) while being received in the inlet groove (221) of the valve seat (220) as shown in FIG. 3.

[0040] The tapered portion (232) is positioned at the lower end of the lifting shaft (231) in the drawing, and is formed so that the slope becomes wider as it goes downward from the lifting shaft (231), so as to selectively open and close the inlet groove (221) of the valve seat (220) according to the lowering or raising of the lifting shaft (231).

[0041] The lifting rod (233) is intended to enable stable lifting of the lifting shaft (231) and the tapered portion (232), and is extended downward in the drawing from the lower surface of the tapered portion (232) by a predetermined length.

[0042] As shown in FIGS. 3 and 6, a lifting magnet (234) is arranged on the inside of the lifting rod (233), and this lifting magnet allows the lifting rod (233) to be lifted up and down on the vertical groove (212) by the repulsive force of the magnetic force using the same polarity of the pushing magnet (240) described later.

[0043] That is, the lifting shaft (231) and the tapered portion (232) are raised and lowered through the lifting rod (233).

[0044] At this time, the lifting magnet (234) is accommodated and placed inside the fixing hole (233a) processed inside the lifting rod (233), and its position is fixed by the closing cap (G) that closes the fixing hole (233a).

[0045] Meanwhile, as shown in FIG. 3, an upright guide groove (215) having a predetermined depth can be formed on the bottom of the vertical groove (212) of the main body (210) so that the upright elevation of the valve stem (220) can be achieved while the central axis of the valve stem (220) can be aligned with the central axis of the vertical groove (212) by combining (accommodating) the upright rod (233) of the valve stem (220), as shown in FIG. 3.

[0046] That is, the upright guide groove (215) fundamentally prevents the valve stem (220) from tilting to one side on the vertical groove (212).

[0047] In this way, the tilting of the lifting rod (233) is prevented, allowing the inlet groove (221) and the tapered portion (232) to come into true contact, and at the same time, the lifting shaft (231) is also maintained in an upright state on the inlet groove (221).

[0048] The pushing magnet (240) pushes and supports the lifting magnet (234) of the lifting rod (233) with the repulsive force of magnetic force, thereby allowing the tapered portion (232) of the valve stem (220) to close the inlet groove (221) of the valve seat (220). As shown in FIGS. 3 to 5, it is arranged adjacent to the upright guide groove (215) at the bottom of the vertical groove (212) in the same line as the central axis of the vertical groove (212) on the inside of the main body (210).

[0049] At this time, the pushing magnet (240) is accommodated and placed inside the accommodation hole (H) processed inside the main body (210), and its position is fixed by the closing cap (G) that closes the accommodation hole (H).

[0050] In addition, it is preferable that the lifting magnet (234) and the pushing magnet (240) are arranged with the same polarity facing each other so that a mutual repulsive force can occur. This is to enable the valve stem (220) that has a relatively lifting function to be pushed upward in the drawing by the repulsive force in the direction of the arrow shown in the drawing by arranging them so that the N pole of the lifting magnet (234) faces downward in the drawing and the N pole of the pushing magnet (240) faces upward in the drawing, so that the inlet groove (221) of the valve seat (220) can be closed through the tapered portion (232).

[0051] In this case, since the valve stem (220) closes the inlet groove (221) of the valve seat (220) unless the control knob (110) is operated, the gas supplied through the inlet port (213) cannot flow into the vertical groove (212).

[0052] If gas supply is to be made, by operating the control knob (110) to press the diaphragm (142) in the downward direction as shown in the drawing, the lifting shaft (231) that is in contact with the diaphragm (142) descends, and in this process, the tapered portion (232) is linked together to open the inlet groove (221).

[0053] In this way, as the path connecting the inflow path (213a), the chamber (211), the inflow groove (221), and the outflow path (214a) is opened, the supplied gas is discharged to the intended use through the outflow port (214).

[0054] And, the magnetic force of the lifting magnet (234) and the pushing magnet (240) is sufficient to cause the tapered portion (232) of the valve stem (220) to close the inlet groove (221) of the valve seat (220) through the repulsive force generated.

[0055] Meanwhile, as shown in FIGS. 2 to 5, a plurality of sub-magnets (250) may be further arranged radially along the circumference of the lifting magnet (234) in a state spaced apart from the lifting magnet (234) in the main body (210).

[0056] At this time, it is preferable that the upper side of the drawing of the sub-magnetic (250) be arranged so that the N pole is the same polarity as the N pole of the lower side of the lifting magnet (234) as shown in FIG. 5. This is to ensure that the uprightness of the valve stem (220) can be more strongly maintained by ensuring that the magnetic repulsive force is directed toward the lifting rod (233) along the circumference of the valve stem (220) lifting rod (233) as shown by the arrow through the radial arrangement of the sub-magnetics (250).

[0057] Meanwhile, a plurality of radial receiving holes (H) are formed inside the main body (210) as shown in Fig. 2, and a sub-magnet (250) is placed and received inside each receiving hole (H), and the position of the sub-magnet (250) is fixed by a closing cap (G) that closes the receiving hole (H).

[0058] Hereinafter, the process of controlling gas using the pressure control unit (200) according to the present invention will be described with reference to the attached drawings.

[0059] First, by operating the control handle (110), the diaphragm (142) is pressed downward as shown by the arrow in FIG. 6, and the lifting shaft (231) in contact with the diaphragm (142) as shown in FIG. 3 is lowered as shown in FIG. 6 due to the lowering of the diaphragm (142).

[0060] At this time, the valve stem (220) is lowered in the downward direction in the drawing while being supported by the repulsive force of the lifting magnet (234) and the pushing magnet (240), and at this time, the lifting rod (233) is lowered while being guided by the upright guide groove (215), thereby maintaining the uprightness of the valve stem (220).

[0061] At the same time, the taper portion (232) opens the inlet groove (221) of the valve seat (220) in conjunction with the lowering of the valve stem (220).

[0062] When the inlet groove (221) of the valve seat (220) is opened, the gas waiting in the chamber (211) flows into the inlet groove (221) through the inlet port (213) as indicated by the arrow in Fig. 6, thereby being discharged to the intended use through the outlet port (214).

[0063] Afterwards, when the control knob (110) is operated in reverse order to release the pressure of the diaphragm (142), the diaphragm (142) returns to the initial position as shown in FIG. 3, and simultaneously with the return of the diaphragm (142), the contacted lifting shaft (231) rises by the repulsive force of the lifting magnet (234) and the pushing magnet (240), thereby closing the inlet groove (221) of the valve seat (220) by the tapered portion (232), thereby blocking the gas.

[0064] Here, the lifting magnet (234) and the pushing magnet (240) continuously support the valve stem (220) through the magnetic repulsive force even when the valve stem (220) has the inlet groove (221) open or closed.

[0065] As described so far, the pressure control structure of the present invention has an excellent effect of preventing uneven wear of the valve seat inlet groove by arranging a magnet inside the valve stem and allowing the magnet inside the valve stem to be supported on a vertical groove by the repulsive force of other magnets, thereby fundamentally blocking the generation of particles by a spring as in the prior art, and at the same time ensuring the uprightness of the valve stem.

Claims

1. In the structure of a pressure control unit (200) for a pressure regulator (100) that is arranged on the lower side of the housing (120) of the pressure regulator (100) so that the pressure and flow amount of gas can be controlled by adjusting the control handle (110), A main body (210) having a chamber (211) of a predetermined space, a vertical groove (212) extending vertically to communicate with the chamber (211), an inlet (213) having an inlet passage (213a) communicating with the chamber (211) and the vertical groove (212), and an outlet (214) having an outlet passage (214a) formed therein; A valve seat (220) coupled to the vertical groove (212) end of the main body (210) on the chamber (211) and having an inlet groove (221) formed therein that communicates with the chamber (211) and the vertical groove (212); A valve stem (220) comprising a lifting shaft (231) that penetrates the valve seat (220) through the inlet groove (221) and comes into contact with the diaphragm (142), a tapered portion (232) formed on one side of the lifting shaft (231) to selectively open and close the inlet groove (221), and a lifting rod (233) that extends from the tapered portion (232) and has a lifting magnet (234) provided on the inside to lift on the vertical groove (212) by magnetic force; and A pressure control unit structure for a pressure regulator, characterized in that it comprises a pushing magnet (240) disposed on the main body (210) and pushing the lifting rod (233) with magnetic force.

2. In paragraph 1, A pressure control unit structure for a pressure regulator, characterized in that the above pushing magnet (240) is arranged adjacent to the vertical groove (212) on the same line as the central axis of the vertical groove (212) and is arranged facing the lifting magnet (234) with the same polarity so that a mutual repulsive force can be generated.

3. In paragraph 1, A pressure control unit structure for a pressure regulator, characterized in that an upright guide groove (215) is formed in the vertical groove (212) to guide upright lifting while aligning the central axis of the valve stem (220) with the central axis of the vertical groove (212) by combining the lifting rod (233) of the valve stem (220).

4. In paragraph 1, A pressure control unit structure for a pressure regulator, characterized in that the main body (210) is further provided with a plurality of sub-magnets (250) radially arranged at intervals around the lifting magnet (234).

5. In any one of paragraphs 1 to 4, A pressure control unit structure for a pressure regulator, characterized in that the above-mentioned lifting magnet (234), pushing magnet (240) and sub-magnetic (250) are fixed by a closing cap (G).

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