Substrate storage container

Abstract

A substrate storage container 1 comprises: a container body 2 in which a substrate storage space 27 capable of storing a plurality of substrates W is formed, which has a container-body opening 21 in communication with the substrate storage space 27 at one end on the front side D11, and which is closed at the other end on the rear side D12; and a lid body 3 which can be attached to / detached from the container-body opening 21 and which can close the container-body opening 21. The container body 2 has an upper wall 23 and a lower wall 24 facing each other, a first side wall 25 and a second side wall 26 facing each other, and a back wall 22 to which the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are connected. The upper wall 23 has a fixing structure part 237 for fixing a weight 100 for adjusting the center of gravity of the substrate storage container 1 when the substrate storage container 1 is carried.

Description

Substrate storage container

[0001] The present invention relates to a substrate storage container for storing substrates such as semiconductor wafers.

[0002] 2. Description of the Related Art Conventionally, containers for storing substrates such as semiconductor wafers have been known that include a container body and a lid.

[0003] The container body has a cylindrical wall portion at one end on the front side where an opening rim portion that forms the container body opening is formed, and the other end on the rear side where the wall portion is closed. A substrate storage space is formed within the container body. The substrate storage space is formed by being surrounded by the wall portion and is capable of storing multiple substrates. The lid body is detachable from the container body opening and is capable of closing the container body opening.

[0004] A front retainer is provided on a portion of the lid that faces the substrate storage space when the container body opening is closed. The front retainer is capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid. A rear-side substrate support portion is provided on the wall portion so as to form a pair with the front retainer. The rear-side substrate support portion is capable of supporting the edges of the plurality of substrates. When the container body opening is closed by the lid, the rear-side substrate support portion cooperates with the front retainer to support the plurality of substrates, thereby holding the plurality of substrates in a state where adjacent substrates are spaced apart at a predetermined interval and arranged side by side.

[0005] Incidentally, when transporting substrates to each process, substrate storage containers are sometimes transported by overhead hoist transport (OHT) devices such as AMHSs (automated wafer handling systems) and PGVs (wafer / substrate transport vehicles). In this case, the substrate storage containers are suspended by gripping a top flange provided on the upper wall of the container body. Furthermore, in some factories or processes, substrate storage containers are sometimes transported by hand. In this case, workers lift and transport the substrate storage container by gripping side handles provided on both side walls of the container body.

[0006] The lid of a substrate storage container is relatively heavy because it is equipped with a front retainer and other mechanisms for performing its functions. When the container body opening of the substrate storage container is closed by the lid (also called the "lid closed state"), the weight of the lid makes the front of the substrate storage container heavy, and the center of gravity of the entire substrate storage container shifts to the front. Therefore, when the substrate storage container is transported (carried) while being hung or lifted, it is likely to tilt forward.

[0007] In order to prevent the substrate storage container from tilting excessively forward (the center of gravity moving excessively forward) when the substrate storage container is transported in this manner, a technology is known in which a center of gravity position adjustment means is attached to the container body (see Patent Document 1).

[0008] Patent No. 5871276

[0009] However, further improvements are desired in the structure for attaching the center of gravity position adjusting means to the container body.

[0010] The present invention aims to provide a substrate storage container with an improved structure for attaching a center of gravity position adjustment means to the container body to prevent the substrate storage container from tilting excessively forward when the substrate storage container is transported with its lid closed.

[0011] (1) A first aspect of the present invention is a substrate storage container comprising: a container body having a substrate storage space formed therein capable of storing a plurality of substrates, a container body opening at one end on the front side that communicates with the substrate storage space, and a closed other end on the rear side; and a lid that is detachable from the container body opening and can close the container body opening, wherein the container body further has opposing upper and lower walls, opposing first and second side walls, and a back wall to which the rear end of the upper wall, the rear end of the lower wall, the rear end of the first side wall, and the rear end of the second side wall are connected, and the upper wall has a fixing structure for fixing a weight to adjust the center of gravity of the substrate storage container when the substrate storage container is transported.

[0012] (2) The second present invention is a substrate storage container of (1), in which the fixing structure is positioned behind the connection portion with the upper wall of the hanging portion, which is the portion of the substrate storage container that is hung when the substrate storage container is suspended.

[0013] (3) A third aspect of the present invention is the substrate storage container of (2), wherein the fixing structure is disposed behind the entire hanging portion.

[0014] (4) A fourth aspect of the present invention is the substrate storage container according to any one of (1) to (3), wherein the weight is disposed across the top wall and the rear wall.

[0015] (5) The fifth aspect of the present invention is a substrate storage container according to any one of (1) to (4), wherein the container body further has an identification member used to identify the substrates stored in the substrate storage container, the identification member being detachably attached to the lower rear part of the container body, and the weight is positioned above the identification member on the rear wall side.

[0016] According to the present invention, it is possible to provide a substrate storage container having an improved structure in which a center of gravity position adjustment means is attached to the container body to prevent the substrate storage container from tilting excessively forward when the substrate storage container is transported with its lid closed.

[0017] 1 is an exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention. FIG. 2 is a perspective view of a container body 2 of a substrate storage container 1 according to an embodiment of the present invention, viewed from the rear. FIG. 3 is a left side view showing the container body 2. FIG. 4 is a rear view showing the container body 2. FIG. 5 is a longitudinal cross-sectional view of the container body 2, cut at the center position in the left-right direction. FIG. 6 is a longitudinal cross-sectional view of the substrate storage container 1 in a closed state, cut in the front-rear direction at a cross section passing through a fixing protrusion 237, which is a fixing structure. FIG. 7 is an enlarged partial cross-sectional view of the periphery of the fixing protrusion 237, which is a fixing structure. FIG. 8 is a perspective view showing a state in which a weight 100 and a top flange 236, which serves as a hanging part, have been removed from the state of FIG. 2. FIG. 9 is a perspective view of the weight 100, viewed from below.

[0018] A substrate storage container 1 according to an embodiment of the present invention will now be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention. FIG. 2 is a perspective view of a container body 2 of a substrate storage container 1 according to an embodiment of the present invention, viewed from the rear. FIG. 3 is a left side view showing the container body 2. FIG. 4 is a rear view showing the container body 2. FIG. 5 is a longitudinal cross-sectional view of the container body 2 taken at the center in the left-right direction. FIG. 6 is a longitudinal cross-sectional view of the substrate storage container 1 in a closed state, taken in the front-rear direction at a cross section passing through a fixing protrusion 237, which is a fixing structure. FIG. 7 is a partially enlarged cross-sectional view of the periphery of the fixing protrusion 237, which is a fixing structure. FIG. 8 is a perspective view showing a state in which the weight 100 and the top flange 236, which serves as a hanging portion, have been removed from the state shown in FIG. 2. FIG. 9 is a perspective view of the weight 100 viewed from below.

[0019] For ease of explanation, the direction from the container body 2 (described below) to the lid body 3 (direction from the upper right to the lower left in FIG. 1 ) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12, and these are defined as the front-rear direction D1. Furthermore, the direction from the lower wall 24 (described below) to the upper wall 23 (upward direction in FIG. 1 ) is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22, and these are defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 (described below) to the first side wall 25 (direction from the lower right to the upper left in FIG. 1 ) is defined as the leftward direction D31, and the opposite direction is defined as the rightward direction D32, and these are defined as the left-right direction D3 or the lateral direction D3. The word "direction" may also be referred to as "side."

[0020] The substrates W stored in the substrate storage container 1 have, for example, a disk shape, a polygonal shape, or a shape with one or more (straight) sides. The circular substrates W are silicon wafers, glass wafers, sapphire wafers, etc., and specifically, silicon wafers with a diameter of 200 mm to 450 mm. The substrates W having a polygonal shape or a shape with one or more sides are, for example, substrates that have undergone primary processing.

[0021] As shown in Figures 1 to 8, the substrate storage container 1 is for storing the substrates W as described above, and has a container body 2, a lid 3, side substrate support portions 5, a rear substrate support portion 6 (see Figure 5), and a front retainer 7 (see Figure 6) as a lid side substrate support portion.

[0022] 1, the container body 2 has a container body opening 21 formed at one end on the front side D11 and a cylindrical wall portion 20 that is closed at the other end on the rear side D12. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Side substrate support portions 5 are arranged in the portion of the wall portion 20 that forms the substrate storage space 27. The substrate storage space 27 is capable of storing a plurality of substrates W.

[0023] The side substrate support portions 5 are provided on the wall portion 20 in pairs in the left-right direction D3 within the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the side substrate support portions 5 abut against the side portions of the edges of the plurality of substrates W, thereby supporting the side portions of the edges of the plurality of substrates W while arranging adjacent substrates W in parallel with a predetermined distance between them. A rear substrate support portion 6 is provided on the rear side of the side substrate support portions 5.

[0024] The rear substrate support portion 6 is provided on the wall portion 20 so as to form a pair with the front retainer 7 within the substrate storage space 27. When the container body opening 21 is closed by the lid body 3, the rear substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W by abutting against the rear portions of the edges of the plurality of substrates W.

[0025] The lid 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer 7 is provided on the lid 3 at a portion that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The front retainer 7 is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support part 6 in the front-to-rear direction D1.

[0026] The front retainer 7 is capable of supporting the front portions of the edges of the substrates W by abutting against the edges of the substrates W when the container body opening 21 is closed by the lid 3. When the container body opening 21 is closed by the lid 3, the front retainer 7 supports the substrates W in cooperation with the rear substrate support part 6, thereby holding the substrates W in a state in which adjacent substrates W are spaced apart at a predetermined interval and arranged side by side. Each part will be described in detail below.

[0027] 1 and other figures, the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like, and in this embodiment, are integrally molded from polycarbonate.

[0028] The first side wall 25 and the second side wall 26 face each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 face each other in the front-rear direction D1. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22 and constitute an opening periphery 28 that forms the substantially rectangular container body opening 21.

[0029] The opening periphery 28 is provided at one end of the front side D11 of the container body 2, and the rear wall 22 is located at the other end of the rear side D12 of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the walls 20. The inner surfaces of the walls 20, i.e., the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded by these. The container body opening 21 formed in the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

[0030] 1, latch engagement recesses 231A, 231B, 241A, and 241B recessed outward from the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0031] On the outer surface of the top wall 23, a flange fixing portion 235 (see FIGS. 5 and 8 ) and a rib 234 are provided and molded integrally with the top wall 23. The flange fixing portion 235 is disposed in the center of the top wall 23. A top flange 236 is fixed to the flange fixing portion 235 and serves as a suspending portion that serves as a suspending portion of the substrate storage container 1 when the substrate storage container 1 is suspended. The top flange 236 is disposed in the center of the top wall 23. The top flange 236 serves as a member that serves as a suspending portion of the substrate storage container 1 when the substrate storage container 1 is suspended by an overhead hoist transport (OHT) such as an AMHS (automated wafer transport system) or a PGV (wafer / substrate transport vehicle).

[0032] 5, the top flange 236 includes a fixed portion 236A that is fixed to the flange fixing portion 235, and a flange portion 236B that is connected to an upper side D21 of the fixed portion 236A and faces the outer surface of the top wall 23. The flange portion 236B extends along the D1-D3 plane. The fixed portion 236A can also be said to be the connection portion of the top flange 236 with the top wall 23.

[0033] The ribs 234 are portions for reinforcing the upper wall 23, protruding toward the upper side D21 and extending in multiple directions in the front-rear and left-right directions. Of these, a pair of left and right rear inner ribs 234A are arranged on either side of the flange fixing portion 235 and extend toward the rear side D12, but do not reach the rear end of the upper wall 23. A pair of left and right rear outer ribs 234B are arranged on either side of the rear inner rib 234A and extend toward the rear side D12, reaching the rear end of the upper wall 23.

[0034] The upper wall 23 has a fixing structure for fixing the weight 100. The weight 100 is a center-of-gravity position adjusting member for adjusting the center of gravity of the substrate storage container 1 when the substrate storage container 1 is transported. The fixing structure in this embodiment is made up of a fixing protrusion 237 that protrudes from the upper wall 23 to the upper side D21. As shown in FIG. 7 , the fixing protrusion 237 has a cylindrical column portion 237A and a female screw portion 237B. The female screw portion 237B is provided inside the cylindrical portion 237A and opens to the upper side D21.

[0035] The position of the fixing protrusion 237, which is a fixing structure, is not limited, but, for example, the following position in the front-to-rear direction D1 (in the side view shown in FIG. 5 ), is preferable. The fixing protrusion 237, which is a fixing structure, is positioned on the rear side D12 of the connection portion between the top wall 23 and the top flange 236, which is a hanging portion that is the portion of the substrate storage container 1 that is hung when the substrate storage container 1 is suspended. The fixing protrusion 237, which is a fixing structure, is positioned on the rear side D12 of the entire top flange 236, which is a hanging portion. In this position, the fixing protrusion 237 does not overlap with the top flange 236 in a top view.

[0036] 1, container body legs 244, also called bottom plates, are fixed to the lower wall 24. When the container body 2 is placed on a horizontal flat surface with the lower wall 24 as the lower side D22, the container body legs 244 abut against the flat surface to stably support the container body 2.

[0037] A side handle 254 (see FIG. 4 ) and a side handle 264 are disposed on the outer sides of the first side wall 25 and the second side wall 26, respectively. The side handles 254 and 264 are basically symmetrical and have the same basic configuration. Regarding the side handles, the side handle 264 will be described as a representative, and a description of the side handle 254 may be omitted. In other words, the description of the side handle 264 is incorporated into the description of the side handle 254.

[0038] The side handle 264 includes a grip portion 264A and a connecting portion 264B. Similarly, the side handle 254 includes a grip portion 254A and a connecting portion 254B. The grip portion 264A is a portion that an operator grasps when lifting and transporting the substrate storage container (manually). The connecting portion 264B is integrally formed with the grip portion 264A and is located generally below the grip portion 264A. In this embodiment, the side handle 264 is fixed to the right side of the container body leg portion 244 at the connecting portion 264B and is not fixed to the second side wall 26. Similarly, the side handle 254 is fixed to the left side of the container body leg portion 244 at the connecting portion 254B and is not fixed to the first side wall 25.

[0039] The fixing manner of the side handles 254 and 264 is not limited to the fixing manner in this embodiment. For example, the side handle 254 may be fixed to the first side wall 25 and the container body legs 244, or the side handle 254 may be fixed to the first side wall 25 but not to the container body legs 244. The side handle 264 may be fixed to the second side wall 26 and the container body legs 244, or the side handle 264 may be fixed to the second side wall 26 but not to the container body legs 244.

[0040] In the front-rear direction D1 (side view shown in Figure 5), the fixing convex portion 237, which is a fixing structure, is located rearward D12 from the grip portion 254A of the side handle 254 and the grip portion 264A of the side handle 264.

[0041] The container body 2 further includes an identification member 224. The identification member 224 is a member used to identify the substrate storage container 1 in the production process for processing the substrates. The identification member 224 is configured so that a card on which information is written can be attached.

[0042] The weight 100 is a member that is fixed to the fixing protrusion 237, which is a fixing structure of the top wall 23, and when fixed, is disposed at least on the side of the top wall 23. In this embodiment, when fixed, the weight 100 is disposed across the top wall 23 and the rear wall 22, when viewed from the side.

[0043] The material of the weight 100 is not limited, and may be, for example, various metals (SUS) or various resins. The specific gravity of the weight 100 is preferably five times or more the specific gravity of the resin used for the container body 2.

[0044] The weight 100 has a generally L-shape in side view, having an upper plate-like portion 101 and a rear plate-like portion 102. The upper plate-like portion 101 is a portion disposed on the side of the upper wall 23, and extends in the direction in which the upper wall 23 extends (D1-D3 plane) in side view. The rear plate-like portion 102 is a portion disposed on the side of the rear wall 22, and extends in the direction in which the rear wall 22 extends (D2-D3 plane) in side view. The weight 100 is bent at a right angle at a bending portion 103. The impact relief portions 104, 104 are portions cut out on both sides of the rear plate-like portion 102 to relieve impact against the portion of the rear wall 22 that bulges out toward the rear side D12.

[0045] The rear plate-shaped portion 102 of the weight 100 is disposed on the rear wall 22 side, on the upper side D21 of the identification member 224, in a side view.

[0046] The mass of the upper plate portion 101 of the weight 100 is, for example, 1 kg or more, and preferably 2 kg or more. The mass of the rear plate portion 102 of the weight 100 is, for example, 500 g or more, and preferably 1.5 kg or more. In the front-to-rear direction D1 (as viewed from the side in FIG. 5 ), the length of the upper plate portion 101 is, for example, 50 mm or more, and preferably 50 to 80 mm. The length of the rear plate portion 102 is, for example, 50 mm or more, and preferably 50 to 200 mm.

[0047] The upper plate portion 101 of the weight 100 is provided with a fixing function portion that pairs with the fixing structure portion of the upper wall 23 and functions to fix the weight 100 to the upper wall 23. In this embodiment, the fixing function portion is a fixing hole portion 105. As shown in FIGS. 7 and 9 , the fixing hole portion 105 includes a countersunk hole 105A, an insertion hole 105B, and a communicating hole 105C. The countersunk hole 105A opens in the upward direction D21 and is a hole into which the head of a fixing screw B1 (described below) consisting of a male thread is inserted. The insertion hole 105B communicates with the lower part of the countersunk hole 105A via the communicating hole 105C and also opens in the downward direction D22. A fixing protrusion 237 is inserted into the insertion hole 105B from the lower side D22 toward the upper side D21. Note that a fitted state may be formed in the inserted state. The threaded portion of the fixing screw B1 can be inserted into the communication hole 105C.

[0048] In the fixed state, the weight 100 is disposed in a space D12 rearward of the rear inner rib 234A in the front-to-rear direction D1, and in the space between the rear outer ribs 234B, 234B in the lateral direction D3. The space D12 rearward of the rear inner rib 234A in the front-to-rear direction D1 and / or the space between the rear outer ribs 234B, 234B in the lateral direction D3 may not be effectively utilized. In this embodiment, the weight 100 is disposed in that space, and therefore the space can be effectively utilized for disposing the weight 100.

[0049] The weight 100 is fixed to the top wall 23 of the container body 2 as follows: The fixing protrusion 237 of the top wall 23 is inserted into the insertion hole 105B of the fixing hole 105 of the weight 100. As a result, the fixing protrusion 237 is positioned in the insertion hole 105B. In this state, the female thread portion 237B of the fixing protrusion 237 is exposed to the upper side D21 through the communicating hole 105C of the fixing hole 105. Next, the fixing screw B1 is screwed into the female thread portion 237B. As a result, the weight 100 is fixed to the top wall 23. In this state, the upper plate-shaped portion 101 of the weight 100 abuts against the outer surface of the top wall 23. The rear plate-shaped portion 102 of the weight 100 abuts against the outer surface of the rear wall 22. It is preferable that both side portions (outer sides in the horizontal direction D3) of the upper plate portion 101 abut against the inner surface (inner surface in the horizontal direction D3) of the rear outer rib 234B. Therefore, when fixed, the weight 100 is less likely to wobble relative to the container body 2.

[0050] Next, the lid 3 and the closed state will be described. The lid 3 is provided with a latch mechanism. The latch mechanism is provided near both left and right ends of the lid 3, and as shown in Fig. 1, includes two upper latch portions 32A that can protrude upward in the direction D21 from the top edge of the lid 3, and two lower latch portions (not shown) that can protrude downward in the direction D22 from the bottom edge of the lid 3. The two upper latch portions 32A are located near both left and right ends of the top edge of the lid 3, and the two lower latch portions (not shown) are located near both left and right ends of the bottom edge of the lid 3.

[0051] An operating portion 33 is provided on the outer surface of the lid 3. By operating the operating portion 33 from the front side of the lid 3, the upper latch portion 32A and the lower latch portion (not shown) can be made to protrude from the upper and lower edges of the lid 3, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid 3 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion (not shown) protrudes in the downward direction D22 from the lower edge of the lid 3 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening peripheral portion 28 of the container body 2.

[0052] As shown in FIG. 6 , a front retainer 7 is fixed to the inside of the lid body 30 of the lid body 3. In this embodiment, the front retainer 7 is configured to be separated in the left-right direction D3. The front retainer 7 has front retainer board receiving portions 73. The front retainer board receiving portions 73 are arranged in pairs in the left-right direction D3, spaced a predetermined distance apart in the left-right direction D3, with two in each pair. Twenty-five pairs of front retainer board receiving portions 73 arranged in pairs in the up-down direction D2 are arranged side by side. When a substrate W is stored in the substrate storage space 27 and the lid body 3 is closed, the front retainer board receiving portions 73 clamp and support the edge of the substrate W.

[0053] 1, the lid 3 has a generally rectangular shape that generally matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 is detachable from the opening peripheral edge 28 of the container body 2, and by attaching the lid 3 to the opening peripheral edge 28, the lid 3 can close the container body opening 21. An annular sealing member 4 is attached to the inner surface 301 of the lid 3 (the back surface of the lid 3), the surface that faces the surface of a step formed at a position D12 immediately behind the opening edge of the opening peripheral edge 28 when the lid 3 is closing the container body opening 21.

[0054] More specifically, the lid 3 has a lid body 30. The lid body 30 forms the outer casing of the lid 3, which is approximately rectangular. Therefore, the lid body 30 has an approximately rectangular shape. The lid body 30 has an inner surface 301 and an outer surface 302. The inner surface 301 faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The outer surface 302 is exposed to the outside of the substrate storage container 1 when the container body opening 21 is closed by the lid 3. The lid body 30 is made of a plastic material or the like, and in this embodiment, is molded from polycarbonate.

[0055] The sealing member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. The sealing member 4 has a rectangular ring shape and is disposed so as to go around the outer periphery of the lid 3.

[0056] The substrate storing container 1 according to the first embodiment having the above-described configuration can provide the following effects: The substrate storing container 1 according to the first embodiment is a substrate storing container 1 including: a container body 2 having a substrate storing space 27 formed therein capable of storing a plurality of substrates W, a container body opening 21 at one end on the front side D11 that communicates with the substrate storing space 27, and a closed other end on the rear side D12; and a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21, wherein the container body 2 further has opposing upper and lower walls 23 and 24, opposing first and second side walls 25 and 26, and a back wall 22 to which the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are connected, and the upper wall 23 has a fixing structure (fixing protrusion 237) for fixing a weight 100 that adjusts the center of gravity of the substrate storing container 1 when the substrate storing container 1 is transported.

[0057] According to this embodiment, the weight 100 is fixed to the fixing protrusion 237, which is a fixing structure, thereby shifting the center of gravity of the entire substrate storage container toward the rear side D12. Therefore, when the substrate storage container 1 in a closed state is transported by an overhead transport device (OHT) or when the substrate storage container is carried by handling, excessive forward tilting of the substrate storage container (i.e., the center of gravity moving forward) can be prevented. Furthermore, the weight 100 can be placed in the space on the side of the top wall 23 of the container body 2, where a relatively large amount of unused space exists in the substrate storage container 1. This eliminates the need for a special shape or complex structure for the container body 2 to secure the weight 100, allowing for effective use of space and a relatively simple configuration for securing the weight 100 to the container body 2.

[0058] In this embodiment, the fixing protrusion 237, which is a fixing structure, is located on the rear side D12 of the connection portion between the top wall 23 and the hanging portion (top flange 236), which is the portion of the substrate storage container 1 that is hung when the substrate storage container 1 is suspended. This area behind the top wall 23 is not particularly effectively utilized. By utilizing this space, the weight 100 can be fixed to the top wall 23 of the container body 2.

[0059] In this embodiment, the weight 100 is disposed across the top wall 23 and the rear wall 22. By disposing the weight 100 (the rear plate-shaped portion 102) on the rear wall 22 as well, the center of gravity of the entire substrate storage container is moved further rearward D12, enhancing the center of gravity position adjustment effect. In addition, by changing (increasing or decreasing) the hanging length of the weight 100 on the rear wall 22 side, it is easy to increase or decrease the center of gravity position adjustment effect.

[0060] In this embodiment, the container body 2 further includes an identification member 224 used to identify the substrates W stored in the substrate storage container 1, the identification member 224 being detachably provided at the lower rear part of the container body 2. The weight 100 is disposed on the rear wall 22 side, on the side D21 above the identification member 224. The space D21 above the identification member 224 is sometimes not effectively utilized. Since the weight 100 (the rear plate-like portion 102 thereof) is disposed in that space, the weight 100 can be disposed therein and the space can be effectively utilized.

[0061] The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope defined in the claims.

[0062] For example, the configuration of the fixing structure for fixing the weight 100 to the top wall 23 of the container body 2 is not limited. The weight 100 may be configured to have a protrusion and a recess (including a hole) into which the protrusion is inserted or fitted. Fastening means other than screw fastening may also be used. The weight 100 may be configured to be fixed to the top wall 23 of the container body 2 by ultrasonic welding.

[0063] The weight 100 may be configured without the rear plate-like portion 102. In other words, the weight 100 may be configured to be disposed only on the side of the upper wall 23 of the container body 2. The thickness and width of the weight 100 may be constant or may be variable (the thickness may vary).

[0064] Furthermore, the shapes of the container body 2 and the lid body 3, and the number and dimensions of the substrates W that can be stored in the container body 2 are not limited to the shapes of the container body 2 and the lid body 3, and the number and dimensions of the substrates W that can be stored in the container body 2 in this embodiment.

[0065] REFERENCE SIGNS LIST 1 Substrate storage container 2 Container body 21 Container body opening 22 Back wall 224 Identification member 23 Upper wall 236 Hanging portion (top flange) 237 Fixing structure portion (fixing protrusion) 24 Lower wall 25 First side wall 26 Second side wall 27 Substrate storage space 3 Lid 100 Weight D11 Front side D12 Rear side W Substrate

Claims

1. A substrate storage container comprising: a container body having a substrate storage space formed therein capable of storing a plurality of substrates, a container body opening at one end on the front side that communicates with the substrate storage space, and a closed other end on the rear side; and a lid that is detachable from the container body opening and can close the container body opening, wherein the container body further has opposing upper and lower walls, opposing first and second side walls, and a back wall to which the rear end of the upper wall, the rear end of the lower wall, the rear end of the first side wall, and the rear end of the second side wall are connected, and the upper wall has a fixing structure for fixing a weight to adjust the center of gravity of the substrate storage container when it is being transported.

2. A substrate storage container as described in claim 1, wherein the fixing structure is positioned behind the connection portion between the upper wall and the hanging portion, which is the portion of the substrate storage container that is hung when the substrate storage container is suspended.

3. The substrate storage container according to claim 2, wherein the fixing structure is disposed rearward of the entire hanging portion.

4. A substrate storage container according to any one of claims 1 to 3, wherein the weight is disposed across the top wall and the rear wall.

5. A substrate storage container as described in any one of claims 1 to 4, wherein the container body further has an identification member used to identify the substrates stored in the substrate storage container, the identification member being detachably attached to the lower rear part of the container body, and the weight is positioned above the identification member on the rear wall side.

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