Force-torque sensor and robot

Abstract

The present embodiment relates to a force-torque sensor comprising: a fixed part; a moving part disposed in the fixed part; a sensing part for sensing the movement of the moving part with respect to the fixed part; and an elastic member coupled to the moving part, wherein the elastic member includes a first groove having a shape recessed in a first axis direction perpendicular to the central axis of the elastic member, a second groove having a shape recessed in a second axis direction perpendicular to the first axis, and a third groove having a shape recessed in a third axis direction perpendicular to both the first axis and the second axis.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into the forces of each axis. Instead, they receive input simultaneously and decompose the forces. This causes crosstalk noise to be mixed into the detection values ​​for each axis. In particular, noise increases when the Z-axis and torque forces are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] The present embodiment seeks to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Through this, we aim to improve robot control and work processes.

[0008] A force-torque sensor according to the present embodiment includes a fixed part; a moving part arranged within the fixed part; a sensing part that senses movement of the moving part with respect to the fixed part; and an elastic member coupled to the moving part, wherein the elastic member may include a first groove having a shape sunken in a first axis direction perpendicular to a central axis of the elastic member, a second groove having a shape sunken in a second axis direction perpendicular to the first axis, and a third groove having a shape sunken in a third axis direction perpendicular to both the first axis and the second axis.

[0009] The above elastic member can be formed as an injection molded product.

[0010] The above moving part includes a first carrier disposed within the fixed part and a second carrier disposed between the first carrier and the fixed part, and the elastic member can be coupled to the first carrier and the second carrier.

[0011] The elastic member includes a first coupling portion coupled with the first carrier, a second coupling portion coupled with the second carrier, and a connecting portion connecting the first coupling portion and the second coupling portion, and the first to third grooves of the elastic member can be formed in the connecting portion.

[0012] The above connecting portion includes a first connecting portion and a second connecting portion which are arranged on opposite sides with respect to the first connecting portion as the center, a third connecting portion and a fourth connecting portion which are arranged on opposite sides with respect to the first connecting portion as the center, and the first groove and the third groove of the elastic member may be formed in the first connecting portion and the second connecting portion, respectively, and the second groove and the third groove of the elastic member may be formed in the third connecting portion and the fourth connecting portion, respectively.

[0013] Each of the first groove and the second groove may be formed by a shape in which a portion of the elastic member is bent multiple times.

[0014] The first region of the elastic member where the third groove is formed may have a thinner thickness in the third axis direction than other regions where the third groove is not formed.

[0015] The force-torque sensor may include a first ball disposed between the first carrier and the second carrier; and a second ball disposed between the second carrier and the fixed part.

[0016] The force-torque sensor includes a lead connected to the first carrier, and when a force is applied to the lead in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the first carrier can move relative to the second carrier.

[0017] When a force is applied to the above lead in the direction of the third axis, the first carrier and the second carrier can move together with respect to the fixed part.

[0018] The above detection unit may include a first magnet and a second magnet arranged on the first carrier; a third magnet arranged on the second carrier; a first Hall sensor arranged on the fixed portion and detecting the first magnet; a second Hall sensor arranged on the fixed portion and detecting the second magnet; and a third Hall sensor arranged on the fixed portion and detecting the third magnet.

[0019] The robot according to the present embodiment may include the force-torque sensor.

[0020] The force-torque sensor according to this embodiment can measure Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0021] Figure 1 is a perspective view of a force-torque sensor according to the present embodiment.

[0022] Fig. 2 is an exploded perspective view of a force-torque sensor according to the present embodiment.

[0023] Figure 3 is a cross-sectional view taken along line AA of Figure 1.

[0024] Figure 4 is a cross-sectional view viewed from BB in Figure 1.

[0025] FIG. 5 is a cross-sectional view showing a force-torque sensor according to the present embodiment cut in a direction perpendicular to the z-axis and viewed from above.

[0026] Fig. 6 is a perspective view of a force-torque sensor according to the present embodiment with the lead and substrate omitted.

[0027] Fig. 7 is a perspective view of Fig. 6 with the upper cover and other components omitted.

[0028] Figure 8 is a perspective view of Figure 7 with the base omitted.

[0029] Fig. 9 is an exploded perspective view showing the outer carrier, inner carrier, and elastic member of the force-torque sensor according to the present embodiment.

[0030] Figure 10 is a bottom exploded perspective view of Figure 9 viewed from a different direction.

[0031] Fig. 11 is a bottom perspective view of Fig. 6 viewed from a different direction.

[0032] Fig. 12 is a bottom perspective view of Fig. 11 with the lower cover and other components omitted.

[0033] Fig. 13 is a bottom perspective view of Fig. 12 with the base omitted.

[0034] Fig. 14 is a bottom perspective view of Fig. 13 with the external carrier and upper cover, etc., omitted.

[0035] Fig. 15 is a diagram for explaining a method for a force-torque sensor according to the present embodiment to detect external forces in the yaw, pitch, and roll directions. Furthermore, a method for detecting external forces in the x-axis direction and the y-axis direction can also be explained together through Fig. 15.

[0036] FIG. 16 is a drawing for explaining a method for a force-torque sensor according to the present embodiment to detect an external force in the z-axis direction.

[0037] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0038] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0039] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0040] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0041] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0042] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0043] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0044] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0045] Hereinafter, one of the “internal carrier (210)” and the “external carrier (220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0046] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0047] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0048]

[0049] Below, the configuration of the force-torque sensor according to the present embodiment is described with reference to the drawings.

[0050] Fig. 1 is a perspective view of a force-torque sensor according to the present embodiment. Fig. 2 is an exploded perspective view of a force-torque sensor according to the present embodiment. Fig. 3 is a cross-sectional view taken along line AA of Fig. 1. Fig. 4 is a cross-sectional view taken along line BB of Fig. 1. Fig. 5 is a cross-sectional view taken along line BB of Fig. 1. Fig. 6 is a cross-sectional view taken along line AA of Fig. 1 and viewed from above of the force-torque sensor according to the present embodiment. Fig. 6 is a perspective view of the force-torque sensor according to the present embodiment with the leads and the substrate omitted. Fig. 7 is a perspective view of Fig. 6 with the top cover and other components omitted. Fig. 8 is a perspective view of Fig. 7 with the base omitted. Fig. 9 is an exploded perspective view of the force-torque sensor according to the present embodiment, showing an outer carrier, an inner carrier, and an elastic member. Fig. 10 is a bottom exploded perspective view of Fig. 9 viewed from a different direction. Fig. 11 is a bottom perspective view of Fig. 6 viewed from a different direction. Fig. 12 is a bottom perspective view of Fig. 11 with the lower cover and other components omitted. Fig. 13 is a bottom perspective view of Fig. 12 with the base omitted. Fig. 14 is a bottom perspective view of Fig. 13 with the external carrier and upper cover and other components omitted.

[0051] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0052] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0053] The force-torque sensor may include a base (110). The fixing member (100) may include the base (110). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the upper cover (120). The base (110) may be disposed under the upper cover (120). The base (110) may be disposed between the lower cover (130) and the upper cover (120).

[0054] The base (110) may include a groove (111). The groove (111) may be a ball rail. A second ball (520) may be placed in the groove (111). The groove (111) may extend in the z-axis direction. The second ball (520) may move along the groove (111) of the base (110).

[0055] The force-torque sensor may include an upper cover (120). The fixing member (100) may include the upper cover (120). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be disposed between the base (110) and the lid (230). The upper cover (120) may be coupled to an upper surface of the base (110). The upper cover (120) may be coupled to the base (110).

[0056] The force-torque sensor may include a lower cover (130). The fixing member (100) may include the lower cover (130). The lower cover (130) may form a bottom portion of the force-torque sensor. The lower cover (130) may be positioned opposite the lead (230). The lower cover (130) may be positioned below the base (110). The lower cover (130) may be coupled to a lower surface of the base (110). The lower cover (130) may be coupled to the base (110). The lower cover (130) may include a groove through which the substrate (140) passes.

[0057] The force-torque sensor may include a substrate (140). The fixing member (100) may include the substrate (140). A sensor may be disposed on the substrate (140). First to third hall sensors (340, 350, 360) may be disposed on the substrate (140). The substrate (140) may be electrically connected to the first to third hall sensors (340, 350, 360). The substrate (140) may output an electrical signal detected by the first to third hall sensors (340, 350, 360) to the outside of the force-torque sensor.

[0058] The force-torque sensor may include a plate (150). The fixing member (100) may include the plate (150). The plate (150) may be placed on the substrate (140). The plate (150) may be a reinforcing plate. The plate (150) may be placed on the lower surface of the substrate (140). The plate (150) may reinforce the strength of the substrate (140) so that the first to third hall sensors (340, 350, 360) are placed in the correct positions.

[0059] The force-torque sensor may include a moving part (200). The moving part (200) may be placed within the fixed part (100). The moving part (200) may be placed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100).

[0060] The force-torque sensor may include an inner carrier (210). The moving part (200) may include the inner carrier (210). The inner carrier (210) may be disposed within the fixed part (100). The inner carrier (210) may be disposed within the outer carrier (220). The inner carrier (210) may be disposed on the fixed part (100). The inner carrier (210) may be disposed within the base (110).

[0061] The inner carrier (210) may include a protrusion (211). The protrusion (211) may be coupled with an elastic member (400). The protrusion (211) of the inner carrier (210) may be coupled with a groove (411) of a first coupling portion (410) of the elastic member (400).

[0062] The force-torque sensor may include an outer carrier (220). The moving part (200) may include the outer carrier (220). The outer carrier (220) may be disposed between the inner carrier (210) and the fixed part (100). The outer carrier (220) may be disposed on the outside of the inner carrier (210). The outer carrier (220) may be disposed within the fixed part (100). The outer carrier (220) may be disposed on the fixed part (100). The outer carrier (220) may be disposed within the base (110).

[0063] The outer carrier (220) may include a first groove (221). The first groove (221) may be a ball rail. A first ball (510) may be placed in the first groove (221). The first ball (510) may move along the first groove (221). Alternatively, the first ball (510) may rotate while at least a portion of the first ball (510) is accommodated in the first groove (221).

[0064] The outer carrier (220) may include a second groove (222). The second groove (222) may be a ball rail. A second ball (520) may be placed in the second groove (222). The second ball (520) may move along the second groove (222). The second groove (222) may extend in the z-axis direction.

[0065] The outer carrier (220) may include a protrusion (223). The protrusion (223) may be coupled with an elastic member (400). The protrusion (223) of the outer carrier (220) may be coupled with a hole (421) of a second coupling portion (420) of the elastic member (400).

[0066] The force-torque sensor may include a lead (230). The moving part (200) may include the lead (230). The lead (230) may be connected to the internal carrier (210). At least a portion of the lead (230) may be disposed on the base (110). At least a portion of the lead (230) may be disposed on the upper cover (120). At least a portion of the lead (230) may be disposed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). An external force may be applied to at least a portion of the lead (230) that protrudes beyond the fixed part (100). The external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the internal carrier (210). The lead (230) may be disposed on the internal carrier (210). The lead (230) can be placed on the inner carrier (210). The lead (230) can move integrally with the inner carrier (210). The lead (230) can be fixed to the inner carrier (210).

[0067] When a force is applied to the lead (230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (210) can move with respect to the external carrier (220). When a force is applied to the lead (230) in the direction of the third axis, the internal carrier (210) and the external carrier (220) can move together with respect to the fixed part (100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0068] The force-torque sensor may include a detection unit (300). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the x-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the y-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the yaw direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the pitch direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the roll direction. The detection unit (300) can detect the z-axis movement of the moving unit (200) with respect to the fixed unit (100).

[0069] The force-torque sensor may include a first magnet (310). The sensing unit (300) may include the first magnet (310). The first magnet (310) may be disposed on the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210).

[0070] The force-torque sensor may include a second magnet (320). The sensing unit (300) may include the second magnet (320). The second magnet (320) may be disposed on the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210).

[0071] The force-torque sensor may include a third magnet (330). The sensing unit (300) may include the third magnet (330). The third magnet (330) may be disposed on the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220).

[0072] The force-torque sensor may include a first Hall sensor (340). The detection unit (300) may include the first Hall sensor (340). The first Hall sensor (340) may be disposed on the fixing unit (100). The first Hall sensor (340) may be disposed on the substrate (140). The first Hall sensor (340) may be disposed on the lower cover (130). The first Hall sensor (340) may be disposed on the base (110). The first Hall sensor (340) may detect the first magnet (310). The first Hall sensor (340) may detect the magnetic force of the first magnet (310). The first Hall sensor (340) may detect the movement of the lead (230) in the x-axis direction. The first hall sensor (340) can detect the pitch direction tilt of the lead (230).

[0073] The force-torque sensor may include a second hall sensor (350). The detection unit (300) may include the second hall sensor (350). The second hall sensor (350) may be disposed on the fixing unit (100). The second hall sensor (350) may be disposed on the substrate (140). The second hall sensor (350) may be disposed on the lower cover (130). The second hall sensor (350) may be disposed on the base (110). The second hall sensor (350) may detect the second magnet (320). The second hall sensor (350) may detect the magnetic force of the second magnet (320). The second hall sensor (350) may detect the movement of the lead (230) in the y-axis direction. The second hall sensor (350) can detect the yaw direction tilt of the lead (230).

[0074] However, conversely, the first Hall sensor (340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second Hall sensor (350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0075] In the above, it has been described that the first Hall sensor (340) detects the x-axis direction movement and pitch direction tilt of the lead (230), but more accurate sensing can be achieved together with the detection value of the second Hall sensor (350). When the second Hall sensor (350) detects the y-axis direction movement and yaw direction tilt of the lead (230), more accurate sensing can be achieved together with the detection value of the first Hall sensor (340).

[0076] The first Hall sensor (340) and the second Hall sensor (350) can detect roll direction tilt or movement together. Alternatively, at least one of the first Hall sensor (340) and the second Hall sensor (350) can detect roll direction tilt or movement.

[0077] The force-torque sensor may include a third hall sensor (360). The detection unit (300) may include the third hall sensor (360). The third hall sensor (360) may be disposed on the fixing unit (100). The third hall sensor (360) may be disposed on the substrate (140). The third hall sensor (360) may be disposed on the lower cover (130). The third hall sensor (360) may be disposed on the base (110). The third hall sensor (360) may detect the third magnet (330). The third hall sensor (360) may detect the magnetic force of the third magnet (330).

[0078] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (100). The second electrode may be disposed on at least one of the inner carrier (210) and the outer carrier (220).

[0079] The force-torque sensor may include an elastic member (400). The elastic member (400) may be coupled to the moving part (200). The elastic member (400) may be coupled to the inner carrier (210) and the outer carrier (220). The elastic member (400) may be coupled to the upper surface of the inner carrier (210) and the upper surface of the outer carrier (220). The elastic member (400) may be coupled to the upper portion of the inner carrier (210) and the upper portion of the outer carrier (220). The elastic member (400) may connect the inner carrier (210) and the outer carrier (220). The elastic member (400) may elastically connect the inner carrier (210) and the outer carrier (220). The elastic member (400) may movably support the inner carrier (210) relative to the outer carrier (220).

[0080] The thickness of the elastic member (400) in the z-axis direction may be greater than the radius of the first ball (510). The thickness of the elastic member (400) in the z-axis direction may be greater than the radius of the second ball (520).

[0081] The elastic member (400) may be formed as an injection-molded product. The elastic member (400) may be formed of a non-metallic material. However, as a variation, the elastic member (400) may be a material in which an insert metal is placed in the injection-molded product. The elastic member (400) may be made of a plastic material such as polyvinyl chloride resin, polyethylene resin, epoxy resin, or polyester resin. The elastic member (400) may have elasticity in at least a portion.

[0082] The elastic member (400) may include a first coupling portion (410). The first coupling portion (410) may be coupled with the inner carrier (210). The first coupling portion (410) may be disposed on the inner carrier (210). The first coupling portion (410) may be disposed on the upper surface of the inner carrier (210). The first coupling portion (410) may be fixed to the inner carrier (210). The first coupling portion (410) may be bonded to the inner carrier (210) with an adhesive. The first coupling portion (410) may be moved integrally with the inner carrier (210).

[0083] The first connecting portion (410) may include a groove (411). The groove (411) may be formed on the lower surface of the first connecting portion (410). A protrusion (211) of the internal carrier (210) may be inserted into the groove (411).

[0084] The elastic member (400) may include a second coupling portion (420). The second coupling portion (420) may be coupled to an external carrier (220). The second coupling portion (420) may be disposed on the external carrier (220). The second coupling portion (420) may be disposed on an upper surface of the external carrier (220). The second coupling portion (420) may be fixed to the external carrier (220). The second coupling portion (420) may be bonded to the external carrier (220) with an adhesive. The second coupling portion (420) may move integrally with the external carrier (220).

[0085] The second connecting portion (420) may include a hole (421). The hole (421) may penetrate the second connecting portion (420) in the z-axis direction. A protrusion (223) of the external carrier (220) may be inserted into the hole (421).

[0086] The elastic member (400) may include a connecting portion (430). The connecting portion (430) may connect the first connecting portion (410) and the second connecting portion (420). The connecting portion (430) may have elasticity. The connecting portion (430) may include a bent portion. The connecting portion (430) may include a bent shape. The connecting portion (430) may include a shape that is bent multiple times. The connecting portion (430) may be deformed. The connecting portion (430) may be restored to its original state after being deformed. The connecting portion (430) may include a zigzag shape.

[0087] The connecting portion (430) may include a plurality of connecting portions. The connecting portion (430) may include four connecting portions. The connecting portion (430) may include first to fourth connecting portions (431, 432, 433, 434). The connecting portion (430) may include a first connecting portion (431) and a second connecting portion (432) which are arranged on opposite sides with respect to the first connecting portion (410), and a third connecting portion (433) and a fourth connecting portion (434) which are arranged on opposite sides with respect to the first connecting portion (410).

[0088] The elastic member (400) may include a groove. The elastic member (400) may include a plurality of grooves. The elastic member (400) may include a groove or a bent shape that guides the inner carrier (210) to be tilted in the yaw direction relative to the outer carrier (220). The elastic member (400) may include a groove or a bent shape that guides the inner carrier (210) to be tilted in the pitch direction relative to the outer carrier (220). The elastic member (400) may include a groove or a bent shape that guides the inner carrier (210) to be tilted in the roll direction relative to the outer carrier (220).

[0089] The elastic member (400) may include a first groove (441). The first groove (441) may be sunken in the first axis direction. The first groove (441) may be a groove having a sunken shape in the first axis direction. In this case, the first axis may be the x-axis. The first groove (441) may be an x-axis direction groove. The first groove (441) may be formed in the connecting portion (430). The first groove (441) may be formed by a shape in which a portion of the elastic member (400) is bent multiple times.

[0090] The elastic member (400) may include a second groove (442). The second groove (442) may be sunken in a second axis direction that is perpendicular to the first axis. The second groove (442) may be a groove having a sunken shape in the second axis direction. In this case, the second axis may be the y-axis. The second groove (442) may be a y-axis direction groove. The second groove (442) may be formed in the connecting portion (430). The second groove (442) may be formed by a shape in which a portion of the elastic member (400) is bent multiple times.

[0091] The elastic member (400) may include a third groove (443). The third groove (443) may be sunken in a third axis direction that is perpendicular to both the first and second axes. The third groove (443) may be a groove having a sunken shape in the third axis direction. In this case, the third axis may be the z-axis. The third groove (443) may be a z-axis direction groove. The third groove (443) may be formed in the connecting portion (430).

[0092] The first region of the elastic member (400) where the third groove (443) is formed may have a thinner thickness in the third axis direction than other regions where the third groove (443) is not formed.

[0093] The third home (443) may include a third-first home (443-1). The third home (443) may include a third-second home (443-2).

[0094] The first groove (441) and the third groove (443) of the elastic member (400) may be formed in the first connecting portion (431) and the second connecting portion (432), respectively. The second groove (442) and the third groove (443) of the elastic member (400) may be formed in the third connecting portion (433) and the fourth connecting portion (434), respectively.

[0095] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100). The guide member may guide the movement of the inner carrier (210) relative to the outer carrier (220).

[0096] The force-torque sensor may include a first ball (510). The guide member may include the first ball (510). The first ball (510) may be disposed between the inner carrier (210) and the outer carrier (220). The first ball (510) may guide movement of the inner carrier (210) with respect to the outer carrier (220). The inner carrier (210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (220) by the first ball (510). However, when the inner carrier (210) is to move in the z-axis direction, the first ball (510) and the outer carrier (220) may move together.

[0097] The force-torque sensor may include a second ball (520). The guide member may include the second ball (520). The second ball (520) may be positioned between the outer carrier (220) and the fixing member (100). The second ball (520) may guide movement of the outer carrier (220) with respect to the base (110). The outer carrier (220) may move in the z-axis direction with respect to the base (110) by the second ball (520). At this time, the outer carrier (220) may move together with the inner carrier (210) and the lead (230).

[0098] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members to each other. For example, the coupling member may be a screw. The force-torque sensor may include a first coupling member (610). The first coupling member (610) may couple the lead (230) and the inner carrier (210). The force-torque sensor may include a second coupling member (620). The second coupling member (620) may couple the upper cover (120) and the base (110). The force-torque sensor may include a third coupling member (630). The third coupling member (630) may couple the lower cover (130) and the base (110).

[0099]

[0100] Below, the operation of the force-torque sensor according to the present embodiment is described with reference to the drawings.

[0101] Fig. 15 is a diagram for explaining a method for a force-torque sensor according to the present embodiment to detect external forces in the yaw, pitch, and roll directions. Furthermore, a method for detecting external forces in the x-axis direction and the y-axis direction can also be explained together through Fig. 15.

[0102] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) can rotate or tilt around the x-axis (see yaw in FIG. 15). At this time, the lead (230) can move integrally with the internal carrier (210) (see A in FIG. 15). Meanwhile, since the fixed part (100) is maintained in a fixed state, the second hall sensor (350) arranged on the fixed part (100) detects the second magnet (320) arranged on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (230) can be measured.

[0103] When an external force having a component in at least one direction of the x-axis direction and the pitch direction is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) can rotate or tilt around the y-axis (see pitch in FIG. 15). At this time, the lead (230) can move integrally with the internal carrier (210) (see A in FIG. 15). Meanwhile, since the fixed part (100) is maintained in a fixed state, the first Hall sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (230) can be measured.

[0104] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) can rotate or tilt around the z-axis (see roll in FIG. 15). At this time, the lead (230) can move integrally with the internal carrier (210) (see A in FIG. 15). Meanwhile, since the fixed part (100) is maintained in a fixed state, the first Hall sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), and the second Hall sensor (250) detects the second magnet (320), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0105] FIG. 16 is a drawing for explaining a method for a force-torque sensor according to the present embodiment to detect an external force in the z-axis direction.

[0106] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) can move along the z-axis (see B of FIG. 16). At this time, the lead (230) can move integrally with the internal carrier (210) and the external carrier (220) (see A of FIG. 16). Meanwhile, since the fixed part (100) is maintained in a fixed state, the third Hall sensor (360) arranged on the fixed part (100) detects the third magnet (330) arranged on the external carrier (220), so that the amount of movement of the lead (230), the internal carrier (210), and the external carrier (220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured.

[0107]

[0108] Below, the configuration of the robot according to this embodiment is described.

[0109] A robot may include a body. The robot may include an arm connected to the body. The arm of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the present embodiment may be disposed on the gripping portion of the arm. The arm of the robot may include a joint. The force-torque sensor of the present embodiment may be disposed on a joint of the arm.

[0110]

[0111] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential characteristics thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Fixed government; A moving part arranged within the above fixed part; A sensing unit that detects movement of the movable unit with respect to the fixed unit; and Including an elastic member coupled to the above moving part, A force-torque sensor in which the elastic member includes a first groove having a shape sunken in a first axis direction perpendicular to the central axis of the elastic member, a second groove having a shape sunken in a second axis direction perpendicular to the first axis, and a third groove having a shape sunken in a third axis direction perpendicular to both the first axis and the second axis.

2. In paragraph 1, The above elastic member is a force-torque sensor formed by injection molding.

3. In paragraph 1, The above moving part includes a first carrier disposed within the fixed part, and a second carrier disposed between the first carrier and the fixed part, The above elastic member is a force-torque sensor coupled to the first carrier and the second carrier.

4. In paragraph 3, The elastic member includes a first coupling portion coupled to the first carrier, a second coupling portion coupled to the second carrier, and a connecting portion connecting the first coupling portion and the second coupling portion. The first to third grooves of the elastic member are force-torque sensors formed in the connecting portion.

5. In paragraph 4, The above connecting portion includes a first connecting portion and a second connecting portion which are arranged on opposite sides with respect to the first connecting portion as the center, and a third connecting portion and a fourth connecting portion which are arranged on opposite sides with respect to the first connecting portion as the center, The first groove and the third groove of the elastic member are formed in the first connecting portion and the second connecting portion, respectively, A force-torque sensor in which the second groove and the third groove of the elastic member are formed in the third connecting portion and the fourth connecting portion, respectively.

6. In paragraph 1, A force-torque sensor in which each of the first groove and the second groove is formed by a shape in which a portion of the elastic member is bent multiple times.

7. In paragraph 1, A force-torque sensor in which a first region of the elastic member in which the third groove is formed has a thinner thickness in the third axis direction than other regions in which the third groove is not formed.

8. In paragraph 3, A first ball disposed between the first carrier and the second carrier; and A force-torque sensor including a second ball disposed between the second carrier and the fixed part.

9. In paragraph 3, Including a lead connected to the first carrier, A force-torque sensor in which, when a force is applied to the lead in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the first carrier moves relative to the second carrier.

10. In paragraph 9, A force-torque sensor in which, when a force is applied to the lead in the direction of the third axis, the first carrier and the second carrier move together with respect to the fixed part.

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