Fire detection method and detection system for electroplating device

Abstract

A fire detection method and detection system for an electroplating device. The fire detection method for an electroplating device comprises: acquiring an electrical signal of an electroplating module; if the electrical signal of the electroplating module is normal, determining that the electroplating module has no fire risk; and if the electrical signal of the electroplating module is abnormal, starting a first fire extinguisher (13) to extinguish a fire in the electroplating module.

Description

Fire detection method and system for electroplating equipment Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to a fire detection method and system for electroplating equipment. Background Technology

[0002] Copper electroplating involves two processes: a chemical process and an electrical process. Its basic principle is as follows: a silicon wafer with a barrier layer and a copper seed layer is immersed in a copper sulfate solution as the cathode. A copper block, used to replenish copper ions in the solution, is pre-placed in the plating bath as the anode. Under the action of an external DC power supply, copper ions in the solution move towards the cathode and gain two electrons on the cathode (silicon wafer) surface to form a copper film.

[0003] However, because the outer shell of electroplating equipment and the electroplating tank have relatively low heat resistance, overheating caused by circuit failure or component aging can lead to fires and cause great losses. Summary of the Invention

[0004] The embodiments of this application provide a fire detection method and system for electroplating equipment, which can detect fires in electroplating equipment in a timely manner and extinguish the fires in a timely manner.

[0005] In one aspect, this application provides a fire detection method for electroplating equipment, the electroplating equipment including an electroplating module and a power supply module for supplying power to the electroplating module, including acquiring an electrical signal of the electroplating module; if the electrical signal of the electroplating module is normal, then determining that the electroplating module has no fire risk; if the electrical signal of the electroplating module is abnormal, then activating a first fire extinguisher to extinguish the fire in the electroplating module.

[0006] Specifically, the electrical signal of the electroplating module is obtained by detecting the brushes or slip rings of the electroplating module.

[0007] Specifically, the electroplating module electrical signal is the electroplating module operating current, and further includes: if the electroplating module operating current is within a first current range, then the electroplating module electrical signal is determined to be normal; if the electroplating module operating current exceeds the first current range, then the electroplating module electrical signal is determined to be abnormal.

[0008] Specifically, by monitoring the working voltage of the electroplating module in real time as the electrical signal of the electroplating module, the method further includes: if the detected change value of the working voltage of the electroplating module is less than or equal to a set value, then the electrical signal of the electroplating module is determined to be normal; if the detected change value of the working voltage of the electroplating module is abruptly changed, then the electrical signal of the electroplating module is determined to be abnormal.

[0009] Specifically, it also includes: if the electrical signal of the electroplating module is abnormal, then the fire signal of the electroplating module is acquired; if the fire signal of the electroplating module is abnormal, then the first fire extinguisher is activated to extinguish the fire in the electroplating module; if the fire signal of the electroplating module is normal, then the alarm is activated.

[0010] Specifically, the detection method also includes: acquiring the electrical signal of the power module; if the electrical signal of the power module is normal, it is determined that the power module has no fire risk; if the electrical signal of the power module is abnormal, the second fire extinguisher is activated to extinguish the fire in the power module.

[0011] Specifically, if the electrical signal of the power module is abnormal, the fire signal of the power module is obtained. If the fire signal of the power module is abnormal, the second fire extinguisher is activated to extinguish the fire using the power module. If the fire signal of the power module is normal, the alarm is activated.

[0012] On the other hand, this application provides a fire detection system for electroplating equipment, the electroplating equipment including an electroplating module and a power supply module for supplying power to the electroplating module, comprising: a first electrical signal detector for detecting electrical signals of the electroplating module; a first fire extinguisher for extinguishing fires on the electroplating module; and a controller for receiving the electrical signals of the electroplating module detected by the first electrical signal detector, and determining whether the electrical signals of the electroplating module are abnormal, and sending a fire extinguishing signal to the first fire extinguisher when the electrical signals of the electroplating module are abnormal.

[0013] Specifically, the electrical signal of the electroplating module is the electrical signal of the brush or slip ring in the electroplating module.

[0014] Specifically, the detection system also includes a first fire detector, which is used to detect the fire signal of the electroplating module and to send the detected fire signal to the controller. The controller is configured to send a fire extinguishing signal to the first fire extinguisher when it is determined that both the electrical signal and the fire signal of the electroplating module are abnormal.

[0015] Specifically, the detection system also includes an alarm, and the controller is further configured to send an alarm signal to the alarm when it is determined that the electrical signal of the electroplating module is abnormal and the fire signal is normal.

[0016] Specifically, the detection system also includes a second electrical signal detector for detecting the electrical signal of the power module and a second fire extinguisher for extinguishing the fire in the power module. The controller is further configured to send a fire extinguishing signal to the second fire extinguisher when it is determined that the electrical signal of the power module is abnormal.

[0017] Specifically, the detection system also includes a second fire detector, which is used to detect the fire signal of the power module. The controller is also configured to send a fire extinguishing signal to the second fire extinguisher when it is determined that both the electrical signal of the power module and the fire signal are abnormal.

[0018] Specifically, the controller is further configured to send an alarm signal to the alarm device when it is determined that the power module electrical signal is abnormal and the fire signal is normal.

[0019] The electroplating equipment of this application can detect potential safety hazards in a timely manner by detecting the electrical signals of the electroplating module, thereby preventing fires.

[0020] Other features and advantages of this application will become apparent from the following detailed description, or may be learned in part from practice of this application.

[0021] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application.

[0022] Overview of the attached figures

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings:

[0024] Figure 1 shows a schematic diagram of the structure of an electroplating apparatus according to an embodiment of this application;

[0025] Figure 2 shows a flowchart of the detection and fire extinguishing process of the electroplating module in an electroplating equipment according to an embodiment of this application;

[0026] Figure 3 shows a flowchart of a method for detecting and extinguishing a fire in a power module of an electroplating equipment according to an embodiment of this application.

[0027] Preferred embodiments of this application

[0028] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided to make this application more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art.

[0029] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a thorough understanding of embodiments of this application. However, those skilled in the art will recognize that the technical solutions of this application can be practiced without one or more of the specific details, or other methods, components, apparatuses, steps, etc., can be employed. In other instances, well-known methods, apparatuses, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of this application.

[0030] The block diagrams shown in the accompanying drawings are merely functional entities and do not necessarily correspond to physically independent entities. That is, these functional entities can be implemented in software, in one or more hardware modules or integrated circuits, or in different network and / or processor devices and / or microcontroller devices.

[0031] The flowcharts shown in the accompanying drawings are merely illustrative and do not necessarily include all content and operations / steps, nor do they necessarily have to be performed in the described order. For example, some operations / steps can be broken down, while others can be combined or partially combined; therefore, the actual execution order may change depending on the specific circumstances.

[0032] As shown in Figure 1, this application provides a fire detection system for electroplating equipment, which is used to detect fires in electroplating equipment in a timely manner during equipment use and to automatically extinguish fires when fires occur in electroplating equipment.

[0033] Referring to Figure 1, the electroplating equipment includes an electroplating module and a power supply module, with the power supply module providing power to the electroplating module. The fire detection system of the electroplating equipment includes an electroplating detection module 1 and a power supply detection module 2, which are used to detect the fire risk of the electroplating module and the power supply module, respectively. The electroplating detection module 1 includes a first electrical signal detector 11, a first fire detector 12, and a first fire extinguisher 13. The first electrical signal detector 11 detects the electrical signal of the brushes in the electroplating module. The first fire detector 12 detects the fire signal of the electroplating module. The first fire extinguisher 13 extinguishes the fire in the electroplating module. The first electrical signal detector 11 is one or more of a current sensor, a voltage sensor, or other devices used for detecting electrical signals. The first fire detector 12 is one or more of a smoke sensor, a heat sensor, a light sensor, a flame detector, and a special gas sensor. The extinguishing agent sprayed by the first fire extinguisher 13 is carbon dioxide or other substances that can be used to extinguish fires in electrical equipment.

[0034] The detection system also includes a controller 3, which is electrically connected to the first electrical signal detector 11 to acquire the electrical signal of the brush. The controller 3 is also electrically connected to the first fire detector 12 to acquire the fire signal of the electroplating module. The controller 3 is electrically connected to the first fire extinguisher 13. The controller 3 determines whether to acquire the fire signal of the electroplating module based on whether the electrical signal of the brush is abnormal. The controller 3 also determines whether to activate the first fire extinguisher 13 based on the fire signal of the electroplating module. Specifically, if the current of the brush exceeds a first current range, it is determined that the electrical signal of the brush is abnormal, and the fire signal of the electroplating module is acquired. If the fire signal of the electroplating module is abnormal, the controller 3 activates the first fire extinguisher 13. If the current of the brush exceeds the first current range, that is, it is determined that the electrical signal of the brush is abnormal, but the fire signal of the electroplating module is normal, the controller 3 does not activate the first fire extinguisher 13. If the current of the brush is within the first current range, it is determined that the electrical signal of the brush is normal, and the controller 3 does not acquire the fire signal of the electroplating module, and the controller 3 does not activate the first fire extinguisher 13. The first current range is set as needed.

[0035] In other embodiments of this application, the controller 3 determines whether the brush's electrical signal is abnormal based on whether there is a sudden change in the brush's voltage. Specifically, if there is a sudden change in the brush's voltage, the controller 3 determines that the brush's electrical signal is abnormal; if there is no sudden change in the brush's voltage, the controller 3 determines that the brush's electrical signal is normal. Here, a sudden change in voltage means that the voltage change value within a set time period exceeds a first voltage value; no sudden change in voltage means that the voltage change value within the set time period is always less than or equal to the first voltage value. In other embodiments of this application, the controller 3 determines whether the brush's electrical signal is abnormal by whether the brush's current exceeds a first current range and whether there is a sudden change in the brush's voltage. For example, if the brush's current exceeds the first current range and / or the brush's voltage has a sudden change, the controller 3 determines that the brush's electrical signal is abnormal; if the brush's current is within the first current range and the brush's voltage does not have a sudden change, the controller determines that the brush's electrical signal is normal.

[0036] In this embodiment, the brush can be replaced with an electric slip ring. During the use of electroplating equipment, brushes or slip rings may wear down and become uneven over time, leading to poor circuit contact during the electroplating process. When the contact resistance is too high, the contact point may overheat, posing a fire hazard, and the electrical signal may also change. Therefore, by detecting the electrical signal of the brush, safety hazards can be detected in time when the electrical signal is abnormal, thus protecting the electroplating equipment. Simultaneously, this embodiment determines whether a fire has occurred by detecting both the electrical signal and the fire signal of the electroplating module, minimizing losses due to misjudgment.

[0037] In other embodiments of this application, the brush can be replaced with other devices in the electroplating module's working circuit, or the first electrical signal detector 11 can be directly connected to the electroplating module's working circuit to detect the electroplating module's electrical signal. The controller 3 determines whether it needs to acquire the electroplating module's fire signal and whether to activate the first fire extinguisher 13 based on the electroplating module's electrical signal.

[0038] The power supply detection module 2 includes a second electrical signal detector 21, a second fire detector 22, and a second fire extinguisher 23. The second electrical signal detector 21 detects electrical signals within the power supply module, the second fire detector 22 detects fire signals within the power supply module, and the second fire extinguisher 23 extinguishes fires on the power supply module. The second electrical signal detector 21 is one or more of a current sensor, voltage sensor, or other devices used for detecting electrical signals. The second fire detector 22 is one or more of a smoke sensor, heat sensor, light sensor, flame detector, and special gas sensor. The extinguishing agent sprayed by the second fire extinguisher 23 is carbon dioxide or other substances suitable for extinguishing fires in electrical equipment. Furthermore, the power supply module is enclosed by a protective cover, and the power supply detection module 2 is housed within the protective cover to isolate the power supply module from the surrounding environment, thereby enabling more accurate detection of whether a fire has occurred in the power supply module.

[0039] Controller 3 is electrically connected to the second electrical signal detector 21 to acquire the electrical signal from the power module 2. Controller 3 is also electrically connected to the second fire detector 22 to acquire the fire signal from the power module 2. Controller 3 is further electrically connected to the second fire extinguisher 23. Controller 3 determines whether to acquire the fire signal from the power module and whether to activate the second fire extinguisher 23 based on the power module's electrical signal. Specifically, if the current of the power module exceeds a second current range, the power module's electrical signal is considered abnormal. If the power module's fire signal is abnormal, the second fire extinguisher 23 is activated to extinguish the fire. If the power module's electrical signal exceeds the second current range (i.e., the power module's electrical signal is abnormal, but the fire signal is normal), the controller 3 does not activate the second fire extinguisher 23. If the power module's electrical signal is within the second current range, the power module's electrical signal is considered normal. Therefore, the controller 3 does not acquire the fire signal from the power module and does not activate the second fire extinguisher 23. The second current range is set as needed. In other embodiments of this application, the controller 3 determines whether the power module's electrical signal is abnormal by whether there is a sudden change in the power module's voltage. A sudden voltage change means that the voltage change value within a set time period exceeds a second voltage value; no sudden voltage change means that the voltage change value within the set time period is always less than or equal to the second voltage value. In other embodiments of this application, the controller 3 determines whether the power module's electrical signal is abnormal by determining whether the power module's current exceeds a second current range and / or whether there is a sudden change in the power module's voltage.

[0040] In this embodiment, since there are many wire joints in the power module, by detecting whether the power module is on fire, fire hazards caused by wire joint problems can be avoided, thereby protecting the electroplating equipment.

[0041] The detection system also includes an alarm 4, which is electrically connected to the controller 3. The controller 3 determines whether to activate the alarm 4 based on the electroplating module's electrical signal and the electroplating module's fire signal. Specifically, if the detected electroplating module's electrical signal is abnormal, but the electroplating module's fire signal is normal, the controller 3 sends an activation signal to the alarm 4, at which point the alarm 4 will sound; otherwise, the alarm 4 will not activate. The controller 3 also determines whether to activate the alarm 4 based on the power module's electrical signal and the power module's fire signal. Specifically, if the detected power module's electrical signal is abnormal, but the power module's fire signal is normal, the controller 3 sends an activation signal to the alarm 4, at which point the alarm 4 will sound; otherwise, the controller will not activate the alarm 4.

[0042] Figure 2 shows a flowchart of an electroplating equipment testing method according to an embodiment of this application, which is performed by the aforementioned testing system.

[0043] Referring to Figure 2, the detection process of the electroplating module in the electroplating equipment provided in the embodiment of this application includes the following steps:

[0044] S110: Obtain the operating current of the electroplating module.

[0045] A first current sensor is used to acquire the brush current in the electroplating module, thereby obtaining the operating current of the electroplating module by detecting the brush current. In other embodiments of this application, the brush can be replaced by an electric slip ring or other electrical transmission components. In other embodiments of this application, the first current sensor can be electrically connected to other devices in the electroplating module's operating circuit, or the first current sensor can be directly connected to the electroplating module's operating circuit.

[0046] S120: Determine whether the operating current of the electroplating module exceeds the first current range. If it does, proceed to step S130; if it does not, determine that the electroplating module poses no fire risk and the process is complete. The first current range is set as needed.

[0047] S130: Obtain the fire signal from the electroplating module.

[0048] If a smoke detector is used to detect a fire in the electroplating module, the fire signal will be smoke. If a heat detector is used, the fire signal will be temperature. If a flame detector is used, the fire signal will be flame.

[0049] S140: Determine if the fire signal of the electroplating module is normal. If it is normal, then trigger an alarm; if it is abnormal, then extinguish the fire in the electroplating module.

[0050] If smoke is detected by the smoke detector, the fire signal of the electroplating module is deemed abnormal, and the first fire extinguisher is activated. If no smoke is detected by the smoke detector, the fire signal of the electroplating module is deemed normal, and the alarm is activated. If the temperature is detected by the heat sensor and the set temperature is reached, the fire signal of the electroplating module is deemed abnormal, and the first fire extinguisher is activated. If the temperature is not detected by the heat sensor and the set temperature is not reached, the fire signal of the electroplating module is deemed normal, and the alarm is activated. If a flame is detected by the flame detector, the fire signal of the electroplating module is deemed abnormal, and the first fire extinguisher is activated. If no flame is detected by the flame detector, the fire signal of the electroplating module is deemed normal, and the alarm is activated.

[0051] In electroplating equipment, brushes and other electrical transmission components may experience wear and unevenness over time, leading to poor circuit contact during the electroplating process. Excessive contact resistance can cause overheating at the contact point, posing a fire hazard, and altering the current. Therefore, detecting brush current abnormalities allows for timely detection of potential safety hazards, protecting the electroplating equipment. Furthermore, this embodiment uses both the electroplating module's operating current and a fire alarm signal to determine the presence of a fire, minimizing losses due to misjudgment.

[0052] In step S120, if the operating current of the electroplating module does not exceed the first current range, then the operating voltage is checked to see if it exceeds the first voltage range. If it does, step S130 is executed; if it does not, it is determined that there is no fire risk, and the process is complete. The first voltage range is set as needed.

[0053] If the electroplating power supply is a constant current source, the operating current of the electroplating module does not change. Therefore, circuit abnormalities can be detected by detecting the operating voltage of the electroplating module.

[0054] In other embodiments of this application, in step S120, if the working current of the electroplating module does not exceed the first current range, the working voltage of the electroplating module is further detected to see if there is a voltage change. If there is a change, step S130 is executed. If there is no voltage change, it is determined that the electroplating module has no fire risk and the execution is completed.

[0055] In other embodiments of this application, only the operating voltage of the electroplating module is acquired, and the fire risk of the electroplating module is determined based on the operating voltage. In other embodiments of this application, the fire risk of the electroplating module is determined based on the operating power of the electroplating module or other electrical signals.

[0056] The electroplating equipment also detects the power module. Referring to Figure 3, Figure 3 shows a flowchart of a method for detecting whether a fire has occurred in the power module of the electroplating equipment according to an embodiment of this application. The detection method is executed by a controller and specifically includes the following steps:

[0057] S210: Obtain the operating current of the power module.

[0058] S220: Determine whether the operating current of the power module exceeds the second current range. If it does, proceed to step S230. If it does not exceed the range, determine that the power module poses no fire risk, and the process is complete. The second current range is set as needed.

[0059] S230: Obtain the fire signal from the power module.

[0060] S240: Determine if the fire signal of the power module is normal. If normal, trigger an alarm; if abnormal, extinguish the fire on the power module.

[0061] If smoke is detected by the smoke detector, the fire signal of the power module is determined to be abnormal, and the second fire extinguisher is activated. If no smoke is detected by the smoke detector, the fire signal of the power module is determined to be normal, and the alarm is activated. If the temperature is detected by the heat sensor and the set temperature is reached, the fire signal of the power module is determined to be abnormal, and the second fire extinguisher is activated. If the temperature is not detected by the heat sensor and the set temperature is not reached, the fire signal of the power module is determined to be normal, and the alarm is activated. If a flame is detected by the flame detector, the fire signal of the power module is determined to be abnormal, and the second fire extinguisher is activated. If no flame is detected by the flame detector, the fire signal of the power module is determined to be normal, and the alarm is activated.

[0062] In this embodiment, since there are many wire joints in the power module, by detecting whether the power module is on fire, fire hazards caused by wire joint problems can be avoided, thereby protecting the electroplating equipment.

[0063] In step S220, if the operating current of the power module does not exceed the second current range, then the operating voltage is checked to see if it exceeds the first voltage range. If it does, step S230 is executed; if it does not, it is determined that there is no fire risk, and the process is complete. The first voltage range is set as needed.

[0064] If the power supply in the power module is a constant current source, the operating current of the power module will not change. Therefore, circuit abnormalities can be detected by detecting the operating voltage of the power module.

[0065] In other embodiments of this application, in step S120, if the operating current of the power module does not exceed the second current range, the power module operating voltage is further detected to see if there is a voltage change. If there is a change, step S130 is executed. If there is no voltage change, it is determined that the power module has no fire risk and the execution is completed.

[0066] In other embodiments of this application, only the operating voltage of the power module is acquired, and the fire risk of the electroplating module is determined based on the operating voltage of the electroplating module. In other embodiments of this application, the fire risk of the power module is determined based on the operating power of the power module or other electrical signals.

[0067] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the embodiments disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein.

[0068] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A fire detection method for electroplating equipment, the electroplating equipment comprising an electroplating module and a power supply module for supplying power to the electroplating module, characterized in that, include: Obtain the electrical signal from the electroplating module; If the electrical signal of the electroplating module is normal, it is determined that the electroplating module has no fire risk. If the electrical signal of the electroplating module is abnormal, the first fire extinguisher will be activated to extinguish the fire in the electroplating module.

2. The fire detection method for electroplating equipment according to claim 1, characterized in that, The electrical signal of the electroplating module is obtained by detecting the brushes or slip rings of the electroplating module.

3. The fire detection method for electroplating equipment according to claim 2, characterized in that, The electroplating module electrical signal is the electroplating module operating current. The fire detection method further includes: if the electroplating module operating current is within a first current range, then the electroplating module electrical signal is determined to be normal; if the electroplating module operating current exceeds the first current range, then the electroplating module electrical signal is determined to be abnormal.

4. The fire detection method for electroplating equipment according to claim 2, characterized in that, The fire detection method further includes: if the change in the working voltage of the electroplating module is less than or equal to a set value, the electrical signal of the electroplating module is determined to be normal; if a sudden change in the working voltage of the electroplating module is detected, the electrical signal of the electroplating module is determined to be abnormal.

5. The fire detection method for electroplating equipment according to claim 1, characterized in that, Also includes: If the electrical signal of the electroplating module is abnormal, a fire signal of the electroplating module is obtained. If the fire signal of the electroplating module is abnormal, the first fire extinguisher is activated to extinguish the fire in the electroplating module. If the fire signal of the electroplating module is normal, the alarm is activated.

6. The fire detection method for electroplating equipment according to claim 1, characterized in that, Also includes: The power module's electrical signal is acquired. If the power module's electrical signal is normal, it is determined that the power module poses no fire risk. If the power module's electrical signal is abnormal, the second fire extinguisher is activated to extinguish the fire using the power module.

7. The fire detection method for electroplating equipment according to claim 6, characterized in that, If the power module's electrical signal is abnormal, the second fire extinguisher is activated. The steps for extinguishing the fire using the power module include: if the power module's electrical signal is abnormal, acquiring the fire signal of the power module; if the fire signal of the power module is abnormal, activating the second fire extinguisher to extinguish the fire in the power module; if the fire signal of the power module is normal, activating the alarm.

8. A fire detection system for electroplating equipment, the electroplating equipment comprising an electroplating module and a power supply module for supplying power to the electroplating module, characterized in that, include: A first electrical signal detector is used to detect the electrical signal of the electroplating module; The first fire extinguisher is used to extinguish the fire in the electroplating module; The controller is used to receive the electroplating module electrical signal detected by the first electrical signal detector, and to determine whether the electroplating module electrical signal is abnormal. When the electroplating module electrical signal is abnormal, the controller sends a fire extinguishing signal to the first fire extinguisher.

9. The fire detection system for electroplating equipment according to claim 8, characterized in that, The electrical signal of the electroplating module is the electrical signal of the brush or slip ring in the electroplating module.

10. The fire detection system for electroplating equipment according to claim 8, characterized in that, It also includes a first fire detector, which is used to detect the fire signal of the electroplating module and to send the detected fire signal to the controller. The controller is configured to send a fire extinguishing signal to the first fire extinguisher when it is determined that both the electrical signal and the fire signal of the electroplating module are abnormal.

11. The fire detection system for electroplating equipment according to claim 10, characterized in that, It also includes an alarm, and the controller is further configured to send an alarm signal to the alarm when it is determined that the electrical signal of the electroplating module is abnormal and the fire signal is normal.

12. The fire detection system for electroplating equipment according to claim 11, characterized in that, It also includes a second electrical signal detector for detecting the electrical signal of the power module and a second fire extinguisher for extinguishing the fire on the power module. The controller is further configured to send a fire extinguishing signal to the second fire extinguisher when it is determined that the electrical signal of the power module is abnormal.

13. The fire detection system for electroplating equipment according to claim 12, characterized in that, It also includes a second fire detector, which is used to detect the fire signal of the power module. The controller is also configured to send a fire extinguishing signal to the second fire extinguisher when it is determined that both the power module electrical signal and the fire signal are abnormal.

14. The fire detection system for electroplating equipment according to claim 13, characterized in that, The controller is also configured to send an alarm signal to the alarm device when it is determined that the power module electrical signal is abnormal and the fire signal is normal.

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