Temperature control roller, coating device, and thermocompression bonding device

Abstract

A temperature control roller (20) comprises a first flow path (53) and a second flow path (55). The first flow path (53) allows a heat medium to flow from one end portion to the other end portion in the axial direction of a roller body (24). The second flow path (55) allows the heat medium to flow from the other end portion to the one end portion in the axial direction of the roller body (24). The temperature of the heat medium flowing through the first flow passage (53) gradually approaches the temperature of the roller body (24) as the heat medium flows from the one end portion to the other end portion of the roller body (24). The temperature of the heat medium flowing through the second flow path (55) gradually approaches the temperature of the roller body as the heat medium flows from the other end portion to the one end portion of the roller body (24). In this way, by using two flow paths with different flow directions of the heat medium, the temperature of the roller body (24) can be made uniform in the axial direction. Therefore, the temperature of a base material can be controlled while suppressing temperature unevenness in the axial direction.

Description

Temperature-controlled roller, coating device, and thermocompression bonding device

[0001] The present invention relates to a temperature control roller that controls the temperature of a long strip-shaped substrate while transporting the substrate.

[0002] A temperature control roller that controls the temperature of a long strip-shaped substrate while conveying the substrate by rotating in contact with the substrate has been known. The temperature control roller heats the substrate, for example, to dry a liquid applied to the surface of the substrate.

[0003] A conventional temperature control roller is described, for example, in Patent Document 1. In Patent Document 1, hot water, which is a heat medium, is supplied to a flow path provided inside the temperature control roller, thereby heating a substrate that comes into contact with the temperature control roller.

[0004] Japanese Patent Application Laid-Open No. 2018-028361

[0005] In this type of temperature control roller, a flow path for hot water is formed in a spiral shape on the inside of the outer peripheral surface that comes into contact with the substrate. The hot water flows through the spiral flow path from one end to the other end in the axial direction of the temperature control roller.

[0006] However, with this configuration, the temperature of the hot water gradually decreases from one end of the temperature control roller to the other end in the axial direction. This causes a problem in that the temperature of the temperature control roller after heating differs between the one end and the other end in the axial direction. This problem becomes particularly pronounced when the temperature control roller is long in the axial direction.

[0007] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a temperature control roller that can control the temperature of a substrate while suppressing temperature unevenness in the axial direction.

[0008] The first invention of the present application is a temperature-controlled roller that controls the temperature of a long, strip-shaped substrate while rotating in contact with the substrate and transporting the substrate, and includes a roller body and a temperature-controlled flow path through which a heat medium flows within the roller body, the temperature-controlled flow path having a first flow path that extends spirally along the outer peripheral surface of the roller body and flows the heat medium from one end to the other end in the axial direction of the roller body, and a second flow path that extends spirally along the outer peripheral surface of the roller body and flows the heat medium from the other end to the one end in the axial direction of the roller body.

[0009] A second invention of the present application is a temperature-controlled roller of the first invention, wherein the temperature-controlled flow path further has a connecting flow path at the other end of the roller body that introduces the heat medium that has flowed through the first flow path into the second flow path.

[0010] A third aspect of the present invention is the temperature control roller of the first or second aspect, wherein the first flow path and the second flow path extend in a double spiral shape.

[0011] A fourth aspect of the present invention is the temperature control roller of the third aspect, wherein the width of the first flow path in the axial direction is the same as the width of the second flow path in the axial direction.

[0012] A fifth aspect of the present invention is the temperature control roller according to any one of the first to fourth aspects, wherein the roller body is heated by the heat medium.

[0013] The sixth invention of the present application is a coating device comprising a temperature control roller of the fifth invention and a coating unit that applies liquid to the substrate upstream of the temperature control roller in the transport path of the substrate or on the temperature control roller, and the liquid applied to the substrate by the coating unit dries by the heat of the heat medium.

[0014] The seventh invention of the present application is a thermocompression bonding device comprising a temperature control roller of the fifth invention and a pressure roller pressed against the outer peripheral surface of the temperature control roller, in which a plurality of substrates are transported between the temperature control roller and the pressure roller, and the plurality of substrates are compressed together by heat from the heat medium.

[0015] According to the first to seventh aspects of the present invention, the temperature of the heat medium flowing through the first flow path gradually approaches the temperature of the roller body as it flows from one end to the other end of the roller body. Similarly, the temperature of the heat medium flowing through the second flow path gradually approaches the temperature of the roller body as it flows from the other end to the first end of the roller body. By using two flow paths with different heat medium flow directions in this way, the temperature of the roller body can be made uniform in the axial direction. Therefore, the temperature of the substrate can be controlled while suppressing temperature unevenness in the axial direction.

[0016] In particular, according to the second aspect of the present invention, the supply of the heat medium to the temperature control flow path and the discharge of the heat medium from the temperature control flow path can be carried out only at one end of the roller body.

[0017] In particular, according to the third aspect of the present invention, the first flow paths and the second flow paths are arranged alternately along the axial direction, which makes it possible to make the temperature of the roller body more uniform in the axial direction.

[0018] In particular, according to the fourth aspect of the present invention, the temperature of the roller body can be made more uniform in the axial direction.

[0019] In particular, according to the fifth aspect of the present invention, the substrate can be heated while suppressing temperature variations in the axial direction.

[0020] 3 is a schematic diagram of a coating device; FIG. 4 is a control block diagram of a coating device; FIG. 5 is a longitudinal cross-sectional view including the axis of a temperature control roller; FIG. 6 is a side view of the temperature control roller with the outer cylinder member removed; FIG. 7 is a cross-sectional view of the temperature control roller taken along line A-A in FIG. 3; FIG. 8 is a cross-sectional view of the temperature control roller taken along line B-B in FIG. 3; and FIG. 9 is a schematic diagram of a thermocompression bonding device equipped with a temperature control roller.

[0021] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0022] 1. Configuration of Coating Apparatus> Fig. 1 is a schematic diagram of a coating apparatus 1 equipped with a temperature-controlled roller 20 according to one embodiment of the present invention. This coating apparatus 1 is an apparatus for manufacturing a catalyst-coated membrane (CCM) used in a cell of a solid polymer water electrolysis device. The coating apparatus 1 manufactures a catalyst-coated membrane assembly by forming a catalyst layer on the surface of an electrolyte membrane while transporting the electrolyte membrane. As shown in Fig. 1, the coating apparatus 1 includes a transport mechanism 10, a temperature-controlled roller 20, a coating unit 30, and a control unit 40.

[0023] The transport mechanism 10 transports a long strip-shaped substrate 9 in the longitudinal direction. In this embodiment, the substrate 9 is an electrolyte membrane. However, the substrate 9 may be a laminated substrate composed of an electrolyte membrane and a support film such as PET that is stronger than the electrolyte membrane. As shown in FIG. 1 , the transport mechanism 10 includes a supply roller 11, a plurality of transport rollers 12, and a recovery roller 13.

[0024] The supply roller 11 and the recovery roller 13 are rotated by the power of a motor (not shown). Before being conveyed, the substrate 9 is wound around the supply roller 11. The substrate 9 is unwound from the supply roller 11 and conveyed along a conveyance path formed by a plurality of conveyance rollers 12 and temperature control rollers 20. After being conveyed, the substrate 9 is wound around the recovery roller 13.

[0025] The temperature control roller 20 is a roller that rotates while supporting the substrate 9 in the middle of the substrate 9's transport path to apply catalyst ink and then dry it. The temperature control roller 20 has a larger outer diameter than the other transport rollers 12. As shown by the dashed line in FIG. 1 , a drive unit 21 composed of a motor or the like is connected to the temperature control roller 20. When the drive unit 21 is operated, the temperature control roller 20 rotates around a horizontally extending axis O. The substrate 9 is in contact with the outer circumferential surface of the temperature control roller 20 and is transported in an arc by the rotation of the temperature control roller 20.

[0026] The detailed configuration of the temperature control roller 20 will be described later.

[0027] The coating unit 30 is a mechanism that applies catalyst ink to the surface of the substrate 9 supported by the temperature control roller 20. The catalyst ink is a liquid in which catalyst particles are dispersed in a solvent. The solvent is, for example, water or alcohol. The catalyst particles are, for example, platinum (Pt), iridium (Ir), or ruthenium (Ru). The catalyst particles may be supported on a support such as carbon (C).

[0028] 1 , the coating unit 30 has a nozzle 31. The nozzle 31 has a discharge port 311 that faces the outer circumferential surface of the temperature control roller 20. The discharge port 311 is a slit-shaped opening that extends horizontally along the outer circumferential surface of the temperature control roller 20.

[0029] The nozzle 31 is connected to a catalyst ink supply unit 33 via a pipe 32. When the coating device 1 is in operation, catalyst ink is supplied from the catalyst ink supply unit 33 through the pipe 32 to the nozzle 31. The catalyst ink is then ejected from the ejection port 311 of the nozzle 31 toward the surface of the substrate 9. In this way, the catalyst ink is applied to the surface of the substrate 9.

[0030] The temperature control roller 20 has a temperature control flow path 22 therein. When the coating device 1 is operating, a heated heat medium is supplied to the temperature control flow path 22. The heat medium is, for example, hot water that is at a higher temperature than the temperature of the temperature control roller 20. This heats the outer peripheral surface of the temperature control roller 20. The substrate 9 that contacts the outer peripheral surface of the temperature control roller 20 is also heated. In other words, the temperature of the substrate 9 is controlled to a higher temperature than the temperature before it was introduced into the temperature control roller 20.

[0031] The catalyst ink applied to the surface of the substrate 9 is dried by heat transmitted from the heat medium via the outer peripheral surface of the temperature control roller 20. Specifically, the solvent in the catalyst ink is evaporated by the heat. As a result, a catalyst layer, which is a layer of catalyst particles, is formed on the surface of the substrate 9. The substrate 9 with the catalyst layer formed thereon is then separated from the temperature control roller 20 and transported by multiple transport rollers 12 to a recovery roller 13 for recovery.

[0032] The control unit 40 is an information processing device for controlling the operation of each unit of the coating device 1. Fig. 2 is a control block diagram of the coating device 1. As shown in Fig. 2, the control unit 40 is configured by a computer having a processor 41 such as a CPU, a memory 42 such as a RAM, and a storage unit 43 such as a hard disk drive. A computer program P for controlling the operation of the coating device 1 is stored in the storage unit 43.

[0033] 2, the control unit 40 is electrically connected to the above-mentioned transport mechanism 10, the drive unit 21 for the temperature control roller 20, the catalyst ink supply unit 33, and the heat medium supply mechanism 50 (described later). The control unit 40 controls the operation of each of the above-mentioned units in accordance with a computer program P. This allows the coating process and drying process for the substrate 9 to proceed.

[0034] 2. Temperature Control Roller Next, the detailed configuration of the temperature control roller 20 will be described. Fig. 3 is a vertical cross-sectional view including the axis O of the temperature control roller 20. Fig. 4 is a side view of the temperature control roller 20 with the outer cylinder member 26, which will be described later, removed. As shown in Figs. 3 and 4, the temperature control roller 20 has a shaft 23 and a roller main body 24.

[0035] The shaft 23 is a substantially cylindrical member extending horizontally along the axis O. The shaft 23 is made of a metal such as stainless steel or iron. The shaft 23 is rotatably supported by a bearing (not shown). An end of the shaft 23 is connected to a drive unit 21 configured by a motor or the like. When the drive unit 21 is operated, the shaft 23 rotates around the axis O.

[0036] The roller body 24 rotates together with the shaft 23 around the axis O. The roller body 24 has a cylindrical outer shape centered on the axis O. The diameter of the roller body 24 is, for example, 300 to 1600 mm. The length of the roller body 24 in the axial direction is, for example, 700 to 2000 mm.

[0037] The roller body 24 of this embodiment has an inner tube member 25, an outer tube member 26, a first side plate 27, and a second side plate 28. The inner tube member 25 is a cylindrical member fixed to the shaft 23. The outer tube member 26 is a cylindrical member fixed to the outer peripheral surface of the inner tube member 25.

[0038] The outer peripheral surface of the outer tube member 26 becomes the outer peripheral surface of the roller body 24. A plurality of suction holes (not shown) are formed in the outer peripheral surface of the outer tube member 26. The outer tube member 26 also has a suction flow path (not shown) that communicates with the plurality of suction holes. When the coating device 1 is in operation, gas is sucked out of the temperature control roller 20 from the suction flow path. This generates negative pressure in the plurality of suction holes. The substrate 9 is sucked onto the outer peripheral surface of the outer tube member 26 by this negative pressure.

[0039] The first side plate 27 is a disk-shaped member fixed to one axial end (hereinafter referred to as the "first end 241") of the roller body 24. The openings of the inner and outer tube members 25 and 26 on the first end 241 side are closed by the first side plate 27. The second side plate 28 is a disk-shaped member fixed to the other axial end (hereinafter referred to as the "second end 242") of the roller body 24. The openings of the inner and outer tube members 25 and 26 on the second end side are closed by the second side plate 28.

[0040] A temperature control flow path 22 through which a heat medium flows is provided inside the temperature control roller 20. As shown in Figures 3 and 4, the temperature control flow path 22 has an inlet flow path 51, an inlet chamber 52, a first flow path 53, a connecting flow path 54, a second flow path 55, a discharge chamber 56, and a discharge flow path 57.

[0041] The coating device 1 also has a heat medium supply mechanism 50 that supplies a heat medium to the temperature control flow path 22. The heat medium supply mechanism 50 is, for example, a hot water circulator. The heat medium supply mechanism 50 has a heater that heats the heat medium and a pump that flows the heat medium into the temperature control flow path 22. When the heat medium supply mechanism 50 is operated, the heat medium heated by the heater is supplied to the temperature control flow path 22. The temperature of the heat medium supplied from the heat medium supply mechanism 50 is, for example, 50 to 90°C.

[0042] Fig. 5 is a cross-sectional view of the temperature control roller 20 taken along line A-A in Fig. 3. As shown in Figs. 3 and 5, the inlet flow path 51 is provided inside the shaft 23 along the axis O. The heat medium supplied from the heat medium supply mechanism 50 is first introduced into the inlet flow path 51.

[0043] An introduction chamber 52 is provided at one end (the end on the first end 241 side) in the axial direction of the inner cylindrical member 25. The introduction chamber 52 is located outside the shaft 23. The heat medium that flows through the introduction flow path 51 is introduced into the introduction chamber 52 through first holes 231 provided on the outer periphery of the shaft 23. In this embodiment, a plurality of first holes 231 are provided in the shaft 23. This allows the flow path resistance of the heat medium to be reduced compared to when there is only one first hole 231.

[0044] The heat medium introduced into the introduction chamber 52 is introduced into the first flow path 53 through second holes 251 provided on the outer periphery of the inner cylindrical member 25. In this embodiment, a plurality of second holes 251 are provided in the inner cylindrical member 25. This allows the flow path resistance of the heat medium to be reduced compared to when there is only one second hole 251.

[0045] The first flow path 53 is a passage through which the heat medium flows from the first end 241 to the second end 242 of the roller body 24. The first flow path 53 extends spirally along the outer peripheral surface of the roller body 24. In this embodiment, the first flow path 53 extends spirally between the outer peripheral surface of the inner cylindrical member 25 and the inner peripheral surface of the outer cylindrical member 26. The heat medium introduced into the first flow path 53 flows spirally along the first flow path 53 around the inner cylindrical member 25, as indicated by arrow F1 in FIG. 4 .

[0046] The connecting flow path 54 is a flow path for introducing the heat medium that has flowed through the first flow path 53 into the second flow path 55 at the second end 242 of the roller body 24. Figure 6 is a cross-sectional view of the temperature control roller 20 taken along line B-B in Figure 3. As shown in Figures 3 and 6, the connecting flow path 54 is provided at the other end (the end on the second end 242 side) in the axial direction of the inner cylinder member 25. The connecting flow path 54 is located around the shaft 23.

[0047] The heat medium that has flowed through the first flow path 53 is introduced into the connecting flow path 54 through a third hole 252 provided on the outer periphery of the inner cylindrical member 25. In the present embodiment, a plurality of third holes 252 are provided in the inner cylindrical member 25. This allows the flow path resistance of the heat medium to be reduced compared to when there is only one third hole 252.

[0048] The heat medium introduced into the connecting flow path 54 is introduced into the second flow path 55 through a fourth hole 253, which is different from the third hole 252, provided on the outer periphery of the inner cylindrical member 25. In this embodiment, a plurality of fourth holes 253 are provided in the inner cylindrical member 25. This allows the flow path resistance of the heat medium to be reduced compared to when there is only one fourth hole 253.

[0049] The second flow path 55 is a passage through which the heat medium flows from the second end 242 to the first end 241 of the roller body 24. The second flow path 55 extends spirally along the outer peripheral surface of the roller body 24. In this embodiment, the second flow path 55 extends spirally between the outer peripheral surface of the inner cylindrical member 25 and the inner peripheral surface of the outer cylindrical member 26. The heat medium introduced into the second flow path 55 flows spirally along the second flow path 55 around the inner cylindrical member 25, as indicated by arrow F2 in FIG. 4 .

[0050] The first flow path 53 and the second flow path 55 are separated from each other by a spiral wall portion 59 provided on the outer circumferential surface of the inner cylindrical member 25. Therefore, the heat medium in the first flow path 53 and the heat medium in the second flow path 55 do not mix with each other.

[0051] 3 and 5 , a discharge chamber 56 is provided at one axial end (the end on the first end 241 side) of the inner cylindrical member 25. The discharge chamber 56 is located outside the shaft 23. The introduction chamber 52 and the discharge chamber 56 are separated from each other by a partition wall 58 inside the inner cylindrical member 25.

[0052] The heat medium that has flowed through the second flow path 55 is introduced into the discharge chamber 56 through a fifth hole 254 provided on the outer periphery of the inner cylindrical member 25. In the present embodiment, a plurality of fifth holes 254 are provided in the inner cylindrical member 25. This allows the flow path resistance of the heat medium to be reduced compared to when there is only one fifth hole 254.

[0053] The discharge flow path 57 is provided inside the shaft 23 along the axis O. The discharge flow path 57 is provided around the inlet flow path 51. The inlet flow path 51 and the discharge flow path 57 are separated from each other inside the shaft 23. The heat medium introduced into the discharge chamber 56 is introduced into the discharge flow path 57 through a sixth hole 232 provided on the outer periphery of the shaft 23. In this embodiment, a plurality of sixth holes 232 are provided in the shaft 23. This allows the flow resistance of the heat medium to be reduced compared to when there is only one sixth hole 232. The heat medium is then returned from the discharge flow path 57 to the heat medium supply mechanism 50.

[0054] The temperature of the heat medium flowing in the temperature control flow path 22 gradually decreases from the upstream side to the downstream side of the temperature control flow path 22. Specifically, the temperature of the heat medium flowing in the first flow path 53 gradually approaches the temperature of the roller body 24 as it flows from the first end 241 to the second end 242 of the roller body 24. Furthermore, the temperature of the heat medium flowing in the second flow path 55 further approaches the temperature of the roller body 24 as it flows from the second end 242 to the first end 241 of the roller body 24.

[0055] In the temperature-controlled roller 20 of this embodiment, the first flow path 53 and the second flow path 55, in which the heat medium flows in different directions, are used together. As a result, the temperature gradient of the heat medium is canceled out between the first flow path 53 and the second flow path 55. This makes the temperature of the roller body 24 uniform in the axial direction. Therefore, it is possible to heat the substrate 9 while suppressing temperature unevenness in the axial direction.

[0056] In particular, in the temperature control roller 20 of this embodiment, the first flow paths 53 and the second flow paths 55 are arranged in a double spiral, as shown in Figure 4. That is, the second flow paths 55 are arranged between the pitches of the first flow paths 53. In this way, the first flow paths 53 and the second flow paths 55 are arranged alternately in the axial direction. This makes it possible to make the temperature of the roller body 24 more uniform in the axial direction. Therefore, it is possible to further suppress unevenness in the temperature of the substrate 9 in the axial direction.

[0057] 4, in the temperature control roller 20 of this embodiment, the width D1 of the first flow path 53 in the axial direction and the width D2 of the second flow path 55 in the axial direction are the same. This makes it possible to make the temperature of the roller body 24 more uniform in the axial direction than when these widths D1 and D2 are different. Therefore, it is possible to further suppress temperature unevenness of the substrate 9 in the axial direction.

[0058] Furthermore, in the temperature control roller 20 of this embodiment, the heat medium that flows through the first flow path 53 passes through the connecting flow path 54 and flows into the second flow path 55. That is, the heat medium that flows through the first flow path 53, which is the outward path, turns back at the second end 242 of the roller body 24, and flows through the second flow path 55, which is the return path. In this way, the supply of the heat medium to the temperature control flow path 22 and the discharge of the heat medium from the temperature control flow path 22 can both be performed only at the first end 241 of the roller body 24. This simplifies the configuration for supplying and discharging the heat medium.

[0059] 3. Modifications Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

[0060] <3-1. First Modification> In the above embodiment, the first flow path 53 and the second flow path 55 are connected via the connecting flow path 54. However, the first flow path 53 and the second flow path 55 may be separate flow paths that are not connected to each other. In this case, the coating device 1 may separately include a first heat medium supply mechanism that supplies the heat medium to the first flow path 53 and a second heat medium supply mechanism that supplies the heat medium to the second flow path 55. Even in this case, by using the first flow path 53 and the second flow path 55 in combination, in which the heat medium flows in different directions, the temperature of the roller body 24 can be made uniform in the axial direction.

[0061] <3-2. Second Modification> In the above embodiment, the coating unit 30 applies the catalyst ink to the substrate 9 on the temperature control roller 20. However, the coating unit 30 may apply the catalyst ink to the substrate 9 upstream of the temperature control roller 20 in the transport path of the transport mechanism 10. Furthermore, the coating unit 30 may apply a liquid other than the catalyst ink to the substrate 9.

[0062] <3-3. Third Modification> In the above embodiment, the catalyst ink applied to the substrate 9 is heated and dried using the heat of the heat medium. However, the temperature control roller 20 may be configured to use the heat of the heat medium for other purposes. For example, the temperature control roller 20 may be configured to press multiple substrates 9 together using the heat from the heat medium.

[0063] Fig. 7 is a schematic diagram of a thermocompression bonding device 2 equipped with a temperature control roller 20. The thermocompression bonding device 2 in Fig. 7 has a first supply roller 11A and a second supply roller 11B. The thermocompression bonding device 2 in Fig. 7 also has a pressure roller 14 that is pressed against the outer peripheral surface of the temperature control roller 20.

[0064] The first substrate 9A fed from the first supply roller 11A and the second substrate 9B fed from the second supply roller 11B are transported between the temperature control roller 20 and the pressure roller 14. At this time, the first substrate 9A and the second substrate 9B are pressed against each other by the pressure from the pressure roller 14, and are heated by the heat from the temperature control roller 20. As a result, the first substrate 9A and the second substrate 9B are pressed against each other.

[0065] The temperature control roller 20 has a first flow path 53 and a second flow path 55, which have different flow directions of the heat medium. This makes the temperature of the roller body 24 uniform in the axial direction. Therefore, the first substrate 9A and the second substrate 9B can be pressure-bonded uniformly in the axial direction.

[0066] <3-4. Fourth Modification> In the above embodiment, the roller body 24 is heated by a heat medium. However, the heat medium may also cool the roller body 24. For example, the heat medium may be cold water that is at a lower temperature than the temperature-controlled roller 20. In other words, the heat medium may be any medium that controls the temperature of the roller body 24 to a higher or lower temperature than before the temperature control.

[0067] <3-5. Fifth Modification> The temperature control roller 20 in the above embodiment has one first flow path 53 and one second flow path 55. However, the temperature control roller 20 may have a plurality of first flow paths 53 and a plurality of second flow paths 55.

[0068] <3-6. Sixth Modification> In the above embodiment, an electrolyte membrane used in a cell of a water electrolysis device is given as an example of the substrate 9. However, the substrate 9 may also be an electrolyte membrane used in a cell of a fuel cell. Furthermore, the substrate 9 may also be an electrolyte membrane used in a liquid organic hydrogen carrier (LOHC) process for producing an organic hydride (e.g., toluene-methylcyclohexane) by hydrogenating an aromatic compound such as toluene. Furthermore, the substrate in the present invention is not limited to an electrolyte membrane, and may also be printing paper, a resin film, a metal foil, or the like.

[0069] Furthermore, the elements appearing in the above-described embodiments and modifications may be combined as appropriate or some may be deleted within the scope of not causing any contradiction.

[0070] DESCRIPTION OF SYMBOLS 1: Coating device 2: Thermocompression bonding device 9: Substrate 10: Conveying mechanism 11: Supply roller 12: Conveying roller 13: Recovery roller 14: Pressure roller 20: Temperature control roller 21: Driving section 22: Temperature control flow path 23: Shaft 24: Roller body 25: Inner cylindrical member 26: Outer cylindrical member 27: First side plate 28: Second side plate 30: Coating section 40: Control section 50: Heat medium supply mechanism 51: Inlet flow path 52: Inlet chamber 53: First flow path 54: Connection flow path 55: Second flow path 56: Discharge chamber 57: Discharge flow path 241: First end 242: Second end

Claims

1. A temperature control roller that controls the temperature of a long, strip-shaped substrate while rotating in contact with the substrate and transporting the substrate, comprising: a roller body; and a temperature control flow path through which a heat medium flows within the roller body, wherein the temperature control flow path has: a first flow path that extends spirally along the outer peripheral surface of the roller body and flows the heat medium from one end to the other end in the axial direction of the roller body; and a second flow path that extends spirally along the outer peripheral surface of the roller body and flows the heat medium from the other end to the one end in the axial direction of the roller body.

2. A temperature control roller according to claim 1, wherein the temperature control flow path further has a connecting flow path at the other end of the roller body that introduces the heat medium that has flowed through the first flow path into the second flow path.

3. A temperature control roller according to claim 1 or 2, wherein the first flow path and the second flow path extend in a double spiral shape.

4. A temperature control roller according to claim 3, wherein the width of the first flow path in the axial direction is the same as the width of the second flow path in the axial direction.

5. A temperature control roller according to any one of claims 1 to 4, wherein the roller body is heated by the heat medium.

6. A coating device comprising: a temperature control roller according to claim 5; and a coating unit that applies a liquid to the substrate, located upstream of the temperature control roller in the transport path of the substrate or on the temperature control roller, wherein the liquid applied to the substrate by the coating unit is dried by the heat of the heat medium.

7. A thermocompression bonding device comprising the temperature control roller according to claim 5 and a pressure roller that is pressed against the outer peripheral surface of said temperature control roller, wherein a plurality of said substrates are transported between said temperature control roller and said pressure roller, and the plurality of said substrates are pressure-bonded by heat from said heat medium.

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