Heating conductive device for cross-sectional passivation repair of half-cut cell

Abstract

The present invention relates to the technical field of manufacturing of photovoltaic cells, and relates to a heating conductive device for cross-sectional passivation repair of a half-cut cell. In the present invention, an air inlet assembly, height-adjustment mechanisms, transmission mechanisms, a heater and a radio frequency power supply are provided to form the heating conductive device for cross-sectional passivation repair of the half-cut cell, ammonia gas can be decomposed into hydrogen and nitrogen under the action of plasma to act on a cross section to be repaired of a half-cut cell slice in each cassette, and a heating discharge effect of the heater is used, so that the nitrogen reacts on the cross section of the half-cut cell slice to form a silicon nitride film, improving the working power and performance of the half-cut cell, reducing the loss, and performing coating repair on the cross-sectional passivation at a cut-off position, to prevent excessive operations after cutting from affecting the working efficiency.

Description

Heating and conducting device for cross-section passivation repair of half-cell wafer TECHNICAL FIELD

[0001] The present application relates to a heating and conducting device for cross-section passivation repair of half-cell wafer, belonging to the technical field of photovoltaic cell manufacturing. BACKGROUND

[0002] Solar photovoltaic cells are a new type of clean energy cells that directly convert solar light energy into electrical energy. Currently, mainstream wafer production uses large-size silicon wafers such as 182mm*182mm and 210mm*210mm. Research has found that cutting the whole wafer into half-wafer slices, such as 182mm*91mm and 210mm*105mm, can reduce the current through each main grid to 1 / 2, thus reducing the internal power consumption of half-wafer modules to 1 / 4 of that of whole-wafer modules. Compared with whole-wafer modules, half-wafer modules can increase power by 5%-10%.

[0003] In the prior art, laser cutting of whole-wafer is often used to obtain half-wafer, but it is currently difficult to repair the cross-section passivation of the cutting damage of half-wafer, which greatly reduces the cutting efficiency, and if this defect still exists, it will greatly affect production.

[0004] However, at present, the prior art only has processing equipment for coating whole-wafer, such as the photovoltaic cell processing equipment shown in CN118173648A or CN221109064U. Since the current coating equipment companies and photovoltaic factories all require whole-wafer coating, they can only process whole-wafer and cannot repair the cross-section passivation of the cutting damage of half-wafer, which will result in low efficiency of the entire work process and affect production.

[0005] Therefore, at present, it is urgent to find a special device that can be used for cross-section passivation repair of half-wafer to solve the problems of production efficiency and module power. SUMMARY

[0006] In order to solve the above problems, the present application provides a heating and conducting device for cross-section passivation repair of half-cell wafer, comprising:

[0007] The upper chamber shell comprises an air inlet assembly mounted on the inner side of the upper chamber shell and a conducting mechanism connected to the air inlet assembly.

[0008] A chamber lower shell is hinged to the chamber upper shell and is located below the chamber upper shell. The chamber lower shell comprises a heater cold end fixed to the chamber lower shell, a lifting mechanism connected to the heater cold end and fixed to the chamber lower shell, a plurality of transmission mechanisms fixed to the chamber lower shell and located above the heater cold end, a carrier plate connected above the transmission mechanisms, and a plurality of cassette boxes mounted on the carrier plate and located below the heater, wherein the cassette boxes allow placement of half-cell slices.

[0009] A heater is located between the air inlet assembly and the cassette box and is connected to the heater cold end and the lifting mechanism.

[0010] A radio frequency power supply is connected to the conductive mechanism and the heater cold end.

[0011] The carrier plate and the air inlet assembly are allowed to be conductively oxidized by the radio frequency power supply and the conductive mechanism, and the cross section of the half-cell slice in the cassette box is plated by the gas decomposed by the air inlet assembly. The heating range of the heater allows radiation to all locations of the cassette boxes under the driving action of the lifting mechanism.

[0012] The chamber upper shell and the chamber lower shell are connected to form a complete vacuum chamber space structure. The inner side of the chamber upper shell refers to the side of the vacuum chamber space structure relative to the outside.

[0013] Further, the air inlet assembly comprises an insulating plate, a partition plate, an air inlet pipe assembly, an air inlet plate cover plate, and an air inlet bottom plate connected layer by layer from top to bottom. The insulating plate is connected to the conductive part of the chamber upper shell. The air inlet pipe assembly comprises two air inlet side plates connected to the partition plate on both sides, and a plurality of horizontally arranged air inlet pipes connected between the two air inlet side plates. The air inlet side plate has a plurality of air inlet holes leading to the air inlet plate cover plate.

[0014] Further, the air inlet plate cover plate and the air inlet bottom plate are respectively milled with a plurality of first and second groove holes arranged in parallel. The air inlet bottom plate also has a plurality of transverse grooves alternately arranged with the second groove holes, forming an interlaced longitudinal and transverse groove structure on the surface of the air inlet bottom plate. The groove structure is uniformly distributed with one or more of water, TMA, and ammonia.

[0015] In one embodiment of the present application, nine uniform flow plates are arranged below the groove structure of the air inlet bottom plate. The uniform flow plates are sealed and connected to the groove structure by a sealing ring, and are arranged in a nine-square grid form. The TMA, water, and other sources from the air inlet bottom plate will uniformly fall onto the surface of the half-cell slice in the cassette box after passing through the uniform flow plate, and the cross section of the half-cell slice will be plated.

[0016] Further, the conductive mechanism is connected to the air inlet bottom plate, and the air inlet plate cover plate, the air inlet bottom plate, and the uniform flow plate have a conductive function.

[0017] Further, the transmission mechanism comprises a reduction motor, a synchronous wheel connected with the reduction motor through a synchronous belt, a magnetic fluid connected with the synchronous wheel, a transmission shaft connected with the magnetic fluid through a first shaft coupling, bearing housings installed on both sides of the transmission shaft, and a roller set connected with the transmission shaft.

[0018] Further, the roller set comprises a plurality of first rollers and a plurality of second rollers installed on both sides of the first rollers, the first rollers are flush with the surface of the carrier plate, the second rollers are installed on both sides of the carrier plate and protrude from the surface of the carrier plate to prevent the carrier plate from deviating left and right when moving, and the first rollers and the second rollers are made of Teflon and can insulate the carrier plate from the lower shell of the chamber.

[0019] In an embodiment of the present application, the transmission shaft has a limiting boss at each end to prevent the carrier plate from tilting when the transmission mechanism moves.

[0020] Further, the lifting mechanism comprises a commutator, two connecting shafts connected with both sides of the commutator through a second shaft coupling, two screw lifters connected with the two connecting shafts respectively, a first motor lifting assembly and a second motor lifting assembly connected with both sides of the screw lifters through a connecting plate, the first motor lifting assembly and the second motor lifting assembly carrying the heater, and an insulating flange connected with the cold end of the heater.

[0021] The first motor lifting assembly and the second motor lifting assembly are connected with the insulating flange through a support plate, the insulating flange is connected with a bellows, and the bellows is connected with the bottom of the chamber, allowing the bellows and the insulating flange to be connected when the lifting mechanism lifts the heater.

[0022] Advantages of the present application:

[0023] The present application sets up an air inlet assembly, a lifting mechanism, a transmission mechanism, a heater and a radio frequency power supply to form a heating and conducting device specially used for cross-section passivation repair of half-cell slices, which can decompose ammonia into hydrogen and nitrogen under the action of plasma and act on the repair cross-section of the half-cell slice in the slice box, cooperate with the heating and discharging effect of the heater, make the nitrogen react to form a silicon nitride film on the cross-section of the half-cell slice, not only improve the working power and performance of the half-cell slice, but also reduce the loss, and the cross-section passivation at the cutting position is repaired by coating, avoiding the influence of the excess operation after cutting on the working efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a front view of the overall structure in an embodiment of the present application.

[0025] Figure 2 is a structural schematic view of the air inlet assembly in an embodiment of the present application.

[0026] Figure 3 is a schematic diagram of the structure of the air inlet bottom plate and the flow uniformizing plate in an embodiment of the present application.

[0027] Figure 4 is a schematic diagram of the structure of the transmission mechanism in an embodiment of the present application.

[0028] Figure 5 is a schematic diagram of the structure of the lifting mechanism in an embodiment of the present application.

[0029] In the figure, 1, air inlet assembly; 2, conductive mechanism; 3, heater; 4, sheet box; 5, carrier plate; 6, transmission mechanism; 7, lifting mechanism; 8, radio frequency power supply;

[0030] 101, conductive part of the chamber upper shell; 102, insulating plate; 103, partition plate; 104, air inlet side plate; 105, air inlet plate cover plate; 106, air inlet bottom plate; 107, flow uniformizing plate; 107-1, first flow uniformizing plate; 107-2, second flow uniformizing plate; 107-3, third flow uniformizing plate; 107-4, fourth flow uniformizing plate; 107-5, fifth flow uniformizing plate; 107-6, sixth flow uniformizing plate; 107-7, seventh flow uniformizing plate; 107-8, eighth flow uniformizing plate; 107-9, ninth flow uniformizing plate; 108, air inlet pipe assembly;

[0031] 601, synchronous wheel; 602, magnetic fluid; 603, first coupling; 604, synchronous belt; 605, speed reduction motor; 606, bearing seat; 607, transmission shaft; 608, first roller; 609, second roller;

[0032] 701, first motor lifting assembly; 702, spiral lifter; 703, connecting plate; 704, connecting shaft; 705, commutator; 706, second coupling; 707, second motor lifting assembly; 708, support plate; 709, insulating flange; 710, bellows. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0034] In the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In the present application, the "first", "second" are only used to distinguish the same components of different positions or different characteristics, and have no other limiting meaning; the "upper" refers to the direction of each component away from the ground, and the "lower" refers to the direction of each component away from the ground.

[0036] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "above" and "on" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "under" and "under" of the first feature to the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0037] Embodiment 1

[0038] As shown in FIGS. 1-5, the present application provides a heating conductive device for half-cell slice section passivation repair, comprising:

[0039] The upper chamber shell comprises an air inlet assembly 1 mounted on the inner side of the upper chamber shell, and a conductive mechanism 2 connected to the air inlet assembly 1;

[0040] The lower chamber shell is hinged to the upper chamber shell and located below the upper chamber shell, and comprises a heater cold end fixed to the lower chamber shell, a lifting mechanism 7 connected to the heater cold end and fixed to the lower chamber shell, a plurality of transmission mechanisms 6 fixed to the lower chamber shell and located above the heater cold end, and a carrier plate 5 connected above the transmission mechanism 6, wherein a plurality of wafer boxes 4 are mounted on the carrier plate 5 and located below the heater 3, and the wafer boxes 4 allow the placement of half-cell slice sections; the lower chamber shell is also provided with a vacuum pipeline;

[0041] The heater 3 is located between the air inlet assembly 1 and the wafer box 4, and is connected to the heater cold end and the lifting mechanism 7;

[0042] The radio frequency power supply 8 is connected to the conductive mechanism 2 and the heater cold end;

[0043] Allowing the conductive oxidation treatment of the carrier plate 5 and the air inlet assembly 1 by the radio frequency power supply 8 and the conductive mechanism 2, and the film coating of the cross section of the half-cell battery slice in the sheet box 4 by the gas decomposed by the air inlet assembly 1, the heating range of the heater 3 allows the radiation to all positions where the sheet box 4 is located under the driving action of the lifting mechanism 7.

[0044] The upper chamber shell and the lower chamber shell are connected to form a complete vacuum chamber space structure, and the inner side of the upper chamber shell refers to the side of the vacuum chamber space structure relative to the outside.

[0045] Further, the air inlet assembly 1 comprises an insulation plate 102, a partition plate 103, an air inlet pipe assembly 108, an air inlet cover plate 105, and an air inlet bottom plate 106 connected layer by layer from top to bottom; the insulation plate 102 is connected with the conductive part of the upper chamber shell; the air inlet pipe assembly 108 comprises two air inlet side plates 104 connected on both sides of the partition plate 103, and a plurality of horizontally arranged air inlet pipes are connected between the two air inlet side plates 104; the air inlet side plate 104 has a plurality of air inlet holes leading to the air inlet cover plate 105.

[0046] Further, the air inlet cover plate 105 and the air inlet bottom plate 106 are respectively milled with a plurality of first and second groove holes distributed in parallel, and the air inlet bottom plate 106 further has a plurality of transverse grooves alternately arranged with the second groove holes, the transverse grooves and the second groove holes form an interlaced longitudinal and transverse groove structure on the surface of the air inlet bottom plate 106, and the groove structure is uniformly distributed with one or more of water, TMA, and ammonia.

[0047] In an embodiment of the present application, nine uniform flow plates 107 are arranged below the groove structure of the air inlet bottom plate 106, and the uniform flow plates 107 are sealed and connected with the groove structure through a sealing ring, as shown in FIG. 3, the uniform flow plates 107 are arranged in a nine-square grid style. The TMA, water and other sources from the air inlet bottom plate will uniformly fall onto the surface of the half-cell battery slice in the sheet box after passing through the uniform flow plate, and the cross section of the half-cell battery slice is coated.

[0048] Further, the conductive mechanism 2 is connected with the air inlet bottom plate 106, and the air inlet cover plate 105, the air inlet bottom plate 106, and the uniform flow plate 107 have a conductive function.

[0049] Further, the transmission mechanism 6 comprises a speed reduction motor 605, a synchronous wheel 601 connected with the speed reduction motor 605 through a synchronous belt 604, a magnetic fluid 602 connected with the synchronous wheel 601, the magnetic fluid 602 is connected with a transmission shaft 607 through a first coupling 603, the transmission shaft 607 is provided with a bearing seat 606 on both sides, and the transmission shaft 607 is connected with a roller group bearing the carrier plate 5.

[0050] Further, the roller set comprises a plurality of first rollers 608 and a plurality of second rollers 609 located on both sides of the first rollers 608, the first rollers 608 are flush with the surface of the carrier plate 5, the second rollers 609 are installed on both sides of the carrier plate 5 and protrude from the surface of the carrier plate 5 to prevent the carrier plate 5 from running left and right when moving, the materials of the first rollers 608 and the second rollers 609 are Teflon and can insulate the carrier plate 5 from the conductive lower shell of the chamber.

[0051] The transmission shaft 607 has a limiting boss at both ends to prevent the carrier plate from tilting when the transmission mechanism moves.

[0052] Further, the lifting mechanism 7 comprises a reverser 705, two connecting shafts 704 connected to both sides of the reverser 705 through a second coupling 706, two screw lifters 702 connected to the two connecting shafts 704 respectively, the screw lifters 702 are connected to a first motor lifting assembly 701 and a second motor lifting assembly 707 through a connecting plate 703, the first motor lifting assembly 701 and the second motor lifting assembly 707 carry the heater 3, and the cold end of the heater is connected to an insulating flange 709.

[0053] The first motor lifting assembly 701 and the second motor lifting assembly 707 are connected to the insulating flange 709 through a support plate 708, the insulating flange 709 is connected to a bellows 710, and the bellows 710 is connected to the bottom of the chamber. When the lifting mechanism 7 lifts the heater 3, the bellows 710 and the insulating flange 709 connected to the cold end of the heater lift together.

[0054] Embodiment 2

[0055] This embodiment shows the working principle of the heating and conductive device described in embodiment 1:

[0056] Step one: evenly put the cut half battery slices into the slice box 4, and put the carrier plate 5 carrying a plurality of slice boxes 4 into the transmission mechanism 6, the magnetic fluid 602 is rotated by the synchronous wheel 601 and the synchronous belt 604 driven by the reduction motor 605, so that the first coupling 603 and the transmission shaft 607 rotate synchronously, and then drive the first roller 608 and the second roller 609 connected to the transmission shaft 607 to rotate, and the carrier plate 5 enters the vacuum chamber space structure formed by the upper shell and the lower shell of the chamber under the action of the rotation of the first roller 608 and the second roller 609;

[0057] Step two: the heater 3 is lowered to be flush with the slice box 4 by the lifting mechanism 7, the radio frequency power supply 8 is connected to the cold end of the heater through the conductive mechanism 2, the air inlet assembly 1 and the heater 3 are conductive, and the source is connected synchronously, and then the end face of the half battery slice in the slice box 4 is coated after falling through the air inlet assembly 1;

[0058] Step three: after the coating is completed, the source is closed at the same time the RF power 8 stops conducting, the lifting mechanism 7 rises the heater 3, and the transmission mechanism 6 moves the carrier plate 5 to the next chamber.

[0059] Although the present application has been disclosed in its preferred embodiments as above, it is not intended to limit the present application, and any person skilled in the art can make various modifications and modifications without departing from the spirit and scope of the present application, and therefore the protection scope of the present application should be defined by the claims.

Claims

1. A heating conductive device for cross-section passivation repair of a half-cell wafer, characterized in that, The application relates to a chamber for electrochemical oxidation and coating of a cross section of a half battery slice. The chamber comprises: an upper chamber shell, an air inlet assembly (1) mounted on the inner side of the upper chamber shell, and a conductive mechanism (2) connected with the air inlet assembly (1); a lower chamber shell hinged to the upper chamber shell and located below the upper chamber shell, the lower chamber shell comprising a heater cold end fixed to the lower chamber shell, a lifting mechanism (7) connected with the heater cold end and fixed to the lower chamber shell, a plurality of transmission mechanisms (6) fixed to the lower chamber shell and located above the heater cold end, a carrier plate (5) connected above the transmission mechanisms (6), a plurality of cassette boxes (4) mounted on the carrier plate (5) and located below the heater (3), and a vacuum pipeline arranged on the lower chamber shell. The heater (3) is located between the air inlet assembly (1) and the cassette box (4) and is connected with the heater cold end and the lifting mechanism (7). A radio frequency power supply (8) is connected with the conductive mechanism (2) and the heater cold end. The carrier plate (5) and the air inlet assembly (1) are subjected to conductive oxidation treatment through the radio frequency power supply (8) and the conductive mechanism (2), and the cross section of the half battery slice in the cassette box (4) is subjected to coating through the gas decomposed by the air inlet assembly (1), and the heating range of the heater (3) allows radiation to all positions of the cassette boxes (4) under the driving action of the lifting mechanism (7). The air inlet assembly (1) comprises, from top to bottom, an insulating plate (102), a partition plate (103), an air inlet pipe assembly (108), an air inlet cover plate (105) and an air inlet bottom plate (106), the insulating plate (102) is connected with a conductive part (101) of the upper chamber shell, the air inlet pipe assembly (108) comprises two air inlet side plates (104) connected with the partition plate (103) on both sides, a plurality of horizontally arranged air inlet pipes are connected between the two air inlet side plates (104), and the air inlet side plates (104) have a plurality of air inlet holes leading to the air inlet cover plate (105).

2. The heating and conducting device for cross-section passivation repair of a half cell according to claim 1, wherein, The air inlet cover plate (105) and the air inlet bottom plate (106) are respectively milled with a plurality of first groove holes and second groove holes arranged in parallel, the air inlet bottom plate (106) further has a plurality of transverse grooves alternately arranged with the second groove holes, the transverse grooves and the second groove holes form an interlaced longitudinal and transverse groove structure on the surface of the air inlet bottom plate (106), and the groove structure is uniformly distributed with one or more of water, TMA and ammonia.

3. The heating and conducting device for cross-section passivation repair of a half cell according to claim 2, characterized in that, Nine flow uniformizing plates (107) are arranged below the groove structure of the air inlet bottom plate (106), the flow uniformizing plates (107) are sealingly connected with the groove structure through sealing rings, and the flow uniformizing plates (107) are arranged in a nine-square form.

4. The heating and conducting device for cross-section passivation repair of a half cell according to claim 3, wherein, The conductive mechanism (2) is connected with the air inlet bottom plate (106), and the air inlet cover plate (105), the air inlet bottom plate (106) and the flow uniformizing plates (107) have a conductive function.

5. The heating and conducting device for cross-section passivation repair of a half cell according to claim 4, wherein, ​ 6. The heating and conducting device for cross-section passivation repair of a half cell according to claim 1, wherein, The transmission mechanism (6) comprises a reduction motor (605), a synchronous wheel (601) connected with the reduction motor (605) through a synchronous belt (604), a magnetic fluid (602) connected with the synchronous wheel (601), the magnetic fluid (602) connected with a transmission shaft (607) through a first shaft coupling (603), the transmission shaft (607) provided with bearing seats (606) on both sides, and the transmission shaft (607) connected with a roller set bearing the carrier plate (5).

7. The heating and conducting device for cross-section passivation repair of a half cell according to claim 6, wherein, The roller set comprises a plurality of first rollers (608) and a plurality of second rollers (609) located on both sides of the first rollers (608), the first rollers (608) flush with the surface of the carrier plate (5), the second rollers (609) protruding from the surface of the carrier plate (5) and installed on both sides of the carrier plate (5), and the first rollers (608) and the second rollers (609) made of Teflon and capable of insulating the carrier plate (5) from the lower shell of the cavity.

8. The heating and conducting device for cross-section passivation repair of a half cell according to claim 7, wherein, The transmission shaft (607) is provided with a limiting boss at both ends.

9. The heating and conducting device for cross-section passivation repair of a half cell according to claim 1, wherein, The lifting mechanism (7) comprises a commutator (705), two connecting shafts (704) connected with both sides of the commutator (705) through a second shaft coupling (706), two screw lifters (702) respectively connected with the two connecting shafts (704), the screw lifters (702) connected with a first motor lifting assembly (701) and a second motor lifting assembly (707) through connecting plates (703) on both sides, the first motor lifting assembly (701) and the second motor lifting assembly (707) bearing the heater (3), and the cold end of the heater connected with an insulating flange (709).

10. The heating and conducting device for cross-section passivation repair of a half-cell according to claim 9, wherein, The first motor lifting assembly (701) and the second motor lifting assembly (707) are connected with the insulating flange (709) through a support plate (708), the insulating flange (709) connected with a bellows (710), the bellows (710) connected with the bottom of the cavity, and when the lifting mechanism (7) drives the heater (3) to lift, the bellows (710) and the insulating flange (709) connected with the cold end of the heater lift together.

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