Discharge tube diagnostic device and discharge tube diagnostic method

Abstract

A discharge tube diagnostic device (1) according to an embodiment comprises a light-emitting part (11), light-receiving parts (12), a generation unit (42), a diagnosis unit (43), and a display unit (22). The light-emitting part (11) irradiates a discharge part (10e) with light. The light-receiving parts (12) receive light emitted from the light-emitting part (11) and transmitted through the discharge part (10e). The generation unit (42) determines the transmittance of light on the basis of the amount of received light obtained by the light-receiving parts (12) for each of a plurality of regions into which a target range, in which the degree of deterioration of the discharge part (10e) is to be diagnosed, is divided, and generates first two-dimensional mapping data (D1) in which the transmittance in the plurality of regions arranged on a two-dimensional plane obtained by deploying the discharge part (10e) is mapped. The diagnosis unit (43) processes the first two-dimensional mapping data (D1) such that one or more colors are displayed in gradation in accordance with the transmittance of each of the plurality of regions. The display unit (22) displays the processed first two-dimensional mapping data (D1).

Description

Discharge tube diagnostic device and discharge tube diagnostic method

[0001] An embodiment of the present invention relates to a discharge tube diagnostic device and a discharge tube diagnostic method.

[0002] An ozone generator comprises a discharge tube with a discharge part having a dielectric and a metal film (dielectric electrode) overlaid on the dielectric, and a ground electrode separated from the discharge tube by a specified discharge gap. When a high-frequency high voltage from a power supply is applied between the dielectric electrode and the ground electrode, a silent discharge occurs in the discharge gap, and ozone molecules are generated from the oxygen molecules in the source gas.

[0003] Japanese Patent Application Laid-Open No. 2021-012159

[0004] The discharge tubes of this type of ozone generator may deteriorate as the metal film gradually disappears over time, resulting in a decrease in ozone generation efficiency. If the progress of discharge tube deterioration could be understood, an operator could predict the deterioration of the discharge tube and replace the discharge tube at the appropriate time. However, with conventional diagnostic methods, while the operator could determine the deterioration status of the discharge tube at the time of diagnosis, it was difficult to accurately grasp the progress of discharge tube deterioration and predict its deterioration.

[0005] An object of the present invention is to provide a discharge tube diagnostic device and a discharge tube diagnostic method that can predict the progress of deterioration of a discharge tube.

[0006] To achieve the above object, a discharge tube diagnosis device according to an embodiment of the present invention includes a light-emitting unit, a light-receiving unit, a generation unit, a diagnosis unit, and a display unit. The light-emitting unit is located either inside or outside a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric, and irradiates light onto the discharge unit. The light-receiving unit is located either inside or outside the discharge unit, and receives light irradiated from the light-emitting unit and transmitted through the discharge unit. The generation unit calculates light transmittance based on the amount of light received by the light-receiving unit for each of a plurality of regions defining a target range for diagnosing the degree of deterioration of the discharge unit, and generates first two-dimensional mapping data in which the transmittance of each of the plurality of regions arranged on a two-dimensional plane in which the discharge unit is laid out is mapped. The diagnosis unit processes the first two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions. The display unit displays the first two-dimensional mapping data processed by the diagnosis unit.

[0007] FIG. 1 is a perspective view of an example of a discharge tube diagnosis apparatus according to the first embodiment. FIG. 2 is a cross-sectional view of an example of a discharge tube that is a diagnosis target of the discharge tube diagnosis apparatus according to the first embodiment. FIG. 3 is a cross-sectional view of a portion of the example of the discharge tube diagnosis apparatus according to the first embodiment. FIG. 4 is a detailed cross-sectional view of a portion of the example of the discharge tube diagnosis apparatus according to the first embodiment. FIG. 5 is a diagram illustrating an example of the hardware configuration of a control device in the discharge tube diagnosis apparatus according to the first embodiment. FIG. 6 is a diagram illustrating an example of the functional configuration of the control device in the discharge tube diagnosis apparatus according to the first embodiment. FIG. 7 is a diagram illustrating the light transmittance of a discharge portion of a discharge tube according to the first embodiment. FIG. 8 is a diagram for explaining two-dimensional mapping in the discharge tube diagnosis process according to the first embodiment. FIG. 9 is a diagram illustrating an example of two-dimensional mapping data in the discharge tube diagnosis process according to the first embodiment. FIG. 10 is an enlarged view of a portion of the two-dimensional mapping data in FIG. 9. FIG. 11 is a diagram illustrating an example of a case where two-dimensional mapping data is displayed in a gradation in the discharge tube diagnosis process according to the first embodiment. FIG. 12 is a diagram illustrating an example of two-dimensional mapping data displayed in a gradation in the discharge tube diagnosis process according to the first embodiment. FIG. 13 is a diagram showing an example of two-dimensional mapping data in which a gradation display is performed based on changes in transmittance over time in the discharge tube diagnosis processing of the second embodiment. FIG. 14 is a diagram showing an example of two-dimensional mapping data in which a high transmittance region is extracted and displayed in a gradation display in the discharge tube diagnosis processing of the third embodiment. FIG. 15 is a flowchart showing the flow of processing by the control device. FIG. 16 is a diagram showing the relationship between the discharge elapsed time and the transmittance threshold exceeding area ratio. FIG. 17 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnosis processing of the first embodiment. FIG. 18 is a diagram showing an example of the functional configuration of the control device 20 in the discharge tube diagnosis device of Modification 1 of the first embodiment. FIG. 19 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnosis processing of the first embodiment. FIG. 20 is a diagram showing an example of two-dimensional mapping data in which a high transmittance region extending in the circumferential direction of the discharge tube is extracted and displayed in a gradation display in the discharge tube diagnosis processing of the third embodiment.

[0008] (First Embodiment) An embodiment of a discharge tube diagnosis device 1 according to the present invention will be described in detail below with reference to the accompanying drawings. The configuration of the embodiment described below, as well as the actions and results (effects) brought about by said configuration, are merely examples and are not limited to the following description. Note that in this specification, ordinal numbers are used only to distinguish between parts and components, and do not indicate order or priority.

[0009] The structure of a discharge tube diagnostic device 1 according to a first embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is a perspective view of an example of the discharge tube diagnostic device 1 according to the first embodiment. The discharge tube diagnostic device 1 shown in Fig. 1 is a device that diagnoses the degree of deterioration of a discharge tube 10 provided in an ozone generator (not shown).

[0010] In the following description, an X-axis, Y-axis, and Z-axis Cartesian coordinate system is defined. The axial direction of the discharge tube 10 is defined as the X-axis direction, and the extension direction of the stage 131 is defined as the Y-axis direction. The direction perpendicular to the X-axis and Y-axis directions is defined as the Z-axis direction. The X-axis direction may also be referred to as the depth direction. The Y-axis direction may also be referred to as the left-right direction. The Z-axis direction may also be referred to as the height direction. Note that the X-axis, Y-axis, and Z-axis Cartesian coordinate system is a coordinate system used for convenience, and embodiments of the present invention can also be applied to discharge tube diagnostic devices to which this coordinate system cannot be applied.

[0011] As shown in Fig. 1, the discharge tube diagnosis device 1 of this embodiment includes a discharge tube 10, a light-emitting unit 11, a plurality of light-receiving units 12, a camera 12B, and a support unit 13. The discharge tube 10 is provided in an ozone generator. The discharge tube 10 is formed in a substantially cylindrical (tubular) shape with one end closed and the other end open. More specifically, the discharge tube 10 has a cylindrical portion 10a and a closed portion 10b that closes one end of the cylindrical portion 10a.

[0012] The light-emitting unit 11 irradiates light of a constant intensity from inside the discharge tube 10 toward the inner surface of the discharge tube 10. The light-emitting unit 11 is configured in a ring shape that can irradiate the inner surface of the discharge tube 10 with annular light centered on the central axis Ax of the discharge tube 10. The light-emitting unit 11 is, for example, a blue LED (Light Emitting Diode). However, the light-emitting unit 11 may also be an LED of another color, an incandescent bulb, a fluorescent lamp, a mercury lamp, an ultraviolet lamp, an infrared lamp, or the like.

[0013] The multiple light receiving units 12 include multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6, and a camera 12B. In other words, the light receiving unit 12 is a collective term for the multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6, and the camera 12B. Hereinafter, the light receiving unit 12 will be used as a collective term for the multiple photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6, and the camera 12B.

[0014] Each of the plurality of light receiving units 12 has one or more light receiving elements (not shown). The light receiving elements are, for example, photodiodes. However, the light receiving elements are not limited to photodiodes. Elements according to the type of light may be used as the light receiving elements.

[0015] The plurality of light receiving sections 12 are arranged in the circumferential direction of the cylindrical section 10a of the discharge tube 10. The plurality of photodetectors 12A are arranged so as to be able to detect light on half of the circumferential direction of the cylindrical section 10a.

[0016] The light receiving sections 12 are located outside the discharge section 10e and receive light that is emitted from the light emitting section 11 and transmitted through the discharge section 10e.

[0017] The support portion 13 supports the light emitting portion 11, the light receiving portion 12, and the discharge tube 10 so as to enable relative movement between the light emitting portion 11, the light receiving portion 12, and the discharge tube 10.

[0018] The support unit 13 has a stage 131 on which the discharge tube 10 is placed, and a moving body 132. The stage 131 is disposed so that the direction of the central axis Ax of the discharge tube 10 is along the X-axis direction, and supports the discharge tube 10. The stage 131 supports the discharge tube 10 so that the discharge tube 10 can rotate around the central axis Ax of the discharge tube 10.

[0019] The movable body 132 is provided so as to be movable in the X-axis direction relative to the stage 131. Therefore, when the movable body 132 moves in the X-axis direction, the light-emitting unit 11 and the light-receiving unit 12 move together in the X-axis direction. At this time, the discharge tube 10 is supported by the stage 131 and does not move. That is, the light-emitting unit 11 and the light-receiving unit 12 move together relative to the discharge tube 10. The movable body 132 is moved manually, for example. The movable body 132 may also be moved by the driving force of a driving source such as a motor.

[0020] The movable body 132 has two rods 132a and 132b and two plates 132c and 132d. The two rods 132a and 132b extend parallel to each other in the X-axis direction. The two rods 132a and 132b are spaced apart in the Y-axis direction. The ends of the two rods 132a and 132b in the +X direction are connected by plate 132c. Furthermore, plate 132d is fixed to the end of rod 132b in the -X direction.

[0021] The end of the rod 132a in the -X direction is provided with a light emitting unit 11. The plate 132d is provided with a light receiving unit 12.

[0022] Fig. 2 is a cross-sectional view of an example of a discharge tube 10 to be diagnosed by the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 2, the discharge tube 10 has a dielectric 10c and a metal film 10d. The dielectric 10c is formed in a substantially cylindrical (tubular) shape with one end closed and the other end open, and constitutes a part of the cylindrical portion 10a and a part of the closed portion 10b. The dielectric 10c includes a dielectric material such as quartz glass, borosilicate glass, high silicate glass, or aluminosilicate glass, and has electrical insulation properties.

[0023] The metal film 10d is overlaid on the inner surface of the dielectric 10c. The metal film 10d is formed in a substantially cylindrical shape with one end closed and the other end open, and constitutes a part of the cylindrical portion 10a and a part of the closed portion 10b.

[0024] The metal film 10d contains a conductive material such as stainless steel, nickel, carbon, or aluminum, and is conductive. The metal film 10d is adhered to the inner surface of the dielectric 10c by sputtering, spraying, vapor deposition, electroless plating, electrolytic plating, or paint application of the conductive material. The metal film 10d functions as a high-voltage electrode. The discharge unit 10e is formed by a laminated portion of the dielectric 10c and the metal film 10d superimposed on the dielectric. The discharge unit 10e is formed in a cylindrical shape. The light-emitting unit 11 irradiates light onto the discharge unit 10e.

[0025] 3 is a cross-sectional view of a portion of an example of the discharge tube diagnosis device 1 of the first embodiment. As shown in FIG. 3, a pulley 132a1 is provided on the rod 132a. The discharge tube diagnosis device 1 also includes a distance sensor 30 (see FIG. 5) capable of measuring the relative movement distance between the discharge tube 10 and the moving body 132. The measurement results of this distance sensor 30 enable the moving body 132 to be positioned in the X-axis direction. The discharge tube diagnosis device 1 also includes an angle sensor 31 (see FIG. 5) capable of measuring the relative rotation angle between the discharge tube 10 and the moving body 132 in the circumferential direction of the discharge tube 10. The measurement results of this angle sensor 31 enable the light receiving unit 12 to be positioned in the circumferential direction of the discharge tube 10.

[0026] 1 and 3, the rod 132a and the light-emitting part 11 are located inside the discharge tube 10, and the pulley 132a1 contacts the inner surface of the cylindrical part 10a of the discharge tube 10. The rod 132b, the plates 132c and 132d, and the light-receiving part 12 are located outside the discharge tube 10.

[0027] Fig. 4 is a detailed cross-sectional view of a portion of an example of the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 4, the photodetector 12A receives light that is irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. Note that the arrows in Fig. 4 indicate the traveling direction of the light irradiated from the light-emitting unit 11. The photodetector 12A converts the amount of received light as a result of light detection into the light transmittance of the discharge unit 10e, and outputs this to the control device 20 (see Fig. 5), which will be described later. The transmittance is an example of data obtained by light reception by the photodetector 12A.

[0028] As shown in Fig. 4, the photodetector 12A is located on the opposite side of the light-emitting portion 11 with respect to the discharge portion 10e of the discharge tube 10. The light-emitting portion 11 is located inside the discharge portion 10e. That is, the discharge tube 10 (discharge portion 10e) is located between the photodetector 12A and the light-emitting portion 11. The position of the photodetector 12A in the radial direction of the discharge tube 10 is adjusted as follows. That is, the position of the photodetector 12A on the cylindrical portion 10a of the discharge tube 10 is adjusted by an adjustment screw 121 so that it contacts the outer surface of the cylindrical portion 10a of the discharge tube 10.

[0029] Fig. 5 is a diagram showing an example of the hardware configuration of the control device 20 in the discharge tube diagnosis device 1 of the first embodiment. As shown in Fig. 5, the discharge tube diagnosis device 1 includes the control device 20. The control device 20 controls each part of the discharge tube diagnosis device 1 and performs various calculations.

[0030] The control device 20 includes a processor 21, a display unit 22, an operation unit 23, a light-emitting unit controller 24, a photodetector controller 25, a camera controller 26, a sensor controller 27, a communication unit 28, and a storage unit 29. The processor 21 and the storage unit 29 constitute a computer.

[0031] The processor 21 is a control device such as a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or an ASIC (Application Specific Integrated Circuit). The display unit 22 is an example of a display device and is implemented by a display device (output device) such as a liquid crystal display or a touch panel display. The display unit 22 displays two-dimensional mapping data processed by a diagnosis unit 43 (described later). The operation unit 23 is implemented by an input device (input device) such as a keyboard or a pointing device. Note that the operation unit 23 may be a touch panel provided on the screen of the display unit 22.

[0032] The light-emitting unit controller 24 is connected to the light-emitting unit 11 and controls the operation of the light-emitting unit 11 under the control of the processor 21. The photodetector controller 25 is connected to the plurality of photodetectors 12A and controls the operation of the plurality of photodetectors 12A under the control of the processor 21. The camera controller 26 is connected to the camera 12B and controls the operation of the camera 12B under the control of the processor 21. The sensor controller 27 is connected to the distance sensor 30 and the angle sensor 31 and controls the operations of the distance sensor 30 and the angle sensor 31 under the control of the processor 21.

[0033] The communication unit 28 is a communication interface for connecting to other devices (not shown) and, under the control of the processor 21, transmits and receives various data to and from the other devices.

[0034] The storage unit 29 is realized by, for example, a main storage device such as a RAM (Random Access Memory), a semiconductor memory element such as a flash memory, an auxiliary storage device such as a hard disk, etc. The storage unit 29 stores programs and setting information related to the operation of the discharge tube diagnosis device 1.

[0035] Next, the functional configuration of the control device 20 will be described with reference to Fig. 6. Fig. 6 is a diagram showing an example of the functional configuration of the control device 20 in the discharge tube diagnosis device 1 of the first embodiment. This functional configuration may be a software configuration realized by the processor 21 executing a program stored in the storage unit 29, or may be a hardware configuration realized by a dedicated circuit provided in the processor 21 or the like.

[0036] As shown in FIG. 6 , the control device 20 includes, as its functional components, an acquisition unit 41, a generation unit 42, and a diagnosis unit 43. The acquisition unit 41 acquires the amount of received light detected by the photodetector 12A. The generation unit 42 calculates the light transmittance for each of a plurality of regions defined by the target range for diagnosing the degree of deterioration of the discharge unit 10e based on the amount of received light obtained by the light receiving unit 12, and generates two-dimensional mapping data in which the transmittance for each of a plurality of regions Da arranged on a two-dimensional plane on which the discharge unit 10e is laid out is mapped. The diagnosis unit 43 processes the two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions Da.

[0037] (Discharge Tube Diagnostic Method) An example of a method for diagnosing the discharge tube 10 using the detection results of the photodetector 12A will be described below.

[0038] The acquisition unit 41 acquires, via the photodetector controller 25, the detection result of the photodetector 12A, i.e., the amount of light received by the photodetector 12A that is irradiated from the light emitting unit 11 and transmitted through the discharge unit 10e.

[0039] Next, the generation unit 42 obtains the light transmittance in each region based on the amount of light received by the photodetector 12A. More specifically, the generation unit 42 calculates the light transmittance from the amount of light received by the photodetector 12A acquired by the acquisition unit 41. If the amount of light emitted from the light-emitting unit 11 is Iin and the amount of light that passes through the metal film 10d of the discharge unit 10e and is irradiated onto the photodetector 12A is Iout, the light transmittance of the discharge unit 10e is defined by the following equation 1. Transmittance=(1-(Iin-Iout) / Iin)×100(%) (Equation 1)

[0040] Then, the generating unit 42 generates two-dimensional mapping data in which the transmittance in each region is mapped.

[0041] Next, the diagnosis unit 43 processes the two-dimensional mapping data generated by the generation unit 42 so that one or more colors are displayed in gradation according to the transmittance. Then, the display unit 22 displays the gradation-displayed two-dimensional mapping data on, for example, a liquid crystal display.

[0042] The worker visually checks the two-dimensional mapping data processed by the diagnosis unit 43 on the display unit 22. This allows the worker to recognize the distribution of transmittance in the discharge unit 10e, i.e., the distribution of the degree of disappearance of the metal film 10d. Using the above method, the worker diagnoses the degree of deterioration of the discharge tube 10.

[0043] Generally, the metal film in the discharge section becomes thinner over time and eventually disappears. Therefore, the degree of metal film disappearance can be evaluated by measuring light transmittance. When the transmittance exceeds a certain threshold, the area exceeding the threshold loses sufficient electrical conductivity and no longer contributes to discharge. Furthermore, metal film disappearance also occurs in areas that do not exceed the threshold. By observing the distribution and time-dependent changes in transmittance in those areas, an operator can detect the progression of deterioration of the discharge tube and signs of performance degradation.

[0044] Here, diagnosing the degree of deterioration of the discharge tube 10 means that the worker recognizes the distribution of the degree of loss of the metal film 10d in the discharge part 10e from the two-dimensional mapping data displayed in gradation by the diagnosing unit 43, and evaluates the progress of the deterioration and the degree of performance degradation of the discharge tube 10. Diagnosis also includes the worker predicting the life of the discharge tube 10 due to deterioration of the discharge tube 10, i.e., the remaining useful life until the discharge tube 10 can fully demonstrate its ozone generating performance.

[0045] (Flow of Discharge Tube Diagnostic Processing) Next, the flow of diagnostic processing for the discharge tube 10 will be described in detail. First, the premise of the diagnostic processing for the discharge tube 10 will be described. The worker removes the discharge tube 10 to be diagnosed from the ozone generator. Next, the worker checks whether there is any dirt or attachment on the inner and outer surfaces of the discharge tube 10. If there is any dirt or attachment on the discharge tube 10, the worker wipes it off. Next, the worker sets the discharge tube 10 in the discharge tube diagnostic device 1.

[0046] Next, an operator calibrates the discharge tube diagnostic device 1. Specifically, because the light transmittance varies depending on the amount of light emitted by the light-emitting unit 11, the operator measures the relationship between the amount of light emitted by the light-emitting unit 11 and the amount of light received by the photodetector 12A under a certain environment, and performs calibration so that the relationship between these becomes a predetermined relationship.

[0047] Next, the operator determines the reference point of the discharge tube 10 when setting the discharge tube 10 in the discharge tube diagnosis device 1. This is to ensure that the next time the light transmittance is measured (re-measured), the measurement can be performed under the same conditions as the current measurement of the light transmittance.

[0048] Then, the worker operates the discharge tube diagnosis device 1 to measure the light transmittance of the discharge portion 10e of the discharge tube 10. Specifically, when the worker has finished measuring the light transmittance at the position where the movable body 132 is disposed, he moves the movable body 132 in the X-axis direction by an amount corresponding to the length (width) of the light receiving element of the photodetector 12A in the X-axis direction, and again measures the light transmittance by operating the discharge tube diagnosis device 1. The worker repeats the above-described procedure to measure the light transmittance for half the circumference of the cylindrical portion 10a of the discharge portion 10e.

[0049] Next, the worker rotates the discharge tube 10 circumferentially by 180 degrees around the central axis Ax of the discharge tube 10. Then, in the same manner as described above, the light transmittance is measured for the remaining half of the circumference of the cylindrical portion 10a of the discharge unit 10e. In this way, the photodetector 12A detects the light irradiated from the light-emitting unit 11 over the entire circumference of the cylindrical portion 10a of the discharge unit 10e.

[0050] Next, the generation unit 42 calculates the light transmittance based on the amount of received light acquired by the acquisition unit 41. Fig. 7 is a diagram showing the light transmittance of the discharge unit 10e in the discharge tube 10 of the first embodiment. First, the generation unit 42 converts the amount of received light acquired by the acquisition unit 41 into a light transmittance using the above formula 1. Then, each converted value is recorded in a table such as that shown in Fig. 7.

[0051] 7 indicates the distance that the support part 13 has moved from the reference position, and PD-1 to PD-6 indicate the photodetectors 12A-1, 12A-2, 12A-3, 12A-4, 12A-5, and 12A-6. Fig. 7 shows the amount of light received by the photodetectors 12A-1 to 12A-6 at each moving distance of the support part 13, converted into light transmittance (%) and recorded. This allows the operator to recognize the location of deterioration in the discharge tube 10.

[0052] Next, the generation unit 42 generates two-dimensional mapping data in which the light transmittance is mapped. Fig. 8 is a diagram for explaining two-dimensional mapping in the discharge tube diagnosis process of the first embodiment. As shown in Fig. 8, two-dimensional mapping is a process of mapping (showing) the light transmittance on a two-dimensional plane obtained by expanding the cylindrical portion 10a of the discharge unit 10e into a planar shape. This process generates two-dimensional mapping data D1 shown in Fig. 9. The two-dimensional mapping data D1 is an example of first two-dimensional mapping data.

[0053] FIG. 9 is a diagram showing an example of two-dimensional mapping data D1 in the discharge tube diagnostic process of the first embodiment. (a) of FIG. 9 shows the movement distance of the support portion 13 from the reference position, i.e., the X-coordinate position. (b) of FIG. 9 shows the light transmittance of one half of the circumferential half of the cylindrical portion 10a of the discharge portion 10e. (c) of FIG. 9 shows the light transmittance of the other half of the circumferential half of the discharge portion 10e. The two-dimensional mapping data D1 in FIG. 9 includes a plurality of regions Da arranged in a matrix. The two-dimensional mapping data D1 is data representing the light transmittance of each measurement point (region Da) in the discharge portion 10e. Furthermore, the regions Da display numerical values ​​of the light transmittance.

[0054] Fig. 10 is an enlarged view of a portion of the two-dimensional mapping data D1 in Fig. 9. The diagnosis unit 43 processes the two-dimensional mapping data D1 shown in Fig. 10 so that one or more colors are displayed in gradation according to the transmittance of each of the multiple regions.

[0055] Fig. 11 is a diagram showing an example of a case where two-dimensional mapping data is displayed in gradation in the discharge tube diagnosis process of the first embodiment. More specifically, Fig. 11 shows two-dimensional mapping data D2 which is an example of a gradation display for the region shown in Fig. 10, where higher transmittance is displayed in white and lower transmittance is displayed in black. Here, transmittance of 40% or more is displayed in white, 0% is displayed in black, and a gradation display is performed between 0% and 40%.

[0056] Fig. 12 is a diagram showing an example of two-dimensional mapping data in which gradation display is performed in the discharge tube diagnostic processing of the first embodiment. More specifically, Fig. 12 is two-dimensional mapping data D2 in which the gradation display shown in Fig. 11 is displayed for the entire region of the discharge tube 10. This two-dimensional mapping data D2 is presented to the operator by the display unit 22.

[0057] By visually checking the two-dimensional mapping data D2, the worker can recognize areas with high transmittance (white areas) and areas with low transmittance (black areas). Furthermore, by visually checking the color density of areas displayed in gradations other than white and black, the worker can recognize the approximate magnitude of the transmittance. This allows the worker to easily grasp the distribution of the magnitude of the transmittance of each area Da in the discharge unit 10e.

[0058] In the above-described embodiment, the discharge tube diagnosis device 1 includes a light-emitting unit 11, a light-receiving unit 12, a generation unit 42, a diagnosis unit 43, and a display unit 22. The light-emitting unit 11 is located either inside or outside a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d overlaid on the dielectric 10c, and irradiates the discharge unit 10e with light. The light-receiving unit 12 is located either inside or outside the discharge unit 10e and receives light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. The generation unit 42 calculates the light transmittance for each of a plurality of regions defined by a target range for diagnosing the degree of deterioration of the discharge unit 10e based on the amount of light received by the light-receiving unit 12, and generates two-dimensional mapping data D1 in which the transmittance for each of the plurality of regions arranged on a two-dimensional plane on which the discharge unit 10e is laid out is mapped. The diagnosis unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the transmittance of each of the plurality of regions Da. The display unit 22 displays the two-dimensional mapping data D2 processed by the diagnosis unit 43.

[0059] With the above-described configuration, the worker visually checks the two-dimensional mapping data D2 in which the color gradation is displayed according to the transmittance, thereby enabling the worker to easily grasp the distribution of the magnitude of the transmittance of the discharge part 10e by grasping the color gradation of each region, and thus to predict the progress of deterioration of the discharge tube 10.

[0060] In the conventional method of extracting only the portions above a threshold, if the threshold is set too high, it is not possible to detect portions where the discharge tube is deteriorating but only to a small extent. Conversely, if the threshold is set too low, it will detect both areas where there are signs of discharge tube deterioration and areas where the ozone generation capacity has already decreased, without distinguishing between them.

[0061] Generally, it is rare for the discharge tube in an ozone generator to deteriorate uniformly throughout, and in most cases deterioration progresses more significantly in certain areas. When observing the degree of deterioration of a discharge tube, it is desirable to predict not only the deterioration of the ozone generation capacity at the time of observation, but also the possibility of a decrease in the ozone generation capacity during subsequent operation.

[0062] In this embodiment, the diagnostic unit 43 displays the two-dimensional mapping data D1 in gradation according to the transmittance in each region Da. This makes it possible for the operator to easily check which regions of the entire metal film 10d of the discharge tube 10 have deteriorated, to what extent, and to what extent, even when there is a mixture of regions where the degree of deterioration is relatively small and no impact is being shown on the ozone generation capacity, and regions where the ozone generation capacity has decreased.

[0063] Second Embodiment Next, a discharge tube diagnosis device 1A according to a second embodiment will be described with reference to Fig. 13. The discharge tube diagnosis device 1A according to the second embodiment is obtained by partially modifying the functions of the generation unit 42 and diagnosis unit 43 of the first embodiment described with reference to Figs. 9 to 17, and a description of the same configuration as that of the first embodiment will be omitted.

[0064] Fig. 13 is a diagram showing an example of two-dimensional mapping data D3 in which a gradation display is performed based on the change in transmittance over time in the discharge tube diagnostic processing of the second embodiment. More specifically, Fig. 13 shows two-dimensional mapping data D3 in which the amount of transmission is obtained after operation has continued for a certain period of time in the same regions Da as those in the two-dimensional mapping data D1 of Fig. 9, and the difference in the amount of transmission from the two-dimensional mapping data D1 is mapped and a gradation display is performed based on the magnitude of the difference.

[0065] In the second embodiment, the generator 42 calculates the transmittance differences, which are values ​​that indicate the change in transmittance over time, in multiple regions Da, and generates two-dimensional mapping data D3 in which the values ​​are mapped onto a two-dimensional plane. The two-dimensional mapping data D3 is an example of second two-dimensional mapping data. Note that in FIG. 13 , the numerical values ​​of the differences in each region Da are represented by "...".

[0066] In addition, the diagnostic unit 43 processes the two-dimensional mapping data D3 generated by the generation unit 42 so that one or more colors are displayed in gradation according to a value (difference in transmittance) that indicates the change in transmittance over time mapped to each of the multiple areas Da.

[0067] In this way, by calculating the difference in transmittance over time in each region Da, the discharge tube diagnosis device 1 can extract regions where the increase in transmittance is significant. Furthermore, by displaying the extracted regions in gradation, the operator can easily grasp the distribution of regions where the increase in transmittance over time is significant. As will be described later, it is expected that the discharge tube 10 will reach the end of its life due to the progression of deterioration in a specific region. Therefore, it is significant to extract regions where new deterioration is occurring or where deterioration is progressing rapidly.

[0068] The value obtained by the generation unit 42 as an index of the change in transmittance over time does not have to be a difference in transmittance, but may be, for example, a ratio that represents the change in transmittance over time. Even in this case, the discharge tube diagnosis device 1 can extract areas where the increase in transmittance is significant. Furthermore, the operator can easily grasp the distribution of areas where the increase in transmittance over time is significant.

[0069] In the above-described embodiment, the generator 42 obtains values ​​that use as indexes changes in transmittance over time in the multiple regions Da, and generates two-dimensional mapping data D3 in which the values ​​are mapped onto a two-dimensional plane. The diagnostic unit 43 processes the two-dimensional mapping data D3 generated by the generator 42 so that one or more colors are displayed in gradations according to the values ​​mapped to each of the multiple regions Da.

[0070] In the above-described configuration, the worker visually checks the two-dimensional mapping data D3, in which the color gradation is displayed according to the value that indicates the change in transmittance over time. By understanding the color gradation of each region, the worker can easily grasp the distribution of regions where the increase in transmittance over time is significant, and can therefore predict the progress of deterioration of the discharge tube 10.

[0071] (Third embodiment) Next, a discharge tube diagnosis device 1B according to a third embodiment will be described with reference to Fig. 14. In the discharge tube diagnosis device 1B according to the third embodiment, some of the functions of the diagnosis unit 43 according to the first embodiment described with reference to Figs. 9 to 12 are modified, and a description of the same configuration as in the first embodiment will be omitted.

[0072] 14 is a diagram showing an example of two-dimensional mapping data D4 in which regions with high transmittance are extracted and displayed in gradation in the discharge tube diagnostic process of the third embodiment. In the third embodiment, the diagnostic unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold for a specific region among the multiple regions Da. More specifically, in the third embodiment, the generator 42 obtains a value (e.g., a transmittance difference) that indicates a change in transmittance over time in the multiple regions Da. Furthermore, the diagnostic unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold for regions among the multiple regions Da where the above-mentioned value is greater than a predetermined value. The diagnostic unit 43 then diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0073] In the third embodiment, the generating unit 42 does not generate two-dimensional mapping data. In the third embodiment, diagnosing the degree of deterioration of the discharge tube 10 means that the diagnosing unit 43 in the discharge tube diagnostic device 1 determines the degree of loss of the metal film 10d in the discharge tube 10 from the above-mentioned area ratio, thereby evaluating the progress of deterioration of the discharge tube 10 and the degree of performance degradation of the ozone generation capability.

[0074] The specific region described above, i.e., the region where the value (difference in transmittance) indicating the change in transmittance over time is greater than a predetermined value and where the transmittance exceeds an arbitrary threshold, corresponds to region D4a surrounded by a dotted line in Fig. 14. Region D4a is a rectangular region extracted so as to include regions with a transmittance of 40% or more.

[0075] (Processing of Control Device) The flow of processing by the control device 20 in the third embodiment will be described below with reference to FIG. 15. FIG. 15 is a flowchart showing the flow of processing by the control device 20. First, in step S101, the light-emitting unit 11 irradiates light toward the outside of the discharge unit 10e. Then, in step S102, the light-receiving unit 12 located outside the discharge unit 10e receives the light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. As a result, the acquisition unit 41 obtains the detection result of the photodetector 12A, i.e., the amount of light received in each region Da.

[0076] Next, in step S103, the generation unit 42 calculates the light transmittance based on the amount of light received by the light receiving unit for each of the multiple regions Da. Then, in step S104, the diagnosis unit 43 calculates the area ratio of specific regions among the multiple regions Da, i.e., regions where a value (transmittance difference) indicating a change in transmittance over time is greater than a predetermined value, where the area ratio is greater than an arbitrary threshold, and diagnoses the degree of deterioration of the discharge tube 10 based on the area ratio. This completes the processing by the control device 20.

[0077] If the ratio of the area with high transmittance is large in a certain range of region Da, there is a risk that the discharge tube 10 will generate abnormal discharge and reach the end of its life early. The diagnostic unit 43 can determine the area where deterioration of the discharge tube 10 progresses quickly by obtaining a value (difference in transmittance) that indicates the change in transmittance over time in each region Da of the discharge unit 10e. Furthermore, the diagnostic unit 43 can predict the occurrence of abnormal discharge in the area where the change in transmittance is large, i.e., the area where deterioration of the discharge tube 10 progresses quickly, by calculating the area ratio of the area where the transmittance exceeds an arbitrary threshold value for the regions among the multiple regions Da where the above-mentioned value is larger than a predetermined value.

[0078] In the above-described embodiment, the discharge tube diagnosis device 1 includes a light-emitting unit 11, a light-receiving unit 12, a generating unit 42, and a diagnosing unit 43. The light-emitting unit 11 is located either inside or outside a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d overlaid on the dielectric 10c, and irradiates the discharge unit 10e with light. The light-receiving unit 12 is located either inside or outside the discharge unit 10e and receives light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e. The generating unit 42 calculates the light transmittance based on the amount of light received by the light-receiving unit 12 for each of a plurality of regions Da, which define a target range for diagnosing the degree of deterioration of the discharge unit 10e. The diagnosing unit 43 calculates the area ratio of a specific region among the plurality of regions Da where the transmittance exceeds an arbitrary threshold, and diagnoses the degree of deterioration of the discharge unit 10e based on the area ratio.

[0079] In the above-described configuration, the diagnostic unit 43 calculates the area ratio of the area where the transmittance exceeds an arbitrary threshold value in the specific area Da, and thus the diagnostic unit 43 can predict that the discharge tube 10 will generate abnormal discharge when the area ratio of the area where the transmittance is high is large in the specific range of the area Da. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the prediction of the occurrence of abnormal discharge by the diagnostic unit 43.

[0080] In the above embodiment, the generator 42 calculates a value that indicates a change in transmittance over time in the plurality of regions Da. The diagnostic unit 43 calculates an area ratio of the region D4a in which the transmittance exceeds a predetermined threshold value for the plurality of regions Da, and diagnoses the degree of deterioration of the discharge unit 10e based on the area ratio.

[0081] In the above-described configuration, the diagnostic unit 43 calculates the area ratio of the region D4a where the change in transmittance over time is greater than a predetermined value, in which the transmittance exceeds an arbitrary threshold value. This allows the diagnostic unit 43 to more accurately predict the progress of deterioration of the discharge tube 10 when the area ratio of the region D4a where the change in transmittance over time is greater than a predetermined value, in which the transmittance exceeds an arbitrary threshold value, is large. Consequently, the operator can more accurately predict the lifespan of the discharge tube 10 from the prediction of the progress of deterioration of the discharge tube 10 by the diagnostic unit 43.

[0082] Furthermore, in the above-described embodiment, the discharge tube diagnosis method includes the steps of: a light-emitting unit 11 irradiating light onto one of the inside and outside of a cylindrical discharge unit 10e having a dielectric 10c and a metal film 10d superimposed on the dielectric 10c; a light-receiving unit 12 located on the other of the inside and outside of the discharge unit 10e receiving the light irradiated from the light-emitting unit 11 and transmitted through the discharge unit 10e; a generation unit 42 determining the light transmittance based on the amount of light received by the light-receiving unit 12 for each of a plurality of regions Da defined by dividing the target range for diagnosing the degree of deterioration of the discharge unit 10e; and a diagnosis unit 43 calculating the area ratio of regions where the transmittance exceeds an arbitrary threshold for a specific region among the plurality of regions Da, and diagnosing the degree of deterioration of the discharge unit 10e based on the area ratio.

[0083] In the above-described configuration, if the ratio of the area with high transmittance in a certain specific range of region Da is large, the discharge unit 10e may generate abnormal discharge and reach the end of its life early. By having the diagnostic unit 43 calculate the area ratio of the area with transmittance exceeding an arbitrary threshold in the specific range of region Da, the diagnostic unit 43 can predict that the discharge tube 10 will generate abnormal discharge if the area ratio of the area with high transmittance in the specific range of region Da is large. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the diagnostic unit 43's prediction of the occurrence of abnormal discharge.

[0084] In general, abnormal discharge phenomena in discharge tubes may be caused by the progression of local deterioration of the discharge tube. In this case, even if the overall area ratio of high transmittance portions is small, if the area ratio of high transmittance portions in a specific range of the discharge tube is large, abnormal discharge will occur.

[0085] For this reason, for example, when the diagnostic unit 43 diagnoses deterioration of the entire discharge tube 10, the evaluation will include areas other than the extracted high transmittance portion described above, and the data will be averaged.

[0086] 16 is a diagram showing the relationship between the elapsed time of discharge and the transmittance threshold exceeding area ratio. As shown in Fig. 16, when the diagnostic unit 43 determines an abnormality in the discharge tube 10 from the area ratio of the area exceeding the set threshold, or when diagnosing the degree of deterioration of the discharge tube 10 by gradation display, by diagnosing the high transmittance parts and their surrounding areas in each area Da of the cylindrical part 10a of the discharge tube 10, the diagnostic unit 43 can more clearly grasp the performance degradation caused by the generation of abnormal discharge in the discharge tube 10 and its signs than when the diagnostic unit 43 diagnoses the deterioration of the entire cylindrical part 10a of the discharge tube 10.

[0087] (Variation 1) Next, Variation 1 of the first embodiment will be described. FIG. 17 is a diagram showing an example of two-dimensional mapping data D5a and D5b in which another gradation display is performed in the discharge tube diagnosis process of the first embodiment. More specifically, FIG. 17 shows two-dimensional mapping data D5a and D5b obtained when the maximum transmittance is changed when setting the gradation display for the transmittance data of FIG. 9. In FIG. 17, (A) shows the two-dimensional mapping data D5a, and (B) shows the two-dimensional mapping data D5b. FIG. 18 is a diagram showing an example of the functional configuration of a control device 20A in a discharge tube diagnosis device 1 according to Variation 1 of the first embodiment. As shown in FIG. 18, in Variation 1, the discharge tube diagnosis device 1 includes a transmittance range setting unit 45. The transmittance range setting unit 45 sets the transmittance range for gradation display to an arbitrary range. In the two-dimensional mapping data D5a generated by the function of the transmittance range setting unit 45, regions Da with transmittance of 60% or more are displayed in white, regions Da with transmittance of 0% are displayed in black, and a gradation display is provided between 0% and 60%. In the two-dimensional mapping data D5b, regions Da with transmittance of 20% or more are displayed in white, regions Da with transmittance of 0% are displayed in black, and a gradation display is provided between 0% and 20%.

[0088] By setting the maximum value of the setting range of the gradation display low, the diagnostic unit 43 can extract an area where there is no effect on the ozone generation capacity but where deterioration of the discharge tube 10 is progressing. On the other hand, by setting the maximum value high, the diagnostic unit 43 can evaluate the deterioration of the ozone generation capacity of the ozone generator at the time of diagnosis.

[0089] In the above-described embodiment, the discharge tube diagnosis device 1 further includes a transmittance range setting section 45 that sets the range of transmittance for performing gradation display to an arbitrary range.

[0090] In the above-described configuration, the operator can easily visually grasp the area in the discharge unit 10e where the ozone generation capacity is decreasing by setting the upper limit of the transmittance range displayed by gradation via the transmittance range setting unit 45 to the lower limit of the transmittance at which the ozone generation capacity is decreasing via the two-dimensional mapping data D2. Furthermore, the operator can easily visually grasp the area in the metal film 10d where the deterioration is progressing by setting the lower limit of the transmittance range displayed by gradation via the transmittance range setting unit 45 to the transmittance at which the deterioration of the metal film 10d begins to progress via the two-dimensional mapping data D2. Consequently, the operator can grasp the progress of the deterioration of the discharge tube 10 at the time of diagnosing the discharge tube 10.

[0091] (Variation 2) Fig. 19 is a diagram showing an example of two-dimensional mapping data in which another gradation display is performed in the discharge tube diagnostic processing of the first embodiment. More specifically, Fig. 19 shows two-dimensional mapping data D6 in which the maximum and minimum transmittances are changed when setting the gradation display for the transmittance data of Fig. 9. In the two-dimensional mapping data D6, areas Da where the transmittance is 40% or more are colored white, areas Da where the transmittance is 10% are colored black, and a gradation display is performed between 10% and 40%.

[0092] According to the two-dimensional mapping data D6 in the second modification, the operator can detect areas where deterioration of transmittance is greater than or equal to a first threshold value (maximum value of the gradation display), and can also detect areas where deterioration of ozone generation capacity is greater than or equal to a second threshold value (minimum value of the gradation display).

[0093] (Variation 3) FIG. 20 shows an example of two-dimensional mapping data D7 in which high-transmittance regions Da extending in the circumferential direction of the discharge tube 10 are extracted and displayed in grayscale in the discharge tube diagnostic process of the third embodiment. In Variation 3, the diagnostic unit 43 extracts regions in which regions with transmittance greater than a predetermined value are continuous in the circumferential direction of the discharge section 10e over a predetermined area or more. The region in which high-transmittance regions Da extend in the circumferential direction of the discharge tube 10 corresponds to region D7a surrounded by a dotted line. Region D7a is a region in which regions Da with transmittance of 20% or more are continuous over at least half the entire circumference (180 degrees). In this region, if deterioration progresses further, current flow is more likely to be interrupted and electrical conduction is more likely to be interrupted than in other regions. As such, if there are continuous defects in the circumferential direction of the discharge tube 10, power will not be supplied to the side opposite the electrode, leading to a significant decrease in ozone generation capacity.

[0094] The diagnostic unit 43 extracts the region D7a and diagnoses the degree of deterioration of the discharge tube 10, which enables the diagnostic unit 43 to more clearly grasp the performance degradation and its signs of the discharge tube 10. Consequently, the operator can more accurately predict the life of the discharge tube 10 from the prediction of the progress of deterioration of the discharge tube 10 by the diagnostic unit 43.

[0095] In the above-described embodiment, the specific region Da is a region D7a in which a region having a transmittance higher than a predetermined value continues in the circumferential direction of the discharge unit 10e for a predetermined area or more.

[0096] In the above-described configuration, if the light transmittance of the discharge unit 10e increases, i.e., if the number of defects in the metal film 10d increases, there is a risk that electrical conduction will be interrupted at those locations. If regions with high light transmittance exist continuously in the circumferential direction of the discharge unit 10e, areas where electrical conduction is interrupted will extend in the circumferential direction of the discharge unit 10e. In this case, power will not be supplied to the side of the electrode opposite the circumferentially continuous defects in the metal film 10d, and there is a risk that the ozone generation ability of the discharge tube diagnosis device 1 will be significantly reduced.

[0097] The diagnostic unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the transmittance of the region D7a where the region Da, whose light transmittance is greater than a predetermined value, is continuous in the circumferential direction of the discharge part 10e. This allows the diagnostic unit 43 to diagnose the degree of deterioration of the discharge tube 10 while taking into consideration the risk that power will not be supplied to the opposite side of the electrode due to a defect in the circumferentially continuous metal film 10d. Consequently, the operator can more accurately predict the lifespan of the discharge tube 10 from the diagnosis of deterioration of the discharge tube 10 by the diagnostic unit 43.

[0098] (Variation 4) Note that, when diagnosing deterioration of the discharge tube 10 in the third embodiment, the two-dimensional mapping data of the first embodiment can also be used to perform the diagnosis by the following method. First, the generation unit 42 calculates the transmittance in a plurality of regions Da and generates two-dimensional mapping data D1 in which the calculated transmittances are mapped. Next, the diagnosis unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the values ​​of each of the plurality of regions Da. Furthermore, the diagnosis unit 43 calculates the area ratio of a specific region among the plurality of regions where the transmittance exceeds an arbitrary threshold. Then, the diagnosis unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0099] According to the above-described method, the worker can grasp the degree of deterioration of the discharge tube 10 at the time of diagnosis, and the diagnosis unit 43 of the discharge tube diagnosis device 1 can diagnose the degree of deterioration of the discharge tube 10 based on objective indicators.

[0100] (Variation 5) Furthermore, when diagnosing deterioration of the discharge tube 10 in the third embodiment, the diagnosis can also be made by the following method using the two-dimensional mapping data of the first embodiment. First, the generation unit 42 obtains values ​​that indicate changes in transmittance over time in the multiple regions Da, and generates two-dimensional mapping data D1 in which the obtained values ​​are mapped. Next, the diagnosis unit 43 processes the two-dimensional mapping data D1 so that one or more colors are displayed in gradations according to the values ​​of each of the multiple regions Da. Furthermore, the diagnosis unit 43 calculates the area ratio of regions in which the transmittance exceeds an arbitrary threshold value for regions in which the above-mentioned value is greater than a predetermined value. Then, the diagnosis unit 43 diagnoses the degree of deterioration of the discharge tube 10 based on the above-mentioned area ratio.

[0101] According to the above-described method, the worker can grasp the progress of the deterioration of the discharge tube 10, and the diagnosis unit 43 of the discharge tube diagnosis device 1 can diagnose the degree of deterioration of the discharge tube 10 based on objective indicators.

[0102] The program for executing the above-described processes executed by the control device 20 may be stored in an installable or executable file format on a computer-readable storage medium such as a CD-ROM, CD-R, memory card, DVD, or flexible disk (FD) and provided as a computer program product. Alternatively, the program for executing the above-described processes executed by the control device 20 may be stored on a computer connected to a network such as the Internet and provided by downloading it via the network. Alternatively, the program for executing the above-described processes executed by the control device 20 may be provided or distributed via a network such as the Internet.

[0103] In addition, in the above-described embodiment, an example is shown in which the light-emitting unit 11 is located inside the discharge tube 10 and the light-receiving unit 12 is located outside the discharge tube 10, but this is not limiting. For example, the light-emitting unit 11 may be located outside the discharge tube 10 and the light-receiving unit 12 may be located inside the discharge tube 10. In addition, the number of cameras 12B is not limited to the example in the above-described embodiment.

[0104] Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims.

[0105] (Additional Notes) The above embodiments disclose the following technology: (1) A discharge tube diagnosis device comprising: a light-emitting unit located either inside or outside a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric, and irradiating light onto the discharge unit; a light-receiving unit located either inside or outside the discharge unit, and receiving the light irradiated from the light-emitting unit and transmitted through the discharge unit; a generation unit that calculates the light transmittance for each of a plurality of regions defined by partitions of a target range for diagnosing the degree of deterioration of the discharge unit based on the amount of light received by the light-receiving unit, and generates first two-dimensional mapping data in which the transmittance for each of the plurality of regions arranged on a two-dimensional plane in which the discharge unit is developed is mapped; a diagnosis unit that processes the first two-dimensional mapping data so that one or more colors are displayed in gradations according to the transmittance for each of the plurality of regions; and a display unit that displays the first two-dimensional mapping data processed by the diagnosis unit. (2) The discharge tube diagnosis device according to (1), further comprising: a transmittance range setting unit that sets a range of the transmittance for the gradation display to an arbitrary range. (3) The discharge tube diagnosis device according to (2) above, wherein the generation unit determines values ​​that indicate changes in the transmittance over time in the plurality of regions and generates second two-dimensional mapping data in which the values ​​are mapped onto a two-dimensional plane, and the diagnosis unit processes the second two-dimensional mapping data generated by the generation unit so that one or more colors are displayed in gradations according to the values ​​mapped to each of the plurality of regions.(4) A discharge tube diagnostic device comprising: a light-emitting unit located either inside or outside a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric, and irradiating light onto the discharge unit; a light-receiving unit located either inside or outside the discharge unit, and receiving the light irradiated from the light-emitting unit and transmitted through the discharge unit; a generation unit calculating a transmittance of the light based on the amount of light received by the light-receiving unit for each of a plurality of regions defined by partitions of a target range for diagnosing the degree of deterioration of the discharge unit; and a diagnosis unit calculating an area ratio of a specific region among the plurality of regions where the transmittance exceeds an arbitrary threshold, and diagnosing the degree of deterioration of the discharge unit based on the area ratio. (5) The discharge tube diagnostic device according to (4), wherein the generation unit calculates a value indicating a change in the transmittance over time for the plurality of regions, and the diagnosis unit calculates an area ratio of a specific region among the plurality of regions where the transmittance exceeds an arbitrary threshold for the regions where the value is greater than a predetermined value, and diagnosing the degree of deterioration of the discharge unit based on the area ratio. (6) The discharge tube diagnosis device according to (4), wherein the specific region is a region in which a region in which the transmittance is greater than a predetermined value continues for a predetermined area or more in a circumferential direction of the discharge section. (7) A discharge tube diagnosis method comprising: a step of a light-emitting unit irradiating light onto one of the inside and the outside of a discharge section formed in a cylindrical shape and having a dielectric and a metal film overlaid on the dielectric, a step of a light-receiving unit located on the other of the inside and the outside of the discharge section receiving the light irradiated from the light-emitting unit and transmitted through the discharge section, a step of a generation unit determining the transmittance of the light based on the amount of light received by the light-receiving unit for each of a plurality of regions defined by partitions of a target range in which the degree of deterioration of the discharge section is diagnosed, and a diagnosis unit calculating an area ratio of the region in which the transmittance exceeds an arbitrary threshold for a specific region among the plurality of regions, and diagnosing the degree of deterioration of the discharge section based on the area ratio.

[0106] 1, 1A, 1B Discharge tube diagnostic device 10c Dielectric 10d Metal film 10e Discharge portion 11 Light emitting portion 12 Light receiving portion 22 Display portion 42 Generation portion 43 Diagnostic portion 45 Transmittance range setting portion Da, D4a, D7a Regions D1, D2, D3, D4, D5a, D5b, D6, D7 Two-dimensional mapping data

Claims

1. A discharge tube diagnostic device comprising: a light-emitting unit located either inside or outside a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric and irradiating light onto the discharge unit; a light-receiving unit located either inside or outside the discharge unit and receiving the light irradiated from the light-emitting unit and transmitted through the discharge unit; a generation unit that calculates the light transmittance based on the amount of light received by the light-receiving unit for each of a plurality of regions defined in a target range for diagnosing the degree of deterioration of the discharge unit, and generates first two-dimensional mapping data in which the transmittance in each of the plurality of regions arranged on a two-dimensional plane in which the discharge unit is developed is mapped; a diagnosis unit that processes the first two-dimensional mapping data so that one or more colors are displayed in gradation according to the transmittance of each of the plurality of regions; and a display unit that displays the first two-dimensional mapping data processed by the diagnosis unit.

2. The discharge tube diagnosis device according to claim 1, further comprising a transmittance range setting section that sets the transmittance range for performing the gradation display to an arbitrary range.

3. The discharge tube diagnostic device according to claim 2, wherein the generation unit determines values ​​that indicate changes in transmittance over time in a plurality of the regions and generates second two-dimensional mapping data in which the values ​​are mapped onto a two-dimensional plane, and the diagnosis unit processes the second two-dimensional mapping data generated by the generation unit so that one or more colors are displayed in gradations according to the values ​​mapped to each of the plurality of regions.

4. A discharge tube diagnostic device comprising: a light-emitting section located either inside or outside a cylindrical discharge section having a dielectric and a metal film overlaid on the dielectric, and irradiating light onto the discharge section; a light-receiving section located either inside or outside the discharge section, and receiving the light irradiated from the light-emitting section and transmitted through the discharge section; a generation section that calculates the light transmittance based on the amount of light received by the light-receiving section for each of a plurality of regions defined in a target range for diagnosing the degree of deterioration of the discharge section; and a diagnosis section that calculates the area ratio of a specific region out of the plurality of regions where the transmittance exceeds an arbitrary threshold, and diagnoses the degree of deterioration of the discharge section based on the area ratio.

5. The discharge tube diagnostic device according to claim 4, wherein the generating unit determines a value that indicates a change in the transmittance over time in a plurality of the regions, and the diagnosing unit calculates an area ratio of the regions where the transmittance exceeds an arbitrary threshold value for those regions among the plurality of the regions where the value is greater than a predetermined value, and diagnoses the degree of deterioration of the discharge section based on the area ratio.

6. The discharge tube diagnostic device according to claim 4, wherein the specific region is a region in which the transmittance is greater than a predetermined value and the region is continuous over a predetermined area or more in the circumferential direction of the discharge part.

7. A discharge tube diagnosis method comprising the steps of: a light-emitting unit irradiating light onto one of the inside and outside of a cylindrical discharge unit having a dielectric and a metal film overlaid on the dielectric; a light-receiving unit located on the other of the inside and outside of the discharge unit receiving the light irradiated from the light-emitting unit and transmitted through the discharge unit; a generation unit determining the transmittance of the light based on the amount of light received by the light-receiving unit for each of a plurality of regions defining a target range for diagnosing the degree of deterioration of the discharge unit; and a diagnosis unit calculating the area ratio of a specific region among the plurality of regions where the transmittance exceeds an arbitrary threshold, and diagnosing the degree of deterioration of the discharge unit based on the area ratio.

Images