Robot system

Abstract

A robot system 6 comprises: a first aligner (5L) and a second aligner (5R) that are positioned side by side; and a transfer robot (2) that simultaneously transfers substrates (9) to the first aligner (5L) and the second aligner (5R) using a first hand (31) and a second hand (32). The first aligner (5L) and the second aligner (5R) each include: a support unit (52) that supports the substrate (9) at a support position (P1) above a placement surface (51d) of a spindle (51b); and a drive unit (53) that raises and lowers the support unit (52) to enable delivery or reception of the substrate (9) on the spindle (51b).

Description

Robot System

[0001] The technology disclosed herein relates to a robot system.

[0002] Patent Document 1 describes a conventional robot system. The conventional robot system performs alignment of substrates. The robot system includes a robot, a first aligner, and a second aligner. The robot transports substrates. The robot has a first hand and a second hand, and can transport two substrates to the first aligner and the second aligner. The combination of a robot having a first hand and a second hand with two aligners improves the throughput of substrate alignment.

[0003] JP 2016-81968 A

[0004] However, even if two aligners are provided and two substrates are transported to the first and second aligners, there is a problem in that the robot has to wait while the substrates are being aligned.

[0005] The technology disclosed herein relates to a robot system comprising: a first aligner; a second aligner positioned beside the first aligner; and a horizontal articulated transfer robot having a first hand and a second hand that simultaneously transfers a substrate to the first aligner and the second aligner using the first hand and the second hand, wherein the first aligner and the second aligner each have a mounting surface on which a substrate is placed, a spindle that rotates the substrate placed on the mounting surface about a rotation axis, a support unit that supports the substrate at a support position above the mounting surface of the spindle, and a drive unit that raises and lowers the support unit to transfer or receive the substrate to or from the spindle.

[0006] The robot system is configured so that the transport robot transports the substrate to the first aligner and the second aligner simultaneously, and so that the support part is raised and lowered to hand over or receive the substrate to the spindle, thereby reducing the waiting time of the robot and improving the throughput of substrate alignment.

[0007] FIG. 1 shows a robot system for transporting a substrate. FIG. 2 is a block diagram of the robot system. FIG. 3 is a perspective view of a first aligner and a second aligner. FIG. 4 is a plan view of the first aligner and the second aligner. FIG. 5 is a side view of the first aligner and the second aligner. FIG. 6 is a sequence diagram of substrate transport in the robot system. FIG. 7 is a sequence diagram of substrate transport in the robot system. FIG. 8 is a diagram illustrating an example of a movement trajectory of a support surface. FIG. 9 is a diagram illustrating an example of a movement trajectory of a support surface. FIG. 10 shows a horizontal articulated robot. FIG. 11 shows the operation of the first hand and the second hand.

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A robot system and a substrate alignment method according to an embodiment will be described below with reference to the accompanying drawings. The robot system and substrate alignment method described here are merely examples.

[0009] (Robot System) FIG. 1 is a plan view of a substrate transfer system 1. FIG. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 transfers a substrate 9. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transfer system 1 is, for example, a stocker. A robot system 6 is incorporated into the substrate transfer system 1.

[0010] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The first wall 11 and the second wall 12, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12, and the first wall 11 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transfer space 15. The first and second directions are both horizontal, and the second direction is perpendicular to the first direction. A vertical direction perpendicular to the first and second directions is defined as a third direction.

[0011] Hereinafter, the first direction will be referred to as the left-right direction or X direction, the second direction will be referred to as the front-back direction or Y direction, and the third direction will be referred to as the up-down direction or Z direction. Note that the X direction, Y direction, and Z direction are used for explaining the robot system 6, and are not used to limit the structure of the robot system 6.

[0012] Furthermore, of the two directions along the X direction, the direction toward the first wall 11 is referred to as the "left," and the direction toward the third wall 13 is referred to as the "right." Of the two directions along the second direction, the direction toward the second wall 12 is referred to as the "rear," and the direction toward the fourth wall 14 is referred to as the "front." Similarly, of the two directions along the third direction, the direction approaching the installation surface F is referred to as the "downward," and the direction moving away from the installation surface F is referred to as the "upward." Hereinafter, the position of each element in the vertical direction may be referred to as the "height position." Note that the six directions, i.e., the front-rear, left-right, and up-down directions, are merely examples introduced for the sake of simplicity. For example, the correspondence between the four directions, i.e., the front-rear and left-right directions, and the housing 10 may be appropriately interchanged.

[0013] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. Two aligners 5 are arranged side by side in the left-right direction within the transfer space 15. Each of the two aligners 5 aligns the substrate 9. For ease of explanation, the aligner 5 located on the left may be referred to as the first aligner 5L, and the aligner 5 located on the right may be referred to as the second aligner 5R below. When there is no need to distinguish between the first aligner 5L and the second aligner 5R, they will continue to be referred to as aligners 5. Details of the aligners 5 will be described later.

[0014] The substrate transfer system 1 has multiple FOUPs (Front Opening Unified Pods) 41. The multiple FOUPs 41 are lined up along the first wall 11. The FOUPs 41 house substrates 9. The FOUPs 41 can house multiple substrates 9 lined up in the vertical direction. The first wall 11 has openings 17 corresponding to the FOUPs 41. The FOUP opener opens and closes the openings 17. The FOUP opener switches between communication and blockage between the transfer space 15 and the FOUPs 41.

[0015] The substrate transfer system 1 includes a robot 2. The robot 2 is an example of a transfer robot. The robot 2 transfers a substrate 9 between a hoop 41 and an aligner 5 (see the solid line and the two-dot chain line in FIG. 1 ). The robot 2 is located in a transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0016] 2, the substrate transfer system 1 includes a system controller 18. Note that the system controller 18 is not an essential element of the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0017] The robot controller 20 is electrically connected to the system controller 18. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives the control signal from the robot controller 20 and transports the substrate 9 in this example.

[0018] The electrical connection in the present disclosure includes a communication connection for transmitting and receiving various signals such as control signals via an interface, and a power supply connection for supplying power. The electrical connection method is not particularly limited and includes wired and wireless connections. In this embodiment, an example of a wired connection is shown, in which a motor harness is used for the power supply connection and a signal harness is used for the communication connection.

[0019] The aligners 5 are electrically connected to the robot controller 20. Specifically, the first aligner 5L is connected to the robot controller 20 via a first motor harness 81 and a first signal harness 82. The second aligner 5R is connected to the robot controller 20 via a second motor harness 84. The second aligner 5R is connected to the first aligner 5L via a second signal harness 83.

[0020] The robot controller 20 supplies power for spindle drive to the first aligner 5L via the first motor harness 81. The robot controller 20 supplies power for spindle drive to the second aligner 5R via the second motor harness 84. The robot controller 20 sends a control signal to the first aligner 5L via the first signal harness 82. The robot controller 20 sends a control signal to the second aligner 5R via the first signal harness 82, the first aligner 5L, and the second signal harness 83. Note that it is not essential for the second aligner 5R to receive a control signal from the robot controller 20 via the first aligner 5L. The second aligner 5R may receive a control signal directly from the robot controller 20. The aligner 5 may also be connected to and controlled by the system controller 18. A dedicated aligner controller for the aligner may also be configured separately from the robot controller 20.

[0021] (Structure of Robot) As described above, the robot 2 is a horizontal articulated robot. FIG. 10 is a side view of the robot 2. FIG. 11 is a plan view of the hand of the robot 2. As shown in FIGS. 1 and 10, the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0022] The base 21 supports the arm 22. The arm 22 is movable up and down relative to the base 21. A first actuator 23 moves the arm 22 up and down. The arm 22 has links 221 and 222. The arm 22 of the illustrated robot 2 has two links, the link 221 and the link 222. Note that the number of links forming the arm 22 is not limited to two.

[0023] A first end of link 221 is supported by base 21. Link 221 is rotatable about a first axis Z1 extending in the Z direction relative to base 21. A second actuator 24 rotates link 221. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis Z2 extending in the Z direction relative to link 221. A third actuator 25 rotates link 222.

[0024] The robot 2 has a first hand 31 and a second hand 32 as hands 3. The first hand 31 and the second hand 32 are connected to the second end of the link 222 in a state where they are overlapped in the Z direction. As shown in Fig. 10 , the first hand 31 and the second hand 32 are positioned differently from each other by H in the Z direction.

[0025] The first hand 31 is rotatable about a third axis Z3 extending in the Z direction relative to the link 222, and the second hand 32 is also rotatable about the third axis Z3 relative to the link 222. The third axis Z3 is an example of a rotation axis, and the first hand 31 and the second hand 32 rotate about the same rotation axis. The fourth actuator 26 individually rotates the first hand 31 and the second hand 32. The first hand 31 and the second hand 32 can change their positions between an overlapping state in the Z direction as shown in the upper diagram of FIG. 11 and a separated state as shown in the lower diagram of FIG. 11. As shown by the two-dot chain line in the lower diagram of FIG. 11, the first hand 31 and the second hand 32 can move away from each other to a position where the substrates 9 they are holding do not overlap. Note that the first hand 31 and the second hand 32 are not limited to changing their positions symmetrically in a plan view.

[0026] The first hand 31 and the second hand 32 have the same structure. Hereinafter, the first hand 31 and the second hand 32 will be collectively referred to as the hand 3. The hand 3 is an end effector that holds the substrate 9. As shown in FIG. 11 , the hand 3 has a main body 301 and a holding portion 302. The main body 301 supports the holding portion 302. The main body 301 is rotatably connected to the second end of the link 222.

[0027] The holding portion 302 is substantially Y-shaped in a plan view, and has an open tip. As shown in FIG. 10 , the holding portion 302 is in the form of a thin plate. The hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placing, or fitting, and releases the held substrate 9. Note that the hand 3 in the illustration is an edge grip hand. The hand 3 holds the substrate 9 by having multiple guides grip the edges of the substrate 9. The hand 3 releases its hold on the substrate 9 when the guides move away from the edges of the substrate 9. The edge grip hand has a size corresponding to the diameter of the substrate 9. The size of the edge grip hand is relatively large.

[0028] (Aligner Structure) Fig. 3 is a perspective view of the first aligner 5L and the second aligner 5R. Fig. 4 is a plan view of the first aligner 5L and the second aligner 5R. Fig. 5 is a side view of the first aligner 5L and the second aligner 5R. In Figs. 3, 4, and 5, the same reference numerals are used to designate components common to the first aligner 5L and the second aligner 5R.

[0029] As described above, the first aligner 5L and the second aligner 5R are aligned in the left-right direction. In other words, the second aligner 5R is located next to the first aligner 5L. The first aligner 5L and the second aligner 5R are a so-called dual aligner. In this embodiment, the left-right direction corresponds to the arrangement direction of the first aligner 5L and the second aligner 5R. The right side as seen from the first aligner 5L corresponds to the direction approaching the second aligner 5R. The left side as seen from the first aligner 5L corresponds to the direction away from the second aligner 5R. The right side as seen from the second aligner 5R corresponds to the direction away from the first aligner 5L. The left side as seen from the second aligner 5R corresponds to the direction approaching the first aligner 5L. In the following description, the approaching direction as viewed from each aligner 5 (5R, 5L) may be referred to as the approaching direction or the inward direction, and the separating direction as viewed from each aligner 5 (5R, 5L) may be referred to as the separating direction or the outward direction. Note that the correspondence between each direction changes depending on the correspondence between the four directions, i.e., the front-rear direction and the left-right direction, and the housing 10.

[0030] As shown in Fig. 4, in this embodiment, the first aligner 5L and the second aligner 5R are positioned symmetrically about the center line CL in a plan view. Specifically, when the first aligner 5L and the second aligner 5R are installed at the same height, the components of the first aligner 5L and the second aligner 5R are positioned in mirror symmetry about a reference plane CS (see Fig. 3) that extends on the center line CL. In other words, the first aligner 5L and the second aligner 5R have the same structure in line-symmetric positions about the center line CL in a plan view. The detection stand 55, which will be described later, is not positioned between the first aligner 5L and the second aligner 5R. The first hand 31 and the second hand 32 can transport the substrate 9 into each of the first aligner 5L and the second aligner 5R, and can transport the substrate 9 out of each of the first aligner 5L and the second aligner 5R, while utilizing the large space between the first aligner 5L and the second aligner 5R.

[0031] The second aligner 5R is offset upward or downward relative to the first aligner 5L. In this embodiment, as shown in FIG. 5 , the heights of the installation surfaces F of the first aligner 5L and the second aligner 5R are different. Specifically, the installation surface F includes a first installation surface Fl that supports the first aligner 5L and a second installation surface Fr that supports the second aligner 5R. The second installation surface Fr is higher than the first installation surface Fl in the vertical direction. The second aligner 5R is offset upward relative to the first aligner 5L. In the illustrated example, the second aligner 5R is positioned higher than the first aligner 5L by H. Note that the first aligner 5L may be offset upward relative to the second aligner 5R. Furthermore, it is not essential that the heights of the first installation surface Fl and the second installation surface Fr be different. The first aligner 5L and the second aligner 5R may be offset in the up-down direction by making the height dimensions of the first aligner 5L and the second aligner 5R different.

[0032] The following describes the common configuration of the first aligner 5L and the second aligner 5R. In the following description, the first aligner 5L and the second aligner 5R are collectively referred to as the aligner 5.

[0033] The aligner 5 has a rectangular box-shaped base 50, a rotating table 51, a support portion 52, and a detection table 55. The base 50 is placed on an installation surface F. The base 50 has a top surface 50a that supports the rotating table 51, the support portion 52, and the detection table 55. Note that the rotating table 51, the support portion 52, and the detection table 55 may be integrated with the base 50. In other words, it is not necessary to consider the base 50 as an element independent of the rotating table 51, the support portion 52, or the detection table 55.

[0034] The rotating table 51 includes a housing 51a, a spindle 51b, and a drive unit 54 (see FIG. 2). The spindle 51b is located near the center of the housing 51a in the front-to-back and left-to-right directions in a plan view. The spindle 51b protrudes upward from the top surface of the housing 51a. The spindle 51b is cylindrical with a rotation axis Ox (see FIG. 5) extending in the vertical direction. The distance D3 between the center of the spindle 51b of the first aligner 5L and the center of the spindle 51b of the second aligner 5R is longer than the diameter Dw of the substrate 9. As shown in FIG. 4, the substrate 9 placed on the spindle 51b of the first aligner 5L and the substrate 9 placed on the spindle 51b of the second aligner 5R do not overlap in a plan view. In this embodiment, a gap D4 is provided between the substrates 9, allowing the tip 71c of the support unit 52 (described later) to move up and down along the center line CL. In other words, in this embodiment, the distance D3 is longer than the length obtained by adding the gap D4 to the diameter Dw of the substrate.

[0035] The spindle 51b has a vacuum pad 51c located at its upper end. The vacuum pad 51c has a support surface 51d on which a substrate is placed. In other words, the spindle 51b has the support surface 51d on which the substrate 9 is placed. The drive unit 54 is located inside the housing 51a. The vacuum pad 51c is connected to a vacuum pump via a tube. When the vacuum pump is driven, the underside of the substrate placed on the spindle 51b is adsorbed to the vacuum pad 51c. The drive unit 54 drives the spindle 51b to rotate when the substrate 9 is placed on the support surface 51d of the vacuum pad 51c and the underside of the substrate 9 is adsorbed to the vacuum pad 51c. The substrate 9 placed on the support surface 51d rotates around the rotation axis Ox.

[0036] The support unit 52 has a support surface 52a that supports the substrate 9. The support unit 52 moves the support surface 52a between a support position P1 and a lower position P2. The support position P1 is located above the turntable 51 and is a position where the support unit 52 receives the substrate 9 from the robot 2. The lower position P2 is located below the support position P1 and is a position where the support unit 52 hands over the substrate 9 to the turntable 51. In this embodiment, the lower position P2 is located below the placement surface 51d (see FIG. 8 ).

[0037] The support portion 52 has an arm portion 7. In this embodiment, the arm portion 7 includes a first arm 71, a second arm 72, and a third arm 73. The second arm 72 and the third arm 73 extend in a direction away from the aligner 5. The number of arms 7 may be two, or may be four or more.

[0038] As shown in FIG. 4 , the first arm 71 has a base end 71 a, a connecting portion 71 b, and a tip end 71 c. The base end 71 a extends in the proximal direction from the inner side surface (hereinafter referred to as the inner surface) of the housing 51 a. The connecting portion 71 b extends upward from the inner end of the base end 71 a and then bends back and extends forward. The tip end 71 c is located at the front end of the connecting portion 71 b, i.e., at the tip of the first arm 71. The tip end 71 c has multiple suction pads on its upper surface. The upper surfaces of one or more suction pads on the tip end 71 c form the support surface 52 a of the support portion 52.

[0039] As shown in FIG. 3 , the second arm 72 has a base end 72a, a connecting portion 72b, and a tip end 72c. The base end 72a extends in the away direction from the outer side surface (hereinafter referred to as the outer surface) of the housing 51a. The connecting portion 72b extends upward from the outer end of the base end 72a and then folds back and extends in the approaching direction. The tip end 72c is located at the inner end of the connecting portion 72b, i.e., at the tip of the second arm 72. The tip end 72c has multiple suction pads on its upper surface. The upper surfaces of one or more suction pads on the tip end 72c constitute the support surface 52a of the support portion 52.

[0040] The third arm 73 has a connection portion 73b and a tip portion 73c. ​​The connection portion 73b extends forward from the folding point of the connection portion 72b, and then folds back and extends in the approaching direction. The tip portion 73c is located at the inner end of the connection portion 73b, i.e., at the tip of the third arm 73. The tip portion 73c has multiple suction pads on its upper surface. The upper surfaces of one or more suction pads on the tip portion 73c form the support surface 52a of the support portion 52. In the following description, the first arm 71, the second arm 72, and the third arm 73 may be collectively referred to as arms 71, 72, and 73.

[0041] The support surfaces 52a of the arms 71, 72, and 73 are at the same height. A triangle Tr connecting the support surfaces 52a of the arms 71, 72, and 73 forms a plane extending horizontally. The arms 71, 72, and 73 do not overlap with the rotating table 51 in a plan view. When the arms 71, 72, and 73 are moved left and right and up and down, respectively, interference between the arms 71, 72, and 73 and the rotating table 51 can be suppressed.

[0042] The aligner 5 has a drive unit 53 that raises and lowers the support unit 52. The drive unit 53 raises and lowers the support unit 52 so as to transfer or receive the substrate 9 to or from the spindle 51b. Specifically, the drive unit 53 applies power to the arms 71, 72, and 73 to extend and retract them in the left-right direction or displace them in the up-down direction. As the arms 71, 72, and 73 extend and retract and displace, the support surfaces 52a located at the tips of the arms 71, 72, and 73 move relative to the turntable 51. Specifically, the support surface 52a of the support unit 52 (1) waits at the support position P1, (2) moves from the support position P1 to a lower position P2, (3) waits at the lower position P2, and (4) moves from the lower position P2 to the support position P1.

[0043] The detection table 55 is adjacent to the rotating table 51 in the separation direction. Specifically, in the first aligner 5L, the detection table 55 is located to the left of the rotating table 51. In the second aligner 5R, the detection table 55 is located to the right of the rotating table 51.

[0044] The detection table 55 is located on the top surface 50a of the base 50. The detection table 55 of the first aligner 5L supports a first sensor 58a. The detection table 55 of the second aligner 5R supports a second sensor 58b. The first sensor 58a and the second sensor 58b have the same structure and function. The first sensor 58a and the second sensor 58b are collectively referred to as sensors 58.

[0045] As shown in FIG. 5 , the detection table 55 has a recess 55a that is recessed in a direction away from the rotation table 51. The recess 55a has a horizontal U-shape. The opening of the U faces the rotation table 51. The distance between the recess 55a and the rotation axis Ox is longer than the radius (Dw / 2) of the substrate 9. The peripheral edge 9a of the substrate 9 placed on the placement surface 51d is located inside the recess 55a. The peripheral edge 9a of the substrate 9 located at the support position P1 is located inside the recess 55a.

[0046] The sensor 58 includes a sensor that detects a notch or orientation flat located on the peripheral edge 9a of the substrate 9. The sensor 58 outputs a detection signal that characterizes the angular position of the substrate 9. The sensor 58 includes a sensor that detects whether the substrate 9 supported at the support position P1 is present. The sensor 58 outputs a detection signal for determining whether the substrate 9 supported at the support position P1 is present. The sensor 58 includes a sensor that detects the substrate 9 located on the mounting surface 51d of the spindle 51b. The sensor 58 outputs a detection signal for determining whether the substrate 9 is present on the mounting surface 51d of the spindle 51b.

[0047] (Substrate Alignment) Next, alignment of the substrate 9 by the robot system 6 will be described with reference to the drawings. FIGS. 6 and 7 are sequence diagrams of the alignment of the substrate 9. FIGS. 8 and 9 show the movement trajectory of the support surface during the sequence of aligning the substrate 9. The basic operation of the robot 2 is as follows. That is, the robot 2 takes out the substrate 9 before alignment from the first FOUP 411 and transports it to the first aligner 5L and the second aligner 5R. The robot 2 also transports the aligned substrate 9 from the first aligner 5L and the second aligner 5R to the second FOUP 412. The robot 2 repeats transporting the substrate 9 until alignment of all the substrates 9 is completed.

[0048] In step S1 of Fig. 6, the robot 2 removes the substrates 9 from the first FOUP 411 and transports them to the first aligner 5L and the second aligner 5R. The robot 2 transports two substrates 9 using the first hand 31 and the second hand 32. In step S2, the robot 2 simultaneously hands over the two transported substrates 9 to the first aligner 5L and the second aligner 5R. The first aligner 5L and the second aligner 5R receive the substrates 9 from the robot 2. More specifically, the robot 2 places the substrate 9 held by the first hand 31 on the support portion 52 of the first aligner 5L, and places the substrate 9 held by the second hand 32 on the support portion 52 of the second aligner 5R. The upper part of Fig. 8 shows the state in which the first substrate 9 is placed on the support portion 52 of the first aligner 5L. In step S1, the support surfaces 52a of the first aligner 5L and the second aligner 5R are waiting at the support position P1. The substrate 9 received from the robot 2 is supported at the support position P1 by the support surfaces 52a.

[0049] In step S3, the first aligner 5L and the second aligner 5R each transfer the substrate 9 from the support portion 52 to the spindle 51b. Specifically, the support surfaces 52a of the first aligner 5L and the second aligner 5R linearly descend from the support position P1 to the lower position P2 (see the first trajectory T1 in the middle to lower parts of FIG. 8). As shown in the middle and lower parts of FIG. 8, during the process of descending from the support position P1 to the lower position P2, the substrate 9 is placed on the mounting surface 51d of the spindle 51b and transferred thereto. In the illustrated first aligner 5L, a gap ΔH exists between the lower position P2 and the mounting surface 51d of the spindle 51b (see the upper part of FIG. 9).

[0050] The first aligner 5L and the second aligner 5R then align the substrate 9 in step S4. More specifically, the first aligner 5L uses the first sensor 58a to check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. The second aligner 5R uses the second sensor 58b to check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. While performing the alignment, the first aligner 5L and the second aligner 5R return the support part 52 to the standby position. More specifically, as shown in the lower part of FIG. 9 , the support surface 52a moves along the second horizontally U-shaped trajectory T2, thereby bypassing the substrate 9 and returning to the standby position. The position indicated by the solid line in the lower part of FIG. 9 is the standby position of the support surface 52a.

[0051] After transferring the substrate 9 in step S2, the robot 2 returns to the first FOUP 411 (step S5), removes the next substrate 9 from the first FOUP 411, and transfers the next two substrates 9 to the first aligner 5L and the second aligner 5R (step S6). Steps S5 and S6 are performed while the first aligner 5L and the second aligner 5R are aligning the substrate 9 through steps S3 and S4. The robot 2 then places the substrate 9 on the support portion 52 of the first aligner 5L and the second aligner 5R, which are waiting at their waiting positions (step S7). In step S7, the aligned substrate 9 is placed on the spindle 51b.

[0052] After placing the substrate 9 on the support 52, the robot 2 receives the aligned substrate 9 from the spindles of the first aligner 5L and the second aligner 5R (step S8). The first aligner 5L and the second aligner 5R hand over the aligned substrate 9 to the robot 2. The robot 2 transports the aligned substrate 9 to the second FOUP 412 (step S9). After storing the substrate 9 in the second FOUP 412, the robot 2 returns to the first FOUP 411 (step S10) and transports the next substrate 9 removed from the first FOUP 411 to the first aligner 5L and the second aligner 5R (step S6).

[0053] Once the substrate 9 is removed from the spindle 51b in step S8, the first aligner 5L and the second aligner 5R are in the same state as in step S2. While the robot 2 is transporting the substrate 9 in steps S9, S10, and S6, the processes of the first aligner 5L and the second aligner 5R proceed from step S8 to step S3. The first aligner 5L and the second aligner 5R transfer the substrate 9 from the support 52 to the spindle 51b and align the substrate 9 in step S4. During or after aligning the substrate 9, the robot 2 also places the substrate 9 on the support 52 of the first aligner 5L and the second aligner 5R in step S7.

[0054] The first aligner 5L and the second aligner 5R repeat steps S3, S4, S7 and S8, and the robot 2 repeats steps S6, S7, S8, S9 and S10, thereby performing alignment of the substrate 9.

[0055] (Effects) The robot system 6 has a configuration in which the robot 2 transports the substrate 9 to the first aligner 5L and the second aligner 5R simultaneously, and a configuration in which the support portion 52 is raised and lowered to hand over or receive the substrate 9 to the spindle 51b. Because the support portion 52 receives (holds) and hands over (transfers) the substrate 9, the robot 2 can transport the substrate 9 while the first aligner 5L and the second aligner 5R are performing alignment. This reduces the standby time of the robot, and improves the throughput of substrate 9 alignment.

[0056] The distance D3 between the center of the spindle 51b of the first aligner 5L and the center of the spindle 51b of the second aligner 5R is longer than the diameter Dw of the substrate. In other words, the substrate 9 placed on the spindle 51b of the first aligner 5L and the substrate 9 placed on the spindle 51b of the second aligner 5R do not overlap in a plan view. With a substrate supported on the spindle 51b of the first aligner 5L and the second aligner 5R, the spindle 51b of the first aligner 5L or the second aligner 5R can be operated independently.

[0057] In this embodiment, a gap D4 is provided between the substrates 9, allowing the tip 71c of the first arm 71 to move up and down along the center line CL. In the example of FIG. 4, the distance D3 is longer than the diameter of the substrate plus the gap D4. The provision of a gap for the tip 71c of the first arm 71 allows a buffer mechanism to be added in a minimal space in addition to the dual aligner in the configuration of the present disclosure. Furthermore, a large space can be secured between the first aligner 5L and the second aligner 5R for the first hand (31) and the second hand (32) to receive or transfer the substrate (9).

[0058] The center of the substrate 9 placed on the support portion 52 and the center of the substrate 9 placed on the spindle 51b coincide or nearly coincide in the Z direction. The first hand 31 and the second hand 32 of the robot 2 are positioned at the same position in a plan view relative to the first aligner 5R and the second aligner 5L, respectively, when transferring the transported substrate 9 to the support portion 52 and when receiving the aligned substrate 9 from the spindle 51. Whether transferring the substrate 9 to the first aligner 5R and the second aligner 5L or transferring the substrate 9 from the first aligner 5R and the second aligner 5L, the movement trajectories of the first hand 31 and the second hand 32 can be made the same in a plan view, reducing the burden of teaching the robot 2.

[0059] (Variation) It is not essential that the first aligner 5L and the second aligner 5R be positioned symmetrically about the center line CL in a plan view. The relative positions of the first aligner 5R and the second aligner 5L may be changed depending on the approach and retreat of the first hand 31 and the second hand 32 to the first aligner 5R and the second aligner 5L. Furthermore, even if the first aligner 5L and the second aligner 5R are not positioned symmetrically about the center line CL in a plan view, a configuration in which a large space is provided between them is possible, and throughput can be improved.

[0060] The support portion 52 of the aligner 5 may support the aligned substrate 9. In detail, the robot 2 simultaneously loads the substrate onto the placement surfaces 51d of the first aligner 5L and the second aligner 5R. The robot 2 simultaneously unloads the aligned substrates 9 supported at the support positions P1 of the first aligner 5L and the second aligner 5R. During the unloading and subsequent transport by the robot 2, the first aligner 5L and the second aligner 5R each perform alignment. The support surface 52a descends to the lower position P2, following a trajectory that bypasses the substrate 9 placed on the placement surface 51d. The first aligner 5L and the second aligner 5R each transfer the aligned substrate 9 from the spindle 51b to the support portion 52. In detail, the support surface 52a rises linearly from the lower position P2 toward the support position P1, and in the process, the substrate 9 is transferred from the spindle 51b to the support unit 52. The support unit 52 waits at the support position P1. The robot 2 simultaneously loads the next substrate onto the placement surfaces 51d of the first aligner 5L and the second aligner 5R. The above series of processes is repeated.

[0061] The robot 2 may have a first arm and a second arm. The first arm may support a first hand 31, and the second arm may support a second hand 32.

[0062] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, application-specific integrated circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0063] (Aspects) The above-described embodiments are specific examples of the following aspects.

[0064] (Aspect 1) A first aligner (5L); a second aligner (5R) positioned beside the first aligner (5L); and a horizontal articulated transport robot (2) having a first hand (31) and a second hand (32), which transports a substrate (9) to the first aligner (5L) and the second aligner (5R) simultaneously using the first hand (31) and the second hand (32), wherein the first aligner (5L) and the second aligner (5R) each have a placement surface (51d) on which the substrate (9) is placed, and a spindle (51b) which rotates the substrate (9) placed on the placement surface (51d) around a rotation axis (Ox); and a support part (52) which supports the substrate (9) at a support position (P1) above the placement surface (51d) of the spindle (51b). a drive unit (53) that raises and lowers the support unit (52) so as to transfer or receive the substrate (9) to or from the spindle (51b).

[0065] Since the support portion (52) receives (holds) and delivers (transfers) the substrate 9, the robot 2 can transport the substrate 9 while the first aligner (5L) and the second aligner (5R) are performing alignment. This reduces the waiting time of the robot and improves the throughput of substrate (9) alignment.

[0066] (Aspect 2) The robot system (6) according to Aspect 1, wherein the first aligner (5L) and the second aligner (5R) have the mounting surfaces (51d) of the spindles (51b) at different height positions.

[0067] This facilitates simultaneous access to the first aligner (5L) and the second aligner (5R) by a so-called double-handed transfer robot (2), which is advantageous in improving the throughput of substrate alignment.

[0068] (Aspect 3) The robot system (6) according to Aspect 1 or Aspect 2, wherein a distance (D3) between the center of the spindle (51b) of the first aligner (5L) and the center of the spindle (51b) of the second aligner (5R) is longer than a diameter (Dw) of the substrate (9).

[0069] (Aspect 4) A robot system (6) according to any one of aspects 1 to 3, wherein the first aligner (5L) is positioned in a direction away from the second aligner (5R) with respect to the spindle (51b) of the first aligner (5L) and is provided with a first sensor (58a) that detects the substrate (9), and the second aligner (5R) is positioned in a direction away from the first aligner (5L) with respect to the spindle (51b) of the second aligner (5R) and is provided with a second sensor (58b) that detects the substrate (9).

[0070] A large space can be secured between the first aligner 5L and the second aligner 5R for the first hand (31) and the second hand (32) to transport the substrate (9).

[0071] (Aspect 5) The robot system (6) according to Aspect 4, wherein the first aligner (5L) and the second aligner (5R) are positioned symmetrically about a center line (CL) in a plan view.

[0072] Since the first aligner (5L) and the second aligner (5R) can have a common configuration, costs can be reduced and development time can be shortened.

[0073] (Aspect 6) A robot system (6) according to any one of Aspects 1 to 5, wherein in each of the first aligner (5L) and the second aligner (5R), the drive unit (53) lowers the support unit (52) to a lower position (P2) below the mounting surface (51d) of the spindle (51b), and then raises the support unit (52) to the support position (P1) along a trajectory that bypasses the substrate (9).

[0074] (Aspect 7) The robot system (6) according to any one of Aspects 1 to 6, wherein the transport robot (2) includes an arm (22) that supports the first hand (31) and the second hand (32) so that they rotate around the same rotation axis.

[0075] (Aspect 8) The robot system (6) according to any one of Aspects 1 to 7, wherein the transport robot (2) simultaneously loads substrates (9) into the support parts (52) waiting at the support positions (P1) of the first aligner (5L) and the second aligner (5R), and simultaneously unloads the substrates (9) placed on the placement surfaces (51d) of the first aligner (5L) and the second aligner (5R).

[0076] (Aspect 9) The robot system (6) according to any one of Aspects 1 to 7, wherein the transport robot (2) simultaneously loads substrates (9) into the support parts (52) waiting at the support positions (P1) of the first aligner (5L) and the second aligner (5R), and simultaneously unloads the substrates (9) placed on the placement surfaces (51d) of the first aligner (5L) and the second aligner (5R).

[0077] 2 Robot (transport robot) 22 Arm 31 First hand 32 Second hand 5L First aligner 5R Second aligner 51b Spindle 51d Placement surface 52 Support section 53 Drive section 6 Robot system 9 Substrate CL Center line Ox Rotation axis P1 Support position P2 Lower position

Claims

1. A robot system comprising: a first aligner; a second aligner positioned beside the first aligner; and a horizontally articulated transport robot having a first hand and a second hand that simultaneously transports substrates to the first aligner and the second aligner using the first hand and the second hand, wherein the first aligner and the second aligner each have a mounting surface on which a substrate is placed, a spindle that rotates the substrate placed on the mounting surface about its rotation axis, a support unit that supports the substrate at a support position above the spindle's mounting surface, and a drive unit that raises and lowers the support unit to transfer or receive the substrate to or from the spindle.

2. A robot system according to claim 1, wherein the first aligner and the second aligner have the spindles mounted on the mounting surfaces at different height positions.

3. A robot system according to claim 1, wherein the distance between the center of the spindle of the first aligner and the center of the spindle of the second aligner is longer than the diameter of the substrate.

4. A robot system according to claim 1, wherein the first aligner is positioned in a direction farther away from the second aligner than the spindle of the first aligner and is provided with a first sensor for detecting the substrate, and the second aligner is positioned in a direction farther away from the first aligner than the spindle of the second aligner and is provided with a second sensor for detecting the substrate.

5. A robot system according to claim 4, wherein the first aligner and the second aligner are positioned symmetrically about a center line in a plan view.

6. A robot system according to claim 1, wherein in each of the first aligner and the second aligner, the drive unit lowers the support unit to a lower position below the mounting surface of the spindle, and then raises the support unit to the support position by following a trajectory that bypasses the substrate.

7. A robot system according to claim 1, wherein the transport robot is provided with an arm that supports the first hand and the second hand so that they rotate about the same rotation axis.

8. A robot system according to claim 1, wherein the transport robot simultaneously loads substrates into the support parts waiting at the support positions of the first aligner and the second aligner, and simultaneously unloads the substrates placed on the placement surfaces of the first aligner and the second aligner.

9. A robot system according to claim 1, wherein the transport robot simultaneously loads substrates onto the placement surfaces of the first aligner and the second aligner, and simultaneously unloads the substrates supported by the support portions at the support positions of the first aligner and the second aligner.

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