Robot system and control method for robot system

Abstract

A robot system (6) is provided with a first placement part (5R), a second placement part (5L) positioned beside the first placement part, and a horizontal articulated transfer robot (2) that transfers a substrate (9) to the first placement part and the second placement part. The transfer robot (2) is provided with a first hand (31) and a second hand (32) that hold the substrate. While the first hand is approaching the first placement part and the second hand is approaching the second placement part, the first hand and / or the second hand is displaced in a direction in which the first hand and the second hand move away from each other.

Description

Robot system and control method for robot system

[0001] The technology disclosed herein relates to a robot system.

[0002] Patent Document 1 describes a conventional robot system. The conventional robot system performs alignment of substrates. The robot system includes a robot, a first aligner, and a second aligner. The robot transports substrates. The robot has a first hand and a second hand, and can transport two substrates to the first aligner and the second aligner. The combination of a robot having a first hand and a second hand with two aligners improves the throughput of substrate alignment.

[0003] JP 2016-81968 A

[0004] There is a need for further improvement in throughput for substrate processing, and there is a possibility that this could be achieved by optimizing the substrate transport operation by robots.

[0005] The technology disclosed herein relates to a robot system including: a first platform on which a substrate is placed; a second platform on which the substrate is placed, the second platform being located beside the first platform; and a horizontal articulated transport robot that transports the substrate to the first platform and the second platform, the transport robot having a first hand and a second hand that hold the substrate, and at least one of the first hand and the second hand being displaced in directions away from each other while the first hand is approaching the first platform and the second hand is approaching the second platform.

[0006] Since the movement trajectories of the first hand and the second hand when approaching the first placement section and the second placement section are optimized, the robot system can shorten the substrate transport time and improve the substrate processing throughput.

[0007] FIG. 1 shows a robot system for transporting a substrate. FIG. 2 is a block diagram of the robot system. FIG. 3 shows a horizontal articulated robot. FIG. 4 shows the operation of a first hand and a second hand. FIG. 5 is a perspective view of a first aligner and a second aligner. FIG. 6 is a plan view of the first aligner and the second aligner. FIG. 7 is a front view of the first aligner and the second aligner. FIG. 8 is a sequence diagram of substrate alignment. FIG. 9 shows the movement trajectories of the first hand and the second hand. FIG. 10 shows the movement trajectories of the first hand and the second hand according to a modified example. FIG. 11 shows the first hand and the second hand according to a modified example.

[0008] Hereinafter, an embodiment of a robot system will be described with reference to the drawings. The robot system described here is an example.

[0009] (Robot System) Fig. 1 is a plan view of a substrate transfer system 1. Fig. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 includes a robot system 6. The substrate transfer system 1 transfers a substrate 9 using the robot system 6. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transfer system 1 is, for example, a stocker.

[0010] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The first and second directions are both horizontal directions, and the second direction is perpendicular to the first direction. Hereinafter, the first direction will be referred to as the X direction, and the second direction will be referred to as the Y direction. Furthermore, the vertical direction perpendicular to the X and Y directions will be referred to as the Z direction. Note that the X direction, Y direction, and Z direction are used to describe the robot system 6, and are not used to limit the structure of the robot system 6.

[0011] The first wall 11 and the second wall 12 are connected to each other, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12 are connected to each other, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transport space 15.

[0012] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. An aligner 5 is located in the transfer space 15. The aligner 5 aligns the substrate 9. The substrate transfer system 1 includes two aligners 5R and 5L. The two aligners 5R and 5L are aligned along the second wall 12. Details of the aligner 5 will be described later.

[0013] The substrate transfer system 1 has a load port 19. Note that the load port 19 is not an essential element of the substrate transfer system 1. The substrate transfer system 1 has a plurality of load ports 19. The plurality of load ports 19 are lined up along the first wall 11.

[0014] A FOUP (Front Opening Unified Pod) 41 is attached to the load port 19. The FOUP 41 houses a substrate 9. The FOUP 41 can house multiple substrates 9 lined up in the Z direction. A FOUP opener on the load port 19 opens and closes the lid of the FOUP 41. When the FOUP opener opens the lid, the transfer space 15 and the FOUP 41 communicate with each other through the opening 17.

[0015] The substrate transfer system 1 includes a robot 2. The robot 2 is an example of a transfer robot. The robot 2 transfers a substrate 9 between a hoop 41 and an aligner 5 (see the solid line and the two-dot chain line in FIG. 1 ). The robot 2 is located in a transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0016] The substrate transfer system 1 includes a system controller 18. Note that the system controller 18 is not an essential element of the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0017] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a drive signal to the robot 2.

[0018] The robot controller 20 has a control unit 201 and a drive unit 202. The control unit 201 has a processor and a memory. The processor calculates an operation command for the robot 2 in accordance with teaching data 203 stored in the memory. The control unit 201 outputs the operation command to the drive unit 202.

[0019] The drive unit 202 receives operation commands from the control unit 201 and drives the first actuator 23, the second actuator 24, the third actuator 25, and the fourth actuator 26. More specifically, the drive unit 202 has an inverter circuit. A plurality of switching elements of the inverter circuit perform switching operations in accordance with the operation commands. Three-phase AC power is supplied to the first actuator 23, the second actuator 24, the third actuator 25, and the fourth actuator 26 through the switching operations of the plurality of switching elements. The first actuator 23, the second actuator 24, the third actuator 25, and the fourth actuator 26 are driven by the power supply. The robot 2 moves when the first actuator 23, the second actuator 24, the third actuator 25, and the fourth actuator 26 are driven.

[0020] Here, the robot 2 transports the substrate 9. Movement trajectories TR1 and TR2 of the hand 3, which will be described later, are the result of control of the robot 2 by the robot controller 20.

[0021] The aligner 5 is also electrically connected to the robot controller 20. As described above, the aligner 5 includes a first aligner 5R and a second aligner 5L. The robot controller 20 and the first aligner 5R are connected via a motor harness 54 and a signal harness 55. The robot controller 20 supplies power for spindle drive to the first aligner 5R via the motor harness 54. The signal harness 55 sends a control signal to the first aligner 5R. The first aligner 5R is controlled by the robot controller 20. The robot controller 20 and the second aligner 5L are connected via a motor harness 56. The first aligner 5R and the second aligner 5L are connected via a signal harness 57. The robot controller 20 supplies power to the second aligner 5L via the motor harness 56. The first aligner 5R transmits a control signal from the robot controller 20 to the second aligner 5L via a signal harness 57. The robot controller 20 and the second aligner 5L may be connected to each other via a motor harness 56 and a signal harness 57. The aligner 5 may be connected to the system controller 18 and controlled by the system controller 18. Furthermore, the substrate transport system 1 may have an aligner controller dedicated to the aligner, separate from the robot controller 20.

[0022] The first aligner 5R is connected to a vacuum pump via a vacuum tube to hold the substrate 9, which will be described later. The first aligner 5R is also supplied with air for operating the actuator of the support part 52, which will be described later, via an air tube connected to the first aligner 5R. A vacuum tube and an air tube are also connected to the second aligner 5L, independently of the first aligner 5R.

[0023] (Structure of Robot) As described above, the robot 2 is a horizontally articulated robot. FIG. 3 is a side view of the robot 2. FIG. 4 is a plan view of the hand 3 of the robot 2. As shown in FIG. 1 or 3, the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0024] The base 21 supports the arm 22. The arm 22 can be raised and lowered in the Z direction relative to the base 21. A first actuator 23 raises and lowers the arm 22. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, link 221 and link 222. Note that the number of links forming the arm 22 is not limited to two.

[0025] A first end of link 221 is supported by base 21. Link 221 is rotatable about a first axis Z1 extending in the Z direction relative to base 21. A second actuator 24 rotates link 221. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis Z2 extending in the Z direction relative to link 221. A third actuator 25 rotates link 222.

[0026] The robot 2 has a first hand 31 and a second hand 32 as hands 3. A so-called double-handed robot 2 has high efficiency in transporting the substrate 9. The first hand 31 and the second hand 32 are connected to the second end of the link 222 in a state where they are overlapped in the Z direction. As shown in Fig. 3, the first hand 31 and the second hand 32 differ in position from each other by H in the Z direction.

[0027] The first hand 31 is rotatable about a third axis Z3 extending in the Z direction relative to the link 222, and the second hand 32 is also rotatable about the third axis Z3 relative to the link 222. The third axis Z3 is an example of a rotation axis, and the first hand 31 and the second hand 32 rotate about the same rotation axis. The fourth actuator 26 individually rotates the first hand 31 and the second hand 32. The first hand 31 and the second hand 32 can change their positions between an overlapping state in the Z direction as shown in the upper diagram of FIG. 4 and a separated state as shown in the lower diagram of FIG. 4. As shown by the two-dot chain line in the lower diagram of FIG. 4, the first hand 31 and the second hand 32 can move away from each other to a position where the substrates 9 they are holding do not overlap. Note that the first hand 31 and the second hand 32 are not limited to changing their positions symmetrically in a plan view.

[0028] The first hand 31 and the second hand 32 have the same structure. Hereinafter, the first hand 31 and the second hand 32 will be collectively referred to as the hand 3. The hand 3 is an end effector that holds the substrate 9. As shown in FIG. 4 , the hand 3 has a main body 301 and a holding portion 302. The main body 301 supports the holding portion 302. The main body 301 is rotatably connected to the second end of the link 222.

[0029] The holding portion 302 is substantially Y-shaped in a plan view, and has an open tip. As shown in FIG. 3 , the holding portion 302 is in the form of a thin plate. The hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placing, or fitting, and releases the held substrate 9. Note that the hand 3 in the illustration is an edge grip hand. The hand 3 holds the substrate 9 by having multiple guides grip the edges of the substrate 9. The hand 3 releases its hold on the substrate 9 when the guides move away from the edges of the substrate 9. The edge grip hand has a size corresponding to the diameter of the substrate 9. The size of the edge grip hand is relatively large.

[0030] (Aligner Structure) Fig. 5 is a perspective view of the first aligner 5R and the second aligner 5L. Fig. 6 is a plan view of the first aligner 5R and the second aligner 5L. Fig. 7 is a front view of the first aligner 5R and the second aligner 5L. The first aligner 5R and the second aligner 5L have the same elements. In Figs. 5, 6, and 7, elements common to the first aligner 5R and the second aligner 5L are denoted by the same reference numerals.

[0031] 5, the first aligner 5R and the second aligner 5L are aligned in the left-right direction. In other words, the second aligner 5L is located next to the first aligner 5R.

[0032] In this specification, "horizontal" refers to a direction intersecting the direction in which the substrate 9 is transferred from the robot 2 to the first aligner 5R or the second aligner 5L. In this embodiment, the left-right direction corresponds to the arrangement direction of the first aligner 5R and the second aligner 5L. The first aligner 5R is located on the right, and the second aligner 5L is located on the left. As shown in FIG. 1 , the first aligner 5R and the second aligner 5L are arranged in the X direction in the substrate transfer system 1. The front-to-back direction of the first aligner 5R and the second aligner 5L corresponds to the Y direction in the substrate transfer system 1, and the up-down direction of the first aligner 5R and the second aligner 5L corresponds to the Z direction in the substrate transfer system 1.

[0033] 6, in this embodiment, the first aligner 5R and the second aligner 5L are positioned symmetrically about a center line CL in a plan view. In other words, the first aligner 5R and the second aligner 5L have the same structure at symmetric positions in a plan view. The center line CL is a line extending in the front-rear direction and corresponds to the Y direction in the substrate transfer system 1.

[0034] As shown in FIG. 7 , the first aligner 5R and the second aligner 5L are misaligned in the Z direction. In this embodiment, the height of the mounting surface F of the first aligner 5R and the second aligner 5L is different. Specifically, the mounting surface F includes a first mounting surface FR that supports the first aligner 5R and a second mounting surface FL that supports the second aligner 5L. The first mounting surface FR is higher than the second mounting surface FL in the vertical direction. The first aligner 5R is positioned higher than the second aligner 5L by a distance H. The vertical positions of the spindle 51 and support portion 52 of the first aligner 5R, which will be described later, are higher than the vertical positions of the spindle 51 and support portion 52 of the second aligner 5L. The height H corresponds to the amount of misalignment H in the Z direction between the first hand 31 and the second hand 32 described above.

[0035] It is not essential that the heights of the first and second mounting surfaces FR and FL be different from each other. The first and second aligners 5R and 5L may be offset from each other in the vertical direction by making the height dimensions of the first and second aligners 5R and 5L different from each other.

[0036] The common configuration of the first aligner 5R and the second aligner 5L will be described below.

[0037] The aligner 5 has a rectangular box-shaped base 50. The base 50 is placed on a placement surface F.

[0038] The aligner 5 has a spindle 51. The spindle 51 holds the substrate 9 and rotates the held substrate 9. The spindle 51 protrudes upward from the base 50. The spindle 51 is cylindrical with its rotation axis in the vertical direction. The upper end surface of the spindle 51 holds the substrate 9 by vacuum suction. The spindle 51 rotates around its rotation axis, thereby rotating the substrate 9 around the rotation axis.

[0039] As shown in Fig. 7, the distance D1 between the center of the spindle 51 of the first aligner 5R and the center of the spindle 51 of the second aligner 5L is longer than the diameter of the substrate 9. As shown in Fig. 6, the substrate 9 placed on the spindle 51 of the first aligner 5R and the substrate 9 placed on the spindle 51 of the second aligner 5L do not overlap in a plan view. Note that hereinafter, the distance D1 will be referred to as the distance D1 between the first aligner 5R and the second aligner 5L. As shown in Fig. 1, the distance D1 is restricted by the width D2 of the substrate transport system 1 in the X direction.

[0040] The aligner 5 has a support portion 52. The support portion 52 supports the substrate 9 before alignment. The support portion 52 has a plurality of support surfaces 52a. As shown imaginarily in FIG. 6 or 7, the plurality of support surfaces 52a abut against the outer peripheral edge of the lower surface of the substrate 9 to support the substrate 9 from below. As shown in FIG. 6, the support portion 52 has three support surfaces 52a. The three support surfaces 52a are positioned at intervals from one another so that the center of the substrate 9 is included in a triangle formed by connecting the support surfaces 52a. Note that the number of support surfaces 52a is not limited to three.

[0041] The support unit 52 moves the support surface 52a between a support position P1 and a lower position P2. The support position P1 is a position above the spindle 51, as shown by the phantom line in FIG. 7 . The robot 2 places the substrate 9 on the support surface 52a located at the support position P1. The lower position P2 is a position below the support position P1. The support unit 52 delivers the substrate 9 to the spindle 51 by lowering the support surface 52a from the support position P1 to the lower position P2. After delivering the substrate 9 to the spindle 51, the support surface 52a returns from the lower position P2 to the support position P1. When the support surface 52a returns from the lower position P2 to the support position P1, the support surface 52a is displaced to bypass the substrate 9, as shown by the solid line in FIG. 6 or 7 , so as to prevent interference between the support surface 52a and the substrate 9. The support unit 52 has an actuator that moves the support surface 52a. In order to ensure a space for the support surface 52a to detour, the distance D1 between the first aligner 5R and the second aligner 5L is relatively large.

[0042] The aligner 5 has a sensor 53. The sensor 53 is used to check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. The sensor 53 is horizontally adjacent to the spindle 51. The sensor 53 is columnar and extends upward from the base 50.

[0043] The sensor 53 is located at a position overlapping the outer peripheral edge of the substrate 9 held by the spindle 51 in a plan view. As described above, the first aligner 5R and the second aligner 5L are located symmetrically with respect to the center line CL in a plan view. The sensor 53 of the first aligner 5R is located on the opposite side of the spindle 51 from the second aligner 5L. The sensor 53 of the second aligner 5L is located on the opposite side of the spindle 51 from the first aligner 5R.

[0044] (Substrate Alignment) Next, alignment of the substrate 9 by the robot system 6 will be described with reference to FIG. 8 . FIG. 8 is a sequence diagram of alignment of the substrate 9. Here, the basic operation of the robot 2 is as follows. That is, the robot 2 takes out the substrate 9 before alignment from the first FOUP 411, and transports the substrate 9 to the first aligner 5R and the second aligner 5L. The robot 2 also transports the aligned substrate 9 from the first aligner 5R and the second aligner 5L to the second FOUP 412, and stores the aligned substrate 9 in the second FOUP 412. The robot 2 repeats the transport of the substrate 9 between the FOUP 41 and the aligner 5 until alignment of all the substrates 9 is completed.

[0045] 8 , the robot 2 removes the substrates 9 from the first FOUP 411 and transports them to the first aligner 5R and the second aligner 5L. The robot 2 transports two substrates 9 using the first hand 31 and the second hand 32. In step S2, the robot 2 simultaneously delivers the two transported substrates 9 to the first aligner 5R and the second aligner 5L. More specifically, the robot 2 places the first substrate 9 held by the first hand 31 on the support surface 52a of the first aligner 5R, and places the second substrate 9 held by the second hand 32 on the support surface 52a of the first aligner 5R. The first aligner 5R is positioned above the second aligner 5L by an amount corresponding to the Z-direction positional deviation H of the first hand 31 and the second hand 32. The robot 2 can simultaneously transfer two substrates 9 to the first aligner 5R and the second aligner 5L.

[0046] In step S3, the first aligner 5R and the second aligner 5L each move the support surface 52a from the support position P1 to a lower position P2. As the support surface 52a moves down, the substrate 9 is transferred from the support portion 52 to the spindle 51. The first aligner 5R and the second aligner 5L then align the substrate 9 in step S4. More specifically, the first aligner 5R and the second aligner 5L check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. Note that while performing alignment, the first aligner 5R and the second aligner 5L return the support surface 52a from the lower position P2 to the support position P1.

[0047] After transferring the substrate 9 in step S2, the robot 2 returns to the first FOUP 411 (step S5) and removes the next substrate 9 from the first FOUP 411. In step S6, the robot 2 transports the next two substrates 9 to the first aligner 5R and the second aligner 5L. Steps S5 and S6 are performed while the first aligner 5R and the second aligner 5L are aligning the substrates 9 through steps S3 and S4. Then, after completing alignment using at least the sensor 53, the robot 2 places the substrate 9 on the support surface 52a positioned at the support position P1 of each of the first aligner 5R and the second aligner 5L (step S7). Note that in step S7, the aligned substrate 9 is placed on the spindle 51.

[0048] After placing the substrate 9 on the support surface 52a, the robot 2 receives the aligned substrate 9 from the spindles 51 of the first aligner 5R and the second aligner 5L (step S8). Because the height positions of the first aligner 5R and the second aligner 5L are offset, the robot 2 can simultaneously receive the substrate 9 from each of the first aligner 5R and the second aligner 5L. Simultaneous delivery and reception improves the throughput of alignment of the substrate 9. The robot 2 transports the aligned substrate 9 to the second FOUP 412 (step S9). After storing the substrate 9 in the second FOUP 412, the robot 2 returns to the first FOUP 411 (step S10) and transports the next substrate 9 removed from the first FOUP 411 to the first aligner 5R and the second aligner 5L (step S6).

[0049] Once the substrate 9 is removed from the spindle 51 in step S8, the states of the first aligner 5R and the second aligner 5L are the same as in step S2. While the robot 2 is transporting the substrate 9 in steps S9, S10, and S6, the processes of the first aligner 5R and the second aligner 5L proceed from step S8 to step S3. The first aligner 5R and the second aligner 5L transfer the substrate 9 from the support 52 to the spindle 51 and align the substrate 9 in step S4. After aligning the substrate 9, the robot 2 also places the substrate 9 on the support surfaces 52a of the first aligner 5R and the second aligner 5L in step S7.

[0050] The first aligner 5R and the second aligner 5L repeat steps S3, S4, S7, and S8, and the robot 2 repeats steps S6, S7, S8, S9, and S10, thereby performing alignment of the substrate 9. Because the support portion 52 holds and transfers the substrate 9, the robot 2 can transport the substrate 9 while the first aligner 5R and the second aligner 5L are performing alignment. This reduces unnecessary waiting time for the robot 2. The support portions 52 of the first aligner 5R and the second aligner 5L significantly improve the throughput of alignment of the substrate 9.

[0051] (Robot Transport Operation) The robot system 6 is characterized by the transport of the substrate 9 by the robot 2, with the primary objective of further improving the throughput of alignment of the substrate 9. In Figure 9, dashed arrows indicate the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 when the first hand 31 and the second hand 32 of the robot 2 approach the first aligner 5R and the second aligner 5L. The movement trajectories of the first hand 31 and the second hand 32 when the first hand 31 and the second hand 32 of the robot 2 move away from the first aligner 5R and the second aligner 5L are also the same as the movement trajectories TR1 and TR2 when approaching. Figure 9 depicts multiple overlapping positions of the first hand 31 and the second hand 32 as they approach the first aligner 5R and the second aligner 5L. Here, the movement trajectory TR1 of the first hand 31 is the movement trajectory of the center position of the substrate 9 held by the first hand 31, and the movement trajectory TR2 of the second hand 32 is the movement trajectory of the center position of the substrate 9 held by the second hand 32. The first aligner 5R is an example of a first placement unit, and the second aligner 5L is an example of a second placement unit.

[0052] While the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 are displaced in directions away from each other. That is, while the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L by the drive of the arm 22, they rotate in opposite directions about the third axis Z3. As a result, the first hand 31 and the second hand 32 are displaced in directions away from each other. In FIG. 9 , the movement trajectory TR1 of the first hand 31 is tilted to the right with respect to the vertical direction, and the movement trajectory TR2 of the second hand 32 is tilted to the left with respect to the vertical direction.

[0053] More specifically, the arm 22 moves the first hand 31 and the second hand 32 closer to the first aligner 5R and the second aligner 5L so that the third axis Z3 moves on the center line CL. The movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 are symmetrical about the center line CL in a plan view.

[0054] The first hand 31 approaches the first aligner 5R in a direction in which the spindle 51 of the first aligner 5R relatively enters the first hand 31 from the distal end opening of the first hand 31. In Fig. 9, the first hand 31 moves diagonally upward to the right while gradually tilting to the right. Similarly, the second hand 32 approaches the second aligner 5L in a direction in which the spindle 51 of the second aligner 5L relatively enters the second hand 32 from the distal end opening of the second hand 32. In Fig. 9, the second hand 32 moves diagonally upward to the left while gradually tilting to the left.

[0055] When the first hand 31 and the second hand 32 are spaced apart from the first aligner 5R and the second aligner 5L by a first distance L1 or more, they maintain positions close to each other until at least a portion of the substrates 9 overlap. That is, the first hand 31 and the second hand 32 approach the first aligner 5R and the second aligner 5L while maintaining a constant distance between them. Here, the distance between the hand 31 and the aligner 5 is defined in FIG. 9 as the distance between the center of the spindle 51 of the first aligner 5R and the second aligner 5L and the center of the substrate 9 held by the first hand 31 and the second hand 32. The first distance L1 is the distance at which the tip of the holding portion 302 of the first hand 31 approaches the first aligner 5R and the tip of the holding portion 302 of the second hand 32 approaches the second aligner 5L. The first distance L1 is set to an appropriate distance.

[0056] When the first hand 31 and the second hand 32 are closer to the first aligner 5R and the second aligner 5L than the first distance L1, the first hand 31 and the second hand 32 move away from each other as they approach the first aligner 5R and the second aligner 5L. In other words, the first hand 31 and the second hand 32 rotate in opposite directions.

[0057] Then, when the first hand 31 transfers or receives the substrate 9 between the first aligner 5R and the second hand 32 transfers or receives the substrate 9 between the second aligner 5L, the first hand 31 and the second hand 32 move away from each other to a position where the substrates 9 do not overlap.

[0058] Here, in the first aligner 5R, the support portion 52 is positioned so as to overlap the spindle 51 in the Z direction. The center of the substrate 9 placed on the support portion 52 and the center of the substrate 9 placed on the spindle 51 coincide or nearly coincide in the Z direction. The position of the first hand 31 in plan view is the same or substantially the same when the first hand 31 delivers the substrate 9 to the support surface 52a of the first aligner 5R and when the first hand 31 receives the substrate 9 from the spindle 51 of the first aligner 5R. Furthermore, the position of the second hand 32 in plan view is the same or substantially the same when the second hand 32 delivers the substrate 9 to the support surface 52a of the second aligner 5L and when the second hand 32 receives the substrate 9 from the spindle 51 of the second aligner 5L.

[0059] (Effects) While the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 are displaced in directions away from each other. Since the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32, respectively, are optimized, the transport time of the substrate 9 can be shortened. The robot system 6 can improve the throughput of the alignment of the substrate 9.

[0060] The arm 22 moves the first hand 31 and the second hand 32 closer to the first aligner 5R and the second aligner 5L so that the third axis Z3 moves along the center line CL between the first aligner 5R and the second aligner 5L in a plan view. Both the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 are shortest. This allows the robot 2 to shorten the transport time.

[0061] The first aligner 5R and the second aligner 5L are disposed symmetrically about the center line CL, and no sensor 53 is located between the first aligner 5R and the second aligner 5L. The first hand 31 and the second hand 32, which move along the center line CL, can utilize the large space between the sensor 53 of the first aligner 5R and the sensor 53 of the second aligner 5L. The first hand 31 and the second hand 32 can use the large space to load the substrate 9 into each of the first aligner 5R and the second aligner 5L, and can also load the substrate 9 out of each of the first aligner 5R and the second aligner 5L.

[0062] When the first hand 31 and the second hand 32 are distant from the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 approach each other so that the substrates 9 partially overlap. This reduces the space required to transport the substrates 9. When the first hand 31 and the second hand 32 are close to the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 move away from each other. The first hand 31 approaches the first aligner 5R in a direction in which the spindle 51 of the first aligner 5R relatively enters the first hand 31 from the tip opening of the first hand 31, and the second hand 32 approaches the second aligner 5L in a direction in which the spindle 51 of the second aligner 5L relatively enters the second hand 32 from the tip opening of the second hand 32. The robot 2 can quickly transport the substrates 9 while avoiding interference between the hands 31, 32 and the aligners 5R, 5L. Furthermore, when the substrates 9 are handed over and received between the hands 31, 32 and the aligners 5R, 5L, the first hand 31 and the second hand 32 move away from each other so that the substrates 9 do not overlap. This allows the robot 2 to smoothly hand over and receive the substrates 9.

[0063] Furthermore, the center of the substrate 9 placed on the support portion 52 and the center of the substrate 9 placed on the spindle 51 coincide or nearly coincide in the Z direction. The first hand 31 and the second hand 32 of the robot 2 are positioned at the same position relative to the first aligner 5R and the second aligner 5L in a planar view, whether they are transferring the transported substrate 9 to the support portion 52 or receiving the aligned substrate 9 from the spindle 51. The movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32 are the same in a planar view, whether they are transferring the substrate 9 to the first aligner 5R and the second aligner 5L or transferring the substrate 9 from the first aligner 5R and the second aligner 5L. This reduces the burden of teaching the robot 2.

[0064] Furthermore, the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 when the first hand 31 and the second hand 32 move away from the first aligner 5R and the second aligner 5L are the same as the movement trajectories TR1 and TR2 when they move toward each other. Optimizing the movement trajectories TR1 and TR2 when the first hand 31 and the second hand 32 move away from the first aligner 5R and the second aligner 5L shortens the transport time of the substrate 9.

[0065] The first hand 31 and the second hand 32 of the robot 2 are edge-grip hands. The edge-grip hands can easily determine the relative positions of the hand 3 and the substrate 9 when the hand 3 grips the substrate 9. However, because the edge-grip hands are large in size, there is a risk of interference between the first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L, which is a disadvantage.

[0066] The first aligner 5R and the second aligner 5L are arranged at a relatively large distance D1 so that the substrates 9 do not overlap. The rotation angle θ1 of the first hand 31 when the first hand 31 delivers or receives the substrate 9 to or from the first aligner 5R is relatively large, and the rotation angle θ2 of the second hand 32 when the second hand 32 delivers or receives the substrate 9 to or from the second aligner 5L is relatively large (see FIG. 4). Because the first hand 31 and the second hand 32 are large in size and rotate widely, the first hand 31 and the second hand 32 are more likely to interfere with the first aligner 5R and the second aligner 5L.

[0067] The first hand 31 and the second hand 32 move toward the first aligner 5R and the second aligner 5L while displacing away from each other, which allows the first hand 31 and the second hand 32 to rotate widely while avoiding interference between the large-sized first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L.

[0068] (Modification) With regard to the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32, both the first hand 31 and the second hand 32 do not have to rotate while the first hand 31 is approaching the first aligner 5R and the second hand 32 is approaching the second aligner 5L. For example, as illustrated in Fig. 10 , the robot 2 may rotate only the first hand 31 to reach the first aligner 5R while allowing the second hand 32 to reach the second aligner 5L without rotating it. Alternatively, conversely to Fig. 10 , the robot 2 may rotate only the second hand 32 to reach the second aligner 5L while allowing the first hand 31 to reach the first aligner 5R without rotating it. Furthermore, when the robot 2 rotates both the first hand 31 and the second hand 32, the rotation angle of the first hand 31 and the rotation angle of the second hand 32 may be different.

[0069] It is not essential that the first aligner 5R and the second aligner 5L are positioned symmetrically about the center line CL in a plan view. The relative positions of the first aligner 5R and the second aligner 5L may be adjusted according to the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32.

[0070] The hand 3 of the robot 2 is not limited to an edge grip hand. For example, as shown in FIG. 11 , the hand 3 of the robot 2 may be a vacuum hand. The vacuum hand uses negative pressure to hold the substrate 9. The vacuum hand is smaller in size than the edge grip hand. The distance D1 between the first aligner 5R and the second aligner 5L can be the same whether it is an edge grip hand or a vacuum hand. The robot system 6 is highly versatile.

[0071] The support portion 52 of the aligner 5 may support the substrate 9 after alignment. That is, the robot 2 may deliver the substrate 9 before alignment to the spindle 51. The support portion 52 moves the support surface 52a up from the lower position P2 to the support position P1, thereby transferring the aligned substrate 9 from the spindle 51 to the support surface 52a. The robot 2 receives the aligned substrate 9 from the support surface 52a.

[0072] The aligner 5 is not limited to one having a support portion 52. The support portion 52 may be omitted from the first aligner 5R and the second aligner 5L. Since the first aligner 5R and the second aligner 5L without the support portion 52 do not transfer or mount the substrate 9, no space is required for detouring the support surface 52a. The distance between the first aligner 5R and the second aligner 5L can be narrow. When the distance between the first aligner 5R and the second aligner 5L is narrow, the substrates 9 may overlap when the substrates 9 are transferred or received between the first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L.

[0073] The first aligner 5R and the second aligner 5L do not have to be two aligners having separate bases 50. The aligner 5 may have a structure having a first spindle and a second spindle on a single base. Note that the first aligner and the second aligner referred to here are each functional components including at least a spindle and a sensor so as to perform alignment of the substrate 9.

[0074] The robot 2 may have a first arm and a second arm. The first arm may support a first hand 31, and the second arm may support a second hand 32.

[0075] The transport operation of the robot 2 associated with the first hand 31 and the second hand 32 disclosed herein is not limited to the transport operation of the substrate 9 associated with the aligner 5. The transport operation of the robot 2 disclosed herein may be applied to the transport operation of the substrate 9 associated with the FOUP 41, for example, or to the transport operation of the substrate 9 associated with substrate processing equipment that performs various processes on the substrate 9.

[0076] The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), FPGAs (Field Programmable Gate Arrays), and / or conventional circuitry. The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including combinations of general-purpose processors, special-purpose processors, integrated circuits, ASICs, FPGAs, and conventional circuitry. The one or more circuits or processing circuits may be programmed using one or more programs stored together or separately in one or more memories or otherwise configured to perform the disclosed functions. A processor is considered a processing circuit or circuitry because it includes transistors and other circuitry. A processor may also be a programmed processor that executes a program stored in a memory. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions alone or in combination with each other, or hardware that is programmed to perform the recited functions alone or in combination with each other. The hardware may be any hardware disclosed herein that is programmed or configured to perform the recited functions.

[0077] A computer program containing computer instructions is stored in memory. The computer instructions provide the logic and routines that enable hardware to perform the methods disclosed herein. The hardware includes, for example, processing circuits or circuitry. The computer program may be implemented in a known format in a computer-readable storage medium, a computer program product, a memory device, a recording medium such as a CD-ROM or DVD, and / or the memory of FPGAs or ASICs.

[0078] (Aspects) The above-described embodiments are specific examples of the following aspects.

[0079] (Aspect 1) A robot system (6) comprising: a first placement section (5R) on which a substrate (9) is placed; a second placement section (5L) on which the substrate (9) is placed, the second placement section (5L) being located beside the first placement section (5R); and a horizontal articulated transport robot (2) that transports the substrate (9) to the first placement section (5R) and the second placement section (5L), the transport robot (2) having a first hand (31) and a second hand (32) that hold the substrate (9), and in which, while the first hand (31) is approaching the first placement section (5R) and the second hand (32) is approaching the second placement section (5L), at least one of the first hand (31) and the second hand (32) is displaced in a direction away from each other.

[0080] Since the movement trajectories (TR1, TR2) of the first hand (31) and the second hand (32) when approaching the first placement unit (5R) and the second placement unit (5L) are optimized, the transport time of the substrate (9) is shortened, and the robot system 6 can improve the throughput of processing the substrate (9).

[0081] (Aspect 2) The robot system (6) according to Aspect 1, wherein the transport robot (2) further includes an arm (22) that supports the first hand (31) and the second hand (32) so that they rotate about the same rotation axis (Z3), and the first hand (31) and the second hand (32) rotate about the rotation axis (Z3) while approaching the first placement section (5R) and the second placement section (5L) by being driven by the arm (22).

[0082] The so-called double-handed transport robot (2) can simultaneously transport two substrates (9) held by a first hand (31) and a second hand (32) to the first placement part (5R) and the second placement part (5L). The double-handed transport robot (2) is advantageous in improving the throughput of processing the substrates (9).

[0083] (Aspect 3) The robot system (6) according to aspect 2, wherein the first placement portion (5R) and the second placement portion (5L) are positioned symmetrically about a center line (CL) in a plan view, the arm (22) brings the first hand (31) and the second hand (32) closer to the first placement portion (5R) and the second placement portion (5L) so that the rotation axis (Z3) moves on the center line (CL), and the first hand (31) and the second hand (32) rotate in opposite directions to each other about the rotation axis (Z3).

[0084] The transfer robot (2) transfers the substrate (9) along the center line (CL) to the first placement unit (5R) and the second placement unit (5L), which are positioned symmetrically with respect to the center line (CL), and can deliver the substrate (9) to each of the two placement units (5R, 5L). The movement trajectories (TR1, TR2) of the first hand (31) and the second hand (32) are both shortest. The robot system (6) can shorten the transfer time.

[0085] (Aspect 4) The robot system (6) according to Aspect 3, wherein when the first hand (31) and the second hand (32) are separated from the first placement portion (5R) and the second placement portion (5L) by a first distance (L1) or more, they approach each other to a position where at least a portion of the substrates (9) overlap, and when the first hand (31) and the second hand (32) are closer to the first placement portion (5R) and the second placement portion (5L) than the first distance (L1), they rotate in opposite directions as they approach the first placement portion (5R) and the second placement portion (5L).

[0086] When the first hand (31) and the second hand (32) are separated from the first placement section (5R) and the second placement section (5L), the first hand (31) and the second hand (32) move closer to each other, thereby reducing the transport space for the substrate (9).

[0087] When the first hand (31) and the second hand (32) approach the first placement section (5R) and the second placement section (5L), the first hand (31) and the second hand (32) move away from each other, allowing the transport robot (2) to quickly transport the substrate (9) while avoiding interference between the first hand (31) and the second hand (32) and the first placement section (5R) and the second placement section (5L).

[0088] (Aspect 5) A robot system (6) according to Aspect 4, wherein when the first hand (31) transfers or receives a substrate (9) between the first placement section (5R) and the second hand (32) transfers or receives a substrate (9) between the second placement section (5L), the first hand (31) and the second hand (32) move away from each other to a position where the substrates (9) do not overlap.

[0089] The robot (2) can smoothly transfer and receive the substrate (9) between the first placement part (5R) and the second placement part (5L).

[0090] (Aspect 6) A robot system (6) according to any one of Aspects 1 to 5, wherein the first mounting portion is a first aligner (5R) that aligns the substrate (9), the second mounting portion is a second aligner (5L) that aligns the substrate (9), the first aligner (5R) and the second aligner (5L) each have a support portion (52) that supports the substrate (9) before or after alignment and transfers the substrate (9) between them and a spindle (51), and the transport robot (2) hands over the substrate (9) transported to the first aligner (5R) or the second aligner (5L) to the spindle (51) or the support portion (52), and receives the aligned substrate (9) from the support portion (52) or the spindle (51).

[0091] The support unit 52 has a function of supporting the substrate 9 and a function of transferring the substrate 9 between the spindle 51. The support unit 52 enables the transfer robot 2 to transfer the next substrate 9 while the first aligner 5R and the second aligner 5L are aligning the substrate 9. The robot system 6 can significantly improve the throughput of substrate 9 alignment.

[0092] (Aspect 7) The robot system (6) according to Aspect 6, wherein the support portion (52) supports the substrate (9) at a position above the spindle (51) and moves up and down to transfer the substrate (9) to and from the spindle (51).

[0093] Because the support part (52) and the spindle (51) are stacked vertically, the movement trajectories (TR1, TR2) of the first hand (31) and the second hand (32) are the same in a plan view whether they approach the support part (52) or the spindle (51). Sharing the movement trajectories (TR1, TR2) reduces the burden of teaching the robot (2).

[0094] (Aspect 8) The robot system (6) according to any one of Aspects 1 to 7, wherein the transport robot (2) transports the substrate (9) from the first placement portion (5R) and the second placement portion (5L), and at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) approach each other while the first hand (31) is moving away from the first placement portion (5R) and the second hand (32) is moving away from the second placement portion (5L).

[0095] Even when the first hand (31) and the second hand (32) move away from the first placement unit (5R) and the second placement unit (5L), the movement trajectories (TR1, TR2) of the first hand (31) and the second hand (32) are optimized. The robot system (6) can shorten the transport time of the substrate (9) and improve the throughput of processing the substrate (9).

[0096] (Aspect 9) A robot system (6) comprising: a first placement section (5R) on which a substrate (9) is placed; a second placement section (5L) on which the substrate (9) is placed, the second placement section (5L) being located beside the first placement section (5R); and a horizontal articulated transport robot (2) that transports the substrate from the first placement section (5R) and the second placement section (5L), the transport robot (2) having a first hand (31) and a second hand (32) that hold the substrate (9), and in which at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) approach each other while the first hand (31) is retracting from the first placement section (5R) and the second hand (32) is retracting from the second placement section (5L).

[0097] (Aspect 10) The robot system (6) according to any one of Aspects 1 to 9, wherein the first hand (31) and the second hand (32) are edge grip hands that grip an edge of the substrate (9).

[0098] Because the edge grip hands are large in size, there is a risk of interference between the first hand (31) and the second hand (32) and the first mounting portion (5R) and the second mounting portion (5L), which is disadvantageous. The displacement of the first hand (31) and the second hand (32) in a direction away from each other while approaching the first mounting portion (5R) and the second mounting portion (5L) enables the first hand (31) and the second hand (32) to approach or recede from the first mounting portion (5R) and the second mounting portion (5L) while avoiding interference between the large-sized first hand (31) and the second hand (32) and the first mounting portion (5R) and the second mounting portion (5L).

[0099] (Aspect 11) A control method for a robot system (6), wherein a first hand (31) of a horizontally articulated transport robot (2) approaches a first placement section (5R) on which a substrate (9) is placed, and a second hand (32) of the transport robot (2) approaches a second placement section (5L), and while the first hand (31) is approaching the first placement section (5R) and the second hand (32) is approaching the second placement section (5L), at least one of the first hand (31) and the second hand (32) is displaced in a direction away from each other, and the first hand (31) reaches the first placement section (5R), and the second hand (32) reaches the second placement section (5L) located beside the first placement section (5R).

[0100] (Aspect 12) A method for controlling a robot system, wherein a first hand (31) of a horizontally articulated transport robot (2) moves away from a first placement section (5R) on which a substrate is placed, and a second hand (32) of the transport robot (2) moves away from a second placement section (5L) located beside the first placement section (5R), and while the first hand (31) is moving away from the first placement section (5R) and the second hand (32) is moving away from the second placement section (5L), at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) move closer to each other, and the first hand (31) and the second hand (32) overlap each other.

[0101] (Aspect 13) A transfer robot (2) having a first hand (31) and a second hand (32) transfers a first substrate (9) and a second substrate (9) to a first aligner (5R) and a second aligner (5L) and hands over the first substrate (9) and the second substrate (9) to the first aligner (5R) and the second aligner (5L), the first aligner (5R) and the second aligner (5L) align the first substrate (9) and the second substrate (9), and while the alignment of the first substrate (9) and the second substrate (9) is being performed, the transfer robot (2) transfers a third substrate (9) and a fourth substrate (9) to the first aligner (5R) and the second aligner (5L), the transfer robot (2) delivers the third substrate (9) and the fourth substrate (9) to the first aligner (5R) and the second aligner (5L), and receives the aligned first substrate (9) and the second substrate (9) from the first aligner (5R) and the second aligner (5L).

[0102] While the first aligner (5R) and the second aligner (5L) are aligning the substrate (9), the transfer robot (2) transfers the next substrate (9), thereby significantly improving the throughput of substrate (9) alignment.

[0103] (Aspect 14) The transfer robot (2) delivers the first substrate (9) to the support portion (52) of the first aligner (5R) and delivers the second substrate (9) to the support portion (52) of the second aligner (5L), and after the first aligner (5R) transfers the first substrate (9) from the support portion (52) to the spindle (51) and the second aligner (5L) transfers the second substrate (9) from the support portion (52) to the spindle (51), the first aligner (5R) and the second aligner (5L) align the first substrate (9) and the second substrate (9), Aspect 14. The method for aligning a substrate (9) according to aspect 13, wherein the transfer robot (2) receives the first substrate (9) after alignment from the spindle (51) of the first aligner (5R), and receives the second substrate (9) after alignment from the spindle (51) of the second aligner (5L).

[0104] The support parts (52) of the first aligner (5R) and the second aligner (5L) support the substrate (9), and the first aligner (5R) and the second aligner (5L) transfer the substrate (9) between the support parts (52) and the spindle (51), thereby realizing transportation of the substrate (9) during alignment.

[0105] 2 Robot (transport robot) 22 Arm 3 Hand 31 First hand 32 Second hand 5 Aligner 51 Spindle 52 Support section 5R First aligner (first placement section) 5L Second aligner (second placement section) 6 Robot system 9 Substrate CL Center line Z3 Third axis (rotation axis)

Claims

1. A robot system comprising: a first mounting section on which a substrate is placed; a second mounting section on which the substrate is placed, the second mounting section being located beside the first mounting section; and a horizontal articulated transport robot that transports the substrate to the first mounting section and the second mounting section, the transport robot having a first hand and a second hand that hold the substrate, and in which at least one of the first hand and the second hand is displaced in a direction away from each other while the first hand is approaching the first mounting section and the second hand is approaching the second mounting section.

2. A robot system according to claim 1, wherein the transport robot further has an arm that supports the first hand and the second hand so that they rotate about the same rotation axis, and at least one of the first hand and the second hand rotates about the rotation axis while approaching the first placement section and the second placement section by being driven by the arm.

3. A robot system as described in claim 2, wherein the first and second mounting sections are positioned symmetrically about a center line in a plan view, the arm brings the first and second hands closer to the first and second mounting sections so that the rotation axis moves on the center line, and the first and second hands rotate in opposite directions to each other about the rotation axis.

4. A robot system as described in claim 3, wherein when the first hand and the second hand are spaced a first distance or more from the first placement section and the second placement section, they approach each other to a position where at least a portion of the substrates overlap, and when the first hand and the second hand are closer to the first placement section and the second placement section than the first distance, they rotate in opposite directions as they approach the first placement section and the second placement section.

5. A robot system according to claim 4, wherein when the first hand delivers or receives the substrate to or from the first mounting part and when the second hand delivers or receives the substrate to or from the second mounting part, the first hand and the second hand move away from each other to a position where the substrates do not overlap.

6. A robot system according to any one of claims 1 to 5, wherein the first mounting part is a first aligner that aligns the substrate, the second mounting part is a second aligner that aligns the substrate, the first aligner and the second aligner each have a support part that supports the substrate before or after alignment and transfers the substrate between the spindle and the first aligner, and the transport robot hands over the substrate transported to the first aligner or the second aligner to the spindle or the support part, and receives the aligned substrate from the support part or the spindle.

7. A robot system according to claim 6, wherein the support section supports the substrate above the spindle and moves up and down to transfer the substrate to and from the spindle.

8. A robot system according to any one of claims 1 to 7, wherein the transport robot transports the substrate from the first mounting part and the second mounting part, and at least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand approach each other while the first hand is receding from the first mounting part and the second hand is receding from the second mounting part.

9. A robot system comprising: a first mounting section on which a substrate is placed; a second mounting section on which the substrate is placed, the second mounting section being located beside the first mounting section; and a horizontal articulated transport robot that transports the substrate from the first mounting section and the second mounting section, the transport robot having a first hand and a second hand that hold the substrate, and in which at least one of the first hand and the second hand is displaced in a direction that brings the first hand and the second hand closer to each other while the first hand is receding from the first mounting section and the second hand is receding from the second mounting section.

10. A robot system according to any one of claims 1 to 9, wherein the first hand and the second hand are edge grip hands that grip the edge of the substrate.

11. A method for controlling a robot system, in which a first hand of a horizontal articulated transport robot approaches a first placement section on which a substrate is placed, while a second hand of the transport robot approaches the second placement section, and while the first hand is approaching the first placement section and the second hand is approaching the second placement section, at least one of the first hand and the second hand is displaced in a direction away from each other, and the first hand reaches the first placement section, while the second hand reaches the second placement section located beside the first placement section.

12. A method for controlling a robot system, in which a first hand of a horizontally articulated transport robot moves away from a first mounting section on which a substrate is placed, and a second hand of the transport robot moves away from a second mounting section located beside the first mounting section, and while the first hand is moving away from the first mounting section and the second hand is moving away from the second mounting section, at least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand move closer to each other, and the first hand and the second hand overlap each other.

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