System for teaching substrate transfer robot and method for teaching substrate transfer robot

Abstract

This system for teaching a substrate transfer robot comprises: a substrate transfer robot (2) that has a hand (3) for holding a substrate (9) on one surface and an arm (22) for movably supporting the hand, said substrate transfer robot (2) conveying the substrate to a target position or from a target position; a camera 5 fixed to the hand, said camera 5 capturing a jig having a marker (72), and said jig (70) being disposed at the target position; and a teaching device (7) that teaches the substrate transfer robot a teaching position where the hand holds the substrate or releases the hold on the substrate on the basis of an image of the jig captured by the camera.

Description

Substrate transport robot teaching system and substrate transport robot teaching method

[0001] The technology disclosed herein relates to a teaching system for a substrate transport robot and a teaching method for a substrate transport robot.

[0002] Patent Document 1 describes a conventional automatic teaching system. The automatic teaching system teaches the position of a hand to a horizontal articulated robot that transports a substrate. In the conventional automatic teaching system, a target jig is placed at a target position of a substrate where the substrate is to be placed. The target jig is a flat plate having markings on the upper surface of the plate for teaching the hand position. The robot hand holds a position detection jig. The position detection jig has a shape that simulates the substrate and includes first and second reflecting mirrors. The conventional automatic teaching system uses a camera provided on the robot hand to capture images of the first and second reflecting mirrors of the position detection jig held by the hand, and adjusts the position of the hand so that the markings on the target jig are reflected on the first and second reflecting mirrors.

[0003] Patent Document 2 describes a conventional robot control device. The robot control device teaches the position of a hand to a horizontally articulated robot that transports substrates. The robot has a camera attached to its hand. A teaching substrate, which is the teaching target, is placed at a target position. The target position is a position where the robot can remove the substrate from a hoop or load the substrate into a hoop. The camera captures an image of a space including the robot's hand and the teaching substrate, and generates information about a virtual substrate held by the hand from the captured image data. The robot control device moves the robot's arm so that the virtual substrate overlaps the teaching substrate in the image data.

[0004] Patent No. 6111065 Patent No. 6741537

[0005] There is a demand for a teaching method for substrate transport robots that can further reduce the burden on operators.

[0006] The technology disclosed herein relates to a teaching system for a substrate transport robot. The teaching system includes a substrate transport robot having a hand that holds a substrate on one surface and an arm that movably supports the hand, and that transports the substrate to or from a target position, a camera that is fixed to the hand and that photographs a jig that has a marker and is placed at the target position, and a teaching device that, based on an image of the jig photographed by the camera, teaches the substrate transport robot a teaching position where the hand holds or releases the substrate.

[0007] The teaching system automatically teaches the substrate transport robot based on images captured by the camera, thereby reducing the burden on the operator.

[0008] FIG. 1 shows a substrate transport system. FIG. 2 is a block diagram of the transport system. FIG. 3 shows a horizontal articulated robot. FIG. 4 is an example of an image captured by a camera. The upper diagram in FIG. 5 is a plan view of the jig, and the lower diagram is a front view of the jig. FIG. 6 is a functional block diagram of a teaching device. FIG. 7 is a flowchart showing the procedure for automatic teaching. FIG. 8 is a diagram explaining the calculation of the distance between the jig and the hand. FIG. 9 shows how the hand approaches and moves away from the hoop. FIG. 10 is a modified hand. FIG. 11 is a modified hand. FIG. 12 shows a double-handed horizontal articulated robot. FIG. 13 is a modified jig. FIG. 14 shows a double-arm horizontal articulated robot.

[0009] Hereinafter, an embodiment of a teaching system for a substrate transport robot will be described with reference to the drawings. The teaching system described here is an example.

[0010] (Substrate Transfer System) FIG. 1 is a plan view of a substrate transfer system 1. FIG. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 includes a robot system 6. The substrate transfer system 1 transfers a substrate 9 using the robot system 6. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, an Equipment Front End Module (EFEM). The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, a stocker. A teaching system is included in the robot system 6. The substrate transfer system 1 is not an essential element of the teaching system. The teaching system disclosed herein is not limited to application to the substrate transfer system 1 shown in the figure.

[0011] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The first direction and the second direction are both horizontal directions, and the second direction is perpendicular to the first direction. Hereinafter, the first direction will be referred to as the X direction, and the second direction will be referred to as the Y direction. Furthermore, the vertical direction perpendicular to the X direction and the Y direction will be referred to as the Z direction.

[0012] The first wall 11 and the second wall 12 are connected to each other, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12 are connected to each other, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transport space 15.

[0013] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. An aligner 42 is located in the transfer space 15. The aligner 42 aligns the substrate 9. The aligner 42 is not an essential element of the teaching system.

[0014] The illustrated substrate transfer system 1 is incorporated into substrate processing equipment 4. Note that the substrate processing equipment 4 is not an essential element of the teaching system. The substrate processing equipment 4 performs, for example, heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment on the substrate 9. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the processing performed by the substrate processing equipment 4 may be temporary accommodation for the transfer of the substrate 9. In this case, accommodation of the substrate 9 by the substrate processing equipment 4 is also included in the processing of the substrate 9. The third wall 13 separates the transfer space 15 from the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 is openable and closable. When the opening 16 is open, the transfer space 15 and the substrate processing equipment 4 communicate with each other, and when the opening 16 is closed, communication between the transfer space 15 and the substrate processing equipment 4 is blocked.

[0015] The substrate transfer system 1 has a load port 19. Note that the load port 19 is not an essential element of the substrate transfer system 1. The substrate transfer system 1 has a plurality of load ports 19. The plurality of load ports 19 are lined up along the first wall 11.

[0016] A FOUP (Front Opening Unified Pod) 41 is attached to the load port 19. The FOUP 41 houses a substrate 9. The FOUP 41 can house multiple substrates 9 lined up in the Z direction. As shown in FIG. 4 or 5 , the substrates 9 rest on supports 412 that protrude from side walls 411 inside the FOUP 41. A FOUP opener on the load port 19 opens and closes the lid of the FOUP 41. When the FOUP opener opens the lid, the transfer space 15 and the FOUP 41 communicate with each other through the opening 17.

[0017] The substrate transfer system 1 includes a robot 2. The robot 2 is an example of a substrate transfer robot. The robot 2 transfers substrates 9 between a hoop 41, an aligner 42, and the substrate processing equipment 4 (see the solid lines and the two-dot chain lines in FIG. 1 ). The robot 2 is located in a transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0018] The substrate transfer system 1 includes a system controller 18. The system controller 18 is not an essential element of the teaching system. The system controller 18 performs overall control of the substrate transfer system 1.

[0019] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 and the robot 2 constitute a robot system 6. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a drive signal to the robot 2. The robot 2 receives the drive signal from the robot controller 20 and transports the substrate 9 in this case.

[0020] The robot controller 20 has a control unit 201 and a drive unit 202. The control unit 201 has a processor and a memory. The processor calculates an operation command for the robot 2 in accordance with teaching data stored in a storage 203. The control unit 201 outputs the operation command to the drive unit 202.

[0021] The drive unit 202 receives operation commands from the control unit 201 and drives the actuators of the robot 2. More specifically, the drive unit 202 has an inverter circuit. Multiple switching elements of the inverter circuit perform switching operations in accordance with the operation commands. Three-phase AC power is supplied to the actuators by the switching operations of the multiple switching elements. The actuators are driven by the power supply. The robot 2 moves when the actuators are driven.

[0022] The robot controller 20 includes a storage 203. The storage 203 stores a teaching position of the robot 2, which will be described later. Note that the robot controller 20 is not an essential element of the teaching system.

[0023] The aligner 42 is electrically connected to the robot controller 20. The electrical connection may be a wired or wireless connection. The aligner 42 is controlled by the robot controller 20.

[0024] The teaching device 7 is electrically connected to the robot controller 20. The teaching device 7 may be located remotely from the robot 2. The teaching device 7 is a computer including at least a processor, a memory, and an interface. The teaching device 7 sets a teaching position for the robot 2 and outputs the teaching position of the robot 2 to the robot controller 20. The robot controller 20 controls the robot 2 according to the teaching position. The robot 2 holds the substrate 9 at a first position, transports the substrate 9 to a second position, and then releases the substrate 9 at the second position. The teaching device 7 may be incorporated into the robot controller 20 or the system controller 18.

[0025] (Structure of Robot) As described above, the robot 2 is a horizontal articulated robot. FIG. 3 is a side view of the robot 2. As shown in FIG. 1 or 3, the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0026] The base 21 supports the arm 22. The arm 22 can be raised and lowered in the Z direction relative to the base 21. A first actuator 23 raises and lowers the arm 22. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, link 221 and link 222. Note that the number of links forming the arm 22 is not limited to two.

[0027] A first end of link 221 is supported by base 21. Link 221 is rotatable about a first axis Z1 extending in the Z direction relative to base 21. A second actuator 24 rotates link 221. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis Z2 extending in the Z direction relative to link 221. A third actuator 25 rotates link 222.

[0028] The hand 3 is connected to a second end of the link 222. The hand 3 is rotatable about a third axis Z3 extending in the Z direction relative to the link 222. A fourth actuator 26 rotates the hand 3.

[0029] The hand 3 is an end effector that holds the substrate 9. The hand 3 has a main body 31 and a holding portion 32. The main body 31 supports the holding portion 32. The main body 31 is rotatably connected to a second end of the link 222.

[0030] The holding portion 32 is substantially Y-shaped in plan view as shown in FIG. 1, and is thin and plate-like as shown in FIG.

[0031] The hand 3 generally holds the substrate 9 on one side by various methods such as gripping, suction, placing, or fitting, and releases the held substrate 9. The hand 3 shown in the figure is an edge grip hand. The hand 3 holds the substrate 9 by clamping the substrate 9 between multiple guides. The hand 3 releases its hold on the substrate 9 when the guides move away from the substrate 9.

[0032] (Camera) The robot system 6 includes a camera 5. The camera 5 is fixed to the hand 3 of the robot 2, as shown in FIG. 3. More specifically, the camera 5 is fixed to the upper surface of the main body 31 of the hand 3.

[0033] The camera 5 includes, for example, an image sensor and a lens. The lens focuses light onto the image sensor. The image sensor outputs a signal corresponding to the amount of light received. The image sensor is a charge coupled device (CCD) sensor or a complementary metal oxide semiconductor (CMOS) sensor.

[0034] FIG. 4 shows an example of an image 50 captured by the camera 5. The camera 5 captures images inside the transport space 15. The camera 5 can also capture images of the substrate 9 held by the hand 3. The camera 5 is fixed to the hand 3 so as to capture images in front of the hand 3. The optical axis of the camera 5 is horizontal as shown in FIG. 3. Note that the optical axis of the camera 5 may be tilted upward or downward relative to the horizontal direction. The lens has a predetermined angle of view. The angle of view of the lens may be relatively wide so that the camera 5 can capture a wide range. The image 50 captured by the camera 5 is a moving image or a still image. The image 50 may be a color image. Note that the image 50 may be a black and white image.

[0035] The robot controller 20 or the system controller 18 receives the image 50 captured by the camera 5. The robot controller 20 may receive the image 50, or the system controller 18 may receive the image 50. Both the robot controller 20 and the system controller 18 may receive the image 50.

[0036] The teaching device 7 receives the data of the image 50. The teaching device 7 uses the image 50 to automatically teach the robot 2. Note that the image 50 can also be used for purposes other than teaching.

[0037] (Teaching System) The teaching system includes the robot 2 and a teaching device 7. The teaching device 7 teaches the robot 2 teaching positions where the hand 3 of the robot 2 holds the substrate 9 or releases the hold of the substrate 9.

[0038] The teaching device 7 performs teaching using a jig 70. Fig. 5 shows the jig 70. The jig 70 has a main body 71 and a marker 72. The main body 71 has the same shape as the substrate 9. In other words, the main body 71 is a thin circular plate, and the diameter of the circular plate is the same as the diameter of the substrate 9. The hoop 41 can accommodate the jig 70, as shown in Fig. 4.

[0039] The markers 72 are located on the top surface of the main body 71. The jig 70 has three markers 72. Note that the jig 70 may have three or more markers 72. The three markers 72 have the same shape. The markers 72 are rectangular parallelepipeds that protrude upward from the top surface of the main body 71. The markers 72 may have various shapes. A mark is drawn on the front surface of the marker 72. The mark is used by the teaching device 7 to identify the marker 72 when the camera 5 photographs the jig 70. The pattern of the mark is arbitrary. Note that the front surface of the marker 72 is the surface that faces towards the robot 2. The camera 5 photographs the front surface of the marker 72.

[0040] The three markers 72 are located at the vertices of a triangle on the top surface of the main body 71. More precisely, the three markers 72 are located at the vertices of an isosceles triangle. The base of the isosceles triangle is located on the side closer to the robot 2, and the apex angle of the isosceles triangle is located on the side farther from the robot 2. One marker 72 is located on line L passing through the center of the main body 71 on the side farther from the robot 2, and two markers 72 are located on both sides of line L in the Y direction on the side closer to the robot 2, with a distance I from line L. As shown in the lower diagram of FIG. 5 , when the jig 70 is viewed along line L, the three markers 72 are aligned at equal intervals in the Y direction. The distance W1 between the two markers 72 forming the base is also located at a distance d from the center of the main body 71 in the X direction.

[0041] The jig 70 is placed at a target position on the substrate 9. The target position is the origin or destination of the substrate 9. For example, as shown in FIG. 4 or FIG. 5, the jig 70 is placed inside the hoop 41. Note that the target position where the jig 70 is placed is not limited to inside the hoop 41. The teaching device 7 teaches the robot 2 a teaching position based on an image of the jig 70. The teaching position is a position where the hand 3 of the robot 2 holds the substrate 9 or a position where the hand 3 releases the held substrate 9. More precisely, the teaching position is the center position of the substrate 9.

[0042] (Teaching Procedure) Next, a procedure for automatic teaching of the robot 2 using the jig 70, which is executed by the teaching device 7, will be described with reference to the block diagram of Fig. 6 and the flowchart of Fig. 7. Fig. 6 is a functional block diagram of the teaching device 7.

[0043] 7 starts when the operator places the jig 70 at any target position and instructs the teaching device 7 to execute automatic teaching. Here, when automatic teaching starts, the hand 3 of the robot 2 is positioned at an initial position where the camera 5 can capture an image of the marker 72 on the jig 70. When the hand 3 is in the initial position, for example, the arm 22 is bent and the hand 3 moves away from the jig 70 in the X direction. The initial position of the hand 3 can be any position.

[0044] After the start, in step S61, the camera 5 starts photographing the jig 70, and in step S62, the marker position recognition unit 701 of the teaching device 7 recognizes the position of the marker 72 in the image 50.

[0045] In the following step S63, the hand position adjustment unit 702 of the teaching device 7 adjusts the position of the hand 3 of the robot 2 in the Z direction via the robot controller 20 so that the three markers 72 are aligned horizontally in the image 50. The optical axis of the camera 5 and the markers 72 are positioned at the same position in the Z direction. Since the distance H (see FIG. 3) between the optical axis of the camera 5 and the holder 32 of the hand 3 is known, and the height h (see the lower diagram in FIG. 5) of the center position in front of the marker 72 is known, the teaching position in the Z direction is determined.

[0046] Next, in step S64, the hand position adjustment unit 702 of the teaching device 7 adjusts the position of the hand 3 of the robot 2 in the Y direction via the robot controller 20 so that the three markers 72 are equally spaced in the Y direction in the image 50. The optical axis of the camera 5 and the line L of the jig 70 coincide with each other. The teaching position in the Y direction is determined (see the lower diagram in FIG. 5 ).

[0047] In step S65, the teaching position setting unit 703 of the teaching device 7 calculates the distance in the X direction between the jig 70 and the hand 3 based on the distance between the two markers 72 in the image 50. For example, as shown in FIG. 7 , the actual distance W1 between the two markers 72 is known, and the focal length f of the camera 5 is also known, so the robot controller 20 can calculate the distance X1 in the X direction from the jig 70 to the camera 5 from the distance W2 between the two markers 72 in the image 50. Since the distance D (see FIG. 3 ) between the camera 5 and the center of the holder 32 in the hand 3 is known, and the distance d (see the upper diagram in FIG. 5 ) between the center of the jig 70 and the marker 72 is also known, the teaching position in the X direction is determined from the current position of the hand 3 and the calculated distance X1.

[0048] In step S66, the hand position adjustment unit 702 of the teaching device 7 moves the hand 3 to the teaching position set in steps S62, S63, and S65 via the robot controller 20. The Y-direction and Z-direction positioning of the hand 3 are completed in steps S62 and S63. The hand 3 reaches the teaching position by moving in the X-direction as the arm 22 extends.

[0049] In step S67 after the hand 3 has moved to the teaching position, the camera 5 photographs the jig 70. In step S68, the marker position recognition unit 701 of the teaching device 7 confirms the positional deviation between the jig 70 and the hand 3 based on the image acquired in step S67, and the teaching position setting unit 703 corrects the teaching position of the robot 2 so as to eliminate the positional deviation. After correcting the teaching position, the robot controller 20 stores the teaching data in the storage 203 in step S69.

[0050] The correction steps S66, S67, and S68 can be omitted.

[0051] As can be seen from FIG. 4 , the hand 3 is positioned directly opposite the opening 17 of the hoop 41 , and moves toward and away from the hoop 41 in the direction directly opposite the opening 17 .

[0052] In the substrate transfer system 1, the robot 2 is fixed in the transfer space 15. The base 21 of the robot 2 does not move. Due to the relative positional relationship between the robot 2 and the hoop 41, the hand 3 may move toward or away from the hoop 41 in a direction inclined relative to the direction directly facing the opening 17 of the hoop 41, as shown in Figure 9, for example (see the arrows in Figure 9).

[0053] The teaching device 7 may determine the teaching position based on an image of the jig 70 captured by the camera 5 when the hand 3 is in an inclined position, for example, as shown by the solid line in Fig. 9. The teaching device 7 may convert the image captured by the camera 5 based on, for example, the inclination θ of the hand 3, and determine the teaching position based on the position of the marker 72 in the converted image.

[0054] (Effects) Using the camera 5 fixed to the hand 3 and the jig 70 placed at a target position, the teaching device 7 can automatically teach the robot 2 the teaching positions where the hand 3 holds the substrate 9 or releases the hold of the substrate 9. This reduces the burden on the operator involved in teaching the substrate transport robot 2.

[0055] The teaching device 7 sets the teaching position based on the relative positions of the plurality of markers 72 in the image 50 captured by the camera 5. The teaching device 7 can quickly set the teaching position, thereby reducing the time required to teach the robot 2.

[0056] On the upper surface of the jig 70, the three markers 72 form an isosceles triangle, so the teaching device 7 can accurately set teaching positions in each of the X, Y, and Z directions.

[0057] Furthermore, after moving the hand 3 to the teaching position set based on the image 50, the teaching device 7 can accurately teach the robot 2 by correcting the teaching position based on the image 50 captured by the camera 5.

[0058] Furthermore, the jig 70 has a main body 71 that has the same shape as the substrate 9. The jig 70 can be placed at all locations where the substrate 9 is placed in the substrate transfer system 1. The operator can smoothly proceed with the teaching work for the robot 2 by sequentially placing the jig 70 at multiple target positions in the substrate transfer system 1.

[0059] (Variation 1) Fig. 10 shows a variation of the hand 3. In addition to the camera 5, a light source 51 for image capture may be attached to the hand 3. The light source 51 may be, for example, an LED (Light Emitting Diode). The light sources 51 are located on both sides of the camera 5, sandwiching the camera 5 therebetween, and project light in the image capture direction of the camera 5. The camera 5 can capture a clear image including the marker 72. This improves the accuracy of teaching the robot 2 by the teaching device 7.

[0060] 11 shows a modification of the hand 3. The camera 5 may be fixed to the lower surface of the main body 31 of the hand 3.

[0061] (Variation 3) The robot 2 may have two hands. FIG. 12 shows a robot 2 having two hands 301, 302. The upper view in FIG. 12 is a side view of the robot 2, and the lower view is a plan view of the first hand 301 and the second hand 302, which are the hands 3. The first hand 301 and the second hand 302 are both connected to the second end of the link 222 and are rotatable around the third axis Z3. The first hand 301 and the second hand 302 overlap in the vertical direction, i.e., the Z direction. The first hand 301 and the second hand 302 may overlap in the vertical direction during transport of the substrates 9. The first hand 301 and the second hand 302 overlapping in the vertical direction hold or release the two substrates 9 in the hoop 41.

[0062] The first hand 301 is positioned above the second hand 302. The camera 5 is fixed to the upper surface of the first hand 301. The distance H1 between the optical axis of the camera 5 and the holder 32 of the first hand 301 is known, and the distance (H1 + H2) between the optical axis of the camera 5 and the holder 32 of the second hand 302 is also known. Teaching for the first hand 301 can be executed according to the procedure for the robot 2 shown in FIG. 3 . Teaching for the second hand 302 can reuse the teaching content for the first hand 301 by utilizing the fact that the vertical distance between the first hand 301 and the second hand 302 is shifted by H2.

[0063] The camera 5 may be fixed to the second hand 302. The camera 5 may be fixed to each of the first hand 301 and the second hand 302.

[0064] Furthermore, the number of hands possessed by the robot 2 is not limited to two. The robot 2 may have five hands stacked vertically. The robot 2 can hold 1+4 substrates 9 simultaneously. The robot 2 may also have 25 hands stacked vertically. The robot 2 can hold 1+24 substrates 9 simultaneously.

[0065] (Variation 4) The robot 2 may also have a tilt mechanism that can change the tilt of the hand 3 in the Z direction. For a robot 2 that has a tilt mechanism, the teaching device 7 may adjust the tilt of the hand 3 based on the image 50 that includes the markers 72.

[0066] 13 shows a modified example of the jig. The body 73 of the jig 70 does not have the same disk shape as the substrate 9, but has edge portions 74. The edge portions 74 are located on both sides of the disk in the Y direction, which has the same shape as the substrate 9, and extend in the X direction. Because the edge portions 74 are restricted by the side walls 411 of the hoop 41, when the jig 70 is placed at the target position, the orientation of the jig 70 is forced to a predetermined orientation. The marker 72 is positioned and oriented appropriately for teaching.

[0067] The teaching method using the positions of the three markers 72 in the image 50 shown in the flow chart of Fig. 7 is an example. Various techniques can be adopted as the teaching method using the jig 70. For example, the teaching device 7 can set the teaching position based on the relative positions of the three markers 72 in the image 50 as shown in Fig. 4.

[0068] (Variation 6) The robot 2 may have two arms. Fig. 14 shows a robot 2 having two arms 2201 and 2202. The upper diagram in Fig. 14 is a plan view of the robot 2, and the lower diagram is a front view of the robot 2.

[0069] The base 21 supports a first arm 2201 and a second arm 2202. The base 21 is movable up and down in the Z direction. When the base 21 moves up and down in the Z direction, the first arm 2201 and the second arm 2202 move up and down in the Z direction. The distance in the Z direction between a first hand 303 and a second hand 304, which will be described later, is constant and does not change.

[0070] The first arm 2201 is rotatable about a fourth axis Z4 relative to the base 21. The second arm 2202 is rotatable about a fifth axis Z5 relative to the base 21. The fourth axis Z4 and the fifth axis Z5 are parallel to each other.

[0071] The first arm 2201 and the second arm 2202 have the same structure as each other, except that they are symmetrical with respect to the XZ plane with respect to the base 21 .

[0072] Specifically, each of the first arm 2201 and the second arm 2202 has two links, similar to the above-described arm 22. The number of links forming the first arm 2201 and the second arm 2202 is not limited to two.

[0073] The first hand 303 is supported by a first arm 2201, and the second hand 304 is supported by a second arm 2202. The first hand 303 is positioned higher than the second hand 304 in the Z direction.

[0074] The first hand 303 has a main body 3031 and a holding portion 3032. The second hand 304 has a main body 3041 and a holding portion 3042. In the example of Fig. 14, the holding portion 3032 of the first hand 303 and the holding portion 3042 of the second hand 304 support the substrate 9 by suction. The manner in which the first hand 303 and the second hand 304 support the substrate 9 is not limited to suction, but may also be gripping, placing, or fitting.

[0075] The robot 2 having two arms 2201 and 2202 has two cameras 501 and 502. The camera 501 is an upper camera 501 attached to the first hand 303, and the camera 502 is a lower camera 502 attached to the second hand 304.

[0076] The upper camera 501 is embedded in the main body 3031 of the first hand 303. The upper camera 501 photographs the interior of the transfer space 15. The upper camera 501 can photograph the substrate 9 held by the first hand 303. The optical axis of the upper camera 501 may be horizontal or may be tilted up or down relative to the horizontal.

[0077] The lower camera 502 is embedded in the main body 3041 of the second hand 304. The lower camera 502 also photographs the interior of the transfer space 15. The lower camera 502 can photograph the substrate 9 held by the second hand 304. The optical axis of the lower camera 502 may be horizontal or may be tilted up or down relative to the horizontal.

[0078] Teaching for the first hand 303 can be performed based on the image captured by the upper camera 501. Teaching for the second hand 304 can be performed based on the image captured by the lower camera 502.

[0079] The upper camera 501 and the lower camera 502 may be fixed to the upper surfaces of the main bodies 3031 and 3041 of the hands 303 and 304, respectively, rather than being embedded in the main bodies 3031 and 3041.

[0080] In the robot 2, the upper camera 501 may be omitted, and the lower camera 502 may be omitted.

[0081] If the upper camera 501 or the lower camera 502 is omitted, teaching the hand with the camera can be performed according to the procedure described above.

[0082] When teaching a hand without a camera, the teaching content performed on a hand with a camera can be reused by using the fact that the distance in the Z direction between the first hand 303 and the second hand 304 is shifted by a specific distance.

[0083] The axis Z4 of the first arm 2201 and the axis Z5 of the second arm 2202 do not necessarily have to be different axes, and the first arm 2201 and the second arm 2202 may be rotatable around a common axis.

[0084] The various aspects described above can be combined with each other to the extent possible.

[0085] The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), FPGAs (Field Programmable Gate Arrays), and / or conventional circuitry. The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including combinations of general-purpose processors, special-purpose processors, integrated circuits, ASICs, FPGAs, and conventional circuitry. The one or more circuits or processing circuits may be programmed using one or more programs stored together or separately in one or more memories or otherwise configured to perform the disclosed functions. A processor is considered a processing circuit or circuitry because it includes transistors and other circuitry. A processor may also be a programmed processor that executes a program stored in a memory. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions alone or in combination with each other, or hardware that is programmed to perform the recited functions alone or in combination with each other. The hardware may be any hardware disclosed herein that is programmed or configured to perform the recited functions.

[0086] A computer program containing computer instructions is stored in memory. The computer instructions provide logic and routines that enable hardware to perform the methods disclosed herein. The hardware includes, for example, processing circuits or circuits. The computer program may be implemented in a computer-readable storage medium, a computer program product, a memory device, a recording medium such as a CD-ROM or DVD, and / or FPGAs or hardware memory in a known format.

[0087] (Aspects) The above-described embodiments are specific examples of the following aspects.

[0088] (Aspect 1) A teaching system for a substrate transport robot, comprising: a substrate transport robot (2) having a hand (3) that holds a substrate (9) on one side and an arm (22) that movably supports the hand (3), and that transports the substrate (9) to or from a target position; a jig (70) that is fixed to the hand (3) and placed at the target position, a camera (5) that photographs the jig (70) that has a marker (72); and a teaching device (7) that teaches the substrate transport robot (2) a teaching position where the hand (3) holds or releases the substrate (9) based on an image (50) of the jig (70) photographed by the camera (5).

[0089] The teaching system can automatically teach the substrate transport robot (2) using a camera (5) fixed to the hand (3) and a jig (70) placed at a target position, thereby reducing the burden on the operator involved in teaching the substrate transport robot (2).

[0090] (Aspect 2) The teaching system for a substrate transport robot according to Aspect 1, wherein the jig (70) has a plurality of markers (72), and the teaching device (7) calculates a relative position between the hand (3) and the jig (70) based on positions of the plurality of markers (72) in the image (50), and sets the teaching position based on the calculated relative position.

[0091] By using the positions of the markers (72) in the image (50), the teaching system can quickly set the teaching position, thereby reducing the time required to teach the substrate transport robot (2).

[0092] (Aspect 3) The teaching device (7) adjusts the relative position of the hand (3) with respect to the jig (70) in the vertical direction and a horizontal first direction based on the positions of the plurality of markers (72) in the image (50), and calculates the distance between the hand (3) and the substrate (9) in the vertical direction and a second direction perpendicular to the first direction based on an image (50) of the jig (70) taken by the camera (5) after the adjustment. This is a teaching system for a substrate transport robot described in Aspect 2.

[0093] The teaching system can accurately teach the substrate transport robot (2) based on the positions of the plurality of markers (72) in the image (50).

[0094] (Aspect 4) The teaching system for a substrate transport robot according to Aspect 2 or 3, wherein the teaching device (7) corrects the teaching position based on an image of the jig (70) captured by the camera (5) after the arm (22) moves the hand (3) to the teaching position.

[0095] The teaching device (7) corrects the teaching position after moving the hand (3) to the teaching position, thereby improving the accuracy of teaching the substrate transport robot (2).

[0096] (Aspect 5) A teaching system for a substrate transport robot according to any one of Aspects 1 to 4, wherein the substrate transport robot (2) has a first hand (301) and a second hand (302) supported by the arm (22) so as to be stacked vertically and rotate around the same rotation axis.

[0097] The substrate transport robot (2) may be a so-called double-handed substrate transport robot (2).

[0098] (Aspect 6) A teaching system for a substrate transport robot according to any one of Aspects 1 to 4, wherein the substrate transport robot (2) has a first arm (2201) that supports a first hand (303) and a second arm (2202) that supports a second hand (304).

[0099] The substrate transport robot (2) may be a so-called double-arm substrate transport robot (2).

[0100] (Aspect 7) A teaching system for a substrate transport robot according to Aspect 5 or 6, wherein the camera (5) is fixed to the first hand (301), and the teaching device (7) sets the teaching position for the first hand (301, 303) based on the image (50), and uses the vertical distance between the first hand (301, 303) and the second hand (302, 304) to reuse the teaching position set for the first hand (301, 303) as the teaching position for the second hand (302, 304).

[0101] For a so-called double-hand or double-arm substrate transport robot (2), the teaching device (7) does not need to teach each of the two hands (301, 302, 303, 304) individually; once teaching one hand (301, 303), the taught position can be reused for the other hand (302, 304).

[0102] (Aspect 8) The teaching system for a substrate transport robot according to Aspect 7, wherein the first hand (301) is positioned above the second hand (302), and the camera (5) is fixed to an upper surface of the first hand (301).

[0103] (Aspect 9) The teaching system for a substrate transport robot according to any one of Aspects 1 to 8, wherein the jig (70) further has a main body (71) having the same shape as the substrate (9), and the marker (72) is located on the surface of the main body (71).

[0104] Since the shape of the body (71) of the jig (70) is the same as that of the substrate (9), the jig (70) can be placed at the target position of the substrate (9), and the teaching work of the substrate transport robot (2) can proceed smoothly.

[0105] (Aspect 10) The teaching system for a substrate transport robot according to Aspect 9, wherein the jig (70) has at least three of the markers (72), and the three markers (72) are located at vertices of a triangle on the surface of the main body (71).

[0106] By providing the jig (70) with at least three markers (72), teaching of the substrate transport robot (2) can be performed quickly and accurately.

[0107] (Aspect 11) The teaching system for a substrate transport robot according to Aspect 10, wherein the triangle is an isosceles triangle with a base located closer to the camera (5) and an apex angle located farther from the camera (5).

[0108] The three markers (72) form an isosceles triangle, so that teaching of the substrate transport robot (2) can be carried out quickly and accurately.

[0109] (Aspect 12) A teaching system for a substrate transport robot according to any one of Aspects 1 to 11, wherein the substrate transport robot (2) transports the substrate (9) to or from the target position by displacing the hand (3) in a direction tilted relative to a direction facing the target position, and the teaching device (7) teaches the substrate transport robot (2) the teaching position based on an image of the jig (70) captured by the camera (5) when the hand (3) is in an attitude tilted relative to the target position.

[0110] When the hand (3) is displaced in a direction inclined relative to the direction facing the target position, the teaching device (7) can automatically teach the substrate transport robot (2) based on the image.

[0111] (Aspect 13) A teaching system for a substrate transport robot, comprising: a substrate transport robot (2) having a hand (3) that holds a substrate (9) and an arm (22) that movably supports the hand (3), and that transports the substrate (9) to or from a target position; a jig (70) having a main body (71) that has the same shape as the substrate (9) and a marker (72) located on the surface of the main body (71); a camera (5) fixed to the hand (3) that photographs the jig (70) placed at the target position; and a teaching device (7) that teaches the substrate transport robot (2) a teaching position where the hand (3) holds or releases the substrate (9) based on an image (50) of the jig (70) photographed by the camera (5).

[0112] (Aspect 14) A substrate transport robot (2) having a hand (3) that holds a substrate (9) and an arm (22) that movably supports the hand (3), and that transports the substrate (9) to or from a target position; a jig (70) that is fixed to the hand (3) and placed at the target position, a camera (5) that photographs the jig (70) that has a marker (72); and a teaching device (7) that teaches the substrate transport robot (2) a teaching position where the hand (3) holds or releases the substrate (9) based on an image of the jig (70) photographed by the camera (5), wherein the substrate transport robot (2) transports the substrate (9) to or from the target position by displacing the hand (3) in a direction inclined with respect to a direction directly facing the target position, The teaching device (7) teaches the teaching position to the substrate transport robot (2) based on an image of the jig (70) captured by the camera (5) when the hand (3) is in an inclined position with respect to the target position.

[0113] (Aspect 15) A method of teaching a substrate transport robot, comprising: a camera (5) fixed to a hand (3) of a substrate transport robot (2) having a hand (3) that holds a substrate (9) on one surface, photographing a jig (70) that is placed at a target position and has a marker (72); and a teaching device (7) teaching the substrate transport robot (2) a teaching position that corresponds to the target position and where the hand (3) holds or releases the substrate (9) based on an image of the jig (70) photographed by the camera (5).

[0114] 2 Robot (substrate transport robot) 22 Arm 2201 First arm 2202 Second arm 3 Hand 301 First hand 302 Second hand 303 First hand 304 Second hand 5 Camera 50 Image 7 Teaching device 70 Jig 71 Main body 72 Marker 73 Main body 9 Substrate

Claims

1. A teaching system for a substrate transport robot comprising: a substrate transport robot having a hand that holds a substrate on one side and an arm that movably supports the hand, and that transports the substrate to or from a target position; a camera that photographs a jig that is fixed to the hand and placed at the target position and has a marker; and a teaching device that teaches the substrate transport robot a teaching position where the hand holds or releases the substrate based on an image of the jig photographed by the camera.

2. A teaching system for a substrate transport robot as described in claim 1, wherein the jig has a plurality of markers, and the teaching device calculates the relative position between the hand and the jig based on the positions of the plurality of markers in the image, and sets the teaching position based on the calculated relative position.

3. A teaching system for a substrate transport robot as described in claim 2, wherein the teaching device adjusts the relative position of the hand to the jig in a vertical direction and a horizontal first direction based on the positions of the multiple markers in the image, and calculates the distance between the hand and the substrate in a second direction perpendicular to the vertical direction and the first direction based on an image of the jig taken by the camera after alignment.

4. A teaching system for a substrate transport robot according to claim 2 or 3, wherein the teaching device corrects the teaching position based on an image of the jig taken by the camera after the arm has moved the hand to the teaching position.

5. A teaching system for a substrate transport robot according to any one of claims 1 to 4, wherein the substrate transport robot has a first hand and a second hand supported by the arm so as to overlap in the vertical direction and rotate around the same rotation axis.

6. A teaching system for a substrate transport robot according to any one of claims 1 to 4, wherein the substrate transport robot has a first arm that supports a first hand and a second arm that supports a second hand.

7. A teaching system for a substrate transport robot according to claim 5 or 6, wherein the camera is fixed to the first hand, and the teaching device sets the teaching position for the first hand based on the image, and reuses the teaching position set for the first hand as the teaching position for the second hand using the vertical distance between the first hand and the second hand.

8. A teaching system for a substrate transport robot according to claim 7, wherein the first hand is positioned above the second hand, and the camera is fixed to the upper surface of the first hand.

9. A teaching system for a substrate transport robot according to any one of claims 1 to 8, wherein the jig further has a main body having the same shape as the substrate, and the marker is located on the surface of the main body.

10. A teaching system for a substrate transport robot according to claim 9, wherein the jig has at least three of the markers, and the three markers are located at the vertices of a triangle on the surface of the main body.

11. A teaching system for a substrate transport robot according to claim 10, wherein the triangle is an isosceles triangle with its base located closer to the camera and its apex located farther from the camera.

12. A teaching system for a substrate transport robot according to any one of claims 1 to 11, wherein the substrate transport robot transports the substrate to or from the target position by displacing the hand in a direction tilted relative to a direction facing the target position, and the teaching device teaches the teaching position to the substrate transport robot based on an image of the jig captured by the camera when the hand is in an attitude tilted relative to the target position.

13. A method for teaching a substrate transport robot, the method comprising: a camera fixed to a hand of a substrate transport robot having a hand that holds a substrate on one surface, photographing a jig that is placed at a target position and has a marker; and a teaching device, based on an image of the jig photographed by the camera, teaching the substrate transport robot a teaching position that corresponds to the target position and where the hand holds or releases the substrate.

Images