Differential capacitance diaphragm vacuum gauge and production device therefor

Abstract

Provided in the present invention are a differential capacitance diaphragm vacuum gauge and a production device therefor. The vacuum gauge comprises a housing, a fixed electrode plate and a diaphragm, wherein the housing is provided with a gas intake pipe and a gas filling pipe; the fixed electrode plate is arranged inside the housing; the diaphragm is arranged inside the housing, and divides the interior of the housing into an upper chamber and a lower chamber; the fixed electrode plate is located in the upper chamber, and a preset distance is provided between the fixed electrode plate and the diaphragm; the lower chamber is in communication with the gas intake pipe and forms an open measurement chamber; the gas filling pipe is in communication with the upper chamber and forms a closed reference chamber; and a preset volume of gas filled by means of the gas filling pipe is provided in the closed reference chamber, so that the closed reference chamber is in a preset positive high-pressure state. The closed reference chamber is filled with gas to a certain pressure by means of the gas filling pipe, so that the reference chamber is in a constant high-pressure state, thereby achieving a simple structure and the effect of easy manufacturing.

Description

Differential pressure type capacitive diaphragm vacuum gauge and production device thereof TECHNICAL FIELD

[0001] The present application belongs to the technical field of measuring instruments, and particularly relates to a differential pressure type capacitive diaphragm vacuum gauge and a production device thereof. BACKGROUND

[0002] The capacitive diaphragm vacuum gauge mainly comprises a structure part and a circuit part. The structure part is composed of a gas inlet pipe, a lower chamber, a diaphragm, an upper chamber, a fixed electrode plate, an upper shell, an extraction electrode and an air pipe. The circuit part is electrically connected with the extraction electrode of the structure part. An open measuring chamber is formed between the gas inlet pipe, the lower chamber and the diaphragm. A closed reference chamber is formed between the diaphragm, the upper chamber, the upper shell, the extraction electrode and the air pipe. Gas is introduced into the measuring chamber through the gas inlet pipe. The diaphragm is deformed due to the pressure of the gas, the distance between the diaphragm and the fixed electrode plate is changed, and the capacitance between the diaphragm and the fixed electrode plate is changed. The capacitance is measured by an electrical method. The relationship between the capacitance and the gas pressure is obtained by calibration, and the gas pressure is obtained.

[0003] At present, the capacitive diaphragm vacuum gauge is usually absolute pressure type. The reference chamber of the capacitive diaphragm vacuum gauge is a high vacuum negative pressure chamber. The vacuum pressure value is much smaller than the pressure value of the reference chamber. The requirements for the vacuum pump and the sealed instrument are high, such as the thickness, flatness and welding requirements of the diaphragm. Otherwise, it is not easy to ensure the flatness of the diaphragm, which affects the measurement accuracy, so that the existing absolute pressure type capacitive diaphragm vacuum gauge has complex structure and is difficult to prepare. SUMMARY

[0004] In order to overcome the defects of the prior art, the present application provides a differential pressure type capacitive diaphragm vacuum gauge and a production device thereof, so as to solve the problems of complex structure and difficult preparation in the prior art.

[0005] One embodiment of the present application provides a differential pressure type capacitive diaphragm vacuum gauge comprising a shell, a fixed electrode plate and a diaphragm. The shell is provided with a gas inlet pipe and a gas charging pipe. The fixed electrode plate is arranged in the interior of the shell and is provided with an extraction electrode for electrical connection with a detection circuit. The diaphragm is arranged in the interior of the shell and divides the interior of the shell into an upper chamber and a lower chamber. The fixed electrode plate is located in the upper chamber, and a preset distance is arranged between the fixed electrode plate and the diaphragm. The lower chamber is communicated with the gas inlet pipe, and the lower chamber and the gas inlet pipe jointly form an open measuring chamber. The gas charging pipe is communicated with the upper chamber, and the gas charging pipe and the upper chamber jointly form a closed reference chamber. A preset volume of gas is filled into the closed reference chamber through the gas charging pipe, so that the closed reference chamber is in a preset positive pressure high pressure state.

[0006] The differential pressure type capacitive diaphragm vacuum gauge has the following technical effects: the diaphragm is arranged in the shell, the shell is divided into an upper chamber and a lower chamber, a fixed plate is arranged in the upper chamber, a preset distance is arranged between the fixed plate and the diaphragm, the upper chamber is communicated with the shell through the inflation pipe to form a closed reference chamber, and the lower chamber is communicated with the shell through the air inlet pipe to form an open measuring chamber; and the closed reference chamber is filled with a preset volume of gas through the inflation pipe, so that the closed reference chamber is in a preset positive pressure high pressure state, thereby achieving the effects of simple structure and easy manufacturing.

[0007] During work, when gas is introduced into the open measuring chamber through the air inlet pipe, the diaphragm is deformed due to the action of the gas pressure, thereby changing the distance between the diaphragm and the fixed plate and causing the change of the capacitance therebetween; the capacitance is measured by using an electrical method, the relationship between the capacitance and the gas pressure is obtained through calibration, and the gas pressure is obtained, thereby achieving the effect of precise measurement of the gas pressure.

[0008] Meanwhile, the closed reference chamber is inflated to a certain pressure through the inflation pipe, so that the reference chamber is in a constant high pressure state; compared with the high vacuum extraction process, the inflation process is relatively simple; in addition, for a low-range capacitive diaphragm vacuum gauge, the diaphragm does not need to be too thin, thereby reducing the processing difficulty of the diaphragm material and being beneficial to the welding of the diaphragm and the shell (the lower chamber and the upper chamber), thereby solving the problem of difficult product preparation.

[0009] Optionally, when the inflation port of the inflation pipe is in a sealed state, the closed reference chamber is in a preset positive pressure high pressure state.

[0010] When the inflation port of the inflation pipe is in a sealed state, the closed reference chamber is in a preset positive pressure high pressure state, thereby ensuring the stability of the pressure in the closed reference chamber during work and improving the measurement accuracy and stability.

[0011] Optionally, the shell comprises an upper shell and a lower shell, the upper shell has a first groove, the lower shell has a second groove, the first groove and the second groove are arranged opposite to each other, the inflation pipe is arranged in the upper shell, the air inlet pipe is arranged in the lower shell, the diaphragm is arranged between the first groove and the second groove, two opposite surfaces of the diaphragm are respectively sealedly connected with the upper shell and the lower shell, the upper chamber and the lower chamber are respectively formed in the upper shell and the lower shell one by one, and the upper chamber and the lower chamber are respectively formed on two sides of the diaphragm one by one.

[0012] The diaphragm is arranged between the first groove and the second groove, and two opposite surfaces of the diaphragm are respectively sealedly connected with the upper shell and the lower shell, the diaphragm and the upper shell jointly form the upper chamber to accommodate the gas filled by the inflation tube, and the diaphragm and the lower shell jointly form the lower chamber to ensure that the gas to be measured can be introduced into the lower chamber through the gas inlet tube, the diaphragm is acted on, and thus the pressure data of the diaphragm can be accurately measured, and meanwhile, the sealing arrangement is adopted to avoid the gas leakage phenomenon, so as to affect the measurement accuracy.

[0013] Optionally, the upper shell comprises an upper base plate and a first side wall arranged outside the upper base plate, the first side wall and the upper base plate jointly form the first groove, the first side wall is sealedly connected with the diaphragm through a sealing material, a step is formed on the top surface of the sealing material and the first side wall on the two sides of the first groove, the two ends of the fixed electrode plate are arranged on the step, and the two side surfaces of the fixed electrode plate have gaps between the adjacent first side walls and the adjacent sealing material; the lower shell comprises a lower base plate and a second side wall arranged outside the lower base plate, the diaphragm is sealedly arranged on the second side wall, the second side wall and the lower base plate jointly form the second groove, and the diaphragm is sealedly arranged on the second side wall.

[0014] The step is formed on the top surface of the sealing material and the first side wall on the two sides of the upper shell, and the two ends of the fixed electrode plate are arranged on the step, so that the fixed electrode plate is stably arranged, and the two side surfaces of the fixed electrode plate have gaps between the adjacent first side walls and the adjacent sealing material, so that the gas filled by the inflation tube can be filled in the closed reference chamber, and the work is stably performed.

[0015] Optionally, P-P r =-KU, wherein P is the pressure to be measured, P r is the pressure of the closed reference chamber, K is a constant, K=Co / do, Co and do are respectively the static capacitance and the distance of the fixed electrode plate and the diaphragm in the equilibrium state, and U is the output voltage of the detection circuit.

[0016] Through the pressure measurement principle: P-P r =-KU, the gas can be accurately measured.

[0017] Optionally, a sealing cover is detachably connected to the end of the inflation tube away from the upper chamber; wherein the sealing cover can be close to or away from the upper chamber along the length direction of the inflation tube.

[0018] Since the sealing cover can move towards or away from the upper chamber along the length direction of the inflation pipe, when the sealing cover moves towards the upper chamber along the length direction of the inflation pipe, the sealing cover gradually approaches the upper shell, the volume of the closed reference chamber is reduced, the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0019] Optionally, the cross section of the sealing cover is in a shape of a Chinese character 'fang', an inner ring of the sealing cover forms a third groove, an inner wall of the third groove is provided with internal threads, an outer wall of the inflation pipe is provided with external threads, the sealing cover is threadedly connected with the inflation pipe, the third groove is communicated with the upper chamber, and the volume of the third groove is gradually reduced during movement of the sealing cover along the inflation pipe.

[0020] Since the sealing cover has the third groove, the internal threads on the inner wall of the third groove are engaged with the external threads of the inflation pipe, so that the sealing cover is threadedly connected with the inflation pipe, and the third groove is communicated with the upper chamber, so that the sealing cover can move towards or away from the upper chamber along the length direction of the inflation pipe, when the sealing cover moves towards the upper chamber along the length direction of the inflation pipe, the sealing cover gradually approaches the upper shell, the volume of the third groove is gradually reduced, the volume of the closed reference chamber is reduced, the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0021] The application further provides a differential pressure type capacitive thin film vacuum gauge production device, comprising a pressure generator, the pressure generator is used for filling a preset volume of gas into a closed reference chamber in the differential pressure type capacitive thin film vacuum gauge to be filled with gas, so as to form the differential pressure type capacitive thin film vacuum gauge as any one of the above.

[0022] When the gas is filled into the closed reference chamber in the differential pressure type capacitive thin film vacuum gauge to be filled with gas, the pressure generator is communicated with the closed reference chamber in the differential pressure type capacitive thin film vacuum gauge to be filled with gas through the inflation pipe of the differential pressure type capacitive thin film vacuum gauge.

[0023] In the embodiment, the pressure generator is connected with the inflation pipe of the differential pressure type capacitive thin film vacuum gauge, so that the closed reference chamber in the differential pressure type capacitive thin film vacuum gauge is filled with a preset volume of gas, so that the closed reference chamber is in a high pressure state of a preset positive pressure, and accurate measurement of the gas can be ensured.

[0024] Optionally, the inflation end of the pressure generator is connected with a delivery pipeline, the delivery pipeline is provided with a pressure controller, and the pressure controller is electrically connected with the pressure generator.

[0025] When the gas is filled into the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge, the pressure generator is communicated with the gas filling pipe through the delivery pipe, the pressure controller is used for detecting the pressure in the sealed reference chamber and controlling the pressure generator to fill the preset volume of gas into the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge, so that the sealed reference chamber is in a high pressure state of a preset positive pressure.

[0026] When the gas is filled, the pressure generator is communicated with the gas filling pipe through the delivery pipe, so that the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge is filled by the direct filling mode through the pipe, and the pressure controller for detecting and controlling the pressure in the sealed reference chamber is arranged in the delivery pipe, so as to accurately control the pressure in the sealed reference chamber and improve the measurement accuracy and flexibility of the measurement work.

[0027] Optionally, the gas filling end of the pressure generator is connected with the delivery pipe, and the pressure generator is communicated with at least one sealed chamber through the delivery pipe, and the sealed chamber is provided with a pressure controller, and the pressure controller is electrically connected with the pressure generator.

[0028] When the gas is filled into the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge, the differential pressure type capacitive diaphragm vacuum gauge is arranged in the sealed chamber, and the sealed chamber is communicated with the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge through the gas filling pipe of the differential pressure type capacitive diaphragm vacuum gauge, and the pressure controller is used for detecting the pressure in the sealed reference chamber and controlling the pressure generator to fill the preset volume of gas into the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge, so that the sealed reference chamber is in a high pressure state of a preset positive pressure.

[0029] By communicating the pressure generator with the sealed chamber and filling the gas, the differential pressure type capacitive diaphragm vacuum gauge is arranged in the sealed chamber, so that the sealed reference chamber of the differential pressure type capacitive diaphragm vacuum gauge is filled by the type cavity filling mode, and the pressure controller for detecting and controlling the pressure in the sealed reference chamber is arranged in the sealed chamber, so as to accurately control the pressure in the sealed reference chamber and improve the measurement accuracy and flexibility of the measurement work. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings described below only illustrate some of the embodiments of the present application, and all other embodiments obtained by those of ordinary skill in the art without creative effort based on these drawings also belong to the scope of protection of the present application.

[0031] Fig. 1 is a structural schematic diagram of a differential pressure type capacitive diaphragm vacuum gauge provided by an embodiment of the present application;

[0032] Fig. 2 is another structural schematic diagram of a differential pressure type capacitive diaphragm vacuum gauge provided by an embodiment of the present application;

[0033] Fig. 3 is a connection structural schematic diagram of an upper shell and a diaphragm of a differential pressure type capacitive diaphragm vacuum gauge provided by an embodiment of the present application;

[0034] Fig. 4 is a connection structural schematic diagram of an upper shell and a diaphragm of a differential pressure type capacitive diaphragm vacuum gauge provided by an embodiment of the present application;

[0035] Fig. 5 is a structural schematic diagram of a differential pressure type capacitive diaphragm vacuum gauge provided by an embodiment of the present application;

[0036] Fig. 6 is a structural schematic diagram of a differential pressure type capacitive diaphragm vacuum gauge provided by another embodiment of the present application.

[0037] Reference signs: 1, shell, 11, closed reference chamber, 12, open measuring chamber, 13, upper shell, 131, upper substrate, 132, first sidewall, 133, gas sensor, 14, lower shell, 141, lower substrate, 142, second sidewall, 15, gas filling pipe, 151, sealing cover, 16, gas inlet pipe, 2, fixed electrode plate, 21, lead-out electrode, 3, diaphragm, 4, sealing material, 5, pressure generator, 51, delivery pipeline, 52, pressure controller, 6, closed chamber. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort also belong to the scope of protection of the present application.

[0039] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between the components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0040] In addition, if the description of "first", "second" and the like is involved in the embodiments of the present application, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can be explicitly or implicitly included at least one of the features. In addition, if "and / or" or "and / or" appears throughout the text, it means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the present application.

[0041] Please refer to FIG. 1-4, one of the embodiments of the present application provides a differential pressure type capacitive diaphragm vacuum gauge, comprising a shell 1, a fixed electrode plate 2 and a diaphragm 3, the shell 1 is provided with an air inlet pipe 16 and an air charging pipe 15; the fixed electrode plate 2 is arranged in the interior of the shell 1, the fixed electrode plate 2 is provided with an outgoing electrode 21 for electrical connection with a detection circuit; the diaphragm 3 is arranged in the interior of the shell 1 and separates the interior of the shell 1 into an upper chamber and a lower chamber, the fixed electrode plate 2 is located in the upper chamber, and a preset interval is arranged between the fixed electrode plate 2 and the diaphragm 3; wherein the lower chamber is in communication with the air inlet pipe 16, and the lower chamber and the air inlet pipe 16 jointly form an open measurement chamber 12, the air charging pipe 15 is in communication with the upper chamber, and the air charging pipe 15 and the upper chamber jointly form a closed reference chamber 11, a preset volume of gas is arranged in the closed reference chamber 11 through the air charging pipe 15, so that the closed reference chamber 11 is in a high pressure state of a preset positive pressure.

[0042] The differential pressure type capacitive diaphragm vacuum gauge provided by the present application has the following technical effects: by arranging the diaphragm 3 in the shell 1, and separating the shell 1 into an upper chamber and a lower chamber, and arranging the fixed electrode plate 2 in the upper chamber, and arranging a preset interval between the fixed electrode plate 2 and the diaphragm 3, the air charging pipe 15 of the shell 1 is in communication with the upper chamber to form a closed reference chamber 11, and the air inlet pipe 16 of the shell 1 is in communication with the lower chamber to form an open measurement chamber 12, since a preset volume of gas is arranged in the closed reference chamber 11 through the air charging pipe 15, so that the closed reference chamber 11 is in a high pressure state of a preset positive pressure. It should be understood that at this time, the end of the air charging pipe 15 away from the shell 1 is in a sealed state, so that the air charging pipe 15 and the upper chamber jointly form a closed reference chamber 11.

[0043] During operation, when gas is introduced into the open measuring chamber 12 through the inlet pipe 16, the diaphragm 3 deforms due to the gas pressure, thereby changing the distance between the diaphragm 3 and the fixed electrode 2, and causing a change in the capacitance between them. The capacitance is then measured using electrical methods, and the relationship between the capacitance and the gas pressure is obtained through calibration, thereby obtaining the gas pressure and achieving accurate measurement of the gas pressure.

[0044] Meanwhile, the sealed reference chamber 11 is filled with gas to a certain pressure through the gas filling tube 15, so that the reference chamber is in a constant high pressure state. Compared with the high vacuum process, the gas filling process is simpler. In addition, for low-range capacitor film vacuum gauges, the diaphragm 3 does not need to be too thin when using this differential pressure capacitor film vacuum gauge, which reduces the processing difficulty of the diaphragm 3 material and is also conducive to the welding of the diaphragm 3 to the shell 1 (lower chamber and upper chamber), thus solving the problem of difficult product preparation.

[0045] Please refer to Figures 1-2. In one embodiment, when the inflation port of the inflation tube 15 is set in a sealed state, the sealed reference chamber 11 is in a high-pressure state with a preset positive pressure.

[0046] In this embodiment, by setting the air inlet of the air inlet of the air inlet of the air inlet tube 15 to be in a sealed state, the sealed reference chamber 11 is placed in a high-pressure state with a preset positive pressure, thereby ensuring the pressure stability in the sealed reference chamber 11 during operation and improving the measurement accuracy and stability.

[0047] Please refer to Figures 1-2. In one embodiment, the end of the inflation tube 15 away from the upper chamber is detachably connected to a sealing cap 151; wherein the sealing cap 151 can be close to or away from the upper chamber along the length of the inflation tube 15; wherein the sealing cap 151 is threadedly connected to or sleeved with the inflation tube 15.

[0048] Since the sealing cover 151 can move closer to or further away from the upper chamber along the length of the inflation tube 15, as the sealing cover 151 moves closer to the upper chamber along the length of the inflation tube 15, it gradually approaches the upper shell 1, causing the volume of the sealed reference chamber 11 to decrease. Under the condition that the internal gas mass remains unchanged, the gas will squeeze the electrode, thereby generating pressure.

[0049] In one embodiment, the sealing cap 151 has a U-shaped cross-section, and the inner ring of the sealing cap 151 forms a third groove. The inner wall of the third groove is provided with an internal thread, and the outer wall of the inflation tube 15 is provided with an external thread. The sealing cap 151 is threadedly connected to the inflation tube 15, and the third groove communicates with the upper chamber. As the sealing cap 151 moves along the direction of the inflation tube 15, the volume of the third groove gradually decreases.

[0050] In the embodiment, the sealing cover 151 is sealedly installed on the inflation port of the inflation pipe 15. The sealing cover 151 can be a screw cap. The inflation pipe 15 is provided with an external thread. The screw cap is in sealing connection with the external thread of the inflation pipe 15 through thread connection. The closed reference chamber 11 is sealedly closed through thread connection. The closed reference chamber 11 gradually approaches the upper shell 13 with the thread movement of the sealing cover 151, so that the volume of the closed reference chamber 11 is reduced. In the case that the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0051] In the embodiment, the sealing cover 151 is sealedly installed on the inflation port of the inflation pipe 15. The sealing cover 151 can be a screw cap. The inflation pipe 15 is provided with an external thread. The screw cap is in sealing connection with the external thread of the inflation pipe 15 through thread connection. The closed reference chamber 11 is sealedly closed through thread connection. The closed reference chamber 11 gradually approaches the upper shell 13 with the thread movement of the sealing cover 151, so that the volume of the closed reference chamber 11 is reduced. In the case that the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0052] According to needs, the screw cap is further provided with an inner rubber plug. The inner rubber plug is in the shape of a cylinder or an inverted cone. The inner rubber plug is sleeved on the inflation port of the inflation pipe 15 and is in interference fit with the inflation pipe 15, so as to enhance the sealing property. When the sealing cover 151 moves and gradually approaches the upper shell 13, the volume of the closed reference chamber 11 is further reduced. In the case that the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0053] According to needs, the sealing cover 151 can also be a sealing cover. The sealing cover is sleeved on the inflation pipe 15. The closed reference chamber 11 is sealedly closed through sleeving. The closed reference chamber 11 gradually approaches the upper shell 13 with the downward movement of the sealing cover 151, so that the volume of the closed reference chamber 11 is reduced. In the case that the internal gas mass is unchanged, the gas will press the electrode, and then pressure is generated.

[0054] Please refer to FIG. 1-4, in one embodiment, the shell 1 includes an upper shell 13 and a lower shell 14, the upper shell 13 has a first recess; wherein the gas-filled tube 15 is arranged in the upper shell 13; the lower shell 14 has a second recess, the first recess and the second recess are oppositely arranged; wherein the air inlet tube 16 is arranged in the lower shell 14; wherein the diaphragm 3 is arranged between the first recess and the second recess, and the two opposite surfaces of the diaphragm 3 are respectively sealed and connected with the upper shell 13 and the lower shell 14, the diaphragm 3 and the upper shell 13 jointly form the upper chamber, and the diaphragm 3 and the lower shell 14 jointly form the lower chamber.

[0055] In this embodiment, by circumferentially surrounding the second side wall 142 upward along the lower shell 14, and sealingly covering the diaphragm 3 on the second side wall 142, the lower chamber is formed, and by sealingly arranging the diaphragm 3 with the upper shell 13 through the sealing material 4, the upper chamber is formed, so as to accommodate the gas filled in the gas-filled tube 15, and ensure that the gas can be introduced into the lower chamber through the air inlet tube 16 to act on the diaphragm 3, thereby accurately measuring the pressure data of the diaphragm 3, and at the same time, by sealingly arranging, the phenomenon of gas leakage is avoided, thereby affecting the measurement accuracy.

[0056] Please refer to FIG. 1, the upper shell is also provided with a gas sensor 133, which is used for detecting the pressure in the sealed reference chamber 11, so as to accurately know whether the sealed reference chamber 11 is in a high pressure state of a preset positive pressure.

[0057] Please refer to FIG. 1-4, in one embodiment, the lead-out electrode 21 is sealingly welded with the upper shell 13, one end of the lead-out electrode 21 is in electrical contact with the fixed electrode plate 2, and the other end of the lead-out electrode 21 is electrically connected with the detection circuit. Thus, the accurate measurement of the gas pressure is realized.

[0058] Please refer to FIG. 1-4, in one embodiment, the upper shell 13 includes an upper base plate 131 and a first side wall 132 arranged outside the upper base plate 131, the first side wall 132 and the upper base plate 131 jointly form the first recess, the first side wall 132 is sealingly connected with the diaphragm 3 through the sealing material 4, the first side wall 132 on the two sides of the first recess is connected with the top surface of the sealing material 4 to form a step, the two ends of the fixed electrode plate 2 are arranged on the step, and the two side surfaces of the fixed electrode plate 2 have gaps with the adjacent first side wall 131 and the adjacent sealing material 4; the lower shell 14 includes a lower base plate 141 and a second side wall 142 arranged outside the lower base plate 141, the diaphragm 3 is sealingly covered on the second side wall 142, the second side wall 142 and the lower base plate 141 jointly form the second recess, and the diaphragm 3 is sealingly mounted on the second side wall 142.

[0059] In the embodiment, the first side wall 132 on both sides of the upper shell 13 is connected with the top of the sealing material 4 to form a step, and the fixed electrode plate 2 is arranged on the step, so that the fixed electrode plate 2 is stably installed. The upper base plate 131 is in a circular plate structure, the first side wall 132 is in a circular sleeve structure, and the first side wall 132 is concentric with the upper base plate 131. The lower base plate 141 is in a circular ring structure, the second side wall 142 is in a circular sleeve structure, and the second side wall 142 is concentric with the lower base plate 141.

[0060] It should be noted that the first side wall 132 on the other two sides of the upper shell 13 has a spacing with the fixed electrode plate 2, so that the gas filled by the inflation tube 15 flows between the diaphragm 3 and the upper shell 13.

[0061] Specifically, the upper shell 13 is connected with the inflation tube 15, the first side wall 132 is arranged on the outer side of the upper base plate 131 along the circumferential direction of the upper base plate 131 to jointly form the upper shell 13; the diaphragm 3 is sealed and covered on the first side wall 142 by the sealing material 4. The top surface of the sealing material 4 is sealed with the bottom surface of the first side wall 132, and the first side wall 132 on both sides of the upper shell 13 is connected with the top surface of the sealing material 4 to form a step, and the two ends of the fixed electrode plate 2 are arranged on the step, and the two side surfaces of the fixed electrode plate 2 have a gap between the adjacent first side wall 132 and the adjacent sealing material 4, so that the gas filled by the inflation tube 15 fills between the upper base plate 131 and the diaphragm 3, thereby ensuring that the measurement work can be stably performed.

[0062] The lower shell 14 is connected with the air inlet tube 16, the second side wall 142 is arranged on the outer side of the lower base plate 141 along the circumferential direction of the lower base plate 141 to jointly form the lower shell 14; the diaphragm 3 is sealed and covered on the second side wall 142.

[0063] Please refer to the drawings, in one of the embodiments, the fixed electrode plate 2 is located directly above the diaphragm 3. Therefore, the measurement accuracy and stability are improved.

[0064] Please refer to FIGS. 1-4, in one of the embodiments, the distance between the diaphragm 3 and the bottom of the first groove is greater than the distance between the diaphragm 3 and the bottom of the second groove; and / or, the volume of the upper chamber is greater than the volume of the lower chamber.

[0065] In the embodiment, by setting the height of the second side wall 142 to be less than the height of the first side wall 132, or the height of the second side wall 142 to be less than the sum of the height of the first side wall 132 and the height of the sealing material 4, and / or setting the volume of the upper chamber to be greater than the volume of the lower chamber, the closed reference chamber 11 can provide a stable measurement basis for the open measurement chamber 12, thereby improving the measurement stability and accuracy.

[0066] In one of the embodiments, P-P r = -KU, where P is the pressure to be measured, P r is the pressure of the closed reference chamber 11, K is a constant, K = Co / do, Co and do are the static capacitance and distance between the fixed electrode 2 and the diaphragm 3 in the equilibrium state, respectively, and U is the output voltage of the detection circuit.

[0067] In the embodiment, by the pressure measurement principle: P-P r = -KU, the gas can be accurately measured, and the pressure measurement principle is different from the existing pumping scheme, the pressure measurement principle of the existing pumping scheme is: P-P r = KU, it can be seen that the reference chamber of the traditional vacuum gauge is negative pressure, and the pumping is formed, which has insufficient structural stability and high operation difficulty; while the reference chamber of the present scheme is positive pressure, and the inflation is formed, which is relatively simple to operate.

[0068] Optionally, P r is greater than P. The pressure is prevented from being too large to damage the diaphragm 3 and the electrode. It should be understood that the size relationship between Pr and P is not fixed.

[0069] In one of the embodiments, the diaphragm 3 includes a nickel-chromium alloy diaphragm 3, and the nickel content in the nickel-chromium alloy diaphragm 3 is not less than 70%.

[0070] In the embodiment, since the nickel-chromium alloy diaphragm 3 has high strength and hardness, good wear resistance, and is not easy to deform, and the nickel-chromium alloy has good corrosion resistance and is not easy to be eroded by chemicals, at the same time, the nickel-chromium alloy diaphragm 3, and the nickel-chromium alloy is an excellent conductive material, and the nickel-chromium alloy has good weldability. Therefore, by adopting the nickel-chromium alloy diaphragm 3, and the nickel content in the nickel-chromium alloy diaphragm 3 is not less than 70%, the diaphragm 3 can have good stability in a high-pressure environment, can maintain the accuracy of measurement for a long time, and can work stably for a long time in a harsh environment (such as high temperature) without being easy to soften or oxidize. At the same time, it can provide good electrical connection, ensure the accuracy of the measurement signal, and facilitate connection and fixation with other components.

[0071] Referring to Figs. 5-6, one of the embodiments of the present application further provides a differential pressure type capacitive diaphragm vacuum gauge, comprising a pressure generator 5, which is used to fill a preset volume of gas into a closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, so as to form the differential pressure type capacitive diaphragm vacuum gauge as claimed in any one of the claims.

[0072] In the process of filling the gas into the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, the pressure generator 5 is communicated with the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas through the gas filling pipe 15 of the differential pressure type capacitive diaphragm vacuum gauge.

[0073] In the present embodiment, the pressure generator 5 is connected with the gas filling pipe 15 of the differential pressure type capacitive diaphragm vacuum gauge, so as to fill the preset volume of gas into the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, so as to make the closed reference chamber 11 in a high pressure state of preset positive pressure, and ensure the accurate measurement of the gas.

[0074] It should be understood that, since the pressure generator 5 needs to fill the gas into the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, at this time, the end of the gas filling pipe 15 away from the shell 1 is arranged in an open state, i.e. the sealing cover 151 is detached from the end of the gas filling pipe 15, so as to make the pressure generator 5 communicated with the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas through the gas filling pipe 15 of the differential pressure type capacitive diaphragm vacuum gauge, so as to fill the preset volume of gas into the closed reference chamber 11 to be filled with gas, and after filling the preset volume of gas, the sealing cover 151 is sealed and connected with the gas filling pipe 15, so as to make the closed reference chamber 11 in a high pressure state of preset positive pressure.

[0075] Referring to Fig. 5, in one of the embodiments, the gas filling end of the pressure generator 5 is connected with a delivery pipeline 51, the delivery pipeline 51 is provided with a pressure controller 52, and the pressure controller 52 is electrically connected with the pressure generator 5.

[0076] In the process of filling the gas into the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, the pressure generator 5 is communicated with the gas filling pipe 15 through the delivery pipeline 51, and the pressure controller 52 is used to detect the pressure in the closed reference chamber 11 and control the pressure generator 5 to fill the preset volume of gas into the closed reference chamber 11 of the differential pressure type capacitive diaphragm vacuum gauge to be filled with gas, so as to make the closed reference chamber 11 in a high pressure state of preset positive pressure.

[0077] In the embodiment, when the pressure generator 5 is connected with the inflation pipe 15 through the delivery pipe 51, the inflation pipe 15 is sealed to keep the constant pressure of the sealed reference chamber 11, so as to ensure the stability and accuracy of the measurement.

[0078] When the sealed reference chamber 11 is at a certain set pressure, the inflation pipe 15 is sealed to keep the constant pressure of the sealed reference chamber 11, so as to ensure the stability and accuracy of the measurement.

[0079] Please refer to FIG. 6, in one embodiment, the inflation end of the pressure generator 5 is connected with the delivery pipe 51, and the pressure generator 5 is connected with at least one sealed cavity 6 through the delivery pipe 51, and the sealed cavity 6 is provided with a pressure controller 52, and the pressure controller 52 is electrically connected with the pressure generator 5.

[0080] When the sealed reference chamber 11 is at a certain set pressure, the inflation pipe 15 is sealed to keep the constant pressure of the sealed reference chamber 11, so as to ensure the stability and accuracy of the measurement.

[0081] In the embodiment, the pressure generator 5 is connected with the sealed cavity 6 through the delivery pipe 51, and when the pressure generator 5 is inflated, the differential capacitance diaphragm vacuum gauge is arranged in the sealed cavity 6, so as to realize the inflation of the sealed reference chamber 11 in the differential capacitance diaphragm vacuum gauge by the inflation mode of cavity filling, and the pressure controller 52 for detecting the pressure in the sealed reference chamber 11 is arranged in the sealed cavity 6, and the pressure generator 5 is controlled to fill the sealed reference chamber 11 in the differential capacitance diaphragm vacuum gauge with a preset volume of gas, so as to accurately control the pressure in the sealed reference chamber 11, improve the measurement accuracy and the flexibility of the measurement work.

[0082] When the closed reference chamber 11 is at a certain set pressure, the inflation tube 15 tube head is sealed to keep the closed reference chamber 11 at a constant pressure, ensuring the stability and accuracy of the measurement work.

[0083] According to the need, the gas sensor 133 is also electrically connected with the pressure generator 5 and / or the pressure controller 52, ensuring that the pressure generator 5 fills the closed reference chamber 11 of the gas to be filled into the differential pressure type capacitive diaphragm vacuum gauge with a preset volume of gas, so that the closed reference chamber 11 is at a preset positive pressure high pressure state.

[0084] The above is only the preferred embodiment of the present application, and does not limit the patent scope of the present application, and any equivalent structural transformation made under the inventive concept of the present application, using the contents of the present application specification and drawings, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A differential capacitance diaphragm gauge, characterised in that, The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge.

2. The differential capacitive thin film vacuum gauge of claim 1, wherein, The application relates to a differential pressure type capacitive diaphragm vacuum gauge.

3. The differential capacitive thin film vacuum gauge of claim 1, wherein, The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge.

5. The differential capacitive thin film gauge of claim 1, wherein, P-P r = -KU, where P is the pressure to be measured, P r is the pressure of the closed reference chamber, K is a constant, K = Co / do, Co and do are the static capacitance and the distance between the fixed plate and the diaphragm in the equilibrium state, respectively, and U is the output voltage of the detection circuit.

6. The differential capacitive thin film gauge according to any of claims 1 to 5, wherein The application relates to a differential pressure type capacitive diaphragm vacuum gauge.

7. The differential capacitive thin film gauge of claim 6 wherein, The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge. The application relates to a differential pressure type capacitive diaphragm vacuum gauge.

8. A differential capacitive thin film vacuum gauge production device, characterized by comprising: The pressure generator is used to fill the preset volume of gas into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge to form the differential pressure capacitive diaphragm vacuum gauge according to any one of claims 1-7. The pressure generator is in communication with the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge through the gas filling pipe of the differential pressure capacitive diaphragm vacuum gauge when the gas is filled into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge.

9. The differential pressure capacitive diaphragm vacuum gauge production device according to claim 8, wherein The gas filling end of the pressure generator is connected with a delivery pipeline, and a pressure controller is arranged in the delivery pipeline and electrically connected with the pressure generator. The pressure generator is in communication with the gas filling pipe through the delivery pipeline when the gas is filled into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge, and the pressure controller is used to detect the pressure in the closed reference chamber and control the pressure generator to fill the preset volume of gas into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge, so that the closed reference chamber is in a high pressure state of the preset positive pressure.

10. The differential pressure capacitive diaphragm vacuum gauge production device according to claim 8, wherein The gas filling end of the pressure generator is connected with a delivery pipeline, and at least one closed cavity is in communication with the pressure generator through the delivery pipeline, and a pressure controller is arranged in the closed cavity and electrically connected with the pressure generator. The differential pressure capacitive diaphragm vacuum gauge is arranged in the closed cavity when the gas is filled into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge, and the closed cavity is in communication with the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge through the gas filling pipe of the differential pressure capacitive diaphragm vacuum gauge, and the pressure controller is used to detect the pressure in the closed reference chamber and control the pressure generator to fill the preset volume of gas into the closed reference chamber of the differential pressure capacitive diaphragm vacuum gauge, so that the closed reference chamber is in a high pressure state of the preset positive pressure.

Images