Fluorescent x-ray analysis device and fluorescent x-ray analysis method

Abstract

The present invention comprises a workpiece-holding mechanism that holds a workpiece in a state in which the workpiece is stretched, an X-ray irradiation unit that irradiates the workpiece at the location held by the workpiece-holding mechanism with X-rays, and a fluorescent X-ray detection unit that detects fluorescent X-rays generated from the workpiece. A fluorescent X-ray reduction unit that reduces the incidence of emission of the fluorescent X-rays from the workpiece-holding mechanism to the outside from a rotating body is formed in the workpiece-holding mechanism.

Description

X-ray fluorescence analysis device and X-ray fluorescence analysis method

[0001] The present invention relates to an X-ray fluorescence analysis apparatus and an X-ray fluorescence analysis method.

[0002] Conventionally, there is a so-called roll-to-roll method in which a workpiece wound around a feed roller is fed, processed, and then wound up on a take-up roller. There is an X-ray fluorescence analyzer that analyzes the workpiece by irradiating X-rays onto the workpiece being transported by this roll-to-roll method and detecting fluorescent X-rays from the workpiece.

[0003] A workpiece transported by the roll-to-roll method may sag between the rollers, or may warp or wrinkle in the width direction of the workpiece. This changes the measurement distance between the workpiece and the X-ray fluorescence analyzer, and therefore, when X-ray fluorescence analysis is performed on a workpiece between the rollers, the measurement accuracy decreases.

[0004] Therefore, it has been considered to perform X-ray fluorescence analysis on a workpiece placed on a roller, as shown in Patent Document 1. Since a workpiece placed on a roller is under more tension than a workpiece between rollers, the measurement accuracy of X-ray fluorescence analysis can be improved.

[0005] Japanese Patent Application Laid-Open No. 2018-98096

[0006] Incidentally, some rollers are made of materials such as heavy metals that generate large amounts of fluorescent X-rays when irradiated with X-rays. Therefore, in the case of such rollers, when X-rays are irradiated onto a workpiece placed on the roller, the detector detects fluorescent X-rays from the roller in addition to the fluorescent X-rays from the workpiece, which reduces the analytical accuracy of the workpiece in the fluorescent X-ray analysis.

[0007] The present invention has been made in view of the above problems, and its main object is to improve the analytical accuracy of X-ray fluorescence analysis of workpieces transported by the so-called roll-to-roll method.

[0008] In other words, the fluorescent X-ray analysis apparatus of the present invention is an X-ray fluorescence analysis apparatus that performs fluorescent X-ray analysis on a sheet-like workpiece while the workpiece is being transported, and is equipped with a work holding mechanism that holds the workpiece while the workpiece is taut, an X-ray irradiation unit that irradiates X-rays onto the workpiece at the location held by the work holding mechanism, and an X-ray fluorescence detection unit that detects fluorescent X-rays generated from the workpiece, and is characterized in that the work holding mechanism is formed with a fluorescent X-ray reduction unit that reduces the amount of fluorescent X-rays from the work holding mechanism that escapes from the work holding mechanism.

[0009] In such an X-ray fluorescence analyzer, the workpiece holding mechanism is formed with an X-ray fluorescence reduction section that reduces the amount of fluorescent X-rays emitted from the workpiece holding mechanism that escapes outside the workpiece holding mechanism, making it difficult for fluorescent X-rays to escape from the workpiece holding mechanism. As a result, when X-rays are irradiated onto a part of the workpiece held by the workpiece holding mechanism, the fluorescent X-rays from the workpiece holding mechanism are difficult to detect by the X-ray fluorescence detection section, and the fluorescent X-rays from the workpiece are easier to detect by the X-ray fluorescence detection section, making it possible to improve the analytical accuracy of the workpiece in X-ray fluorescence analysis compared to conventional methods.

[0010] Specifically, the fluorescent X-ray reducing portion may be formed at a position that comes into contact with the workpiece.

[0011] With this configuration, the fluorescent X-ray reduction section is formed at a position that comes into contact with the workpiece, thereby preventing X-rays from passing through the workpiece holding mechanism, or even if fluorescent X-rays are generated from the workpiece holding mechanism, the fluorescent X-ray reduction section absorbs the fluorescent X-rays, thereby preventing the fluorescent X-rays from the workpiece holding mechanism from escaping to the outside of the workpiece holding mechanism.

[0012] The fluorescent X-ray reducing portion is preferably made of a light element.

[0013] With this configuration, the fluorescence yield of light elements is much lower than that of heavy elements, and therefore, by making the fluorescent X-ray reduction section out of light elements, it is possible to further reduce the amount of fluorescent X-rays escaping from the fluorescent X-ray reduction section.

[0014] As a specific embodiment of the material constituting the fluorescent X-ray reducing portion, the fluorescent X-ray reducing portion may be made of a fluororesin.

[0015] It is preferable that the fluorescent X-ray reducing section is detachably attached to the workpiece holding mechanism.

[0016] With this configuration, when the fluorescent X-ray reducing section deteriorates due to irradiation of the fluorescent X-ray reducing section with X-rays, the deteriorated fluorescent X-ray reducing section can be replaced.

[0017] A specific example of the fluorescent X-ray reducing portion is a heat-shrinkable tube that is thermally shrunk to fit tightly to the workpiece holding mechanism.

[0018] The fluorescent X-ray reducing portion may have a thickness that allows the fluorescent X-rays from the workpiece holding mechanism to pass through while weakening the intensity of the fluorescent X-rays from the workpiece holding mechanism to a predetermined intensity.

[0019] With this configuration, the fluorescent X-ray reduction section has a thickness that allows the fluorescent X-rays from the work holding mechanism to pass through while weakening the intensity of the fluorescent X-rays from the work holding mechanism to a predetermined intensity.Therefore, the fluorescent X-rays from the work holding mechanism can be used to calibrate the fluorescent X-ray analyzer without interfering with the fluorescent X-rays from the work, eliminating the need to provide a new calibration material.

[0020] The fluorescent X-ray analysis apparatus may further include a calibration fluorescent X-ray generating unit that is interposed between the X-ray irradiation unit and the workpiece holding mechanism, that allows the X-rays irradiated from the X-ray irradiation unit to pass through and generates fluorescent X-rays for calibration from the X-rays irradiated from the X-ray irradiation unit, and a calibration unit that calibrates the fluorescent X-ray analysis based on the fluorescent X-rays from the calibration fluorescent X-ray generating unit and the fluorescent X-rays emitted from the workpiece holding mechanism via the fluorescent X-ray reducing unit.

[0021] With this configuration, the calibration unit calibrates the fluorescent X-ray analysis based on the fluorescent X-rays from the calibration fluorescent X-ray generating unit and the fluorescent X-rays emitted from the work holding mechanism via the fluorescent X-ray reduction unit, thereby further improving the accuracy of the calibration compared to when using only one of the fluorescent X-rays from the calibration fluorescent X-ray generating unit and the fluorescent X-rays emitted from the work holding mechanism via the fluorescent X-ray reduction unit.

[0022] An X-ray fluorescence analysis apparatus for performing X-ray fluorescence analysis on a sheet-like workpiece, in which a workpiece holding mechanism holds the workpiece in a taut state, the workpiece having an X-ray fluorescence reduction section formed in the workpiece holding mechanism that reduces the amount of fluorescent X-rays emitted from the workpiece holding mechanism that escapes outside the workpiece holding mechanism, the X-ray fluorescence analysis apparatus comprising an X-ray irradiation section that irradiates X-rays onto the workpiece at a location held by the workpiece holding mechanism, and an X-ray fluorescence detection section that detects fluorescent X-rays emitted from the workpiece. Also, an X-ray fluorescence analysis method using a workpiece holding mechanism that holds a sheet-like workpiece in a taut state, the workpiece having an X-ray fluorescence reduction section formed in the workpiece holding mechanism that reduces the amount of fluorescent X-rays emitted from the workpiece that escapes outside the workpiece holding mechanism, the X-ray fluorescence analysis method comprising irradiating X-rays onto the workpiece at a location held by the workpiece holding mechanism, and detecting fluorescent X-rays emitted from the workpiece.

[0023] With this configuration, it is possible to obtain the same effects as those of the above-described X-ray fluorescence analyzer.

[0024] According to the present invention, it is possible to improve the analytical accuracy of fluorescent X-ray analysis of a workpiece transported by a so-called roll-to-roll method.

[0025] 1 is a schematic diagram of an X-ray fluorescence analyzer according to an embodiment of the present invention, a cross-sectional view showing a rotating body and a workpiece according to the embodiment, and a schematic diagram of an X-ray fluorescence analyzer according to another embodiment.

[0026] An X-ray fluorescence analyzer according to one embodiment of the present invention will be described below with reference to the drawings. Note that in all of the drawings shown below, some parts may be omitted or exaggerated in schematic form for ease of understanding. Identical components will be assigned the same reference numerals, and their description will be omitted where appropriate.

[0027] <Device Configuration> The fluorescent X-ray analyzer 100 of this embodiment analyzes the workpiece W by irradiating X-rays onto the workpiece W being transported by a so-called roll-to-roll method and detecting fluorescent X-rays from the workpiece W. The roll-to-roll method referred to here is a method in which the workpiece W is processed by a processing device 200 that includes a feed roller R1 that feeds out the workpiece W and a take-up roller R2 that takes up the workpiece W, and that processes the workpiece W between the feed roller R1 and the take-up roller R2, for example, by coating, film formation, and / or plasma treatment. The workpiece W is in the form of a sheet that can be wrapped around a roller, and specifically is, for example, an electrolyte membrane or the like.

[0028] 1, the X-ray fluorescence analysis apparatus 100 includes a workpiece holding mechanism 1 that holds the workpiece W in a taut state, an X-ray irradiation unit 2 that irradiates X-rays onto the workpiece W at a location held by the workpiece holding mechanism 1, and an X-ray fluorescence detection unit 3 that detects fluorescent X-rays emitted from the workpiece W. Here, since the workpiece holding mechanism 1 is unique, the configuration of each unit other than the workpiece holding mechanism 1 will be described first, and then the configuration of the workpiece holding mechanism 1 will be described.

[0029] The X-ray irradiation unit 2 is, for example, an X-ray tube (not shown) or the like, and the generated X-rays are narrowed by, for example, a collimator or the like, and the X-rays are irradiated onto the workpiece W at a location held by the workpiece holding mechanism 1. Here, the position of the workpiece W irradiated with the X-rays is the position where the workpiece W is held by the workpiece holding mechanism 1 in a taut state, and more specifically, the position where the workpiece W is in contact with the workpiece holding mechanism 1 and / or the vicinity thereof.

[0030] The fluorescent X-ray detection unit 3 detects fluorescent X-rays from the workpiece W and converts them into a signal corresponding to their energy.

[0031] In this embodiment, the fluorescent X-rays detected by the fluorescent X-ray detection unit 3 are output to an information processing device 4. The information processing device 4 is a general-purpose or dedicated computer equipped with a CPU, memory, an input / output interface, etc., and functions as an analysis unit 41 that analyzes the workpiece W by causing the CPU and peripheral devices to cooperate in accordance with a predetermined program stored in a predetermined area of ​​the memory. Here, the analysis of the workpiece W may include, for example, qualitative analysis or quantitative analysis of elements contained in the workpiece W based on the fluorescent X-rays from the workpiece W.

[0032] Next, the workpiece holding mechanism 1 will be described.

[0033] The workpiece holding mechanism 1 is provided between the feed roller R1 and the take-up roller R2, and in this embodiment, is a rotating body that transports the workpiece W. The workpiece W is sent out from the feed roller R1, transported onto the rotating body that is the workpiece holding mechanism 1, and wound up by the take-up roller R2. The transport of the workpiece W here includes not only the constant movement of the workpiece W from the feed roller R1 to the take-up roller R2, but also the temporary stopping of the movement of the workpiece W between the feed roller R1 and the take-up roller R2. Furthermore, the movement speed of the workpiece W from the feed roller R1 to the take-up roller R2 may be constant or may be configured to be adjustable.

[0034] Specifically, the work holding mechanism 1 includes a work holding member main body 11 that holds the workpiece W, and a fluorescent X-ray reduction section 12 that reduces the amount of fluorescent X-rays emitted from the work holding member main body 11 that escapes from the work holding mechanism 1. In Fig. 1, the roller closer to the feed roller R1 is the rotating body that is the work holding mechanism 1, but the roller that is the rotating body that is the work holding mechanism 1 may be the roller closer to the take-up roller R2, or may be another roller (not shown) provided between the feed roller R1 and the take-up roller R2.

[0035] The workpiece holding member body 11 is cylindrical and rotatably configured to form a rotating body that transports the workpiece W. The workpiece holding member body 11 is made of, for example, a heavy metal. The workpiece holding member body 11 may be rotatably connected to a motor (not shown) and rotated by the driving force of the motor. Here, the workpiece holding member body 11 made of a heavy metal may be, for example, a hard-plated iron-based roller, and examples of heavy metals include chromium and iron.

[0036] The fluorescent X-ray reducing section 12 absorbs X-rays that are irradiated onto the workpiece W and pass through the workpiece W, and fluorescent X-rays from the workpiece holding member main body 11 that are generated by X-rays that pass through the fluorescent X-ray reducing section 12 and reach the workpiece holding member main body 11. This reduces the amount of fluorescent X-rays from the workpiece holding member main body 11 that are emitted out of the workpiece holding mechanism 1. Note that the fluorescent X-ray reducing section 12 may be configured not to allow X-rays to pass through. In this case, fluorescent X-rays are not generated from the workpiece holding member main body 11, and the fluorescent X-ray reducing section 12 absorbs X-rays that have passed through the workpiece W.

[0037] The fluorescent X-ray attenuating section 12 is formed on the workpiece holding member main body 11 at a position where it comes into contact with the workpiece W. Specifically, as shown in Fig. 2, the fluorescent X-ray attenuating section 12 is a layer formed with a predetermined thickness on the outer peripheral surface of the workpiece holding member main body 11. When the workpiece W is being transported on the workpiece holding mechanism 1, the surface of the workpiece W opposite to the surface of the workpiece W that is irradiated with X-rays comes into contact with the surface of the fluorescent X-ray attenuating section 12.

[0038] 2, one workpiece W is in contact with the surface of the fluorescent X-ray attenuating section 12 on the workpiece holding mechanism 1, and the X-ray irradiation section 2 irradiates X-rays onto the one workpiece W. The one workpiece W referred to here is different from a workpiece W that is stacked in multiple sheets, such as a workpiece W wound around the feed roller R1 and / or the take-up roller R2, and refers to a workpiece W that is not stacked in multiple sheets, such as a workpiece W being transported from the feed roller R1 to the take-up roller R2.

[0039] In this embodiment, the fluorescent X-ray reducing portion 12 is formed over the entire outer peripheral surface of the workpiece holding member body 11 in the circumferential direction of the workpiece holding member body 11, but it is sufficient that it is formed at least in a location where X-rays are irradiated. In other words, the fluorescent X-ray reducing portion 12 may be formed on a part of the outer peripheral surface of the workpiece holding member body 11. Furthermore, in this embodiment, the width of the fluorescent X-ray reducing portion 12 is approximately the same as the width of the workpiece holding member body 11, but is not limited to this and may be smaller than the width of the workpiece holding member body 11.

[0040] In this embodiment, the fluorescent X-ray reducing section 12 is made of a so-called light element having an atomic number equal to or lower than that of silicon. Specifically, the fluorescent X-ray reducing section 12 is made of a fluororesin.

[0041] In this embodiment, the fluorescent X-ray reducing section 12 is detachably attached to the workpiece holding member main body 11. Specifically, the fluorescent X-ray reducing section 12 is a heat-shrinkable tube that thermally shrinks to fit closely to the outer peripheral surface of the workpiece holding member main body 11. The heat-shrinkable tube is wrapped around the outer peripheral surface of the workpiece holding member main body 11 and heated to fit closely to the outer peripheral surface of the workpiece holding member main body 11.

[0042] <X-ray Fluorescence Analysis Method> Next, the X-ray fluorescence analysis method of this embodiment will be described.

[0043] When the workpiece W is being transported onto the rotating body, which is the workpiece holding mechanism 1, the X-ray irradiation unit 2 irradiates X-rays onto the workpiece W on the rotating body, which is the workpiece holding mechanism 1. Specifically, the X-ray irradiation unit 2 irradiates X-rays onto the portion of the workpiece W that is in contact with the fluorescent X-ray reduction unit 12.

[0044] When X-rays are irradiated, fluorescent X-rays are generated from the workpiece W, and the fluorescent X-rays from the workpiece W are detected by the fluorescent X-ray detection unit 3. On the other hand, the fluorescent X-rays from the workpiece holding member main body 11 are reduced by the fluorescent X-ray reduction unit 12 so that they do not escape outside the workpiece holding mechanism 1.

[0045] When the fluorescent X-ray detection unit 3 detects the fluorescent X-rays from the workpiece W, the analysis unit 41 of the information processing device 4 analyzes the workpiece W based on the fluorescent X-rays from the workpiece W. The analysis results are displayed on a display unit such as a display D.

[0046] <Effects of this embodiment> According to the X-ray fluorescence analysis apparatus 100 of this embodiment, the workpiece holding member body 11 is formed with the X-ray fluorescence reducing section 12 that reduces the amount of fluorescent X-rays emitted from the workpiece holding member body 11 that are emitted outward from the workpiece holding member body 11, making it difficult for the fluorescent X-rays to be emitted outward from the workpiece holding mechanism 1. As a result, when X-rays are irradiated onto the workpiece W on the workpiece holding member body 11, the fluorescent X-rays from the workpiece holding member body 11 are difficult to detect by the X-ray fluorescence detection section 3, and the fluorescent X-rays from the workpiece W are easier to detect by the X-ray fluorescence detection section 3, making it possible to improve the analytical accuracy of the workpiece W in the X-ray fluorescence analysis compared to conventional methods.

[0047] Other Embodiments The present invention is not limited to the above-described embodiments.

[0048] In the above embodiment, the fluorescent X-ray reducing section 12 reduces the amount of fluorescent X-rays from the work holding member main body 11 that are emitted outside the work holding member main body 11, but the fluorescent X-ray reducing section 12 may have a thickness that allows the fluorescent X-rays from the work holding mechanism 1 to pass through while the intensity of the fluorescent X-rays from the work holding mechanism 1 is weakened to a predetermined intensity. Here, the intensity of the fluorescent X-rays from the work holding mechanism 1 that is weakened to a predetermined intensity is the intensity of the fluorescent X-rays that does not interfere with the fluorescent X-rays from the work W and that allows the fluorescent X-rays from the work holding mechanism 1 to be used to calibrate the fluorescent X-ray analyzer 100.

[0049] With this configuration, the fluorescent X-rays from the workpiece holding member main body 11 do not interfere with the fluorescent X-rays from the workpiece W, and the fluorescent X-rays from the workpiece holding mechanism 1 can be used to calibrate the fluorescent X-ray analysis device 100, eliminating the need to provide a new calibration material.

[0050] Here, when the fluorescent X-rays from the workpiece holding mechanism 1 are used to calibrate the fluorescent X-ray analysis apparatus 100, as shown in FIG. 4, the fluorescent X-ray analysis apparatus 100 may further include a calibration fluorescent X-ray generation unit 5 that is disposed between the X-ray irradiation unit 2 and the workpiece holding mechanism 1 and that allows a portion of the X-rays irradiated from the X-ray irradiation unit 2 to pass through and generates fluorescent X-rays for calibration from the X-rays irradiated from the X-ray irradiation unit 2, and a calibration unit 42 that calibrates the fluorescent X-ray analysis based on the fluorescent X-rays from the calibration fluorescent X-ray generation unit 5 and the fluorescent X-rays emitted from the workpiece holding mechanism 1 via the fluorescent X-ray reduction unit 12.

[0051] The calibrated fluorescent X-ray generator 5 is disposed along the line in which the X-ray irradiator 2 and the X-ray fluorescence detector 3 are aligned when viewed from the workpiece W side. More specifically, the calibrated fluorescent X-ray generator 5 is disposed so as to coincide with a line connecting the central axis of the X-ray irradiator 2 and the central axis of the detection field of view of the X-ray fluorescence detector 3. The calibrated fluorescent X-ray generator 5 has a thickness sufficient to allow X-rays to pass through to the workpiece W. The calibrated fluorescent X-ray generator 5 is made of a material that does not overlap with the fluorescent X-ray peaks of the material constituting the workpiece holding member body 11 and has constant positions and magnitudes of the fluorescent X-ray peaks, such as vanadium or manganese. The calibrated fluorescent X-ray generator 5 is provided at a position separated by a predetermined distance from the workpiece W. More specifically, the calibrated fluorescent X-ray generator 5 is provided in a housing (not shown) that is separated by a predetermined distance from the workpiece W and that houses the X-ray irradiator 2 and the X-ray fluorescence detector 3.

[0052] The calibration unit 42 calibrates the fluorescent X-ray analyzer 100 using two peaks, one of which is a peak of the material that constitutes the calibrated fluorescent X-ray generating unit 5 and the other of which is a peak of the material that constitutes the workpiece holding member main body 11.

[0053] Specifically, the calibration unit 42 compares a known peak of fluorescent X-rays of a substance constituting the calibrated fluorescent X-ray generating unit 5 with a peak of fluorescent X-rays of the substance constituting the calibrated fluorescent X-ray generating unit 5 that has been detected by the fluorescent X-ray detecting unit 3. The calibration unit 42 also compares a known peak of fluorescent X-rays of a heavy metal with a peak of the heavy metal detected by the fluorescent X-ray detecting unit 3. Then, when the deviation between the fluorescent X-rays detected by the fluorescent X-ray detecting unit 3 and the known fluorescent X-ray peak, of the fluorescent X-ray peak of the substance constituting the calibrated fluorescent X-ray generating unit 5 or the fluorescent X-ray peak of the heavy metal, is equal to or greater than a predetermined value, the calibration unit 42 calibrates the fluorescent X-ray analyzer 100 so that the deviation between the fluorescent X-rays detected by the fluorescent X-ray detecting unit 3 and the known fluorescent X-ray peak becomes less than the predetermined value.

[0054] With this configuration, the calibration unit 42 calibrates the fluorescent X-ray analysis based on the fluorescent X-rays from the calibration fluorescent X-ray generating unit 5 and the fluorescent X-rays emitted from the workpiece holding member main body 11 via the fluorescent X-ray reduction unit 12, thereby further improving the accuracy of the calibration compared to when using only one of the fluorescent X-rays from the calibration fluorescent X-ray generating unit 5 and the fluorescent X-rays emitted from the workpiece holding member main body 11 via the fluorescent X-ray reduction unit 12.

[0055] In the above embodiment, the fluorescent X-ray attenuating section 12 is formed on the workpiece holding member main body 11 provided between the feed roller R1 and the take-up roller R2, but this is not limiting. For example, the fluorescent X-ray attenuating section 12 may be formed on the feed roller R1 and / or the take-up roller R2.

[0056] In the above embodiment, the fluorescent X-ray reducing portion 12 is formed on the outer circumferential surface of the workpiece holding member main body 11, but the workpiece holding member main body 11 may be made of a material that forms the fluorescent X-ray reducing portion 12. In other words, the workpiece holding member main body 11 may be made of a material such as a light element, and may function as the fluorescent X-ray reducing portion 12. Furthermore, the fluorescent X-ray reducing portion 12 is not limited to being formed on the outer circumferential surface of the workpiece holding member main body 11, but may also be formed inside the workpiece holding member main body 11.

[0057] In the above embodiment, the fluorescent X-ray reduction section 12 was detachably attached to the workpiece holding member main body 11, but this is not limited to this, and the fluorescent X-ray reduction section 12 may be formed integrally with the workpiece holding member main body 11.

[0058] In the above embodiment, the X-ray fluorescence analyzer 100 includes the workpiece holding mechanism 1, but it does not have to include the workpiece holding mechanism 1. That is, the workpiece holding mechanism 1 may be formed with an X-ray fluorescence reducing section 12, and the X-ray fluorescence analyzer 100 may be provided separately from the workpiece holding mechanism 1 and include an X-ray irradiation section 2 that irradiates X-rays onto the workpiece W on the workpiece holding mechanism 1, and an X-ray fluorescence detection section 3 that detects fluorescent X-rays generated from the workpiece W.

[0059] In the above embodiment, the workpiece holding member body 11 constitutes a rotating body such as a roller, but the workpiece holding member body 11 is not limited to a rotating body. The workpiece holding member body 11 may be, for example, a triangular prism-shaped member that holds the workpiece W by making linear contact with the workpiece W along the width direction of the workpiece W, or may be any other prism-shaped member.

[0060] In the above embodiment, the X-ray irradiation unit 2 and the fluorescent X-ray detection unit 3 may be configured to be movable along the width direction of the workpiece W. With such a configuration, fluorescent X-rays can be detected virtually over the entire surface of the workpiece W.

[0061] If the period of reciprocating movement of the X-ray irradiation unit 2 as it moves along the width direction of the workpiece W is synchronized with the period of rotation of the workpiece holding member main body 11, X-rays may be irradiated to the same location on the fluorescent X-ray reduction unit 12, which may result in early deterioration of the fluorescent X-ray reduction unit 12. Therefore, by adjusting the size of the workpiece holding member main body 11, such as the diameter of the workpiece holding member main body 11, and / or the thickness of the fluorescent X-ray reduction unit 12, it is possible to prevent X-rays from being irradiated to the same location on the fluorescent X-ray reduction unit 12.

[0062] In the above embodiment, the fluorescent X-ray reducing portion 12 is made of so-called light elements, but it may be made of a ceramic material such as alumina and / or silica. Furthermore, the workpiece holding member body 11 may also be made of a ceramic material, in addition to being made of a heavy metal. When the workpiece holding member body 11 and / or the fluorescent X-ray reducing portion 12 are made of a ceramic material, they have a higher resistance to X-rays than resin, and therefore the frequency of replacement of the workpiece holding member body 11 and / or the fluorescent X-ray reducing portion 12 can be reduced.

[0063] In addition, the present invention can be modified in various ways without departing from the spirit of the invention.

[0064] According to the present invention, it is possible to improve the analytical accuracy of fluorescent X-ray analysis of a workpiece transported by a so-called roll-to-roll method.

[0065] REFERENCE SIGNS LIST 100: X-ray fluorescence analysis apparatus 1: Workpiece holding mechanism 11: Workpiece holding member main body 12: X-ray fluorescence reduction section 2: X-ray irradiation section 3: X-ray fluorescence detection section 4: Information processing device 41: Analysis section 42: Calibration section 5: Calibration X-ray fluorescence generation section

Claims

1. An X-ray fluorescence analysis device that performs X-ray fluorescence analysis on a sheet-like workpiece while the workpiece is being transported, comprising: a workpiece holding mechanism that holds the workpiece in a taut state; an X-ray irradiation unit that irradiates X-rays onto the workpiece at a location held by the workpiece holding mechanism; and an X-ray fluorescence detection unit that detects fluorescent X-rays generated from the workpiece, wherein the workpiece holding mechanism is formed with a fluorescent X-ray reduction unit that reduces the amount of fluorescent X-rays emitted from the workpiece holding mechanism that escapes from the workpiece holding mechanism.

2. The fluorescent X-ray analyzer according to claim 1, wherein the fluorescent X-ray reducing portion is formed at a position where it comes into contact with the workpiece.

3. The fluorescent X-ray analyzer according to claim 1 or 2, wherein the fluorescent X-ray reducing section is made of a light element.

4. The fluorescent X-ray analyzer according to claim 3, wherein the fluorescent X-ray reducing portion is made of fluororesin.

5. The fluorescent X-ray analyzer according to any one of claims 1 to 4, wherein the fluorescent X-ray reducing section is detachably attached to the workpiece holding mechanism.

6. The fluorescent X-ray analyzer according to claim 5, wherein the fluorescent X-ray reducing portion is a heat-shrinkable tube that is thermally shrunk to fit tightly to the workpiece holding mechanism.

7. A fluorescent X-ray analysis apparatus according to any one of claims 1 to 6, wherein the fluorescent X-ray reduction section has a thickness that allows the fluorescent X-rays from the work holding mechanism to pass through while weakening the intensity of the fluorescent X-rays from the work holding mechanism to a predetermined intensity.

8. The fluorescent X-ray analyzer according to claim 7, further comprising: a calibration fluorescent X-ray generating unit interposed between the X-ray irradiation unit and the workpiece holding mechanism, which allows a portion of the X-rays irradiated from the X-ray irradiation unit to pass through and generates fluorescent X-rays for calibration from the X-rays irradiated from the X-ray irradiation unit; and a calibration unit which calibrates fluorescent X-ray analysis based on the fluorescent X-rays from the calibration fluorescent X-ray generating unit and the fluorescent X-rays emitted from the workpiece holding mechanism via the fluorescent X-ray reducing unit.

9. An X-ray fluorescence analysis apparatus in which a workpiece holding mechanism holds a sheet-like workpiece in a taut state and performs X-ray fluorescence analysis on the workpiece, wherein the workpiece holding mechanism is formed with an X-ray fluorescence reduction section that reduces the amount of fluorescent X-rays emitted from the workpiece holding mechanism that escapes from the workpiece holding mechanism, and the X-ray fluorescence analysis apparatus is equipped with an X-ray irradiation section that irradiates X-rays onto the workpiece at a location held by the workpiece holding mechanism, and an X-ray fluorescence detection section that detects fluorescent X-rays generated from the workpiece.

10. A fluorescent X-ray analysis method using a work holding mechanism that holds the work in a tensile state, wherein the work holding mechanism is formed with a fluorescent X-ray reduction section that reduces the amount of fluorescent X-rays emitted from the work holding mechanism that escapes from the work holding mechanism, and the fluorescent X-ray analysis method comprises irradiating X-rays onto the work at a location held by the work holding mechanism, and detecting fluorescent X-rays generated from the work.

Images