Automatic transport vehicle and transport facility

Abstract

Provided is an automatic transport vehicle and a transport facility making it possible to flexibly carry an article from an overhead transport vehicle to an article placing device.　An automatic transport vehicle (7) travels on a floor surface. The automatic transport vehicle (7) comprises a travel unit (11), a container placement unit (12), and an opening / closing unit (13). The opening / closing unit (13) is provided above the container placement unit (12) and is movable between a first position directly above the container placement unit (12) and a second position away from directly above the container placement unit (12).

Description

Automatic guided vehicles and transport equipment

[0001] The present invention relates to an automated guided vehicle and a transport facility.

[0002] Conventionally, overhead hoist transport vehicles (OHTs) have been used as transport systems for semiconductor factories (see, for example, Patent Document 1). Overhead hoist transport vehicles are automated transport devices that travel on tracks installed on the ceiling and transfer FOUPs directly to storage facilities or load ports of manufacturing equipment using a hoist mechanism that moves up and down via a belt drive. Overhead hoist transport vehicles are widely used as the main transport system in 300 mm semiconductor factories and the like, and are used not only for in-process transport but also for transport between processes and between factories.

[0003] JP 2024-10483 A

[0004] On the other hand, depending on the condition of the overhead transport vehicle or the load port, it may be difficult to directly unload the cargo from the overhead transport vehicle to the load port, or the unloading time may be long.

[0005] An object of the present invention is to provide an automatic guided vehicle and a transport facility that enable flexible transport of articles from an overhead guided vehicle to an article mounting device.

[0006] The automated guided vehicle travels on a floor surface. The automated guided vehicle includes a travel unit, an article placement unit, and an opening / closing unit. The opening / closing unit is provided above the article placement unit and is movable between a first position directly above the article placement unit and a second position away from directly above the article placement unit.

[0007] According to the present invention, an automatic guided vehicle and a transport facility are provided that enable flexible transport of articles from an overhead guided vehicle to an article mounting device.

[0008] FIG. 1 is a schematic plan view of a transport facility according to a first embodiment of the present invention. FIG. 2 is a perspective view of an automated guided vehicle. FIG. 3 is a block diagram showing the control configuration of the automated guided vehicle. FIG. 4 is a flowchart explaining the control of transferring a container from an overhead guided vehicle to an automated guided vehicle. FIG. 5 is a perspective view of an automated guided vehicle stopped at a station. FIG. 6 is a front view of an automated guided vehicle stopped at a station. FIG. 7 is a plan view of an automated guided vehicle stopped at a station. FIG. 8 is a perspective view of an automated guided vehicle when the opening / closing unit is in a first position. FIG. 9 is a perspective view of an automated guided vehicle when the opening / closing unit is in a second position. FIG. 10 is a perspective view of an automated guided vehicle when a container is being transferred from an overhead guided vehicle to the automated guided vehicle. FIG. 11 is a perspective view of an automated guided vehicle and an overhead guided vehicle when a container is being transferred from the ceiling guided vehicle to the automated guided vehicle. FIG. 12 is a flowchart explaining the control of transferring a container from an automated guided vehicle to a load port. FIG. 13 is a perspective view of a part of a synchronous drive system. FIG. 14 is a front view of an automated guided vehicle stopped in front of a load port. FIG. 15 is a perspective view of an automated guided vehicle stopped in front of a load port. FIG. 16 is a perspective view of an automated guided vehicle according to a second embodiment of the present invention. 10A and 10B are front views of an automated guided vehicle (stopped) according to a third embodiment of the present invention;

[0009] 1. First Embodiment (1) Basic Configuration of Transfer Facility A transfer facility 1 will be described with reference to FIG. 1. FIG. 1 is a schematic plan view of a transfer facility according to a first embodiment of the present invention. In this embodiment, the transfer facility 1 is used in a semiconductor manufacturing factory.

[0010] As shown in FIG. 1, the conveying equipment 1 includes a plurality of semiconductor processing devices 2, a plurality of load ports 3 (item loading devices), a ceiling rail 4 (track), a plurality of ceiling transport vehicles 5 that travel on the ceiling rail 4 to transport containers F1 (items, FIG. 2), and an automatic transport vehicle 7.

[0011] The ceiling rail 4 is provided at a position spaced above the floor, specifically near the ceiling.

[0012] The overhead transport vehicle 5 travels along ceiling rails 4 and transports the container F1 within or between semiconductor processing steps. Each of the multiple overhead transport vehicles 5 is configured to receive a transport command from a host controller (not shown) that manages the transport facility 1 and execute a task in accordance with the transport command. For example, the transport command includes information on the container's origin and destination. Upon receiving the transport command, the overhead transport vehicle 5 transports the container F1 from the origin to the destination. The origin and destination include multiple semiconductor processing equipment 2 (specifically, load ports 3) and automated transport vehicles 7 (described below) located at stations 6 (described below).

[0013] The ceiling transport vehicle 5 is a known technology and has a traveling mechanism, a transfer mechanism, and a lifting mechanism. The transfer mechanism picks up the container F1 placed on the load port 3 for transport by the traveling mechanism, and transfers the container F1 by placing the container F1 transported by the traveling mechanism on the load port 3. The lifting mechanism has a lifting device and multiple lifting belts and lifts and lowers the transfer mechanism.

[0014] The plurality of semiconductor processing equipment 2 are provided along the ceiling rail 4, and specifically, are arranged below the ceiling rail 4. The semiconductor processing equipment 2 may be equipment that performs pre-processing such as thin film formation, photolithography, or etching, or may be equipment that performs post-processing such as dicing, die attach, or wire bonding.

[0015] The load port 3 is disposed adjacent to the semiconductor processing equipment 2. The load port 3 functions as an entrance for carrying substrates such as wafers and panels from the container F1 into the semiconductor processing equipment 2.

[0016] The ceiling transport vehicle 5 transfers the container F1 between the load port 3 by raising and lowering the container F1.

[0017] The container F1 may be, for example, a substrate container (a so-called FOUP: Front Opening Unified Pod) that contains substrates (such as wafers or panels), or a reticle container (a so-called reticle pod) that contains reticles. The FOUP may contain, for example, a 600 mm x 600 mm panel, weighing, for example, 50 to 90 kg.

[0018] The transport facility 1 has an extra-orbital semiconductor processing device 8 and an extra-orbital load port 9 located at a position other than below the ceiling rail 4. Although only one combination of the extra-orbital semiconductor processing device 8 and the extra-orbital load port 9 is shown in Fig. 1, a plurality of combinations are actually provided. The positions of the extra-orbital semiconductor processing device 8 and the extra-orbital load port 9 are not limited.

[0019] (2) Overview of Automated Guided Vehicles A plurality of automated guided vehicles 7 are arranged in the conveyance facility 1. The automated guided vehicles 7 are unmanned vehicles that carry articles within a facility such as a factory or warehouse and run on battery power.

[0020] The directions of the automated guided vehicle 7 will be described using Figure 2. In the following description, the X1 direction, Y1 direction, and Z1 direction are directions that are perpendicular to one another. Specifically, the X1 direction, Y1 direction, and Z1 direction are directions based on the automated guided vehicle 7. The X1 direction is a horizontal direction and is the front-to-rear direction of the automated guided vehicle 7. The front-to-rear direction is, for example, the traveling direction of the automated guided vehicle. The Y1 direction is a horizontal direction and is a direction (left-right direction) that is perpendicular to the X1 direction. Z1 is a vertical direction (up-down direction).

[0021] Each of the multiple automated guided vehicles 7 is configured to receive a transport command from a host controller (not shown) that manages the transport equipment 1 or from the ceiling guided vehicle 5, and to execute a task in accordance with the transport command. For example, the transport command includes information on the origin and destination of the container F1. Upon receiving the transport command, the automated guided vehicle 7 transports the container F1 from the origin to the destination. The origin and destination include an off-rail semiconductor processing equipment 8 (specifically, an off-rail load port 9) and a station 6 (described below). In this case, the automated guided vehicle 7 transports the container F1 by traveling between the off-rail load port 9 and the station 6, as shown in FIG. 1 . Furthermore, the automated guided vehicle 7 can also transport the container F1 by traveling between the load port 3 and the off-rail load port 9, as shown in FIG. 1 .

[0022] In this embodiment, the automated guided vehicle 7 receives the container F1 from the overhead guided vehicle 5 at station 6, moves to the off-rail load port 9, and hands over the container F1 to the off-rail load port 9. Conversely, the automated guided vehicle 7 receives the container F1 from the off-rail load port 9, then moves to station 6 and waits for the overhead guided vehicle 5 to receive the container F1.

[0023] The automated guided vehicle 7 is, for example, an autonomous mobile robot (AMR) that travels autonomously using advanced sensors such as LIDAR (Light Detection and Ranging). The automated guided vehicle 7 may also be an automated guided vehicle (AGV) that travels along wires, magnets, tape, or marked lines embedded in the floor. In this embodiment, an autonomous mobile robot (AMR) is used as the automated guided vehicle 7, which allows for more flexible transport of articles from the ceiling guided vehicle to the article mounting device.

[0024] (3) The station transport equipment 1 further includes a plurality of stations 6. The stations 6 are located below the ceiling rails 4 and are spaces where the automated guided vehicles 7 can stop. The ceiling transport vehicle 5 can transfer the container F1 transported by the traveling mechanism by placing it on the automated guided vehicle 7 stopped at the station 6. Furthermore, the ceiling transport vehicle 5 can pick up the container F1 loaded on the automated guided vehicle 7 stopped at the station 6 for transport by the traveling mechanism.

[0025] As shown in FIGS. 5 to 7 , a fence 61 is provided around the station 6. FIGS. 5 to 7 are perspective, front, and plan views of an automated guided vehicle parked at the station. The fence 61 is a wall for preventing or restricting workers from entering the station 6. The fence 61 includes a first wall 62 and a pair of second walls 63 extending from both ends of the first wall 62 to the same side. The first wall 62 and the pair of second walls 63 are linear in a plan view. In a plan view, the first wall 62 and the pair of second walls 63 are each at an angle of 90 degrees. With the above structure, the automated guided vehicle 7 can access the station 6 only from one location where the fence 61 is not provided. The shape and material of the fence 61 are not particularly limited as long as it blocks at least one side of the automated guided vehicle 7 parked at the station 6 and restricts workers from entering the station 6.

[0026] (4) Details of the Automated Guided Vehicle The automated guided vehicle 7 will be described in detail with reference to Fig. 2. Fig. 2 is a perspective view of the automated guided vehicle.

[0027] The automatic guided vehicle 7 mainly has a running section 11 , a container placement section 12 (article placement section), and an opening / closing section 13 .

[0028] The traveling unit 11 has a main body 21 that houses a motor and a battery, and wheels 22 that are driven by power from the motor.

[0029] The container mounting unit 12 is mounted on the travel unit 11. The container mounting unit 12 is a structure for supporting the container F1 from below. The container mounting unit 12 includes a mounting unit main body 24 and a mounting member 25. The mounting member 25 is provided above the mounting unit main body 24 and includes a container mounting surface 26 ( FIG. 5 ). The container mounting surface 26 is provided with kinematic pins (not shown) that serve as positioning pins for positioning the container F1, and a seating sensor 27 ( FIG. 3 ) that detects whether the container F1 is positioned and placed on the container mounting surface 26. Note that a battery (not shown) for driving a transfer mechanism 31 (described below) and an opening / closing mechanism 35 (described below) may be disposed within the mounting member 25.

[0030] A horizontal movement mechanism 28 ( FIG. 3 ) is provided between the travel section 11 and the mounting section main body 24. The horizontal movement mechanism 28 is capable of moving the container mounting section 12 in the horizontal direction relative to the travel section 11. The horizontal movement mechanism 28 has, for example, an XY stage. The horizontal movement mechanism 28 may be configured to move the container mounting surface 26, which is part of the container mounting section 12, in the horizontal direction relative to the travel section 11. The horizontal movement mechanism 28 may be provided on the mounting member 25.

[0031] An X1-direction distance sensor 29 and a Y1-direction distance sensor 30 (sensors, FIGS. 3 and 7) are provided on the outer circumferential surface of the mounting unit main body 24. The X1-direction distance sensor 29 is a sensor for measuring the distance to the second wall 63 of the fence 61. The Y1-direction distance sensor 30 is a sensor for measuring the distance to the first wall 62 of the fence 61. Both sensors have a laser light emitter and a laser light receiver. The distance sensors may also use ultrasonic waves. Although FIG. 7 illustrates one X1-direction distance sensor 29 and one Y1-direction distance sensor 30, it is preferable to provide multiple X1-direction distance sensors 29 and multiple Y1-direction distance sensors 30 in order to improve the accuracy of the stopping position and stopping orientation of the automated guided vehicle 7.

[0032] The automated guided vehicle 7 has four pillars 32. The pillars 32 stand upright at the four corners of the top surface of the mounting unit main body 24. The pillars 32 each have a built-in lifting mechanism 33, and the upper end portion thereof is movable in the vertical direction. The lifting mechanism 33 has, for example, a cylinder. The lifting mechanism 33 may be a rack and pinion, a ball screw, or any other lifting mechanism.

[0033] The opening / closing unit 13 is a structure provided above the container mounting unit 12. The opening / closing unit 13 is movable between a first position ( FIGS. 2 and 8 ) directly above the container mounting unit 12 and a second position ( FIG. 9 ) away from directly above the container mounting unit 12. When the opening / closing unit 13 is in the first position, the top of the container mounting unit 12 is closed. When the opening / closing unit 13 is in the second position, the top of the container mounting unit 12 is open. Therefore, in the automatic guided vehicle 7, when the opening / closing unit 13 is in the second position, the container F1 can be transferred from directly above onto the container mounting unit 12. In other words, the automatic guided vehicle 7 can directly receive the container F1 from the ceiling guided vehicle 5.

[0034] Specifically, the opening / closing unit 13 is supported by a hinge (not shown) so as to be able to swing freely relative to a pillar 32, and is horizontal in a first position and upright in a second position. The rotation axis of the hinge extends in the X1 direction. The opening / closing unit 13 is moved from the first position to the second position and from the second position to the first position by an opening / closing mechanism 35 (FIG. 3). The opening / closing mechanism 35 is a well-known technology and includes an electric cylinder and a link mechanism.

[0035] The opening / closing unit 13 has a transfer mechanism 31. When the opening / closing unit 13 is in the first position, the transfer mechanism 31 transfers the container F1 between the container mounting unit 12 and the load port 3 by lifting the container F1 and moving it laterally. Here, "lateral" refers to a direction including the front-to-rear direction (X1 direction) and the left-to-right direction (Y1 direction) of the automated guided vehicle 7, as well as the horizontal direction. In this embodiment, the transfer mechanism 31 transfers the container F1 between the container mounting unit 12 and the load port 3 by lifting the container F1 and moving it laterally. Specifically, the transfer mechanism 31 mainly has a fixed plate 41, a first movable plate 42, a second movable plate 43, and a gripping plate 44.

[0036] The fixed plate 41 is placed on the upper ends of the four pillars 32. The fixed plate 41 has a U-shape in plan view, with one side open in the Y1 direction. The fixed plate 41 is connected to the pillars 32. The first moving plate 42 is disposed above the fixed plate 41. The first moving plate 42 is disposed above the fixed plate 41. The first moving plate 42 has a U-shape in plan view, with one side open in the Y1 direction. The second moving plate 43 is disposed above the first moving plate 42. The second moving plate 43 has a hollow rectangular shape in plan view, with an open center. The gripping plate 44 is disposed below the fixed plate 41. The gripping plate 44 is connected to the second moving plate 43 by a connecting member 45. This allows the gripping plate 44 to move integrally with the second moving plate 43. A gripping mechanism 36 ( FIG. 9 ) is provided on the underside of the gripping plate 44. The gripping mechanism 36 is a mechanism for gripping the container F1, and has a claw portion and a drive mechanism for moving the claw portion laterally.

[0037] The first moving plate 42 is supported by a first slide mechanism 46 (FIG. 17) so as to be movable in the Y1 direction relative to the fixed plate 41. The second moving plate 43 is supported by a second slide mechanism 47 (FIG. 17) so as to be movable in the Y1 direction relative to the first moving plate 42. The first slide mechanism 46 and the second slide mechanism 47 each include a linear drive mechanism and a linear guide. The linear drive mechanism is, for example, a ball screw mechanism. The linear drive mechanism may also include a linear guide groove, a rack and pinion, or a chain and sprocket.

[0038] The first slide mechanism 46 and the second slide mechanism 47 are driven independently by two motors, or may be driven in conjunction with one motor.

[0039] The opening / closing unit 13 has a counterweight 52. The counterweight 52 allows the transfer mechanism 31 to balance the container F1 when transferring it from the container placement unit 12 to the load port 3. Therefore, the automated guided vehicle 7 is less likely to tip over when transferring the container F1. In this embodiment, the counterweight 52 is particularly provided on the opening / closing unit 13, which can sufficiently cancel out the rotational moment acting in the transfer direction. Generally, when an item is held by a mechanism on the upper part of the automated guided vehicle, the center of gravity becomes higher, and the moment arm (the distance from the center of rotation to the center of gravity) on which gravity acts becomes longer. Furthermore, since a container moves in the transfer direction and generates a large rotational moment, the automated guided vehicle may be more likely to tip over. In particular, the above problem has become a concern in recent years as FOUPs have become larger and heavier due to the increasing size of wafers and panels. In this embodiment, the above problem is eliminated or reduced.

[0040] The counterweight 52 is supported by a weight slide mechanism 53 so as to be movable in the Y1 direction relative to the fixed plate 41. The moving side of the counterweight 52 in the Y1 direction is opposite to the moving sides of the first moving plate 42 and the second moving plate 43. The weight slide mechanism 53 is composed of a linear drive mechanism and a linear guide.

[0041] As shown in FIG. 13 , a synchronous movement mechanism 54 is provided to synchronize the transfer mechanism 31 and the weight slide mechanism 53. FIG. 13 is a perspective view showing a portion of a synchronous drive system for the transfer mechanism. The synchronous movement mechanism 54 synchronously moves the counterweight 52 in the direction opposite to the direction of movement of the container F1 as the transfer mechanism 31 transfers the container F1 from the container mounting section 12 to the load port 3. Specifically, as shown in FIG. 13 , the synchronous movement mechanism 54 has a main gear 72 fixed to the shaft 71 of one motor (not shown), a first driven gear 74 meshing with the main gear 72, and a second driven gear 76 meshing with the main gear 72. The first driven gear 74 is connected to the shaft 73 of the transfer mechanism 31. The second driven gear 76 is connected to the shaft 75 of the weight slide mechanism 53. As a result, the transfer mechanism 31 and the weight slide mechanism 53 are driven simultaneously. In this embodiment, the container F1 and the counterweight 52 are set to have the same moving speed, moving start time, and moving end time. However, synchronous movement means that the container F1 and the counterweight 52 move in opposite directions for at least a certain period of time, and the moving speed, moving start time, and moving end time may be different.

[0042] As a modification of the synchronous movement mechanism, the transfer mechanism and the weight slide mechanism may have separate motors, and the controller 50 (described later) may drive both motors simultaneously.

[0043] (5) Control Configuration of Automated Guided Vehicle The control configuration of the automated guided vehicle 7 will be described using FIG. 3. FIG. 3 is a block diagram showing the control configuration of the automated guided vehicle 7. The conveying facility 1 has a controller 50 that controls the automated guided vehicle 7. In this embodiment, the automated guided vehicle 7 has the controller 50.

[0044] The controller 50 is a computer system having a processor (e.g., a CPU), a storage device (e.g., a ROM, a RAM, a HDD, an SSD, etc.), and various interfaces (e.g., an A / D converter, a D / A converter, a communication interface, etc.) The controller 50 as a control unit performs various control operations by executing programs stored in a storage unit (corresponding to part or all of the storage area of ​​the storage device).

[0045] The controller 50 may be configured with a single processor, or may be configured with multiple independent processors for each control.

[0046] Some or all of the functions of each element of the controller 50 may be realized as a program that can be executed by a computer system that constitutes the controller 50. Alternatively, some of the functions of each element of the controller 50 may be configured by a custom IC.

[0047] Although not shown, the controller 50 has a means for transmitting and receiving data to and from a higher-level controller, by which it receives transport commands from the higher-level controller and reports the transport results and the current position to the higher-level controller.

[0048] 3, the controller 50 can drive the actuators of the traveling section 11, the opening / closing mechanism 35, the gripping mechanism 36, the transfer mechanism 31, the lifting mechanism 33, and the horizontal movement mechanism 28 by transmitting control signals to these. Furthermore, the controller 50 can receive detection signals from the seating sensor 27, the X1-direction distance sensor 29, and the Y1-direction distance sensor 30.

[0049] (6) Operation of transferring a FOUP from an overhead guided vehicle to an automated guided vehicle The operation of transferring a FOUP from an overhead guided vehicle to an automated guided vehicle will be described with reference to Fig. 4. Fig. 4 is a flowchart illustrating the control of transferring a container from an overhead guided vehicle to an automated guided vehicle.

[0050] The control flowcharts described below are merely examples, and steps can be omitted or replaced as necessary. Furthermore, multiple steps can be executed simultaneously, or some or all of the steps can be executed in an overlapping manner.

[0051] Furthermore, each block in the control flowchart is not limited to a single control operation, but can be replaced with a plurality of control operations represented by a plurality of blocks.

[0052] The operation of each device is the result of commands from the controller 50 to each device, and these are expressed by steps of the software application.

[0053] In step S1, the automated guided vehicle 7 travels to a designated station 6 as shown in FIGS. 5 to 7 based on a command from a host controller (not shown).

[0054] The stopping orientation of the automated guided vehicle 7 at the station 6 will now be described. As shown in Figures 5 to 7, the Y1 direction, which is the left-right direction of the automated guided vehicle 7, faces the first wall 62, and the X1 direction, which is the front-rear direction, faces the pair of second walls 63. In other words, the Y1 direction is parallel to the pair of second walls 63, and the X1 direction is parallel to the first wall 62.

[0055] In step S2, the container mounting unit 12 is positioned relative to the traveling unit 11. Specifically, after the traveling unit 11 first stops at the station 6, the X1-direction distance sensor 29 and the Y1-direction distance sensor 30 measure the distance between the container mounting unit 12 and the fence 61. In this measurement, the controller 50 (mounting unit positioning control unit) transmits laser drive signals to the X1-direction distance sensor 29 and the Y1-direction distance sensor 30, causing the light-emitting units of these sensors to emit lasers, as shown in FIGS. 6 and 7 . The controller 50 also receives detection signals from the light-receiving units of these sensors. Based on the time from when the laser light is emitted until the reflected light is received, the controller 50 calculates the distance between the X1-direction distance sensor 29 and the second wall 63 and the distance between the Y1-direction distance sensor 30 and the first wall 62.

[0056] Next, the controller 50 drives the horizontal movement mechanism 28 based on the distance to move the container placement unit 12 relative to the travel unit 11. That is, after the automated guided vehicle 7 moves to the station 6, the X1-direction distance sensor 29, the Y1-direction distance sensor 30, and the controller 50 adjust the position of the container placement unit 12 relative to the travel unit 11. As a result, the positional accuracy of the container placement unit 12 is improved. When transferring a container F1 to or from the ceiling guided vehicle 5, the movement distance of the transfer mechanism of the ceiling guided vehicle 5 is long, so high positioning accuracy may be required on the container placement unit side. Meanwhile, there is a limit to the positioning accuracy based on the stop position control of the automated guided vehicle 7 having the travel unit 11. According to this embodiment, after the automated guided vehicle 7 stops based on the destination information, the horizontal movement mechanism 28 further adjusts the position of the container placement unit 12, thereby positioning the container placement unit 12 with high accuracy.

[0057] In step S3, the opening / closing unit 13 moves from the first position shown in Fig. 8 to the second position shown in Fig. 9 (i.e., the opening / closing unit 13 is opened). Specifically, the controller 50 drives the opening / closing mechanism 35 to perform the above operation. Fig. 8 is a perspective view of the automated guided vehicle when the opening / closing unit is in the first position. Fig. 9 is a perspective view of the automated guided vehicle when the opening / closing unit is in the second position.

[0058] In step S4, as shown in FIG. 9 , the controller 50 waits for the container F1 to be transferred from the ceiling transport vehicle 5 to the container placement section 12. Specifically, the controller 50 waits for a detection signal from the seating sensor 27. Once the container F1 has been transferred to the container placement section 12, as shown in FIGS. 10 and 11 , the process proceeds to step S5. FIG. 10 is a perspective view of the automatic guided vehicle when a container is being transferred from the ceiling transport vehicle to the automatic guided vehicle. FIG. 11 is a perspective view of the automatic guided vehicle and the ceiling transport vehicle when a container is being transferred from the ceiling transport vehicle to the automatic guided vehicle. In this manner, the automatic guided vehicle 7 transfers the container F1 between the ceiling transport vehicle 5 and the container placement section 12 with the opening / closing section 13 in the second position. A gap of 10 mm or more is secured between the container F1 and the four pillars 32.

[0059] In step S5, as shown in Fig. 2, the opening / closing unit 13 moves from the second position to the first position (i.e., the opening / closing unit 13 is closed). Specifically, the controller 50 drives the opening / closing mechanism 35 to perform the above operation. This ends the process.

[0060] The operation of transferring the container F1 from the automatic transport vehicle 7 to the ceiling transport vehicle 5 is performed in the reverse order of the above-described operations.

[0061] As described above, the automated guided vehicle 7 of this embodiment is an automated guided vehicle used in the transport facility 1 equipped with the ceiling guided vehicle 5, and the opening / closing unit 13 of the automated guided vehicle 7 moves from the first position to the second position when transferring the container F1 between the ceiling guided vehicle 5 and the automated guided vehicle 7. Specifically, the controller 50 moves the opening / closing unit 13 to the second position when transferring the container F1 between the ceiling guided vehicle 5 and the automated guided vehicle 7.

[0062] (7) Operation of transferring a FOUP from an automated guided vehicle to a load port The operation of transferring a FOUP from an automated guided vehicle to a load port will be described with reference to Fig. 12. Fig. 12 is a flowchart illustrating the control of transferring a container from an automated guided vehicle to a load port.

[0063] In step S6, the automated guided vehicle 7 travels to the designated load port 9 outside the track area based on a command from a higher-level controller (not shown), as shown in Figures 14 and 15. Figure 14 is a front view of the automated guided vehicle stopped in front of the load port. Figure 15 is a perspective view of the automated guided vehicle stopped in front of the load port.

[0064] The stopping position and stopping orientation of the automated guided vehicle 7 will be described. As shown in Figures 14 and 15, the automated guided vehicle 7 is stopped close to the front of the out-of-track load port 9. The X1 direction, which is the front-to-back direction of the automated guided vehicle 7, coincides with the left-to-right direction of the out-of-track load port 9, and the Y1 direction, which is the left-to-right direction of the automated guided vehicle 7, coincides with the front-to-back direction of the out-of-track load port 9. In this state, the transfer mechanism 31 transfers the container F1 between itself and the out-of-track load port 9 by moving the container F1 in the Y1 direction (the intersecting direction that intersects the front-to-back direction).

[0065] As mentioned above, the automated guided vehicle 7 is located close to the front of the off-rail load port 9. Therefore, as shown in Figure 14, one side in the Y1 direction of the opening / closing section 13 of the automated guided vehicle 7 is located above one side in the Y1 direction of the loading surface 91 of the off-rail load port 9 (the two overlap in plan view). This structure allows the automated guided vehicle 7 to be located close to the off-rail load port 9, reducing the travel and stopping space for the automated guided vehicle 7.

[0066] As shown in FIG. 14 , in the automated guided vehicle 7, the Y1-direction centers of the container placement unit 12 and the opening / closing unit 13 are offset from the Y1-direction center of the travel unit 11 to the side opposite the out-of-track load port 9. The multiple pillars 32 are also positioned offset from the Y1-direction center of the travel unit 11 to the side opposite the out-of-track load port 9. This configuration positions the center of gravity of the automated guided vehicle 7 as a whole away from the out-of-track load port 9. As a result, the automated guided vehicle 7 is less likely to tip toward the out-of-track load port 9 during the transfer operation described below. The above configuration may be implemented by the horizontal movement mechanism 28 before or after the automated guided vehicle 7 has stopped. In this case, the horizontal movement mechanism 28 functions as a center-of-gravity movement mechanism. As a variant, the above configuration may be permanent.

[0067] In step S7, the gripping mechanism 36 grips the container F1.

[0068] In step S8, the lifting mechanism 33 lifts the container F1. Specifically, the lifting mechanism 33 lifts the columns 32 and the gripping plate 44, which lifts the container F1. As a result, the bottom of the container F1 disengages from the kinematic pins (not shown) of the container mounting surface 26.

[0069] In step S9, as shown in Figures 16 and 17, the transfer mechanism 31 moves the container F1 toward the load port 9 outside the orbital region. Specifically, first, the second moving plate 43 moves relative to the first moving plate 42 as shown in Figure 16, and then the first moving plate 42 moves relative to the fixed plate 41 as shown in Figure 17. Figure 16 is a perspective view showing a first state in which the transfer mechanism moves the FOUP toward the load port. Figure 17 is a perspective view showing a second state in which the transfer mechanism moves the FOUP toward the load port.

[0070] In step S10, the synchronous movement mechanism 54 (FIG. 13) synchronously moves the counterweight 52 in the direction opposite to the direction in which the container F1 is moving, as shown in FIGS. 16 and 17. Step S10 is performed simultaneously with step S9. Since the counterweight 52 is synchronously moved in the direction opposite to the container transfer direction in this manner, the rotational moment acting in the container transfer direction can be effectively canceled out. Note that all or some of the operations in steps S10 and S9 may be performed simultaneously.

[0071] In step S11, the lifting mechanism 33 lowers the container F1, so that the container F1 is placed on the placement surface 91 of the extra-orbital load port 9.

[0072] In step S12, the gripping mechanism 36 releases the container F1.

[0073] In step S13, the transfer mechanism 31 moves away from the out-of-orbit load port 9. Specifically, the first moving plate 42, the second moving plate 43, and the gripping plate 44 return to above the container mounting part 12. This ends the process.

[0074] The operation of transferring the container F1 from the load port 9 outside the track area to the ceiling transport vehicle 5 is performed in the reverse order of the above-mentioned operations.

[0075] As described above, the automated guided vehicle 7 of this embodiment is an automated guided vehicle used in the transport facility 1 that includes the ceiling guided vehicle 5 and the out-of-rail load port 9, and the opening / closing unit 13 of the automated guided vehicle 7 moves from a first position to a second position when transferring a container F1 between the ceiling guided vehicle 5 and the automated guided vehicle 7, and the transfer mechanism 31 transfers the container F1 between the automated guided vehicle 7 and the out-of-rail load port 9 while the opening / closing unit 13 is in the first position. Specifically, the controller 50 controls the opening / closing unit 13 to move to the second position when transferring a container F1 between the ceiling guided vehicle 5 and the automated guided vehicle 7, and controls the transfer mechanism 31 to transfer the container F1 between the automated guided vehicle 7 and the out-of-rail load port 9 while the opening / closing unit 13 is in the first position.

[0076] 2. Second Embodiment A second embodiment will be described using Fig. 18. Fig. 18 is a perspective view of an automated guided vehicle according to a second embodiment of the present invention. Note that the basic configuration and basic operation of the second embodiment are the same as those of the first embodiment, and therefore the following description will focus on the differences.

[0077] Unlike the first embodiment, the automated guided vehicle 7A has a weight member 55 for positioning the center of gravity of the automated guided vehicle 7A on the side opposite the out-of-rail load port 9. The weight member 55 is provided on the upper part of the automated guided vehicle 7A on the side opposite the out-of-rail load port 9. Specifically, the weight member 55 is two ribs fixed to the upper part of the pillar 32 on the side opposite the out-of-rail load port 9 and to the fixed plate 41.

[0078] The weight member 55 allows the transfer mechanism 31 to maintain balance when transferring the container F1 from the container placement section 12 to the out-of-track load port 9. Therefore, the automated guided vehicle 7 is less likely to tip over when transferring the container F1. In particular, in this embodiment, the weight member 55 is provided on the top of the automated guided vehicle 7A, so that the rotational moment acting in the transfer direction can be sufficiently counteracted.

[0079] The shape, material, number and attachment position of the weight member are not particularly limited.

[0080] 3. Third Embodiment A third embodiment will be described using Figures 19 and 20. Figure 19 is a front view of an automated guided vehicle (stopped) according to the third embodiment of the present invention. Figure 20 is a front view of an automated guided vehicle (during transport) according to the third embodiment of the present invention. Note that the basic configuration and basic operation of the third embodiment are the same as those of the first embodiment, so the following description will focus on the differences.

[0081] The container placing part 12B is mounted on the traveling part 11. The container placing part 12B is a structure for supporting the container F1 from below. The container placing part 12B has a function of raising and lowering the container F1.

[0082] The container mounting unit 12B is a pair of pantograph mechanisms and includes a base 81, a lift table 82, and a pair of crossed link arms 83. The container mounting unit 12B includes an actuator (not shown) for raising and lowering the pantograph. The actuator is, for example, a motor.

[0083] The base 81 is located below the pantograph mechanism. The lift table 82 is located above the pantograph mechanism and has a container placement surface. A pair of link arms 83 are rotatably connected by a hinge.

[0084] As shown in FIG. 19, when the container F1 is transferred to the load port, the container placement section 12B places the container F1 at a high position.

[0085] As shown in Figure 20, when the automated guided vehicle 7B is traveling, the container placement unit 12B places the container F1 at a low position. This lowers the center of gravity of the automated guided vehicle 7B while it is traveling, thereby stabilizing its travel. Note that the lifting mechanism for the container placement unit 12B may be a type other than a pantograph.

[0086] 4. Other Embodiments and Modifications Although several embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the spirit of the invention. In particular, the several embodiments and modifications described in this specification can be arbitrarily combined as necessary.

[0087] (1) Modification of Load Port The automated guided vehicle may transfer containers between the automated guided vehicle and a load port provided in the semiconductor processing equipment within the track.

[0088] The automated guided vehicle may transfer containers to and from load ports of the automated warehouse.

[0089] (2) Modifications of the Opening and Closing Mechanism The opening and closing mechanism may swing the opening and closing member by 90 degrees or more from the first position to the second position. The opening and closing mechanism may move the opening and closing member from the first position to the second position by sliding it laterally.

[0090] (3) Modifications of the Transfer Mechanism The transfer mechanism may be a mechanism in which one member extends laterally, or a mechanism in which three or more members extend laterally. The order in which the multiple members of the transfer mechanism start moving is not particularly limited. The multiple members may be moved simultaneously.

[0091] (4) Modifications of the Counterweight The counterweight does not have to be provided. The counterweight may be immovably fixed to, for example, a fixed plate of the opening / closing unit.

[0092] According to the above-described embodiment, the following effects are achieved.

[0093] (1) An automated guided vehicle travels on a floor surface. The automated guided vehicle includes a travel unit, an article placement unit, and an opening / closing unit. The opening / closing unit is provided above the article placement unit and is movable between a first position directly above the article placement unit and a second position away from directly above the article placement unit.

[0094] According to (1), when the opening / closing unit is in the second position, the automated guided vehicle can transfer an article onto the article loading unit from directly above. Therefore, the automated guided vehicle can receive an article directly from, for example, an overhead transport vehicle, and then transport the article to the article loading device.

[0095] (2) In the automated guided vehicle of (1), when the opening / closing section is in the second position, the item is transferred between the ceiling guided vehicle running along a track provided on the ceiling and the item loading section.

[0096] According to (2), when the opening / closing unit is in the second position, the automated guided vehicle can transfer an article onto the article loading unit from directly above. Therefore, the automated guided vehicle can receive an article directly from, for example, an overhead transport vehicle, and then transport the article to the article loading device.

[0097] (3) In the automated guided vehicle of (1) or (2), the opening / closing section has a transfer mechanism. The transfer mechanism transfers the article between the article placement section and the article placement device by lifting the article and moving it laterally.

[0098] According to (3), in an automated guided vehicle, when the opening / closing section is in the second position, in addition to transferring an item from directly above to the item loading section, when the opening / closing section is in the first position, for example, the transfer mechanism can transfer an item to the item loading device.

[0099] (4) In the automated guided vehicle of (3), the opening / closing unit has a counterweight. The counterweight is a member for balancing when the transfer mechanism transfers the article from the article placement unit to the article placement device.

[0100] According to (4), the counterweight can balance the load-transfer mechanism when transferring the item from the item placement section to the item placement device. Therefore, the automated guided vehicle is less likely to tip over when transferring an item. In this invention, the counterweight is provided in the opening / closing section, so that the rotational moment acting in the transfer direction can be sufficiently counteracted. Generally, when an item is held by a mechanism on the upper side of an automated guided vehicle, the center of gravity becomes higher, and the moment arm (the distance from the center of rotation to the center of gravity) on which gravity acts becomes longer. Furthermore, when an item moves in the transfer direction, a large rotational moment is generated, making the automated guided vehicle more likely to tip over.

[0101] (5) In the automated guided vehicle of (4), the opening / closing section has a synchronous movement mechanism that synchronously moves the counterweight in a direction opposite to the direction of movement of the article when the transfer mechanism transfers the article from the article placement section to the article placement device.

[0102] According to (5), the counterweight is moved synchronously in the opposite direction to the article moving direction, so that the rotational moment acting in the loading / unloading direction can be effectively canceled. In other words, as the rotational moment acting in the loading / unloading direction increases, the rotational moment acting in the opposite direction can be increased.

[0103] (6) In the automated guided vehicle of (3), the automated guided vehicle further includes a weight member for positioning the center of gravity of the automated guided vehicle on the side opposite the article placement device.

[0104] According to (6), the weight member makes it difficult for the automated guided vehicle to tip over when transferring an article. In other words, the weight member can sufficiently cancel out the rotational moment acting in the transfer direction.

[0105] (7) A transport facility includes the automated guided vehicle of (1) to (6), an overhead transport vehicle, and a station. The overhead transport vehicle travels along a track provided on the ceiling to transport an article. The station is located below the track and allows the automated guided vehicle to stop. The overhead transport vehicle transfers the article to the article placement section of the automated guided vehicle that is stopped at the station and has the opening / closing section in a second position.

[0106] According to (7), in the transport facility, when the opening / closing unit of the automated guided vehicle is in the second position, an article can be transferred onto the article loading unit from directly above. Therefore, the automated guided vehicle can receive the article directly from the ceiling guided vehicle and then transport the article to the article loading device.

[0107] (8) In the conveying equipment of (7), the automatic guided vehicle stops near the item loading device, and with the opening / closing section in the first position, the transfer mechanism transfers the item between the item loading device and the automatic guided vehicle.

[0108] According to (8), the automated guided vehicle can transport the article transferred from the ceiling guided vehicle to the article placement device and transfer it onto the article placement device.

[0109] (9) The transport facility of (7) or (8) further includes a fence that blocks at least one side of the automated transport vehicle stopped at the station.

[0110] According to (9), the fence ensures the safety of workers.

[0111] (10) In the conveying facility of (9), the automated guided vehicle further includes a horizontal movement mechanism, a sensor, and a placement unit positioning control unit. The horizontal movement mechanism is capable of moving the article placement unit horizontally relative to the traveling unit. The sensor measures the distance between the article placement unit and the fence after the traveling unit stops at the station. The placement unit positioning control unit drives the horizontal movement mechanism based on the distance to move the article placement unit relative to the traveling unit.

[0112] According to (10), after the automated guided vehicle moves to the station, the position of the article placement unit is adjusted relative to the traveling unit by the measuring unit and the article positioning and transfer control unit, thereby improving the positional accuracy of the article placement unit.

[0113] (11) A transport facility includes the automated guided vehicle of (1) to (6), a ceiling transport vehicle, a station, and an article loading device. The automated guided vehicle stops at the station and transfers the article to and from the ceiling transport vehicle with the opening / closing unit in a second position, and the automated guided vehicle stops near the article loading device with the opening / closing unit in a first position, and the transfer mechanism transfers the article to and from the article loading device.

[0114] According to (11), the automated guided vehicle can transport the article transferred from the ceiling guided vehicle to the article placement device and transfer it onto the article placement device.

[0115] (12) An automated guided vehicle that travels on the floor and is used in a transport facility equipped with a ceiling transport vehicle that travels along a track installed on the ceiling to transport items, wherein the automated guided vehicle comprises a running section, an item placement section, and an opening / closing section that is installed above the item placement section and is movable between a first position directly above the item placement section and a second position that is not directly above the item placement section, and the opening / closing section moves from the first position to the second position when transferring the item between the ceiling transport vehicle and the automated guided vehicle.

[0116] (13) An automated guided vehicle that travels on the floor and is used in a transport facility that includes a ceiling-mounted transport vehicle that travels along a track installed on the ceiling to transport items, and an item loading device, wherein the automated guided vehicle includes a running section, an item loading section, and an opening / closing section that is installed above the item loading section and is movable between a first position directly above the item loading section and a second position away from directly above the item loading section, and the opening / closing section has a transfer mechanism that transfers items between the item loading section and the item loading device, and the opening / closing section moves from the first position to the second position when transferring the items between the ceiling-mounted transport vehicle and the automated guided vehicle, and the transfer mechanism transfers the items between the automated guided vehicle and the item loading device while the opening / closing section is in the first position.

[0117] (14) An automated guided vehicle that travels on the floor and is used in a transport facility that includes a ceiling guided vehicle that travels along a track installed on the ceiling to transport items, and a control unit (processor), wherein the automated guided vehicle includes a running unit, an item loading unit, and an opening / closing unit that is installed above the item loading unit and is movable between a first position directly above the item loading unit and a second position that is not directly above the item loading unit, and the control unit (processor) moves the opening / closing unit to the second position when transferring the item between the ceiling guided vehicle and the automated guided vehicle.

[0118] (15) An automated guided vehicle that travels on the floor and is used in a transport facility that includes a ceiling-mounted transport vehicle that travels along a track on the ceiling to transport items, an item placement device, and a control unit (processor), wherein the automated guided vehicle includes a running unit, an item placement unit, and an opening / closing unit that is provided above the item placement unit and is movable between a first position directly above the item placement unit and a second position away from directly above the item placement unit, and the opening / closing unit has a transfer mechanism that transfers items between the item placement unit and the item placement device, and the control unit (processor) controls the opening / closing unit to move to the second position when transferring the items between the ceiling-mounted transport vehicle and the automated guided vehicle, and when the opening / closing unit is in the first position, controls the transfer mechanism to transfer the items between the automated guided vehicle and the item placement device.

[0119] (16) An automated guided vehicle includes a travel unit, an article placement unit, a transfer mechanism, and a counterweight. The transfer mechanism transfers an article between the article placement unit and an article placement device by lifting the article and moving it laterally. The counterweight is a member for maintaining balance when the transfer mechanism transfers the article from the article placement unit to the article placement device.

[0120] According to (16), the counterweight can balance the load when the transfer mechanism transfers the item from the item placement section to the item placement device. Therefore, the automatic guided vehicle is less likely to tip over when transferring the item.

[0121] (17) A transport facility includes an automated guided vehicle, an overhead guided vehicle, and a station. The automated guided vehicle includes a traveling section and an article placement section. The station has a fence. The automated guided vehicle further includes a horizontal movement mechanism that can move the article placement section horizontally relative to the traveling section, a sensor that measures the distance between the article placement section and the fence after the traveling section stops at the station, and a placement section positioning control section that drives the horizontal movement mechanism based on the distance to move the article placement section relative to the traveling section.

[0122] According to (17), after the automated guided vehicle moves to the station, the position of the article placement unit is adjusted relative to the traveling unit by the measuring unit and the article positioning and transfer control unit. As a result, the positional accuracy of the article placement unit is improved.

[0123] DESCRIPTION OF SYMBOLS 1: Transport equipment 2: Semiconductor processing equipment 3: Load port (article placement device) 4: Ceiling rail (track) 5: Ceiling transport vehicle 6: Station 7: Automatic transport vehicle 7A: Automatic transport vehicle 7B: Automatic transport vehicle 8: Semiconductor processing equipment outside track area 9: Load port outside track area 11: Traveling section 12: Container placement section (article placement section) 12B: Container placement section (article placement section) 13: Opening / closing section 28: Horizontal movement mechanism 29: X1 direction distance sensor (sensor) 30: Y1 direction distance sensor (sensor) 31: Transfer mechanism 35: Opening / closing mechanism 36: Grip mechanism 50: Controller (placement section positioning control section) 52: Counterweight 53: Weight slide mechanism 54: Synchronous movement mechanism 55: Weight member 61: Fence F1 : Container (article)

Claims

1. An automated guided vehicle that travels on a floor surface, comprising: a travel section; an article placement section; and an opening / closing section that is provided above the article placement section and is movable between a first position directly above the article placement section and a second position that is not directly above the article placement section.

2. The automated guided vehicle according to claim 1, wherein, when the opening / closing section is in the second position, an article is transferred between a ceiling guide vehicle running along a track provided on the ceiling and the article loading section.

3. An automated guided vehicle as described in claim 1 or 2, wherein the opening / closing section has a transfer mechanism that transfers an item between the item loading section and the item loading device by moving the item in a lifted state sideways.

4. An automated guided vehicle as described in claim 3, wherein the opening / closing section has a counterweight for balancing when the transfer mechanism transfers the item from the item placement section to the item placement device.

5. The automated guided vehicle of claim 4, wherein the opening / closing section has a synchronous movement mechanism that synchronously moves the counterweight in a direction opposite to the direction in which the item moves when the transfer mechanism transfers the item from the item loading section to the item loading device.

6. The automated guided vehicle according to claim 3, further comprising a weight member for positioning the center of gravity of said automated guided vehicle at a portion opposite said article placement device.

7. A transport facility comprising: an automated guided vehicle according to any one of claims 3 to 6; an overhead transport vehicle that travels along a track provided on the ceiling to transport an article; and a station located below the track at which the automated guided vehicle can stop, wherein the overhead transport vehicle transfers the article to the article loading section of the automated guided vehicle when the automated guided vehicle is stopped at the station and the opening / closing section is in the second position.

8. The conveying equipment according to claim 7, wherein the automated guided vehicle stops near an article loading device, and the transfer mechanism transfers the article between the automated guided vehicle and the article loading device while the opening / closing section is in the first position.

9. The conveying facility according to claim 7 or 8, further comprising a fence that blocks at least one side of the automated guided vehicle stopped at the station.

10. The conveying equipment described in claim 9, wherein the automated guided vehicle further comprises: a horizontal movement mechanism capable of moving the item placement section horizontally relative to the running section; a sensor that measures the distance between the item placement section and the fence after the running section has stopped at the station; and a placement section positioning control section that drives the horizontal movement mechanism based on the distance to move the item placement section relative to the running section.

11. A transport facility comprising: an automated guided vehicle according to any one of claims 3 to 6; a ceiling guided vehicle that travels along a track provided on the ceiling to transport articles; a station located below the track and at which the automated guided vehicle can stop; and an article loading device, wherein the automated guided vehicle stops at the station and, with the opening / closing unit in the second position, transfers the article to and from the ceiling guided vehicle; and the automated guided vehicle stops near the article loading device and, with the opening / closing unit in the first position, the transfer mechanism transfers the article to and from the article loading device.

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