Fluid control device and method for manufacturing fluid control device

Abstract

To achieve the objective of the invention, a fluid control device according to the present technology includes a housing, a drive unit, and an adjustment unit. The housing includes a first member and a second member, the first member including a first elastic part that is an elastic body and the second member including a second elastic part that is an elastic body forming a space in which fluid flows between the first member and the second member. The drive unit is provided to at least one of the first elastic part and the second elastic part and elastically deforms at least one of the first elastic part or the second elastic part. The adjustment unit is provided to at least one of the first elastic part and the second elastic part and adjusts a resonance frequency of at least one of the first elastic part or the second elastic part.

Description

Fluid control device and method for manufacturing the same

[0001] The present technology relates to technologies such as diaphragm pumps.

[0002] Diaphragm pumps using a diaphragm have been put to practical use as compact, thin pumps (see, for example, Patent Document 1 below). In a diaphragm pump, the volume of a pump chamber increases due to bending deformation of the diaphragm, thereby drawing fluid into the pump chamber, and the volume of the pump chamber decreases, thereby discharging fluid from the pump chamber.

[0003] JP 2010-121539 A

[0004] There is a need for technology that can improve the efficiency of driving a fluid control device that uses a diaphragm.

[0005] In view of the above circumstances, an object of the present technology is to provide a technology etc. that can improve the driving efficiency of a fluid control device.

[0006] A diaphragm pump according to the present technology includes a housing, a drive unit, and an adjustment unit. The housing includes a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a space through which a fluid flows between the first member and the second member. The drive unit is provided on at least one of the first elastic portion or the second elastic portion and elastically deforms at least one of the first elastic portion or the second elastic portion. The adjustment unit is provided on at least one of the first elastic portion or the second elastic portion and adjusts the resonance frequency of at least one of the first elastic portion or the second elastic portion.

[0007] In this way, in the present technology, since the adjustment section is provided in at least one of the first elastic section and the second elastic section, it is possible to make the resonance frequencies of the first member and the second member as equal as possible, thereby improving the driving efficiency of the fluid control device.

[0008] The drive section may be provided on the first elastic section, and the adjustment section may be provided on the second elastic section.

[0009] The drive section may be provided on the first elastic section, and the adjustment section may be provided on the first elastic section around the drive section.

[0010] The drive section may be provided on the side of the first elastic section opposite to the space, and the adjustment section may be provided on either the first elastic section or the second elastic section, the side facing the space.

[0011] The adjustment portion may be provided integrally with the first elastic portion or the second elastic portion.

[0012] The housing may further have an intermediate member disposed between the first elastic portion and the second elastic portion to form the space, and the first member may further have a first support member that clamps the first elastic portion between the intermediate member and the first member.

[0013] The first elastic portion may have a first elastic deformation portion provided with the driving portion and elastically deformed by the driving portion, and a first opposing portion provided around the first elastic deformation portion and sandwiched between the intermediate member and the first support member.

[0014] The second member may further include a second support member that sandwiches the second elastic portion between the second support member and the intermediate member.

[0015] The second elastic portion may have a second elastic deformation portion in which the adjustment portion is provided and which elastically deforms, and a second opposing portion provided around the second elastic deformation portion and sandwiched between the intermediate member and the second support member.

[0016] The second elastic deformation portion may have a groove portion that is provided on the space side and recessed along a circular shape when viewed from the first member.

[0017] The first elastic portion may have a discharge hole through which the fluid is discharged, and the second elastic portion may have a suction hole through which the fluid is sucked.

[0018] The driving section may be a piezoelectric element.

[0019] The adjustment portion may be formed by potting.

[0020] The resonant frequency of the fluid control device may be measured, and the amount or shape of the adjustment portion may be adjusted based on the measured resonant frequency.

[0021] The adjustment portion may be ring-shaped.

[0022] The first member may further have a check valve capable of opening and closing the discharge hole, and the check valve may have a reed valve capable of opening and closing the discharge hole, and a spacer provided between the reed valve and the first elastic portion to form a gap between the reed valve and the first elastic portion.

[0023] The first member may further have a check valve capable of opening and closing the discharge hole, the check valve may have a reed valve capable of opening and closing the discharge hole, and the first elastic portion may further have a step portion recessed toward the space at a position opposite the reed valve.

[0024] A plurality of the adjustment portions may be provided on at least one of the first elastic portion and the second elastic portion.

[0025] In order to achieve the above object, a manufacturing method for a fluid control device according to one embodiment of the present technology includes preparing a housing including a first member including a first elastic portion that is an elastic body and a second member including a second elastic portion that is an elastic body that forms a space through which a fluid flows between the first member, a drive unit provided on at least one of the first elastic portion or the second elastic portion and elastically deforming at least one of the first elastic portion or the second elastic portion, and an adjustment unit provided on at least one of the first elastic portion or the second elastic portion and adjusting a resonance frequency of at least one of the first elastic portion or the second elastic portion, and forming the adjustment unit for adjusting the resonance frequency of at least one of the first member or the second member on at least one of the first elastic portion or the second elastic portion.

[0026] The resonant frequencies of the first member and the second member may be measured, and the amount or shape of the adjustment portion may be adjusted based on the measured resonant frequencies, and the adjusted adjustment portion may be formed in at least one of the first elastic portion or the second elastic portion.

[0027] 1 is an exploded perspective view showing a fluid control device according to a first embodiment of the present technology. FIG. 1 is a view showing the fluid control device, where (A) is a view with a portion of the fluid control device exploded, and (B) is a cross-sectional view. FIG. 2 is a view showing a first check valve, where (A) is a perspective view of the first check valve, and (B) is a cross-sectional view of the first check valve. FIG. 3 is a view showing a manufacturing apparatus for a fluid control device. FIG. 4 is a view showing the displacement amount of a fluid control device, where (A) is a view showing the displacement amount of a fluid control device without an adjustment unit, and (B) is a view showing the displacement amount of a fluid control device with an adjustment unit. FIG. 5 is a view showing the impedance and phase angle of a fluid control device, where (A) is a view showing the impedance and phase angle of a fluid control device without an adjustment unit, and (B) is a view showing the impedance and phase angle of a fluid control device with an adjustment unit. FIG. 6 is a view showing a modified example of the present technology, where (A) is a view with a portion of the fluid control device exploded, and (B) is a cross-sectional view. FIG. 7 is an exploded perspective view showing a fluid control device according to a second embodiment of the present technology. FIG. 8 is a view showing a fluid control device, where (A) is a cross-sectional view of the fluid control device, and (B) is a perspective view of an intermediate member. 10 is a cross-sectional view of a fluid control device in a modified example of the second embodiment of the present technology. It is a diagram showing a first modified example of a first check valve, in which (A) is a diagram showing an open state, (B) is a diagram showing a closed state, and (C) is a cross-sectional view. It is a diagram showing a second modified example of a first check valve. It is a diagram showing an example of use of a fluid control device, in which (A) is a diagram showing a tactile presentation device in which a cuff is attached to the fluid control device, (B) is a diagram showing the tactile presentation device being used as a switch, (C) is a diagram showing the tactile presentation device being worn by a user, (D) is a diagram showing the tactile presentation device being provided on a controller, (E) is a diagram showing the tactile presentation device being attached to a doll, and (F) is a diagram showing a scent being presented to a user by the fluid control device.

[0028] Hereinafter, embodiments of the present technology will be described with reference to the drawings.

[0029] <First embodiment> Fig. 1 is an exploded perspective view showing a fluid control device 1 according to a first embodiment of the present technology, and Fig. 2 is a diagram showing the fluid control device 1, where (A) is a partially exploded view of the fluid control device 1 and (B) is a cross-sectional view. In each diagram, the X-axis, Y-axis, and Z-axis indicate three axial directions that are orthogonal to each other. Fig. 3 is a diagram showing a first check valve 10C, where (A) is a perspective view of the first check valve 10C and (B) is a cross-sectional view of the first check valve 10C.

[0030] In this embodiment, the fluid control device 1 is a diaphragm pump used when haptic presentation is performed to provide a user with an operational sensation (e.g., an operation of gripping or grasping an object) in, for example, virtual reality (VR) content. An example of VR content is baseball. In the case of baseball, the user is presented with the sensation of gripping a bat or throwing a ball. The content referred to here may be, but is not limited to, VR as described above, augmented reality (AR), movies, games, television, and other videos, images, comics, magazines, picture books, and other books (including paper media and e-books), and music.

[0031] 1 and 2, the fluid control device 1 includes a housing 100, a drive unit 40, and an adjustment unit 50. The fluid control device 1 is configured to be able to draw in and discharge a fluid by driving the drive unit 40. In this embodiment, the fluid used in the fluid control device 1 is air, but of course it is not limited to this and may be another gas or a liquid such as water.

[0032] [Housing] The fluid control device 1 has a housing 100 having an internal space W capable of holding a fluid. The housing 100 has a first member 10 as a first diaphragm, a second member 20 as a second diaphragm, and an intermediate member 30. The space W is a space formed (surrounded) by the first member 10 (first elastic portion 10A), the second member 20 (second elastic portion 20A), and the intermediate member 30, which will be described later.

[0033] (First member) The first member 10 has a flat first elastic portion 10A, a first support member 10B provided on the side of the first elastic portion 10A opposite the space W, and a first check valve 10C (check valve).

[0034] In this embodiment, the first elastic portion 10A is provided opposite the second elastic portion 20A (described later) in the Z-axis direction, is elastically deformable, and can be bent and deformed in the vertical direction (Z-axis direction) by a driving portion 40 (described later). In this embodiment, the first elastic portion 10A is made of metal, but of course, the material is not limited to this and may be resin or the like.

[0035] In this embodiment, the first elastic portion 10A is rectangular in plan view (as viewed from the Z-axis direction), but of course this is not limited to this and may be polygonal or circular, and the shape is not particularly limited.

[0036] The first elastic portion 10A has a first elastic deformation portion 101A that faces the drive portion 40 in the Z-axis direction, and a first opposing portion 102A that is provided around the first elastic deformation portion 101A and faces a first support member 10B (described later) in the Z-axis direction. In this embodiment, the first elastic deformation portion 101A and the first opposing portion 102A are integrally formed, but this is not limiting.

[0037] The first elastic deformation portion 101A is provided with a drive unit 40 on the opposite side to the space W, and is configured to be bent and deformed by being driven by the drive unit 40. The first elastic deformation portion 101A has a circular shape when viewed in the Z-axis direction, but is of course not limited to this.

[0038] The first elastic deformation portion 101A also has a first groove portion (not shown) that is provided on the space W side and recessed along a circular shape when viewed from the second member 20 side. The first groove portion is formed at a position facing the periphery of the drive unit 40 in the Z-axis direction. That is, in this embodiment, the circular shape of the first groove portion when viewed from the Z-axis direction is approximately the same shape as the peripheral portion (outer periphery portion) of the drive unit 40, which is formed in an approximately circular shape.

[0039] The first opposing portion 102A is provided around the first elastic deformation portion 101A and has a ring shape that is sandwiched between the first support member 10B and the intermediate member 30. In other words, the first opposing portion 102A is configured so as not to bend and deform in the Z-axis direction by the first support member 10B and the intermediate member 30. In this embodiment, the first opposing portion 102A surrounds the first elastic deformation portion 101A (around the Z-axis) 360 degrees (the entire circumference), but of course, this is not limited to this and there may be some portions that are not surrounded.

[0040] The first opposing portion 102A also has an outlet hole 1021A through which fluid is discharged from the space W. In this embodiment, the outlet hole 1021A is provided so as to penetrate in the Z-axis direction. Furthermore, when the first elastic deformation portion 101A and the second elastic deformation portion 201A are deformed by the drive unit 40 so as to contract the space W, the fluid in the space W is discharged from the outlet hole 1021A to outside the space W. In this embodiment, two outlet holes 1021A are provided, but this is of course not limited to this. In this embodiment, the shape of the outlet hole 1021A is rectangular when viewed in the Z-axis direction, but this is of course not limited to this. Furthermore, in this embodiment, the outlet hole 1021A is provided near a corner of the rectangular first elastic portion 10A, but this is of course not limited to this.

[0041] The first opposing portion 102A has a first opposing recess 1022A, which is a portion of the periphery of the first opposing portion 102A recessed inward (toward the space W). In this embodiment, the first opposing recess 1022A is provided on each of two opposing sides of the rectangular first elastic portion 10A, but the present invention is not limited to this.

[0042] The first support member 10B sandwiches the first elastic portion 10A between the first support member 10B and the intermediate member 30. As shown in FIGS. 1 and 2 , the first support member 10B is disposed opposite the first opposing portion 102A in the Z-axis direction. The first support member 10B is also ring-shaped, with a hollowed-out portion so that a drive unit 40 (described later) can be mounted on the first elastic portion 10A. In this embodiment, the first support member 10B is formed to have higher rigidity than the first elastic portion 10A. While the first support member 10B is made of metal in this embodiment, it is not limited to this and may be made of resin or the like. In this embodiment, the first support member 10B is made of the same material as the first elastic portion 10A, but it is not limited to this and may be made of a different material.

[0043] The first support member 10B also has a first check valve accommodating portion 101B, which forms a space capable of accommodating the first check valve 10C, at a position opposite the discharge hole 1021A in the Z-axis direction. The first check valve accommodating portion 101B is formed so that the first check valve 10C can be opened and closed. In this embodiment, the first check valve accommodating portion 101B has a roughly triangular shape, but this is not of course limited to this. The number of first check valve accommodating portions 101B can be changed as appropriate depending on the number of first check valves 10C.

[0044] The first support member 10B further has a first support recess 102B, which is a portion of the periphery of the first support member 10B recessed toward the space W in the Z-axis direction. In this embodiment, the first support recess 102B is provided on each of two opposing sides of the rectangular first support member 10B, but this is of course not limited to this. In this embodiment, the first support recess 102B is provided so as to face the first opposing recess 1022A described above when viewed from the Z-axis direction, but this is of course not limited to this.

[0045] As shown in Figures 3A and 3B, the first check valve 10C is provided at a position corresponding to the discharge hole 1021A and allows the discharge hole 1021A to be opened and closed. The first check valve 10C is provided on the side of the first elastic portion 10A opposite the space W (the side of the first support member 10B). In this embodiment, the first check valve 10C is a swing type, but this is not limited thereto and may be a lift type or a ball type. In this embodiment, the number of first check valves 10C is two, but this may be changed as appropriate depending on the number of discharge holes 1021A.

[0046] The first check valve 10C has a reed valve 101C provided on the side of the discharge hole 1021A opposite the space W, and a valve holding portion 102C provided in the first elastic portion 10A to limit the reed valve 101C to a predetermined opening degree.

[0047] The reed valve 101C includes a first reed valve portion 1011C that covers the discharge hole 1021A as viewed in the Z-axis direction and prevents backflow of fluid from the outside into the space W, and a second reed valve portion 1012C that is connected to the first reed valve portion 1011C and is held by the first elastic portion 10A and the valve holding portion 102C as viewed in the Z-axis direction. In this embodiment, the first reed valve portion 101C and the second reed valve portion 102C are integrally formed, but this is not necessarily limited to this. The reed valve 101C is an elastic body, and the discharge hole 1021A is closed by expansion of the space W, and the reed valve 101C is pushed up by contraction of the space W, opening the discharge hole 1021A.

[0048] The valve holding portion 102C is configured to hold (sandwich) the reed valve 101C in the Z-axis direction between the valve holding portion 102C and the first elastic portion 10A. The valve holding portion 102C is configured to hold the second reed valve portion 1012C described above and has multiple through-hole holding portions 1021C penetrating in the Z-axis direction. The multiple through-hole holding portions 1021C in the valve holding portion 102C allow adhesive to be poured into the multiple through-hole holding portions 1021C. This allows for stronger bonding between the reed valve 101C and the valve holding portion 102C and for the reed valve 101C to be securely sandwiched between the first elastic portion 10A and the valve holding portion 102C. The shape and number of the through-hole holding portions 1021C may be changed taking into account the manufacturing process. The valve holding portion 102C is made of, for example, metal, but is not limited to this and may also be made of resin or other materials.

[0049] (Second member) The second member 20 has a flat second elastic portion 20A and a second support member 20B provided on the opposite side of the second elastic portion 20A from the space W, and forms a space W through which a fluid flows between the second member 20 and the first member 10.

[0050] In this embodiment, the second elastic portion 20A is provided opposite the first elastic portion 10A in the Z-axis direction, is elastically deformable, and is vertically deformable in conjunction with (resonating with) the first elastic portion 10A being vertically deformed by a driving portion 40 (described later). In this embodiment, the second elastic portion 20A is made of metal, but of course, the material is not limited to metal and may be resin or the like.

[0051] In this embodiment, the second elastic portion 20A is rectangular in plan view (as viewed from the Z-axis direction), but of course this is not limited to this and may be polygonal or circular, and the shape is not particularly limited.

[0052] The second elastic portion 20A has a second elastic deformation portion 201A that faces the adjustment portion 50 in the Z-axis direction, and a second opposing portion 202A that is provided around the second elastic deformation portion 201A and faces a second support member 20B (described later) in the Z-axis direction. In this embodiment, the second elastic deformation portion 201A and the second opposing portion 202A are integrally formed, but this is not limiting.

[0053] The second elastic deformation portion 201A is provided with an adjustment portion 50 on the opposite side to the space W, and is configured to bend and deform in the vertical direction in conjunction (resonance) with the first elastic portion 10 being bent and deformed in the vertical direction by the drive portion 40. The second elastic deformation portion 201A has a circular shape when viewed in the Z-axis direction, but is of course not limited to this.

[0054] The second elastic deformation portion 201A has a second groove portion 2011A that is provided on the space W side and recessed along a circular shape when viewed from the first member 10 side. The second groove portion 2011A is formed at a position facing the periphery of the drive portion 40 in the Z-axis direction. That is, in this embodiment, the circular shape of the second groove portion 2011A when viewed from the Z-axis direction is approximately the same shape as the peripheral portion (outer periphery portion) of the drive portion 40, which is formed in an approximately circular shape.

[0055] In this embodiment, the area of ​​the first elastic deformation portion 101A perpendicular to the Z-axis direction is approximately the same as the area of ​​the first elastic deformation portion 101A perpendicular to the Z-axis direction, but of course this is not limited to this and they may be different. Also, in this embodiment, the shape of the first elastic deformation portion 101A perpendicular to the Z-axis direction is approximately the same as the shape of the first elastic deformation portion 101A perpendicular to the Z-axis direction, but of course this is not limited to this and they may be different.

[0056] The second facing portion 202A is provided around the second elastic deformation portion 201A and has a ring shape that is sandwiched between the second support member 20B and the intermediate member 30. In other words, the second facing portion 202A is configured so as not to bend and deform in the Z-axis direction by the second support member 20B and the intermediate member 30. In this embodiment, the second facing portion 202A surrounds the second elastic deformation portion 201A (around the Z-axis) 360 degrees (the entire circumference), but of course, this is not limited to this and there may be some portions that are not surrounded.

[0057] The second opposing portion 202A also has suction holes 2021A that draw fluid from the outside into the space W. In this embodiment, the suction holes 2021A are provided so as to penetrate in the Z-axis direction. When the first elastic deformation portion 101A and the second elastic deformation portion 201A are deformed by the drive unit 40 to expand the space W, the fluid outside the space W is drawn into the space W through the suction holes 2021A. In this embodiment, two suction holes 2021A are provided, but this is of course not limited to this. In this embodiment, the shape of the suction holes 2021A is rectangular when viewed in the Z-axis direction, but this is of course not limited to this. Furthermore, in this embodiment, the suction holes 2021A are provided near the corners of the rectangular second elastic portion 20A, but this is of course not limited to this.

[0058] The second facing portion 202A has a second facing recess 2022A, which is a portion of the periphery of the second facing portion 202A recessed inward (toward the space W). The second facing recess 2022A is provided to face the second facing recess 2022A in the Z-axis direction. In the present embodiment, the second facing recess 2022A is provided on each of two opposing sides of the rectangular second elastic portion 20A, but the present invention is not limited to this.

[0059] The second support member 20B sandwiches the second elastic portion 20A with the intermediate member 30. As shown in FIGS. 1 and 2 , the second support member 20B is disposed so as to face the second opposing portion 202A in the Z-axis direction. The second support member 20B is also ring-shaped, with a hollowed-out portion so that the adjustment portion 50 (described later) can be disposed on the second elastic portion 20A. In this embodiment, the second support member 20B is formed to have higher rigidity than the second elastic portion 20A. While the second support member 20B is made of metal in this embodiment, it is not limited to this and may be made of resin or the like. In this embodiment, the second support member 20B is made of the same material as the second elastic portion 20A, but it is not limited to this and may be made of a different material.

[0060] The second support member 20B also has a suction side accommodating section 201B, located opposite the suction hole 2021A in the Z-axis direction, that forms a space capable of accommodating at least a portion of the fluid outside the space W. The suction side accommodating section 201B is formed so as to surround the suction hole 2021A when viewed in the Z-axis direction. In this embodiment, the suction side accommodating section 201B has a roughly triangular shape, but this is not of course limited to this. The number of suction side accommodating sections 201B can be changed as appropriate depending on the number of suction holes 2021A.

[0061] The second support member 20B further has second support recesses 202B, which are recessed in part of the periphery of the second support member 20B toward the space W in the Z-axis direction. In this embodiment, the second support recesses 202B are provided on two opposing sides of the rectangular second support member 20B, but this is of course not limited to this. In this embodiment, the second support recesses 202B are provided so as to face the second opposing recesses 2022A described above when viewed from the Z-axis direction, but this is of course not limited to this.

[0062] Furthermore, in this embodiment, no check valve is provided in the suction hole 2021A of the second member 20, but this is of course not limited to this. For example, the second check valve is provided at a position corresponding to the above-mentioned suction hole 2021A. The second check valve is provided on the space W side (the intermediate member 30 side) of the second elastic portion 20A. In this embodiment, the second check valve is a swing type, but of course this is not limited to this and may be a lift type or a ball type. In this embodiment, the number of second check valves is two, but this can be changed as appropriate depending on the number of suction holes 2021A.

[0063] (Intermediate member) The intermediate member 30 is provided between the first member 10 (first elastic portion 10A) and the second member 20 (second elastic portion 20A) in the Z-axis direction as described above, and forms a space W through which a fluid flows.

[0064] The intermediate member 30 has a space forming portion 301 that forms the space W, and a protruding portion 302 that is provided in the space forming portion 301 and protrudes from the space forming portion 301 to the outside of the space W.

[0065] The space forming portion 301 is provided between the first member 10 and the second member 20, is formed around the Z axis, and is formed to be able to hold the fluid in the space W. The space forming portion 301 is formed in a ring shape so as to face the first support member 10B and the second support member 20B described above in the Z axis direction.

[0066] The space forming portion 301 has a first recess 301A that connects the discharge hole 1021A side to the space W at a position opposite the discharge hole 1021A in the Z-axis direction, and a second recess 301B that connects the suction hole 2021A side to the space W at a position opposite the suction hole 2021A in the Z-axis direction.

[0067] The first recess 301A is formed in a rectangular shape so as to be recessed from the inside to the outside of the space forming portion 301. The fluid is discharged to the outside of the space W from the discharge hole 1021A via the first recess 301A.

[0068] The second recess 301B is formed in a rectangular shape so as to be recessed from the inside to the outside of the space forming portion 301. The fluid is sucked into the space W from the suction hole 2021A via the second recess 301B.

[0069] The protruding portion 302 is provided on a part of the outer periphery of the space forming portion 301 so as to protrude toward the opposite side of the space W (outside the space W). The protruding portion 302 has a through hole 302A at a position that does not face the first member 10 or the second member 20 in the Z-axis direction. In this embodiment, there are two through holes 302A, but this is not limiting. Furthermore, the shape of the through hole 302A is circular or elliptical, but this is not limiting.

[0070] The protrusion 302 is provided so as to face at least a part of the first opposing recess 1022A and the second opposing recess 2022A in the Z-axis direction.

[0071] In this embodiment, the intermediate member 30 is made of metal, but of course, this is not limited to this and it may be made of resin, etc. Furthermore, in this embodiment, the intermediate member 30 is made of the same material as the first member 10 and the second member 20, but of course, this is not limited to this and it may be made of a different material.

[0072] (Driver) The driver 40 is provided on the first elastic portion 10A and elastically deforms the first elastic portion 10A. In this embodiment, the driver 40 is arranged so as to be housed inside the first support member 10B (inside the ring shape). Here, being housed does not necessarily mean being lower than the first support member 10B in the Z-axis direction, but may also mean being higher.

[0073] In this embodiment, the driving unit 40 is a piezoelectric element made of a piezoelectric material such as PZT, but is not limited to this. The driving unit 40 is provided on the side of the first elastic portion 10A opposite to the space W, near the center of the first elastic portion 10A when viewed from the Z-axis direction. The piezoelectric element may have a laminated structure of two or more layers.

[0074] In this embodiment, the drive unit 40 has a circular shape when viewed from the Z-axis direction, but of course this is not limited to this and it may be configured in an elliptical or polygonal shape, or may be configured in a ring shape.

[0075] In this embodiment, the drive section 40 and the first elastic section 10A are bonded with an epoxy-based thermosetting resin, but of course the material is not limited to thermosetting resin, and even if the resin is thermosetting resin, it is not limited to epoxy-based resin.

[0076] In this embodiment, the drive unit 40 is provided on the first elastic portion 10A, but of course, this is not limited thereto. The drive unit 40 may be provided on the second elastic portion 20A and elastically deform the second elastic portion 20A. The drive unit 40 may also be provided on both the first elastic portion 10A and the second elastic portion 20A. The drive unit 40 is provided on the side of the first elastic portion 10A opposite the space W (the first support member 10B side), but of course, this is not limited thereto. The drive unit 40 may also be provided on the space W side (the intermediate member 30 side). The drive unit 40 may also be provided on the space W side (the intermediate member 30 side) of the second elastic portion 20A.

[0077] 1 and 2 , in the present embodiment, the adjustment unit 50 is ring-shaped, is provided on the second elastic portion 20A, and adjusts the resonance frequency of the second elastic portion 20A. In the present embodiment, the adjustment unit 50 is arranged so as to be housed inside the second support member 20B (inside the ring shape). Here, being housed does not necessarily mean being arranged lower than the second support member 20B in the Z-axis direction, but may also be arranged higher.

[0078] In this embodiment, the adjustment unit 50 makes the resonance frequencies of the first member 10 and the second member 20 as equal as possible, thereby improving the driving efficiency of the fluid control device 1.

[0079] In this embodiment, the adjustment unit 50 is a ring-shaped plate made of metal, but of course, this is not limited to this and it may be circular or rectangular, or it may be made of resin. Also, in this embodiment, the adjustment unit 50 is configured to be elastically deformable, but of course, this is not limited to this and it may be a rigid body.

[0080] The adjustment unit 50 may also be formed, for example, from a potting material formed by potting processing. Potting materials include, but are not limited to, various resins such as urethane resin, epoxy resin, and silicone resin, and various metals such as solder. The adjustment unit 50 may also be formed by other methods such as coating, screen printing, and sputtering. In this case, the adjustment unit 50 is similarly formed from various resins, various metals, and the like.

[0081] In this embodiment, the adjustment unit 50 and the second elastic unit 20A are bonded (adhered) with a pressure-sensitive adhesive or adhesive, but this is not limited to this and laser welding or the like may also be used. Examples of adhesives include, but are not limited to, ultraviolet-curing and solvent-based adhesives. Examples of adhesives include, but are not limited to, rubber-based, acrylic-based, and silicone-based adhesives.

[0082] In the present embodiment, the thickness of the adjustment unit 50 in the Z-axis direction is different from the thickness of the drive unit 40 in the Z-axis direction, but of course, this is not limited to this and they may be the same. In the present embodiment, the thickness of the adjustment unit 50 in the Z-axis direction is different from the thickness of the second elastic unit 20A in the Z-axis direction, but of course, this is not limited to this and they may be the same.

[0083] Furthermore, in this embodiment, one adjustment unit 50 is provided in the second elastic portion 20A, but of course, this is not limited thereto and two or more adjustment units may be provided. Also, in this embodiment, the adjustment unit 50 is provided in the second elastic portion 20A, but of course, this is not limited thereto and the adjustment unit 50 may be provided in the first elastic portion 10A. It may also be provided in both the first elastic portion 10A and the second elastic portion 20A. Furthermore, the adjustment unit 50 is provided on the side of the second elastic portion 20A opposite the space W (the second support member 20B side), but of course, this is not limited thereto and the adjustment unit 50 may be provided on the space W side (the intermediate member 30 side). Furthermore, the adjustment unit 50 may be provided on the space W side (the intermediate member 30 side) of the first elastic portion 10A. Details will be described later. Also, while the adjustment unit 50 is provided separately from the second elastic portion 20A, of course, this is not limited thereto and the adjustment unit 50 may be provided integrally therewith.

[0084] <Explanation of Operation> Next, a typical operation of the fluid control device 1 will be described.

[0085] When an input voltage (such as a sine wave, triangular wave, rectangular wave, sawtooth wave, etc., hereinafter collectively referred to as a sine wave, etc.) is applied to the drive unit 40, the first elastic part 10A bends and deforms upward or downward, and the second elastic part 20A resonates as the first elastic part 10A vibrates, and when the first elastic part 10A bends and deforms upward, the second elastic part 20A bends and deforms downward, and when the first elastic part 10A bends and deforms downward, the second elastic part 20A bends and deforms upward.

[0086] When the first elastic member 10A bends upward and the second elastic member 20A bends downward, the space W inside the housing 100 expands, and the pressure inside the space W becomes lower than the pressure outside. This causes fluid to flow from the outside into the space W through the suction hole 2021A. At this time, the first check valve 10C provided in the discharge hole 1021A is closed due to the pressure difference between the outside and the inside of the space W.

[0087] When the first elastic member 10A bends downward and the second elastic member 20A bends upward, the space W inside the housing 100 contracts, and the pressure inside the space W becomes greater than the pressure outside. This causes the fluid to be discharged from the space W to the outside through the discharge hole 1021A. At this time, the first check valve 10C provided in the discharge hole 1021A is opened due to the pressure difference between the outside and the inside of the space W.

[0088] <Manufacturing Apparatus and Manufacturing Method of Fluid Control Device 1> Next, a manufacturing apparatus 90 and a manufacturing method of the fluid control device 1 will be described.

[0089] FIG. 4 is a diagram showing a manufacturing apparatus 90 for the fluid control device 1 according to the first embodiment.

[0090] As shown in FIG. 4, the manufacturing apparatus 90 includes a diaphragm generating unit 91 , a first measuring unit 92 , an assembling unit 93 , a second measuring unit 94 , and a control unit 95 .

[0091] First, the diaphragm generating unit 91 prepares the first member 10, the second member 20, the intermediate member 30, and the drive unit 40, forms the drive unit 40 at a predetermined position on the first elastic member 10A (for example, adhesively fixes the drive unit 40 to the first elastic member 10A), and assembles them to generate a pre-diaphragm. Here, the pre-diaphragm refers to the configuration of the fluid control device 1 excluding the adjustment unit 50. Then, the diaphragm generating unit 91 sequentially passes the generated pre-diaphragms to the first measuring unit 92.

[0092] Next, the first measuring unit 92 applies an input voltage (such as a sine wave) to the pre-diaphragm driver 40 received from the diaphragm generator 91 to vibrate the pre-diaphragm. Then, the first measuring unit 92 measures the frequency characteristics (resonant frequency) and amplitude characteristics of the pre-diaphragm.

[0093] The first measuring unit 92 also outputs information on the measured frequency characteristics and amplitude characteristics to the control device 95. The first measuring unit 92 then passes the pre-diaphragms for which measurement has been completed to the assembly unit 93 in sequence.

[0094] In this embodiment, the first measuring unit 92 is composed of, for example, a Doppler displacement meter, but of course it is not limited to this and may be composed of any device that can measure the frequency characteristics and amplitude characteristics of the pre-diaphragm.

[0095] Next, in this embodiment, the assembly unit 93 assembles the fluid control device 1 by fixing the adjustment unit 50 to the second elastic portion 20A side of the pre-diaphragm handed over from the first measurement unit 92. Then, the assembly unit 93 hands over the assembled fluid control device 1 to the second measurement unit 94.

[0096] Next, the second measuring unit 94 applies an input voltage (such as a sine wave) to the driving unit 40 of the fluid control device 1 handed over from the assembly unit 93, vibrating the first elastic member 10A and the second elastic member 20A. Then, the second measuring unit 94 measures the frequency characteristics (resonance frequency) and amplitude characteristics of the first elastic member 10A.

[0097] The second measuring unit 94 also outputs information on the measured frequency characteristics and amplitude characteristics to the control device 95 .

[0098] The control device 95 comprehensively controls the entire manufacturing apparatus 90. The control device 95 has a control unit and a storage unit. The control unit is configured, for example, by a CPU (Central Processing Unit) or the like. The storage unit includes a volatile memory used as a work area for the control unit and a non-volatile memory for storing various data, programs, and the like. The control device 95 may be configured by a general-purpose device such as a PC, or may be configured by a device dedicated to this manufacturing apparatus 90.

[0099] The control device 95 determines whether the desired frequency characteristics (resonance frequency) and amplitude characteristics have been obtained based on the frequency characteristics (resonance frequency) and amplitude characteristics of the fluid control device 1 acquired from the second measuring unit 94. If the desired frequency characteristics (resonance frequency) and amplitude characteristics have not been obtained, the control unit again issues a command to the assembling unit 93, causing the assembling unit 93 to again form the adjustment unit 50 in the second elastic portion 20A.

[0100] <How much of an adjustment section should be formed in the second elastic section?> Next, how much of an adjustment section 50 should be formed in the second elastic section will be described. Fig. 5 shows the displacement amount of the fluid control device 1, with (A) being a diagram showing the displacement amount of the fluid control device 1 not provided with the adjustment section 50, and (B) being a diagram showing the displacement amount of the fluid control device 1 provided with the adjustment section 50. Fig. 6 also shows the impedance and phase angle of the fluid control device 1, with (A) being a diagram showing the impedance and phase angle of the fluid control device 1 not provided with the adjustment section 50, and (B) being a diagram showing the impedance and phase angle of the fluid control device 1 provided with the adjustment section 50.

[0101] As shown in Fig. 5A, when the adjustment unit 50 is not provided, the amount of displacement of the second elastic portion 20A, which is on the opposing side, is smaller than the amount of displacement of the first elastic portion 10A, which is on the driving unit 40 side. In contrast, as shown in Fig. 5B, when the adjustment unit 50 is provided, the amount of displacement of the second elastic portion 20A, which is on the opposing side, becomes larger than the amount of displacement of the first elastic portion 10A, which is on the driving unit 40 side. Furthermore, the amount of displacement of the first elastic portion 10A also becomes larger.

[0102] That is, the sum of the displacement amounts of the first elastic member 10A and the second elastic member 20A is the displacement amount of the space W. By providing the adjustment member 50, the displacement amounts of the first elastic member 10A and the second elastic member 20A are increased, and the displacement amount of the space W can be increased compared to when the adjustment member 50 is not provided.

[0103] Furthermore, as shown in FIG. 6(A), when the adjustment unit 50 is not provided, there are two peaks where the impedance is low (there are two peaks in the phase angle). The reason for this is that a resonance point on the drive unit 40 side and a resonance point on the opposite side appear. As a result, they interfere with each other and the desired characteristics cannot be obtained. On the other hand, as shown in FIG. 6(B), when the adjustment unit 50 is provided, there is only one peak in the phase angle. This allows the drive unit 40 side and the opposite side to undergo large displacements at the same frequency, thereby increasing the amount of displacement in the space W.

[0104] Here, the amount (thickness) of the adjustment portion 50 will be described. First, the amount of the adjustment portion 50 is changed in advance, and the extent to which the resonant frequency of the fluid control device 1 changes when that amount of adjustment portion 50 is formed is measured. As a result, the relationship between the amount of the adjustment portion 50 and the rate of change in the resonant frequency of the fluid control device 1 is calculated statistically.

[0105] Then, the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A is calculated, and the amount and shape of the adjustment portion 50 for filling this difference are determined based on the above relationship (for example, the amount and shape of the adjustment portion 50 are determined so as to change FIG. 5(A) to FIG. 5(B) and FIG. 6(A) to FIG. 6(B)). Note that the amount (thickness) of the adjustment portion 50 increases as the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A increases.

[0106] The processing of the control device 95 will be specifically described using an example. The control device 95 pre-stores the relationship between the amount (thickness) of the adjustment unit 50 and the rate of change of the resonant frequency of the fluid control device 1. The control device 95 acquires the resonant frequency (frequency characteristics) of the first elastic member 10A and the resonant frequency (frequency characteristics) of the second elastic member 20A from the first measurement unit 92 (see FIGS. 5 and 6).

[0107] Next, the control device 95 calculates the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A (see FIGS. 5 and 6). The control device 95 then determines the amount (thickness) and shape of the adjustment portion 50 based on the relationship between the amount (thickness) and shape of the adjustment portion 50 and the rate of change of the resonance frequency, as well as the difference in the resonance frequencies. The control device 95 then notifies the assembly unit 93 of information regarding the amount and shape of the adjustment portion 50 to be formed in the second elastic portion 20A, and causes the assembly unit 93 to form the adjustment portion 50.

[0108] In this embodiment, the case where the second elastic portion 20A is formed has been described, but of course the present invention is not limited to this, and the first elastic portion 10A may also be formed.

[0109] As described above, this embodiment includes a housing 100 including a first member 10 including a first elastic portion 10A that is an elastic body and a second member 20 including a second elastic portion 20A that is an elastic body and that forms a space W through which a fluid flows between the first member 10 and the second member 20; a drive unit 40 provided in at least one of the first elastic portion 10A or the second elastic portion 20A and elastically deforming at least one of the first elastic portion 10A or the second elastic portion 20A; and an adjustment unit 50 provided in at least one of the first elastic portion 10A or the second elastic portion 20A and adjusting the resonance frequency of at least one of the first elastic portion 10A or the second elastic portion 20A. In other words, since the adjustment unit 50 is provided in at least one of the first elastic portion 10A or the second elastic portion 20A, it is possible to make the resonance frequencies of the first member 10 and the second member 20 as equal as possible. This improves the drive efficiency of the fluid control device 1.

[0110] Furthermore, it is possible to improve the driving efficiency of the fluid control device 1, thereby making it possible to reduce the size and thickness of the driving unit 40. Therefore, when the fluid control device 1 is worn by a user, it is possible to reduce the discomfort felt by the user when wearing the fluid control device 1.

[0111] In this embodiment, the drive unit 40 is provided on the first elastic portion 10A side, and the adjustment unit 50 is provided on the second elastic portion 20A side. In other words, by providing the drive unit 40 and the adjustment unit 50 on different members, the degree of freedom (shape, etc.) when providing the adjustment unit 50 increases, making it possible to provide the adjustment unit 50 with a more appropriate shape, etc. This can further improve the drive efficiency of the fluid control device 1.

[0112] Furthermore, by providing the drive unit 40 on the first elastic member 10A side and the adjustment unit 50 on the second elastic member 20A side, the fluid control device 1 can be made smaller and thinner. In other words, if the adjustment unit 50 is provided on the first elastic member 10A side, it is necessary to secure a space for the adjustment unit 50 in advance, which increases the size in the width direction (X-axis or Y-axis direction) and height direction (Z-axis direction). However, in this embodiment, the adjustment unit 50 is arranged to be housed within the second support member 20B, so the fluid control device 1 can be made smaller and thinner.

[0113] In this embodiment, the drive unit 40 is provided only on the first elastic portion 10A side, which reduces the cost of installing the drive unit 40 compared to when the drive unit 40 is provided on the second elastic portion 20A side.

[0114] In this embodiment, the drive section 40 and the first elastic section 10A are bonded together with a thermosetting resin, which provides strength against external stimuli such as impacts.

[0115] In this embodiment, the adjustment unit 50 and the second elastic unit 20A are separate members. This makes it possible to attach various adjustment units 50 to the second elastic unit 20A based on the measured resonance frequency, thereby improving workability when manufacturing the fluid control device 1. Furthermore, the adjustment unit 50 and the second elastic unit 20A (on the space W side or the opposite side to the space W) may be provided integrally. This makes it possible to omit the work step of attaching the adjustment unit 50 to the second elastic unit 20A, thereby improving workability when manufacturing the fluid control device 1.

[0116] In this embodiment, the first support member 10B is formed to have higher rigidity than the first elastic portion 10A, and the second support member 20B is formed to have higher rigidity than the second elastic portion 20A. In other words, even if the first elastic portion 10A and the second elastic portion 20A are elastically deformed, the first opposing portion 102A and the second opposing portion 202A can be fixed by the intermediate member 30 so as to prevent elastic deformation. This increases the amount of deformation of the first elastic deformation portion 101A and the second elastic deformation portion 201A.

[0117] In this embodiment, the first elastic deformation portion 101A has a first groove portion, and the second elastic deformation portion 201A has a second groove portion 2011A. This makes it easier for the first elastic deformation portion 101A and the second elastic deformation portion 201A to be elastically deformed by the driving portion 40, and the amount of change in volume of the space W can be increased.

[0118] Furthermore, in this embodiment, the first support member 10B has a first support recess 102B in which wiring for a drive signal (voltage) to the drive unit 40 is arranged. This makes it possible to make the first support member 10B more compact and to prevent the wiring from protruding from the outermost surface of the first support member 10B. Note that the wiring is not particularly limited, and may be, for example, an FPC (Flexible Printed Circuits) or a general wire cable.

[0119] Furthermore, in this embodiment, the intermediate member 30 has a protrusion 302 that is provided at a position facing the first opposing recess 1022A and the second opposing recess 2022A in the Z-axis direction, protrudes toward the opposite side of the space W, and serves as a terminal for inputting a signal equivalent to GND. The protrusion 302 also has a through-hole 302A at a position that does not face the first member 10 and the second member 20 in the Z-axis direction. This allows the entire fluid control device 1 to be made thinner in the Z-axis direction. Of course, the function of the terminal for inputting a signal equivalent to GND does not have to be provided on the protrusion 302, but may be on the first support member 10B, the second support member 20B, or the like.

[0120] <Modification 1> Next, Modification 1 of the present technology will be described. In the present embodiment, the adjustment unit 50 of the fluid control device 1 has a ring shape, but of course, this is not limited to this and may have a circular shape. FIG. 7 is a diagram showing modifications of the present technology, where (A) is a partially exploded view of a fluid control device 1A, (B) is a partially exploded view of a fluid control device 1B, (C) is a partially exploded view of a fluid control device 1C, (D) is a partially exploded view of a fluid control device 1D, (E) is a partially exploded view of a fluid control device 1E, and (F) is a partially exploded view of a fluid control device 1F. Descriptions of configurations similar to those of the above-described embodiments will be omitted or simplified.

[0121] 7A, the adjustment unit 50A of the fluid control device 1A has a circular shape when viewed from the Z-axis direction. In this embodiment, the thickness of the adjustment unit 50A in the Z-axis direction is constant, but this is not limited thereto, and the adjustment unit 50A may be provided so that some portions are thicker or thinner.

[0122] In addition, in this embodiment, the thickness of the adjustment unit 50A in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0123] As shown in FIG. 7B, the adjustment unit 50B of the fluid control device 1B has a double circle shape when viewed from the Z-axis direction. That is, the adjustment unit 50B has two ring-shaped portions with different diameters, with the smaller-diameter ring-shaped adjustment unit being provided inside the larger-diameter ring-shaped adjustment unit. While the adjustment unit 50B has a double circle shape in this embodiment, this is not necessarily limited thereto and the adjustment unit 50B may have a triple circle shape. In this embodiment, the thickness of the adjustment unit 50B in the Z-axis direction is constant, but this is not necessarily limited thereto and the adjustment unit 50B may have a thicker or thinner portion.

[0124] In addition, in this embodiment, the thickness of the adjustment unit 50B in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0125] 7C, the adjustment unit 50C of the fluid control device 1C has a hexagonal shape when viewed from the Z-axis direction. In this embodiment, the adjustment unit 50C has a hexagonal shape, but of course, this is not limited thereto and the adjustment unit 50C may have a triangular or pentagonal shape. In this embodiment, the thickness of the adjustment unit 50C in the Z-axis direction is constant, but of course, this is not limited thereto and the adjustment unit 50C may be provided so that some portions are thicker or thinner.

[0126] In addition, in this embodiment, the thickness of the adjustment unit 50C in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0127] 7(D), the adjustment unit 50D of the fluid control device 1D is roughly X-shaped when viewed from the Z-axis direction. That is, the adjustment unit 50D has a shape in which an adjustment unit extending in one direction of the XY plane intersects with an adjustment unit extending in the other direction. In this embodiment, the angle of intersection is approximately 90 degrees, but of course, this is not limited to this and may be 45 degrees, for example. In this embodiment, the thickness of the adjustment unit 50D in the Z-axis direction is constant, but of course, this is not limited to this and the adjustment unit 50D may be provided so that some portions are thicker or thinner.

[0128] In addition, in this embodiment, the thickness of the adjustment unit 50D in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0129] 7(E), the adjustment unit 50E of the fluid control device 1E has a circular shape with recesses that radiate from the center when viewed in the Z-axis direction. That is, the adjustment unit 50E is formed in a circular shape as a whole, with a recess provided on the second elastic member 20A side. The recess is recessed from the second elastic member 20A side toward the opposite side of the space W, and is formed radially from the center when viewed in the Z-axis direction. In this embodiment, the thickness of the adjustment unit 50E in the Z-axis direction is constant, but this is not limited thereto, and the adjustment unit 50E may be formed so that some portions are thicker or thinner.

[0130] In addition, in this embodiment, the thickness of the adjustment unit 50E in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0131] As shown in FIG. 7(F), the adjustment unit 50F of the fluid control device 1F has a circular shape with multiple holes formed therein when viewed from the Z-axis direction. In this embodiment, the adjustment unit 50F has multiple holes formed therein that penetrate the circle in the Z-axis direction and are point-symmetrical about the circle. While the adjustment unit 50F has a circular shape in this embodiment, the shape is not limited to this and may be rectangular. While the number of holes is five in this embodiment, the number is not limited to this and may be one, six, or more. While the shape of the holes is circular in this embodiment, the shape is not limited to this and may be rectangular. In this embodiment, the thickness of the adjustment unit 50F in the Z-axis direction is constant, but the thickness is not limited to this and may be thicker or thinner in some areas.

[0132] In addition, in this embodiment, the thickness of the adjustment unit 50F in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0133] As described above, since the adjustment portion can be formed in various shapes, the variations for making the volume change of the space W larger can be increased.

[0134] Second Embodiment Next, a second embodiment of the present technology will be described. Fig. 8 is an exploded perspective view showing a fluid control device 1' according to the second embodiment of the present technology, and Fig. 9 is a diagram showing the fluid control device 1', where (A) is a cross-sectional view of the fluid control device 1' and (B) is a perspective view of an intermediate member 30'. Below, configurations different from the first embodiment will be mainly described, and configurations similar to those in the first embodiment will be assigned the same reference numerals, and descriptions thereof will be omitted or simplified.

[0135] The fluid control device 1 ′ includes a first member 10 ′, a second member 20 ′, an intermediate member 30 ′, and a drive unit 40 .

[0136] The first member 10′ has a first elastic portion 10A′ and a first support member 10B. The first elastic portion 10A′ has a first elastic deformation portion 101A′, a first opposing portion 102A, and a protruding portion 1022A.

[0137] The protruding portion 1022A is provided on a part of the outer periphery of the first opposing portion 102A so as to protrude toward the opposite side of the space W (outside the space W). The protruding portion 1022A has a through hole 10221A at a position that does not face the first support member 10B, the intermediate member 30′, or the second member 20′ in the Z-axis direction. In this embodiment, there are two through holes 10221A, but this is not limiting. Furthermore, the shape of the through hole 10221A is circular or elliptical, but this is not limiting.

[0138] The protrusion 1022A is provided so as to face at least a part of the first support recess 102B in the Z-axis direction.

[0139] That is, the first member 10' differs in that it is provided with a protrusion 1022A and does not have the above-described first groove.

[0140] The second member 20' has a second elastic portion 20A' and a second support member 20B'. The second support member 20B' is ring-shaped and sandwiches the second elastic portion 20A' between the second support member 20B' and the intermediate member 30'. The second support member 20B' has a step portion 202B formed along the circumferential direction of the inner periphery of the ring shape.

[0141] The cross section of the step portion 202B when viewed from the X-axis direction or the Y-axis direction is approximately L-shaped. In this embodiment, the step portion 202B is provided at a position facing the second elastic deformation portion 201A and the outer periphery of the drive portion 40 when viewed from the Z-axis direction.

[0142] That is, the second member 20' differs in that a step portion 202B is provided and that the second elastic deformation portion 201A' does not have the second groove portion described above.

[0143] The intermediate member 30' has a space forming portion 301' and an adjustment portion 50' formed on the inner circumferential side (space W side) of the space forming portion 301'.

[0144] The space forming portion 301' has a first recess 301A' that connects the discharge hole 1021A side and the space W at a position opposite the discharge hole 1021A in the Z-axis direction, and a second recess 301B' that connects the suction hole 2021A side and the space W at a position opposite the suction hole 2021A in the Z-axis direction.

[0145] The first recess 301A' is formed in a rectangular shape so as to recess from the inside to the outside of the space forming portion 301'. The fluid is discharged from the discharge hole 1021A through the first recess 301A' to the outside of the space W. In this embodiment, the first recess 301A' is formed in a rectangular shape, but of course, the shape is not limited to this and may be V-shaped.

[0146] The second recess 301B' is formed in a roughly V-shape so as to recess from the inside to the outside of the space forming portion 301'. The fluid is drawn into the space W from the suction hole 2021A via the second recess 301B'. In this embodiment, the second recess 301B' is formed in a V-shape, but of course, the shape is not limited to this and may be rectangular.

[0147] The adjustment portion 50' is formed on the inner circumferential side of the space forming portion 301' and is provided so as to come into contact with the second elastic portion 20A (see FIG. 9A). In this embodiment, the adjustment portion 50' is formed integrally with the space forming portion 301', but of course, this is not limited to this. Furthermore, the thickness of the adjustment portion 50' in the Z-axis direction is provided to be thinner than the thickness of the space forming portion 301'. This prevents the space W from being sealed by the adjustment portion 50'. Furthermore, the adjustment portion 50' has a roughly elliptical shape when viewed in the Z-axis direction, but of course, this is not limited to this. Furthermore, in this embodiment, one adjustment portion 50' is provided at each position facing one side of the intermediate member 30' (a total of four adjustment portions), but of course, this is not limited to this and the number of adjustment portions may be two.

[0148] That is, the intermediate member 30' differs in that it is provided with an adjustment portion 50' and that it does not have the above-mentioned protrusion.

[0149] As described above, in this embodiment, the intermediate member 30' is provided with the adjustment portion 50'. This allows the thickness of the fluid control device 1' in the Z-axis direction to be further reduced. Furthermore, in this embodiment, the first member 10' has a protrusion 1022A. The material of the protrusion 2022A is not particularly limited, and may be, for example, an elastic body.

[0150] In this embodiment, the first elastic portion 10A' (first elastic deformation portion 101A') and the second elastic portion 20A' (second elastic deformation portion 201A') are not provided with grooves, and have surfaces parallel to the XY plane. However, this is not a limitation, and grooves may be provided. This reduces the stress applied to the drive portion 40. Furthermore, by providing grooves, the resonance frequency of the fluid control device 1' itself shifts to a lower frequency. Based on this, it is possible to determine whether or not to provide grooves.

[0151] Furthermore, in this embodiment, the second member 20' has the above-described step portion 202B. This allows for additional frequency adjustment in addition to the adjustment portion 50'. In other words, without the step portion 202B, the second facing portion 202A and the second support member 20B' would be stacked together like flat plates, resulting in a structure in which the second facing portion 202A is difficult to bend. However, by providing the step portion 202B, the second facing portion 202A becomes easier to bend, allowing for frequency adjustment.

[0152] <Modification 2> Next, a modification of the second embodiment of the present technology will be described. Fig. 10 is a cross-sectional view of a fluid control device 1'' according to a modification of the second embodiment of the present technology. Configurations different from the second embodiment will be mainly described below, and configurations similar to those in the second embodiment will be denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0153] As shown in FIG. 10, the fluid control device 1'' differs in that an adjustment section 50'' of an intermediate member 30'' is provided so as to be in contact with the first elastic section 10A side on which the drive section 40 is provided.

[0154] As described above, in this embodiment, the adjustment portion 50'' is provided on the intermediate member 30''. This allows the thickness of the fluid control device 1'' in the Z-axis direction to be further reduced.

[0155] <Other Modifications> In the above-described embodiment, the adjustment unit 50 is provided on the space W side of the second elastic member 20A or on the side opposite to the space W, on the space W side of the first elastic member 10A, but of course this is not limited to this, and the adjustment unit 50 may be provided on the first elastic member 10A side either integrally with or separately from the first elastic member 10A.

[0156] In other words, the adjustment unit 50 may be, for example, arranged in a ring shape around the drive unit 40 of the first elastic unit 10A on which the drive unit 40 is provided, or may be arranged between the drive unit 40 and the first elastic unit 10A in the Z-axis direction, or may be provided on the opposite side of the drive unit 40 from the first elastic unit 10A in the Z-axis direction (on the top surface side of the drive unit 40).

[0157] Furthermore, in this embodiment, only one drive unit 40 is provided in the first elastic unit 10A, but of course, this is not limited to this, and an additional drive unit 40 may be provided in the second elastic unit 20A, which can further increase the amount of change in the volume of the space W.

[0158] <Variation 1 of the first check valve> In the present embodiment, the reed valve 101C and the first elastic portion 10A are in direct contact with each other, but of course this is not limited to this, and a spacer 103C may be further provided between the reed valve 101C and the first elastic portion 10A.

[0159] 11A and 11B are diagrams showing a first modified example of the first check valve 10C', where (A) is a diagram showing the open state, (B) is a diagram showing the closed state, and (C) is a cross-sectional view. The following mainly describes configurations that differ from the first embodiment, and configurations that are similar to those in the first embodiment are given the same reference numerals, and descriptions thereof will be omitted or simplified.

[0160] The first check valve 10C' includes a reed valve 101C, a valve holding portion 102C, and a spacer 103C having a predetermined height in the Z-axis direction. The spacer 103C faces the reed valve 101C (second reed valve portion 1012C) in the Z-axis direction and is provided between the first elastic portion 10A and the reed valve 101C.

[0161] As shown in Figure 10 (C), when the fluid control device 1 is not operating (when the space W is neither expanding nor contracting), a gap G is formed between the reed valve 101C (first reed valve portion 1011C) and the first elastic portion 10A (discharge hole 1021A).

[0162] 10(B), when the space W expands and the first check valve 10C' closes, the reed valve 101C and the first elastic portion 10A come into contact at an angle, which makes it possible to avoid direct collision between the surfaces of the first elastic portion 10A and the reed valve 101C, thereby reducing the contact noise between the first elastic portion 10A and the reed valve 101C.

[0163] In other words, the first check valve 10C' opens and closes in synchronization with the expansion and contraction of the space W, and there was a risk that the first check valve 10C' would be damaged by being struck at high speed against the first elastic portion 10A in which the discharge hole 1021A is formed. However, by providing a spacer 103C between the reed valve 101C and the first elastic portion 10A, it is possible to soften the impact of the collision and improve durability.

[0164] Furthermore, as shown in FIG. 10A, when the space W contracts and the first check valve 10C′ opens, the first check valve 10C′ can be easily opened because it is in oblique contact with the first elastic portion 10A.

[0165] In this embodiment, the spacer 103C is made of an elastic material such as rubber, but of course it is not limited to this and may be made of resin or the like. The spacer 103C and the reed valve 101C may be bonded together with an adhesive or the like. The height of the spacer 103C in the Z-axis direction is approximately 5 to 20 μm, but of course it is not limited to this.

[0166] <Modification 2 of the First Check Valve> In the above embodiment, the first check valve 10C' has the spacer 103C, but of course, this is not limited to this. Fig. 12 is a cross-sectional view of Modification 2 of the first check valve 10C.

[0167] The first elastic portion 10A''' of the fluid control device 1''' has an elastic step portion 10Aa that is recessed in the Z-axis direction. The elastic step portion 10Aa is provided so as to face the reed valve 101C (first reed valve portion 1011C) in the Z-axis direction. In other words, as shown in FIG. 12, when the fluid control device 1 is not driven (when the space W is neither expanded nor contracted), the elastic step portion 10Aa forms a gap G' between the reed valve 101C (first reed valve portion 1011C) and the first elastic portion 10A (discharge hole 1021A).

[0168] This also makes it possible to cushion the impact of a collision by providing a gap G' between the reed valve 101C and the first elastic portion 10A''', due to the elastic step portion 10Aa, and thereby improve durability. Furthermore, when the space W contracts and the first check valve 10C opens, the first check valve 10C' can be easily opened because it is in oblique contact with the first elastic portion 10A'".

[0169] <Example of use> Figure 13 is a diagram showing an example of use of the fluid control device 1, where (A) is a diagram showing a tactile presentation device 1000 with a cuff K attached to the fluid control device 1, (B) is a diagram showing the tactile presentation device 1000 being used as a switch, (C) is a diagram showing the tactile presentation device 1000 being worn by a user Y, (D) is a diagram showing the tactile presentation device 1000 being provided on a controller C, (E) is a diagram showing the tactile presentation device 1000 being attached to a doll N, and (F) is a diagram showing a scent being presented to a user Y by the fluid control device 1.

[0170] 13A, a fluid holding unit such as a cuff K may be further provided on the side of the first check valve 10C on the discharge side of the fluid control device 1. In this way, by driving the fluid control device 1, when the tactile presentation device 1000 is attached to the user Y, a desired tactile stimulus can be presented by contracting and inflating the cuff K.

[0171] As shown in FIG. 13B, the tactile presentation device 1000 may function as a button or a switch.

[0172] Furthermore, as shown in FIG. 13C, the above-described tactile presentation device 1000 may be attached to a finger F of a user Y to present a tactile stimulus to the user Y.

[0173] Furthermore, as shown in FIG. 13D, the above-described tactile presentation device 1000 may be built into, for example, a game controller C or an information terminal device, and vibrations or tactile stimuli may be presented to the user.

[0174] Furthermore, as shown in FIG. 13E, the above-described tactile presentation device 1000 may be built into a doll N or a robot, and the user may be presented with, for example, a feeling of heartbeat or breathing.

[0175] 13(F), a fragrance KR may be provided on the discharge side of the fluid control device 1 to provide a predetermined fragrance to the user Y. In other words, air is discharged from the discharge side when the fluid control device 1 is contracted. The fragrance may be provided to the user by this discharged air.

[0176] The effects described in the present embodiment are merely examples and are not limiting, and other effects may also be achieved. Furthermore, it is possible to combine the respective characteristic features of each embodiment and each modified example.

[0177] The present technology may also have the following configurations. (1) A fluid control device comprising: a housing including a first member including a first elastic portion that is an elastic body; and a second member including a second elastic portion that is an elastic body and that forms a space through which a fluid flows between the first member and the second member; a drive unit provided on at least one of the first elastic portion or the second elastic portion and elastically deforming at least one of the first elastic portion or the second elastic portion; and an adjustment unit provided on at least one of the first elastic portion or the second elastic portion and adjusting a resonance frequency of at least one of the first elastic portion or the second elastic portion. (2) The fluid control device according to (1) above, wherein the drive unit is provided on the first elastic portion, and the adjustment unit is provided on the second elastic portion. (3) The fluid control device according to (1) or (2) above, wherein the drive unit is provided on the first elastic portion, and the adjustment unit is provided on the first elastic portion around the drive unit. (4) The fluid control device according to any one of (1) to (3) above, wherein the drive unit is provided on the side of the first elastic portion opposite the space, and the adjustment unit is provided on either the first elastic portion or the second elastic portion facing the space. (5) The fluid control device according to any one of (1) to (4) above, wherein the adjustment unit is provided integrally with the first elastic portion or the second elastic portion. (6) The fluid control device according to (2) above, wherein the housing further has an intermediate member that is provided between the first elastic portion and the second elastic portion and forms the space, and the first member further has a first support member that sandwiches the first elastic portion between the intermediate member and the first elastic portion. (7) The fluid control device according to (6) above, wherein the first elastic portion has a first elastic deformation portion provided with the drive portion and elastically deformed by the drive portion, and a first opposing portion provided around the first elastic deformation portion and sandwiched between the intermediate member and the first support member. (8) The fluid control device according to (6) above, wherein the second member further has a second support member sandwiching the second elastic portion between the intermediate member and the second member.(9) The fluid control device according to (6) above, wherein the second elastic portion has a second elastic deformation portion provided with the adjustment portion and elastically deforming, and a second opposing portion provided around the second elastic deformation portion and sandwiched between the intermediate member and the second support member. (10) The fluid control device according to (9) above, wherein the second elastic deformation portion has a groove portion provided on the space side and recessed along a circular shape when viewed from the first member. (11) The fluid control device according to any one of (1) to (10) above, wherein the first elastic portion has a discharge hole through which the fluid is discharged, and the second elastic portion has a suction hole through which the fluid is sucked. (12) The fluid control device according to any one of (1) to (11) above, wherein the drive portion is a piezoelectric element. (13) The fluid control device according to any one of (1) to (12) above, wherein the adjustment section is formed by potting. (14) The fluid control device according to any one of (1) to (13) above, wherein a resonant frequency of the fluid control device is measured, and the amount or shape of the adjustment section is adjusted based on the measured resonant frequency. (15) The fluid control device according to any one of (1) to (14) above, wherein the adjustment section is ring-shaped. (16) The fluid control device according to any one of (1) to (15) above, wherein a plurality of the adjustment sections are provided on at least one of the first elastic section or the second elastic section. (17) The fluid control device according to (11) above, wherein the first member further has a check valve capable of opening and closing the discharge hole, and the check valve has a reed valve capable of opening and closing the discharge hole, and a spacer provided between the reed valve and the first elastic portion to form a gap between the reed valve and the first elastic portion. (18) The fluid control device according to (11) above, wherein the first member further has a check valve capable of opening and closing the discharge hole, and the check valve has a reed valve capable of opening and closing the discharge hole, and the first elastic portion further has a step recessed toward the space at a position opposite the reed valve.(19) A method for manufacturing a fluid control device, comprising: preparing a housing including a first member including a first elastic portion that is an elastic body and a second member including a second elastic portion that is an elastic body and that forms a space through which a fluid flows between the first member; a drive unit provided on at least one of the first elastic portion or the second elastic portion, and elastically deforming at least one of the first elastic portion or the second elastic portion; and an adjustment unit provided on at least one of the first elastic portion or the second elastic portion, and adjusting the resonance frequency of at least one of the first elastic portion or the second elastic portion; and forming the adjustment unit for adjusting the resonance frequency of at least one of the first member or the second member on at least one of the first elastic portion or the second elastic portion. (20) A method for manufacturing a fluid control device according to (19) above, wherein the resonant frequencies of the first member and the second member are measured, and the amount or shape of the adjustment portion is adjusted based on the measured resonant frequencies, and the adjusted adjustment portion is formed in at least one of the first elastic portion or the second elastic portion.

[0178] REFERENCE SIGNS LIST 1... fluid control device 10... first member 10A... first elastic portion 20... second member 20A... second elastic portion 30... intermediate member 40... drive portion 50... adjustment portion W... space

Claims

1. A fluid control device comprising: a housing including a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a space through which a fluid flows between the first member and the second member; a drive unit provided on at least one of the first elastic portion or the second elastic portion, which elastically deforms at least one of the first elastic portion or the second elastic portion; and an adjustment unit provided on at least one of the first elastic portion or the second elastic portion, which adjusts the resonance frequency of at least one of the first elastic portion or the second elastic portion.

2. A fluid control device according to claim 1, wherein the drive unit is provided in the first elastic unit, and the adjustment unit is provided in the second elastic unit.

3. A fluid control device according to claim 1, wherein the drive unit is provided in the first elastic unit, and the adjustment unit is provided in the first elastic unit around the drive unit.

4. A fluid control device as claimed in claim 1, wherein the drive unit is provided on the side of the first elastic unit opposite the space, and the adjustment unit is provided on either the first elastic unit or the second elastic unit on the side of the space.

5. A fluid control device according to claim 4, wherein the adjusting section is provided integrally with the first elastic section or the second elastic section.

6. A fluid control device as claimed in claim 2, wherein the housing further has an intermediate member disposed between the first elastic portion and the second elastic portion to form the space, and the first member further has a first support member that sandwiches the first elastic portion between the intermediate member and the first member.

7. A fluid control device as set forth in claim 6, wherein the first elastic portion has a first elastic deformation portion provided with the drive portion and elastically deformed by the drive portion, and a first opposing portion provided around the first elastic deformation portion and sandwiched between the intermediate member and the first support member.

8. A fluid control device according to claim 6, wherein the second member further comprises a second support member that sandwiches the second elastic portion between the second support member and the intermediate member.

9. A fluid control device as set forth in claim 6, wherein the second elastic portion has a second elastic deformation portion provided with the adjustment portion and elastically deforming, and a second opposing portion provided around the second elastic deformation portion and sandwiched between the intermediate member and the second support member.

10. A fluid control device according to claim 9, wherein the second elastically deforming portion is provided on the space side and has a groove portion recessed along a circular shape when viewed from the first member.

11. A fluid control device according to claim 1, wherein the first elastic portion has a discharge hole through which the fluid is discharged, and the second elastic portion has a suction hole through which the fluid is sucked.

12. A fluid control device according to claim 1, wherein the driving unit is a piezoelectric element.

13. A fluid control device according to claim 1, wherein the adjusting section is formed by potting.

14. A fluid control device according to claim 1, wherein the resonant frequency of the fluid control device is measured, and the amount or shape of the adjusting portion is adjusted based on the measured resonant frequency.

15. A fluid control device according to claim 1, wherein the adjusting section is ring-shaped.

16. A fluid control device according to claim 1, wherein the adjusting section is provided in a plurality of units in at least one of the first elastic section and the second elastic section.

17. A fluid control device as set forth in claim 11, wherein the first member further has a check valve capable of opening and closing the discharge hole, and the check valve has a reed valve capable of opening and closing the discharge hole, and a spacer provided between the reed valve and the first elastic portion to form a gap between the reed valve and the first elastic portion.

18. A fluid control device as set forth in claim 11, wherein the first member further has a check valve capable of opening and closing the discharge hole, the check valve has a reed valve capable of opening and closing the discharge hole, and the first elastic portion further has a step portion recessed toward the space at a position opposite the reed valve.

19. A method for manufacturing a fluid control device comprising: a housing including a first member including a first elastic portion that is an elastic body; and a second member including a second elastic portion that is an elastic body and that forms a space through which a fluid flows between the first member; a drive unit provided on at least one of the first elastic portion or the second elastic portion and that elastically deforms at least one of the first elastic portion or the second elastic portion; and an adjustment unit provided on at least one of the first elastic portion or the second elastic portion and that adjusts the resonance frequency of at least one of the first elastic portion or the second elastic portion; and forming the adjustment unit for adjusting the resonance frequency of at least one of the first member or the second member on at least one of the first elastic portion or the second elastic portion.

20. A method for manufacturing a fluid control device as described in claim 19, wherein the resonant frequencies of the first member and the second member are measured, and the amount or shape of the adjustment portion is adjusted based on the measured resonant frequencies, and the adjusted adjustment portion is formed in at least one of the first elastic portion or the second elastic portion.

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