Highly reactive floating holder and processing apparatus including same

Abstract

The present invention relates to a floating holder and a processing apparatus including same and, more specifically, to a highly reactive floating holder and a processing apparatus including same. The highly reactive floating holder according to the present invention comprises: a vibration shaft; a first magnet pair between which a repulsive force acts; and a second magnet pair between which an attractive force acts, wherein the repulsive force acting on the first magnet pair and the attractive force acting on the second magnet pair are proportional to each other when the vibration shaft vibrates.

Description

High-reactivity floating holder and processing device including the same

[0001] The present invention relates to a floating holder and a processing device including the same, and more particularly, to a high-reactivity floating holder and a processing device including the same.

[0002] When cutting or grinding the surface of a workpiece using a processing tool such as a cutter or scriber, the pressure applied to the workpiece changes due to the microscopic irregularities or curves formed on the surface, which may result in damage or poor processing.

[0003] To solve these problems, a method of attaching a spring or pneumatic shock absorber or floating holder to the machining tool has been proposed.

[0004] Korean Patent No. 10-0693164, granted to LG Electronics, proposes a method for absorbing pressure changes due to unevenness by installing an elastic spring in a glass cutting head. However, this method is known to have limitations in processing thin glass (0.1-1.0 mm), which is thin and susceptible to breakage, due to the minute pressure changes during the spring's compression and rebound.

[0005] To overcome these problems, Korean Patent No. 10-0932528 granted to Park Young-bae, as shown in Fig. 1, proposes a method of absorbing pressure changes by utilizing the repulsive force between magnets having the same poles, and additionally absorbing residual vibrations resulting from the absorption of pressure changes by utilizing hydraulic pressure.

[0006] However, this method does not solve the problem that the closer magnets with the same poles get to each other, the stronger the repulsive force becomes, which increases the downward pressure.

[0007] The problem to be solved in the present invention is to provide a new highly responsive floating holder capable of providing uniform pressure despite the surface curvature of a workpiece.

[0008] Another problem to be solved by the present invention is to provide a machining device including a novel high-responsive floating holder capable of providing uniform pressure despite the surface curvature of a workpiece.

[0009] Another problem to be solved in the present invention is to provide a new method capable of providing uniform pressure despite the surface curvature of the workpiece.

[0010] In order to solve the above problems, the present invention

[0011] Vibration axis,

[0012] A first pair of magnets that exert a repulsive force on each other, and

[0013] A second pair of magnets having mutually attractive forces,

[0014] Here, a highly responsive floating holder is provided, characterized in that the repulsive force acting on the first magnet pair is proportional to the attractive force acting on the second magnet pair when the vibration axis is vibrated.

[0015] Although not theoretically limited, the increase in pressure applied to the workpiece is prevented by applying an attractive force in the direction opposite to the direction in which the repulsive force acts to offset the repulsive force, thereby preventing the increase in pressure applied to the workpiece from occurring due to the rise in the vibration axis caused by the curvature of the surface of the workpiece, the proximity of the first magnet pair due to the rise in the vibration axis, and the increase in repulsive force.

[0016] In the present invention, the first magnet pair may be a permanent magnet, and the N poles or S poles may face each other.

[0017] In the practice of the present invention, one of the first magnet pairs may be fixed to the vibration axis and reciprocated, and the other of the first magnet pairs may be fixed to the case.

[0018] In the present invention, the second magnet pair may be a permanent magnet, and the N pole and the S pole may be mutually opposed.

[0019] In the practice of the present invention, one of the second magnet pairs may be fixed to the vibration axis and reciprocated, and the other of the second magnet pairs may be fixed to the case.

[0020] In the practice of the present invention, the vibration axis may be a vertical vibration axis, and when the vibration axis rises, the mutual repulsion acting on the first magnet pair and the mutual attraction acting on the second magnet pair may increase together, and when the vibration axis descends, the mutual repulsion acting on the first magnet pair and the mutual attraction acting on the second magnet pair may decrease together.

[0021] In one embodiment of the present invention, when the vibration axis is vertical, the increase in repulsive force that occurs when the vibration axis rises can be offset by the increase in attractive force, so that the increased repulsive force and the increased attractive force can be substantially equal. In this way, the vibration axis is lowered by gravity, as the repulsive force that rises due to the proximity of the first magnet pair is offset by the attractive force that rises due to the proximity of the second magnet pair.

[0022] In another embodiment of the present invention, when the vibration axis is horizontal, the increase in repulsive force that occurs when the vibration axis rises may be greater than the increase in attractive force. This allows the vibration axis to return to its original position by the remaining repulsive force, while the repulsive force that increases due to the proximity of the first magnet pair is reduced by the attractive force that increases due to the proximity of the second magnet pair.

[0023] In one embodiment of the present invention, the repulsive force between the first pair of magnets and the attractive force between the second pair of magnets can be controlled by the size and distance of the magnets.

[0024] In another aspect, the present invention

[0025] Case and,

[0026] A reciprocating vibration shaft inserted into the above case,

[0027] A first pair of magnets that exert a repulsive force on each other, and

[0028] A second pair of magnets having mutually attractive forces,

[0029] Here, a highly responsive floating holder in which the repulsive force acting on the first magnet pair is proportional to the attractive force acting on the second magnet pair when the vibration axis is vibrated; and

[0030] A processing device including a processing tool coupled to the floating holder is provided.

[0031] In the present invention, the processing tool may be a cutter or a scriber.

[0032] In the present invention, the workpiece may be a glass plate. The glass plate may be a thin-film glass plate or an ultra-thin glass plate. The ultra-thin glass plate may have a thickness of 100 microns or less.

[0033] The present invention provides a novel, highly responsive floating holder capable of achieving uniform pressure despite surface irregularities due to its superior responsiveness. The floating holder according to the present invention maintains a constant force applied to the surface of a workpiece by simultaneously increasing or decreasing repulsive and attractive forces during vibration of the vibration axis.

[0034] Accordingly, ultra-thin glass plates that are easily broken by pressure during processing can be cut or scrubbed without breaking.

[0035] Fig. 1 is a cross-sectional view of a floating holder according to the prior art.

[0036] FIG. 2 is a drawing showing a cross-section of a high-reactivity floating holder according to one embodiment of the present invention.

[0037] FIG. 3 is a cross-sectional view showing changes in the vibration axis of a high-reactivity floating holder according to one embodiment of the present invention.

[0038] FIG. 4 is a cross-sectional view showing changes in processing of ultra-thin glass using a high-reactivity floating holder according to one embodiment of the present invention.

[0039] Figure 5 is a cross-sectional view showing the change in the vibration axis of a floating holder with only a pair of magnets acting as a repulsive force for comparison purposes. Figure 5a shows the state before the rise, and Figure 5b shows the state after the rise.

[0040] Figure 6 illustrates the curvature of an ultra-thin glass surface.

[0041] FIG. 7 is a photograph showing the pressure applied to an object when pressing a floating holder, FIG. 7a shows the result of a high-responsive floating holder according to the present invention, and FIG. 7b shows the result of a floating holder according to a comparative experiment.

[0042] FIG. 8 is a cross-sectional view showing the change in the vibration axis rise of a high-responsive floating holder according to another embodiment of the present invention in which a pair of magnets acting on a repulsive force are installed at the top and another pair of magnets acting on an attractive force are installed at the bottom.

[0043] Figure 9 is a drawing showing changes in the vibration axis of the high-reactivity floating holder of Figure 8 according to its rise.

[0044] Figure 10 is a drawing showing another embodiment in which a baffle is formed between a pair of magnets on which a repulsive force is applied and a pair of magnets on which an attractive force is applied.

[0045] Figure 11 is a drawing showing another embodiment in which a pair of magnets exerting a repulsive force and a pair of magnets exerting an attractive force are formed in a compartment spaced apart by a predetermined distance.

[0046] Hereinafter, the present invention will be described in detail through examples. The following examples are not intended to limit the present invention, but rather serve to illustrate the present invention.

[0047] As illustrated in FIG. 2, a high-reactivity floating holder (10) according to the present invention includes a floating holder case (100), a vibration shaft (200) inserted inside the cylindrical case and reciprocating up and down, a first magnet pair (310) installed inside the cylindrical case and having a repulsive force applied thereto, and a second magnet pair (320) having an attractive force applied thereto.

[0048] The floating holder case (100) is a cylindrical case with an open bottom and a closed top, and extends vertically. A device connection groove (110) that can be connected to a processing device (not shown) is formed on the top of the floating holder case (100), and a screw thread can be formed on the inside of the processing device connection groove (110) for connection with the processing device.

[0049] The vibration shaft (200) inserted into the floating holder case (100) and reciprocating up and down is formed by a cylindrical tool coupling shaft (210) having a lower end exposed to the outside of the floating holder case (100) and an upper end inserted into the inside of the floating holder case (100) and reciprocating up and down, to which a processing tool is coupled at the lower end, and a magnet coupling shaft (220) formed at the upper center of the tool coupling shaft (210) and reciprocating up and down inside the floating holder case (100) together with the tool coupling shaft (210), to which a moving magnet is coupled.

[0050] The above first magnet pair (310) is installed so that N and N face each other so that a repulsive force acts on each other.

[0051] The first moving magnet (311) forming the first magnet pair (310) is a permanent magnet in the shape of a disk having a through hole in the center into which a magnet coupling shaft (220) is inserted, and has a north pole on the upper surface and a south pole on the lower surface. The first moving magnet (311) is a magnet that is coupled to the upper surface of the tool coupling shaft (210) or coupled to the side surface of the magnet coupling shaft (220) and moves together when the vibration shaft (200) moves up and down.

[0052] The first fixed magnet (312) forming the first magnet pair (310) is a permanent magnet in the shape of a disk having a through hole in the center into which a magnet coupling shaft (220) is inserted, and has a N pole on the side surface and a S pole on the upper surface so that a repulsive force is applied between it and the first fixed magnet (311). The first fixed magnet (312) is fixed to the inner surface of the floating holder case (100) and is a fixed magnet that does not move when the vibration shaft (200) moves up and down.

[0053] The second moving magnet (321) forming the second magnet pair (320) is a permanent magnet in the shape of a disk having a through hole in the center into which a magnet coupling shaft (220) is inserted, and has a north pole on the upper surface and a south pole on the lower surface. The second moving magnet (321) is a magnet that is coupled to the side of the magnet coupling shaft (220) and moves together when the vibration shaft (200) moves up and down.

[0054] The second fixed magnet (322) forming the second magnet pair (320) is a permanent magnet in the shape of a disk, and has an S pole on the side surface and an N pole on the upper surface so that an attractive force acts between it and the second fixed magnet (322). The second fixed magnet (322) is fixed to the upper inner surface of the floating holder case (100) and is a fixed magnet that does not move when the vibration axis (200) moves up and down.

[0055] Referring to FIG. 3, as illustrated in FIG. 3a, the distance between the first moving magnet (311) and the first fixed magnet (312) forming the first magnet pair (310) is L1, and a repulsive force inversely proportional to the distance acts. In addition, the distance between the second moving magnet (321) and the second fixed magnet (322) forming the second magnet pair (320) is L2, and an attractive force proportional to the distance acts.

[0056] When the vibration axis (200) rises by △L, as shown in FIG. 3b, the first moving magnet (311) forming the first magnet pair rises by △L, while the first fixed magnet (312) forming the first magnet pair does not move, so that the distance L1 between the first magnet pair changes to L1', where L1' is equal to L1-△L. Accordingly, the repulsive force acting between the first magnet pair increases in proportion to △L.

[0057] In contrast, the second moving magnet (321) forming the second magnet pair (320) rises by △L, while the second fixed magnet (322) forming the first magnet pair does not move, so the distance L2 between the second magnet pair changes to L2', where L2' is equal to L2-△L. Accordingly, the attractive force acting between the second magnet pair also increases in proportion to △L.

[0058] Accordingly, the increase in the repulsive force between the first pair of magnets (310) that occurs as the vibration axis (200) rises by △L is fully offset by the increase in the attractive force between the second pair of magnets (320).

[0059] As illustrated in FIG. 4, the high-reactivity floating holder (10) according to the present invention has a processing rotary cutter (400) attached to the lower end of the vibration axis (200), and the upper portion of the cylindrical case is fixed to the processing device (500) and moves together with the movement of the processing device (500). On the surface of the ultra-thin glass (600) to be processed, a curve having a height of the reference line + △L generated during the etching process is formed.

[0060] As shown in Fig. 4a, when the rotary cutter (400) contacts the reference line of the ultra-thin glass (600), a reference torque (To) is applied for cutting.

[0061] As illustrated in FIG. 4b, when the rotary cutter (400) is positioned above the curve that is raised by △ L from the reference line of the ultra-thin glass (600), the distance between the first pair of magnets (310) on which a repulsive force is applied decreases by △ L due to the rise of the vibration axis (200), and the distance between the second pair of magnets (320) on which an attractive force is applied also decreases by △ L. Accordingly, the repulsive force applied between the first pair of magnets (310) and the attractive force applied between the second pair of magnets (320) increase and cancel each other out, so that the torque applied to the glass plate (600) maintains the reference torque (To).

[0062] As illustrated in FIG. 4c, when the rotary cutter (400) moves back down from the curved surface that is raised by △ L from the reference line of the ultra-thin glass (600) to the height of the reference line, the distance between the first pair of magnets (310) on which a repulsive force is applied due to the lowering of the vibration axis (200) increases by △ L, and the distance between the second pair of magnets (320) on which an attractive force is applied also increases by △ L. Accordingly, the repulsive force applied between the first pair of magnets (310) and the attractive force applied between the second pair of magnets (320) decrease and cancel each other out, so that the torque applied to the glass plate (600) maintains the reference torque (To).

[0063] As shown in Fig. 5, a floating holder having only the first pair of magnets to which a repulsive force is applied for comparison purposes is applied a reference torque (To) for cutting when the rotating cutter (400) contacts the reference line of the ultra-thin glass (600), as shown in Fig. 5a.

[0064] In addition, as illustrated in FIG. 5b, when the rotary cutter (400) is positioned above the curve that is raised by △ L from the reference line of the ultra-thin glass (600), the distance between the first pair of magnets (310) on which a repulsive force is applied due to the rise of the vibration axis (200) decreases by △ L, and accordingly, the repulsive force applied between the first pair of magnets (310) increases. In addition, the ultra-thin glass plate (600) is applied with a combined torque of the reference torque (To) + the increased repulsive force. At this time, if the combined torque exceeds the limit that the ultra-thin glass plate (600) can withstand, the ultra-thin glass plate is damaged.

[0065] When cutting a glass substrate of an ultra-thin glass substrate having a number of curves formed on the surface as shown in Fig. 6, if a high-reactivity floating holder such as that shown in Fig. 4 is used, a constant torque is exhibited regardless of the surface curve, whereas if a floating holder that only exerts a repulsive force such as that shown in Fig. 5 is used, the torque changes depending on the surface curve.

[0066] As shown in Fig. 7, when a highly reactive floating holder having a structure like that of Fig. 4 was compressed from 1 mm to 5 mm, the generated pressure was maintained at 14 to 16 N (Fig. 7a). On the other hand, when a floating holder having a structure like that of Fig. 5 was compressed from 1 mm to 5 mm, the generated pressure increased from 10 to 26 N (Fig. 7b).

[0067] As illustrated in FIG. 8, a high-reactivity floating holder (10) according to another embodiment of the present invention has a first pair of magnets (310) that exert a repulsive force on each other, positioned at the upper part of the interior of a cylindrical case, and a second pair of magnets (320) that exert an attractive force on each other, positioned at the lower part of the interior of the cylindrical case.

[0068] The first moving magnet (311) forming the first magnet pair (310) is a permanent magnet in the shape of a disk having a through hole in the center into which a magnet coupling shaft (220) is inserted, and has a north pole on the upper surface and a south pole on the lower surface. The first moving magnet (311) is a magnet that is coupled to the side surface of the magnet coupling shaft (220) and moves together when the vibration shaft (200) moves up and down.

[0069] The first fixed magnet (312) forming the first magnet pair (310) is a permanent magnet in the shape of a disk, and has an N pole on the side surface and a S pole on the upper surface so that a repulsive force is applied between it and the first fixed magnet (311). The first fixed magnet (312) is fixed to the inner upper surface of the floating holder case (100), and is a fixed magnet that does not move when the vibration axis (200) moves up and down.

[0070] The second moving magnet (321) forming the second magnet pair (320) is a permanent magnet in the shape of a disk having a through hole in the center into which a magnet coupling shaft (220) is inserted, and has a north pole on the upper surface and a south pole on the lower surface. The second moving magnet (321) is a magnet that is coupled to the upper surface of the tool coupling shaft (210) or the side surface of the magnet coupling shaft (220) and moves together when the vibration shaft (200) moves up and down.

[0071] The second fixed magnet (322) forming the second magnet pair (320) is a permanent magnet in the shape of a disk, and has a south pole on the side surface and a north pole on the upper surface so that an attractive force acts between it and the second fixed magnet (322). The second fixed magnet (322) is fixed to the side surface of the magnet coupling shaft (210) and is a fixed magnet that does not move when the vibration shaft (200) moves up and down.

[0072] Referring to FIG. 9, as illustrated in FIG. 9a, the distance between the first moving magnet (311) and the first fixed magnet (312) forming the first magnet pair (310) is L1, and a repulsive force inversely proportional to the distance acts. In addition, the distance between the second moving magnet (321) and the second fixed magnet (322) forming the second magnet pair (320) is L2, and an attractive force proportional to the distance acts.

[0073] When the vibration axis (200) rises by △L, as shown in FIG. 5b, the first moving magnet (311) forming the first magnet pair rises by △L, while the first fixed magnet (312) forming the first magnet pair does not move, so that the distance L1 between the first magnet pair changes to L1', where L1' is equal to L1-△L. Accordingly, the repulsive force acting between the first magnet pair increases in proportion to △L.

[0074] In contrast, the second moving magnet (321) forming the second magnet pair (320) rises by △L, while the second fixed magnet (322) forming the second magnet pair does not move, so the distance L2 between the second magnet pair changes to L2', where L2' is equal to L2-△L. Accordingly, the attractive force acting between the second magnet pair also increases in proportion to △L.

[0075] Accordingly, the increase in the repulsive force between the first pair of magnets (310) that occurs as the vibration axis (200) rises by △L is offset by the increase in the attractive force between the second pair of magnets (320).

[0076] As illustrated in FIG. 10, in one embodiment according to the present invention, a floating holder case (100) is formed with an intermediate partition (150) therein to facilitate fixing of a second fixed magnet and to prevent interference between the first magnet pair (310) and the second magnet pair (320). A through hole for a magnet coupling shaft (220) is formed in the center of the intermediate partition (150).

[0077] As illustrated in FIG. 11, in another embodiment according to the present invention, the floating holder case (100) has a first magnet pair (310) and a second magnet pair (320) positioned in the lower compartment (151) and the upper compartment (152), respectively, and a magnet coupling shaft (220) forming a vibration axis (200) extends from the lower compartment (151) to the upper compartment (152) through the intermediate partition (150).

[0078] Those skilled in the art should understand that the above examples are not intended to limit the present invention, but rather to illustrate it. Therefore, the scope of the present invention is defined by the following claims, and it should be noted that modifications that incorporate the same technical concept and include additions, substitutions, deletions, and combinations of known techniques fall within the scope of the present invention.

[0079] Although the examples are described only for vibration along a vertical direction, the same principles can be applied to vibration along a horizontal or inclined direction.

[0080] [Symbol Description]

[0081] 10: Floating holder

[0082] 100: Case

[0083] 200: Vibration axis

[0084] 210: Magnet coupling shaft

[0085] 220: Tool coupling axis

[0086] 310: First magnet pair

[0087] 311: First moving magnet

[0088] 312: First fixed magnet

[0089] 320: Second magnet pair

[0090] 321: Second moving magnet

[0091] 322: Second fixed magnet

[0092] 400: Rotary cutter

[0093] 500: Processing unit

[0094] 600: Ultra-thin glass plate

Claims

1. Vibration axis, A first pair of magnets that exert a repulsive force on each other, and A second pair of magnets having mutually attractive forces, Here, a highly responsive floating holder characterized in that the repulsive force acting on the first magnet pair and the attractive force acting on the second magnet pair are proportional when the vibration axis is vibrated.

2. In paragraph 1, The two magnets forming the first magnet pair are installed facing each other, A highly reactive floating holder characterized in that two magnets forming a second magnet pair are also installed facing each other.

3. In paragraph 1, One of the first magnet pairs reciprocates, and the other of the first magnet pairs is fixed, A highly reactive floating holder, characterized in that one of the second magnet pairs reciprocates and the other of the second magnet pairs is fixed.

4. In paragraph 1, A highly reactive floating holder characterized in that the reciprocating distance of the reciprocating magnets among the first magnet pair is the same as the reciprocating distance of the reciprocating magnets among the second magnet pair.

5. In paragraph 1, A high-reactivity floating holder characterized in that the vibration axis vibrates vertically along a vibration hole formed in the high-reactivity floating holder.

6. In any one of paragraphs 1 to 5, One magnet of the first magnet pair is fixed to the vibration axis and reciprocates, and the other magnet of the first magnet pair is fixed to the vibration hole in which the vibration axis reciprocates. A highly responsive floating holder, characterized in that one of the second magnet pairs is fixed to a vibration axis and reciprocates, and the other of the second magnet pairs is fixed to a vibration hole in which the vibration axis reciprocates.

7. In paragraph 6, A highly reactive floating holder, characterized in that the first magnet pair is located at the lower portion of the vibration hole, and the second magnet pair is located at the upper portion of the vibration hole.

8. In paragraph 6, A highly reactive floating holder, characterized in that the first pair of magnets is located at the upper portion of the vibration hole, and the second pair of magnets is located at the lower portion of the vibration hole.

9. In paragraph 6, A high-responsive floating holder, characterized in that the vibration hole has a partition between the first magnet pair and the second magnet pair, and the partition is penetrated by the vibration axis.

10. A high-reactivity floating holder according to any one of clauses 1 to 5; and A machining device including a machining tool fixed to the floating holder.

11. In paragraph 10, A processing device characterized in that the processing device is a cutter or a scriber.

12. In paragraph 10, A processing device characterized in that the above-mentioned workpiece is an ultra-thin glass substrate.

Images