Multi-component gas mixture preparation apparatus and use method

Abstract

The present invention relates to a multi-component gas mixture preparation apparatus, comprising a vacuum pumping pipe system, a gas inlet pipe system, a gas preparation pipe system, a circulating pipe system, and a filling pipe system which are connected by pipes. The vacuum pumping pipe system comprises a first vacuum pipe system and a second vacuum pipe system. The gas inlet pipe system comprises a main gas inlet pipe, and the main gas inlet pipe is provided with a branch gas inlet pipe and a main preparation gas inlet valve which are connected in sequence. The gas preparation pipe system is formed by a first parallel pipe system and a second parallel pipe system. The circulating pipe system comprises a gas return pipe I, a return valve, and a gas return pipe II which are connected in sequence. The filling pipe system comprises a main gas outlet pipe, and the main gas outlet pipe is provided with a main prepared gas outlet valve, a diaphragm compressor, a filling valve, and a filling container which are connected in sequence. In the present invention, gas mixture calibration is performed on the basis of gravimetric data of a parallel filling calibration tank, and a diaphragm compressor is used to perform uniform gas mixing, thereby shortening the time for uniform mixing while ensuring the precision of gas preparation, and improving the production efficiency.

Description

A multi-component mixed gas preparation device and its usage method

[0001] This application claims priority to Chinese Patent Application No. 202411184110.8, filed on August 27, 2024, entitled "A Multi-Component Mixed Gas Preparation Apparatus and Method of Use", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This invention relates to the field of mixed gas preparation technology, and in particular to a multi-component mixed gas preparation device and its usage method. Background Technology

[0003] The requirements for the component content of mixed gases are relatively high, especially in the semiconductor manufacturing field where the requirements for component content are even more stringent. However, due to factors such as gas characteristics and gas mixing equipment, production efficiency or product performance indicators are seriously affected.

[0004] Currently, the main methods for preparing mixed gases include weighing and partial pressure methods. Weighing methods, using high-precision weighing equipment, can achieve high mixing accuracy, but require a long period of settling and mixing, or labor-intensive manual mixing, significantly reducing production efficiency and increasing labor intensity. In partial pressure methods, component accuracy cannot be guaranteed due to the influence of temperature and gas compressibility factors, and gas mixing also requires a long time. Therefore, we propose a mixed gas preparation device and method to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a multi-component mixed gas preparation device and a method for using it, so as to solve the technical problems of low partial pressure gas distribution accuracy, long weighing and mixing time, or high labor intensity in the above-mentioned prior art.

[0006] The specific technical solution of the present invention is as follows:

[0007] A multi-component mixed gas preparation device includes a vacuum pumping pipeline, an inlet pipeline, a gas distribution pipeline, a circulation pipeline, and a filling pipeline connected by pipes.

[0008] The vacuum pipeline includes a first vacuum pipeline and a second vacuum pipeline;

[0009] The intake pipeline includes a main intake pipeline, on which intake branch pipelines and a main intake valve are connected in sequence.

[0010] The gas distribution pipeline consists of a first parallel pipeline and a second parallel pipeline. A storage tank is installed on the first parallel pipeline, and a set value tank is installed on the second parallel pipeline. A weighing device is installed below the set value tank.

[0011] The circulation pipeline includes a return gas line pipe one, a return valve, and a return gas line pipe two connected in sequence.

[0012] The filling pipeline includes a main gas outlet pipeline, on which a gas distribution and outlet valve, a diaphragm compressor, a filling valve, and a filling container are connected in sequence.

[0013] The first vacuum line is connected to the main inlet line, and the second vacuum line is connected to the main outlet line; one end of the first parallel line and the second parallel line are connected to the main gas distribution valve, and the other end is connected to the main outlet line; the first return gas line is connected to the main gas distribution valve, and the second return gas line is connected to the outlet of the diaphragm compressor gas.

[0014] Preferably, the first vacuum line and the second vacuum line are connected; and / or,

[0015] A first pressure gauge is also installed on the main intake pipeline, and the intake branch pipelines, the first pressure gauge, and the main intake valve are installed sequentially; and / or

[0016] The second parallel pipeline is equipped with a gas inlet valve and a gas outlet valve, which are respectively located at both ends of the setpoint tank.

[0017] Preferably, the setpoint tank is detachably connected to the gas inlet valve and the gas outlet valve.

[0018] Preferably, a first valve is provided on the first vacuum line and a second valve is provided on the second vacuum line; and / or,

[0019] The first parallel conduit and the second parallel conduit are equidistant in length; and / or,

[0020] The volume of the storage tank is 20-600 times that of the fixed-value tank;

[0021] A second pressure gauge is installed on the storage tank, and a third pressure gauge is installed on the constant pressure tank; and / or,

[0022] The weighing equipment uses a high-precision mass comparator.

[0023] Preferably, the main intake pipeline is further provided with a first analysis pipeline, and the first analysis pipeline is provided with an analysis valve; and / or,

[0024] A second analysis pipeline is also provided on the main gas outlet pipeline, and an analysis valve is installed on the second analysis pipeline.

[0025] Preferably, the intake manifold includes an intake manifold and an intake valve connected together, and at least one set of intake manifolds is provided.

[0026] Preferably, the filling container is detachably connected to the main gas outlet pipeline.

[0027] The present invention also provides a method for preparing and using a multi-component mixed gas, comprising the following steps:

[0028] S1. Evacuate the storage tank and the setpoint tank through the second vacuum pipeline, and record the empty tank mass of the setpoint tank on the weighing equipment;

[0029] S2. Connect the first component gas to the inlet branch line, evacuate through the first vacuum line, then open the gas distribution and inlet main valve to charge the storage tank and the setpoint tank with the first component gas, then close the gas distribution and inlet main valve, and calculate the charging mass of the first component gas based on the weighing value of the setpoint tank on the weighing device.

[0030] S3. Connect the second component gas to the inlet branch line, evacuate through the first vacuum line, then open the gas distribution and inlet main valve to charge the storage tank and the setpoint tank with the second component gas, then close the gas distribution and inlet main valve, and calculate the charging mass of the second component gas based on the weighing value of the setpoint tank on the weighing device.

[0031] S4. Close the main gas inlet valve and the filling valve, open the main gas outlet valve and the return valve, start the diaphragm compressor to circulate and mix the mixed gas in the storage tank and the set value tank until the mixed gas is evenly mixed, and then close the diaphragm compressor.

[0032] S5. Close the return valve, open the filling valve, and start the membrane press again to fill the filling container with the mixed gas from the storage tank and the set value tank to obtain the mixed gas.

[0033] Preferably, a first valve is provided on the first vacuum pipeline, a second valve is provided on the second vacuum pipeline, and the air intake branch line includes an air intake branch line and an air intake valve connected to each other.

[0034] Step S1 specifically involves: opening the second valve on the second vacuum pipeline to evacuate the storage tank and the setpoint tank, and recording the empty tank mass of the setpoint tank on the weighing equipment;

[0035] And / or,

[0036] Step S2 is as follows: Connect the first component gas to the inlet valve, open the first valve on the first vacuum pipeline to evacuate the vacuum, then close the first valve, open the inlet valve on the inlet branch pipeline, open the main gas distribution valve to charge the storage tank and the setpoint tank with the first component gas, then close the main gas distribution valve, and when the pressure of the first component gas in the storage tank and the setpoint tank is equal, calculate the charging mass of the first component gas based on the weighing value of the setpoint tank on the weighing device.

[0037] And / or,

[0038] Step S3 is as follows: Connect the second component gas to the inlet valve, open the first valve on the first vacuum line to evacuate the vacuum, then close the first valve, open the inlet valve on the inlet branch line, open the main gas distribution valve to charge the storage tank and the setpoint tank with the second component gas, then close the main gas distribution valve. When the pressure of the second component gas in the storage tank and the setpoint tank is equal, calculate the charging mass of the second component gas based on the weighing value of the setpoint tank on the weighing device.

[0039] Preferably, when preparing a three-component or multi-component mixed gas, step S3 is repeated to obtain a three-component or multi-component mixed gas.

[0040] Preferably, after the component gas is filled into the storage tank and the setpoint tank, the pressure difference between the storage tank and the setpoint tank should be ≤0.05 MPa before weighing the setpoint tank; after the mixed gas is homogenized, the content of each component in the storage tank and the setpoint tank is measured, and the deviation of each component content is ≤0.05%; the mixed gas in the storage tank and the setpoint tank is homogenized by the membrane compressor 2-5 times / hour.

[0041] The multi-component mixed gas preparation apparatus and method of the present invention have the following advantages:

[0042] 1. This invention uses a membrane press for gas mixing, which significantly shortens the mixing time and improves production efficiency. Compared with traditional methods, the use of a membrane press reduces labor intensity and makes operation more convenient and efficient.

[0043] 2. This invention, by setting a fixed-value tank on the parallel pipeline and equipping it with a high-precision mass comparator, can accurately quantify the amount of each component gas charged into the storage tank. This design effectively avoids the influence of external factors such as temperature and gas compressibility factor on the accuracy of gas distribution, ensuring high precision in gas distribution.

[0044] 3. This invention can prepare mixed gases of three or more components through simple, repetitive operation steps. When the device is designed with a single inlet branch line, the preparation of multi-component mixed gases can be completed by changing the component gas connection to the inlet branch line. When the device is designed with multiple inlet branch lines, it can not only complete the preparation of multi-component mixed gases, but also reduce the time for changing component gases and improve production efficiency. The detachable connection of the inlet branch line and the settling tank, as well as the detachable design of the filling container, increases the flexibility and applicability of the device.

[0045] 4. During the gas mixing process, the pressure of the storage tank and the setpoint tank is strictly controlled to ensure that the weighing is carried out when the pressure is equal, which improves the accuracy of gas mixing; after the mixed gas is mixed, the content of each component in the storage tank and the setpoint tank is measured to ensure that the deviation of each component content is within a very small range, thus ensuring the quality of the mixed gas.

[0046] 5. Through precise valve control and pressure gauge monitoring, the gas distribution process has been optimized, making operation simpler and safer; reducing manual intervention and waiting time, and improving overall gas distribution efficiency. Attached Figure Description

[0047] Figure 1 is a schematic diagram of the mixed gas preparation device of the present invention;

[0048] Explanation of markings in the diagram: 101, First vacuum line; 102, Second vacuum line; 103, First valve; 104, Second valve; 201, Main intake line; 202, Intake branch line; 2021, Intake branch line one; 2022, Intake valve one; 2023, Intake branch line two; 2024, Intake valve two; 203, First pressure gauge; 204, Main gas distribution valve; 205, First analysis line; 2051, Analysis valve one; 301, First parallel line; 3011, Storage tank; 3012, Second pressure gauge; 302, Second parallel pipeline; 3021, Gas inlet valve; 3022, Setpoint tank; 3023, Gas outlet valve; 3024, Weighing equipment; 3025, Third pressure gauge; 401, Return gas line one; 402, Return valve; 403, Return gas line two; 501, Main outlet pipeline; 502, Main gas outlet valve; 503, Membrane press; 504, Filling valve; 505, Filling container; 506, Second analysis pipeline; 5061, Analysis valve two. Detailed Implementation

[0049] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0050] Example 1

[0051] Figure 1 shows a schematic diagram of the structure of a multi-component mixed gas preparation device according to the present invention.

[0052] A multi-component mixed gas preparation device includes a vacuuming pipeline, an inlet pipeline, a gas distribution pipeline, a circulation pipeline, and a filling pipeline connected by pipes.

[0053] The vacuum pipeline includes a first vacuum pipeline 101 and a second vacuum pipeline 102, and the first vacuum pipeline 101 and the second vacuum pipeline 102 are connected.

[0054] A first valve 103 is provided on the first vacuum line 101, and a second valve 104 is provided on the second vacuum line 102.

[0055] The intake pipeline includes an intake main pipeline 201, on which an intake branch pipeline 202, a first pressure gauge 203, and an intake distribution valve 204 are connected in sequence.

[0056] The intake manifold 202 is provided in a set, including an intake manifold 2021 and an intake valve 2022 connected to each other. The intake manifold 202 is detachably connected to each intake manifold.

[0057] The gas distribution pipeline consists of a first parallel pipeline 301 and a second parallel pipeline 302. A storage tank 3011 is installed on the first parallel pipeline 301. A gas distribution inlet valve 3021, a setpoint tank 3022 and a gas distribution outlet valve 3023 are installed on the second parallel pipeline 302. A weighing device 3024 is installed below the setpoint tank 3022.

[0058] The first parallel pipeline 301 and the second parallel pipeline 302 are equidistant, and the volume of the storage tank 3011 is 12m³. 3 The volume of the setpoint tank 3022 is 60L; a second pressure gauge 3012 is installed on the storage tank 3011, and a third pressure gauge 3025 is installed on the setpoint tank 3022; the second parallel pipeline 302 is detachably connected to the setpoint tank 3022; the range of the second pressure gauge 3012 and the third pressure gauge 3025 is -15 to 600psi.

[0059] The weighing device 3024 uses a high-precision mass comparator with a maximum range of 150 kg and a minimum weighing mass of 0.05 g.

[0060] The circulation pipeline includes a return gas pipe 401, a return valve 402, and a return gas pipe 403 connected in sequence.

[0061] The filling pipeline includes a main gas outlet pipeline 501, on which a gas distribution and outlet valve 502, a diaphragm press 503, a filling valve 504, and a filling container 505 are connected in sequence. The filling container 505 is detachably connected to the main gas outlet pipeline 501.

[0062] The first vacuum line 101 is connected to the main inlet line 201, and the second vacuum line 102 is connected to the main outlet line 501; one end of the first parallel line 301 and the second parallel line 302 are connected to the main gas distribution valve 204, and the other end is connected to the main outlet line 501; the first return gas line 401 is connected to the main gas distribution valve 204, and the second return gas line 403 is connected to the gas outlet of the membrane compressor 503.

[0063] The gas inlet valve 3021 and the gas outlet valve 3023 are respectively connected to the two ends of the setpoint tank 3022. The setpoint tank 3022 is detachably connected to both the gas inlet valve 3021 and the gas outlet valve 3022, allowing the setpoint tank 3022 to be disconnected from the second parallel pipeline 302 after the gas inlet valve 3021 and the gas outlet valve 3023 are closed, and then weighed using the weighing device 3024. Those skilled in the art will understand that the setpoint tank 3022 has its own on / off valve; when disassembling the setpoint tank 3022, its own on / off valve should be closed to prevent gas leakage from the setpoint tank 3022.

[0064] It should be noted that the gas inlet valve 3021 and gas outlet valve 3023 can also be omitted, and the setpoint tank 3022 can be weighed directly through the weighing device 3024 without disassembly. Alternatively, when the gas inlet valve 3021 and gas outlet valve 3023 are configured, the setpoint tank 3022 can also be weighed through the weighing device 3024 on the second parallel pipeline 302 without disassembly.

[0065] Example 2

[0066] Based on Embodiment 1, the intake manifold 202 is provided with two sets, including an intake manifold 2021 and an intake valve 2022 connected to each other, and an intake manifold 2023 and an intake valve 2024 connected to each other.

[0067] Unlike Embodiment 1, the volume of the storage tank 3011 is 1.2 m³. 3 The volume of the fixed-value tank 3022 is 60L.

[0068] Example 3

[0069] Based on Embodiment 1, the intake manifold 202 is provided in multiple sets, including multiple connected intake manifolds and intake valves.

[0070] Unlike Embodiment 1, the volume of the storage tank 3011 is 36m³. 3 The volume of the fixed-value tank 3022 is 60L.

[0071] Example 4

[0072] A method for preparing a two-component mixed gas, using the preparation apparatus of Example 1, includes the following steps:

[0073] S1. Open the second valve 104 on the second vacuum pipeline 102 to evacuate the storage tank 3011 and the setpoint tank 3022, and record the empty mass of the setpoint tank 3022 on the weighing device 3024, which can be recorded as 0.

[0074] S2. Connect the first component gas to the inlet valve 2022, open the first valve 103 on the first vacuum line 101 to evacuate the vacuum, then close the first valve 103, open the inlet valve 2022 on the inlet branch line 2021, open the gas distribution inlet main valve 204 to charge the storage tank 3011 and the setpoint tank 3022 with the first component gas, then close the gas distribution inlet main valve 204. When the pressure of the first component gas in the storage tank 3011 and the setpoint tank 3022 is equal, calculate the charging mass of the first component gas based on the weighing value of the setpoint tank 3022 on the weighing device 3024, as detailed in Table 1.

[0075] S3. Connect the second component gas to the inlet valve 2022, open the first valve 103 on the first vacuum line 101 to evacuate the vacuum, then close the first valve 103, open the inlet valve 2022 on the inlet branch line 2021, open the gas distribution inlet main valve 204 to charge the storage tank 3011 and the setpoint tank 3022 with the second component gas, then close the gas distribution inlet main valve 204. When the pressure of the second component gas in the storage tank 3011 and the setpoint tank 3022 is equal, calculate the charging mass of the second component gas based on the weighing value of the setpoint tank 3022 on the weighing device 3024, as detailed in Table 1.

[0076] S4. Close the main gas inlet valve 204 and the filling valve 504, open the main gas outlet valve 502 and the return valve 402, and start the diaphragm compressor 503 to circulate and mix the mixed gas in the storage tank 3011 and the settling tank 3022. The mixed gas is mixed by the diaphragm compressor 503 twice per hour. The content of each component in the storage tank 3011 and the settling tank 3022 is measured. The deviation of each component content is ≤0.05%. After the mixed gas is mixed, the diaphragm compressor 503 is turned off.

[0077] S5. Close the return valve 402, open the filling valve 504, and start the membrane press 503 again to fill the mixed gas in the storage tank 3011 and the set value tank 3022 into the filling container 505 to obtain a two-component mixed gas, as detailed in Table 1.

[0078] Table 1. Filling mass and gas volume concentration of the two-component mixed gas

[0079] In the two-component mixed gas configured in Example 4, the main use of 20% fluorine / nitrogen is as a cleaning gas in semiconductor manufacturing processes, for cleaning silicon-containing chambers; the main use of 1% phosphine / hydrogen is as an N-type doping source for silicon materials in semiconductor manufacturing; and the main use of 5% diborane / nitrogen is as a p-type doping source for silicon materials in semiconductor manufacturing, as well as for the epitaxial growth, passivation, diffusion, and ion implantation of silicon and germanium.

[0080] Example 5

[0081] A method for preparing a three-component mixed gas uses the preparation device of Example 1. Based on Example 4, step S3 is repeated once more. In step S4, the membrane press 503 is turned on to perform a circulating mixing operation on the mixed gas in the storage tank 3011 and the settling tank 3022. The mixed gas is mixed by the membrane press 503 3 times / hour. The content of each component in the storage tank 3011 and the settling tank 3022 is measured. The deviation of the content of each component is ≤0.05%. The mixed gas is mixed and finally a three-component mixed gas is obtained, as detailed in Table 2.

[0082] Table 2. Filling mass and gas volume concentration of the three-component mixed gas.

[0083] In the three-component mixed gas configured in Example 5, the 0.95% fluorine / 1.25% krypton / neon and 0.95% fluorine / 3.5% argon / neon are mainly used as laser gases for semiconductor lithography processes; the 3% diborane / 5% hydrogen / boron trifluoride is mainly used for semiconductor ion implantation processes.

[0084] Example 6

[0085] A method for preparing a six-component mixed gas uses the preparation device of Example 1. Based on Example 4, step S3 is repeated four times. In step S4, the membrane press 503 is turned on to circulate and mix the mixed gas in the storage tank 3011 and the settling tank 3022. The mixed gas is mixed by the membrane press 503 five times per hour. The content of each component in the storage tank 3011 and the settling tank 3022 is measured. The deviation of the content of each component is ≤0.05%. The mixed gas is then mixed to obtain a standard eight-component mixed gas, as detailed in Table 3.

[0086] The six-component rofen gas is 19% N2 / 6% CO / 4% CO2 / 3% Xe / 3% O2 / He. In rofen gas, oxygen is an oxidizing gas and carbon monoxide is a flammable gas. The two are incompatible and can easily cause a fire if they come into direct contact. Therefore, the filling order of the mixed gas is: carbon monoxide, carbon dioxide, xenon, helium, oxygen, and nitrogen.

[0087] Table 3. Filling mass and gas volume concentration of the six-component mixed gas.

[0088] In Example 6, the six-component mixed gas, rofen gas, is primarily used in carbon dioxide lasers to generate laser beams.

[0089] Comparative Example 1

[0090] The difference between the gas mixture preparation method in this comparative example and that in Example 4 is that the pressure gauge on the storage tank is used to set the value, and the component concentration and gas mixing error of the gas mixture are detected. See Table 4 for details.

[0091] Table 4 Comparison of gas concentration between Example 4 and Comparative Example 1

[0092] As can be seen from Table 4, the gas concentration deviation of the gas preparation device of the present invention is in the range of 0.01%-0.04%, while the gas concentration deviation of Comparative Example 1 is in the range of 0.12%-1.8%. The gas concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 1.

[0093] The difference between the mixed gas preparation method in this comparative example and that in Example 4 is that the storage tank is used for static mixing, and the mixing time is detailed in Table 5 within the range of room temperature (15℃-30℃).

[0094] Table 5 Comparison of mixing time between Example 4 and Comparative Example 1

[0095] This invention uses a membrane press for gas mixing, which significantly shortens the mixing time and improves production efficiency. Compared with traditional methods, the use of a membrane press reduces labor intensity and makes operation more convenient and efficient.

[0096] Comparative Example 2

[0097] The difference between the gas mixture preparation method in this comparative example and that in Example 5 is that the pressure gauge on the storage tank is used to set the value, and the component concentration and gas mixing error of the gas mixture are detected. See Table 6 for details.

[0098] Table 6 Comparison of gas concentration between Example 5 and Comparative Example 2

[0099] As can be seen from Table 6, the gas concentration deviation of the gas preparation device of the present invention is in the range of 0%-0.05%, while the gas concentration deviation of Comparative Example 2 is in the range of 0.11%-0.31%. The gas concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 2.

[0100] This invention, by setting a fixed-value tank on a parallel pipeline and equipping it with a high-precision mass comparator, can accurately quantify the amount of each component gas charged into the storage tank. This design effectively avoids the influence of external factors such as temperature and gas compressibility factor on the accuracy of gas distribution, ensuring high precision in gas distribution.

[0101] The difference between the mixed gas preparation method in this comparative example and Example 5 is that the storage tank is used for static mixing, and the mixing time is detailed in Table 7 within the range of room temperature (15℃-30℃).

[0102] Table 7 Comparison of mixing time between Example 5 and Comparative Example 2

[0103] This invention uses a membrane press for gas mixing, which significantly shortens the mixing time and improves production efficiency. Compared with traditional methods, the use of a membrane press reduces labor intensity and makes operation more convenient and efficient.

[0104] Comparative Example 3

[0105] The difference between the gas mixture preparation method in this comparative example and that in Example 6 is that the pressure gauge on the storage tank is used to set the value, and the component concentration and gas mixing error of the gas mixture are detected. See Table 8 for details.

[0106] Table 8 Comparison of gas concentration between Example 6 and Comparative Example 3

[0107] As can be seen from Table 8, the gas concentration deviation of the gas preparation device of the present invention is in the range of 0%-0.03%, while the gas concentration deviation of Comparative Example 3 is in the range of 0.05%-0.59%. The gas concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 3.

[0108] This invention, by setting a fixed-value tank on a parallel pipeline and equipping it with a high-precision mass comparator, can accurately quantify the amount of each component gas charged into the storage tank. This design effectively avoids the influence of external factors such as temperature and gas compressibility factor on the accuracy of gas distribution, ensuring high precision in gas distribution.

[0109] The difference between the mixed gas preparation method in this comparative example and Example 6 is that the storage tank is used for static mixing, and the mixing time is detailed in Table 9 within the range of room temperature (15℃-30℃).

[0110] Table 9 Comparison of mixing time between Example 6 and Comparative Example 3

[0111] This invention uses a membrane press for gas mixing, which significantly shortens the mixing time and improves production efficiency. Compared with traditional methods, the use of a membrane press reduces labor intensity and makes operation more convenient and efficient.

[0112] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A multi-component mixed gas preparation device, characterized in that, This includes the vacuuming pipeline, air intake pipeline, gas distribution pipeline, circulation pipeline, and filling pipeline; The vacuum pipeline includes a first vacuum pipeline (101) and a second vacuum pipeline (102); The intake pipeline includes an intake main pipeline (201), on which intake branch pipelines (202) and a main intake valve (204) are connected in sequence; The gas distribution pipeline consists of a first parallel pipeline (301) and a second parallel pipeline (302). A storage tank (3011) is installed on the first parallel pipeline (301), and a set value tank (3022) is installed on the second parallel pipeline (302). A weighing device (3024) is installed below the set value tank (3022). The circulation pipeline includes a return gas line pipe one (401), a return valve (402), and a return gas line pipe two (403) connected in sequence; The filling pipeline includes a main gas outlet pipeline (501), on which a gas distribution and outlet valve (502), a diaphragm press (503), a filling valve (504), and a filling container (505) are connected in sequence. The first vacuum line (101) is connected to the main inlet line (201), and the second vacuum line (102) is connected to the main outlet line (501); one end of the first parallel line (301) and the second parallel line (302) are connected to the main gas distribution valve (204), and the other end is connected to the main outlet line (501); the first return gas line (401) is connected to the main gas distribution valve (204), and the second return gas line (403) is connected to the gas outlet of the membrane compressor (503).

2. The multi-component mixed gas preparation apparatus according to claim 1, characterized in that, The first vacuum line (101) and the second vacuum line (102) are connected; and / or, A first pressure gauge (203) is also installed on the main intake pipeline (201), and the intake branch pipeline (202), the first pressure gauge (203), and the main intake valve (204) are installed in sequence; and / or, The second parallel pipeline (302) is provided with a gas inlet valve (3021) and a gas outlet valve (3023), which are respectively located at both ends of the setpoint tank (3022).

3. The multi-component mixed gas preparation apparatus according to claim 2, characterized in that, The setpoint tank (3022) is detachably connected to the gas inlet valve (3021) and the gas outlet valve (3023).

4. The multi-component mixed gas preparation apparatus according to any one of claims 1-3, characterized in that, A first valve (103) is provided on the first vacuum line (101), and a second valve (104) is provided on the second vacuum line (102); and / or, The first parallel conduit (301) and the second parallel conduit (302) are equidistant in length; and / or, The volume of the storage tank (3011) is 20-600 times that of the fixed-value tank (3022); A second pressure gauge (3012) is installed on the storage tank (3011), and a third pressure gauge (3025) is installed on the constant pressure tank (3022); and / or, The weighing device (3024) uses a high-precision mass comparator.

5. The multi-component mixed gas preparation apparatus according to any one of claims 1-3, characterized in that, The main intake pipeline (201) is also equipped with a first analysis pipeline (205), and an analysis valve (2051) is installed on the first analysis pipeline (205); and / or, The main gas outlet pipeline (501) is also equipped with a second analysis pipeline (506), and the second analysis pipeline (506) is equipped with an analysis valve (5061).

6. The multi-component mixed gas preparation apparatus according to any one of claims 1-3, characterized in that, The intake manifold (202) includes an intake manifold (2021) and an intake valve (2022) connected to each other, and at least one set of intake manifolds (202) is provided.

7. The multi-component mixed gas preparation apparatus according to any one of claims 1-3, characterized in that, The filling container (505) is detachably connected to the main exhaust line (501).

8. A method of using the multi-component mixed gas preparation apparatus according to any one of claims 1-7, characterized in that, Includes the following steps: S1. Vacuum the storage tank (3011) and the setpoint tank (3022) through the second vacuum pipeline (102), and record the empty tank mass of the setpoint tank (3022) on the weighing device (3024); S2. Connect the first component gas to the inlet branch line (202), evacuate through the first vacuum line (101), then open the gas distribution inlet main valve (204) to charge the storage tank (3011) and the set value tank (3022) with the first component gas, then close the gas distribution inlet main valve (204), and calculate the charging mass of the first component gas based on the weighing value of the set value tank (3022) on the weighing device (3024). S3. Connect the second component gas to the inlet branch line (202), evacuate through the first vacuum line (101), then open the gas distribution inlet main valve (204) to charge the storage tank (3011) and the set value tank (3022) with the second component gas, then close the gas distribution inlet main valve (204), and calculate the charging mass of the second component gas based on the weighing value of the set value tank (3022) on the weighing device (3024). S4. Close the main gas inlet valve (204) and filling valve (504), open the main gas outlet valve (502) and return valve (402), start the membrane compressor (503) to circulate and mix the mixed gas in the storage tank (3011) and the set value tank (3022) until the mixed gas is mixed, and then close the membrane compressor (503). S5. Close the return valve (402), open the filling valve (504), and start the membrane press (503) again to fill the mixed gas in the storage tank (3011) and the set value tank (3022) into the filling container (505) to obtain the mixed gas.

9. The method of using the multi-component mixed gas preparation device according to claim 8, characterized in that, The first vacuum line (101) is provided with a first valve (103), the second vacuum line (102) is provided with a second valve (104), and the air intake branch line (202) includes an air intake branch line (2021) and an air intake valve (2022) connected to each other. Step S1 specifically involves: opening the second valve (104) on the second vacuum pipeline (102) to evacuate the storage tank (3011) and the setpoint tank (3022), and recording the empty tank mass of the setpoint tank (3022) on the weighing device (3024); And / or, Step S2 is as follows: Connect the first component gas to the inlet valve (2022), open the first valve (103) on the first vacuum pipeline (101) to evacuate the vacuum, then close the first valve (103), open the inlet valve (2022) on the inlet branch pipeline (2021), open the gas distribution inlet main valve (204) to charge the storage tank (3011) and the set value tank (3022) with the first component gas, then close the gas distribution inlet main valve (204), and when the pressure of the first component gas in the storage tank (3011) and the set value tank (3022) is equal, calculate the charging mass of the first component gas according to the weighing value of the set value tank (3022) on the weighing device (3024); And / or, Step S3 is as follows: Connect the second component gas to the first inlet valve (2022), open the first valve (103) on the first vacuum line (101) to evacuate the vacuum, then close the first valve (103), open the first inlet valve (2022) on the first inlet branch line (2021), open the main gas distribution valve (204) to charge the storage tank (3011) and the setpoint tank (3022) with the second component gas, then close the main gas distribution valve (204), and when the pressure of the second component gas in the storage tank (3011) and the setpoint tank (3022) is equal, calculate the charging mass of the second component gas according to the weighing value of the setpoint tank (3022) on the weighing device (3024).

10. The method of using the multi-component mixed gas preparation device according to claim 9, characterized in that, When preparing a three-component or multi-component gas mixture, repeat step S3 to obtain a three-component or multi-component gas mixture; and / or, After the component gas is filled into the storage tank (3011) and the setpoint tank (3022), the pressure difference between the storage tank (3011) and the setpoint tank (3022) must be ≤0.05Mpa before weighing the setpoint tank (3022). After the mixed gas is homogenized, the content of each component in the storage tank (3011) and the setpoint tank (3022) is measured, and the deviation of each component content is ≤0.05%. The mixed gas in the storage tank (3011) and the setpoint tank (3022) is homogenized by the membrane compressor (503) 2-5 times / hour.

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