Magnetic field measurement device

Abstract

In the present invention, a high-frequency magnetic field generator applies microwaves to a magnetic resonance member (1) capable of electron spin quantum operation using microwaves. An irradiation device irradiates the magnetic resonance member (1) with incident light of a specific wavelength. A light guide member (31) transmits fluorescence emitted by the magnetic resonance member (1) and guides the fluorescence from the magnetic resonance member (1). The light guide member (31) has a flat plate shape having two main surfaces facing each other, and the high-frequency magnetic field generator comprises coil patterns (2a, 2b) respectively disposed on the two main surfaces. The light guide member (31) also comprises a hole (32), and the magnetic resonance member (1) is disposed on an inner surface (32a) of the hole (32). The light guide member (31) emits fluorescence at least from a side surface of the light guide member.

Description

Magnetic field measuring device

[0001] The present invention relates to a magnetic field measuring device.

[0002] One magnetic field measurement device performs magnetic measurements using optically detected magnetic resonance (ODMR) that utilizes the electron spin resonance of a sensing element such as a diamond structure having nitrogen and lattice defects (NV centers) (see, for example, Patent Document 1). In ODMR, a static magnetic field is applied to a magnetic resonance element such as a diamond having such an NV center, in addition to the magnetic field to be measured, and laser light (excitation light for resetting the spin state and measurement light for fluorescence observation) and microwaves are applied in a predetermined sequence such as a Ramsey pulse sequence or a Hahn echo sequence, and the amount of fluorescent light emitted from the magnetic resonance element is detected, and the magnetic flux density of the magnetic field to be measured is derived based on the amount of light.

[0003] Japanese Patent Application Laid-Open No. 2024-57947

[0004] The magnetic field measurement device as described above includes a high-frequency magnetic field generator that applies the microwaves to the magnetic resonance member in an appropriate direction. The magnetic field measurement device as described above also includes an optical system that guides the excitation light and the like to the magnetic resonance member and an optical system that guides the fluorescence from the magnetic resonance member. Therefore, for highly accurate magnetic field measurement, it is necessary to precisely position the high-frequency magnetic field generator so that the microwaves are applied uniformly to the magnetic resonance member in an appropriate direction without interfering with the optical system.

[0005] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a magnetic field measuring device that can accurately position a high-frequency magnetic field generator so as to apply the above-mentioned microwaves uniformly in an appropriate direction to a magnetic resonance component.

[0006] The magnetic field measurement device according to the present invention includes a magnetic resonance element capable of quantum manipulation of electron spins using microwaves, a high-frequency magnetic field generator that applies microwaves to the magnetic resonance element, an irradiation device that irradiates the magnetic resonance element with incident light of a specific wavelength, and a light-guiding element that transmits and guides fluorescence emitted by the magnetic resonance element from the magnetic resonance element. The light-guiding element has a flat plate shape with two opposing main surfaces, and the high-frequency magnetic field generator has coil patterns arranged on each of the two main surfaces. The light-guiding element also has a hole, and the magnetic resonance element is arranged on the inner surface of the hole. The light-guiding element emits fluorescence from at least a side surface of the light-guiding element.

[0007] According to the present invention, a magnetic field measuring device can be obtained in which a high-frequency magnetic field generator can be accurately positioned so as to apply microwaves uniformly in an appropriate direction to a magnetic resonance member.

[0008] FIG. 1 is a block diagram showing a configuration of a magnetic field measurement device according to an embodiment of the present invention. FIG. 2 is a perspective view showing a configuration example of a magnetic sensor unit 10 according to a first embodiment. FIG. 3 is an exploded perspective view showing a configuration example of the magnetic sensor unit 10 shown in FIG. 1. FIG. 4 is a side view showing a configuration example of an optical system in the magnetic sensor unit 10 shown in FIG. 1. FIG. 5 is a side view showing another configuration example of the optical system in the magnetic sensor unit 10 shown in FIG. 1. FIG. 6 is a perspective view showing a configuration example of a magnetic sensor unit 10 according to a second embodiment. FIG. 7 is a perspective view showing a configuration example of a magnetic sensor unit 10 according to a third embodiment. FIG. 8 is an exploded perspective view showing a configuration example of a magnetic sensor unit 10 according to the third embodiment. FIG. 9 is a perspective view showing a configuration example of a magnetic sensor unit 10 according to a fourth embodiment. FIG. 10 is a cross-sectional view showing a configuration example of a magnetic sensor unit 10 according to the fourth embodiment. FIG. 11 is a cross-sectional view showing an example of a reflective film provided on an auxiliary light-guiding member 71 according to a fifth embodiment. FIG. 12 is a cross-sectional view showing another example of a reflective film provided on an auxiliary light-guiding member 71 according to the fifth embodiment. FIG. 13 is a perspective view showing a configuration example of a magnetic sensor unit 10 according to a sixth embodiment. FIG. 14 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 according to the sixth embodiment. FIG. 15 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 according to the seventh embodiment. FIG. 16 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 according to the seventh embodiment. FIG. 17 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the eighth embodiment. FIG. 18 is a cross-sectional view showing an example of the magnetic sensor unit 10 according to the eighth embodiment. FIG. 19 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 according to the ninth embodiment. FIG. 20 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 according to the ninth embodiment. FIG. 21 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 according to the tenth embodiment. FIG. 22 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 according to the eleventh embodiment. FIG. 23 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 according to the eleventh embodiment. FIG. 24 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the twelfth embodiment.Fig. 25 is a top view showing an example of the configuration of the magnetic sensor unit 10 in embodiment 12. Fig. 26 is a block diagram showing the configuration of a magnetic field measurement device according to embodiment 13 of the present invention. Fig. 27 is a cross-sectional view showing an example of the primary coil 4a in Fig. 26. Fig. 28 is a diagram illustrating the arrangement of the primary coil 4a with respect to the object to be measured 101. Fig. 29 is a perspective view showing the configuration of the magnetic sensor unit 10 in embodiment 13. Fig. 30 is a perspective view showing the configuration of the magnetic sensor unit 10 in embodiment 14.

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0010] Embodiment 1.

[0011] 1 is a block diagram showing the configuration of a magnetic field measurement device according to an embodiment of the present invention, which includes a magnetic sensor unit 10, a high-frequency power supply 11, an irradiation device 12, a light receiving device 13, and a processing unit 14.

[0012] The magnetic sensor unit 10 detects a magnetic field to be measured (e.g., strength, direction, etc. of the magnetic field) at a predetermined position (e.g., on or above the surface of the object to be inspected). The magnetic field to be measured may be an AC magnetic field of a single frequency, or an AC magnetic field of a predetermined period having multiple frequency components.

[0013] In the first embodiment, the magnetic sensor unit 10 includes a magnetic resonance member 1 , a high-frequency magnetic field generator 2 , and a magnet 3 .

[0014] The magnetic resonance component 1 has a crystalline structure and is capable of quantum manipulation of electron spins (based on Rabi oscillations) using microwaves with a frequency corresponding to the orientation of defects and impurities in the crystal lattice. In this embodiment, the magnetic resonance component 1 is a photodetector magnetic resonance component having multiple (i.e., an ensemble) specific color centers, which generate fluorescence in response to a magnetic field applied to the magnetic resonance component 1. The specific color centers have energy levels that can be Zeeman split, and can assume multiple orientations with different energy level shift widths during Zeeman splitting.

[0015] Here, the magnetic resonance component 1 is a component such as diamond that includes multiple NV (Nitrogen Vacancy) centers as specific color centers of a single type. In the case of the NV center, the ground state is a triplet state of ms = 0, +1, -1, and the level of ms = +1 and the level of ms = -1 are Zeeman split. Note that the color center included in the magnetic resonance component 1 may be a color center other than the NV center.

[0016] The high frequency magnetic field generator 2 applies the above-mentioned microwaves to the magnetic resonance member 1 .

[0017] The magnet 3 applies a static magnetic field (DC magnetic field) to the magnetic resonance member 1. Here, the magnet 3 is a ring-shaped permanent magnet, such as a ferrite magnet, an alnico magnet, or a samarium-cobalt magnet.

[0018] The magnetic resonance member 1 includes a plurality of color centers (here, NV centers) capable of quantum manipulation of electron spins using the above-mentioned microwaves, and the magnet 3 applies a substantially uniform static magnetic field to a predetermined region (irradiation region of the excitation light and measurement light) of the magnetic resonance member 1, thereby Zeeman-splitting the energy levels of the plurality of specific color centers (here, the plurality of NV centers) in the magnetic resonance member 1. For example, the static magnetic field is applied so that the difference or ratio between the maximum and minimum values ​​of the static magnetic field strength in the predetermined region is equal to or less than a predetermined value.

[0019] In the case of NV centers, color centers are formed in diamond crystals by defects (vacancies) (V) and nitrogen (N) as impurities, and there are four possible positions of adjacent nitrogen (N) relative to the defects (vacancies) (V) in the diamond crystal (i.e., the arrangement direction of the vacancy-nitrogen pair), and the sublevels (i.e., the energy levels from the ground state) after Zeeman splitting corresponding to each of these arrangement directions are different from each other. Therefore, in the characteristics of the fluorescence intensity after Zeeman splitting by a static magnetic field with respect to the microwave frequency, four different dip frequency pairs (fi+, fi-) appear corresponding to each direction i (i = 1, 2, 3, 4). Here, the frequency (wavelength) of the microwave described above is set corresponding to one of the dip frequencies of these four dip frequency pairs.

[0020] Moreover, the high frequency power supply 11 generates the above-mentioned microwave current and conducts it to the high frequency magnetic field generator 2 .

[0021] Furthermore, an irradiation device 12 and a light receiving device 13 are provided as detection devices for detecting the fluorescence generated from the magnetic resonance component 1 in response to the magnetic field to be measured.

[0022] The irradiation device 12 generates laser light as incident light to be irradiated onto the magnetic resonance component 1 (here, excitation light of a predetermined wavelength for ODMR and measurement light of a predetermined wavelength), and irradiates the magnetic resonance component 1 as a photodetection magnetic resonance component via the optical system described below.

[0023] Furthermore, the light receiving device 13 receives and detects the fluorescence emitted from the magnetic resonance component 1 via an optical system described later when the measurement light is irradiated.

[0024] The arithmetic processing device 14 includes, for example, a computer, and executes a program on the computer to operate as various processing units. In this embodiment, the arithmetic processing device 14 stores detected optical or electrical signal data in a storage device (memory, etc.) not shown, and performs control and calculation operations as a measurement control unit 14a and a calculation unit 14b.

[0025] The measurement control unit 14a controls the high-frequency power supply 11 and identifies the detection value of the above-mentioned physical phenomenon (here, fluorescence intensity) detected by the above-mentioned detection device (here, the irradiation device 12 and the light receiving device 13).

[0026] In this embodiment, the measurement control unit 14a controls the high-frequency power supply 11 and the irradiating device 12 in accordance with a predetermined measurement sequence based on, for example, ODMR, and identifies the amount of detected fluorescence detected by the light-receiving device 13. For example, the irradiating device 12 includes a laser diode or the like as a light source, and the light-receiving device 13 includes a photodiode or the like as a light-receiving element, and the measurement control unit 14a identifies the above-mentioned amount of detected light based on the output signal of the light-receiving device 13 obtained by amplifying the output signal of the light-receiving element.

[0027] The calculation unit 14b calculates the magnetic field to be measured (intensity, waveform, etc.) at the measurement position described above based on the detection values ​​obtained by the measurement control unit 14a and stored in the storage device.

[0028] The measurement sequence is set according to the frequency of the magnetic field to be measured. For example, if the magnetic field to be measured is a DC magnetic field, a Ramsey pulse sequence is applied to this measurement sequence. Furthermore, if the magnetic field to be measured is a relatively high-frequency AC magnetic field, a spin echo pulse sequence (such as a Hahn echo sequence) is applied to this measurement sequence. However, the measurement sequence is not limited to this. Furthermore, if the magnetic field to be measured is a relatively low-frequency AC magnetic field, magnetic field measurements may be performed multiple times in one period of the magnetic field to be measured using a Ramsey pulse sequence (i.e., a measurement sequence for a DC magnetic field), and the magnetic field to be measured (intensity, waveform, etc.) may be identified based on the results of these magnetic field measurements.

[0029] The magnetic sensor unit 10 will be described in detail below.

[0030] Fig. 2 is a perspective view showing a configuration example of the magnetic sensor unit 10 in embodiment 1. Fig. 3 is an exploded perspective view showing a configuration example of the magnetic sensor unit 10 shown in Fig. 1. Fig. 4 is a side view showing a configuration example of the optical system in the magnetic sensor unit 10 shown in Fig. 1. Fig. 5 is a side view showing another configuration example of the optical system in the magnetic sensor unit 10 shown in Fig. 1.

[0031] For example, as shown in FIGS. 2 and 3, the magnetic sensor unit 10 includes a magnetic resonance member 1, a pair of coil patterns 2a and 2b as a high-frequency magnetic field generator 2, and a light guide member 31.

[0032] The light-guiding member 31 transmits and guides the fluorescence emitted by the magnetic resonance member 1 from the magnetic resonance member 1. The light-guiding member 31 is a member that is transparent to the wavelength band of the fluorescence (here, 500 to 900 nm) and does not generate fluorescence, and here is a member made of glass such as quartz glass, synthetic quartz glass, inorganic alkali glass, borosilicate glass, or sapphire glass. The light-guiding member 31 has a flat plate shape with two main surfaces 31a and 31b facing each other, and is provided with a hole 32. Here, the hole 32 is a through-hole perpendicular to the main surfaces 31a and 31b. Note that the hole 32 does not have to penetrate the light-guiding member 31.

[0033] The magnetic resonance component 1 is disposed on the inner surface 32a of the hole 32. Specifically, the magnetic resonance component 1 has, for example, a substantially rectangular parallelepiped plate shape, and one surface of the magnetic resonance component 1 is in surface contact with or surface-bonded to the inner surface 32a. For example, the magnetic resonance component 1 is fixed to the inner surface 32a with an optical adhesive. Note that the inner surface of the hole 32, except for the portion where the magnetic resonance component 1 is fixed, may be flat or curved.

[0034] Here, because the refractive index of the light-guiding member 31 is closer to that of the magnetic resonance member 1 (such as diamond) than that of air, much of the fluorescence generated within the magnetic resonance member 1 is emitted from the magnetic resonance member 1 to the light-guiding member 31 via the joint (contact) between the light-guiding member 31 and the magnetic resonance member 1. The fluorescence travels within the light-guiding member 31. The light-guiding member 31 then emits the fluorescence from at least the side surface 31c of the light-guiding member 31. For example, as shown in FIG. 3 , the side surface 31c is the side surface facing the inner surface 32a to which the magnetic resonance member 1 is fixed, as viewed from the magnetic resonance member 1. The fluorescence enters the light-guiding member 31 from the magnetic resonance member 1 via the inner surface 32a, travels within the light-guiding member 31, and is emitted from the side surface 31c.

[0035] 2 and 3, the high-frequency magnetic field generator 2 includes a pair of coil patterns 2a and 2b. The coil patterns 2a and 2b are plate-shaped conductors respectively disposed on the two main surfaces 31a and 31b of the light-guiding member 31. As a result, the coil patterns 2a and 2b are disposed approximately parallel to each other. For example, the coil patterns 2a and 2b may be wiring patterns formed on the light-guiding member 31 as a glass wiring substrate.

[0036] Each of the coil patterns 2a and 2b is a plate-shaped coil and includes a notched ring-shaped (substantially circular) coil portion 21 that emits microwaves into its hollow portion, and a pair of terminal portions 22 that extend linearly from both ends of the coil portion 21. The terminal portions 22 of the coil patterns 2a and 2b are electrically connected by through holes 33. The high-frequency power supply 11 generates a high-frequency current for the microwaves and conducts it to the high-frequency magnetic field generator 2 (coil patterns 2a and 2b). The coil portions 21 of the coil patterns 2a and 2b conduct two parallel currents at a predetermined interval across the magnetic resonance member 1, thereby emitting the microwaves. As a result, microwaves of approximately uniform intensity are applied spatially to the magnetic resonance member 1.

[0037] Here, the hole 32 is formed so that the magnetic resonance component 1 fixed to the inner surface 32a is positioned approximately at the center of the hollow portion of the coil patterns 2a, 2b in the direction parallel to the main surfaces 31a, 31b of the light-guiding member 31. To achieve this, the coil patterns 2a, 2b may be positioned by a through hole 33 or the like in the direction parallel to the main surfaces 31a, 31b of the light-guiding member 31.

[0038] Furthermore, for example, the magnet 3 is a ring-shaped magnet, and the light-guiding member 31, on which the magnetic resonance member 1 and the coil patterns 2a and 2b are mounted, is disposed in the hollow portion of the ring-shaped magnet. Furthermore, the magnet 3 is disposed so that the magnetic resonance member 1 is disposed at the center of the width of the ring-shaped magnet 3 (i.e., the magnetic resonance member 1 is disposed at a position approximately equidistant from both end faces of the magnet 3). In this case, the direction of the magnetic field to be measured is the same as the direction of application of the static magnetic field described above by the magnet 3, and application of the static magnetic field enhances the change in fluorescence intensity at the dip frequency described above, thereby increasing sensitivity.

[0039] Furthermore, the crystals of the magnetic resonance component 1 are formed and the orientation of the magnetic resonance component 1 is set so that the arrangement direction of the defects and impurities in the magnetic resonance component 1 substantially coincides with the direction of the static magnetic field (and the direction of the measured magnetic field). The angle (absolute value) between the arrangement direction of the defects and impurities and the direction of the static magnetic field (and the direction of the measured magnetic field) is preferably 8 degrees or less, and most preferably 0 degrees. The angle (absolute value) between the direction of the static magnetic field and the direction of the measured magnetic field is preferably 8 degrees or less, and most preferably 0 degrees.

[0040] 4 , the fluorescence emitted from the magnetic resonance component 1 is collected from the magnetic resonance component 1 through a light-guiding component 31 and a long-pass filter 40 that transmits the fluorescence and attenuates the incident light, and directed toward the light-receiving device 13. An end face 31c of the light-guiding component 31 may be in surface contact with or surface-bonded (e.g., with an optical adhesive) to an end face of the long-pass filter 40. The long-pass filter 40 prevents the incident light (i.e., the remaining component that has transmitted through the magnetic resonance component 1) from entering the light-receiving device 13.

[0041] Alternatively, as shown in Fig. 5, the fluorescence emitted by the magnetic resonance member 1 may be condensed from the magnetic resonance member 1 toward the light-receiving device 13 via a light-guiding member 31 and a predetermined optical system 41. For example, the optical system 41 includes compound parabolic concentrators (CPCs) 41a and 41b. Note that the optical system 41 may have other lens configurations. An end face 31c of the light-guiding member 31 is in surface contact with or surface-bonded (e.g., with an optical adhesive) to an end face of the CPC 41a, and the fluorescence guided by the light-guiding member 31 enters the interior of the CPC 41a via this end face.

[0042] The optical system 41 is configured to prevent the incident light (i.e., the residual component transmitted through the magnetic resonance component 1) from entering the light-receiving device 13. Specifically, as shown in Fig. 5, the optical system 41 is provided with a dichroic mirror 41c that transmits the fluorescence and reflects the incident light and / or a long-pass filter 41d that transmits the fluorescence and attenuates the incident light. The incident light reflected by the dichroic mirror 41c is detected by a reference light-receiving device 13a, and the calculation unit 14b corrects the measured value of the magnetic field to be measured based on the amount of incident light detected by the reference light-receiving device 13a (e.g., deviation from a predetermined reference light amount).

[0043] In the first embodiment, the irradiation device 12 causes the incident light to enter the light-guiding member 31 via a side surface other than the side surface 31c, and irradiates the incident light onto the magnetic resonance member 1 via the light-guiding member 31. As a result, the incident light travels through the light-guiding member 31 toward the magnetic resonance member 1.

[0044] A magnetic shield is provided around the magnetic resonance member 1 in the magnetic sensor unit 10 to prevent an external magnetic field from being directly applied to the magnetic resonance member 1 .

[0045] Next, the operation of the magnetic field measuring device according to the first embodiment will be described.

[0046] In the first embodiment, the magnetic sensor unit 10 is placed in a magnetic field to be measured, and the magnetic field to be measured is applied to the magnetic resonance member 1. In addition, a substantially uniform static magnetic field is applied to the magnetic resonance member 1.

[0047] The measurement control unit 14a then controls the high-frequency power supply 11 and the irradiation device 12 to apply microwaves from the high-frequency magnetic field generator 2 to the magnetic resonance component 1 according to a predetermined measurement sequence, and applies laser light (excitation light and measurement light) from the irradiation device 12 to the magnetic resonance component 1 via the light-guiding component 31.

[0048] As a result, the magnetic resonance component 1 emits fluorescence corresponding to the magnetic field to be measured in accordance with a predetermined measurement sequence. The fluorescence enters the light-guiding component 31 from the magnetic resonance component 1, travels through the light-guiding component 31 and the optical system 41, and enters the light-receiving device 13.

[0049] The light-receiving device 13 receives the fluorescence and outputs an electrical signal corresponding to the amount of fluorescence (fluorescence intensity). The measurement control unit 14a acquires the electrical signal, and the calculation unit 14b performs calculations corresponding to the measurement sequence based on the detected value of the fluorescence intensity to identify the magnetic field (strength, direction, etc.) at the measurement position.

[0050] As a result, the magnetic field at the measurement position is measured by the magnetic sensor unit 10 (i.e., the magnetic resonance member 1). Note that the magnetic sensor unit 10 may be scanned along a predetermined scanning path pattern to perform the above-described magnetic field measurement at a plurality of measurement positions on the scanning path.

[0051] As described above, according to the first embodiment, the radio-frequency magnetic field generator 2 applies microwaves to the magnetic resonance member 1 capable of quantum manipulation of electron spins using microwaves. The irradiation device 12 irradiates the magnetic resonance member 1 with incident light of a specific wavelength. The light-guiding member 31 transmits and guides the fluorescence emitted by the magnetic resonance member 1 from the magnetic resonance member 1. The light-guiding member 31 has a flat plate shape with two opposing main surfaces, and the radio-frequency magnetic field generator 2 includes coil patterns 2a and 2b arranged on each of the two main surfaces. The light-guiding member 31 also includes a hole 32, and the magnetic resonance member 1 is arranged on the inner surface 32a of the hole 32. The light-guiding member 31 emits fluorescence from at least the side surface of the light-guiding member.

[0052] This allows the coil patterns 2a and 2b to be mounted on the main surfaces 31a and 31b of the flat light-guiding member 31, making positioning easier and allowing the high-frequency magnetic field generator 2 (coil patterns 2a and 2b) to be precisely positioned so that microwaves are applied uniformly to the magnetic resonance member 1 in the appropriate direction.

[0053] Embodiment 2.

[0054] FIG. 6 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the second embodiment.

[0055] In the second embodiment, the terminal portion 22 of the coil pattern 2a is provided with a capacitive pattern 51 that forms a resonant circuit together with the coil portion 21 of the coil patterns 2a and 2b. For example, as shown in Fig. 6, the capacitive pattern 51 is formed by extending the approximately parallel terminal portions 22. The capacitance of the capacitive pattern 51 is added in parallel to the coil portion 21, forming an LC resonant circuit. The shape of the capacitive pattern 41 is designed so that the frequency of the microwaves described above is included in a predetermined band of the resonant frequency of the resonant circuit.

[0056] This increases the intensity of the microwaves applied to the magnetic resonance member 1 .

[0057] The other configurations and operations of the magnetic field measuring device according to the second embodiment are the same as those of any of the other embodiments, and therefore the description thereof will be omitted.

[0058] Embodiment 3.

[0059] FIG. 7 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the third embodiment. FIG. 8 is an exploded perspective view showing a configuration example of the magnetic sensor unit 10 according to the third embodiment. For example, as shown in FIGS. 7 and 8 , in the third embodiment, the magnetic sensor unit 10 includes a base substrate 61. The base substrate 61 may be, for example, an opaque printed circuit board, and includes a wiring pattern 62. The wiring pattern 62 is electrically connected to the high-frequency power supply 11. As shown in FIGS. 7 and 8 , the light-guiding member 31 is disposed on the base substrate 61 such that the wiring pattern 62 is electrically connected to the terminal portion 22 of the coil pattern 2b on the main surface 31b. As a result, the current of the microwaves generated by the high-frequency power supply 11 is conducted to the coil pattern 2b via the wiring pattern 62 and further to the coil pattern 2a via the through-hole 33.

[0060] Furthermore, the base substrate 61 is provided with a positioning pattern 63 together with a wiring pattern 62, and the main surface 31b of the light-guiding member 31 is provided with a positioning pattern 64 corresponding to the positioning pattern 63. The light-guiding member 31 is disposed on the base substrate 61 such that the position of the positioning pattern 63 coincides with the position of the positioning pattern 64. This allows the terminal portion 22 of the coil pattern 2b to be electrically connected to the wiring pattern 62 appropriately.

[0061] The other configurations and operations of the magnetic field measuring device according to the third embodiment are the same as those of any of the other embodiments, and therefore the description thereof will be omitted.

[0062] Embodiment 4.

[0063] Fig. 9 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the fourth embodiment. Fig. 10 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 according to the fourth embodiment. Fig. 10 shows a cross section taken along line A-A in Fig. 9. For example, as shown in Figs. 9 and 10, in the fourth embodiment, the magnetic sensor unit 10 further includes an auxiliary light-guiding member 71 that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member 1. The auxiliary light-guiding member 71 is disposed opposite one of the two main surfaces of the light-guiding member 31.

[0064] In embodiment 4, the height of the magnetic resonance member 1 in the thickness direction of the light-guiding member 31 is greater than the height of the hole 32 in the light-guiding member 31, and the auxiliary light-guiding member 71 has a storage portion 72 that stores the portion of the magnetic resonance member 1 protruding from the hole 32.

[0065] Furthermore, in embodiment 4, the accommodating portion 72 is a recess having an inner surface 72a that is located on the same plane as the inner surface 32a of the hole 32, and the magnetic resonance component 1 is arranged on the inner surface 32a of the hole 32 and the inner surface 72a of the recess.

[0066] For example, a portion of the fluorescence emitted by the magnetic resonance member 1 traveling toward the auxiliary light-guiding member 71 enters the auxiliary light-guiding member 71, travels through the auxiliary light-guiding member 71 and the optical system 41, and enters the light-receiving device 13. In this case, the auxiliary light-guiding member 71 is a member that is transparent to the wavelength band of the fluorescence and does not generate fluorescence, similar to the light-guiding member 31, and is made of glass as described above. This increases the amount of fluorescence received by the light-receiving device 13.

[0067] Alternatively, a portion of the fluorescence emitted by the magnetic resonance member 1 traveling toward the auxiliary light-guiding member 71 is reflected by the auxiliary light-guiding member 71, enters the light-guiding member 31, travels through the light-guiding member 31 and the optical system 41, and enters the light-receiving device 13. This increases the amount of fluorescence received by the light-receiving device 13.

[0068] In this embodiment, for example, end face 31c of light-guiding member 31 and end face 71a of auxiliary light-guiding member 71 are in surface contact with or surface-bonded to end faces of long-pass filter 40 and CPC 41a, respectively. As a result, the fluorescence guided by light-guiding member 31 and the fluorescence guided by auxiliary light-guiding member 71 enter long-pass filter 40 and CPC 41a via these end faces.

[0069] The other configurations and operations of the magnetic field measuring device according to the fourth embodiment are the same as those of any of the other embodiments, and therefore the description thereof will be omitted.

[0070] Embodiment 5.

[0071] Fig. 11 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 5. Fig. 12 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 5.

[0072] 11 , in the fifth embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two main surfaces facing each other, (b) includes a reflective film 73 that conforms to the surface shape of the main surface 71b, which does not face the light-guiding member 31, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member 1 while being reflected by the reflective film 73. As a result, the fluorescence received by the light-receiving element 13 via the light-guiding member 31, the auxiliary light-guiding member 71, and the optical system 41 increases.

[0073] 12 , in the fifth embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two main surfaces facing each other, (b) includes a reflective film 73 that conforms to the surface shape of a main surface 71c (including the housing portion 72) that faces the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 toward the light-guiding member 31. This increases the amount of fluorescence received by the light-receiving element 13 via the light-guiding member 31 and the optical system 41. In this case, the auxiliary light-guiding member 71 does not have to be transparent.

[0074] For example, the reflective film 73 is a dielectric multilayer film, which reflects light of the wavelength of the above-mentioned fluorescence.

[0075] The other configurations and operations of the magnetic field measuring device according to the fifth embodiment are the same as those of the fourth embodiment, and therefore the description thereof will be omitted.

[0076] Embodiment 6.

[0077] Fig. 13 is a perspective view showing a configuration example of the magnetic sensor unit 10 in embodiment 6. Fig. 14 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 in embodiment 6. Fig. 14 shows the A-A cross section in Fig. 13. In embodiment 6, the storage portion 72 is a recessed groove extending to the side surface 71a of the auxiliary light-guiding member 71, for example, as shown in Figs. 13 and 14 .

[0078] For example, a portion of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light-guiding member 71 travels through the grooves of the auxiliary light-guiding member 71, enters the optical system 41, travels within the optical system 41, and enters the light-receiving device 13, or enters the auxiliary light-guiding member 71, travels within the auxiliary light-guiding member 71 and the optical system 41, and enters the light-receiving device 13.

[0079] The other configurations and operations of the magnetic field measuring device according to the sixth embodiment are the same as those of the fourth embodiment, and therefore the description thereof will be omitted.

[0080] Embodiment 7.

[0081] Fig. 15 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 7. Fig. 16 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 7.

[0082] 15 , for example, in the seventh embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two main surfaces facing each other, (b) includes a reflective film 73 that conforms to the surface shape of the main surface 71 b of the two main surfaces that does not face the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 by the reflective film 73 while transmitting the fluorescence, or reflects the fluorescence by the reflective film 73 and causes the fluorescence to travel through the above-mentioned grooves. As a result, the fluorescence received by the light-receiving device 13 increases, similar to the fifth embodiment.

[0083] 16 , in the seventh embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two opposing main surfaces, (b) includes a reflective film 73 that conforms to the surface shape of a main surface 71c (including a receiving portion 72 such as a groove) that faces the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 toward the groove or the light-guiding member 31. As a result, similar to the fifth embodiment, the fluorescence received by the light-receiving device 13 increases. In this case, the auxiliary light-guiding member 71 does not have to be transparent.

[0084] For example, the reflective film 73 is a dielectric multilayer film, which reflects light of the wavelength of the above-mentioned fluorescence.

[0085] The other configurations and operations of the magnetic field measuring device according to the seventh embodiment are the same as those of the sixth embodiment, and therefore the description thereof will be omitted.

[0086] Embodiment 8.

[0087] Fig. 17 is a perspective view showing a configuration example of the magnetic sensor unit 10 in embodiment 8. Fig. 18 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 in embodiment 8. Fig. 18 shows a cross section taken along line A-A in Fig. 17. In embodiment 8, the accommodation portion 72 is a recessed groove extending from one of the two side surfaces 71a, 71d of the auxiliary light-guiding member 71 to the other, as shown in Figs. 17 and 18, for example.

[0088] For example, a portion of the fluorescence emitted by the magnetic resonance member 1 traveling toward the auxiliary light-guiding member 71 travels through the grooves of the auxiliary light-guiding member 71, enters the optical system 41, travels through the optical system 41, and enters the light-receiving device 13, or enters the auxiliary light-guiding member 71, travels through the auxiliary light-guiding member 71 and the optical system 41, and enters the light-receiving device 13. In this case, for example, an optical system 41 and a light-receiving device 13 are provided on each of the two side surfaces of the above-mentioned auxiliary light-guiding member 71, so that a portion of the fluorescence traveling along the grooves toward one side surface and a portion of the fluorescence traveling along the grooves toward the other side surface are detected by the light-receiving device 13, respectively.

[0089] The other configurations and operations of the magnetic field measuring device according to the eighth embodiment are the same as those of the fourth embodiment, and therefore the description thereof will be omitted.

[0090] Embodiment 9.

[0091] Fig. 19 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 9. Fig. 20 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light-guiding member 71 in embodiment 9.

[0092] 19 , in the ninth embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two main surfaces facing each other, (b) includes a reflective film 73 that conforms to the surface shape of the main surface 71 b of the two main surfaces that does not face the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 by the reflective film 73 while transmitting the fluorescence, or reflects the fluorescence by the reflective film 73 and causes the fluorescence to travel through the recessed grooves. As a result, the fluorescence received by the light-receiving device 13 increases, as in the fifth and seventh embodiments.

[0093] 20 , in the ninth embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two opposing main surfaces, (b) includes a reflective film 73 that conforms to the surface shape of a main surface 71c (including a receiving portion 72 such as a groove) that faces the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 toward the groove or the light-guiding member 31. As a result, similar to the fifth and seventh embodiments, the fluorescence received by the light-receiving device 13 increases. In this case, the auxiliary light-guiding member 71 does not have to be transparent.

[0094] For example, the reflective film 73 is a dielectric multilayer film, which reflects light of the wavelength of the above-mentioned fluorescence.

[0095] The other configurations and operations of the magnetic field measuring device according to the ninth embodiment are the same as those of the eighth embodiment, and therefore the description thereof will be omitted.

[0096] Embodiment 10.

[0097] 21 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 according to the tenth embodiment. In the tenth embodiment, as shown in FIG. 21 , the height of the magnetic resonance member 1 in the thickness direction of the light-guiding member 31 is equal to or less than the height of the hole 32 in the light-guiding member 31. Therefore, in the tenth embodiment, the above-described housing portion 72 is not provided in the auxiliary light-guiding member 71.

[0098] For example, a portion of the fluorescence emitted by the magnetic resonance member 1 traveling toward the auxiliary light-guiding member 71 enters the auxiliary light-guiding member 71, travels through the auxiliary light-guiding member 71 and the optical system 41, and enters the light-receiving device 13. In this case, the auxiliary light-guiding member 71, like the light-guiding member 31, is a member that is transparent to the wavelength band of the fluorescence described above and does not generate fluorescence, and in this case is a member made of glass as described above.

[0099] Alternatively, a portion of the fluorescence emitted by the magnetic resonance element 1 traveling toward the auxiliary light-guiding element 71 is reflected by the auxiliary light-guiding element 71, enters the light-guiding element 31, travels through the light-guiding element 31 and the optical system 41, and enters the light-receiving device 13.

[0100] The other configurations and operations of the magnetic field measuring device according to the tenth embodiment are the same as those of the fourth embodiment, and therefore the description thereof will be omitted.

[0101] Embodiment 11.

[0102] Fig. 22 is a cross-sectional view showing an example of the reflective film provided on the auxiliary light-guiding member 71 in embodiment 11. Fig. 23 is a cross-sectional view showing another example of the reflective film provided on the auxiliary light-guiding member 71 in embodiment 11.

[0103] 22 , in the eleventh embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two main surfaces facing each other, (b) includes a reflective film 73 that conforms to the surface shape of the main surface 71 b of the two main surfaces that does not face the light-guiding member 31, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member 1 while reflecting it off the reflective film 73. As a result, the fluorescence received by the light-receiving device 13 increases, as in the fifth, seventh, and ninth embodiments.

[0104] 23 , in the eleventh embodiment, the auxiliary light-guiding member 71 (a) has a flat plate shape with two opposing main surfaces, (b) includes a reflective film 73 that conforms to the surface shape of the main surface 71c of the two main surfaces that faces the light-guiding member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 toward the light-guiding member 31. As a result, the fluorescence received by the light-receiving device 13 increases, as in the fifth, seventh, and ninth embodiments. In this case, the auxiliary light-guiding member 71 does not have to be transparent.

[0105] For example, the reflective film 73 is a dielectric multilayer film, which reflects light of the wavelength of the above-mentioned fluorescence.

[0106] The other configurations and operations of the magnetic field measuring device according to the eleventh embodiment are the same as those of the tenth embodiment, and therefore the description thereof will be omitted.

[0107] Embodiment 12.

[0108] Fig. 24 is a perspective view showing a configuration example of the magnetic sensor unit 10 according to the twelfth embodiment. Fig. 25 is a top view showing a configuration example of the magnetic sensor unit 10 according to the twelfth embodiment. For example, as shown in Figs. 24 and 25 , in the twelfth embodiment, the light-guiding member 31 includes a slit 31a extending from the side surface of the light-guiding member 31 to the hole 32 along the optical path of incident light (excitation light, measurement light, etc.) to the magnetic resonance member 1. That is, while in the other embodiments, the incident light enters the magnetic resonance member 1 via the light-guiding member 31, in the twelfth embodiment, the incident light enters the magnetic resonance member 1 without passing through the light-guiding member 31.

[0109] The other configurations and operations of the magnetic field measuring device according to embodiment 12 are the same as those of any of the other embodiments, and therefore will not be described again.

[0110] Embodiment 13.

[0111] 26 is a block diagram showing the configuration of a magnetic field measurement device according to a thirteenth embodiment of the present invention. In the thirteenth embodiment, as shown in FIG. 26, the magnetic sensor unit 10 further includes a flux transformer 4. The flux transformer 4 includes a primary coil 4a and a secondary coil 4b. The primary coil 4a senses a magnetic field to be measured, and the secondary coil 4b applies an applied magnetic field corresponding to the sensed magnetic field to the magnetic resonance member 1. The secondary coil 4b is electrically connected to the primary coil 4a by a cable (coaxial cable, Litz wire, etc.) or the like.

[0112] FIG. 27 is a cross-sectional view showing an example of the primary coil 4a in FIG. 26. FIG. 28 is a diagram illustrating the arrangement of the primary coil 4a relative to the object to be measured 101. As shown in FIG. 27, the primary coil 4a is configured with a winding of 0.5 to several tens of turns. Also, as shown in FIG. 28, the primary coil 4a senses the magnetic field to be measured at a predetermined measurement position above the object to be measured 101, for example, and the secondary coil 4b applies an applied magnetic field (magnetic field transmitted from the measurement position by the flux transformer 4) corresponding to the magnetic field sensed at that measurement position to the magnetic resonance member 1. In other words, the primary coil 4a induces an electrical signal corresponding to the sensed magnetic field to be measured, and the secondary coil 4b induces an applied magnetic field corresponding to that electrical signal.

[0113] Fig. 29 is a perspective view showing the configuration of the magnetic sensor unit 10 in embodiment 13. For example, as shown in Fig. 29, the secondary coil 4b is wound around the outer peripheries of the light-guiding member 31, the auxiliary light-guiding member 71, and the base substrate 61. Here, as shown in Fig. 29, for example, the secondary coil 4b is wound so as to pass over the side surfaces of the light-guiding member 31, the auxiliary light-guiding member 71, and the base substrate 61 other than the side surfaces through which the incident light and fluorescent light pass.

[0114] If the auxiliary light-guiding member 71 is not provided, the secondary coil 4 b is wound around the outer periphery of the light-guiding member 31 and the base substrate 61 .

[0115] In this embodiment, the secondary coil 4b is a bobbinless coil and is arranged so that the central axis of the secondary coil 4b substantially coincides with the center of the magnetic resonance member 1 and is substantially perpendicular to the central axis of the coil section 21 of the high-frequency magnetic field generator 2. This makes the direction of the microwaves (magnetic field) from the high-frequency magnetic field generator 2 substantially perpendicular to the direction of the magnetic field from the secondary coil 4b. Furthermore, in the direction of the central axis of the secondary coil 4b of the transformer 4, the magnetic resonance member 1 is arranged substantially at the center in the width direction of the secondary coil 4b.

[0116] The secondary coil 4b is wound in a ring shape at a predetermined turns ratio relative to the primary coil 4a. If the secondary coil 4b is made of a thin wire with a large number of turns, in order to prevent the coil conductor from unraveling, for example, a self-bonding wire may be used for the coil conductor, or the coil conductor may be wound around a bobbin jig and coated with adhesive or the like, and then the bobbin jig may be removed, thereby forming a bobbinless secondary coil 4b.

[0117] The secondary coil 4b may be wound around a bobbin. In this case, the bobbin has a through hole in which the light-guiding member 31 on which the magnetic resonance member 1 and the coil patterns 2a and 2b are mounted, the auxiliary light-guiding member 71, and the base substrate 61 are disposed. If the auxiliary light-guiding member 71 is not disposed, the light-guiding member 31 on which the magnetic resonance member 1 and the coil patterns 2a and 2b are mounted, and the base substrate 61 are disposed in the through hole.

[0118] The secondary coil 4b may be a multi-layer wound coil.

[0119] Next, the operation of the magnetic field measuring device according to the thirteenth embodiment will be described.

[0120] 28, for example, the primary coil 4a of the flux transformer 4 in the magnetic sensor unit 10 is placed in a desired measurement position and in a desired orientation relative to the measurement object 101. As a result, the magnetic field to be measured is sensed by the primary coil 4a, and an applied magnetic field is induced by the secondary coil 4b, which is applied to the magnetic resonance component 1 as the magnetic field to be measured.

[0121] The calculation unit 14b performs calculations corresponding to the measurement sequence based on the detected value of the intensity of the fluorescence described above to identify the applied magnetic field, and converts the identified applied magnetic field into the measured magnetic field (intensity, direction, etc.) at the measurement position based on the winding ratio of the transformer 4, etc.

[0122] As a result, the magnetic field at the measurement position is measured by the magnetic sensor unit 10 (i.e., the magnetic resonance member 1). Note that the magnetic sensor unit 10 (primary coil 4 a) may be scanned along a predetermined scanning path pattern to perform the above-described magnetic field measurement at multiple measurement positions on the scanning path.

[0123] The other configurations and operations of the magnetic field measuring device according to embodiment 13 are the same as those of any of the other embodiments, and therefore will not be described again.

[0124] Embodiment 14.

[0125] 30 is a perspective view showing the configuration of the magnetic sensor unit 10 according to the fourteenth embodiment. For example, as shown in FIG. 30, in the fourteenth embodiment, the base substrate 61 has a positioning groove 61a for causing the secondary coil 4b to apply a magnetic field to the magnetic resonance member 1, and the secondary coil 4b is wound so as to pass through this positioning groove 61a. Specifically, the positioning grooves 61a are formed on two opposing side surfaces of the base substrate 61. This makes it easier to position the secondary coil 4b so that the magnetic resonance member 1 is positioned approximately at the center of the secondary coil 4b in the axial direction.

[0126] The other configurations and operations of the magnetic field measuring device according to the fourteenth embodiment are the same as those of the thirteenth embodiment, and therefore the description thereof will be omitted.

[0127] It should be noted that various changes and modifications to the above-described embodiments will be apparent to those skilled in the art. Such changes and modifications may be made without departing from the spirit and scope of the subject matter and without diminishing its intended advantages. In other words, it is intended that such changes and modifications be included within the scope of the claims.

[0128] For example, in any of the above embodiments, the magnet 3 may be an electromagnet.

[0129] Furthermore, in any of the above embodiments, a reflective film (such as a dielectric multilayer film) may be provided on a side surface other than side surface 31c of light-guiding member 31 (i.e., a side surface that does not emit fluorescent light) or on part or all of the main surface. Also, in any of the above embodiments, a reflective film (such as a dielectric multilayer film) may be provided on a side surface of auxiliary light-guiding member 71 other than the side surface that emits fluorescent light. Also, light-guiding member 31 and auxiliary light-guiding member 71 may be made of a transparent resin. Furthermore, a reflective film (such as a dielectric multilayer film) may be provided on the side surfaces of CPCs 41a and 41b.

[0130] The present invention is applicable to, for example, a magnetic measurement device.

Claims

1. A magnetic field measuring device comprising: a magnetic resonance element capable of quantum manipulation of electron spins using microwaves; a high-frequency magnetic field generator that applies the microwaves to the magnetic resonance element; an irradiation device that irradiates the magnetic resonance element with incident light of a specific wavelength; and a light-guiding element that transmits fluorescence emitted by the magnetic resonance element and guides it from the magnetic resonance element, wherein the light-guiding element has a flat plate shape with two opposing main surfaces and has a hole, the magnetic resonance element is disposed on the inner surface of the hole, the high-frequency magnetic field generator has coil patterns disposed on each of the two main surfaces, and the light-guiding element emits the fluorescence from at least a side surface of the light-guiding element.

2. A magnetic field measuring device according to claim 1, characterized in that the light-guiding member has a slit extending from the side surface of the light-guiding member to the hole along the optical path of the incident light to the magnetic resonance member.

3. A magnetic field measuring device according to claim 2, characterized in that the coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the terminal portion comprises a capacitive pattern that forms a resonant circuit together with the coil portion.

4. A magnetic field measuring device according to claim 1, characterized in that the coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the terminal portion comprises a capacitive pattern that forms a resonant circuit together with the coil portion.

5. A magnetic field measuring device as described in claim 1, further comprising a base substrate having a wiring pattern, wherein the coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the light-guiding member is arranged on the base substrate so that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces.

6. A magnetic field measuring device as described in claim 5, further comprising a flux transformer that senses the magnetic field to be measured with a primary coil and applies an applied magnetic field corresponding to the sensed magnetic field to the magnetic resonance member with a secondary coil, wherein the secondary coil is wound around the outer periphery of the light-guiding member and the base substrate.

7. A magnetic field measuring device as described in claim 5, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member, and the secondary coil being wound around the outer periphery of the light-guiding member, the auxiliary light-guiding member, and the base substrate.

8. A magnetic field measuring device as described in claim 6 or claim 7, characterized in that the base substrate has a positioning groove for causing the secondary coil to apply the applied magnetic field to the magnetic resonance member, and the secondary coil is wound so as to pass through the positioning groove.

9. A magnetic field measuring device as described in claim 2, further comprising a base substrate having a wiring pattern, the coil pattern having a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the light-guiding member being arranged on the base substrate so that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces.

10. A magnetic field measuring device as described in claim 9, further comprising a flux transformer that senses the magnetic field to be measured with a primary coil and applies an applied magnetic field corresponding to the sensed magnetic field to the magnetic resonance member with a secondary coil, wherein the secondary coil is wound around the outer periphery of the light-guiding member and the base substrate.

11. A magnetic field measuring device as described in claim 9, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member, and the secondary coil being wound around the outer periphery of the light-guiding member, the auxiliary light-guiding member, and the base substrate.

12. A magnetic field measuring device as described in claim 10 or claim 11, characterized in that the base substrate has a positioning groove for allowing the secondary coil to apply the applied magnetic field to the magnetic resonance member, and the secondary coil is wound so as to pass through the positioning groove.

13. A magnetic field measuring device as described in claim 3, further comprising a base substrate having a wiring pattern, the coil pattern having a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the light-guiding member being arranged on the base substrate so that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces.

14. A magnetic field measuring device as described in claim 13, further comprising a flux transformer that senses the magnetic field to be measured with a primary coil and applies an applied magnetic field corresponding to the sensed magnetic field to the magnetic resonance member with a secondary coil, wherein the secondary coil is wound around the outer periphery of the light-guiding member and the base substrate.

15. A magnetic field measuring device as described in claim 13, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member, and the secondary coil being wound around the outer periphery of the light-guiding member, the auxiliary light-guiding member, and the base substrate.

16. A magnetic field measuring device as described in claim 14 or claim 15, characterized in that the base substrate has a positioning groove for allowing the secondary coil to apply the applied magnetic field to the magnetic resonance member, and the secondary coil is wound so as to pass through the positioning groove.

17. A magnetic field measuring device as described in claim 4, further comprising a base substrate having a wiring pattern, the coil pattern having a notched ring-shaped coil portion and a terminal portion extending from the coil portion, and the light-guiding member being arranged on the base substrate so that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces.

18. A magnetic field measuring device as described in claim 17, further comprising a flux transformer that senses the magnetic field to be measured with a primary coil and applies an applied magnetic field corresponding to the sensed magnetic field to the magnetic resonance member with a secondary coil, wherein the secondary coil is wound around the outer periphery of the light-guiding member and the base substrate.

19. A magnetic field measuring device as described in claim 17, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member, and the secondary coil being wound around the outer periphery of the light-guiding member, the auxiliary light-guiding member, and the base substrate.

20. The magnetic field measuring device according to claim 18 or 19, wherein the base substrate has a positioning groove for causing the secondary coil to apply the applied magnetic field to the magnetic resonance member, and the secondary coil is wound so as to pass through the positioning groove.

21. A magnetic field measuring device according to claim 1, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being disposed opposite one of the two main surfaces of the light-guiding member.

22. A magnetic field measuring device as described in claim 21, characterized in that the height of the magnetic resonance member in the thickness direction of the light-guiding member is greater than the height of the hole in the light-guiding member, and the auxiliary light-guiding member has a storage portion that stores the part of the magnetic resonance member protruding from the hole.

23. A magnetic field measuring device according to claim 22, characterized in that the accommodating portion is a recess having an inner surface that is flush with the inner surface of the hole, and the magnetic resonance member is disposed on the inner surface of the hole and the inner surface of the recess.

24. A magnetic field measuring device according to claim 22, wherein the housing portion is a recessed groove extending to the side surface of the auxiliary light-guiding member.

25. A magnetic field measuring device according to claim 22, wherein the housing portion is a recessed groove extending from one side surface to the other side surface of the auxiliary light-guiding member.

26. A magnetic field measuring device according to claim 21, wherein the height of said magnetic resonance member in the thickness direction of said light-guiding member is equal to or less than the height of said hole in said light-guiding member.

27. A magnetic field measuring device as described in any one of claims 21 to 26, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface of the two main surfaces that does not face the light-guiding member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

28. A magnetic field measuring device as described in any one of claims 21 to 26, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface facing the light-guiding member, of the two main surfaces, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light-guiding member.

29. A magnetic field measuring device as described in claim 2, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member.

30. A magnetic field measuring device as described in claim 29, characterized in that the height of the magnetic resonance member in the thickness direction of the light-guiding member is greater than the height of the hole in the light-guiding member, and the auxiliary light-guiding member has a storage portion that stores the portion of the magnetic resonance member protruding from the hole.

31. A magnetic field measuring device according to claim 30, wherein the accommodating portion is a recess having an inner surface that is flush with the inner surface of the hole, and the magnetic resonance member is disposed on the inner surface of the hole and the inner surface of the recess.

32. A magnetic field measuring device according to claim 30, wherein the housing portion is a recessed groove extending to the side surface of the auxiliary light-guiding member.

33. A magnetic field measuring device according to claim 30, wherein the housing portion is a recessed groove extending from one side surface to the other side surface of the auxiliary light-guiding member.

34. A magnetic field measuring device according to claim 29, wherein the height of said magnetic resonance member in the thickness direction of said light-guiding member is equal to or less than the height of said hole in said light-guiding member.

35. A magnetic field measuring device as described in any one of claims 29 to 34, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface that does not face the light-guiding member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

36. A magnetic field measuring device as described in any one of claims 29 to 34, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface facing the light-guiding member, of the two main surfaces, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light-guiding member.

37. A magnetic field measuring device as described in claim 3, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member.

38. A magnetic field measuring device as described in claim 37, characterized in that the height of the magnetic resonance member in the thickness direction of the light-guiding member is greater than the height of the hole in the light-guiding member, and the auxiliary light-guiding member has a housing portion that houses the part of the magnetic resonance member protruding from the hole.

39. A magnetic field measuring device according to claim 38, wherein the accommodating portion is a recess having an inner surface that is flush with the inner surface of the hole, and the magnetic resonance member is disposed on the inner surface of the hole and the inner surface of the recess.

40. A magnetic field measuring device according to claim 38, wherein the housing portion is a recessed groove extending to the side surface of the auxiliary light-guiding member.

41. A magnetic field measuring device according to claim 38, wherein the housing portion is a recessed groove extending from one side surface to the other side surface of the auxiliary light-guiding member.

42. A magnetic field measuring device according to claim 37, wherein the height of said magnetic resonance member in the thickness direction of said light-guiding member is equal to or less than the height of said hole in said light-guiding member.

43. A magnetic field measuring device as described in any one of claims 37 to 42, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface that does not face the light-guiding member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

44. A magnetic field measuring device as described in any one of claims 37 to 42, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface facing the light-guiding member, of the two main surfaces, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light-guiding member.

45. A magnetic field measuring device as described in claim 4, further comprising an auxiliary light-guiding member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, the auxiliary light-guiding member being arranged opposite one of the two main surfaces of the light-guiding member.

46. ​​A magnetic field measuring device as described in claim 45, characterized in that the height of the magnetic resonance member in the thickness direction of the light-guiding member is greater than the height of the hole in the light-guiding member, and the auxiliary light-guiding member has a housing portion that houses the part of the magnetic resonance member protruding from the hole.

47. A magnetic field measuring device according to claim 46, characterized in that the accommodating portion is a recess having an inner surface that is flush with the inner surface of the hole, and the magnetic resonance member is disposed on the inner surface of the hole and the inner surface of the recess.

48. A magnetic field measuring device according to claim 46, wherein the housing portion is a recessed groove extending to the side surface of the auxiliary light-guiding member.

49. A magnetic field measuring device according to claim 46, wherein the receiving portion is a recessed groove extending from one side surface of the auxiliary light-guiding member to the other side surface.

50. A magnetic field measuring device according to claim 45, wherein the height of said magnetic resonance member in the thickness direction of said light-guiding member is equal to or less than the height of said hole in said light-guiding member.

51. A magnetic field measuring device as described in any one of claims 45 to 50, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface that does not face the light-guiding member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

52. A magnetic field measuring device as described in any one of claims 45 to 50, characterized in that the auxiliary light-guiding member (a) has a flat plate shape with two main surfaces facing each other, (b) is provided with a reflective film that follows the surface shape of the main surface facing the light-guiding member, of the two main surfaces, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light-guiding member.

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