Gas supply device

Abstract

Provided is a gas supply device that generates a combined gas to purify (DNA-free) dispersed nucleic acids in a release space, that performs deactivating disinfection decontamination exposure of infectious pathogens, and that makes a mechanism for decomposing and purifying organic cases after purification compact so that the mechanism corresponds to a target scale. The present invention is provided with: a heating unit that heats and vaporizes a primary alcohol by electromagnetic induction heating; an air supply unit that is connected by piping to the downstream side of the heating unit and causes air to flow in; and a heating reaction unit that is connected by piping to the downstream side of the air supply unit and generates a combined gas such as an aldehyde by causing a gas formed from a mixture of the vaporized primary alcohol and the air to oxidize through contact with a metal catalyst having a porous structure that has been heated by electromagnetic induction heating. Furthermore, the present invention is provided with a structure that comprises a vacuum ultraviolet lamp which releases ozone and oxygen radicals such as OH radicals, an ozone decomposition catalyst, and a decomposition catalyst such as platinum, and that decomposes and purifies a disinfection decontamination exposure gas, hazardous volatile organic substances, and unpleasant odors.

Description

Gas Supply Equipment

[0001] The present invention relates to a gas supply device, and in particular to a gas supply device that generates a complex gas containing aldehyde (hereinafter referred to as decontamination gas) and performs decontamination and purification such as nucleic acid decomposition, sterilization, disinfection, and bacteria removal in the space into which the gas is released.

[0002] When reusing safety cabinets, cell culture equipment, and animal husbandry equipment installed in biohazard facilities, research facilities (including BSL-3 and BSL-4 facilities), and laboratories, etc., sterilization-level disinfection is required to prevent infection and to remove contamination caused by nucleic acid dispersion. The main purpose is to inactivate pathogens such as bacteria and viruses, decompose DNA and RNA, and destroy pathogen eggs.

[0003] In addition to ethylene oxide gas, ozone, and the like, which are commonly used as gases for sterilizing medical instruments, etc., a sterilization system that uses a composite gas containing formaldehyde and methanol, which is produced by a catalytic reaction from methanol, has a high decontamination ability that breaks down nucleic acids into fragments, is less residual and corrosive, and has excellent penetration and diffusibility (Patent Document 1, etc.).

[0004] Formaldehyde produced from methanol has been pointed out as a carcinogenic substance in addition to its bactericidal properties. In contrast, acetaldehyde produced from ethanol is less carcinogenic than formaldehyde. Therefore, flexible use is required depending on the structure of the facility, the target of sterilization and decontamination, and the purpose.

[0005] Furthermore, in addition to the types of gases generated as described above, there is also a high demand for efficient nucleic acid decomposition, sterilization, disinfection, and decontamination, etc., in an even smaller, sealed environment than a room such as a safety cabinet or glove box, and there is also a desire to miniaturize existing equipment such as gas supply devices.

[0006] Japanese Patent Application Laid-Open No. 2022-157048

[0007] The present invention has been made in consideration of the above points, and provides a gas supply device that generates and releases a complex decontamination gas containing aldehyde to perform decontamination such as nucleic acid decomposition, sterilization, disinfection, and bacteria removal in a space, and that has a miniaturized mechanism for generating aldehyde gas, or a miniaturized mechanism for generating aldehyde gas and a mechanism for decomposing and purifying the released gas, so as to be suitable for the scale of the target.

[0008] That is, the gas supply device of the embodiment is characterized by comprising a heating section that heats and vaporizes primary alcohol by electromagnetic induction heating, an air supply section that is connected to a pipeline downstream of the heating section and supplies air, and a heating reaction section that is connected to a pipeline downstream of the air supply section and heats a gas mixture of the vaporized primary alcohol and the supply air by electromagnetic induction heating, and generates decontamination gas by an oxidation reaction upon contact with an oxidized porous metal catalyst.

[0009] Furthermore, in the gas supply device, the thermal reaction unit may include a metallic catalyst containing unit that contains a metal catalyst, a heating cylinder unit that conducts heat to the catalyst containing unit, a protective unit that covers the periphery of the heating cylinder unit and provides thermal insulation protection, and an induction heating coil unit that is wrapped around the protective unit from the periphery.

[0010] Furthermore, in the gas supply device, the thermal reaction unit may include a metal catalyst containing unit that contains a copper catalyst, a protective unit that covers the catalyst containing unit and provides thermal insulation protection, and an induction heating coil unit that is wound around the protective unit.

[0011] Furthermore, in the gas supply device, the porous metal catalyst may be a porous copper catalyst.

[0012] Furthermore, in the gas supply device, a first gas decomposition unit for decomposing volatile organic compounds may be connected via a pipeline downstream of the thermal reaction unit.

[0013] Furthermore, the gas supply device may be provided with an irradiation unit that irradiates the first gas decomposition unit with vacuum ultraviolet light.

[0014] Furthermore, in the gas supply device, ozone, OH radicals, oxygen radicals, and the like may be generated from the irradiation section of the first gas decomposition section.

[0015] Furthermore, in the gas supply device, a second gas decomposition unit including a catalyst may be connected via a pipeline downstream of the first gas decomposition unit.

[0016] Furthermore, the gas supply device may be provided with a blower between the first gas decomposition section and the second gas decomposition section.

[0017] Furthermore, in the gas supply device, the second gas decomposition section may be provided with a heating section.

[0018] Furthermore, in the gas supply device, the gas discharged from the second gas decomposition section may be taken into the first gas decomposition section, and then passed through the first gas decomposition section and then the second gas decomposition section, thereby circulating the gas.

[0019] The gas supply device of the present invention is equipped with a heating section that heats and vaporizes primary alcohol by electromagnetic induction heating, an air supply section that is connected to a pipeline downstream of the heating section and supplies air, and a heating reaction section that is connected to a pipeline downstream of the air supply section and heats a gas mixture of the vaporized primary alcohol and the supply air by electromagnetic induction heating, and generates a decontamination gas by an oxidation reaction caused by contact with an oxidized porous metal catalyst.This generates a complex gas containing aldehyde gas to perform decontamination such as nucleic acid degradation, sterilization, disinfection, and sterilization of the release space, and the gas generation mechanism can be miniaturized to provide a gas supply device that can be adapted to the scale of the object to be decontaminated.

[0020] 15 is an overall side view of a gas supply device of one embodiment. FIG. 16 is a partial cross-sectional schematic diagram of the vicinity of the heating unit in FIG. 1. FIG. 17 is a partial cross-sectional schematic diagram of the vicinity of the heating unit in another embodiment. FIG. 18 is a cross-sectional schematic diagram of a thermal reaction unit in a first embodiment. FIG. 19 is a cross-sectional schematic diagram of a thermal reaction unit in a second embodiment. (A) A photograph of a copper catalyst, and (B) a photograph of stacked copper catalysts. FIG. 15 is a schematic diagram of a gas supply device including a first gas decomposition unit. FIG. 16 is a schematic diagram of a gas supply device including a first gas decomposition unit and a second gas decomposition unit. FIG. 17 is a side view of an example configuration in which the first gas decomposition unit and the second gas decomposition unit are integrated. FIG. 18 is a perspective view of FIG. 19. FIG. 19 is a block diagram of an example configuration of a gas supply device. FIG. 19 is a block diagram of the example configuration of the device of FIG. 19. FIG. 19 is a schematic diagram showing the operation of the first gas decomposition unit. FIG. 19 is a table of an operating sequence in the example configuration of the gas supply device of FIG. 11. FIG. 19 is a block diagram of a bag-in type gas supply device applied to a sterile isolator constituting a grade A that does not use a solenoid valve in the example configuration of the gas supply device of FIG. 11. FIG. 19 is a configuration diagram of actual 3D CAD data for realizing FIG. 15.

[0021] The gas supply device of the embodiment is used for nucleic acid decomposition, purification (so-called DNA-free), sterilization, and sterilization-level decontamination (hereinafter referred to as decontamination, etc.) in spaces of a certain size that require aseptic management, such as laboratory animal breeding rooms and bio-related genetic manipulation facilities, nucleic acid purification (DNA-free) for reuse of facilities and equipment (equipment and materials), and cell culture facilities.It is also used in enclosed environments smaller than rooms, such as safety cabinets, clean benches, and glove boxes, and for equipment that requires sterilization and nucleic acid purification when replacing HEPA filters.Decontamination within the space is performed using a complex gas containing aldehyde gas generated by the oxidation of primary alcohol.In addition, the gas supply device is endowed with the ability to decompose volatile organic compounds (VOCs), such as the complex gas containing the generated aldehyde, and also with a deodorizing function.

[0022] The primary alcohol used as the raw material is methanol or ethanol. Primary alcohols with a molecular weight greater than that of methanol or ethanol exhibit lower decontamination capabilities for aldehyde-containing complex gases produced by oxidation reactions than formaldehyde or acetaldehyde. The raw materials, methanol and ethanol, may be used as a mixture or either alone. In the case of formaldehyde produced from methanol, due to its carcinogenicity, it is necessary to ensure that no personnel are present during decontamination of safety cabinets, glove boxes, etc., and to use dedicated equipment in unmanned decontamination facilities and areas with BSL-3 or BSL-4 or other standards. Furthermore, when decontaminating spaces where workers are expected to enter and exit, such as laboratory animal breeding rooms and pharmaceutical factories, prohibiting human entry ensures safety management to avoid exposure to hazardous substances after decontamination. Depending on the application, decontamination gases containing acetaldehyde derived from ethanol may also be used. Of course, the use of these gases is not uniform; requirements for nucleic acid purification, pathogen decontamination, and the volume of the target space must be taken into account.

[0023] 1 is an overall side view of a gas supply device 1 according to one embodiment. The gas supply device 1 includes, in order from the bottom of the drawing, a heating section 10 (reference numeral 10A in FIG. 2 and reference numeral 10B in FIG. 3 ), an air supply section 30, and a thermal reaction section 50. A raw material supply section 2 for a primary alcohol, which is a raw material, is formed at the end of the heating section 10, and a reaction gas release section 3 for releasing the generated reaction gas is formed at the end of the thermal reaction section 50. The pathway for the primary alcohol in the heating section 10, the air supply section 30, and the thermal reaction section 50 is formed as a main pipe section 5.

[0024] The heating unit 10, the air supply unit 30, and the thermal reaction unit 50 are made of stainless steel for corrosion resistance against the reaction gas, etc. Furthermore, a supply tank (not shown) for supplying primary alcohol to the gas supply device 1 and an air pump (not shown) for supplying air are appropriately provided. In addition, the gas supply device 1 is housed in a housing or the like (not shown).

[0025] The heating unit 10 heats primary alcohol by electromagnetic induction heating (IH), vaporizing it and expanding it, which is then released from a nozzle. The air supply unit 30 is connected to a pipeline downstream of the heating unit 10. The air (oxygen) used primarily for oxidizing the primary alcohol is mixed with the vaporized primary alcohol and convected through the pipeline. The thermal reaction unit 50 is connected to a pipeline downstream of the air supply unit 30. The electromagnetically heated metal catalyst contacts the air / primary alcohol gas mixture convecting through the pipeline, resulting in the generation of decontamination gas through an oxidation-reduction reaction. Control of the heating unit may be stopped after a certain amount of reaction heat is obtained. The system features continuous production of aldehyde gas, achieved simply by controlling the concentration of the primary alcohol and air mixture.

[0026] The heating unit 10, air supply unit 30, and thermal reaction unit 50 that make up the gas supply device 1 are each separable, and a flange 6 of the heating unit 10 and a flange 7 of the air supply unit 30 are fastened together with bolts. A sealing gasket 4 is interposed between the flanges 6 and 7. A flange 8 of the air supply unit 30 and a flange 9 of the thermal reaction unit 50 are fastened together with bolts. A sealing packing (O-ring or gasket) 17 (see FIG. 2) is interposed between the flanges 8 and 9 to provide a seal. The connection with the thermal reaction unit 50 may have a heat-insulating structure.

[0027] For details of the heating unit 10 constituting the gas supply device 1, please refer to the partial cross-sectional schematic diagram of Fig. 2. In Fig. 2, the heating unit 10 will be described as 10A. In Fig. 3, a heating unit having a different form from the heating unit 10A will be described as 10B.

[0028] In the heating section 10A, primary alcohol supplied from a supply tank (not shown) that supplies primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section main body 11 within the heating section 10A. A steel pipe 13 made of stainless steel such as SUS304 is arranged around the heating section main body 11, and holding flanges 14 are arranged at both ends of the steel pipe 13. An induction heating coil 12 is wound around the steel pipe 13. When electricity is applied to the induction heating coil 12, the steel pipe 13 heats up due to the induced current generated in the coil. Thus, the primary alcohol is heated and vaporized while passing through the internal flow path of the heating section main body 11. A scrubbing brush-shaped diffusion member 11k made of metal such as SUS304 is provided inside the heating section main body 11, which further promotes vaporization of the primary alcohol as it passes through the heating section main body 11.

[0029] A thermocouple 18 is attached to the internal flow path of the heating unit main body 11 to measure the temperature. An orifice 15 that narrows the flow path is provided in the internal flow path near the flange portion 6 at the end of the heating unit 10A, increasing the flow rate of the primary alcohol that has evaporated (gasified) and expanded. The primary alcohol is sprayed from the orifice 15 by the pressure of the expanded gas. In addition, a diffusion mesh 16 is interposed between the flange portions 8 and 9. The diffusion mesh 16 is intended to diffuse the primary alcohol, whose flow rate has increased as it passes through the orifice 15, into the tube.

[0030] In the heating section 10B of FIG. 3 , primary alcohol supplied from a supply tank (not shown) that supplies primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section main body 11 within the heating section 10B. A diffusion member 11k (a bundle-shaped surface area expansion member made of SUS304 or the like) is disposed within the heating section main body 11, a magnetic steel pipe is disposed around it, and retaining flanges 14 are disposed at both ends of the steel pipe 11p and the insulating material 13. An induction heating coil 12 is wrapped around the insulating material 13. When current is applied to the induction heating coil 12, the induced current generated in the coil heats the steel pipe 11p between the heating section main body 11 and the insulating material 13. Thus, the primary alcohol is heated and vaporized as it passes through the internal flow path of the heating section main body 11. An orifice 15 that narrows the flow path is provided in the internal flow path near the flange portion 6 at the end of the heating section 10B, increasing the flow rate of the vaporized and expanded (gasified) primary alcohol. Similarly, the diffusion mesh 16 allows the primary alcohol, which has passed through the orifice 15 and has an increased flow rate, to be diffused into the tube.

[0031] The choice between the heating unit 10A in Fig. 2 and the heating unit 10B in Fig. 3 mainly depends on the size of the installation location of the gas supply device 1. When it is not easy to ensure the height of the installation location, the heating unit 10A in Fig. 2 is preferable, and when it is not easy to ensure the width of the installation location, the heating unit 10B in Fig. 3 is preferable. The primary alcohol vaporization performance is the same for both heating units.

[0032] The air supply unit 30 takes in air (oxygen) from outside the gas supply device 1. The evaporated (gasified) and expanded primary alcohol and the taken-in air are mixed in the pipe inside the air supply unit 30. If the amount of air (oxygen) is sufficient, the efficiency of the oxidation reaction in the thermal reaction unit 50 improves. The air supply unit 30 is provided in the gas supply device 1 for forced intake.

[0033] The structure of the thermal reaction unit 50 disclosed in FIG. 1 is shown as a cross-sectional schematic diagram in FIGS. 4 and 5. The thermal reaction unit 50X in FIG. 4 comprises, from the center, a catalyst containing unit 51, a heating cylinder unit 52, a protective unit 53, and an induction heating coil unit 55 at the outermost portion. The catalyst containing unit 51 contains a metal catalyst 59 and is a cylindrical body made of austenitic stainless steel such as SUS304, which has no magnetic properties. The catalyst containing unit 51 may also be made of copper or aluminum. Since the catalyst containing unit 51 is made of a non-magnetic metal, a heating cylinder unit 52 made of a magnetic metal is disposed on the outside of the catalyst containing unit 51. The heating cylinder unit 52 is a cylindrical body made of ferritic stainless steel such as SUS430, which has magnetic properties. The heating cylinder unit 52 may be made of a plated iron plate or the like.

[0034] The heating cylinder portion 52 generates heat due to an induced current when current is passed through the induction heating coil portion 55, and the heat is conducted to the metallic catalyst containing portion 51, raising the temperature of the metal catalyst 59 inside the catalyst containing portion 51. To prevent thermal damage to the induction heating coil portion 55 itself due to the heat generated by the heating cylinder portion 52, a protective portion 53 is provided that covers the periphery of the heating cylinder portion 52 to provide thermal insulation and protection. The induction heating coil portion 55 is then wound around the periphery of the protective portion 53. Therefore, a known insulating material is used for the protective portion 53.

[0035] The catalyst housing portion 51 houses the metal catalyst 59 and serves as the reaction site for the oxidation of the vaporized primary alcohol, i.e., the generation of a compound gas containing aldehyde gas. Therefore, because it is susceptible to oxidation corrosion, austenitic stainless steel such as SUS304 is preferably used. However, since SUS304 is not magnetic and cannot be induction heated as is, a heating cylinder portion 52 made of magnetic ferritic stainless steel is further provided to enable heating of the metal catalyst 59.

[0036] The thermal reaction unit 50Y in Fig. 5 comprises, from the center, a catalyst containing unit 51 that contains a metal catalyst 59, a protective unit 53, and an induction heating coil unit 55 at the outermost part. The thermal reaction unit 50Y differs from the thermal reaction unit 50X described above in that the catalyst containing unit 51 is formed as a cylindrical body made of ferritic stainless steel and is magnetic. This allows induction heating of the catalyst containing unit 51 itself. The functions of the protective unit 53 and the induction heating coil unit 55 are the same as those of the thermal reaction unit 50X described above.

[0037] The deterioration of the corrosion performance of the metal in the catalyst containing unit 51 of the thermal reaction unit 50Y can be addressed by replacing the catalyst containing unit 51 earlier or by forming a glass coating such as enamel on the surface of the catalyst containing unit 51. In the thermal reaction unit 50Y, the heating cylinder unit 52 can be omitted, reducing the number of components and enabling further miniaturization of the device.

[0038] By using an induction heating method like the thermal reaction units 50X and 50Y, it is easy to control the start and stop of the heating reaction and the increase and decrease of the heating temperature by turning on or off electricity and increasing or decreasing the amount of current when electricity is turned on. A control microcomputer (not shown) is installed in the gas supply device 1, and the amount of primary alcohol supplied, the amount of air supplied, the heating temperature, the operating time, etc. are controlled depending on the equipment to be decontaminated and the work being carried out. In the gas supply device 1, the heating units 10 (10A, 10B) and the thermal reaction units 50 (50X, 50Y) can be combined in any appropriate way and can be exchanged depending on the required processing capacity, operating time, etc.

[0039] The metal catalyst 59 filled in the thermal reaction section 50 (50X, 50Y) of the gas supply device 1 is preferably a copper catalyst with a porous structure. Of course, metals with catalytic properties, such as nickel, manganese, and platinum, can be used as catalysts in addition to copper. In this embodiment, as shown in the photograph in FIG. 6 , a copper catalyst with an irregular porous structure made of foam metal is used. The metal catalyst 59 may be a ceramic honeycomb or metal honeycomb support material carrying a redox reaction catalyst, making it easier to quantify the catalyst amount and pressure loss. The photograph in FIG. 6(A) shows an enlarged view of the copper catalyst, and FIG. 6(B) shows multiple copper catalysts stacked together. The copper catalyst has a porous structure in which the shells resulting from the coarse crushing of copper spheres are moderately aggregated to ensure breathability. This structure increases the surface area of ​​the metal catalyst 59 (copper catalyst) in the catalyst container 51, reducing pressure loss and improving the efficiency of reaction gas generation through the oxidation of primary alcohol, thereby enabling miniaturization. The copper foam metal of the embodiment can be produced by a known method, and there are no particular limitations.

[0040] In addition, a porous honeycomb structure is used for the metal catalyst. Structures with low pressure loss, such as a bundle of metal tubes or a composite of ceramics with hollow parts such as through-holes carrying a catalytically active metal such as copper, can also be used.

[0041] The aldehyde-containing composite gas (reactive decontamination gas) generated by the reaction with the metal catalyst (copper catalyst) under heating conditions while passing through the thermal reaction section 50 (50X, 50Y) is released from the reactive gas release section 3 to the outside of the gas supply device 1 (see FIG. 1). After the aldehyde gas (mainly acetaldehyde, but also a mixture of formaldehyde) generated and released by the gas supply device 1 has been used to decontaminate the space within the facility for a predetermined period of time, the reactive decontamination gas remaining within the facility must be removed. In other words, by the time workers in the facility begin work, the harmful components of the released aldehyde-containing composite reactive decontamination gas must be reduced to a specified level or below, so that workers can be protected from gas exposure.

[0042] For this reason, the gas supply apparatus 1 is further provided with a mechanism for decomposing a complex reactive decontamination gas containing aldehyde (i.e., volatile organic compounds (VOCs) and decomposition target gases). Therefore, as shown in the schematic diagram of FIG. 7 (a first embodiment of the gas decomposition apparatus), the gas supply apparatus 1 of this embodiment is provided with a first gas decomposition unit 60, a decomposition catalyst unit 65, and a blower 80, in that order. Also, as shown in the schematic diagram of FIG. 8 (a second embodiment of the gas decomposition apparatus), the first gas decomposition unit 60, the decomposition catalyst unit 65, and the blower 80 are further provided with a second gas decomposition unit 70, in that order (the illustration shows an example of a pipe connection). The arrangement is such that, from the upstream side as shown in FIG. 7, the first gas decomposition unit 60, the decomposition catalyst unit 65, and the blower 80 are connected in that order. Also, as shown in FIG. 8, the first gas decomposition unit 60, the decomposition catalyst unit 65, and the blower 80 are connected in that order, and the second gas decomposition unit 70 is connected in that order. The gas supply device 1, the first gas decomposition unit 60, and the second gas decomposition unit 70 have different uses and are therefore, in principle, separate devices. From the perspective of reducing the volume of the device configuration, the gas supply device 1, the first gas decomposition unit 60, and the second gas decomposition unit 70 may be integrated into one unit. The first gas decomposition unit 60 and the second gas decomposition unit 70 may also be separated from the gas supply device 1 and operated independently.

[0043] As shown in the schematic diagram of FIG. 7 (FIG. 8), the first gas decomposition unit 60 is connected via a pipeline downstream of the thermal reaction unit 50 (50X, 50Y) (downstream of the reaction gas release unit 3). The first gas decomposition unit 60 includes an irradiation unit 61 that irradiates vacuum ultraviolet light. The irradiation unit 61 typically employs an excimer lamp 61, which irradiates ultraviolet light in the short wavelength region, such as a wavelength of 200 nm or less, or in this embodiment, a wavelength of 172 nm. Volatile organic compounds are decomposed along with ozone by the emitted OH radicals, oxygen radicals, etc., and by the decomposition catalyst unit 65 located downstream. Of course, other light sources can be used as long as they are capable of irradiating ultraviolet light in the short wavelength region, such as a wavelength of 172 nm.

[0044] In addition, as the irradiation unit (excimer lamp) 61 emits ultraviolet light, ozone, -OH radicals, and oxygen radicals are generated by the oxygen in the air. This generated ozone also has a decontaminating effect on viruses and bacteria. Volatile organic compounds (VOCs) (gases to be decomposed) are mixed and contacted by the ozone, -OH radicals, and oxygen radicals, along with an ozone decomposition catalyst (decomposition catalyst unit 65) connected downstream through a pipeline. The volatile organic compounds are decomposed into carbon dioxide and moisture through oxidation resulting from contact with the ozone, -OH radicals, and oxygen radicals. The generated ozone is then decomposed into oxygen. A decomposition catalyst unit 65 is connected downstream of the first gas decomposition unit 60 through a pipeline, and gas passing through the first gas decomposition unit 60 flows into the decomposition catalyst unit 65. The decomposition catalyst unit 65 is a catalyst, such as manganese dioxide, and further decomposes volatile organic compounds not decomposed in the first gas decomposition unit 60. Additionally, ozone generated by irradiation from irradiation unit (excimer lamp) 61 is decomposed into oxygen in decomposition catalyst unit 65. Air that has passed through first gas decomposition unit 60 and decomposition catalyst unit 65 is released from blower 80. The air is then taken in again from the first gas decomposition unit 60 side and circulated through first gas decomposition unit 60 and decomposition catalyst unit 65, gradually reducing the concentration of volatile organic compounds. Note that first gas decomposition unit 60 and decomposition catalyst unit 65 may be directly connected via a pipeline, or decomposition catalyst unit 65 may be arranged downstream of first gas decomposition unit 60.

[0045] The first embodiment of the gas decomposition apparatus shown in FIG. 7 is a combination of a first gas decomposition section 60 and a decomposition catalyst section 65. The second embodiment of the gas decomposition apparatus further includes a second gas decomposition section 70, which decomposes volatile organic compounds, and is connected to the downstream side of the combination of the first gas decomposition section 60 and the decomposition catalyst section 65. Because the first embodiment of the gas decomposition apparatus relies solely on the decomposition capacity of the first gas decomposition section 60 and the decomposition catalyst section 65, it is intended for small-scale facilities with a small processing volume, facilities intended to decompose low concentrations of volatile organic compounds, etc. In contrast, the second embodiment of the gas decomposition apparatus shown in FIG. 8 further includes a second gas decomposition section 70, thereby improving the decomposition capacity of volatile organic compounds. Therefore, the second embodiment of the gas decomposition apparatus is intended for large-scale facilities with a large processing volume, facilities intended to decompose relatively high concentrations of volatile organic compounds, etc.

[0046] The gas decomposition device of the second embodiment further includes a second gas decomposition unit 70 from the viewpoint of improving the decomposition ability of volatile organic compounds. The second gas decomposition unit 70 is provided with a catalyst that exhibits the ability to decompose volatile organic compounds. For example, a nickel catalyst or a platinum catalyst is provided. In this embodiment, a platinum catalyst 71 is provided. In order to efficiently decompose volatile organic compounds such as aldehyde gases using the platinum catalyst 71, the second gas decomposition unit 70 is provided with a heating unit that heats the platinum catalyst 71 or volatile organic compounds (VOCs) (gases to be decomposed). The heating unit heats the gas to a temperature that allows the catalytic function of a catalyst such as the platinum catalyst 71 to be exerted. The heating unit also heats the gas to a temperature required to decompose the volatile organic compounds (VOCs) (gases to be decomposed). For the heating unit, electromagnetic induction heating (IH) using an induction heating coil unit 72 (described below) is preferably used from the viewpoint of compactness.

[0047] The relationship between platinum catalyst 71 and the heating section is the same as that disclosed and described in detail in Figures 4 and 5. A blower such as a sirocco fan is used as blower 80, and is connected to an appropriate pipeline. Blower 80 is used to send air to second gas decomposition section 70 and to circulate air that has passed through second gas decomposition section 70 (platinum catalyst 71 therein) back into the equipment.

[0048] By performing the air supply and circulation indicated by the dashed arrows in Figures 7 and 8 for a predetermined period of time, the decomposition of volatile organic compounds, such as reactive gases, within the equipment is accelerated, and air purification progresses. Sensors for measuring the concentrations of volatile organic compounds and ozone may be provided as appropriate. Furthermore, by monitoring the ozone concentration during operation of the first gas decomposition unit 60, an increase in the ozone concentration can be used as a guide to detect that the volatile organic compounds, such as reactive gases, to be decomposed have almost disappeared. The first gas decomposition unit 60 and the decomposition catalyst unit 65 in Figures 7 and 8 are not only connected by a pipe, but also by the aforementioned active oxygen, etc., released from the first gas decomposition unit 60 and contacted with the residual gas (object to be decontaminated), which then circulates together with the residual gas through a circulation duct or the like (not shown) and is drawn into the decomposition catalyst unit 65.

[0049] In addition, in a second embodiment of the gas decomposition device and method, when high concentrations of volatile organic compounds (VOCs), such as reactive gases, remain in the facility, the second gas decomposition unit 70 accelerates decomposition of the volatile organic compounds. After the concentrations have been reduced to a certain level, the first gas decomposition unit 60 and the decomposition catalyst unit 65 combine to decompose the low-concentration volatile organic compounds. This configuration allows for different mechanisms of action contributing to the decomposition of volatile organic compounds, allowing for different uses depending on the concentration. The second gas decomposition unit 70 tends to be less effective in low-concentration areas. However, by combining the first gas decomposition unit 60 and the decomposition catalyst unit 65, light irradiation and the remaining low-concentration volatile organic compounds are mixed with ozone, OH radicals, and oxygen radicals, and the resulting mixture is decomposed by the decomposition catalyst unit 65. In this way, decomposition processing dependent on circulation capacity is possible.

[0050] The side view of FIG. 9 and the perspective view of FIG. 10 particularly show the configuration of the first gas decomposition unit 60 and the second gas decomposition unit 70 of the gas decomposition apparatus of the second embodiment. In this embodiment, the first gas decomposition unit 60 to the second gas decomposition unit 70 (the first gas decomposition unit 60, the decomposition catalyst unit 65, the blower 80, and the second gas decomposition unit 70) are integrated into a single device. An excimer lamp is provided as an irradiation unit 61 in the center of the first gas decomposition unit 60. A decomposition catalyst unit 65 that holds manganese dioxide or the like is provided behind the irradiation unit 61 (toward the back of the page). The gas to be decomposed flows sequentially through the irradiation unit 61 and the decomposition catalyst unit 65. A blower 80 is connected to the first gas decomposition unit 60. A sirocco fan is used as the blower 80. The irradiation unit 61 may be installed in any direction. When installing the irradiation unit 61, the installation direction, effective distance, and light contact time of the irradiation unit 61 are appropriately adjusted.

[0051] The second gas decomposition unit 70 is connected downstream of the blower 80 (sirocco fan). The second gas decomposition unit 70 contains a thermally conductive platinum catalyst 71 and a metal to be heated (such as a scrubbing brush made of SUS304 metal), and is surrounded by an induction heating coil unit 72. The temperature of the platinum catalyst 71 (metal to be heated) is raised by the operation of the induction heating coil unit 72. A thermocouple 73 is provided as appropriate to detect the temperature of the second gas decomposition unit 70.

[0052] As can be seen from the illustration, the integrated first gas decomposition unit 60 and second gas decomposition unit 70 can be assembled with each component being small in size. This allows for the miniaturization of the device configuration connected to the gas supply device 1. Furthermore, the device configuration of the gas supply device 1 itself is small, making it an excellent example of portability. Therefore, the barrier to introduction into small-scale facilities requiring decontamination, etc. is low. Furthermore, by preparing multiple units, it is possible to flexibly respond to the size of the facility to be decontaminated.

[0053] The block diagram of Figure 11 shows an example of the device configuration of the gas supply device disclosed and explained in each of Figures 1 to 10. In the figure, the "decontamination gas generator" corresponds to the gas supply device 1, the "residual gas decomposer" corresponds to the first gas decomposition section 60, and the "decontamination gas decomposer" corresponds to the second gas decomposition section 70. An example of the piping connections and arrangement of each element is also shown. For reference, a table of the operation sequence for the device configuration example of the disclosed gas supply device is attached to Figure 11 (see Figure 14).

[0054] 12 shows an example of the device configuration and the relationship between the first gas decomposition unit 60 and the second gas decomposition unit 70. Of course, the detailed structures and arrangements of the first gas decomposition unit 60 and the second gas decomposition unit 70 are not limited to those shown in the figure.

[0055] The schematic diagram of Figure 13 shows a first gas decomposition unit 60 and its associated equipment. As described above, the first gas decomposition unit 60 is equipped with an excimer lamp 61, which is energized (applied) by a control power supply 64. A gas inlet 62 is provided upstream of the first gas decomposition unit 60, and a gas outlet 63 is provided downstream of the first gas decomposition unit 60. Volatile organic compounds (VOCs) (gases to be decomposed) and the like flow into the first gas decomposition unit 60 from the gas inlet 62. When the excimer lamp 61 is energized, ozone, -OH radicals, and the like are generated from oxygen in the air. These ozone, -OH radicals, and the like are released from the gas outlet 63, and the decomposition of the gases to be decomposed by the ozone, -OH radicals, and the like is promoted.

[0056] In FIG. 13, when the gas to be decomposed is supplied to the first gas decomposition section 60, flow rate control devices such as a compressor for adjusting the flow rate, a flow rate adjustment valve, and a flow rate meter are appropriately provided.

[0057] Figure 15 shows a block diagram of a bag-in type gas supply device applied to a grade A sterile isolator that does not use a solenoid valve in an example of the gas supply device configuration in relation to the gas supply device in Figure 11. Furthermore, Figure 16 shows a configuration diagram of actual 3D CAD data that realizes Figure 15.

[0058] REFERENCE SIGNS LIST 1 Gas supply device 2 Raw material supply section 3 Reaction gas release section 4 Gasket 5 Main pipe section 6, 7, 8, 9 Flange section 10, 10A, 10B Heating section 11 Heating section body 12 Induction heating coil 13 Heat insulating material 14 Holding flange 15 Orifice 16 Diffusion mesh 17 Packing 18 Thermocouple 30 Air supply section 50, 50X, 50Y Heat reaction section 51 Catalyst containing section 52 Heating cylinder section 53 Protective section 55 Induction heating coil section 59 Copper catalyst 60 First gas decomposition section 61 Excimer lamp 65 Decomposition catalyst section 70 Second gas decomposition section 71 Platinum catalyst 72 Induction heating coil section 73 Thermocouple 80 Blower

Claims

1. A gas supply device comprising: a heating unit that heats and vaporizes primary alcohol by electromagnetic induction heating; an orifice that narrows the internal flow path at the terminal end of the heating unit and increases the flow rate of the vaporized primary alcohol; an air supply unit that is connected to a pipeline downstream of the heating unit and supplies air; and a thermal reaction unit that is connected to a pipeline downstream of the air supply unit and heats a gas mixture of the vaporized primary alcohol and the supplied air by electromagnetic induction heating, and oxidizes it upon contact with an oxidized porous metal catalyst to generate a composite reaction gas containing aldehyde gas through an oxidation-reduction reaction, wherein the thermal reaction unit comprises: a catalyst housing unit made of austenitic stainless steel, copper, or aluminum that houses the metal catalyst; a heating cylinder unit that conducts heat to the catalyst housing unit; a protective unit that covers the periphery of the heating cylinder unit to provide thermal insulation and protection; and an induction heating coil unit that is wound around the protective unit from the periphery.

2. A gas supply device comprising: a heating section that heats and vaporizes primary alcohol by electromagnetic induction heating; an orifice that narrows the internal flow path at the terminal end of the heating section and increases the flow rate of the vaporized primary alcohol; an air supply section that is connected to a pipeline downstream of the heating section and supplies air; and a thermal reaction section that is connected to a pipeline downstream of the air supply section and heats a gas mixture of the vaporized primary alcohol and the supplied air by electromagnetic induction heating and oxidizes it upon contact with an oxidized porous metal catalyst to generate a composite reaction gas containing aldehyde gas through an oxidation-reduction reaction, wherein the thermal reaction section comprises: a catalyst housing section made of ferritic stainless steel, an iron plate, or a plated iron plate that houses the metal catalyst; a protective section that covers the catalyst housing section and provides thermal insulation protection; and an induction heating coil section that is wound around the protective section from the periphery.

3. The gas supply device according to claim 1 or 2, wherein the porous metal catalyst is a porous copper catalyst.

4. The gas supply device according to claim 1 or 2, further comprising a first gas decomposition section for decomposing volatile organic compounds.

5. The gas supply device according to claim 4, further comprising an irradiation section for irradiating the first gas decomposition section with vacuum ultraviolet light.

6. A gas supply device according to claim 1 or 2, further comprising a diffusion mesh for diffusing the primary alcohol, the flow rate of which has increased after passing through the orifice, into the tube.

7. The gas supply device according to claim 5, wherein ozone, OH radicals, and oxygen radicals are generated and released from the irradiation section.

8. The gas supply device according to claim 4, wherein a second gas decomposition section equipped with a catalyst is connected downstream of the first gas decomposition section.

9. The gas supply device according to claim 8, wherein a blower is provided between the first gas decomposition section and the second gas decomposition section.

10. The gas supply device according to claim 8, wherein the second gas decomposition section is provided with a heating section.

11. A gas supply device as described in claim 8, wherein the gas released from the second gas decomposition section is taken into the first gas decomposition section, and then passes through the first gas decomposition section and the second gas decomposition section in that order, thereby circulating the gas.

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