Fully automated developing assembly for scientific research, developing device and developing station

Abstract

The present application relates to the technical field of semiconductor development, and discloses a fully automated developing assembly for scientific research, a developing device, and a developing station. The fully automated developing assembly for scientific research comprises a developing mechanism, a heating mechanism, a magnetic stirring mechanism, and an ultrasonic oscillation mechanism. A developing tank is designed as a small tank body adapted for insertion of wafers sized 1 cm*1 cm and 2 cm*2 cm, and a developing chamber is designed in an inverted trapezoidal shape, thereby further reducing the required developing solution and reducing experimental costs. The developing tank, developing solution inlet pipes and a developing solution outlet pipe are made of quartz materials, so as to ensure that a required miniaturized structure can be prepared. Additionally, a fully automated developing process is realized by using an automated device such as a material transfer device and an inlet peristaltic pump, thereby improving the repeatability and safety of scientific research. Moreover, the magnetic stirring mechanism and the ultrasonic oscillation mechanism are creatively combined, and a combination of side mounting and bottom mounting is adopted to avoid mutual interference. Compared with the conventional single ultrasonic oscillation design, the developing effect is significantly improved.

Description

Full-automatic developing assembly, developing device and developing machine table for scientific research TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor developing, in particular to a full-automatic developing assembly, a developing device and a developing machine table for scientific research. BACKGROUND

[0002] In the process of manufacturing semiconductor devices, developing liquid is used to develop photoresist, so as to control the formation of patterns and the structure of devices.

[0003] At present, although there are developing devices for realizing developing process, they cannot be used for scientific research, because of the following reasons:

[0004] At present, all the devices for realizing developing process are full-automatic devices for semiconductor factories, which have large size and occupy a large amount of clean room space in scientific research places, resulting in waste of resources. Moreover, the devices are expensive, and ordinary scientific research places cannot afford them. In addition, the developing method of the devices is spraying developing, which is only suitable for large-size wafers of 2 / 4 / 6 / 8 / 12 inches, and cannot be compatible with small-size semiconductors (1cm*1cm, 2cm*2cm wafers) required by scientific research. If the devices are directly used for scientific research, the 1cm*1cm, 2cm*2cm wafers need to be pasted at the center of the large-size wafers, which will result in huge consumption of developing liquid and greatly increase the cost of scientific research. Moreover, there is great difference in pasting by hand each time, which will result in poor repeatability of scientific research and low efficiency of scientific research.

[0005] Therefore, at present, the scientific research method for semiconductor developing in colleges and universities is mainly manual operation by immersion. The required developing liquid is taken and configured by hand to a specific small container, and then the small piece is clamped in the container for developing experiment. However, since the developing process involves many dangerous chemical reagents, it is easy to cause danger due to improper or non-standard operation of the experimenters. Moreover, the taking and configuration of the required developing liquid by hand and the clamping of the small piece by the person have instability, which affects the experimental precision and greatly affects the efficiency of scientific research. SUMMARY

[0006] Therefore, the purpose of the present application is to provide a full-automatic developing assembly, a developing device and a developing machine table for scientific research, which meet the use of scientific research in colleges and universities and improve the safety, repeatability and efficiency of scientific research.

[0007] To achieve the above technical purpose, the present application provides a full-automatic developing assembly for scientific research, which comprises a developing mechanism, a material moving device, a heating mechanism, a magnetic stirring mechanism and an ultrasonic oscillation mechanism.

[0008] The developing mechanism comprises a developing tank, a developing liquid inlet pipe, a developing liquid outlet pipe and a liquid inlet peristaltic pump.

[0009] The developing tank is internally provided with a developing cavity in the shape of an inverted trapezoid, which is adapted to 1cm*1cm or 2cm*2cm wafer placement;

[0010] One end of the developing liquid inlet pipe is in communication with the developing cavity, and the other end of the developing liquid inlet pipe is connected with the output end of the liquid inlet peristaltic pump;

[0011] One end of the developing liquid outlet pipe is in communication with the developing cavity;

[0012] The heating mechanism comprises a heating tank, and the heating tank is internally provided with a heating cavity;

[0013] At least part of the developing tank is placed in the heating cavity;

[0014] The heating cavity is internally provided with a heat medium for heat exchange with the developing solution in the developing cavity;

[0015] The developing liquid outlet pipe is located in the heating cavity and has its other end extending out of the heating cavity;

[0016] The magnetic stirring mechanism comprises a magnetic stirring sub and a stirring driver;

[0017] The magnetic stirring sub is arranged at the bottom of the developing cavity;

[0018] The stirring driver is arranged below the heating tank and is used to drive the magnetic stirring sub to rotate;

[0019] The ultrasonic oscillation mechanism comprises at least one ultrasonic oscillator;

[0020] The at least one ultrasonic oscillator is arranged at one side of the heating tank and is used to cause the developing solution in the developing cavity to produce cavitation effect;

[0021] The developing tank, the developing liquid inlet pipe and the developing liquid outlet pipe are made of quartz material;

[0022] The material moving device is used to clamp and move the wafer to a designated position.

[0023] Further, the developing mechanism further comprises a metering tank;

[0024] The input end of the liquid inlet peristaltic pump is connected with the metering tank.

[0025] Further, the developing mechanism further comprises a metering pipe with a diameter greater than that of the developing liquid inlet pipe;

[0026] The other end of the developing liquid inlet pipe is connected with the output end of the liquid inlet peristaltic pump through the metering pipe;

[0027] A flow meter is installed in the metering pipe.

[0028] Further, the developing mechanism further comprises a first cover plate and a first plate driver;

[0029] The driving end of the first plate driver is connected with the first cover plate, for driving the first cover plate to move to control the opening or closing of the first opening.

[0030] Further, the developing tank comprises a lower tank body and an upper tank body;

[0031] The developing cavity is arranged in the lower tank body;

[0032] The upper tank body is provided with a communication port at the bottom;

[0033] The opening at the top of the lower tank body is connected with the communication port for conduction;

[0034] The first opening is arranged at the top of the upper tank body;

[0035] The developing liquid inlet pipe is located above the heating tank, and one end thereof extends to the upper tank body through the sidewall of the upper tank body;

[0036] The pipe segment of the developing liquid inlet pipe extending into the upper tank body is located outside the top of the lower tank body.

[0037] Further, one end of the developing liquid outlet pipe is connected to the sidewall of the developing cavity at the bottom position.

[0038] Further, the developing liquid outlet pipe is at least two;

[0039] The developing mechanism further comprises a liquid outlet peristaltic pump;

[0040] The other end of at least one of the developing liquid outlet pipes is connected with the liquid outlet peristaltic pump.

[0041] Further, the heating tank is provided with a second opening at the top;

[0042] The second opening is provided with a supporting flange;

[0043] The supporting flange is mounted with a second cover plate for closing the second opening.

[0044] Further, the second cover plate is provided with a socket penetrating through itself and for inserting the developing tank;

[0045] The upper tank body is provided with a connecting flange at the top;

[0046] The connecting flange can be in contact with the second cover plate at the position around the socket.

[0047] Further, the heating mechanism further comprises a heater;

[0048] The heater is integrated on the stirring driver for heating the heat medium in the heating cavity.

[0049] Further, the heating mechanism further comprises a medium input pipe, a medium output pipe, a medium liquid level meter and a medium temperature sensor.

[0050] The medium input pipe and the medium output pipe are installed on the heating groove and communicate with the heating cavity.

[0051] The medium temperature sensor is used for detecting the temperature of the heat medium in the heating cavity.

[0052] The medium liquid level meter is used for detecting the liquid level of the heat medium in the heating cavity.

[0053] Further, the developing mechanism further comprises a developing temperature sensor.

[0054] The developing temperature sensor is used for detecting the developing temperature in the developing cavity.

[0055] The application also discloses a developing device comprising a fixing assembly and the full-automatic developing assembly for scientific research.

[0056] The fixing assembly comprises a fixing groove, a fixing liquid inlet pipe and a fixing liquid outlet pipe.

[0057] The fixing groove is provided with a fixing cavity for placing the wafer after developing, and the top of the fixing groove is provided with a third opening.

[0058] One end of the fixing liquid inlet pipe and the fixing liquid outlet pipe communicates with the fixing cavity.

[0059] Further, the full-automatic developing assemblies for scientific research are multiple.

[0060] The fixing assemblies are multiple and correspond to the full-automatic developing assemblies for scientific research one by one.

[0061] The multiple full-automatic developing assemblies for scientific research are sequentially and spacedly arranged along a first straight line direction.

[0062] The multiple fixing assemblies are sequentially and spacedly arranged along a second straight line direction parallel to the first straight line direction.

[0063] The fixing assembly further comprises a third cover plate and a second plate driver.

[0064] The driving end of the second plate driver is connected with the third cover plate and is used for driving the third cover plate to move to control the opening or closing of the third opening.

[0065] Further, a water washing assembly is further included.

[0066] The water washing assembly comprises a water washing tank, a water washing liquid inlet pipe and a water washing liquid outlet pipe;

[0067] The water washing tank is provided with a water washing cavity for placing the fixed wafer, and the top of the water washing tank is provided with a fourth opening;

[0068] One end of the water washing liquid inlet pipe and the water washing liquid outlet pipe is communicated with the water washing cavity.

[0069] Further, it further comprises a blow-drying assembly;

[0070] The blow-drying assembly comprises a blow-drying tank, an air inlet pipe, an air outlet pipe and a blow-drying liquid outlet pipe;

[0071] The blow-drying tank is provided with a water washing cavity for placing the water washed wafer, and the top of the blow-drying tank is provided with a fifth opening;

[0072] The blow-drying cavity is provided with a support net, and the blow-drying cavity is provided with a blow pipe above the support net;

[0073] The bottom of the blow pipe is provided with a plurality of blow holes;

[0074] The air inlet pipe is communicated with the blow pipe;

[0075] The air outlet pipe is communicated with the area below the support net in the blow-drying cavity.

[0076] The application further discloses a developing machine, which comprises a machine body, a wafer loading device and the developing device;

[0077] The machine body is provided with a machine cavity;

[0078] The first partition plate and the second partition plate are arranged in the machine cavity from bottom to top;

[0079] The developing device is arranged between the first partition plate and the second partition plate;

[0080] The second partition plate is provided with a plurality of avoiding holes for avoiding the scientific automatic developing assembly and the fixing assembly;

[0081] The second partition plate is further provided with a plurality of drainage holes;

[0082] The wafer loading device is arranged above the second partition plate and used for loading wafers;

[0083] The material moving device of the developing device is arranged above the second partition plate and used for moving wafers between the developing device and the loading device.

[0084] Further, it further comprises a liquid loading device;

[0085] The medicine liquid loading device is arranged below the first partition plate, comprising a loading seat, a medicine liquid loading driving assembly and a liquid taking member;

[0086] The loading seat is used for loading a medicine liquid tank;

[0087] The medicine liquid loading driving assembly is connected with the loading seat and used for driving the loading seat to extend or retract from the machine body;

[0088] The liquid taking member is detachably mounted on the medicine liquid tank.

[0089] Further, the liquid taking member comprises a liquid taking pipe and a liquid taking cover;

[0090] The liquid taking pipe can extend into the medicine liquid tank through a medicine liquid port of the medicine liquid tank;

[0091] The liquid taking cover is sleeved on the liquid taking pipe and can cooperate with the medicine liquid port to seal the medicine liquid port;

[0092] A fixing member is vertically mounted on the loading seat and used for fixing the liquid taking member to be mounted;

[0093] The fixing member is a hollow column structure, and the liquid taking pipe is movably inserted into the fixing member.

[0094] From the above technical solution, the full-automatic developing assembly for scientific research designed by the present application has the following beneficial effects:

[0095] 1. The developing tank is designed to be a small tank body suitable for placing a wafer with a size of 1cm*1cm or 2cm*2cm, so as to reduce the overall size and effectively save developing liquid. The developing cavity of the developing tank is designed to be an inverted trapezoid. Compared with the conventional rectangular design, while ensuring the size of the first opening to facilitate the placing and taking of the wafer, the developing cavity can further reduce the required developing liquid and reduce the experimental cost.

[0096] 2. The developing tank, the developing liquid inlet pipe and the developing liquid outlet pipe are made of quartz material to ensure that the required small-size structure can be prepared. At the same time, the liquid inlet peristaltic pump is used as the developing liquid supply pump, which can be well matched with the small-size pipeline for use, realize the purpose of automatic liquid preparation, overcome the problem that the instability of manual taking and preparation of the required developing liquid affects the experimental precision, and thus improve the repeatability and efficiency of scientific research.

[0097] 3. Creatively combine the magnetic stirring mechanism with the ultrasonic oscillation mechanism, and adopt the combination of side installation and bottom installation to avoid mutual interference, wherein the ultrasonic oscillation mechanism can cause cavitation effect in the liquid (i.e. the micro-bubbles in the liquid rapidly expand and break under the action of the ultrasonic field), and the breaking of the cavitation bubbles can produce strong impact force, which can effectively clean the impurities and residues (photoresist) on the wafer surface; and the magnetic stirring mechanism produces stirring effect in the developing cavity through the rotating magnetic stirrer, which significantly improves the contact efficiency of the developing liquid and the wafer, and compared with the traditional single ultrasonic oscillation design, can significantly improve the developing efficiency, quality and accuracy.

[0098] 4. The material moving device is used to grab the wafer to realize automatic feeding and discharging and developing action control, and the heating mechanism, magnetic stirring mechanism and ultrasonic oscillation mechanism are used to accurately control the developing process parameters, so as to realize the full-automatic developing process and further improve the developing repeatability and research efficiency.

[0099] In general, the full-automatic developing assembly for scientific research designed in the application can meet the use of scientific research in colleges and universities, improve the research repeatability, research efficiency and developing effect, and has great promoting significance for promoting the development of scientific research technology, improving the research and development efficiency of semiconductor technology and accelerating the research and development progress. BRIEF DESCRIPTION OF DRAWINGS

[0100] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0101] Fig. 1 is a cross-sectional structure schematic view of the full-automatic developing assembly for scientific research provided in the application with part of the material moving device;

[0102] Fig. 2 is a three-dimensional structure schematic view of the full-automatic developing assembly for scientific research provided in the application;

[0103] Fig. 3 is a structure schematic view of the developing tank of the full-automatic developing assembly for scientific research provided in the application;

[0104] Fig. 4 is a structure schematic view of the heating tank of the full-automatic developing assembly for scientific research provided in the application;

[0105] Fig. 5 is a structure schematic view of the heating tank of the full-automatic developing assembly for scientific research provided in the application without the second cover plate;

[0106] Fig. 6 is a partial cross-sectional view of the full-automatic developing assembly for scientific research provided in the application;

[0107] Fig. 7 is a structural schematic diagram of a developing device provided in the present application;

[0108] Fig. 8 is a structural schematic diagram of a blow-drying groove of a developing device provided in the present application;

[0109] Fig. 9 is a sectional structural schematic diagram of a developing machine provided in the present application;

[0110] Fig. 10 is a structural schematic diagram of a chemical liquid carrying device of a developing machine provided in the present application;

[0111] Fig. 11 is a structural schematic diagram of a liquid taking member of a developing machine provided in the present application;

[0112] In the figures: 11, developing groove; 111, lower groove body; 112, upper groove body; 113, connecting flange; 12, developing liquid inlet pipe; 13, developing liquid outlet pipe; 14, first cover plate; 15, first plate driver; 21, heating groove; 211, supporting flange; 212, socket; 22, medium temperature sensor; 23, medium input pipe; 24, medium output pipe; 25, medium liquid level meter; 26, second cover plate; 27, bottom plate; 28, cover plate; 29, sealing ring; 31, stirring driver; 41, ultrasonic oscillator; 51, protective cover; 52, end cover; 61, fixing groove; 62, fixing liquid outlet pipe; 63, second plate driver; 64, third cover plate; 71, water washing groove; 72, water washing liquid outlet pipe; 81, blow-drying groove; 82, blow-drying liquid outlet pipe; 83, air inlet pipe; 84, blowing pipe; 85, supporting net; 86, air outlet pipe; 91, machine body; 92, material moving device; 93, developing device; 94, chemical liquid carrying device; 941, chemical liquid carrying driving assembly; 942, carrying seat; 943, liquid taking member; 9431, liquid taking pipe; 9432, liquid taking cover; 9433, liquid taking connector; 944, fixing member; 95, chemical liquid tank; 96, first partition plate; 97, second partition plate. DETAILED DESCRIPTION

[0113] The technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0114] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0115] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be replaceably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0116] The embodiments of the present application disclose a full-automatic developing assembly for scientific research, a developing device and a developing machine.

[0117] Referring to FIG. 1, one embodiment of the full-automatic developing assembly for scientific research, the developing device and the developing machine provided in the embodiments of the present application comprises:

[0118] The developing mechanism, the material moving device 92, the heating mechanism, the magnetic stirring mechanism and the ultrasonic oscillation mechanism.

[0119] The developing mechanism comprises a developing tank 11, a developing liquid inlet pipe 12, a developing liquid outlet pipe 13 and a liquid inlet peristaltic pump (not shown in the figure).

[0120] The developing tank 11 is provided with a developing cavity of 1cm*1cm or 2cm*2cm size which is adapted to accommodate a wafer and is in the shape of an inverted trapezoid (it can be understood that the developing tank 11 is provided with a developing cavity of 1cm*1cm or 2cm*2cm size which is adapted to accommodate a wafer), and the top of the developing tank 11 is provided with a first opening which communicates with the developing cavity.

[0121] One end of the developing liquid inlet pipe 12 communicates with the developing cavity, and the other end of the developing liquid inlet pipe 12 is connected with the output end of the liquid inlet peristaltic pump, and the developing liquid required for development is pumped into the developing cavity through the peristaltic pump; the developing liquid inlet pipe 12 can be multiple, and correspondingly, the liquid inlet peristaltic pump is also multiple and is connected with the developing liquid inlet pipe 12 one by one, different developing liquid inlet pipes 12 correspond to the delivery of different developing liquids to realize liquid preparation. The peristaltic pump has the advantages of non-polluting delivery, high-precision metering, strong self-priming capacity and simple maintenance, and is the preferred power source of the present application.

[0122] The one end of the developing liquid discharge pipe 13 is communicated with the developing cavity, and is used for recycling the used developing liquid or discharging the waste liquid generated by cleaning.

[0123] The heating mechanism comprises a heating groove 21, and the heating groove 21 is internally provided with a heating cavity.

[0124] At least part of the developing tank 11 is arranged in the heating cavity (it can be understood that at least part of the structure (for example, the part provided with the developing cavity) of the developing tank 11 needs to extend into the heating cavity, so that the heat medium in the heating cavity can exchange heat with the developing cavity, thereby achieving the heating of the developing cavity), and the heating cavity is provided with a heat medium which exchanges heat with the developing liquid in the developing cavity, so as to heat and treat the developing liquid in the developing cavity, thereby improving the developing effect.

[0125] In order to ensure that the developing liquid in the developing cavity can be completely discharged, the one end of the developing liquid discharge pipe 13 extends to the bottom wall of the developing cavity or extends to the bottom position of the side wall of the developing cavity, and for this purpose, the developing liquid discharge pipe 13 is arranged in the heating cavity and the other end thereof extends out of the heating cavity, so as to be conveniently connected with the recycling module or the waste liquid receiving module.

[0126] The magnetic stirring mechanism comprises a magnetic stirring sub (not shown in the figure) and a stirring driver 31. The magnetic stirring sub is arranged at the bottom of the developing cavity, and the stirring driver 31 is arranged below the heating groove 21 and is used for driving the magnetic stirring sub to rotate.

[0127] The ultrasonic oscillation mechanism comprises at least one ultrasonic oscillator 41; the at least one ultrasonic oscillator 41 is arranged on one side of the heating groove 21 and is used for making the developing liquid in the developing cavity produce cavitation effect. In the application, two ultrasonic oscillators 41 are designed, and the specific number can be changed and designed according to actual needs, and is not limited.

[0128] When applied to the wafer developing of 1cm*1cm and 2cm*2cm, the developing cavity of the developing tank 11 is designed to have an upper bottom of 40mm*20mm, a depth of 30mm and a lower bottom of 40mm*7mm, and the design size is extremely small; the developing liquid inlet pipe 12 is designed to have a diameter of 1.6mm, and the developing liquid discharge pipe 13 is designed to have a diameter of 4mm. In the design process, it is found through repeated investigations that many materials cannot be used to manufacture such small developing tank 11, developing liquid inlet pipe 12 and developing liquid discharge pipe 13 (such as metal materials such as stainless steel), and the quartz material can overcome the problem of difficulty in manufacturing the small structure. Therefore, the developing tank 11, the developing liquid inlet pipe 12 and the developing liquid discharge pipe 13 are made of quartz material.

[0129] Furthermore, the material moving device of the present application is used to grab the wafer and move the wafer to a designated position, for example, to grab the wafer from the loading position and move it into the developing tank 11, and also to drive the wafer in the developing tank 11 to make a designated developing action, for example, to simulate the action of shaking the wafer by hand, and the specific action is not limited. The material moving device 92 can be designed to include a collaborative robot arm and an end effector connected to the end of the collaborative robot arm for grabbing the wafer. The wafer is moved by the automated material moving device 92, which overcomes the instability of personnel grabbing the wafer, which affects the experimental precision, thereby affecting the research efficiency.

[0130] From the above technical solutions, it can be seen that the full-automatic developing assembly for scientific research designed by the present application has the following beneficial effects:

[0131] 1. The developing tank 11 is designed as a small tank body suitable for placing a wafer with a size of 1cm*1cm or 2cm*2cm, which reduces the overall size and effectively saves developing solution. The developing cavity of the developing tank 11 is designed as an inverted trapezoid. Compared with the conventional rectangular design, while ensuring the size of the first opening to facilitate the placement and removal of the wafer, the required developing solution can be further reduced, and the experimental cost is reduced.

[0132] 2. The developing tank 11, the developing liquid inlet pipe 12, and the developing liquid outlet pipe 13 are made of quartz material to ensure that the required small size structure can be prepared. At the same time, the liquid inlet peristaltic pump is used as the developing solution supply pump, which can be well matched with small size pipes for use, realizing the purpose of automatic liquid preparation, overcoming the instability of manual use and configuration of the required developing solution, which affects the experimental precision, thereby improving the research repeatability and research efficiency.

[0133] 3. Creatively combine the magnetic stirring mechanism with the ultrasonic oscillation mechanism, and use side installation combined with bottom installation to avoid mutual interference. The ultrasonic oscillation mechanism will cause cavitation effect in the liquid (i.e. the rapid expansion and rupture of micro-bubbles in the liquid under the action of the ultrasonic field). The rupture of such cavitation bubbles will produce a strong impact force, which can effectively clean the impurities and residues (photoresist) on the surface of the wafer. The magnetic stirring mechanism produces stirring action in the developing cavity by rotating the magnetic stirring rod, which significantly improves the contact efficiency of the developing solution and the wafer. Compared with the traditional single ultrasonic oscillation design, it can significantly improve the developing efficiency, quality and accuracy.

[0134] The material moving device 92 is used to grab the wafer to realize automatic loading and unloading and developing action control, and the heating mechanism, magnetic stirring mechanism and ultrasonic oscillation mechanism are used to precisely control the developing process parameters, realizing full-automatic developing process, further improving the repeatability of developing and research efficiency.

[0135] In general, the full-automatic developing assembly for scientific research designed in the application can meet the use of scientific research in colleges and universities, improve the repeatability, efficiency and developing effect of scientific research, and has great promoting significance for the development of scientific research technology, improves the efficiency of research and development of semiconductor technology, and speeds up the research and development progress.

[0136] The above is embodiment one of the full-automatic developing assembly for scientific research provided by the embodiments of the application, and the following is embodiment two of the full-automatic developing assembly for scientific research provided by the embodiments of the application, please refer to FIG. 1 to FIG. 6.

[0137] Based on the scheme of the above embodiment one:

[0138] Further, since the pipe diameter of the developing liquid inlet pipe 12 is designed to be very small, it is also difficult to achieve accurate metering, which affects the liquid preparation accuracy. In order to solve the above problems:

[0139] The developing mechanism is designed to further include a quantitative tank (not shown in the figure), and the input end of the liquid inlet peristaltic pump is connected to the quantitative tank. The quantitative tank is used to contain the quantitative liquid to be pumped, so as to ensure the accuracy of the liquid pumped each time. However, this method has certain limitations and cannot realize continuous operation.

[0140] Further, in order to solve the problems existing in the quantitative tank, the developing mechanism is further designed to include a metering pipe (not shown in the figure) with a diameter larger than that of the developing liquid inlet pipe 12; the other end of the developing liquid inlet pipe 12 is connected to the output end of the liquid inlet peristaltic pump through the metering pipe, and a flowmeter is installed in the metering pipe. By setting the relatively large-diameter metering pipe to connect with the developing liquid inlet pipe 12, the large-diameter characteristics can be utilized to facilitate the installation of the flowmeter therein, so that the liquid inlet peristaltic pump can accurately prepare the liquid, and has the advantages of continuous operation, thereby improving the developing efficiency.

[0141] Further, in addition to the above two ways of solving the accurate quantitative control, a differential pressure gauge (not shown in the figure) can also be designed. The detection end of the differential pressure gauge extends into the developing cavity, detects the pressure at different positions in the developing cavity, and converts it into an electrical signal or the deflection of a mechanical pointer, so as to display the size of the pressure difference; the converted electrical signal can be fed back to the liquid inlet peristaltic pump, so that the liquid inlet peristaltic pump can accurately control the liquid inlet amount.

[0142] Further, as shown in FIG. 2, in order to avoid the splashing of the developing liquid in the developing cavity out of the developing tank 11 and increase the workload of subsequent cleaning and maintenance, the developing mechanism further includes a first cover plate 14 and a first plate driver 15.

[0143] The driving end of the first plate driver 15 is connected with the first cover plate 14, for driving the first cover plate 14 to move to control the opening or closing of the first opening. The first plate driver 15 can be a servo motor capable of forward and reverse rotation, which is connected with the first cover plate 14 through a connecting structure to drive the first cover plate 14 to flip and move, thereby realizing the opening / closing control.

[0144] Further, as shown in FIG. 3, the developing tank 11 is designed to include a lower tank body 111 and an upper tank body 112.

[0145] The developing cavity is arranged in the lower tank body 111, and the lower tank body 111 can be designed as a whole inverted trapezoidal shape.

[0146] The upper tank body 112 is provided with a communication port at the bottom, and the opening at the top of the lower tank body 111 is connected and communicated with the communication port. The first opening is arranged at the top of the upper tank body 112. In order to reduce the assembly process, the upper tank body 112 and the lower tank body 111 can be designed as an integral molding.

[0147] The developing liquid inlet pipe 12 is located above the heating tank 21, and one end of the developing liquid inlet pipe 12 extends into the upper tank body 112 through the side wall of the upper tank body 112. The pipe section of the developing liquid inlet pipe 12 extending into the upper tank body 112 is located outside the top of the lower tank body 111.

[0148] The upper and lower double-tank body design, and the size of the upper tank body 112 is greater than that of the lower tank body 111. In this way, the developing liquid inlet pipe 12 only needs to extend into the upper tank body 112 to send the liquid medicine to the developing cavity of the lower tank body 111, avoiding the extension to the lower tank body 111 to partially block the opening at the top of the lower tank body 111 and affect the wafer loading and unloading. It can also avoid the need to extend from the heating cavity to the lower tank body 111, reducing the assembly difficulty. In summary, the design of the upper tank body 112 can provide the developing liquid inlet pipe 12 with installation convenience.

[0149] In order to make the liquid medicine in the upper tank body 112 flow more smoothly into the lower tank body 111, the bottom wall in the upper tank body 112 is inclined to the lower tank body 111 with a certain slope.

[0150] Furthermore, the design of the upper tank body 112 can provide a certain overflow space for the lower tank body 111, avoiding the overflow of the liquid medicine in the developing cavity from the developing tank, and playing a role in preventing overflow.

[0151] The differential pressure table of the foregoing design is arranged to enter through the side of the upper tank body 112, so as not to affect the opening and closing of the developing tank 11.

[0152] Further, as shown in FIG. 3, one end of the developing liquid outlet pipe 13 is preferably connected to the bottom of the side wall of the developing cavity. The developing liquid outlet pipe 13 is designed to be connected to the side wall, avoiding the influence of the bottom wall connection on the operation of the magnetic stirring mechanism.

[0153] As shown in Fig. 6, the developing liquid discharge pipe 13 passing through the sidewall of the heating tank 21 should be sealed from the heating tank 21 to avoid leakage of the heat medium. For the sealing design at this position, a bottom plate 27, a cover plate 28 and a sealing ring 29 can be added; the bottom plate 27 is fixed to the outer sidewall of the heating tank 21 and is provided with a first communication hole through which the developing liquid discharge pipe 13 passes, and a groove communicating with the first communication hole is provided on the side of the bottom plate 27 away from the heating tank 21, and the sealing ring 29 is arranged on the groove; the cover plate 28 is pressed on the side of the bottom plate 27 away from the heating tank 21 by a fastener such as a screw to extrude the sealing ring 29, so that the inner circle of the deformed sealing ring 29 is tightly attached to the developing liquid discharge pipe 13 to achieve sealing. The connection between the bottom plate 27 and the outer sidewall of the heating tank 21 can also be achieved by a sealing ring to realize sealing connection, or fastened by a fastener, and then waterproof glue is coated in the matched gap.

[0154] Further, the developing liquid discharge pipe 13 of the present application is designed as at least two; the developing mechanism further comprises a liquid discharge peristaltic pump; and the other end of at least one of the developing liquid discharge pipes 13 is connected with the liquid discharge peristaltic pump (not shown in the figure).

[0155] After the developing operation is completed, the developing liquid in the developing cavity can be recovered by the liquid discharge peristaltic pump, and then the developing tank 11 is washed with clean water, and the waste water after washing can be quickly discharged through the developing liquid discharge pipe 13 without the liquid discharge peristaltic pump by gravity. For the design of clean water washing, a washing pipe can be added, and a corresponding peristaltic pump is connected with a clean water source, or the input end of at least one peristaltic pump is connected with a clean water source and a developing liquid source through a three-way valve, and those skilled in the art can make appropriate changes and designs based on this without limitation. The water inlet pipe (not shown in the figure) for conveying clean water into the developing tank 11 can extend into the sidewall of the upper tank body 112, and a drain pipe (not shown in the figure) can also extend into the sidewall of the upper tank body 112 for discharging the solution in the upper tank body, and the diameters of the water inlet pipe and the drain pipe can be 4 mm, and they are also made of quartz material.

[0156] Further, as shown in Fig. 4 and Fig. 5, the heating tank 21 is provided with a second opening at the top, the second opening is provided with a supporting flange 211, and a second cover plate 26 for closing the second opening is installed on the supporting flange 211. The second cover plate 26 and the supporting flange 211 can be connected by a fastener such as a bolt, and the second cover plate 26 can make the heating cavity in a relatively closed state to reduce heat loss, save energy consumption, and also facilitate cleaning and maintenance of the inside of the heating cavity.

[0157] Further, as shown in FIG. 4, the second cover plate 26 is provided with a socket 212 penetrating through itself and for the insertion of the developing tank 11, and the upper tank body 112 is provided with a connecting flange 113 capable of being in contact with the second cover plate 26 around the socket 212. Through the above design, the developing tank 11 can be quickly inserted into the heating tank 21 in a plug-in manner, and the subsequent replacement and maintenance are also facilitated. The connecting flange 113 and the second cover plate 26 can be provided with a buckle structure to realize buckle cooperation, further improve the connection stability, and the buckle cooperation also facilitates disassembly and maintenance.

[0158] Further, in order to continuously and stably control the temperature of the developing liquid in the developing cavity, the heating mechanism further comprises a heater (not shown in the figure). Compared with the way of continuously inputting heat medium to control the temperature of the temperature control jacket, the amount of heat medium can be reduced, and the control is relatively better.

[0159] The heater can be integrated on the stirring driver 31 for heating the heat medium in the heating cavity. It can be understood that the stirring driver 31 not only has the function of driving the magnetic stirring rod to rotate, but also has the function of heating the heat medium. Of course, the heater can also be provided in the heating cavity. The heater can be an electric heating wire or an infrared heating plate, and the heat medium is a heat-conducting medium, which can be water, oil, etc. Taking water as an example, water bath heating design is realized.

[0160] Further, as shown in FIG. 2, FIG. 4 and FIG. 5, the heating mechanism further comprises a medium input pipe 23, a medium output pipe 24, a medium liquid level meter 25 and a medium temperature sensor 22.

[0161] The medium input pipe 23 and the medium output pipe 24 are installed on the heating tank 21 and communicate with the heating cavity. Specifically, the medium input pipe 23 and the medium output pipe 24 are arranged on the side opposite to the ultrasonic oscillator 41, and the medium input pipe 23 is located above the medium output pipe 24, which can also be diagonally opposite. The medium liquid level meter 25 can be installed on the second cover plate 26 for detecting the liquid level of the heat medium in the heating cavity. The number of heat medium liquid level meters 25 can be multiple, and the average of the detection results is taken to reduce the error.

[0162] The medium temperature sensor 22 is used to detect the temperature of the heat medium in the heating cavity, and through the medium temperature sensor 22, the heat medium can be precisely heated and temperature-controlled, and the design of the medium input pipe 23 and the medium output pipe 24 can be used for the replenishment and updating of the heat medium, so as to quickly adjust the temperature. For example, when it is necessary to quickly reduce the temperature of the heat medium in the heating cavity, the medium input pipe 23 can be used to start to supplement the normal-temperature heat medium, and the medium output pipe 24 can be used to discharge the heat medium with a relatively high temperature inside, so as to achieve the purpose of neutralization and rapid cooling. Of course, the medium input pipe 23 and the medium output pipe 24 can also be used for cleaning, so that the cleaning is more convenient.

[0163] Further, the developing mechanism further comprises a developing temperature sensor (not shown in the figure); the developing temperature sensor is used to detect the developing temperature in the developing cavity. Based on the developing temperature in the developing cavity, the heater can be more accurately controlled to operate.

[0164] As shown in FIG. 1, in the present application, the ultrasonic oscillator 41 is externally provided with a protective cover 51, one side of the protective cover 51 is provided with an end cover 52, and the protective cover 51 itself can be integrally formed with the heating groove 21, thereby reducing the assembly process, which is not limited in particular.

[0165] As shown in FIG. 7, the present application further discloses a developing device, which comprises a fixing assembly and the scientific research full-automatic developing assembly of the above-mentioned embodiment one or embodiment two.

[0166] The fixing assembly comprises a fixing groove 61, a fixing liquid inlet pipe (not shown in the figure) and a fixing liquid outlet pipe 62; the fixing groove 61 is provided with a fixing cavity for placing the wafer after the developing is completed, and the top of the fixing groove 61 is provided with a third opening; one end of the fixing liquid inlet pipe and the fixing liquid outlet pipe 62 is in communication with the bottom of the fixing cavity. The fixing liquid inlet pipe can also be connected with a peristaltic pump, and the peristaltic pump can automatically supply the fixing liquid, thereby improving the efficiency.

[0167] Further, in order to further improve the work efficiency, the scientific research full-automatic developing assembly is designed to be multiple, and correspondingly, the fixing assembly is also designed to be multiple and one-to-one corresponding to the scientific research full-automatic developing assembly.

[0168] As shown in FIG. 7, the multiple scientific research full-automatic developing assemblies are sequentially and spacedly arranged along a first straight line direction; the multiple fixing assemblies are sequentially and spacedly arranged along a second straight line direction parallel to the first straight line direction; in this way, the multiple wafers can be simultaneously developed and fixed.

[0169] The fixing assembly further comprises a third cover plate 64 and a second plate driver 63, a driving end of the second plate driver 63 being connected with the third cover plate 64, for driving the third cover plate 64 to move to control the opening or closing of the third opening. As the first cover plate 14 and the first plate driver 15 are designed as above, the internal liquid medicine can be prevented from splashing out to increase the difficulty of subsequent cleaning. The second plate driver 63 can also be a servo motor capable of forward and reverse rotation, which is connected with the third cover plate 64 through a connecting structure to drive the third cover plate 64 to flip and move, so as to realize the opening and closing control of the third opening.

[0170] Further, as shown in FIG. 7, the water washing assembly is further included.

[0171] The water washing assembly comprises a water washing tank 71, a water washing liquid inlet pipe (not shown in the figure) and a water washing liquid outlet pipe 72; the water washing tank 71 is provided with a water washing cavity for placing the wafer after fixing; the top of the water washing tank 71 is provided with a fourth opening; one end of the water washing liquid inlet pipe and the water washing liquid outlet pipe 72 is communicated with the bottom of the water washing cavity. The water washing liquid inlet pipe is connected with a cleaning liquid source, and the wafer after fixing is washed in the water washing cavity. As the fixing assembly is designed as above, the water washing assembly is also provided with a cover plate assembly for controlling the opening and closing of the water washing tank 71, which will not be described herein.

[0172] Further, as shown in FIG. 7 and FIG. 8, the blow-drying assembly is further included.

[0173] The blow-drying assembly comprises a blow-drying tank 81, an air inlet pipe 83, an air outlet pipe 86 and a blow-drying liquid outlet pipe 82; the blow-drying tank 81 is provided with a water washing cavity for placing the wafer after washing; the top of the blow-drying tank 81 is provided with a fifth opening.

[0174] The blow-drying cavity is provided with a support net 85, and the blow-drying cavity is provided with a blowing pipe 84 above the support net 85; the bottom of the blowing pipe 84 is provided with a plurality of blow holes; the air inlet pipe 83 is communicated with the blowing pipe 84; the air outlet pipe 86 is communicated with the area below the support net 85 in the blow-drying cavity. The support net 85 plays a role of supporting and fixing the wafer, the wind blown out of the blowing pipe 84 blows and sweeps the residual water on the wafer to the area below the support net 85, and then the residual water is discharged through the blow-drying liquid outlet pipe 82. As the fixing assembly is designed as above, the blow-drying assembly is also provided with a cover plate assembly for controlling the opening and closing of the water washing tank 71, which will not be described herein.

[0175] As shown in FIG. 9, the present application further discloses a developing machine, which comprises a machine body 91, a wafer loading device (not shown in the figure) and a developing device 93.

[0176] The machine body 91 is provided with a machine cavity, the machine cavity is provided with a first partition plate 96 and a second partition plate 97 from bottom to top, the developing device 93 is arranged between the first partition plate 96 and the second partition plate 97; the second partition plate 97 is provided with a plurality of avoiding holes corresponding to the full-automatic developing assembly and the fixing assembly of the scientific research.

[0177] The second partition plate 97 is also provided with a plurality of drainage holes arranged in an array. When the wafer moves on the second partition plate 97, the residual liquid drops can flow to the space between the first partition plate 96 and the second partition plate 97 through the drainage holes, and then be discharged through the corresponding liquid discharge pipe, so as to avoid the accumulation of the residual liquid on the second partition plate 97 and the pollution and influence on the developing effect.

[0178] The wafer loading device is arranged above the second partition plate 97 and is used for loading the wafer. The wafer loading device is an existing wafer loading jig, and details are not described herein.

[0179] The material moving device 92 of the developing device 93 is arranged above the second partition plate 97 and is used for moving the wafer between the developing device 93 and the loading device.

[0180] Further, as shown in FIGS. 10 and 11, the liquid loading device 94 is also included.

[0181] The liquid loading device 94 is arranged below the first partition plate 96 and includes a loading seat 942, a liquid loading driving assembly 941, and a liquid taking member 943. The loading seat 942 is used for loading the liquid tank 95. These liquid tanks 95 are used for supplying the required liquid to the developing device 93. Therefore, the number of the liquid loading device 94 is designed according to the number of the liquid tank 95, and details are not limited.

[0182] The liquid loading driving assembly 941 is connected with the loading seat 942 and is used for driving the loading seat 942 to extend out of or retract into the machine body 91. The liquid loading driving assembly 941 can be an existing multi-stage telescopic shaft / chain transmission telescopic mechanism, and details are not described herein.

[0183] The liquid taking member 943 is detachably mounted on the liquid tank 95.

[0184] When the liquid tank 95 is replaced, the liquid loading driving assembly 941 first extends the liquid tank 95 to be replaced out of the machine body 91, then takes out the liquid taking member 943, then replaces the new liquid tank 95 with the empty liquid tank 95, and then installs the liquid taking member 943. The peristaltic pump corresponding to the liquid tank 95 in the developing device 93 is connected with the liquid taking member 943 through the corresponding connecting member (such as a hose), so that the liquid can be taken from the liquid tank 95 through the liquid taking member 943, and the supply of the developing liquid and the fixing liquid is realized.

[0185] The above design can realize the quick replacement of the liquid tank 95, improve the convenience of replacing the liquid tank 95, and facilitate the automatic replacement of the liquid tank 95.

[0186] Further, as shown in FIGS. 10 and 11, the structure design of the liquid taking member 943 includes a liquid taking pipe 9431 and a liquid taking cover 9432.

[0187] The liquid taking pipe 9431 can extend into the chemical liquid tank 95 through the chemical liquid port of the chemical liquid tank 95; the liquid taking cover 9432 is sleeved on the liquid taking pipe 9431 and can cooperate with the chemical liquid port to block the chemical liquid port; wherein the liquid taking pipe 9431 plays a role of taking liquid, and the liquid taking cover 9432 has the same effect as the original tank cover of the chemical liquid tank 95, plays a role of blocking the chemical liquid port and fixing the liquid taking pipe 9431, the liquid taking cover 9432 is rotatably sleeved on the liquid taking pipe 9431, but is fixedly connected with the liquid taking pipe 9431 in the axial direction of the liquid taking pipe 9431, so that the liquid taking cover 9432 will not rotate with the liquid taking pipe 9431 when the liquid taking cover 9432 is controlled to rotate by a mechanical hand or other equipment, and the stable connection between the liquid taking pipe 9431 and the corresponding peristaltic pump is ensured. Of course, the liquid taking cover 9432 can also be designed to be plug-connected with the chemical liquid port to block or open the chemical liquid port, and those skilled in the art can make changes and designs based on this, and the specific design is not limited.

[0188] In order to facilitate connection with the peristaltic pump in the developing device 93, one end of the pipe segment of the liquid taking pipe 9431 outside the liquid taking cover 9432 is connected with a liquid taking connector 9433. The liquid taking connector 9433 is a one-way valve connector, that is, only the chemical liquid in the chemical liquid tank 95 can be taken out, and external air or liquid cannot enter the chemical liquid tank 95. The liquid taking connector 9433 is connected with the peristaltic pump for liquid inlet control in the developing device 93 through a hose.

[0189] A fixing member 944 is vertically installed on the material loading seat 942 to fix the liquid taking member 943 to be installed; the fixing member 944 is a hollow column structure for the liquid taking pipe 9431 to be inserted. After the liquid taking member 943 is taken out, a fixing member 944 is vertically installed on the material loading seat 942 to fix the liquid taking member 943 to be installed. Taking the above-mentioned liquid taking pipe 9431 and liquid taking cover 9432 as an example, the fixing member 944 is designed as a hollow column structure for the liquid taking pipe 9431 to be inserted. Since there may be some residual chemical liquid in the liquid taking pipe 9431 after being taken out, the residual chemical liquid will remain in the fixing member 944 after the liquid taking pipe 9431 is inserted into the fixing member 944, which will cause pollution and waste. Therefore, a recycling hole (not shown in the figure) can be formed at the bottom of the fixing member 944, which can be connected to a recycling tank through a recycling pipe (which can be a telescopic recycling pipe) to recycle the residual chemical liquid in the fixing member 944. At the same time, the recycling hole can also be connected to a cleaning device through a cleaning pipe to inject cleaning liquid into the fixing member 944 to clean the liquid taking pipe 9431.

[0190] The scientific research full-automatic developing assembly, the developing device and the developing machine table provided by the present application are described in detail above. For those skilled in the art, according to the idea of the embodiments of the present application, the specific implementation manners and application ranges can be changed. In conclusion, the content of the present application should not be understood as a limitation.

Claims

1. A full automatic developing assembly for research, characterized in that, The developing mechanism, the material moving device (92), the heating mechanism, the magnetic stirring mechanism and the ultrasonic oscillation mechanism are included. The developing mechanism includes a developing tank (11), a developing liquid inlet pipe (12), a developing liquid outlet pipe (13) and a liquid inlet peristaltic pump. The developing tank (11) is internally provided with a developing cavity which is adapted to 1cm*1cm or 2cm*2cm wafer and is inverted trapezoidal. One end of the developing liquid inlet pipe (12) is communicated with the developing cavity, and the other end of the developing liquid inlet pipe (12) is connected with the output end of the liquid inlet peristaltic pump. One end of the developing liquid outlet pipe (13) is communicated with the developing cavity. The heating mechanism includes a heating tank (21), and the heating tank (21) is internally provided with a heating cavity. At least part of the developing tank (11) is placed in the heating cavity. The heating cavity is internally provided with a heat medium which exchanges heat with the developing liquid in the developing cavity. The developing liquid outlet pipe (13) is located in the heating cavity and the other end thereof extends out of the heating cavity. The magnetic stirring mechanism includes a magnetic stirring sub and a stirring driver (31). The magnetic stirring sub is arranged at the bottom of the developing cavity. The stirring driver (31) is arranged below the heating tank (21) and is used to drive the magnetic stirring sub to rotate. The ultrasonic oscillation mechanism includes at least one ultrasonic oscillator (41). The at least one ultrasonic oscillator (41) is arranged at one side of the heating tank (21) and is used to make the developing liquid in the developing cavity produce cavitation effect. The developing tank (11), the developing liquid inlet pipe (12) and the developing liquid outlet pipe (13) are made of quartz material. The material moving device (92) is used to clamp and move the wafer to a designated position.

2. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing mechanism further includes a quantitative tank. The input end of the liquid inlet peristaltic pump is connected with the quantitative tank.

3. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing mechanism further includes a metering pipe which has a larger diameter than the developing liquid inlet pipe (12). The other end of the developing liquid inlet pipe (12) is connected with the output end of the liquid inlet peristaltic pump through the metering pipe. A flow meter is installed in the metering pipe.

4. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing mechanism further includes a first cover plate (14) and a first plate driver (15). The driving end of the first plate driver (15) is connected with the first cover plate (14) and is used to drive the first cover plate (14) to move so as to control the opening or closing of the first opening.

5. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing tank (11) includes a lower tank body (111) and an upper tank body (112). The developing cavity is arranged in the lower tank body (111). The bottom of the upper tank body (112) is provided with a communication port. The opening at the top of the lower tank body (111) is connected with the communication port. The first opening is arranged at the top of the upper tank body (112). The developing liquid inlet pipe (12) is located above the heating tank (21) and one end thereof extends into the upper tank body (112) through the sidewall of the upper tank body (112). The pipe section of the developing liquid inlet pipe (12) which extends into the upper tank body (112) is located outside the top of the lower tank body (111).

6. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, One end of the developing drainage pipe (13) is connected to the bottom of the side wall of the developing cavity.

7. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing drainage pipe (13) has at least two; The developing mechanism further comprises a drainage peristaltic pump; The other end of at least one of the developing drainage pipes (13) is connected with the drainage peristaltic pump.

8. The full-automatic developing assembly for scientific research according to claim 5, characterized in that, The heating tank (21) is provided with a second opening at the top; The second opening is provided with a supporting flange (211); The supporting flange (211) is provided with a second cover plate (26) for closing the second opening.

9. The full-automatic developing assembly for scientific research according to claim 8, characterized in that, The second cover plate (26) is provided with a socket (212) penetrating through itself and for inserting the developing tank (11); The upper tank body (112) is provided with a connecting flange (113) at the top; The connecting flange (113) can be in contact with the second cover plate (26) around the socket (212).

10. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The heating mechanism further comprises a heater; The heater is integrated with the stirring driver (31) for heating the heat medium in the heating cavity.

11. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The heating mechanism further comprises a medium input pipe (23), a medium output pipe (24), a medium liquid level meter (25), and a medium temperature sensor (22); The medium input pipe (23) and the medium output pipe (24) are installed on the heating tank (21) and communicate with the heating cavity; The medium temperature sensor (22) is used to detect the temperature of the heat medium in the heating cavity; The medium liquid level meter (25) is used to detect the liquid level of the heat medium in the heating cavity.

12. The full-automatic developing assembly for scientific research according to claim 1, characterized in that, The developing mechanism further comprises a developing temperature sensor; The developing temperature sensor is used to detect the developing temperature in the developing cavity.

13. A developing device characterized by comprising: The scientific research full-automatic developing assembly comprises a fixing assembly and the scientific research full-automatic developing assembly according to any one of claims 1 to 12. The fixing assembly comprises a fixing tank (61), a fixing liquid inlet pipe, and a fixing liquid outlet pipe (62). The fixing tank (61) is provided with a fixing cavity for placing the wafer after developing, and the fixing tank (61) is provided with a third opening at the top. One end of the fixing liquid inlet pipe and the fixing liquid outlet pipe (62) communicates with the fixing cavity.

14. The developing device according to claim 13, wherein The scientific research full-automatic developing assembly is multiple; The fixing assembly is multiple and corresponds to the scientific research full-automatic developing assembly one by one. The multiple scientific research full-automatic developing assemblies are sequentially and spacedly arranged along a first straight line direction. The multiple fixing assemblies are sequentially and spacedly arranged along a second straight line direction parallel to the first straight line direction. The fixing assembly further comprises a third cover plate (64) and a second plate driver (63). The driving end of the second plate driver (63) is connected with the third cover plate (64) for driving the third cover plate (64) to move to control the opening or closing of the third opening.

15. The developing device according to claim 13, wherein Further comprising a water washing assembly; The water washing assembly comprises a water washing tank (71), a water washing liquid inlet pipe, and a water washing liquid outlet pipe (72). The water washing tank (71) is provided with a water washing cavity for placing the wafer after fixing, and the water washing tank (71) is provided with a fourth opening at the top. One end of the water washing liquid inlet pipe and the water washing liquid outlet pipe (72) communicates with the water washing cavity.

16. The developing apparatus according to claim 13, wherein Further comprising a blow-drying assembly; The blow-drying assembly comprises a blow-drying groove (81), an air inlet pipe (83), an air outlet pipe (86), and a blow-drying liquid discharge pipe (82); The blow-drying groove (81) is internally provided with a washing cavity for placing the wafer after washing; The blow-drying cavity is provided with a support net (85), and the blow-drying cavity is provided with a blow pipe (84) above the support net (85); The blow pipe (84) is provided with a plurality of blow holes at the bottom; The air inlet pipe (83) is in communication with the blow pipe (84); The air outlet pipe (86) is in communication with the area below the support net (85) in the blow-drying cavity.

17. A processor-readable medium having stored thereon processor-executable instructions for causing a processor to perform operations comprising: The machine body (91) is internally provided with a machine cavity; The machine cavity is internally provided with a first partition plate (96) and a second partition plate (97) in a spaced manner from bottom to top; The developing device (93) is arranged between the first partition plate (96) and the second partition plate (97); The second partition plate (97) is provided with a plurality of avoiding holes for avoiding the full-automatic developing assembly and the fixing assembly of the scientific research use; The second partition plate (97) is further provided with a plurality of drainage holes in an array manner; The wafer loading device is arranged above the second partition plate (97) and used for loading the wafer; The material moving device (92) of the developing device (93) is arranged above the second partition plate (97) and used for transferring the wafer between the developing device (93) and the loading device. Further comprising a chemical liquid loading device (94); 18. The processor of claim 17, wherein the processor is further configured to: The chemical liquid loading device (94) is arranged below the first partition plate (96) and comprises a loading seat (942), a chemical liquid loading driving assembly (941), and a liquid taking member (943); The loading seat (942) is used for loading the chemical liquid tank (95); The chemical liquid loading driving assembly (941) is connected with the loading seat (942) and used for driving the loading seat (942) to extend out of or retract into the machine body (91); The liquid taking member (943) is detachably mounted on the chemical liquid tank (95). The liquid taking member (943) comprises a liquid taking pipe (9431) and a liquid taking cover (9432); 19. The processor of claim 18, wherein the processor is further configured to: The liquid taking pipe (9431) can extend into the chemical liquid tank (95) through a chemical liquid inlet of the chemical liquid tank (95); The liquid taking cover (9432) is sleeved on the liquid taking pipe (9431) and can cooperate with the chemical liquid inlet to seal the chemical liquid inlet; The loading seat (942) is vertically provided with a fixing member (944) for fixing the liquid taking member (943) to be mounted; The fixing member (944) is a hollow column structure, and the liquid taking pipe (9431) is movably inserted into the fixing member (944). ​

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