Search assistance device, search assistance method, and computer-readable program

Abstract

In the present invention, a storage part stores processing result information. The processing result information is information in which a plurality of processing results (522), which indicate results of liquid processing performed on a substrate for a unit processing time under a plurality of processing conditions, are associated with the plurality of processing conditions, respectively. A processing result calculation part multiplies each of selected processing results (522a) included in a selected-processing-result group by a processing time ratio and sums the multiplication results to obtain a composite processing result (527). The processing time ratio is a value obtained by dividing a processing time, which is arbitrarily set for each of the selected processing results (522a), by the unit processing time. A display (86) displays the selected processing results (522a) and the processing times corresponding to the selected processing results (522a). The display (86) also displays the composite processing result (527) and a reference processing result (51) in a comparable manner. As a result, searching for the processing conditions can be facilitated.

Description

Exploration Support Device, Exploration Support Method, and Computer-Readable Program

[0001] The present invention relates to a technique for supporting the exploration of processing conditions in a substrate processing apparatus that performs liquid processing on a substrate. [Reference to Related Applications] This application claims the benefit of priority from Japanese Patent Application JP2024-164265 filed on September 20, 2024, and the entire disclosure of that application is incorporated herein.

[0002] Conventionally, in the manufacturing process of a semiconductor substrate (hereinafter simply referred to as "substrate"), various processes are performed on the substrate. For example, in the substrate processing apparatus disclosed in Japanese Patent Application Laid-Open No. 2020-155614 (Document 1), wet etching is performed by rotating a substrate held by a substrate holding unit in a horizontal state and applying an etching solution to the surface of the rotating substrate. Further, in the substrate processing apparatus disclosed in Japanese Patent Application Laid-Open No. 2022-050234 (Document 2), a resist stripping process is performed by supplying a resist stripping solution to the surface of the rotating substrate.

[0003] By the way, in the substrate processing apparatus of Document 2, a plurality of chambers are provided, and liquid processing on the substrate is performed in each chamber. In such a substrate processing apparatus having a multi-chamber structure, even though the processing is performed under the same processing conditions, there may be a difference in the processing results between the chambers. When such a chamber-to-chamber difference occurs, the operator repeatedly adjusts the processing recipe, device setting values, etc. for each chamber to check the processing results, and explores the processing conditions under which the processing results of each chamber approach the target processing results.

[0004] An object of the present invention is to facilitate the exploration of processing conditions.

[0005] One aspect of the present invention is a search support device for a substrate processing apparatus that performs liquid processing on a substrate, comprising: a storage unit that stores processing result information relating a plurality of processing results, each of which indicates the result of performing liquid processing on the substrate for a unit processing time under each of the plurality of processing conditions, to the plurality of processing conditions; a processing result calculation unit that calculates a composite processing result by multiplying each selected processing result, which is a set of two or more processing results selected from the plurality of processing results, by a value obtained by dividing the processing time by the unit processing time and then summing them up in a selected processing result group, which is a set of two or more processing results selected from the plurality of processing results; and a display unit that displays each selected processing result and the processing time corresponding to each selected processing result, and displays the composite processing result and the standard processing result in a comparable manner.

[0006] This invention makes it possible to easily search for processing conditions.

[0007] Aspect 2 of the present invention is a search support device according to aspect 1, wherein the display unit also displays the plurality of processing results.

[0008] A third aspect of the present invention is a search support device according to aspect 1 or 2, wherein one of the plurality of processing results is displayed on the display unit as an initial selection processing result before the group of selection processing results is selected.

[0009] Aspect 4 of the present invention is a search support device according to aspect 1 or 2 (or any one of aspects 1 to 3), wherein the candidate processing times that can be set for each selection processing result are displayed on the display unit.

[0010] Aspect 5 of the present invention is a search support device according to aspect 1 or 2 (or any one of aspects 1 to 4), wherein if the processing time set for each selection processing result exceeds a predetermined threshold, an alternative means is displayed on the display unit.

[0011] Aspect 6 of the present invention is a search support device according to aspect 1 or 2 (or any one of aspects 1 to 5), wherein the processing order of two or more liquid processes corresponding to two or more selection processing results included in the group of selection processing results is determined based on processing timings suitable for each of the two or more liquid processes.

[0012] Aspect 7 of the present invention is a search support device according to aspect 1 or 2 (or any one of aspects 1 to 6), further comprising a search unit that changes the processing time corresponding to each of the selection processing results and determines the processing time corresponding to each of the selection processing results that minimizes the difference between the composite processing result and the reference processing result.

[0013] Aspect 8 of the present invention is a search support device according to aspect 7, wherein when the search unit changes the processing time corresponding to each of the selection processing results, the sum of the processing times corresponding to each of the selection processing results is less than or equal to the base processing time, which is the processing time for obtaining the base processing result.

[0014] Aspect 9 of the present invention is a search support device according to aspect 7 (or aspect 7 or 8), wherein the search unit changes the processing time corresponding to each selection processing result within a range greater than or equal to a predetermined lower limit processing time.

[0015] Aspect 10 of the present invention is a search support device according to aspect 7 (or any one of aspects 7 to 9), wherein the search unit also changes the selection processing results included in the selection processing result group from among the plurality of processing results, and determines the selection processing result group that minimizes the difference between the composite processing result and the reference processing result.

[0016] Aspect 11 of the present invention is a search support device according to aspect 10, wherein after determining the group of selected processing results, the search unit determines the processing order of two or more liquid processes corresponding to two or more selected processing results included in the group of selected processing results, based on the types of processing liquids used in each of the two or more liquid processes.

[0017] Aspect 12 of the present invention is a search support device according to aspect 10 (or aspect 10 or 11), wherein the search unit, after determining the group of selection processing results, determines the processing order of two or more liquid processes corresponding to two or more selection processing results included in the group of selection processing results, based on whether or not there is oscillation of the nozzle in the two or more liquid processes.

[0018] Aspect 13 of the present invention is a search support device according to aspect 1 or 2 (or any one of aspects 1 to 12), wherein the reference processing result is a measured value of the surface state of a substrate treated with liquid in a single substrate processing device.

[0019] Aspect 14 of the present invention is a search support method for assisting in the search for processing conditions in a substrate processing apparatus that performs liquid processing on a substrate, comprising: a) preparing processing result information which associates a reference processing result, which is a processing result of a substrate in which the uniformity of the surface state after liquid processing is equal to or greater than a predetermined reference state, and a plurality of processing results which show the result of performing liquid processing on the substrate for a unit processing time under each of a plurality of processing conditions with the plurality of processing conditions; b) obtaining a composite processing result by multiplying each selected processing result, which is a set of two or more processing results selected from the plurality of processing results, by a value obtained by dividing the processing time arbitrarily set by the unit processing time and summing them up; and c) displaying each selected processing result and the processing time corresponding to each selected processing result, and displaying the composite processing result and the reference processing result in a comparable manner.

[0020] Aspect 15 of the present invention is a computer-readable program for assisting in the search for processing conditions in a substrate processing apparatus that performs liquid processing on a substrate, wherein when the program is executed on a computer, a) a step of preparing processing result information which is a standard processing result which is a processing result of a substrate in which the uniformity of the surface state after liquid processing is above a predetermined standard state, and a plurality of processing results which are shown as the result of performing liquid processing on the substrate for a unit processing time for each of the plurality of processing conditions, and the plurality of processing conditions are associated with each of the plurality of processing conditions; b) a step of obtaining a composite processing result in a selected processing result group which is a set of two or more processing results selected from the plurality of processing results, by multiplying each selected processing result which is each processing result included in the selected processing result group by a value obtained by dividing the processing time by the unit processing time and summing them up; c) a step of displaying each selected processing result and the processing time corresponding to each selected processing result, and displaying the composite processing result and the standard processing result in a comparable manner.

[0021] The aforementioned objectives, as well as other objectives, features, embodiments, and advantages, will be revealed by the detailed description of the present invention below, with reference to the attached drawings.

[0022] This is a plan view of the substrate processing system. This is a side view of the substrate processing device. This is a diagram showing the configuration of the search support device. This is a block diagram showing the functions of the search support device. This is a diagram showing the reference processing result. This is a diagram showing the processing result information. This is a diagram showing the display screen. This is a diagram showing the flow of searching for processing conditions. This is a diagram showing the display screen. This is a diagram showing a magnified portion of the display screen. This is a diagram showing the display screen. This is a diagram showing the display screen. This is a diagram showing the flow of searching for processing conditions. This is a diagram showing the display screen. This is a diagram showing a portion of

[0023] Figure 1 is a schematic plan view showing the layout of the substrate processing system 10. The substrate processing system 10 is a system for processing semiconductor substrates 9 (hereinafter simply referred to as "substrate 9"). As will be described later, the substrate processing system 10 includes a substrate processing apparatus which is the target of the search for processing conditions by a search support device according to one embodiment of the present invention.

[0024] The substrate processing system 10 comprises an indexer block 101 and a processing block 102 coupled to the indexer block 101. The indexer block 101 and the processing block 102 are also called an indexer cell and a processing cell, respectively. The indexer block 101 is also called an Equipment Front End Module (EFEM) unit, etc.

[0025] The indexer block 101 comprises a carrier holding unit 104, an indexer robot 105, and an IR moving mechanism 106. The carrier holding unit 104 holds a plurality of carriers 107 capable of accommodating a plurality of substrates 9. The plurality of carriers 107 (for example, FOUP) are held in the carrier holding unit 104 in an arrangement in a predetermined carrier arrangement direction. The IR moving mechanism 106 moves the indexer robot 105 in the carrier arrangement direction. The indexer robot 105 performs an unloading operation to unload the substrates 9 from the carriers 107, and an loading operation to load the substrates 9 into the carriers 107 held in the carrier holding unit 104. The substrates 9 are transported in a horizontal position by the indexer robot 105.

[0026] The processing block 102 comprises a plurality of processing units 108 (for example, four or more) for processing the substrate 9, and a central robot 109. The plurality of processing units 108 are arranged to surround the central robot 109 in a plan view. Various processing operations are performed on the substrate 9 in the plurality of processing units 108. The central robot 109 performs loading operations to load the substrate 9 into the processing units 108, and unloading operations to unload the substrate 9 from the processing units 108. Furthermore, the central robot 109 transports the substrate 9 between the plurality of processing units 108. The substrate 9 is transported by the central robot 109 in a horizontal position. The central robot 109 receives the substrate 9 from the indexer robot 105 and passes the substrate 9 to the indexer robot 105.

[0027] Figure 2 is a side view showing the configuration of the substrate processing apparatus 1. The substrate processing apparatus 1 is one of the multiple processing units 108 shown in Figure 1. In the substrate processing system 10, for example, multiple substrate processing apparatuses 1 having a structure similar to that shown in Figure 2 are provided as multiple processing units 108.

[0028] The substrate processing apparatus 1 is a single-wafer type apparatus that processes substrates 9 one at a time. The substrate processing apparatus 1 supplies a processing solution to the substrate 9 and performs liquid processing. For example, in the substrate processing apparatus 1, an etching solution is supplied to the substrate 9, and wet etching is performed on the substrate 9.

[0029] The substrate processing apparatus 1 comprises a substrate holding section 21, a substrate rotating mechanism 22, a cup section 23, a processing liquid supply section 24, a nozzle moving mechanism 25, and a chamber 11. The substrate holding section 21, the substrate rotating mechanism 22, the cup section 23, the processing liquid supply section 24, and the nozzle moving mechanism 25 are housed in the internal space of the chamber 11. The top of the chamber 11 is provided with an airflow forming section 12 that supplies gas into the internal space to form a downward-flowing airflow (so-called downflow). For example, an FFU (Fan Filter Unit) is used as the airflow forming section 12.

[0030] The substrate holding part 21 holds the substrate 9 in a horizontal position from below. The substrate holding part 21 is, for example, a mechanical chuck. The substrate rotation mechanism 22 rotates the substrate 9 held by the substrate holding part 21 by rotating the substrate holding part 21 around the central axis J1. The substrate rotation mechanism 22 is, for example, a motor. In the substrate processing apparatus 1, the substrate holding part 21 and the substrate rotation mechanism 22 constitute a spin chuck that holds and rotates the substrate 9.

[0031] The cup section 23 comprises an annular cup 231 centered on the central axis J1. The cup 231 is arranged around the entire circumference of the substrate 9 and the substrate holder 21, covering the sides of the substrate 9 and the substrate holder 21. The cup 231 is a liquid receiving container that receives liquids such as processing liquid that are scattered outwards from the rotating substrate 9. A drain port (not shown) is provided at the bottom of the cup 231 to discharge the processing liquid received in the cup 231 to the outside of the chamber 11. The cup 231 moves vertically by a lifting mechanism (not shown).

[0032] The cup portion 23 may include a plurality of cups 231 stacked radially (hereinafter also simply referred to as "radial direction") around the central axis J1. When the cup portion 23 includes a plurality of cups 231, each of the cups 231 can move independently in the vertical direction, and the plurality of cups 231 are switched and used to receive the processing liquid according to the type of processing liquid scattered from the substrate 9.

[0033] The processing liquid supply unit 24 includes a nozzle 241 positioned above the substrate 9. The nozzle 241 discharges the processing liquid toward the upper surface 91 of the substrate 9. In this embodiment, the processing liquid supplied to the substrate 9 from the nozzle 241 is an etching solution used for wet etching of the substrate 9. Examples of etching solutions include a mixture of sulfuric acid and hydrogen peroxide (SPM), a mixture of ammonia water and hydrogen peroxide (SC1), a mixture of hydrochloric acid and hydrogen peroxide (SC2), dilute hydrofluoric acid (DHF), an organic alkali (e.g., tetramethylammonium hydroxide (TMAH), etc.), or buffered hydrofluoric acid (BHF). The processing liquid supply unit 24 may, for example, switch between and discharge multiple types of processing liquids from the nozzle 241. Alternatively, the processing liquid supply unit 24 may include multiple nozzles 241, each discharging multiple types of processing liquids.

[0034] The nozzle moving mechanism 25 is a swinging mechanism that swings the nozzle 241 substantially horizontally in the space above the substrate 9. The nozzle moving mechanism 25 comprises an arm 251 and an arm rotation mechanism 252. The arm 251 is a rod-shaped member that extends substantially horizontally. The nozzle 241 is fixed to one end of the arm 251, and the other end is connected to the arm rotation mechanism 252, which is located radially outside the cup portion 23. The arm rotation mechanism 252 rotates the arm 251 substantially horizontally around a rotation axis that extends vertically. The arm rotation mechanism 252 is, for example, a motor.

[0035] The nozzle movement mechanism 25 reciprocates the nozzle 241, which discharges the processing liquid onto the rotating substrate 9, between a first position that is vertically opposite to the center of the upper surface 91 of the substrate 9, and a second position that is radially outward from the first position. Preferably, the second position is vertically opposite to the outer periphery of the upper surface 91 of the substrate 9. This ensures that the processing liquid is supplied substantially evenly over substantially the entire upper surface 91 of the substrate 9.

[0036] Figure 3 shows the configuration of a search support device 8 that assists in searching for processing conditions in the substrate processing apparatus 1. The search support device 8 has the configuration of a general computer system, including a CPU 81, a GPU 82, a ROM 83, a RAM 84, a fixed disk 85, a display 86, an input unit 87, a reader 88, a communication unit 89, and a bus 80. The CPU 81 performs various arithmetic operations. The GPU 82 performs various arithmetic operations related to image processing. The ROM 83 stores the basic program. The RAM 84 stores various information. The fixed disk 85 stores information. The display 86 is a display unit that displays various information such as images.

[0037] The input unit 87 includes a keyboard 87a and a mouse 87b that accept input from the operator. The reading device 88 reads information from a computer-readable recording medium 881 such as an optical disk, magnetic disk, magneto-optical disk, or memory card. The display 86, keyboard 87a, mouse 87b, and reading device 88 are connected to the bus 80 via an interface I / F. The communication unit 89 sends and receives signals to and from external devices of the search support device 8. The bus 80 is a signal circuit that connects the CPU 81, GPU 82, ROM 83, RAM 84, fixed disk 85, display 86, input unit 87, reading device 88, and communication unit 89.

[0038] In the search support device 8, the program 882 is read in advance from the recording medium 881 via the reader device 88 and stored in the fixed disk 85. The program 882 may also be stored in the fixed disk 85 via a network. The CPU 81 and GPU 82 perform calculations using the RAM 84 and fixed disk 85 according to the program 882. The CPU 81 and GPU 82 function as the calculation unit in the search support device 8. Other configurations besides the CPU 81 and GPU 82 that function as the calculation unit may also be employed.

[0039] Figure 4 is a block diagram showing some of the functions of the search support device 8. The search support device 8 comprises a storage unit 801, a processing result calculation unit 802, and a search unit 803. The storage unit 801 is implemented by RAM 84 and a fixed disk 85, etc. The processing result calculation unit 802 and the search unit 803 are implemented by a CPU 81, GPU 82, ROM 83, RAM 84, a fixed disk 85, and their peripheral configurations.

[0040] The memory unit 801 pre-stores the reference processing result 51 shown in Figure 5. The reference processing result 51 indicates the processing result that serves as a reference when performing the above-described liquid treatment on the substrate 9. In this embodiment, the reference processing result 51 is the result of performing wet etching on the substrate 9 for a predetermined reference processing time. The horizontal axis in Figure 5 indicates the position on one diameter on the substrate 9 (i.e., the position in the radial direction). The center of the horizontal axis indicates the position on the substrate 9 that coincides with the central axis J1. The vertical axis in Figure 5 indicates the amount of etching (i.e., etching depth) at each position on the substrate 9 indicated by the horizontal axis.

[0041] The standard processing result 51 is a processing result of the substrate 9 in which the uniformity of the surface state of the substrate 9 after wet etching is equal to or better than a predetermined standard state. Specifically, for example, it is a processing result in which the amount of etching of the substrate 9 is approximately uniform over substantially the entire length in the radial direction. The above-mentioned standard state is set in advance by the operator based on, for example, an ideal processing result of the substrate 9.

[0042] The reference processing result 51 is obtained, for example, by measuring the surface state of the substrate 9 that has been liquid-processed in one substrate processing apparatus 1 among the plurality of substrate processing apparatuses 1 provided in the substrate processing system 10, where the processing result is the most favorable (i.e., the uniformity of the surface state of the processed substrate 9 is the highest). In this case, for example, a feature amount indicating the uniformity of the surface state is obtained from the measurement value of the surface state of the substrate 9 that has been liquid-processed in the one substrate processing apparatus 1. After it is confirmed that the feature amount is not less than the reference feature amount corresponding to the reference state (i.e., the uniformity of the surface state is not less than the reference state), the measurement value of the surface state is stored in the storage unit 801 as the reference processing result 51. The storage unit 801 also stores the above-mentioned reference processing time (i.e., the processing time during which the liquid processing was performed in the substrate processing apparatus 1 to obtain the reference processing result 51).

[0043] In the substrate processing system 10 (see FIG. 1), even if the substrate 9 is processed under the same processing conditions as the reference substrate processing apparatus 1 in a substrate processing apparatus 1 different from the one substrate processing apparatus 1 (hereinafter also referred to as the "reference substrate processing apparatus 1") used to obtain the reference processing result 51, the same processing result as the reference processing result 51 may not be obtained. In this case, an appropriate processing condition search is performed for the substrate processing apparatus 1 other than the reference substrate processing apparatus 1 so that a processing result close to the reference processing result 51 can be obtained. The search support device 8 is a device that supports the search for processing conditions for obtaining a processing result close to the reference processing result 51 for the substrate processing apparatus 1 other than the reference substrate processing apparatus 1 (hereinafter also referred to as the "search target substrate processing apparatus 1").

[0044] The storage unit 801 (see FIG. 4) of the search support device 8 stores in advance the processing result information 52 (see FIG. 6) related to the search target substrate processing apparatus 1. The processing result information 52 associates a plurality of processing conditions 521 that can be respectively implemented in the substrate processing apparatus 1 with a plurality of processing results 522 (in this embodiment, the etching amount) respectively corresponding to the plurality of processing conditions 521.

[0045] Specifically, the processing result information 52 associates a plurality of processing results 522 indicating the results of performing wet etching on the substrate 9 for a unit processing time under each of a plurality of processing conditions 521 with the plurality of processing conditions 521. If each combination of a processing condition 521 and a processing result 522 is called a data element 523, the processing result information 52 illustrated in FIG. 6 includes seven data elements 523 from "Recipe 1" to "Recipe 7".

[0046] In FIG. 6, processing result information 52 in a table format is illustrated. Also, in FIG. 6, for ease of understanding of the figure, the processing results 522 in the processing result information 52 are shown in a graph corresponding to FIG. 5. Actually, however, they are stored in the storage unit 801 as numerical data corresponding to the graph. Note that the processing result information 52 may be information in a hierarchical table format or information in a format other than the table format.

[0047] The processing conditions 521 include, for example, the type and flow rate of the processing liquid discharged from the nozzle 241 during liquid processing, the presence or absence of the oscillation of the nozzle 241 when discharging the processing liquid, the rotation speed of the substrate 9 by the substrate rotation mechanism 22, the unit processing time, and the lower limit processing time. In FIG. 6, only a part of the processing conditions 521 is illustrated.

[0048] The unit processing time is the time required for the processing when the processing is performed alone and is specific to each processing. In the plurality of data elements 523, the unit processing times may be the same or different.

[0049] The lower limit processing time is, for example, the lower limit of the processing time when the processing time of the processing and the processing result by the processing (in this embodiment, the etching amount) are in a substantially proportional relationship. When the processing time is equal to or longer than the lower limit processing time, the processing time and the processing result are in a substantially proportional relationship. On the other hand, when the processing time is less than the lower limit processing time, the processing result is not proportional to the processing time and is likely to be in a non-linear relationship. The lower limit processing time is also specific to each processing. In the plurality of data elements 523, the lower limit processing times may be the same or different.

[0050] The lower limit processing time may be determined, for example, based on the lower limit of processing time that ensures the reproducibility of the processing results, or on the oscillation period of the nozzle 241, etc. Furthermore, the parameters constituting the processing conditions 521 included in the processing result information 52 can be changed in various ways.

[0051] In the substrate processing system 10, if there are multiple substrate processing devices 1 other than the reference substrate processing device 1 (i.e., substrate processing devices 1 for which processing conditions are to be searched), multiple processing result information 52 corresponding to each of the multiple substrate processing devices 1 are stored in the storage unit 801.

[0052] In the search support device 8, as shown in Figure 7, the reference processing result 51 and processing result information 52 stored in the storage unit 801 are displayed on the display 86. In the example shown in Figure 7, the reference processing result 51 is displayed in the first window 861 located to the right of the display 86.

[0053] The first window 861 also displays the processing time limit for searching for processing conditions, which will be described later. This processing time limit indicates the upper limit of the total processing time based on the processing conditions obtained as a result of the search. This processing time limit is, for example, the same as the reference processing time pre-stored in the storage unit 801. The processing time limit may be shorter or longer than the reference processing time. In this case, the processing time limit is pre-inputted to the search support device 8 by the operator and stored in the storage unit 801. In this embodiment, the processing time limit is the same as the reference processing time, for example, 60 seconds.

[0054] The second window 862, located to the left of the display 86, displays the processing result information 52. Specifically, the processing results 522 of multiple data elements 523 of the processing result information 52 are displayed in graph format. In the example shown in Figure 7, a total of seven processing results 522 are displayed in two columns, left and right, in the second window 862.

[0055] In the example shown in Figure 7, the name of the data element 523 containing the processing result 522 is displayed in the upper left corner of the graph for each processing result 522 in the second window 862. A checkbox 524 is also displayed in the upper right corner of the graph for each processing result 522. The operator can select the corresponding processing result 522 by checking the checkbox 524 using the mouse 87b (see Figure 3), etc. Furthermore, if the selection of processing results 522 is performed automatically by the program 882 (see Figure 3), etc., a check mark is automatically displayed in the checkbox 524 of the selected processing result 522.

[0056] A slider bar 525 extending vertically is displayed to the right of each processing result 522 graph. The slider bar 525 indicates the processing time for the corresponding processing result 522. The operator can set the processing time for the corresponding processing result 522 by moving the slider bar 525 vertically using a mouse 87b or the like. If the processing time is set automatically by a program 882 or the like, the slider bar 525 automatically moves to the position indicating the set processing time.

[0057] Next, with reference to Figures 8 to 11, a first example of the process for searching for processing conditions in the search support device 8 will be described. Figure 8 is a diagram showing the process for searching for processing conditions in the first example. In the first example, the operator searches for processing conditions semi-manually using the search support device 8. Figures 9 and 11 show the screen display on the display 86 during the process for searching for processing conditions, and Figure 10 shows a part of the screen display on the display 86. Note that Figure 7 mentioned above is the initial screen display during the process for searching for processing conditions.

[0058] When searching for processing conditions, the above-mentioned standard processing result 51, standard processing time, processing result information 52, and processing limit time are first prepared by being stored in the storage unit 801 (step S11). The standard processing result 51, processing result information 52, and processing limit time are displayed on the display 86 as shown in Figure 7. The processing limit time displayed on the display 86 can also be changed in steps S12 to S17 described later.

[0059] Next, the operator checks the checkbox 524 using the mouse 87b (see Figure 3), and as shown in Figure 9, two or more processing results (hereinafter, selected processing results 522 will be denoted as "522a") are selected from the multiple processing results 522 displayed in the second window 862 (step S12). In the following description, the set of two or more selected processing results 522a will also be called the "selected processing result group," and the processing result 522a will also be called the "selected processing result 522a." In the example shown in Figure 9, out of the seven processing results 522, the first from the top in the left column (recipe 1) and the third from the top in the right column (recipe 6) are selected as the selected processing results 522a.

[0060] In the example shown in Figure 9, among the multiple processing results 522 displayed in the second window 862, the processing results 522 that are not included in the selected processing result group are displayed in a darker color than the selected processing results 522a that are included in the selected processing result group. In Figure 9, the processing results 522 that are displayed in a darker color are marked with parallel diagonal lines. The processing time for the processing results 522 that are not included in the selected processing result group is automatically set to 0 seconds. In addition, in the second window 862, the processing results 522 that are not included in the selected processing result group may be hidden, and only the selected processing results 522a may be displayed.

[0061] Figure 10 is an enlarged view of a portion of the selection processing result 522a corresponding to recipe 1 in Figure 9. On the slider bar 525, the range from 0 seconds to the lower limit processing time TL (3 seconds in the example shown in Figure 10) is colored to make the lower limit processing time easily visible. Also, on the slider bar 525, the range of the unit processing time TS (60 seconds in the example shown in Figure 10) and above is colored to make the unit processing time easily visible. Bar 526 of the slider bar 525 is movable between the lower limit processing time TL and the unit processing time TS. Alternatively, bar 526 may also be movable above the unit processing time TS (i.e., to the side with longer processing times).

[0062] When step S11 is completed, the operator sets the processing time for each selected processing result 522a using the bar 526 of the slide bar 525 (step S13). The processing time can be set arbitrarily within the movable range of the bar 526 (for example, within the range of a minimum processing time TL and a minimum unit processing time TS). However, the movement of the bar 526 is restricted so that the sum of the processing times for all selected processing results 522a is less than or equal to the processing limit time mentioned above.

[0063] The processing time for each selected processing result 522a set in step S13 is displayed, for example, in the first window 861. The first window 861 also displays the sum of the processing times of all selected processing results 522a included in the group of selected processing results (hereinafter also referred to as "total processing time"). In the example shown in Figure 9, the processing time for recipe 1 is 10 seconds, the processing time for recipe 6 is 50 seconds, and the total processing time is 60 seconds. As described above, the total processing time is less than or equal to the processing limit time.

[0064] In the search support device 8, the processing time for the selection processing result 522a may be set by a method other than the slider bar 525. For example, instead of the slider bar 525, an input field may be provided for inputting the processing time using a keyboard 87a (see Figure 3) or the like.

[0065] Next, the processing result calculation unit 802 (see Figure 4) multiplies each selected processing result 522a by a value obtained by dividing the processing time arbitrarily set in step S13 by the unit processing time TS (hereinafter also referred to as the "processing time ratio"). Then, the combined processing result 527 is obtained by summing the results obtained by multiplying all the selected processing results 522a included in the group of selected processing results by their respective processing time ratios, and is displayed on the display 86 in a comparable manner to the reference processing result 51, as shown in Figure 9 (steps S14 to S15). Specifically, for example, in the first window 861, the combined processing result 527 is displayed as a solid line overlaid on the graph in which the reference processing result 51 is displayed as a dashed line.

[0066] The operator compares the composite processing result 527 and the reference processing result 51 on the display 86, and changes the processing time using the slider bar 525 corresponding to each selected processing result 522a until the difference between the composite processing result 527 and the reference processing result 51 becomes small (steps S16, S17) (step S13). When the operator moves the bar 526 (see Figure 10) to change the processing time, the processing result calculation unit 802 (see Figure 4) recalculates the composite processing result 527 and displays it on the display 86 (steps S14 to S15). The magnitude of the difference between the composite processing result 527 and the reference processing result 51 is determined, for example, by the operator based on experience.

[0067] Figure 11 shows an example in which the operator determined that the difference between the combined processing result 527 and the reference processing result 51 was small. In the example shown in Figure 11, the processing results corresponding to recipe 1 and recipe 6 are selected as the selected processing result 522a in the second window 862. The processing time for recipe 1 is 30 seconds, the processing time for recipe 6 is 30 seconds, and the total processing time is 60 seconds.

[0068] On the other hand, if changing the processing time of the selected processing result 522a does not reduce the difference between the composite processing result 527 and the reference processing result 51 (steps S16, S17), the operator changes the selected processing result 522a in the multiple processing results 522 displayed in the second window 862 (step S12), and repeats steps S13 to S16. By repeating steps S12 to S17 as needed, the operator obtains a combination of selected processing result 522a and processing time that results in a small difference between the composite processing result 527 and the reference processing result 51.

[0069] In this way, by using the search support device 8, it is possible to easily find combinations of multiple processing conditions 521 (see Figure 6) that can achieve a processing result close to the standard processing result 51. In other words, the search support device 8 makes it easier to search for processing conditions 521.

[0070] In the search support device 8, in step S16 described above, the magnitude of the difference between the composite processing result 527 and the reference processing result 51 may be indicated by a predetermined parameter. For example, in a graph displaying the composite processing result 527 and the reference processing result 51, the difference in etching amount between the composite processing result 527 and the reference processing result 51 at each position on the horizontal axis (i.e., each position in the radial direction) is determined by the processing result calculation unit 802, and the mean square (or root mean square) of this difference over the entire length of the horizontal axis (i.e., the entire length in the radial direction) may be displayed as the parameter below the graph. This makes it possible to grasp the difference between the composite processing result 527 and the reference processing result 51 without being influenced by the operator's subjective judgment.

[0071] In the search support device 8, before the selection of the selection processing result group in step S12 described above, one processing result 522 from among the multiple processing results 522 displayed in the second window 862 may be automatically selected as the initial selection processing result. On the display 86, a check mark is automatically displayed in the checkbox 524 of the processing result 522 selected as the initial selection processing result. The processing result 522 that is automatically selected as the initial selection processing result may be, for example, the one with the smallest difference from the reference processing result 51 among the multiple processing results 522, or it may be one whose difference from the reference processing result 51 is small enough and for which there is a proven track record of processing the corresponding processing condition 521 at the customer's site. This simplifies the process of selecting the selection processing result 522a from among the multiple processing results 522.

[0072] In the search support device 8, if the processing result 522 displayed in the second window 862 has a limited number of configurable processing times, a pull-down menu 531 displaying candidate processing times may be provided instead of the slider bar 525, as shown in Figure 12. These candidate processing times are pre-stored in the storage unit 801 (see Figure 4). The operator selects one processing time (30 seconds in the example shown in Figure 12) from one or more candidate processing times displayed in the pull-down menu 531 and sets it for the selected processing result 522a. This prevents the setting of an unexecutable processing time for the selected processing result 522a. Note that the above-mentioned candidate processing times may also be displayed on the display 86 by means other than the pull-down menu 531.

[0073] In the search support device 8, as described above, the bar 526 of the slide bar 525 (see Figure 10) is movable between the lower limit processing time TL and the unit processing time TS, but is not limited to this. For example, the bar 526 may also be movable in a range less than the lower limit processing time TL and in a range greater than the unit processing time TS. When the bar 526 is located in a range less than the lower limit processing time TL or greater than the unit processing time TS (i.e., when the processing time exceeds a predetermined threshold), for example, an alarm (e.g., an exclamation mark) is displayed on the display 86 to attract the operator's attention. Alternatively, as shown in Figure 13, a preferred alternative to setting a processing time exceeding the threshold for the selected processing result 522a may be displayed on the display 86.

[0074] In the example shown in Figure 13, a pull-down menu 532 displaying alternative candidates (for example, alternatives 1 to 3) is displayed above the selected processing result 522a. These alternative candidates are pre-stored in the storage unit 801. The alternative may be, for example, a processing time candidate as shown in Figure 12, or information indicating the processing timing (described later) for performing the liquid treatment corresponding to the processing result on the substrate 9. Alternatively, the alternative may be a processing result 522 corresponding to another recipe stored in the storage unit 801 (see Figure 4) but not displayed in the second window 862, or a link to another screen displaying the processing result 522.

[0075] The operator selects one alternative from the one or more alternative candidates displayed in the pull-down menu 532 and sets it for the selection processing result 522a. This prevents the setting of a processing time exceeding the threshold for the selection processing result 522a. Note that the above-mentioned alternative candidates may be displayed on the display 86 by means other than the pull-down menu 532.

[0076] In the search support device 8, the processing timing for the liquid treatment corresponding to the selected processing result 522a may be specified. The processing timing refers to, for example, one of the following in a series of liquid treatments on the substrate 9: a rise section in which the supply of the processing liquid is started and the flow rate gradually increases, a steady-state section in which the flow rate of the processing liquid is constant, and a fall section in which the supply of the processing liquid is about to stop and the flow rate gradually decreases. In liquid treatments performed by the substrate processing apparatus 1, the total processing time is short, and the processing behavior according to the recipe may significantly affect the processing result (e.g., etching amount). In such cases, it is important that the liquid treatment is performed at an appropriate processing timing.

[0077] In the example shown in Figure 14, a pull-down menu 533 displaying candidate processing timings is shown above each selected processing result 522a in the second window 862. The operator can select one processing timing from the one or more candidate processing timings displayed in the pull-down menu 533 and set it for the selected processing result 522a.

[0078] In the search support device 8, the processing order of multiple liquid processes corresponding to multiple selected processing results 522a is determined based on the set processing timing and is displayed, for example, in the first window 861. In the example shown in Figure 14, recipe 5, which is set in the rising section, is executed first, recipe 1, which is set in the falling section, is executed last, and recipe 6, which is set in the steady section, is executed in between. This allows the liquid processes corresponding to the selected processing results 522a to be executed at appropriate processing timings.

[0079] The above-mentioned processing timing candidates may be displayed on the display 86 by means other than the pull-down menu 533. Furthermore, the above-mentioned processing timing does not necessarily need to be set for all selected processing results 522a, but may be set for only some of the multiple selected processing results 522a included in the group of selected processing results. In this case, the processing order of the liquid processing corresponding to the selected processing results 522a for which no processing timing was set will be determined appropriately after the processing order of the liquid processing corresponding to the selected processing results 522a for which processing timing was set has been determined.

[0080] Next, a second example of the process for searching for processing conditions in the search support device 8 will be described with reference to Figures 15 and 16. Figure 15 is a diagram showing the process for searching for processing conditions in the second example. In the second example, the search support device 8 performs the process for searching for processing conditions almost automatically. Figure 16 is a diagram showing the screen display on the display 86 during the process for searching for processing conditions.

[0081] When the processing conditions are searched for, the reference processing result 51, processing result information 52, and processing time limit are prepared by being stored in the storage unit 801, as in step S11 above (step S21), and are displayed on the display 86 as shown in Figure 7.

[0082] Next, the search unit 803 (see Figure 4) selects two or more selected processing results 522a (see Figure 16) from the multiple processing results 522 displayed in the second window 862 shown in Figure 7 (step S22). For example, any two selected processing results 522a are selected from the seven processing results 522 shown in Figure 7. The search unit 803 sets an arbitrary processing time for each of the two selected processing results 522a (step S23). This processing time is set, for example, within the range of a lower limit processing time TL and a unit processing time TS shown in Figure 10. Furthermore, this processing time is set so that the sum of the processing times of all selected processing results 522a (i.e., the total processing time) is less than or equal to the processing limit time mentioned above.

[0083] Next, the processing result calculation unit 802 calculates the composite processing result 527 by multiplying all the selected processing results 522a included in the selected processing result group by the processing time ratio (i.e., the value obtained by dividing the processing time set in step S23 by the unit processing time) and summing the results, in substantially the same manner as in step S14 above (step S24).

[0084] In the search unit 803, the difference between the composite processing result 527 obtained in step S24 and the reference processing result 51 is determined. For example, as described above, the mean square (or root mean square) of the difference in etching amount between the composite processing result 527 and the reference processing result 51 over the entire radial length is used as a parameter indicating the magnitude of the difference between the composite processing result 527 and the reference processing result 51. The search unit 803 and the processing result calculation unit 802 repeat steps S23 to S25 until the difference between the composite processing result 527 and the reference processing result 51 is minimized (step S25). In steps S23 to S25, for example, the processing time for each selected processing result 522a that minimizes the difference between the composite processing result 527 and the reference processing result 51 is determined by a dynamic linear optimization method. The composite processing result 527 that has the smallest difference from the standard processing result 51, and the processing time of each selected processing result 522a corresponding to the composite processing result 527, are stored in the storage unit 801 in association with the group of selected processing results selected in step S22.

[0085] Next, the search unit 803 checks for the presence or absence of a group of unexamined selection processing results (step S26). An unexamined group of selection processing results refers to a group of selection processing results for which the processing time that minimizes the difference between the composite processing result 527 and the standard processing result 51 has not been determined for each selection processing result 522a included in the group.

[0086] If there is a group of unconsidered selection results, the process returns to step S22, and a new combination of two or more selection results 522a (i.e., a new group of selection results) is selected (step S22). Then, steps S23 to S25 are repeated to determine the processing time for each selection result 522a that minimizes the difference between the composite processing result 527 and the reference processing result 51. The composite processing result 527 that minimizes the difference with the reference processing result 51, and the processing time for each selection result 522a corresponding to the composite processing result 527, are stored in the storage unit 801 in association with the group of selection results selected in step S22.

[0087] In the search support device 8, steps S22 to S25 are performed for all groups of selection processing results. For each group of selection processing results, the composite processing result 527 that has the smallest difference from the reference processing result 51, and the processing time for each selection processing result 522a corresponding to the composite processing result 527 are determined and stored in the storage unit 801.

[0088] In the above example, for each of the following cases where the group of selection results includes 21 cases containing 2 selection results 522a, 35 cases containing 3 selection results 522a, 35 cases containing 4 selection results 522a, 21 cases containing 5 selection results 522a, 7 cases containing 6 selection results 522a, and 1 case containing 7 selection results 522a, the composite processing result 527 that has the smallest difference from the standard processing result 51, and the processing time for each selection result 522a corresponding to the composite processing result 527 are determined.

[0089] Once it is confirmed that there are no unexamined selection result groups, the search unit 803 finds the composite processing result 527 (hereinafter also called the "optimal composite processing result") among the composite processing results 527 corresponding to all selection result groups stored in the storage unit 801 that has the smallest difference from the reference processing result 51 (step S27). The composite processing result 527 (i.e., the optimal composite processing result) obtained in step S27 is displayed on the display 86, as illustrated in Figure 16. The display 86 also displays the processing time for each selection processing result 522a in the selection result group corresponding to the optimal composite processing result (step S28).

[0090] The display mode on the display 86 is substantially the same as that shown in Figure 11. Specifically, in the second window 862, each selected processing result 522a corresponding to the optimal composite processing result is displayed brightly, while other processing results 522 are displayed dimly. In addition, a check mark is displayed in the checkbox 524 of each selected processing result 522a corresponding to the optimal composite processing result. In the first window 861, the composite processing result 527, which is the optimal composite processing result, is displayed in a way that allows comparison with the reference processing result 51. The first window 861 also displays the processing time corresponding to each selected processing result 522a, as well as the total processing time.

[0091] In this way, by using the search support device 8, it is possible to easily find combinations of multiple processing conditions 521 (see Figure 6) that can achieve a processing result close to the standard processing result 51. In other words, the search support device 8 makes it easier to search for processing conditions 521.

[0092] In the search support device 8, multiple types of reference processing results 51 may be pre-stored in the storage unit 801. In this case, for example, an operator selects one reference processing result 51, and the search unit 803 finds the optimal composite processing result that minimizes the difference with the selected reference processing result 51. The operator's selection of one reference processing result 51 is performed, for example, in the initial screen display of the display 86, as shown in Figure 17. Specifically, multiple icons 51a of reference processing results 51 are displayed in the first window 861, and the operator selects a corresponding reference processing result 51 by clicking on one of the icons 51a using a mouse 87b or the like. The selected icon 51a is highlighted as shown in Figure 17, and the selected reference processing result 51 is displayed largely at the bottom of the first window 861.

[0093] Then, the optimal composite processing result that minimizes the difference from the selected standard processing result 51 is determined in much the same manner as described above, and a check mark is displayed in the checkbox 524 of each selected processing result 522a corresponding to the optimal composite processing result. In addition, each selected processing result 522a corresponding to the optimal composite processing result is displayed brightly, while the other processing results 522 are displayed dimly. The composite processing result 527, which is the optimal composite processing result, is displayed in the first window 861 in a manner that allows comparison with the standard processing result 51. The processing time corresponding to each selected processing result 522a, as well as the total processing time, are also displayed in the first window 861.

[0094] In the example shown in Figure 16, the selected processing result 522a corresponding to the optimal combined processing result is the processing result of Recipe 1 and Recipe 6. As shown in Figure 6, the type of processing liquid used for liquid processing of the substrate 9 is different in Recipe 1 and Recipe 6. Specifically, the processing liquid used in Recipe 1 is "liquid type A," and the processing liquid used in Recipe 6 is "liquid type B." In this case, as shown in Figure 18, after determining the optimal combined processing result in step S27 (i.e., determining the group of selected processing results corresponding to the optimal combined processing result), the processing order of liquid processing in Recipe 1 and Recipe 6 is determined based on the type of processing liquid used (step S31).

[0095] In step S31, the search unit 803 determines, for example, which of the liquid processing in recipe 1 and the liquid processing in recipe 6 should be executed first, based on information indicating the preferred order of use of processing liquids that is pre-stored in the memory unit 801 (hereinafter also referred to as "order of use information"). The order of use information is, for example, information indicating the relationship between the order in which multiple types of processing liquids are used and the likelihood of liquid splashing during processing, which causes particles. If the search unit 803 determines, for example, that it is preferable for the liquid processing using liquid type B (i.e., the liquid processing in recipe 6) to be executed first, then, as shown in Figure 19, when the optimal composite processing result is displayed in step S28, the execution order of the recipes corresponding to the selected processing result 522a is displayed in the first window 861 using arrows or the like.

[0096] In the example shown in Figure 17, the selected processing result 522a corresponding to the optimal composite processing result is the processing result of Recipe 1 and Recipe 7. As shown in Figure 6, Recipe 1 and Recipe 7 differ in whether or not the nozzle 241 oscillates during the liquid processing of the substrate 9. Specifically, in Recipe 1, the nozzle 241 oscillates, whereas in Recipe 7, the nozzle 241 does not oscillate and discharges the processing liquid while stationary in the first position described above (i.e., a position opposite the center of the upper surface 91 of the substrate 9 in the vertical direction). In this case, as shown in Figure 20, after determining the optimal composite processing result in step S27 (i.e., determining the group of selected processing results corresponding to the optimal composite processing result), the processing order of the liquid processing in Recipe 1 and Recipe 7 is determined based on whether or not the nozzle 241 oscillates (step S41).

[0097] In step S41, for example, based on information (hereinafter also referred to as "processing order information") that shows the relationship between the presence or absence of oscillation of the nozzle 241 and the preferred processing order, which is preferable to be executed first, between the liquid processing of recipe 1 and the liquid processing of recipe 7, is determined by the search unit 803. The processing order information is, for example, information that shows the relationship between the processing order of liquid processing with and without oscillation of the nozzle 241 and whether or not it is necessary to change the position of the nozzle 241 between these liquid processing processes, when these liquid processing processes are performed consecutively. If the search unit 803 determines, for example, that it is preferable for the liquid processing without oscillation (i.e., the liquid processing of recipe 7) to be performed first, then, as shown in Figure 21, when the optimal combined processing result is displayed in step S28, the execution order of the recipes corresponding to the selected processing result 522a is displayed in the first window 861 using arrows or the like.

[0098] In the search support device 8, in step S23 described above, the processing time for each selected processing result 522a is set so that the total processing time is less than or equal to the processing limit time (e.g., the reference processing time), but it is not necessarily limited to this. For example, after steps S21 to S27 described above have been performed and the optimal composite processing result has been obtained under the condition that the total processing time is less than or equal to the processing limit time, the processing limit time may be changed as shown in Figure 22 (step S51). The changed processing limit time in step S51 is longer than the original processing limit time. The changed processing limit time is, for example, a value obtained by multiplying the original processing limit time by a coefficient (e.g., 1.1) which is a real number greater than 1 and is stored in the storage unit 801 beforehand.

[0099] Next, under the condition that the total processing time is less than or equal to the modified processing limit, steps S22 to S27 described above are performed to obtain the optimal composite processing result. Then, the optimal composite processing result corresponding to the modified processing limit and the optimal composite processing result corresponding to the processing limit before the modification are compared (step S52). In the following explanation, the optimal composite processing result corresponding to the processing limit before the modification will also be referred to as the "optimal composite processing result before the modification," and the optimal composite processing result corresponding to the processing limit after the modification will also be referred to as the "optimal composite processing result after the modification."

[0100] If the difference between the modified optimal composite processing result and the reference processing result 51 is smaller than the difference between the original optimal composite processing result and the reference processing result 51 (i.e., the modified optimal composite processing result is closer to the reference processing result 51), the display 86 displays both the modified and original optimal composite processing results side by side (step S53). This allows the operator to consider the processing conditions of the substrate 9 from the perspective of both total processing time and the difference from the reference processing result 51. On the other hand, if the difference between the modified optimal composite processing result and the reference processing result 51 is greater than or equal to the difference between the original optimal composite processing result and the reference processing result 51, the display 86 displays only the original optimal composite processing result (step S54).

[0101] In the above example, the processing time limit is changed only once, but this change may be made two or more times. For example, the processing time limit may be increased by a predetermined increment (e.g., 5 seconds). The change in the processing time limit and the calculation of the optimal composite processing result may be performed a predetermined number of times. Alternatively, the change in the processing time limit and the calculation of the optimal composite processing result may be performed until the difference between the optimal composite processing result and the standard processing result 51 after the "N+1th" (N is an integer of 1 or more) change in the processing time limit is greater than or equal to the difference between the optimal composite processing result and the standard processing result 51 after the "Nth" change in the processing time limit. In either case, the display 86 will show the optimal composite processing results after the change that are closer to the standard processing result 51 than the optimal composite processing results before the change, along with the optimal composite processing results before the change.

[0102] As described above, the search support device 8 is a device that assists in searching for processing conditions in the substrate processing apparatus 1, which performs liquid processing on the substrate 9. The search support device 8 comprises a storage unit 801, a processing result calculation unit 802, and a display unit (i.e., a display 86). The storage unit 801 stores a reference processing result 51, which is the processing result of the substrate 9 in which the uniformity of the surface state after liquid processing is above a predetermined reference state. The storage unit 801 also stores processing result information 52. The processing result information 52 is information that associates a plurality of processing results 522, which show the result of performing liquid processing on the substrate 9 for a unit processing time under each of a plurality of processing conditions 521, with the plurality of processing conditions 521.

[0103] The processing result calculation unit 802 calculates a composite processing result 527 by multiplying each selected processing result 522a, which is a set of two or more processing results 522 selected from the plurality of processing results 522, by a processing time ratio and then summing them up. The processing time ratio is the value obtained by dividing the processing time arbitrarily set for each selected processing result 522a by the unit processing time. The display 86 displays each selected processing result 522a and the processing time corresponding to each selected processing result 522a. The display 86 also displays the composite processing result 527 and the reference processing result 51 in a comparable manner. This makes it possible to search for processing conditions 521 as described above.

[0104] As described above, it is preferable that the display 86 also displays multiple processing results 522. This allows the operator to easily select a processing result 522a. Furthermore, when a processing result 522a is selected by the search unit 803, the operator can easily see which processing result 522 has been selected.

[0105] As described above, in the search support device 8, it is also preferable that one of the multiple processing results 522 is displayed on the display 86 as the initial selection processing result before the selection of the group of selection processing results is made. This makes it easier for the operator to select the selection processing result 522a.

[0106] As described above, it is also preferable that the search support device 8 displays on the display 86 a list of possible processing times (a pull-down menu 531 in the example shown in Figure 12) that can be set for each selected processing result 522a. This prevents the setting of unfeasible processing times and makes it easier to set processing times for the selected processing results 522a.

[0107] As described above, it is also preferable that the search support device 8 displays an alternative means (a pull-down menu 532 in the example shown in Figure 13) on the display 86 if the processing time set for each selection processing result 522a exceeds a predetermined threshold. This allows the operator to easily find out what the alternative means are when the processing time exceeds the threshold.

[0108] As described above, it is also preferable that the search support device 8 determines the processing order of two or more liquid processes corresponding to two or more selected processing results 522a included in the group of selected processing results, based on processing timings suitable for each of the two or more liquid processes (see Figure 14). This allows the liquid processes corresponding to the selected processing results 522a to be executed at appropriate processing timings.

[0109] As described above, it is preferable that the search support device 8 further comprises a search unit 803. The search unit 803 changes the processing time corresponding to each selection processing result 522a and determines the processing time corresponding to each selection processing result 522a that minimizes the difference between the composite processing result 527 and the reference processing result 51. This makes it possible to automatically determine the processing time for each selection processing result 522a in order to realize a composite processing result 527 that approximates the reference processing result 51.

[0110] As described above, when the search unit 803 changes the processing time corresponding to each selection processing result 522a, it is preferable that the sum of the processing times corresponding to each selection processing result 522a (i.e., the total processing time) be less than or equal to the base processing time, which is the processing time required to obtain the base processing result 51. In other words, it is preferable that the processing limit time mentioned above is the base processing time. This makes it possible to automatically determine the processing time for each selection processing result 522a in order to realize a composite processing result 527 that approximates the base processing result 51, while preventing an increase in the total processing time.

[0111] As described above, it is preferable for the search unit 803 to change the processing time corresponding to each selected processing result 522a within a range greater than or equal to a predetermined lower limit processing time. This allows for optimal liquid processing under the processing conditions 521 corresponding to each selected processing result 522a.

[0112] As described above, it is preferable for the search unit 803 to also change the selected processing result 522a included in the group of selected processing results among the plurality of processing results 522, and to determine the group of selected processing results that minimizes the difference between the composite processing result 527 and the reference processing result 51. This makes it possible to automatically determine the combination of selected processing results 522a that realizes a composite processing result 527 that approximates the reference processing result 51, and the processing time for each selected processing result 522a.

[0113] As described above, it is also preferable that, after determining the group of selected processing results, the search unit 803 determines the processing order of two or more liquid treatments corresponding to two or more selected processing results 522a included in the group of selected processing results, based on the types of processing liquids used in each of the two or more liquid treatments. This makes it possible to obtain a processing order that can suppress the occurrence of liquid splashing and the like caused by the order of liquid treatments in the second example. The first example is substantially the same.

[0114] As described above, it is also preferable that, after determining the group of selected processing results, the search unit 803 determines the processing order of two or more liquid processes corresponding to two or more selected processing results 522a included in the group of selected processing results, based on whether or not the nozzle 241 oscillates during those two or more liquid processes. This suppresses the occurrence of changes in the position of the nozzle 241 between the two or more liquid processes in the second example, thereby suppressing an increase in the total processing time. The first example is substantially the same.

[0115] As described above, in the search support device 8, it is also preferable that the reference processing result 51 is a measured value of the surface state of the substrate 9 treated with liquid in one substrate processing device 1. This makes it possible to obtain processing results similar to those of the one substrate processing device 1 in other substrate processing devices 1. As a result, it is possible to reduce the inter-device differences in processing results among multiple substrate processing devices 1. The same applies to multiple substrate processing systems 10.

[0116] The above-described search support method includes the steps of: preparing a reference processing result 51 which is the processing result of a substrate 9 in which the uniformity of the surface state after liquid treatment is above a predetermined reference state, and processing result information 52 which associates a plurality of processing results 522 which show the result of performing liquid treatment on the substrate 9 for a unit processing time under each of a plurality of processing conditions 521 with the plurality of processing conditions 521, respectively (steps S11, S21); obtaining a composite processing result 527 by multiplying each selected processing result 522a, which is a set of two or more processing results 522 selected from the plurality of processing results 522, by a value obtained by dividing the processing time by the unit processing time (i.e., processing time ratio) and summing them up in a selected processing result group which is a set of two or more processing results 522 selected from the plurality of processing results 522 (steps S14, S24); and displaying each selected processing result 522a and the processing time corresponding to each selected processing result 522a, and displaying the composite processing result 527 and the reference processing result 51 in a comparable manner (steps S15, S28). This makes it possible to easily search for the processing condition 521, similar to the above.

[0117] As described above, when the program 882 is executed on the computer, the following steps are performed (steps S11, S21): a standard processing result 51 which is the processing result of the substrate 9 in which the uniformity of the surface state after liquid treatment is above a predetermined standard state, and processing result information 52 which associates a plurality of processing results 522 which show the result of performing liquid treatment on the substrate 9 for a unit processing time under each of a plurality of processing conditions 521 with the plurality of processing conditions 521; a selected processing result group which is a set of two or more processing results 522 selected from the plurality of processing results 522, and for each selected processing result 522a included in the selected processing result group, a value obtained by dividing the processing time by the unit processing time (i.e., processing time ratio) and summing them up to obtain a composite processing result 527 (steps S14, S24); and a display of each selected processing result 522a and the processing time corresponding to each selected processing result 522a, and a display of the composite processing result 527 and the standard processing result 51 in a comparable manner (steps S15, S28). This makes it possible to easily search for the processing condition 521, similar to the above.

[0118] Various modifications are possible to the search support device 8, search support method, and program 882 described above.

[0119] For example, the reference processing result 51 does not necessarily have to be a measured value of the surface state of a substrate 9 treated with liquid in a single substrate processing apparatus 1, and may be arbitrarily set by an operator or the like.

[0120] The aforementioned lower processing time limit does not necessarily need to be set. Furthermore, the aforementioned processing limit does not necessarily have to be the standard processing time and can be varied.

[0121] In the search support device 8, if only a semi-manual search for processing conditions is performed by the operator, the search unit 803 may be omitted.

[0122] The manner in which the reference processing result 51 and processing result information 52, etc., are displayed on the display 86 is not limited to the above example and may be changed in various ways.

[0123] The liquid treatment performed on the substrate 9 by the substrate processing apparatus 1 is not necessarily limited to wet etching and can be changed in various ways. Similarly, the processing conditions supported by the search support device 8 are not limited to the above example and can be changed in various ways.

[0124] The substrate processing apparatus 1 may be used for liquid treatment of glass substrates used in flat panel displays such as liquid crystal displays or organic electroluminescence (EL) displays, or glass substrates used in other displays, in addition to semiconductor substrates. Furthermore, the substrate processing apparatus 1 described above may be used for liquid treatment of substrates for optical discs, magnetic discs, magneto-optical discs, photomasks, ceramic substrates, and solar cells.

[0125] The configurations in the above embodiments and each modified example may be combined as appropriate, as long as they do not contradict each other.

[0126] Although the invention has been described in detail, the above description is illustrative and not limiting. Therefore, it can be said that numerous modifications and embodiments are possible as long as they do not deviate from the scope of the present invention.

[0127] 1 Substrate processing device 8 Search support device 9 Substrate 51 Reference processing result 52 Processing result information 86 Display 241 Nozzle 521 Processing conditions 522 Processing result 522a Selected processing result 527 Combined processing result 801 Storage unit 802 Processing result calculation unit 803 Search unit 882 Program S11-S17, S21-S28, S31, S41, S51-S54 Step TL Lower limit processing time TS Unit processing time

Claims

1. A search support device for assisting in the search for processing conditions in a substrate processing apparatus that performs liquid processing on a substrate, comprising: a storage unit that stores processing result information relating a plurality of processing results, which are processing results of a substrate in which the uniformity of the surface state after liquid processing is equal to or greater than a predetermined standard state, and a plurality of processing conditions, which are the results of performing liquid processing on the substrate for a unit processing time for each of the plurality of processing conditions; a processing result calculation unit that calculates a composite processing result by multiplying each selected processing result, which is a set of two or more processing results selected from the plurality of processing results, by a value obtained by dividing the processing time by the unit processing time and then summing them up; and a display unit that displays each selected processing result and the processing time corresponding to each selected processing result, and displays the composite processing result and the standard processing result in a comparable manner.

2. A search support device according to claim 1, wherein the display unit also displays the plurality of processing results.

3. A search support device according to claim 1 or 2, wherein one of the plurality of processing results is displayed on the display unit as an initial selection processing result before the group of selection processing results is selected.

4. A search support device according to claim 1 or 2, wherein a list of candidate processing times that can be set for each selection processing result is displayed on the display unit.

5. A search support device according to claim 1 or 2, wherein if the processing time set for each selection processing result exceeds a predetermined threshold, an alternative means is displayed on the display unit.

6. A search support device according to claim 1 or 2, wherein the processing order of two or more liquid processes corresponding to two or more selection processing results included in the group of selection processing results is determined based on processing timings suitable for each of the two or more liquid processes.

7. A search support device according to claim 1 or 2, further comprising a search unit that changes the processing time corresponding to each of the selection processing results and determines the processing time corresponding to each of the selection processing results that minimizes the difference between the composite processing result and the reference processing result.

8. A search support device according to claim 7, wherein when the search unit changes the processing time corresponding to each of the selection processing results, the sum of the processing times corresponding to each of the selection processing results is less than or equal to the reference processing time, which is the processing time for obtaining the reference processing result.

9. A search support device according to claim 7, wherein the search unit changes the processing time corresponding to each selection processing result within a range greater than or equal to a predetermined lower limit processing time.

10. A search support device according to claim 7, wherein the search unit also changes the selection processing results included in the selection processing result group from among the plurality of processing results, and determines the selection processing result group that minimizes the difference between the composite processing result and the reference processing result.

11. A search support device according to claim 10, wherein the search unit, after determining the group of selected processing results, determines the processing order of two or more liquid processes corresponding to two or more selected processing results included in the group of selected processing results, based on the types of processing liquids used in each of the two or more liquid processes.

12. A search support device according to claim 10, wherein the search unit, after determining the group of selected processing results, determines the processing order of two or more liquid processes corresponding to two or more selected processing results included in the group of selected processing results, based on whether or not there is oscillation of the nozzle in the two or more liquid processes.

13. A search support device according to claim 1 or 2, wherein the reference processing result is a measured value of the surface state of a substrate treated with liquid in a single substrate processing device.

14. A search support method for assisting in the search for processing conditions in a substrate processing apparatus that performs liquid processing on a substrate, comprising: a) a step of preparing processing result information which is a processing result of a substrate in which the uniformity of the surface state after liquid processing is equal to or greater than a predetermined standard state, and a plurality of processing results which are shown as the result of performing liquid processing on the substrate for a unit processing time for each of the plurality of processing conditions, and the plurality of processing conditions, respectively; b) a step of obtaining a composite processing result by multiplying each selected processing result, which is a set of two or more processing results selected from the plurality of processing results, by a value obtained by dividing the processing time arbitrarily set by the unit processing time, and then summing them up; c) a step of displaying each selected processing result and the processing time corresponding to each selected processing result, and displaying the composite processing result and the standard processing result in a comparable manner.

15. A computer-readable program for assisting in the search for processing conditions in a substrate processing apparatus that performs liquid processing on a substrate, wherein when the program is executed on a computer, the following steps are performed: a) preparing processing result information which is a reference processing result which is a processing result of a substrate in which the uniformity of the surface state after liquid processing is above a predetermined reference state, and a plurality of processing results which are shown as the result of performing liquid processing on the substrate for a unit processing time for each of a plurality of processing conditions, and the plurality of processing conditions are associated with each of the plurality of processing conditions; b) obtaining a composite processing result in a selected processing result group which is a set of two or more processing results selected from the plurality of processing results, by multiplying each selected processing result, which is each processing result included in the selected processing result group, by a value obtained by dividing an arbitrarily set processing time by the unit processing time and summing them up; c) displaying each of the selected processing results and the processing time corresponding to each selected processing result, and displaying the composite processing result and the reference processing result in a comparable manner.

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