Valve arrangement for influencing a gas flow, and fluid system

Abstract

The invention relates to a valve arrangement (11; 61) for influencing a gas flow, comprising: a valve housing (17; 67) in which a fluid channel (40; 90) extending from an inlet port (18; 68) to a working port (19; 69) is formed; a valve member (37; 87) which is held for movement between a first functional position and a second functional position in the fluid channel (40; 90); a drive device (38; 88) designed to impart motion to the valve member (37; 87); a controller (12; 62) designed to provide energy to the drive device (38; 88); and a sensor arrangement which comprises an inlet pressure sensor (21) and a working pressure sensor (22; 72) and is electrically connected to the controller (12; 62), wherein the controller (12; 62) is designed for regulated control of the drive device (38; 88) for pressure regulation, flow regulation or mass-flow regulation, and wherein the controller (12; 62) is designed to provide output signals to a communication interface (28; 78).

Description

[0001] P 35602

[0002] October 30, 2024

[0003] Festo 5E & Co. KG, Ruiter Straße 82, 73734 Esslingen

[0004] Valve arrangement for influencing a gas flow and fluid system

[0005] The invention relates to a valve arrangement for influencing a gas flow and a fluid system with such a valve arrangement.

[0006] Valve arrangements known from the prior art are marketed by the applicant purely as examples under the designation VEAA / VEAB (3-way proportional pressure control valves) and under the designation VEMD (proportional flow control valve).These valve arrangements are each designed to influence a gas flow and comprise a valve housing in which a fluid channel is formed extending from an inlet port to a working port, as well as at least one valve element movably mounted in the fluid channel between a first functional position and a second functional position, to which a drive device is assigned, which is designed to initiate movement on the valve element, and a control device, which is designed to supply energy to the drive device, and a sensor arrangement comprising an inlet pressure sensor and a working pressure sensor, which is electrically connected to the control device, wherein the control device is designed for controlled actuation of the drive device for pressure regulation or flow regulation or mass flow regulation.

[0007] P 35602

[0008] 30 October 2024 For example, a magnetic coil drive or a piezo drive, in particular in the form of a piezo bender, can be used as a drive device for the valve element.

[0009] The control unit can be integrated into the valve housing; alternatively, the valve housing, together with the at least one valve element contained therein, the actuator, and the sensor arrangement, forms a first functional module, and the control unit forms a second functional module, which is electrically connected to the first functional module. With such a modular design for the valve arrangement, it is also possible for the control unit to be configured to control several first functional modules, as is the case, purely by way of example, with the proportional valve manifold designated VTEP, which is marketed by the applicant.

[0010] The task of the invention is to provide a valve arrangement for influencing a gas flow as well as a fluid system with an extended range of functions.

[0011] This problem is solved for a valve arrangement of the type mentioned above by connecting the controller to a communication interface and configuring it to provide output signals to the communication interface. This enables either unidirectional communication from the controller via the communication interface to a communication participant connected to the communication interface, or bidirectional communication between the controller and the communication participant connected via the communication interface. Preferably, the communication participant is a higher-level controller, for example, a machine controller, in particular a

[0012] P 35602

[0013] October 30, 2024, a programmable logic controller (PLC). The communication participant is particularly preferably configured to process the output signals provided by the controller to the communication interface in order to control other components, such as valves and / or actuators, and / or to provide information to a user. This information includes, for example, status information derived from the output signals of the valve assembly, which allows, for example, conclusions to be drawn about the operating condition and / or wear condition of the valve assembly and / or a gas consumer connected to the valve assembly.

[0014] The valve arrangement can be designed as a switching valve, in which case a clocked control of the drive device is provided, in particular using a pulse width modulated control signal provided by the control system.

[0015] Preferably, the valve arrangement is designed as a proportional valve, such that the actuator causes movement of the valve element depending on the signal level of a control signal provided by the controller. A unique relationship between the signal level and the position of the valve element is preferably implemented. It is particularly preferred that a change in the position of the valve element is proportionally related to the signal level of the control signal.

[0016] A 2 / 2-way valve, arranged between the inlet and working ports, is sufficient to implement a mass flow controller. This 2 / 2-way valve can be implemented, in particular, as a solenoid valve or a fluidically piloted valve.

[0017] P 35602

[0018] 30 October 2024 valve or as a piezo valve, in particular as a piezo bending valve.

[0019] In order to enable the determination of a mass flow rate through the valve arrangement, a differential pressure measurement is preferably carried out in the fluid channel between the inlet port and the working port.

[0020] In a first embodiment of a valve arrangement usable as a mass flow controller, a proportional valve is arranged between the inlet and outlet ports. A first pressure measurement is taken in the fluid channel (upstream) before the proportional valve using an inlet pressure sensor, and a second pressure measurement is taken in the fluid channel (downstream) after the proportional valve using a working pressure sensor. From the pressure difference determined between the inlet and outlet pressure sensors, and incorporating information about the valve opening opened by the proportional valve and a valve characteristic curve that represents the flow resistance of the proportional valve for each valve opening and for each pressure level present in the fluid channel, a flow measurement and thus a determination of the mass flow rate can be performed.

[0021] In a second embodiment of a valve arrangement designed as a mass flow controller, a proportional valve and a throttle are arranged between the inlet port and the working port, preferably with the throttle being arranged between the proportional valve and the working port. In this case, a differential pressure measurement is performed with an internal pressure sensor arranged between the proportional valve and the throttle, and another between the throttle and the working port.

[0022] P 35602

[0023] The working pressure sensor ordered on October 30, 2024, was installed. The determined differential pressure can then be converted into the required flow rate and mass flow rate by taking into account a throttle characteristic curve and a pressure level present in the fluid channel.

[0024] To implement a pressure regulator, the valve arrangement includes a 3 / 2-way valve, so that, depending on the position of the valve element, either gas is supplied to the gas consumer or gas is discharged from the gas consumer. In this case, the fluid channel extends from the working port to an outlet port, through which gas can flow out of the gas consumer.

[0025] When using piezoelectric bending valves for the pressure regulator, preferably two 2 / 2-way valves that can be controlled separately by the control system are provided, wherein a first 2 / 2-way valve is arranged between the inlet port and the working port and wherein a second 2 / 2-way valve is arranged between the working port and the outlet port.

[0026] Advantageous further developments of the invention are the subject of the dependent claims.

[0027] It is advantageous if the control system is designed to provide a working pressure signal from the working pressure sensor as an output signal to the communication interface. Depending on the application for which the valve assembly is used, the working pressure signal can be used to draw conclusions about the operating condition and / or wear state of the gas consumer connected to the valve assembly. For example, the valve assembly is intended to supply a

[0028] P 35602

[0029] October 30, 2024, a gas consumer, in particular a storage container for semiconductors or a metering device for dosing aqueous, viscous, or pasty substances, is used, and that a known flow resistance for the gas supplied to the gas consumer by the valve assembly is the basis for the proper functioning of the gas consumer. If a change in flow resistance occurs during the operation of the gas consumer, for example, due to contamination of a filter arranged between the valve assembly and the storage container or due to changes in the metering characteristics of the metering device, which can be caused, for example, by partial clogging of a pipette tip, this change can be determined from the operating pressure signal.For example, the operating pressure signal is evaluated by a higher-level controller connected to the communication interface of the valve assembly via a communication line. If a predefined threshold for the operating pressure signal is exceeded, the higher-level controller can issue a message. This message could, for instance, inform an operator who needs to check or replace the filter upstream of the storage tank or inspect the dosing device. Alternatively, this message could prompt an electronic maintenance system connected to the higher-level controller to automatically replace the filter or a pipetting tip of the dosing system.These application examples for the working pressure signal are purely illustrative; other types of gas consumers and other reactions to a change in the working pressure signal can also be provided.

[0030] P 35602

[0031] October 30, 2024. Preferably, the control system is configured to provide an input pressure signal from the input pressure sensor and / or an internal pressure signal from an internal pressure sensor to the communication interface. The additional provision of the input pressure signal supports the evaluation of the working pressure signal described above, since changes in the working pressure signal can also be caused by changes in the input pressure at the valve assembly and the associated input pressure signal.

[0032] In a further development of the invention, the control system is configured to provide a value of a physical quantity, in particular a flow rate or mass flow rate, calculated from the input pressure signal and / or the internal pressure signal and the working pressure signal, to the communication interface. For this purpose, the control system is preferably designed as a microcomputer or microcontroller capable of processing a computer program that can also perform complex calculations. For example, the control system can be configured to calculate a difference between the input pressure signal and the working pressure signal, or a difference between an input pressure determined from the input pressure signal and a working pressure determined from the working pressure signal.Alternatively, the control system can be configured to calculate a difference between the internal pressure signal and the working pressure signal, or a difference between an internal pressure determined from the internal pressure signal and a working pressure determined from the working pressure signal. It is particularly preferred that the control system calculates the difference between the inlet pressure and the working pressure, or the difference between the internal pressure and the working pressure.

[0033] P 35602

[0034] October 30, 2024 Inclusion of further physical quantities such as a flow resistance in the fluid channel, in particular a flow rate and / or a mass flow rate for a gas flow through the valve arrangement determined by the valve position and the valve characteristic curve of the proportional valve or by the throttle characteristic curve of the throttle, and output at the communication interface.

[0035] In a further embodiment of the invention, the control system is designed to select an operating mode for the control of the drive device from the group consisting of: pressure control, flow control, pressure control with superimposed flow control, and flow control with superimposed pressure control, depending on an input signal present at the communication interface. For example, a higher-level control system, connected to the communication interface via a communication line, provides an input signal to the communication interface depending on predefined operating requirements of a machine or system that is controlled and monitored by the higher-level control system.This input signal contains, for example, an instruction to the control unit of the valve assembly regarding the operating mode of the actuator, in order to provide pressure control or flow control for the gas flow that can pass through the valve assembly. Additionally, it can be provided that flow control is superimposed on the pressure control in order, for example, to first fill a storage container for semiconductors as quickly as possible with an inert gas outlet (e.g., nitrogen) during pressure control, and then, after reaching a predetermined target pressure, to switch to flow control, which maintains a constant gas flow through the storage container.

[0036] P 35602

[0037] October 30, 2024. It is advantageous if the controller is designed to provide analog output signals to the communication interface. The use of analog output signals is particularly relevant when the valve assembly is to be integrated into an existing machine or system that is based at least partially or possibly exclusively on analog signal transmission.

[0038] Additionally or alternatively, the controller is designed to provide output signals in a digital data format, particularly from the Modbus, EtherCAT, and IO-Link groups, via the communication interface. The underlying digital signal transmission ensures advantageous integration of the valve assembly into machines or systems that already utilize digital signal transmission. Modbus and EtherCAT are bus communication protocols that allow the controller to supply output signals to a large number of bus participants. IO-Link, on the other hand, is a point-to-point connection that enables digital communication between an IO-Link master and an IO-Link slave.

[0039] In a further embodiment of the invention, it is provided that the communication interface is a digital interface, in particular as an RS-485 interface or as an EtherCAT interface or as an IO-Link interface.

[0040] It is advantageous if the inlet pressure sensor and the working pressure sensor are designed as relative pressure sensors, and if the sensor arrangement additionally includes an absolute pressure sensor for measuring ambient pressure. A relative pressure sensor is used to detect a pressure difference between the respective measuring point, for example, the

[0041] P 35602

[0042] October 30, 2024, inlet port or working port, and the environment, and thus provides a pressure signal that depends on both the pressure at the measuring point and the ambient pressure. However, to enable reliable pressure control, flow control, or mass flow control, knowledge of the absolute pressure level is required. This absolute pressure level is determined using the absolute pressure sensor associated with the sensor arrangement and is calculated in the control system along with the pressure signals from the inlet pressure sensor and the working pressure sensor. If the valve arrangement has an internal pressure sensor, this is preferably designed as a relative pressure sensor.

[0043] Preferably, the valve element is arranged in the fluid channel between the inlet pressure sensor and the working pressure sensor. Typically, the valve element is configured to close a valve seat formed in the fluid channel in the first operating position and to release it in the second operating position. The valve element can be configured for an end-face seal against an axially oriented sealing surface in the fluid channel, in which case a valve arrangement with such a valve element and valve seat is referred to as a poppet valve element. Alternatively, the valve element can serve for a radial seal against a section of the fluid channel acting as a valve seat, in which case a valve arrangement with such a valve element and valve seat is referred to as a spool valve.By positioning the valve element and the associated valve seat between the inlet pressure sensor and the working pressure sensor, flow rate or mass flow rate determination can be performed in the control system based on the pressure differential that arises when gas flows through the fluid channel between the inlet pressure sensor and the working pressure sensor. As an additional measure, the valve element may be equipped with an auger.

[0044] P 35602

[0045] October 30, 2024. A position sensor is assigned to the valve housing, which enables the precise determination of the valve element's position between the first and second operating positions. Using the valve element's position and a valve characteristic curve, a flow resistance for the valve assembly can be determined for each valve position, with this flow resistance forming the basis for determining the flow rate or mass flow rate.

[0046] In a further embodiment of the invention, a throttle from the group consisting of static throttles and adjustable throttles is arranged in the fluid channel between the internal pressure sensor and the working pressure sensor. With a throttle, preferably arranged downstream of the valve element in the fluid channel, a pressure difference caused by the throttle can be precisely predicted for the respective gas flow through the fluid channel. This pressure difference is determined from the internal pressure signal of the internal pressure sensor, which is arranged upstream of the throttle, and the working pressure signal of the working pressure sensor, which is arranged downstream of the throttle, and enables a precise conclusion to be drawn about the flow rate or mass flow in the fluid channel.Preferably, a measuring point for the internal pressure sensor is arranged directly upstream of the throttle and a measuring point for the working pressure sensor is arranged directly downstream of the throttle, as this enables precise differential pressure determination.

[0047] The problem of invention is solved according to a further aspect of invention for a fluid system by the fact that the fluid system comprises the valve arrangement according to the invention, wherein the inlet port of the valve arrangement is connected to a gas source, in particular a compressed air source or a

[0048] P 35602

[0049] October 30, 2024, nitrogen source, and wherein a gas consumer is connected to the working port of the valve arrangement, and wherein a higher-level controller is connected to the communication interface of the valve arrangement via a communication line, the higher-level controller being configured to evaluate the output signals provided by the controller. Such a fluid system can be used, for example, in the manufacture of semiconductors, in which case it may be provided that the gas source is configured to provide an inert gas, in particular nitrogen, and that the gas consumer is a storage container for semiconductors, which requires a continuous supply of inert gas for the proper storage of the semiconductors in order to prevent unwanted ingress of ambient air.The fluid system can also be used in industrial production, for example, to dispense an aqueous, viscous, or pasty adhesive onto workpieces. In such applications, the gas source can be, for example, a compressed air source, and the gas consumer is a dispensing device where the adhesive is applied to the workpiece from a reservoir via a pipette tip using compressed air. For these purely exemplary applications, as well as for a multitude of other uses, a communication line is provided at the communication interface of the valve assembly. This line is designed to transmit the output signals provided by the controller to a higher-level controller.This higher-level control system is, for example, a programmable logic controller (PLC) used to control a semiconductor processing machine or an assembly device for workpieces to be glued.

[0050] P 35602

[0051] October 30, 2024. The higher-level control system preferably comprises a microcontroller or microprocessor configured to execute a computer program, whereby this computer program can be used to evaluate the output signals provided by the control system. As a result of this evaluation, for example, status information can be provided to an operator, the status information being directed at whether the gas consumer is functioning properly or whether maintenance of the gas consumer needs to be scheduled or carried out immediately within a defined time window.

[0052] In a further development of the fluid system, the higher-level control system is designed to determine the back pressure of the gas consumer, compare this back pressure with a back pressure threshold, and output a status signal when the back pressure matches the threshold. This procedure is intended for use when the valve arrangement is used for flow control or mass flow control. The back pressure that the gas consumer exerts against the gas flow passing through the valve arrangement at a given flow rate or mass flow is determined by the flow resistance of the gas consumer and can be used as a characteristic value for the gas consumer's state.Preferably, the working pressure signal from the working pressure sensor is used to determine the back pressure. This signal is provided by the controller to the higher-level controller via the communication interface. Furthermore, a back pressure threshold value is stored in the higher-level controller, which is compared with the currently determined back pressure.

[0053] P 35602

[0054] The system, dated October 30, 2024, is designed to output a status signal if the currently measured back pressure matches the back pressure threshold. For example, it can be provided that the status signal is only output if the currently measured back pressure matches the back pressure threshold for an extended period, such as several seconds or minutes. Furthermore, it can be provided that the status signal is also output if the currently measured back pressure exceeds the back pressure threshold for an extended period. In this case, the status signal can inform a user that maintenance of the gas consumer or the fluid system is required within a foreseeable, and in particular a predefined, timeframe.Additionally or alternatively, the status signal can inform the user that a malfunction of the gas consumer or fluid system is imminent or has already occurred.

[0055] In a further embodiment of the fluid system, the higher-level control system is designed to determine the back pressure profile for the gas consumer, the slope of the back pressure profile, and to output a status signal when the slope of the back pressure profile matches a predefined threshold value. This procedure is intended for use when the valve arrangement is used for flow control or mass flow control. For example, to determine the back pressure profile, the back pressure values ​​received by the higher-level control system within a predefined time period can be used to generate a curve, in particular a regression curve, and then the slope of the curve can be evaluated. In the course of this...

[0056] P 35602

[0057] October 30, 2024. Slope evaluation allows for a comparison of the maximum slope of the curve with a predefined slope threshold. If there is a match between the maximum slope and the threshold, a status signal is issued. With such slope determination, it is possible to detect changes in the back pressure applied by the gas consumer early on, before the back pressure threshold is reached, and to generate a status message to inform the user that maintenance of the gas consumer or the fluid system is required within a foreseeable, and in particular a predefined, timeframe. Additionally or alternatively, the status signal can inform the user that a malfunction of the gas consumer or the fluid system is imminent or has already occurred.

[0058] The task of invention is solved according to a further aspect of invention by a method for operating the fluid system according to invention, wherein the method comprises the following steps: providing a gas flow which is guided from the gas source through the valve arrangement to the gas consumer and processing an output signal in the higher-level control to determine status information that represents a usage state of the gas consumer.

[0059] Advantageous implementation methods of the invention are shown in the drawing. This shows:

[0060] Figure 1 shows a fluid system with a valve arrangement designed as a pressure regulator and a gas consumer designed as an adhesive metering device, and

[0061] P 35602

[0062] October 30, 2024 Figure 2 shows a fluid system with a valve arrangement formed as a flow regulator and a gas consumer designed as a storage container for semiconductors.

[0063] A fluid system 1 shown in Figure 1 is used for dispensing adhesive onto a workpiece (not shown). For this purpose, the fluid system 1 comprises, by way of example, a valve arrangement 11 designed as a pressure regulator, a higher-level control unit 2, a pipetting tip 3, a compressed air source 4, and a silencer 5.

[0064] The higher-level control 2 is, purely by way of example, a programmable logic controller (PLC) which is connected via a communication line 6 to a communication interface 28 of the valve arrangement 11 and which is designed for bidirectional communication with the valve arrangement 11.

[0065] The pipetting tip 3 symbolically represents a dosing system designed to dispense an adhesive onto a workpiece (not shown) when pressurized with compressed air. For this purpose, it is filled with adhesive in a manner not shown and connected via a working line 7 to a working port 19 of the valve arrangement 11, which is attached to an outer surface of the valve housing 17 (shown only schematically).

[0066] The compressed air source 4 is designed to supply compressed air to the valve assembly 11 and can, for example, be designed as an electrically driven piston pump. The compressed air source 4 is connected via a supply line 8 to an inlet port 18 of the valve assembly 11, which is located on the outer surface of the valve housing 17.

[0067] P 35602

[0068] October 30, 2024 Since the valve arrangement 11 is designed as a pressure regulator, in addition to the inlet port 18 and the working port 19, an outlet port 20 is required, which is arranged on the outer surface of the valve body 17 and to which an exhaust line 9 is connected, which is connected to a silencer 5.

[0069] The valve arrangement 11 includes a controller 12, which is implemented purely as an example microcontroller. A first relative pressure sensor 21 is electrically connected to the controller 12 via a first sensor line 13. A second relative pressure sensor 22 is electrically connected to the controller 12 via a second sensor line 14. A third relative pressure sensor 23 is electrically connected to the controller 12 via a third sensor line 15. An absolute pressure sensor 24 is electrically connected to the controller 12 via a fourth sensor line 16.

[0070] The first relative pressure sensor 21 is connected to the input port 18 via a first measuring line 25 and forms an input pressure sensor which provides a pressure signal to the control unit 12 via the first sensor line 13, the pressure signal of the first relative pressure sensor 21 being referred to as the input pressure signal.

[0071] The second relative pressure sensor 22 is connected to the working port 19 via a second measuring line 26 and forms a working pressure sensor which provides a pressure signal to the control unit 12 via the second sensor line 14, the pressure signal of the second relative pressure sensor 22 being referred to as the working pressure signal.

[0072] The third relative pressure sensor 23 is connected to the output terminal 20 via a third measuring line 27 and forms

[0073] P 35602

[0074] October 30, 2024, an output pressure sensor which provides a pressure signal to the control unit 12 via the third sensor line 15, wherein the pressure signal of the third relative pressure sensor 23 is referred to as the output pressure signal.

[0075] The absolute pressure sensor 24 is installed in the valve housing 17 in such a way that it can detect a pressure prevailing in the vicinity of the valve arrangement 11 and is connected to the control unit 12 via the fourth sensor line 16.

[0076] The control unit 12 is connected to a first solenoid valve 31 via a first control line 29. Furthermore, the control unit 12 is connected to a second solenoid valve 32 via a second control line 30. Each of the two solenoid valves 31, 32 can be individually controlled by the control unit 12 by supplying electrical energy. Instead of the two solenoid valves 31, 32, which are configured as 2 / 2-way valves, a single 3 / 2-way valve, in particular a magnetically actuated or fluidically piloted valve, could also be used.

[0077] The solenoid valves 31, 32 each have a valve element 37 and a drive unit 38 designed as a solenoid coil actuator, which are shown only schematically due to the illustration of the solenoid valves 31, 32. In practice, the valve element is formed by a rubber-elastic sealing element, which is fixed, for example, to an armature movably mounted in a solenoid coil and is used for selectively opening or sealing a valve seat opening.

[0078] For the operation of fluid system 1, it may be provided that a metering command is first sent from the higher-level control system 2 to the communication line 6.

[0079] P 35602

[0080] October 30, 2024, communication interface 28 is provided. For example, it is provided that before the dosing command arrives, the first solenoid valve 31 is closed to interrupt a fluid communication connection between the compressed air source 4. Furthermore, before the dosing command arrives, the second solenoid valve 32 may be open to ensure venting of the pipetting tip 3. Thus, at this time, the pipetting tip 3 is not pressurized.

[0081] Upon receipt of the metering command, the control unit 11 initiates a closing movement for the second solenoid valve 32 and an opening movement for the first solenoid valve 31, thus enabling a compressed air flow from the inlet port 18 through the first solenoid valve 31 to the working port 19. A first fluid line 41 extending from the inlet port 18 to the first solenoid valve 31, together with the first solenoid valve 31 and a line extending from the first solenoid valve 31, form the

[0082] The second fluid line 42 extended from 31 to the working port 19 and the fluid channel 40. A third fluid line 43 for coupling the second solenoid valve 32 and a line between the second solenoid valve 32 and the second solenoid valve are connected to the second fluid line 42.

[0083] The fourth fluid line 44 was connected to the 32 and the output port 20.

[0084] Due to the fluid communication between the compressed air source 4 and the working port 19, a pressure build-up occurs in the fluid channel 40. This pressure is measured as the working pressure by the second relative pressure sensor 22, processed in the controller 12, and made available as an output signal at the communication interface 28 for forwarding to the higher-level controller 2. Additionally, the input pressure signal provided by the first relative pressure sensor 21 and / or the signal from the third relative pressure sensor can also be used.

[0085] P 35602

[0086] The output pressure signal provided on October 30, 2024, is made available to the communication interface 28 after processing by the controller 12. Furthermore, the controller 12 processes the input pressure signal of the first relative pressure sensor 21 and the working pressure signal of the second relative pressure sensor 22 to obtain a flow rate value and a mass flow rate value. For this purpose, the controller 12 also incorporates the valve position of the first solenoid valve 31 and a valve characteristic curve of the first solenoid valve 31. The valve position of the first solenoid valve 31 can be estimated, for example, by determining a coil current supplied to the first solenoid valve 31. Alternatively, a valve position signal from a valve position sensor (not shown) can be used for this purpose.The valve characteristic curve is stored in the control unit 12 and was empirically determined on the basis of a series of measurements for the first solenoid valve 31.

[0087] In the higher-level control unit 2, the output signals provided at the communication interface 28 can then be further processed to obtain information about the operating status of the dosing system represented by the pipetting tip 3 and the valve arrangement 11, and, if necessary, to issue status messages or warnings if an undesired operating condition is imminent or has already occurred. These status messages or warnings can, for example, indicate that the dosing system will require maintenance in the foreseeable future (predictive maintenance) or that a malfunction of the dosing system has already occurred.

[0088] In the fluid system 51, as shown in Figure 2, for those components that are functionally equivalent

[0089] P 35602

[0090] October 30, 2024, as the components of the fluid system 1 according to Figure 1 are, with a reference number increased by 50, and a more detailed description is omitted. The piezo valve 81 has a valve element 87 and a piezoelectric actuator 88, which are shown only schematically due to the representation of the piezo valve 81.

[0091] The fluid system 51 is purely exemplary for a gas supply to a gas consumer designed as a storage container 53 for storing semiconductor products (not shown). It is assumed that the storage container 53 can be opened to receive or remove semiconductor products and then closed. In order to maintain a gas atmosphere inside the storage container 53 that meets the requirements for storing the semiconductor products, the storage container 53 is not completely sealed, but can be supplied with a continuous gas flow, in particular a nitrogen flow, by the fluid system 51. To prevent contamination of the semiconductor products stored in the storage container 53, a filter 85, which can be designed, for example, as a membrane filter, is arranged between the valve assembly 61 and the storage container 53.

[0092] The valve arrangement 61 comprises a valve housing 67, which is penetrated by a fluid channel 90. The fluid channel 90 extends from an inlet port 68 along the first fluid line 91 through the piezo valve 81, to which a second fluid line 92 extends to the throttle 84, and a third fluid line 93 is arranged downstream of the throttle 84 to the working port 69.

[0093] The control unit 62 is connected via the first sensor line 63 to the first relative pressure sensor 71, which is connected to

[0094] P 35602

[0095] 30 October 2024 provision of an internal pressure signal is designed, wherein the first measuring line 75 is connected to the fluid channel 90 downstream of the piezo valve 81 and upstream of the throttle 84.

[0096] Furthermore, the control unit 62 is connected via the second sensor line 63 to the second relative pressure sensor 72, which is fluidly connected via the second measuring line 76 to the working port 69 and is designed to provide a working pressure signal.

[0097] The absolute pressure sensor 74 is connected to the control unit 62 via the third sensor line 65.

[0098] Depending on a control signal that can be provided by the higher-level control unit 52 via the communication line 56 to the communication interface 78, the valve arrangement 61 can be operated both as a flow control or mass flow controller and as a pressure controller, since the storage tank 53 serving as a gas consumer has a defined leakage, so that a pressure reduction in the storage tank 53 can be achieved solely by reducing or blocking a gas supply to the storage tank 53 and does not require an additional vent valve, as is provided in the valve arrangement 11 according to Figure 1.

[0099] In principle, the valve arrangement 61 is intended to be operated as a flow control valve or mass flow control valve to ensure a defined gas supply from the gas source 54, designed as a nitrogen source, to the storage tank 53. For this purpose, the control unit 62 can determine a differential pressure across the throttle 84 based on the input pressure signals of the first relative pressure sensor 71 and the working pressure signals of the second relative pressure sensor 72. Furthermore, it can

[0100] P 35602

[0101] October 30, 2024, the control unit 62, taking into account the flow characteristics of the throttle 84, determines a flow rate or mass flow rate for the gas supplied by the gas source 54 and flowing through the fluid channel 90 from the determined differential pressure and, if necessary, influences the piezo valve 81 to adapt the actual gas flow (actual gas flow) to a predetermined gas flow (target gas flow).

[0102] Furthermore, the controller 62 can provide the working pressure signal of the second relative pressure sensor 72 as an output signal to the communication interface 78 to enable forwarding of this working pressure signal to the higher-level controller 52. In the higher-level controller 52, a back pressure can be determined from the working pressure signal, which is determined by the filter 85 and the storage tank 53. The determined back pressure can be compared in the higher-level controller 52 with a back pressure threshold, whereby a status signal can be output by the higher-level controller 52 if the determined back pressure matches the back pressure threshold. The threshold can be selected such that upon reaching the threshold, an immediate replacement of the filter 85 and / or maintenance work on the storage tank 53 is required.Alternatively, the threshold can be selected such that upon reaching the threshold, information is provided to an operator that a replacement of the filter and / or maintenance work on the storage tank 53 will be required in the near future.

[0103] P 35602

[0104] October 30, 2024

Claims

24 Claims 1. Valve arrangement (11; 61) for influencing a gas flow, comprising a valve housing (17; 67) in which a fluid channel (40; 90) is formed, extending from an inlet port (18; 68) to a working port (19; 69), and a valve element (37; 87) movably mounted in the fluid channel (40; 90) between a first functional position and a second functional position, as well as a drive unit (38; 88) configured for initiating movement on the valve element (37; 87), and a control unit (12; 62) configured for supplying energy to the drive unit (38; 88), and a sensor arrangement comprising an inlet pressure sensor (21) and a working pressure sensor (22; 72) and electrically connected to the control unit (12; 62), wherein the control unit (12; 62) for controlled control of the drive device (38;88) is configured for pressure control or flow control or mass flow control, characterized in that the control unit (12; 62) is connected to a communication interface (28; 78) and is configured to provide output signals to the communication interface (28; 78).

2. Valve arrangement (11; 61) according to claim 1, characterized in that the control unit (12; 62) is configured to receive a working pressure signal from the working pressure sensor (22; 72) as P 35602 October 30, 2024 To provide an output signal to the communication interface (28; 78).

3. Valve arrangement (11; 61) according to claim 2, characterized in that the control (12; 62) is configured to provide an input pressure signal from the input pressure sensor (21) and / or an internal pressure signal from an internal pressure sensor (71) to the communication interface (28; 78).

4. Valve arrangement (11; 61) according to claim 3, characterized in that the control unit (12; 62) is configured to provide a value of a physical quantity calculated from the input pressure signal and / or the internal pressure signal and the working pressure signal, in particular a flow rate value or a mass flow rate value, to the communication interface (28; 78).

5. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the control (12; 62) is designed to perform an operating mode for the control of the drive device (38; 88) from the group: pressure control, flow control, pressure control with superimposed flow control, flow control with superimposed pressure control, depending on an input signal applied to the communication interface (28; 78).

6. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the control (12; 62) is designed to provide analog and / or digital output signals to the communication interface (28; 78). P 35602 October 30, 2024 7. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the control (12; 62) for the provision of output signals in a digital data format, in particular from the group: Modbus, Ethercat, IO-Link, to the communication interface (28; 78) is trained.

8. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the communication interface (28; 78) is designed as a digital interface, in particular as an RS-485 interface or as an EtherCAT interface or as an IO-Link interface.

9. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the inlet pressure sensor (21) and the working pressure sensor (22; 72) are designed as relative pressure sensors and that the sensor arrangement additionally comprises an absolute pressure sensor (24; 74) for detecting an ambient pressure.

10. Valve arrangement (11; 61) according to one of the preceding claims, characterized in that the valve element (37; 87) is arranged in the fluid channel (40; 90) between the inlet pressure sensor (21) and the working pressure sensor (22; 72).

11. Valve arrangement (11; 61) according to claim 3, characterized in that a throttle (84) from the group: static throttle, adjustable throttle, is arranged in the fluid channel (40; 90) between the internal sensor (71) and the working pressure sensor (22; 72).

12. Fluid system (1; 51) with a valve arrangement (11; 61) according to one of the preceding claims, with a gas source (4; 54), in particular a compressed air source or a P 35602 October 30, 2024 27 nitrogen source connected to the input port (18; 68) of the valve assembly (11; 61), to a gas consumer (3; 53) connected to the working port (19; 69) of the valve (11; 61), and to a higher-level controller (2; 52) connected via a communication line (6; 56) to the communication interface (28; 78) of the valve assembly (11; 61) and configured for evaluating the output signals provided by the controller (12; 62).

13. Fluid system (1; 51) according to claim 12, characterized in that the higher-level control (2; 52) is designed for determining a back pressure of the gas consumer (3; 53) as well as for performing a comparison of the determined back pressure with a back pressure threshold value and for outputting a status signal when the determined back pressure matches the back pressure threshold value.

14. Fluid system (1; 51) according to claim 12 or 13, characterized in that the higher-level control (2; 52) is designed for determining a back pressure profile for the gas consumer (3; 53) and for determining a slope of the back pressure profile as well as for outputting a status signal when the slope of the back pressure profile matches a predetermined slope threshold.

15. Method for operating a fluid system (1; 51) configured according to one of claims 12 to 14, comprising the steps of: providing a gas flow which is guided from the gas source (4; 54) through the valve arrangement (11; 61) to the gas consumer (3; 53) and processing an output signal in the higher-level control unit (2; 52) to determine status information representing a usage state of the gas consumer (3; 53). P 35602 October 30, 2024

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