Monitoring system, method, program, storage medium, and vacuum pump device

Abstract

A monitoring system according to the present invention is for monitoring a vacuum pump device that comprises one or more vacuum pumps and one or more sensors that measure the amounts of powder included in gas sucked into the one or more vacuum pumps near intake ports and / or near exhaust ports of the one or more vacuum pumps. The monitoring system comprises an acquisition unit that acquires output values that are outputted from the one or more sensors and an estimation unit that finds estimated values for the amounts of powder accumulated at the one or more vacuum pumps on the basis of the output values.

Description

Monitoring systems, methods, programs, storage media, and vacuum pump devices

[0001] The present invention relates to a monitoring system, method, program, storage medium, and vacuum pump device.

[0002] In semiconductor manufacturing equipment, vacuum pumps are widely used to create a vacuum environment within the chamber, thereby exhausting the gases used in the semiconductor manufacturing process from the chamber.

[0003] Generally, a positive displacement vacuum pump comprises a pair of pump rotors located within a casing and a motor for rotating these rotors. A small clearance is formed between the pair of pump rotors and between the pump rotors and the inner surface of the casing, so that the pump rotors rotate without contact with the casing. As the pair of pump rotors rotate synchronously in opposite directions, gas within the casing is transferred from the suction side to the discharge side, and the gas is exhausted from a chamber or the like connected to the suction port.

[0004] The gases used in semiconductor manufacturing processes can become contaminated with powder during the process of entering the vacuum pump. This powder accumulates between the pump rotors and in the gaps between the pump rotors and the casing. As this powder accumulation progresses, it can place an excessive load on the vacuum pump during operation, causing it to shut down during the manufacturing process and resulting in significant damage to the products being manufactured.

[0005] Conventionally, there is a known technique for predicting situations in which a vacuum pump will stop due to an abnormality originating from the vacuum pump's products, using a state variable (such as the motor's drive current) that fluctuates according to the load of the gas flowing into the vacuum pump (see Patent Document 1).

[0006] However, no technology has been proposed to estimate the amount of powder contained in the gas flowing into the vacuum pump that accumulates inside the vacuum pump.

[0007] Japanese Patent Publication No. 2018-155243

[0008] The object of this invention is to estimate the amount of powder contained in the gas flowing into the vacuum pump that has accumulated inside the vacuum pump device.

[0009] [1] A monitoring system according to one aspect of the present invention is a monitoring system for monitoring a vacuum pump device, the vacuum pump device comprising: one or more vacuum pumps; one or more sensors near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps; an acquisition unit for acquiring output values ​​output from the one or more sensors; and an estimation unit for determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

[0010] [2] A monitoring system according to one aspect of the present invention, in [1] above, wherein the one or more vacuum pumps include a main pump and a booster pump, the intake port of the main pump is in communication with the exhaust port of the booster pump, and the one or more sensors are provided near the intake port of the booster pump, between the exhaust port of the booster pump and the intake port of the main pump, and / or near the exhaust port of the main pump.

[0011] [3] In one aspect of the present invention, the monitoring system is as described in [2] above, wherein a first sensor is provided near the intake port of the booster pump, a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the booster pump by subtracting the second output value of the second sensor from the first output value of the first sensor.

[0012] [4] In one aspect of the present invention, the monitoring system is as described in [2] above, wherein a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the main pump by subtracting the third output value of the third sensor from the second output value of the second sensor.

[0013] [5] In one aspect of the present invention, the monitoring system is as described in [2] above, wherein a first sensor is provided near the intake port of the booster pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the main pump and the booster pump by subtracting the third output value of the third sensor from the first output value of the first sensor.

[0014] [6] A monitoring system according to one aspect of the present invention, in the above [2], a first sensor is provided near the intake port of the booster pump, a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the booster pump by subtracting the second output value of the second sensor from the first output value of the first sensor, and obtains an estimated value of the amount of powder accumulated in the main pump by subtracting the third output value of the third sensor from the second output value of the second sensor.

[0015] [7] In one aspect of the present invention, the monitoring system, in any of [1] to [6] above, the estimation unit obtains an estimated value of the amount of powder accumulated in one or more vacuum pumps after a predetermined time has elapsed by integrating the time series data of the estimated value.

[0016] [8] A monitoring system according to one aspect of the present invention further comprises, in any of [1] to [7] above, a notification unit that notifies in accordance with the estimated value obtained by the estimation unit.

[0017] [9] A method according to one aspect of the present invention is a method performed by a computer for monitoring a vacuum pump device, the vacuum pump device comprising one or more vacuum pumps, and one or more sensors near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps, the method comprising the steps of acquiring output values ​​output from the one or more sensors, and determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

[0018]

[10] A program according to one aspect of the present invention is a program for a computer to execute the method described in [9] above.

[0019]

[11] A storage medium according to one aspect of the present invention is a storage medium that is readable by a computer and stores the program described in

[10] above.

[0020]

[12] A vacuum pump device according to one aspect of the present invention comprises: one or more vacuum pumps; one or more sensors near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps; an acquisition unit for acquiring output values ​​output from the one or more sensors; and an estimation unit for determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

[0021] This figure shows an example of the schematic configuration of the monitoring system according to this embodiment. This figure shows an example of the schematic configuration of the vacuum pump device according to this embodiment. This figure shows an example of the hardware configuration of the monitoring device according to this embodiment. This figure shows an example of a calculation formula for estimating the amount of powder accumulated in the booster pump or main pump. This figure shows an example of a calculation formula for estimating the amount of powder accumulated in the vacuum pump device. This figure explains the amount of powder flowing into each pump of the vacuum pump device and the amount of powder accumulated in each pump (accumulation amount). This figure shows an example of the display of the estimated powder amount shown on the display unit of the monitoring device. This figure shows an example of the operation of the monitoring system according to this embodiment.

[0022] The following descriptions of each embodiment will be made with reference to the drawings. However, unnecessarily detailed explanations may be omitted. For example, detailed explanations of already well-known matters and redundant explanations of substantially identical configurations may be omitted. This is to avoid the following explanation becoming unnecessarily verbose and to facilitate understanding for those skilled in the art.

[0023] (Configuration of the monitoring system) Figure 1 is a diagram showing an example of the schematic configuration of the monitoring system (information processing system) 1 according to this embodiment. As shown in Figure 1, the monitoring system 1 includes a vacuum pump device 10, a monitoring device (information processing device) 20 that monitors the status of the vacuum pump device 10, a server 30, and a terminal device 40. The monitoring device 20 may be incorporated into the vacuum pump device 10. In the same figure, each functional unit that performs a function can be said to be a means that performs that function.

[0024] The vacuum pump device 10 and the monitoring device 20 are connected via a communication interface, and the monitoring device 20, server 30, and terminal device 40 are connected to each other via a network 50 such as the Internet. Alternatively, each device, including the vacuum pump device 10, may be connected via the network 50.

[0025] The network 50 may be either a wired or wireless connection, and the type and configuration of the connection are not restricted. At least a portion of each device and the server 30 is implemented by a computer (information processing device). The terminal device 40 is, for example, a personal computer, smartphone, or tablet device.

[0026] (Configuration of the vacuum pump device) Figure 2 is a diagram showing an example of the schematic configuration of the vacuum pump device 10 according to this embodiment. As shown in Figure 2, the vacuum pump device 10 is a dry vacuum pump used to discharge process gases from the vacuum chamber used in semiconductor manufacturing equipment in various processes (heat treatment process, impurity introduction process, thin film formation process, lithography process, etc.) performed in semiconductor manufacturing equipment for manufacturing semiconductor devices. The vacuum pump device 10 comprises a pump casing 11, a main pump MP housed in the pump casing 11 that can operate from atmospheric pressure to the vacuum region, and a booster pump BP installed to increase the pumping speed.

[0027] A rotor R1 is housed within the pump casing 12 of the booster pump BP. When this rotor R1 is rotated by the motor M1, gas (process gas) is drawn into the pump casing 12 from the intake port P1 connected to the vacuum chamber. The gas drawn into the pump casing 12 is discharged from the exhaust port P2 of the booster pump BP. This exhaust port P2 is connected to the intake port P3 of the main pump MP via a connecting pipe 13.

[0028] The main pump MP has a rotor R2 (A to E) housed inside its pump casing 14. When the rotor R2 (A to E) is rotated by the motor M2, the gas discharged from the booster pump BP's exhaust port P2 is drawn into the pump casing 14 of the main pump MP through the connecting pipe 13 and the intake port P3. The gas drawn into the pump casing 14 is sequentially compressed by the rotor R2 (A to E) and discharged from the exhaust port P4. An exhaust pipe 15 is connected to this exhaust port P4, and the gas discharged from the exhaust port P4 is discharged into the atmospheric pressure space through the exhaust pipe 15.

[0029] Furthermore, a first sensor C1 is provided near the inlet (intake port P1) of the booster pump BP (for example, on the inner wall of the intake port P1), a second sensor C2 is provided between the outlet (exhaust port P2) of the booster pump BP and the inlet (intake port P3) of the main pump MP (for example, on the inner wall of the connecting pipe 13), and a third sensor C3 is provided near the outlet (exhaust port P4) of the main pump MP (for example, on the inner wall of the exhaust port P4 or the exhaust pipe 15).

[0030] Each sensor (first sensor C1 to third sensor C3) is a sensor that measures the amount of powder (dust) in the air (for example, a particle counter (dust meter) using the laser scattering method). The first sensor C1 measures the amount of powder contained in the gas (process gas) flowing in from the intake port P1 of the booster pump BP. The second sensor C2 measures the amount of powder contained in the gas discharged from the exhaust port P2 of the booster pump BP. In other words, the second sensor C2 also measures the amount of powder contained in the gas flowing into the main pump MP from the intake port P3 of the main pump MP. The third sensor C3 measures the amount of powder contained in the gas discharged from the exhaust port P4 of the main pump MP. The output values ​​of each sensor (first sensor C1 to third sensor C3) (number of particles, amount of powder (mass), current value, voltage value, etc. depending on the number of particles or amount of powder) are sent to the monitoring device 20 via the communication interface (communication I / F 10a in Figure 1).

[0031] (Functional Configuration of the Monitoring Device) Returning to Figure 1, the functional configuration of the monitoring device 20 will be explained. As shown in Figure 1, the monitoring device 20 includes a communication unit 21, a control unit 22 that controls the overall operation of the monitoring device 20, an input unit 23 for the user of the monitoring device 20 to input various information, an output unit 24 that outputs various information, and a storage unit 25 that stores various information.

[0032] The communication unit 21 is a communication interface between the monitoring device 20 and the vacuum pump device 10. The communication unit 21 receives information regarding the output values ​​of the first sensor C1 to the third sensor C3 from the monitoring device 20. The communication unit 21 also sends and receives information to and from the server 30 and terminal device 40 via the network 50.

[0033] The control unit 22 includes an acquisition unit 22a, an estimation unit 22b, a determination unit 22c, and a notification unit 22d.

[0034] The acquisition unit 22a acquires the output value (first output value) output from the first sensor C1, the output value (second output value) output from the second sensor C2, and the output value (third output value) output from the third sensor C3. Specifically, the acquisition unit 22a acquires information (information such as the number of particles, the amount of powder (mass), the current value or voltage value corresponding to the number of particles or the amount of powder) related to the output values ​​(first output value to third output value) of the first sensor C1 to the third sensor C3 from the vacuum pump device 10 via the communication unit 21.

[0035] The estimation unit 22b calculates an estimated amount of powder accumulated in the booster pump (first estimate) based on the output value (first output value) output from the first sensor C1 and the output value (second output value) output from the second sensor C2, and calculates an estimated amount of powder accumulated in the main pump (second estimate) based on the output value (second output value) output from the second sensor C2 and the output value (third output value) output from the third sensor C3. Specifically, for example, the estimation unit 22b calculates an estimated amount of powder accumulated in each pump by taking the difference between the output values ​​output from each sensor.

[0036] Figure 4 shows an example of a calculation formula for estimating the amount of powder accumulated in each pump by taking the difference in output values ​​from each sensor. It is assumed that the gas containing powder that flowed in from the intake port P1 of the booster pump BP at time t1 flows out from the exhaust port P2 at time t2. Therefore, as shown in equation (1) of Figure 4, the estimation unit 22b calculates the difference value (ΔC) obtained by subtracting the output value C2(t2) of the second sensor C2 at time t2 from the output value C1(t1) of the first sensor C1 at time t1. BP The (t2)) value is calculated and taken as the estimated amount of powder deposited in the booster pump BP at time t2. Similarly, the gas containing powder that flowed in from the intake port P3 of the main pump MP at time t2 is considered to flow out from the exhaust port P4 at time t3. Therefore, as shown in equation (2) of Figure 4, the estimation unit 22b calculates the difference value (ΔC) obtained by subtracting the output value C3(t3) of the third sensor C3 at time t3 from the output value C2(t2) of the second sensor C2 at time t2. MP (t3) is calculated and this is used as an estimate of the amount of powder deposited in the main pump MP at time t3.

[0037] Also, the amount of powder deposited on each pump after the elapse of a predetermined time is estimated by integrating the estimated value of the amount of powder at time t. That is, as shown in Equation (3) of FIG. 4, the estimated value (ΔC BP (t)) of the amount of powder deposited on the booster pump BP at time t is integrated over a predetermined time to obtain the estimated value (S BP ) of the amount of powder deposited on the booster pump BP after the elapse of the predetermined time. Similarly, as shown in Equation (4) of FIG. 4, the estimated value (ΔC MP (t)) of the amount of powder deposited on the main pump MP at time t is integrated over a predetermined time to obtain the estimated value (S MP ) of the amount of powder deposited on the main pump MP after the elapse of the predetermined time.

[0038] The amount of powder deposited inside the vacuum pump device 10 after the elapse of a predetermined time can be estimated by taking the sum (S BP ) of the estimated value (S MP ) of the booster pump BP and the estimated value (S BP + S MP ), or it may be estimated based on the difference between the output value of the first sensor C1 and the output value of the third sensor C3.

[0039] FIG. 5 is a diagram showing an example of a calculation formula for estimating the amount of powder deposited inside the vacuum pump device 10 based on the difference between the output value of the first sensor C1 and the output value of the third sensor C3. The gas containing powder flowing in from the intake port P1 of the booster pump BP at time t1 is considered to flow out from the exhaust port P4 of the main pump MP at time t3. Therefore, as shown in Equation (4) of FIG. 5, the estimation unit 22b obtains a difference value (ΔC VP (t3)) obtained by subtracting the output value C3(t3) of the third sensor C3 at time t3 from the output value C1(t1) of the first sensor C1 at time t1, and uses this as the estimated value of the amount of powder deposited inside the vacuum pump device 10 at time t3. Then, as shown in Equation (5) of FIG. 5, the estimated value (ΔC VP (t)) of the amount of powder deposited on the booster pump BP at time t is integrated over a predetermined time to obtain the estimated value (SVP is obtained.

[0040] Further, the estimation unit 22b may estimate the amount of powder deposited on the main pump MP and / or the booster pump BP based on the output value of any one of the first sensor C1 to the third sensor C3. In this case, at least one of the first sensor C1 to the third sensor C3 may be provided in the vacuum pump device 10.

[0041] FIG. 6 is a diagram for explaining the amount of powder flowing into each pump of the vacuum pump device 10 and the amount of powder deposited on each pump (deposition amount). As shown in FIG. 6, first, gas containing the powder amount X flows into the booster pump BP of the vacuum pump device 10. Assuming that the powder attracted by the booster pump BP accumulates in the pump at a ratio of α, the amount of powder deposited on the booster pump BP (deposition amount) is α·X. In this case, the amount of powder contained in the gas discharged from the booster pump BP is (1−α)·X. That is, gas containing the powder amount (1−α)·X flows into the main pump MP. Then, assuming that the powder attracted by the main pump MP accumulates in the pump at a ratio of β, the amount of powder deposited on the main pump MP (deposition amount) is (1−α)·β·X. In this case, the amount of powder contained in the gas discharged from the main pump MP is (1−α)·(1−β)·X.

[0042] Therefore, when the ratios α and β at which powder accumulates in the booster pump BP and the main pump MP are known, if any one of the amount of powder flowing into the booster pump BP, the amount of powder flowing out of the booster pump BP (the amount of powder flowing into the main pump MP), and the amount of powder flowing out of the main pump MP is known, the amount of powder deposited on each pump (deposition amount) can be obtained. Therefore, when the ratios α and β at which powder accumulates in the booster pump BP and the main pump MP are known, the estimation unit 22b may estimate the amount of powder deposited on the main pump MP and / or the booster pump BP based on the output value of any one of the first sensor C1 to the third sensor C3.

[0043] Alternatively, the estimation unit 22b may estimate the amount of powder in the booster pump BP from the output value of the first sensor C1 (first output value) and / or the output value of the second sensor C2 (second output value), the elapsed time T, and the amount of powder in the booster pump BP (or past estimated value) using a first estimation model that has been trained using the output value of the first sensor C1 (first output value) and / or the output value of the second sensor C2 (second output value), the elapsed time T, as training data.

[0044] Similarly, the estimation unit 22b may estimate the amount of powder in the main pump MP from the output value of the second sensor C2 (second output value) and / or the output value of the third sensor C3 (third output value), the elapsed time T, and the amount of powder in the main pump MP (or past estimated value), using a second estimation model that has been trained using the output value of the second sensor C2 (second output value) and / or the output value of the third sensor C3 (third output value), the elapsed time T, and the elapsed time T.

[0045] Similarly, the estimation unit 22b may use a third estimation model, which has been trained using at least one of the output values ​​of the first sensor C1 (first output value), the second sensor C2 (second output value), and the third sensor C3 (third output value), along with the elapsed time T, to estimate the amount of powder inside the vacuum pump device 10 from at least one of the output values ​​of the first sensor C1 (first output value), the second sensor C2 (second output value), and the third sensor C3 (third output value), along with the elapsed time T.

[0046] Furthermore, the estimation unit 22b may display the estimated amount of powder obtained on the display unit (output unit 24) of the monitoring device 20.

[0047] Figure 7 shows an example of how the estimated amount of powder is displayed on the display unit of the monitoring device 20. As shown in Figure 7, the time-series data may also be displayed showing the change over time (%) of the ratio (%) of the estimated amount of powder (cumulative value) to the allowable limit value for the booster pump BP, main pump MP, or vacuum pump device 10 (booster pump BP + main pump MP). This allows for a visual understanding of the amount of powder accumulated in the booster pump BP, main pump MP, or vacuum pump device 10 (booster pump BP + main pump MP). In addition, an index (reference line) indicating the notification reference value for which notification (alert) is issued by the notification unit 22d, described later, may also be displayed simultaneously. This makes it possible to prepare for maintenance such as removing the powder accumulated in each pump or replacing the pump before notification is actually issued by the notification unit 22d. Note that the display method of the estimated value is not limited to the method shown in Figure 7. For example, it may be in the form of a bar graph or pie chart.

[0048] The determination unit 22c determines whether the amount of powder estimated by the estimation unit 22b exceeds a standard value (notification standard value). Specifically, the determination unit 22c determines whether the estimated amount of powder accumulated in the booster pump BP exceeds a first notification standard value (first determination), and / or whether the estimated amount of powder accumulated in the main pump MP exceeds a second notification standard value (second determination). The notification standard value may be set as a numerical value relative to the limit value at which the pump stops operating due to the powder accumulated in the pump. For example, if the limit value is set to 100%, the notification standard value may be set to 80%.

[0049] The notification unit 22d provides notification according to the determination results of the first determination and / or second determination by the determination unit 22c. Specifically, the notification unit 22d outputs a display or sound prompting maintenance of the vacuum pump device 10 (booster pump BP, main pump MP) via the output unit 24 of the monitoring device 20. The notification unit 22d may also provide the above notification to the terminal device 40 used by the user of the monitoring system 1 via the communication unit 21.

[0050] The input unit 23 is an element for users of the monitoring device 20 (including users and maintenance personnel of the monitoring device 20) to input information, and is, for example, a keyboard, mouse, touch panel, microphone, gesture input device, etc.

[0051] The output unit 24 is an interface that outputs various information (images and sound) from the monitoring device 20 to the user, and is, for example, a video display device (display unit) such as an LCD or a speaker. When the output unit 24 is configured as a display unit, a GUI for accepting user input is displayed on this display unit.

[0052] The storage unit 25 is, for example, a data storage device such as an internal memory or an external memory (SD memory card, etc.). The storage unit 25 stores various data handled by the control unit 22 and various information downloaded by the communication unit 21 from the server 3 via the network 50. The storage unit 25 does not necessarily have to be located within the terminal device 2; part or all of the storage unit 25 may be located in another device that is connected to the monitoring device 20 via the network 50 in a communicative manner.

[0053] (Hardware configuration of the monitoring device) Next, the hardware configuration of the monitoring device 20 according to this embodiment will be described. Figure 3 is a block diagram showing an example of the hardware configuration of the monitoring device 20 according to this embodiment.

[0054] In the monitoring device 20, the CPU 201 is a processing unit that controls the operation of the entire monitoring device 20. The ROM 202 is a non-volatile memory that stores control programs and various data executed by the CPU 201. The RAM 203 is a volatile memory used for the load area and work area of ​​programs executed by the CPU 201. The storage device 204 is a storage means for storing various information, and may be built into the terminal device 2 main body or may have a removable storage medium. The input device 205 is a device for the user of the monitoring device 20 to input information, such as a keyboard, mouse, touch panel, or microphone. The display 206 is a display device that displays various information (user interface, etc.). The speaker 207 is a device that outputs sound such as alerts, beeps, and various messages. The communication I / F (interface) 208 is an interface for connecting to the vacuum pump device 10 and the network 50. The bus 209 is a bus line that connects each of the above components to each other.

[0055] (Method for monitoring the status of the vacuum pump device) Next, the method for monitoring the status of the vacuum pump device using the monitoring system 1 will be described. Figure 8 is a flowchart showing an example of the operation of the monitoring system 1.

[0056] As shown in Figure 8, first, the acquisition unit 22a of the control unit 22 acquires output values ​​(first sensor value, second sensor value, and / or third sensor value) output from one or more sensors (first sensor C1, second sensor C2, and / or third sensor C3) (step S1).

[0057] Next, the estimation unit 22b of the control unit 22 determines an estimated value of the amount of powder accumulated in one or more vacuum pumps (main pump and / or booster pump) based on the output values ​​output from one or more sensors (step S2).

[0058] Then, the determination unit 22c of the control unit 22 determines whether the estimated amount of powder exceeds the notification standard value (step S3).

[0059] Finally, the notification unit 22d of the control unit 22 notifies according to the determination result of the determination unit 22c (step S4).

[0060] With the above configuration, it is possible to estimate the amount of powder contained in the gas flowing into the vacuum pump (booster pump BP, main pump MP) that has accumulated inside the vacuum pump device 10.

[0061] Any part or all of the functional components described herein may be implemented by program. The programs referred to herein may be distributed by non-temporarily recording them on a computer-readable recording medium, by distributing them via communication lines such as the Internet (including wireless communication), or by distributing them installed on any terminal.

[0062] Based on the above description, those skilled in the art may be able to conceive of additional effects and various modifications of the present invention, but the embodiments of the present invention are not limited to the individual embodiments described above. Various additions, modifications, and partial deletions are possible without departing from the conceptual idea and spirit of the present invention derived from the claims and their equivalents.

[0063] For example, what is described herein as a single device (or component, hereinafter the same) (including what is depicted as a single device in the drawings) may be implemented by multiple devices. Conversely, what is described herein as multiple devices (including what is depicted as multiple devices in the drawings) may be implemented by a single device. Alternatively, some or all of the means or functions included in one device (e.g., a server) may be included in another device (e.g., a terminal device).

[0064] Furthermore, not all matters described herein are mandatory requirements. In particular, matters described herein but not included in the claims can be considered optional additional matters.

[0065] It should also be noted that the applicant is only aware of the prior art inventions described in the "Prior Art Documents" section of this specification, and the present invention is not necessarily intended to solve the problems described in those prior art inventions. The problems that the present invention aims to solve should be determined by considering this specification as a whole. For example, if this specification describes that a certain effect is achieved by a particular configuration, it can also be said that the problem that is the inverse of that predetermined effect is solved. However, this does not necessarily mean that such a particular configuration is an essential requirement.

Claims

1. A monitoring system for monitoring a vacuum pump device, wherein the vacuum pump device comprises one or more vacuum pumps, and one or more sensors located near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps, and the monitoring system comprises an acquisition unit for acquiring output values ​​output from the one or more sensors, and an estimation unit for determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

2. The monitoring system according to claim 1, wherein the one or more vacuum pumps include a main pump and a booster pump, the intake port of the main pump is in communication with the exhaust port of the booster pump, and the one or more sensors are provided near the intake port of the booster pump, between the exhaust port of the booster pump and the intake port of the main pump, and / or near the exhaust port of the main pump.

3. The monitoring system according to claim 2, wherein a first sensor is provided near the intake port of the booster pump, a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the booster pump by subtracting the second output value of the second sensor from the first output value of the first sensor.

4. The monitoring system according to claim 2, wherein a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the main pump by subtracting the third output value of the third sensor from the second output value of the second sensor.

5. The monitoring system according to claim 2, wherein a first sensor is provided near the intake port of the booster pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the main pump and the booster pump by subtracting the third output value of the third sensor from the first output value of the first sensor.

6. The monitoring system according to claim 2, wherein a first sensor is provided near the intake port of the booster pump, a second sensor is provided between the exhaust port of the booster pump and the intake port of the main pump, a third sensor is provided near the exhaust port of the main pump, and the estimation unit obtains an estimated value of the amount of powder accumulated in the booster pump by subtracting the second output value of the second sensor from the first output value of the first sensor, and obtains an estimated value of the amount of powder accumulated in the main pump by subtracting the third output value of the third sensor from the second output value of the second sensor.

7. The monitoring system according to any one of claims 1 to 6, wherein the estimation unit obtains an estimated value of the amount of powder accumulated in one or more vacuum pumps after a predetermined time has elapsed by integrating the time series data of the estimated value.

8. The monitoring system according to claim 1, further comprising a notification unit that notifies in accordance with the estimated value obtained by the estimation unit.

9. A method performed by a computer to monitor a vacuum pump device, the vacuum pump device comprising: one or more vacuum pumps; one or more sensors near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps; the method comprising: acquiring output values ​​output from the one or more sensors; and determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

10. A program for a computer to perform the method described in claim 9.

11. A computer-readable storage medium storing the program described in claim 10.

12. A vacuum pump device comprising: one or more vacuum pumps; one or more sensors near the intake port and / or exhaust port of the one or more vacuum pumps for measuring the amount of powder contained in the gas drawn into the one or more vacuum pumps; an acquisition unit for acquiring output values ​​output from the one or more sensors; and an estimation unit for determining an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.

Images