Integrated dynamic balance detection and adjustment device for turbomolecular pump rotor

Abstract

An integrated dynamic balance detection and adjustment device for a turbomolecular pump rotor, belonging to the technical field of dynamic balancing for turbomolecular pump rotors, comprising a test platform (1); a support mechanism, which is arranged inside the test platform (1), wherein the front end of a turbine rotor under test is in transmission connection with the support mechanism via a connecting block (2), and a drag cylinder (3) at the rear end of the turbine rotor under test is in transmission connection with the support mechanism; a detection mechanism, which is arranged inside the test platform (1) and is used for detecting the dynamic balance of the turbine rotor under test during rotation; a driving mechanism, which is arranged at the bottom of the test platform (1) and is used for driving the turbine rotor under test to rotate; and a weight removal mechanism, which is arranged on the top of the test platform (1) and is used for reducing the weight of the drag cylinder. By adding the connecting block (2) at one end of the rotor, dynamic balancing of a rotating shaft and the turbine rotor are conducted together, replacing conventional dynamic balancing methods where dynamic balancing of a rotating shaft and a turbine rotor need to be conducted separately. The integration of the weight removal mechanism and the dynamic balancing device achieves the goal of weight removal without the need to dismount the rotor.

Description

A comprehensive dynamic balance testing and adjustment device for turbomolecular pump rotor Technical Field

[0001] This invention belongs to the field of turbomolecular pump rotor dynamic balancing technology, and particularly relates to a comprehensive dynamic balancing detection and adjustment device for turbomolecular pump rotors. Background Technology

[0002] A molecular pump is a vacuum-generating device. Its working principle involves the linear velocity of the blades, which, through high-speed rotation, reaches the thermal motion speed of molecules. Gas, through momentum exchange with the blades, gains directional velocity and is discharged from the cavity. Magnetic levitation turbomolecular pumps, due to their advantages such as being oil-free, wear-free, low-noise, and capable of installation at any angle, are used in various industries. During operation, their rotational speed is generally high, and vibrations caused by rotor imbalance can directly and severely affect the molecular pump. Therefore, it is necessary to perform dynamic balancing of the rotor beforehand, with a dynamic balancing accuracy of G0.4 or higher. The rotor dynamic balancing process first involves offline dynamic balancing on a dynamic balancing machine, and then the rotor is assembled onto the molecular pump and online dynamic balancing is performed using a high-precision dynamic balancing instrument.

[0003] During offline dynamic balancing, the speed of the dynamic balancing machine is usually below 3000 rpm. First, the dynamic balance amount is controlled within a certain range. The rotor consists of a shaft and an impeller. Offline dynamic balancing requires dynamic balancing of the shaft and impeller separately. When balancing the impeller, it needs to be connected to a standard shaft. If the required dynamic balance level is not achieved, it needs to be removed and machined to reduce weight until the required dynamic balance level is met.

[0004] Existing technical solutions require separate dynamic balancing of the rotor shaft and impeller. During dynamic balancing, the shaft and impeller must be repeatedly removed from the dynamic balancing machine for machining to reduce weight. This technical solution is inefficient and complex to operate. Furthermore, even if dynamic balancing is performed separately, errors will still occur when assembling the two components, which is detrimental to the mass production of molecular pumps. Summary of the Invention

[0005] The purpose of this invention is to provide a comprehensive dynamic balance detection and adjustment device for turbomolecular pump rotors to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the present invention provides the following solution: The present invention provides a comprehensive dynamic balance detection and adjustment device for a turbomolecular pump rotor, comprising...

[0007] Test platform;

[0008] A support mechanism is set inside the test platform. The front end of the turbine rotor to be tested is connected to the support mechanism via a connecting block, and the traction cylinder at the rear end of the turbine rotor to be tested is connected to the support mechanism.

[0009] The testing mechanism, located within the testing platform, is used to detect the dynamic balance of the turbine rotor under test during its rotation.

[0010] A drive mechanism, located at the bottom of the test platform, is used to drive the turbine rotor under test to rotate.

[0011] A weight-reducing mechanism, located at the top of the test platform, is used to reduce the weight of the traction cylinder.

[0012] Preferably, the support mechanism includes an outer frame symmetrically fixed to the bottom surface of the test platform, a spring plate fixed to the top of the outer frame, an inner frame fixed to the bottom of the spring plate, a pressure plate inside the inner frame, a first support member inside the pressure plate near the connecting block, the first support member being drivenly connected to the connecting block, a second support member inside the pressure plate near the traction cylinder, the second support member being drivenly connected to the traction cylinder, and an adjusting screw threaded to the bottom of the inner frame, the adjusting screw abutting against the first support member and the second support member respectively.

[0013] Preferably, the first support member includes a first adjusting plate fixed between the inner frame and the pressure plate. The top of the first adjusting plate is provided with a first groove, which is located below the connecting block. First driven pulleys are symmetrically installed on both sides of the first groove. The first driven pulleys are adapted to the connecting block. The first adjusting plate abuts against the top surface of the adjusting screw.

[0014] Preferably, the second support member includes a second adjusting plate fixed between the inner frame and the pressure plate. The top surface of the second adjusting plate is provided with a second groove, which is located below the traction cylinder. Second driven pulleys are symmetrically installed on both sides of the second groove, and the second driven pulleys are adapted to the traction cylinder.

[0015] Preferably, the support mechanism is provided with fixing mechanisms on both sides. The fixing mechanism includes a first support rod fixedly connected to the bottom surface of the test platform. The top surface of the first support rod is provided with a grooved connecting plate. A clamping nut is slidably connected in the grooved connecting plate. The clamping nut is threadedly connected to the top surface of the first support rod. A rotating wheel is rotatably connected to the end of the grooved connecting plate away from the first support rod. One of the rotating wheels abuts against the connecting block, and the other rotating wheel abuts against the shaft end nut near the traction cylinder.

[0016] Preferably, the detection mechanism includes a laser detection unit fixedly connected to the test platform and vibration detection units symmetrically arranged on both sides of the support mechanism. The laser detection unit includes a second support rod fixedly connected to the test platform. The second support rod is located on the side closer to the traction cylinder. The top surface of the second support rod is connected to a third support rod through a first universal joint. The top surface of the third support rod is connected to a clamping member through a second universal joint. A laser speed sensor is installed in the clamping member.

[0017] Preferably, the vibration detection unit includes a bracket disposed on the outside of the outer frame, a thin metal rod fixedly connected to the bracket, a vibration sensor disposed on the thin metal rod, and the vibration sensor being fixedly connected to the top surface of the test platform.

[0018] Preferably, the weight-removing mechanism includes a mobile platform mounted on top of the test platform, a tool holder mounted on the mobile platform, a tool mounted inside the tool holder, and the tool located above the traction cylinder.

[0019] Preferably, the driving mechanism includes a drive box fixed to the bottom surface of the test platform. A drive motor is installed on one side of the drive box. The output shaft of the drive motor extends into the drive box and is connected to a first gear shaft via a coupling. The first gear shaft is rotatably connected to the drive box. A first gear and a second gear are fixedly connected to the first gear shaft. A second gear shaft is also rotatably connected inside the drive box. A third gear and a fourth gear are fixedly connected to the second gear shaft. The first gear is adapted to the third gear, and the second gear is adapted to the fourth gear. A pulley is fixedly connected to the second gear shaft, and the pulley is connected to the traction cylinder via a belt.

[0020] The present invention discloses the following technical effects: The turbine rotor and connecting block that need to be dynamically balanced are connected by bolts and then installed on the support mechanism. The drive mechanism is connected to the traction cylinder. Then the position of the detection mechanism is adjusted and the drive mechanism is started. Dynamic balancing is first performed at the gear with a transmission ratio of 1:1. After obtaining the imbalance, the weight removal device is started to remove the weight from the traction cylinder. Then the dynamic balance is measured at a high speed with a transmission ratio of 1:4. The weight removal and detection steps are repeated until the dynamic balance meets the requirements.

[0021] By adding a connecting block at the rotor end, dynamic balancing of the shaft and turbine rotor is achieved together, replacing the method in traditional transmission dynamic balancing schemes that required separate dynamic balancing of the shaft and turbine rotor. Integrating the weight-removal mechanism with the dynamic balancing device allows for weight removal without removing the rotor from the machine, replacing the previous method of removing the rotor from the machine for weight removal after obtaining the imbalance, and then verifying the dynamic balancing. This invention is beneficial for improving efficiency and reducing costs in mass production. Attached Figure Description

[0022] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0023] Figure 1 is a schematic diagram of the integrated dynamic balance detection and adjustment device for the turbomolecular pump rotor of the present invention.

[0024] Figure 2 is a magnified view of part A in Figure 1;

[0025] Figure 3 is a front view of the turbomolecular pump rotor integrated dynamic balance detection and adjustment device of the present invention;

[0026] Figure 4 is a right view of the turbomolecular pump rotor integrated dynamic balance detection and adjustment device of the present invention.

[0027] In the diagram: 1. Test platform; 2. Connecting block; 3. Traction cylinder; 4. Outer frame; 5. Spring; 6. Inner frame; 7. Pressure plate; 8. Adjusting screw; 9. First adjusting plate; 10. First groove; 11. First driven pulley; 12. Second adjusting plate; 13. Second groove; 14. Second driven pulley; 15. First support rod; 16. Grooved connecting plate; 17. Compression nut; 18. Rotating wheel; 19. Second support rod; 20. First omnidirectional ball. 21. Joint; 22. Third support rod; 23. Clamping component; 24. Laser velocity sensor; 25. Bracket; 26. Thin metal rod; 27. Vibration sensor; 28. Moving platform; 29. ​​Tool holder; 30. Tool; 31. Drive box; 32. Drive motor; 33. Coupling; 34. First gear shaft; 35. First gear; 36. Second gear shaft; 37. Third gear; 38. Fourth gear; 39. Pulley. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Referring to Figures 1-4, this embodiment provides a comprehensive dynamic balance detection and adjustment device for a turbomolecular pump rotor, including...

[0031] Test platform 1;

[0032] The support mechanism is set inside the test platform 1. The front end of the turbine rotor to be tested is connected to the support mechanism through the connecting block 2, and the traction cylinder 3 at the rear end of the turbine rotor to be tested is connected to the support mechanism through the transmission.

[0033] The testing mechanism, located within the testing platform 1, is used to test the dynamic balance of the turbine rotor under test during its rotation.

[0034] The drive mechanism, located at the bottom of the test platform 1, is used to drive the turbine rotor under test to rotate.

[0035] The weight reduction mechanism, located on the top of the test platform 1, is used to reduce the weight of the traction cylinder 3.

[0036] Connect the turbine rotor and connecting block 2 that need to be dynamically balanced with bolts, and then install them on the support mechanism. Connect the drive mechanism to the traction cylinder 3, and then adjust the position and reverse direction of the detection mechanism. Start the drive mechanism and first perform dynamic balancing at the gear with a transmission ratio of 1:1. After obtaining the imbalance, start the weight removal device to remove the weight from the traction cylinder 3. Then measure the dynamic balance at a high speed with a transmission ratio of 1:4. Repeat the weight removal and detection steps until the dynamic balance meets the requirements.

[0037] By adding a connecting block 2 at the rotor end, dynamic balancing of the shaft and turbine rotor is achieved together, replacing the method in the transmission dynamic balancing scheme that required separate dynamic balancing of the shaft and turbine rotor. Integrating the weight-removal mechanism with the dynamic balancing device achieves weight removal without removing the rotor from the machine, replacing the previous method of removing the rotor from the machine for weight removal after obtaining the imbalance, and then verifying the dynamic balancing. This invention is beneficial for improving efficiency and reducing costs in mass production.

[0038] The scheme is further optimized. The support mechanism includes an outer frame 4 symmetrically fixed to the bottom surface of the test platform 1. The top of the spring 5 is fixed inside the outer frame 4. The bottom of the spring 5 is fixed to an inner frame 6. A pressure plate 7 is provided inside the inner frame 6. A first support member is provided at one end of the pressure plate 7 near the connecting block 2. The first support member is connected to the connecting block 2 in a transmission manner. A second support member is provided at one end of the pressure plate 7 near the traction cylinder 3. The second support member is connected to the traction cylinder 3 in a transmission manner. An adjusting screw 8 is threadedly connected to the bottom of the inner frame 6. The adjusting screw 8 abuts against the first support member and the second support member respectively.

[0039] Further optimization of the scheme: the first support component includes a first adjusting plate 9 fixed between the inner frame 6 and the pressure plate 7. The top of the first adjusting plate 9 is provided with a first groove 10. The first groove 10 is located below the connecting block 2. First driven pulleys 11 are symmetrically installed on both sides of the first groove 10. The first driven pulleys 11 are adapted to the connecting block 2. The first adjusting plate 9 abuts against the top surface of the adjusting screw 8.

[0040] In a further optimized design, the second support component includes a second adjusting plate 12 fixed between the inner frame 6 and the pressure plate 7. The top surface of the second adjusting plate 12 is provided with a second groove 13, which is located below the traction cylinder 3. Second driven pulleys 14 are symmetrically installed on both sides of the second groove 13, and the second driven pulleys 14 are adapted to the traction cylinder 3.

[0041] The height of the first adjusting plate 9 and the second adjusting plate 12 are adjusted by adjusting screw 8 so that the turbine rotor remains horizontal during rotation. The two first driven pulleys 11 are located on both sides of the connecting block 2, and the two second driven pulleys 14 are located on both sides of the traction cylinder 3.

[0042] To further optimize the design, a fixing mechanism is provided on both sides of the support mechanism. The fixing mechanism includes a first support rod 15 fixedly connected to the bottom surface of the test platform 1. A grooved connecting plate 16 is provided on the top surface of the first support rod 15. A clamping nut 17 is slidably connected in the grooved connecting plate 16. The clamping nut 17 is threadedly connected to the top surface of the first support rod 15. A rotating wheel 18 is rotatably connected to the end of the grooved connecting plate 16 away from the first support rod 15. One of the rotating wheels 18 abuts against the connecting block 2, and the other rotating wheel 18 abuts against the shaft end nut near the traction cylinder 3.

[0043] The scheme is further optimized. The detection mechanism includes a laser detection unit fixed in the test platform 1 and vibration detection units symmetrically arranged on both sides of the support mechanism. The laser detection unit includes a second support rod 19 fixed in the test platform 1. The second support rod 19 is located on the side close to the traction cylinder 3. The top surface of the second support rod 19 is connected to a third support rod 21 through a first universal ball joint 20. The top surface of the third support rod 21 is connected to a clamping member 22 through a second universal ball joint. A laser speed sensor 23 is installed in the clamping member 22.

[0044] Further optimization of the scheme: the vibration detection unit includes a bracket 26 set on the outside of the outer frame 4, a thin metal rod 25 fixed on the bracket 26, a vibration sensor 24 set on the thin metal rod 25, and the vibration sensor 24 fixed to the top surface of the test platform 1.

[0045] When rotating, the spring 5 in the fixed mechanism vibrates due to dynamic imbalance. The vibration is transmitted to the vibration sensor 24 through a thin metal rod 25, thereby processing the vibration signal to measure the amount of imbalance and the position of weight removal.

[0046] Further optimization of the scheme: the de-duplication mechanism includes a mobile platform 27 installed on top of the test platform 1, a tool holder 28 installed on the mobile platform 27, a tool 29 installed inside the tool holder 28, and the tool 29 located above the traction cylinder 3.

[0047] The cutting tool 29 is mainly used to remove weight from the outer wall of the turbine rotor traction cylinder 3 after the weight removal position and weight have been calculated. The operation of the cutting tool 29 is achieved by a machine tool.

[0048] The scheme is further optimized. The drive mechanism includes a drive box 30 fixed to the bottom surface of the test platform 1. A drive motor 31 is installed on one side of the drive box 30. The output shaft of the drive motor 31 extends into the drive box 30 and is connected to a first gear shaft 33 through a coupling 32. The first gear shaft 33 is rotatably connected to the drive box 30. A first gear 34 and a second gear 35 are fixedly connected to the first gear shaft 33. A second gear shaft 36 is also rotatably connected inside the drive box 30. A third gear 37 and a fourth gear 38 are fixedly connected to the second gear shaft 36. The first gear 34 is adapted to the third gear 37, and the second gear 35 is adapted to the fourth gear 38. A pulley 39 is fixedly connected to the second gear shaft 36. The pulley 39 is connected to the traction cylinder 3 through a belt.

[0049] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0050] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A comprehensive dynamic balance testing and adjustment device for a turbomolecular pump rotor, characterized in that: include Test platform (1); The support mechanism is set inside the test platform (1). The front end of the turbine rotor to be tested is connected to the support mechanism through the connecting block (2). The traction cylinder (3) at the rear end of the turbine rotor to be tested is connected to the support mechanism. The testing mechanism is set inside the test platform (1) and is used to test the dynamic balance of the turbine rotor under test during rotation. A drive mechanism is located at the bottom of the test platform (1) and is used to drive the turbine rotor under test to rotate. The weight reduction mechanism is located on the top of the test platform (1) and is used to reduce the weight of the traction cylinder (3).

2. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 1, characterized in that: The support mechanism includes an outer frame (4) symmetrically fixed to the bottom surface of the test platform (1), the top of a spring (5) fixed inside the outer frame (4), an inner frame (6) fixed to the bottom of the spring (5), a pressure plate (7) inside the inner frame (6), a first support member inside the pressure plate (7) near the end of the connecting block (2), the first support member being driven to the connecting block (2), a second support member inside the pressure plate (7) near the end of the traction cylinder (3), the second support member being driven to the traction cylinder (3), and an adjusting screw (8) threaded to the bottom of the inner frame (6), the adjusting screw (8) abutting against the first support member and the second support member respectively.

3. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 2, characterized in that: The first support member includes a first adjusting plate (9) fixed between the inner frame (6) and the pressure plate (7). The top of the first adjusting plate (9) is provided with a first groove (10). The first groove (10) is located below the connecting block (2). First driven pulleys (11) are symmetrically installed on both sides of the first groove (10). The first driven pulleys (11) are adapted to the connecting block (2). The first adjusting plate (9) abuts against the top surface of the adjusting screw (8).

4. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 2, characterized in that: The second support member includes a second adjusting plate (12) fixed between the inner frame (6) and the pressure plate (7). The top surface of the second adjusting plate (12) is provided with a second groove (13). The second groove (13) is located below the traction cylinder (3). Second driven pulleys (14) are symmetrically installed on both sides of the second groove (13). The second driven pulleys (14) are adapted to the traction cylinder (3).

5. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 1, characterized in that: The support mechanism is provided with fixing mechanisms on both sides. The fixing mechanism includes a first support rod (15) fixedly connected to the bottom surface of the test platform (1). The top surface of the first support rod (15) is provided with a grooved connecting plate (16). A clamping nut (17) is slidably connected in the grooved connecting plate (16). The clamping nut (17) is threadedly connected to the top surface of the first support rod (15). A rotating wheel (18) is rotatably connected to one end of the grooved connecting plate (16) away from the first support rod (15). One of the rotating wheels (18) abuts against the connecting block (2), and the other rotating wheel (18) abuts against the shaft end nut near the traction cylinder (3).

6. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 2, characterized in that: The detection mechanism includes a laser detection unit fixed in the test platform (1) and vibration detection units symmetrically arranged on both sides of the support mechanism. The laser detection unit includes a second support rod (19) fixed in the test platform (1). The second support rod (19) is located on the side close to the traction cylinder (3). The top surface of the second support rod (19) is connected to a third support rod (21) through a first universal ball joint (20). The top surface of the third support rod (21) is connected to a clamping member (22) through a second universal ball joint. A laser velocity sensor (23) is installed in the clamping member (22).

7. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 6, characterized in that: The vibration detection unit includes a bracket (26) disposed on the outside of the outer frame (4), a thin metal rod (25) is fixedly connected to the bracket (26), a vibration sensor (24) is provided on the thin metal rod (25), and the vibration sensor (24) is fixedly connected to the top surface of the test platform (1).

8. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 1, characterized in that: The weight-removing mechanism includes a mobile platform (27) installed on the top of the test platform (1), a tool holder (28) is installed on the mobile platform (27), a tool (29) is installed in the tool holder (28), and the tool (29) is located above the traction cylinder (3).

9. The turbomolecular pump rotor integrated dynamic balance detection and adjustment device according to claim 1, characterized in that: The drive mechanism includes a drive box (30) fixed to the bottom surface of the test platform (1). A drive motor (31) is installed on one side of the drive box (30). The output shaft of the drive motor (31) extends into the drive box (30) and a first gear shaft (33) is installed through a coupling (32). The first gear shaft (33) is rotatably connected to the drive box (30). A first gear (34) and a second gear (35) are fixedly connected to the first gear shaft (33). A second gear shaft (36) is also rotatably connected inside the drive box (30). A third gear (37) and a fourth gear (38) are fixedly connected to the second gear shaft (36). The first gear (34) is adapted to the third gear (37), and the second gear (35) is adapted to the fourth gear (38). A pulley (39) is fixedly connected to the second gear shaft (36). The pulley (39) is connected to the traction cylinder (3) via a belt.

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