Semiconductor device

Abstract

The present application provides a semiconductor device, comprising: a process chamber, a protective shield, a first liquid supply portion, a second liquid supply portion, a liquid leakage detection portion, and a controller. The protective shield is located in the process chamber, a first space is present in the protective shield, and a second space is present between the protective shield and the process chamber. The first liquid supply portion is used for supplying a first treatment liquid to the first space, and the second liquid supply portion is used for supplying a second treatment liquid to the second space. The liquid leakage detection portion comprises a liquid discharge pipe, an on-off valve, and at least one liquid level sensor. The liquid discharge pipe is located at the bottom of the process chamber and communicated with the second space, the on-off valve and the liquid level sensor are both arranged on the liquid discharge pipe, and the liquid level sensor is located above the on-off valve. The present application allows for controlling the on / off state of the on-off valve by means of the controller; when first liquid treatment is performed, the controller controls the on-off valve to close, so as to detect whether leakage occurs in the protective shield; and when second liquid treatment is performed, the controller controls the on-off valve to open, so as to prevent the liquid level sensor from being falsely triggered.

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