Light-source coupling system, method and device, and storage medium

Abstract

A light-source coupling system, method and device, and a storage medium. The system comprises: a first lens assembly (110), an attenuator (120), a second lens assembly (130), a continuously tunable long-pass filter (140) and a continuously tunable short-pass filter (150). Light emitted by a light source passes through the first lens assembly (110) to form parallel light, and the attenuator (120) is used to adjust the brightness of the parallel light, wherein the transmittance of the attenuator (120) varies in a fixed gradient; and the parallel light with the brightness adjusted is converged by means of the second lens assembly (130) to form converged light, and the continuously tunable long-pass filter (140) and the continuously tunable short-pass filter (150) are used to tune the spectral band of the converged light, wherein the two filters are respectively placed on two sides of a converging image plane (200) corresponding to the second lens assembly (130), and the axial distance between the two filters is fixed. By means of adjusting the axial distance between the continuously tunable long-pass filter (140) and the converging image plane (200), the spectral band of the converged light is tuned, thereby realizing symmetrical tuning of the spectral band, improving the tuning efficiency of the spectral band, and meeting the requirements for efficient and accurate adjustment.

Description

Light source coupling system, method, apparatus and storage medium

[0001] This application claims priority to Chinese Patent Application No. 2024119330312, filed on December 26, 2024, entitled "A Light Source Coupling System, Method, Device and Storage Medium", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of optical technology, such as a light source coupling system, method, device, and storage medium. Background Technology

[0003] Currently, in the field of semiconductor metrology, microscopic imaging technology can be used to measure the object under test, which can be a wafer. During the metrology process, different light source brightness and different spectral bands may be used to illuminate the object under test, i.e., adjusting the light source brightness or spectral band to obtain better metrology results.

[0004] However, adjusting the brightness and spectral band of the light source is currently quite cumbersome, resulting in low adjustment efficiency and failing to meet the demand for efficient and precise adjustment. Summary of the Invention

[0005] This application provides a light source coupling system, method, device, and storage medium that can achieve efficient and precise adjustment of light source brightness and spectral band.

[0006] This application provides a light source coupling system, the system comprising: a first lens assembly, an attenuator, a second lens assembly, a continuously adjustable long-pass filter and a continuously adjustable short-pass filter, wherein the transmittance of the attenuator varies with a fixed gradient;

[0007] The light emitted by the light source passes through the first lens assembly to form parallel light, and the brightness of the parallel light is adjusted by the attenuator.

[0008] The parallel light, after brightness adjustment, is converged by the second lens assembly to form a converged light beam. The spectral band of the converged light beam is adjusted by the continuously adjustable long-pass filter and the continuously adjustable short-pass filter.

[0009] The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image plane corresponding to the second lens assembly. The axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed. The spectral band of the converged light is adjusted by adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane.

[0010] Optionally, the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is determined based on the fact that the size of the light spot incident on the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is less than or equal to a size threshold.

[0011] Optionally, the continuously adjustable long pass filter and the continuously adjustable short pass filter are connected at a fixed axial distance using a fixing device.

[0012] Optionally, the continuously adjustable long pass filter is placed on the side of the converging image plane closer to the attenuator, and the continuously adjustable short pass filter is placed on the side of the converging image plane away from the attenuator.

[0013] Optionally, the attenuator includes a first attenuator and a second attenuator, and the brightness of the parallel light is adjusted using the first attenuator and the second attenuator.

[0014] Optionally, the system further includes: a third lens assembly, a beam splitter, a fourth lens assembly, and a spectrometer;

[0015] After adjusting the spectral band, the light rays are converged and used to form parallel light using the third lens combination;

[0016] The parallel light is focused onto the spectrometer by the beam-splitting prism and the fourth lens combination;

[0017] The spectrometer is used to monitor the light in real time after brightness and spectral band adjustments.

[0018] Optionally, the angle of the converging light rays incident on the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is 5.2 degrees.

[0019] This application provides a light source coupling method, applied to the light source coupling system described in any one of the above claims, the method comprising:

[0020] The light source is controlled to emit light, which is then processed by the first lens assembly to form parallel light.

[0021] The transmittance of the attenuator is controlled to adjust the brightness of the parallel light, and the parallel light with adjusted brightness is converged by the second lens assembly to form a converging light beam;

[0022] The spectral band of the converged light beam is adjusted by controlling the filtering bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter, as well as the axial distance between the continuously adjustable long-pass filter and the converging image plane.

[0023] The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image plane corresponding to the second lens assembly, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed.

[0024] This application provides a light source coupling device, the device comprising: a processor and a memory;

[0025] The memory is used to store instructions;

[0026] The processor is configured to execute the instructions in the memory and perform the method as described above.

[0027] This application provides a computer-readable storage medium including instructions that, when executed on a computer, cause the computer to perform the methods described above.

[0028] This application provides a light source coupling system, comprising: a first lens assembly, an attenuator, a second lens assembly, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. Light emitted from the light source passes through the first lens assembly to form parallel light. The brightness of the parallel light is adjusted using the attenuator, i.e., the brightness of the light source is adjusted by the attenuator. Since the transmittance of the attenuator changes in a fixed gradient, efficient brightness adjustment based on transmittance changes can be achieved. The brightness-adjusted parallel light is then converged by the second lens assembly to form a converged beam. The spectral band of the converged beam is adjusted using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the corresponding converging image plane of the second lens assembly, enabling uniform adjustment of the beam size. The axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the distance can be adjusted by adjusting the continuously adjustable... The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converged light. Specifically, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly. This achieves symmetrical adjustment of the spectral band, avoiding the problem of frequent adjustments due to poor spectral band symmetry and improving the adjustment efficiency of the spectral band. In other words, this application uses an attenuator with a fixed transmittance gradient and continuously adjustable long-pass and continuously adjustable short-pass filters with fixed axial distances to achieve efficient and precise adjustment of the light source brightness and spectral band, meeting the requirements for efficient and precise adjustment. Attached Figure Description

[0029] Figure 1 shows a schematic diagram of a light source coupling system provided in an embodiment of this application;

[0030] Figure 2 shows a schematic diagram of an attenuator provided in an embodiment of this application;

[0031] Figure 3 shows a schematic diagram of another light source coupling system provided in an embodiment of this application;

[0032] Figure 4 shows a schematic flowchart of a light source coupling method provided in an embodiment of this application. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] This application is described in detail with reference to the schematic diagrams. When detailing the embodiments of this application, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this application. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0035] In the field of semiconductor metrology, microscopic imaging technology can be used to measure the mass of objects, such as wafers. During the metrology process, different light source brightnesses and spectral bands may be used to illuminate the object, i.e., adjusting the light source brightness or spectral band to obtain better metrology results. Especially for high-end wafer manufacturing nodes, different spectral bands and light source brightnesses are often required to illuminate different samples to obtain better measurement results. In this case, a coupling module that can switch between light source spectral bands and light source brightness becomes crucial.

[0036] Currently, the spectral band of a light source is adjusted using continuous long-pass filters and continuous short-pass filters. However, when adjusting the spectral band of a light source, the continuous long-pass filters and continuous short-pass filters are placed separately, resulting in poor symmetry in the adjustment of the light source spectrum. Furthermore, in order to optimize the symmetry of the light source spectrum, the positions of the two filters need to be adjusted frequently, making the adjustment of the symmetry of the light source spectrum quite cumbersome.

[0037] Therefore, adjusting the brightness and spectral band of the light source is currently quite cumbersome, resulting in low adjustment efficiency and failing to meet the demand for efficient and precise adjustment.

[0038] Based on this, this application provides a light source coupling system, comprising: a first lens assembly, an attenuator, a second lens assembly, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. Light emitted from the light source passes through the first lens assembly to form parallel light. The brightness of the parallel light is adjusted using the attenuator, i.e., the brightness of the light source is adjusted by the attenuator. Since the transmittance of the attenuator changes with a fixed gradient, efficient brightness adjustment of the light source can be achieved based on changes in transmittance. The brightness-adjusted parallel light is converged by the second lens assembly to form a converged beam. The spectral band of the converged beam is adjusted using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the corresponding converging image plane of the second lens assembly, enabling uniform adjustment of the beam size. The axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the brightness is adjusted by adjusting the continuously adjustable... The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converged light. Specifically, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly. This achieves symmetrical adjustment of the spectral band, avoiding the problem of frequent adjustments due to poor spectral band symmetry and improving the adjustment efficiency of the spectral band. In other words, this application uses an attenuator with a fixed transmittance gradient and continuously adjustable long-pass and continuously adjustable short-pass filters with fixed axial distances to achieve efficient and precise adjustment of the light source brightness and spectral band, meeting the requirements for efficient and precise adjustment.

[0039] To better understand the technical solution and effects of this application, the specific embodiments will be described in detail below with reference to the accompanying drawings.

[0040] Referring to Figure 1, this figure is a schematic diagram of the structure of a light source coupling system provided in an embodiment of this application.

[0041] The light source coupling system provided in this application embodiment includes: a first lens assembly 110, an attenuator 120, a second lens assembly 130, a continuously adjustable long-pass filter 140, and a continuously adjustable short-pass filter 150.

[0042] The light emitted by the light source is paralleled by the first lens assembly 110. The parallel light is incident on the attenuator 120, and the brightness of the parallel light is adjusted by the attenuator 120. The parallel light with adjusted brightness is converged by the second lens assembly 130 to form a converged light. The converged light is incident on the continuously adjustable long pass filter 140 and exits from the continuously adjustable short pass filter 150. The spectral band of the converged light is adjusted by the continuously adjustable long pass filter 140 and the continuously adjustable short pass filter 150.

[0043] In the embodiments of this application, the first lens assembly 110 is used to adjust the light emitted by the light source into parallel light, and the second lens assembly 130 is used to adjust the light into converging light.

[0044] In the embodiments of this application, the transmittance of the attenuator 120 varies with a fixed gradient, that is, the attenuator 120 changes sequentially according to a fixed gradient. The attenuator 120 is used to adjust the brightness of the light source. Since the transmittance of the attenuator 120 varies with a fixed gradient, when adjusting the brightness of the light source, the transmittance can be adjusted efficiently and quickly according to the gradient change law of the transmittance of the attenuator 120, thereby achieving efficient adjustment of the brightness of the light source.

[0045] As an example, the attenuator 120 includes multiple transmittance regions 121, which exhibit a fixed gradient variation. Referring to Figure 2, the attenuator 120 can be a circular structure, and the transmittance regions 121 can be fan-shaped regions. As an example, the fixed gradient variation of the multiple transmittance regions 121 can be represented by the grayscale variation of the multiple transmittance regions 121 (grayscale is not specifically shown in Figure 2). For example, the grayscale of the multiple transmittance regions 121 gradually increases along a clockwise direction.

[0046] In the embodiments of this application, a continuously adjustable long-pass filter 140 and a continuously adjustable short-pass filter 150 are used to adjust the spectral band. The continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 are respectively placed on both sides of the converging image plane 200 corresponding to the second lens assembly 130. Placing the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 on both sides of the converging image plane 200 can ensure that the difference in the spot size of the converged light rays is small or even the same when incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, thereby achieving uniform adjustment of the spot size and avoiding the problem of different spot sizes caused by placing the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 on the same side of the converging image plane 200, thus improving the efficiency of spectral band adjustment.

[0047] The axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is fixed. The spectral band of the converged light is adjusted by changing the axial distance between the continuously adjustable long-pass filter 140 and the converging image plane 200. When adjusting the axial distance between the continuously adjustable long-pass filter 140 and the converging image plane 200, since the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is fixed, the axial distance between the continuously adjustable short-pass filter 150 and the converging image plane 200 also changes accordingly. This achieves symmetrical adjustment of the spectral band, avoiding the problem of frequent adjustments due to poor spectral band symmetry, and improving the adjustment efficiency of the spectral band. In other words, by fixing the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 and simultaneously adjusting their axial positions, the spectral band is adjusted, ultimately obtaining a more symmetrical spectral distribution, thereby achieving efficient adjustment of the spectral band.

[0048] In the embodiments of this application, to achieve efficient adjustment of the spectral band without affecting the light performance, the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is subject to an axial distance threshold limitation. When the spot size of the converged light incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is less than or equal to the size threshold, the converged light can still be detected after passing through the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150. Therefore, the axial distance threshold can be determined based on whether the spot size of the converged light incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is less than or equal to the size threshold, and then the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 can be determined based on the axial distance threshold.

[0049] As an example, the size threshold can be 1 mm.

[0050] In the embodiments of this application, considering the fixed axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, to ensure that the axial distance between them remains constant during spectral band adjustment, a fixing device can be used to connect the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 at a fixed axial distance. By using a fixing device to connect the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 at a fixed axial distance, it is possible to simultaneously adjust the axial position of the continuously adjustable short-pass filter 150 using the fixing device while adjusting the axial position of the continuously adjustable long-pass filter 140, thus maintaining a constant axial distance between them. Furthermore, by using a fixing device to connect the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 to simultaneously adjust their axial positions, not only can symmetrical adjustment of the spectral band be achieved, but also the cumbersome adjustment problem caused by separately adjusting the axial positions of the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 while maintaining a fixed axial distance between them can be avoided, further improving the efficiency of spectral band adjustment.

[0051] In the embodiments of this application, the continuously adjustable long-pass filter 140 is placed on the side of the converging image plane 200 closer to the attenuator 120, and the continuously adjustable short-pass filter 150 is placed on the side of the converging image plane 200 away from the attenuator 120. That is, the converging light formed by the second lens assembly 130 first enters the continuously adjustable long-pass filter 140, then continues to enter the continuously adjustable short-pass filter 150, and finally exits after passing through the continuously adjustable short-pass filter 150. In other words, the light passes through the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 in sequence.

[0052] In the embodiments of this application, the attenuator 120 may include a first attenuator 122 and a second attenuator 123. The brightness of the parallel light can be adjusted by using the first attenuator 122 and the second attenuator 123, that is, the brightness of the light source can be adjusted by using the first attenuator 122 and the second attenuator 123 together.

[0053] The first attenuator 122 and the second attenuator 123 both include multiple transmittance regions 121, which exhibit a fixed gradient variation. By utilizing the interaction of the different transmittances of the first attenuator 122 and the second attenuator 123, which both exhibit a fixed gradient variation, multiple methods for adjusting the brightness of the light source can be achieved.

[0054] Referring to Figure 3, the first attenuator 122 and the second attenuator 123 are located between the first lens assembly 110 and the second lens assembly 130. The parallel light formed by the first lens assembly 110 first passes through the first attenuator 122, then through the second attenuator 123, and then enters the second lens assembly 130.

[0055] In embodiments of this application, the light source coupling system further includes: a third lens assembly 160, a beam splitter 170, a fourth lens assembly 180, and a spectrometer 190, as shown in FIG3.

[0056] After adjusting the spectral band of the converged light using continuously adjustable long-pass filters 140 and 150, the spectrally adjusted converged light is incident on a third lens assembly 160, forming parallel light. This parallel light then enters a beam splitter 170, where it is split into two beams: a first beam and a second beam. The first beam enters a fourth lens assembly 180, forming a converged beam. This converged beam then enters a spectrometer 190, allowing for real-time monitoring of the light after brightness and spectral band adjustments. This real-time monitoring provides spectral feedback for the entire light source coupling system during brightness or spectral band adjustments, directly providing the adjustment results and facilitating further optimization of these adjustments.

[0057] As an example, the parameters of a beam splitter include the beam splitting ratio, which is 90T / 10R, meaning that 90% of the light is transmitted and 10% is reflected.

[0058] In practical applications, the light source coupling system also includes a third attenuator 124, as shown in Figure 3. The third attenuator 124 is located between the beam splitter 170 and the fourth lens assembly 180. That is, the first light rays emitted from the beam splitter 170 are incident on the third attenuator 124, and then emitted from the third attenuator 124 are incident on the fourth lens assembly 180.

[0059] In embodiments of this application, the light source coupling system further includes a fifth lens assembly 210, as shown in FIG3.

[0060] The second light ray emitted from the beam splitter 170 is incident on the fifth lens assembly 210, and the fifth lens assembly 210 forms a converging light ray. The converging light ray is incident on the Kohler illumination module of the microscopic imaging module, thereby realizing the quantity detection using microscopic imaging technology.

[0061] In embodiments of this application, the light source coupling system further includes a bandpass filter wheel assembly 220, as shown in FIG3. The bandpass filter wheel assembly 220 is connected to a motor, and the motor drives the bandpass filter wheel assembly 220 to rotate.

[0062] The bandpass filter wheel 220 is located between the third lens assembly 160 and the beam splitter 170. Parallel light emitted from the third lens assembly 160 is incident on the bandpass filter wheel 220, and after passing through the bandpass filter wheel 220, it is incident on the beam splitter 170.

[0063] In the embodiments of this application, the first lens assembly 110 is a 2.5x magnifying lens, meaning that when the first lens assembly 110 magnifies the light from the light source to form parallel light, it performs 2.5x magnification. The converged light rays, after being converged by the second lens assembly 130, are incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 at an angle of 5.2 degrees. The third lens assembly 160 is a 1x magnifying lens, meaning that when the third lens assembly 160 magnifies the converged light rays to form parallel light, it performs 1x magnification. In other words, by setting the first lens assembly 110, the third lens assembly 160, and the angle of light rays incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, a more cutoff spectral distribution is obtained. The smaller the angle of light rays incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, the more cutoff the spectral edges.

[0064] Referring to Figure 3, the light source is a laser-driven light source (LDLS) 230. The broadband light emitted by the light source is coupled into the light source coupling system through an optical fiber 240. The parameters of the optical fiber 240 include the fiber diameter and numerical aperture (NA). For example, the light diameter is 400 micrometers and the NA is 0.22. The light source coupling system amplifies the light emitted from the optical fiber 240 by a factor of 2.5 to 1000 micrometers, with an NA of 0.09.

[0065] In practical applications, the light source coupling system also includes a controller. The controller controls the emitted light from the light source, the transmittance of the attenuator 120, the filtering bands of the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, and the axial distance between the continuously adjustable long-pass filter 140 and the converging image plane 200. The controller can also control a motor, thereby controlling the rotation of the bandpass filter wheel assembly 220.

[0066] Therefore, this application provides a light source coupling system, comprising: a first lens assembly, an attenuator, a second lens assembly, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. Light emitted from the light source passes through the first lens assembly to form parallel light. The brightness of the parallel light is adjusted using the attenuator, i.e., the brightness of the light source is adjusted by the attenuator. Since the transmittance of the attenuator changes with a fixed gradient, efficient brightness adjustment of the light source can be achieved based on changes in transmittance. The brightness-adjusted parallel light is converged by the second lens assembly to form a converged beam. The spectral band of the converged beam is adjusted using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the corresponding converging image plane of the second lens assembly, enabling uniform adjustment of the beam size. The axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the brightness is adjusted by adjusting the continuously adjustable... The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converged light. Specifically, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly. This achieves symmetrical adjustment of the spectral band, avoiding the problem of frequent adjustments due to poor spectral band symmetry and improving the adjustment efficiency of the spectral band. In other words, this application uses an attenuator with a fixed transmittance gradient and continuously adjustable long-pass and continuously adjustable short-pass filters with fixed axial distances to achieve efficient and precise adjustment of the light source brightness and spectral band, meeting the requirements for efficient and precise adjustment.

[0067] Based on the light source coupling system provided in the above embodiments, this application also provides a light source coupling method, the working principle of which will be described in detail below with reference to the accompanying drawings.

[0068] Referring to Figure 4, this figure is a schematic flowchart of a light source coupling method provided in an embodiment of this application.

[0069] The light source coupling method provided in this application embodiment is applied to the light source coupling system provided in the above embodiment. The light source coupling system includes a controller, and the controller is used to execute the light source coupling method provided in this application embodiment.

[0070] The light source coupling method provided in this application includes the following steps:

[0071] S101 controls the light source to emit light, and the light passes through the first lens assembly to form parallel light.

[0072] In the embodiments of this application, the controller is used to control the light source to emit light. The light source is a laser-driven light source (LDLS).

[0073] Light rays are incident on the first lens assembly and are formed into parallel light after passing through the first lens assembly.

[0074] S102 controls the transmittance of the attenuator to adjust the brightness of the parallel light. The parallel light, after brightness adjustment, is converged by the second lens assembly to form a converging light beam.

[0075] In embodiments of this application, the controller is used to control the transmittance of the attenuator to adjust the brightness of the parallel light.

[0076] The attenuator can include a first attenuator and a second attenuator. The brightness of parallel light can be adjusted using the first and second attenuators, that is, the brightness of the light source can be adjusted by using the first and second attenuators together. The controller is used to control the transmittance of the first and second attenuators.

[0077] The parallel light, after brightness adjustment, is converged by a second lens assembly to form a converging ray.

[0078] S103 controls the filtering bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter, and adjusts the spectral band of the converged light by adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane.

[0079] In the embodiments of this application, the controller is used to control the filtering bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter, as well as the axial distance between the continuously adjustable long-pass filter and the converging image plane, thereby realizing the adjustment of the spectral band using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter.

[0080] A continuously adjustable long-pass filter and a continuously adjustable short-pass filter are placed on both sides of the converging image plane corresponding to the second lens assembly, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed.

[0081] In the embodiments of this application, the controller can also control the third attenuator and the motor, and control the rotation of the bandpass filter wheel assembly by controlling the speed of the motor.

[0082] Based on the light source coupling method provided in the above embodiments, this application also provides a light source coupling device, which includes:

[0083] The processor and memory may be present, and there may be one or more processors. In some embodiments of this application, the processor and memory may be connected via a bus or other means.

[0084] Memory may include read-only memory and random access memory, and provides instructions and data to the processor. A portion of the memory may also include NVRAM. Memory stores the operating system and operating instructions, executable modules, or data structures, or subsets thereof, or extended sets thereof. The operating instructions may include a variety of operation instructions for implementing various operations. The operating system may include various system programs for implementing various basic business functions and handling hardware-based tasks.

[0085] The processor controls the operation of the terminal device; the processor can also be called the CPU.

[0086] The methods disclosed in the embodiments of this application can be applied to a processor or implemented by a processor. A processor can be an integrated circuit chip with signal processing capabilities. During implementation, each step of the above method can be completed by integrated logic circuits in the processor's hardware or by instructions in software form. The processor can be a general-purpose processor, DSP, ASIC, FPGA, or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. A general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this application can be directly embodied as execution by a hardware decoding processor, or as a combination of hardware and software modules in the decoding processor. The software modules can reside in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art. This storage medium is located in memory; the processor reads information from the memory and, in conjunction with its hardware, completes the steps of the above method.

[0087] This application also provides a computer-readable medium for storing program code that is used to perform any of the methods in the foregoing embodiments.

[0088] It should be noted that the computer-readable medium described above in this application can be a computer-readable signal medium or a computer-readable storage medium, or any combination of the two. A computer-readable storage medium can be, for example,—but not limited to—an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples of a computer-readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer disk, a hard disk, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage device, magnetic storage device, or any suitable combination thereof. In this application, a computer-readable storage medium can be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, apparatus, or device. In this application, a computer-readable signal medium can include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code. Such propagated data signals can take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A computer-readable signal medium can be any computer-readable medium other than a computer-readable storage medium, which can send, propagate, or transmit a program for use by or in connection with an instruction execution system, apparatus, or device. The program code contained on the computer-readable medium can be transmitted using any suitable medium, including but not limited to: wires, optical fibers, RF (radio frequency), etc., or any suitable combination thereof.

[0089] The aforementioned computer-readable medium may be included in the aforementioned electronic device; or it may exist independently and not assembled into the electronic device.

[0090] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the method embodiments are basically similar to the system embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the system embodiments.

[0091] The above description is merely a preferred embodiment of this application. Although this application has disclosed preferred embodiments above, it is not intended to limit this application. Any person skilled in the art can make many possible variations and modifications to the technical solutions of this application using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the scope of the technical solutions of this application. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this application without departing from the content of the technical solutions of this application shall still fall within the protection scope of the technical solutions of this application.

[0092] Based on the implementation methods provided in the above aspects, this application can be further combined to provide more implementation methods.

Claims

1. A light source coupling system, the system comprising: The system comprises a first lens assembly, an attenuator, a second lens assembly, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter, wherein the transmittance of the attenuator exhibits a fixed gradient variation. The light emitted by the light source passes through the first lens assembly to form parallel light, and the brightness of the parallel light is adjusted by the attenuator. The parallel light, after brightness adjustment, is converged by the second lens assembly to form a converged light beam. The spectral band of the converged light beam is adjusted by the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image plane corresponding to the second lens assembly. The axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed. The spectral band of the converged light is adjusted by adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane.

2. The system according to claim 1, wherein the axial distance between the continuously adjustable long pass filter and the continuously adjustable short pass filter is determined based on the fact that the size of the spot of the converging light incident on the continuously adjustable long pass filter and the continuously adjustable short pass filter is less than or equal to a size threshold.

3. The system according to claim 1, wherein the continuously adjustable long pass filter and the continuously adjustable short pass filter are connected at a fixed axial distance using a fixing device.

4. In the system according to claim 1, the continuously adjustable long pass filter is placed on the side of the converging image plane closer to the attenuator, and the continuously adjustable short pass filter is placed on the side of the converging image plane away from the attenuator.

5. The system according to claim 1, wherein the attenuator comprises a first attenuator and a second attenuator, and the brightness of the parallel light is adjusted by means of the first attenuator and the second attenuator.

6. The system according to claim 1, further comprising: The third lens assembly, the beam splitter, the fourth lens assembly, and the spectrometer; After adjusting the spectral band, the light rays are converged and used to form parallel light using the third lens combination; The parallel light is focused onto the spectrometer by the beam-splitting prism and the fourth lens combination; The spectrometer is used to monitor the light in real time after brightness and spectral band adjustments.

7. The system according to any one of claims 1-6, wherein the angle of the converging light rays incident on the continuously adjustable long pass filter and the continuously adjustable short pass filter is 5.2 degrees.

8. A light source coupling method, applied to the light source coupling system according to any one of claims 1-7, the method comprising: The light source is controlled to emit light, which is then processed by the first lens assembly to form parallel light. The transmittance of the attenuator is controlled to adjust the brightness of the parallel light, and the parallel light with adjusted brightness is converged by the second lens assembly to form a converging light beam; The spectral band of the converged light beam is adjusted by controlling the filtering bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter, as well as the axial distance between the continuously adjustable long-pass filter and the converging image plane. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image plane corresponding to the second lens assembly, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed.

9. A light source coupling device, the device comprising: Processor and memory; The memory is used to store instructions; The processor is configured to execute the instructions in the memory, performing the method as described in claim 8.

10. A computer-readable storage medium comprising instructions that, when executed on a computer, cause the computer to perform the method of claim 8.

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