Air-conditioning control device, air-conditioning system, air-conditioning control method, and air-conditioning control program

Abstract

The present invention saves energy in air-conditioning control of an environment control room such as a clean room or a dry room, and comprises an air-conditioning control unit 52 that controls the supply amount of a cooling medium, which is supplied from cooling medium supply equipment 4 to primary air conditioning equipment 2 and secondary air conditioning equipment 3, on the basis of the temperature and / or the humidity of an environment control room CR so that the temperature and / or the humidity of the environment control room CR stays within a target range.

Description

Air conditioning control device, air conditioning system, air conditioning control method, and air conditioning control program

[0001] The present invention relates to an air conditioning control device, an air conditioning system, an air conditioning control method, and an air conditioning control program.

[0002] Conventionally, for example, an air conditioning system used in an environmental control room such as a clean room or a dry room is configured to control the environmental control room to a constant temperature and a constant humidity regardless of fluctuations in the heat load in the environmental control room.

[0003] Also, as shown in Patent Document 1, an air conditioning system having an internal conditioner and an external conditioner that are individually controlled to control the inside of a clean room to a predetermined temperature and humidity (temperature and humidity) has been considered. In this air conditioning system, the internal conditioner is subjected to dead zone control, and the temperature and humidity of the outside air are adjusted so that the temperature and humidity of the mixed air when the outside air and the return air are mixed are in the region of the upper limit or the lower limit of the tolerance range of the target value, thereby restricting excessive control of the external conditioner.

[0004] Japanese Patent Application Laid-Open No. 2007-232331

[0005] However, in the above air conditioning system, energy saving is achieved by efficiently performing dead zone control of the secondary air conditioning equipment, which is an internal conditioner, and there is a limit to achieving further energy saving for the entire air conditioning system.

[0006] Therefore, the present invention has been made in view of the above problems, and its main object is to save energy in the air conditioning control of an environmental control room such as a clean room or a dry room.

[0007] That is, the air conditioning control device according to the present invention, and the air conditioning control system of the present invention adaptively control a cooling medium supply facility, a primary air conditioning facility, and a secondary air conditioning facility so that the temperature and / or humidity of the environmental control room is within a target range based on the temperature and / or humidity of the environmental control room.

[0008] Specifically, the air conditioning control device according to the present invention controls a primary air conditioning unit that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning unit that conditioned the outside air supplied from the primary air conditioning unit and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply unit that supplied a cooling medium to the primary air conditioning unit and the secondary air conditioning unit, thereby controlling the temperature and / or humidity of the environmental control room, and is characterized by comprising an air conditioning control unit that adjusts the distribution of the cooling medium supplied from the cooling medium supply unit to the primary air conditioning unit and the secondary air conditioning unit, respectively, based on the temperature and / or humidity of the environmental control room, so that the temperature and / or humidity of the environmental control room falls within the target range.

[0009] With such an air conditioning control system, the distribution of cooling medium supplied from the cooling medium supply equipment to the primary and secondary air conditioning equipment is adjusted based on the temperature and / or humidity of the environmental control room so that the temperature and / or humidity of the environmental control room are within the target range. This allows for the supply of the optimal cooling medium to each of the primary and secondary air conditioning equipment. As a result, energy savings can be achieved in the air conditioning control of the environmental control room.

[0010] The cooling medium supply equipment circulates the cooling medium between the primary air conditioning equipment and the secondary air conditioning equipment. The air conditioning control unit preferably raises the set temperature of the cooling medium in the cooling medium supply equipment and / or reduces the circulation flow rate of the cooling medium, and adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively. With this configuration, the energy consumed by the cooling medium supply equipment can be reduced by raising the set temperature of the cooling medium in the cooling medium supply equipment and / or reducing the circulation flow rate of the cooling medium. Furthermore, by adjusting the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, the air conditioning control of the environmental control room can be made even more energy-efficient.

[0011] When the measuring unit measures the temperature and / or relative humidity of the environmental control room, as shown in "CR Temperature (°C)" and "CR Humidity (%RH)" in Figure 7, the temperature and / or relative humidity of the environmental control room can vary significantly depending on the measurement area due to the worker's breath or sweating. Therefore, even if the cooling medium supply equipment, primary air conditioning equipment, and secondary air conditioning equipment are controlled based on the temperature and / or relative humidity of the environmental control room, it is difficult to accurately control the temperature and / or absolute humidity of the environmental control room. For this reason, it is desirable for the air conditioning control unit to adjust the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on the absolute humidity of the environmental control room. As is clear from the "CR absolute humidity (g / kg)" and "number of workers (persons / hr)" in Figure 7, the absolute humidity in the environmental control room is correlated with the workers' exhaled breath or sweating. As shown in "CR absolute humidity (g / kg)" in Figure 3, there is little variation depending on the measurement area. Therefore, by controlling the cooling medium supply equipment, primary air conditioning equipment, and secondary air conditioning equipment based on the absolute humidity of the environmental control room, the temperature and / or absolute humidity of the environmental control room can be controlled with high accuracy.

[0012] As described above, the absolute humidity in the environmental control room is correlated with the breath or sweating of workers (see "CR absolute humidity (g / kg)" and "Number of workers (persons / hr)" in Figure 7). Therefore, it is desirable for the air conditioning control unit to adjust the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on a production plan that includes the allocation of personnel to the environmental control room. By including the allocation of personnel to the environmental control room in the production plan, fluctuations in the absolute humidity of the environmental control room can be predicted, and the temperature and / or absolute humidity of the environmental control room can be controlled with high accuracy.

[0013] The air conditioning control unit preferably uses a trained model, which has been machine-learned, to determine the relationship between the number of workers in the environmental control room at each time, the dew point temperature of the supply air supplied to the environmental control room from the primary air conditioning equipment, and the absolute humidity of the environmental control room. Based on the number of workers and the dew point temperature of the supply air, the unit estimates the absolute humidity of the environmental control room and adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on the estimated absolute humidity. Here, in addition to the production plan including personnel allocation and the dew point temperature of the supply air, the explanatory variables of the trained model may also include the amount of supply air supplied from the primary air conditioning equipment to the environmental control room, or the volume of the environmental control room. With this configuration, the absolute humidity of the environmental control room can be predicted with high accuracy by utilizing actual operational data such as the number of workers and the dew point temperature of the supply air. As a result, humidity fluctuations caused by workers entering and leaving the room and changes in workload can be grasped in advance, and the supply distribution of the cooling medium can be appropriately adjusted, thereby enabling accurate control of the temperature and / or absolute humidity of the environmental control room.

[0014] It is desirable that the air conditioning control unit adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, by model predictive control, based on the temperature and / or humidity measured by the measurement unit and the target temperature and / or target humidity of the environmental control room. Here, it is desirable that the air conditioning control unit uses a model that includes a production plan, including the allocation of personnel to the environmental control room, as the predictive model for the model predictive control. With this configuration, by performing model predictive control using a predictive model that includes a production plan, including the allocation of personnel to the environmental control room, the optimal cooling medium can be supplied to the primary air conditioning equipment and the secondary air conditioning equipment, respectively. As a result, energy savings can be achieved in the air conditioning control of the environmental control room.

[0015] Furthermore, the air conditioning system according to the present invention is characterized by comprising: a primary air conditioning unit that conditioned outside air and supplied it to an environmental control room; a secondary air conditioning unit that conditioned the outside air supplied from the primary air conditioning unit and the air circulating in the environmental control room and supplied it to the environmental control room; a cooling medium supply unit that supplied a cooling medium to the primary air conditioning unit and the secondary air conditioning unit; a measuring unit that measured the temperature and / or humidity of the environmental control room; and the air conditioning control device described above.

[0016] Furthermore, the air conditioning control method according to the present invention controls a primary air conditioning system that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning system that conditioned the outside air supplied from the primary air conditioning system and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply system that supplied a cooling medium to the primary air conditioning system and the secondary air conditioning system, thereby controlling the temperature and / or humidity of the environmental control room, wherein the temperature and / or humidity of the environmental control room is measured, and based on the measured temperature and / or humidity, the amount of the cooling medium supplied from the cooling medium supply system to the primary air conditioning system and the secondary air conditioning system is controlled so that the temperature and / or humidity of the environmental control room falls within the target range.

[0017] Furthermore, the air conditioning control program according to the present invention controls a primary air conditioning unit that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning unit that conditioned the outside air supplied from the primary air conditioning unit and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply unit that supplied a cooling medium to the primary air conditioning unit and the secondary air conditioning unit, thereby controlling the temperature and / or humidity of the environmental control room, and is characterized in that it causes a computer to perform the function of an air conditioning control unit, which controls the amount of the cooling medium supplied from the cooling medium supply unit to the primary air conditioning unit and the secondary air conditioning unit, respectively, so that the temperature and / or humidity of the environmental control room falls within the target range, based on the measured temperature and / or humidity of the environmental control room.

[0018] The air conditioning control program may be distributed electronically, or it may be recorded on a program recording medium such as a CD, DVD, or flash memory.

[0019] According to the present invention described above, it is possible to save energy in air conditioning control of environmental control rooms such as clean rooms or dry rooms.

[0020] This is an overall configuration diagram of an air conditioning system for a cleaning room according to one embodiment of the present invention. This is a psychrometric chart showing the target range and specific enthalpy of the same embodiment. This is a schematic diagram showing an example of control of the same embodiment. This is a schematic diagram showing (a) the function of the air conditioning control unit and (b) the generation of a trained model of a modified embodiment. This is a graph showing the absolute humidity estimated using the trained model and the measured absolute humidity. This is an overall configuration diagram of an air conditioning system for a dry room according to a modified embodiment. This is a graph showing the outside air conditions and state variables inside the clean room.

[0021] <An Embodiment of an Air Conditioning System According to the Present Invention> An embodiment of the air conditioning system according to the present invention will be described below with reference to the drawings. In addition, all of the following drawings are schematic representations that have been appropriately omitted or exaggerated for the sake of clarity. The same components are denoted by the same reference numerals and their descriptions are appropriately omitted.

[0022] <Configuration of the air conditioning system 100> The air conditioning system 100 of this embodiment controls the temperature and / or humidity of the environmental control room CR. The environmental control room CR of this embodiment is a clean room that is managed to maintain a constant level of air purity.

[0023] Specifically, as shown in Figure 1, the air conditioning system 100 includes a primary air conditioning unit 2 that conditioned outside air and supplied it to the environmental control room CR, a secondary air conditioning unit 3 that conditioned the outside air supplied from the primary air conditioning unit 2 and the air circulating in the environmental control room CR (return air) and supplied it to the environmental control room CR, and a cooling medium supply unit 4 that supplies a cooling medium to the primary air conditioning unit 2 and the secondary air conditioning unit 3.

[0024] The primary air conditioning unit 2 is what is commonly called an air handling unit, and it supplies cooled supply air (SA) to the return air (RA) of the environmental control room CR. This primary air conditioning unit 2 has a dehumidification / cooling unit 21 such as a cooling coil that cools and dehumidifies the outside air, a humidification unit 22 such as a steam humidifier that humidifies the outside air, and / or a blower fan 23 for supplying outside air. The humidification unit 22 is supplied with a heating medium such as water vapor from a heating medium supply equipment (not shown). In addition, the primary air conditioning unit 2 may be equipped with a dust collection filter 24 as needed.

[0025] The secondary air conditioning unit 3 is what is commonly known as an air conditioning unit, and it cools the supply air (SA) from the primary air conditioning unit 2 and the return air (RA) from the environmental control room CR. This secondary air conditioning unit 3 has a cooling unit 31, such as a cooling coil, that cools the supply air (SA) and the return air (RA).

[0026] The cooling medium supply equipment 4 supplies a cooling medium, such as chilled water, to the dehumidification / cooling section 21 of the primary air conditioning equipment 2 and the cooling section 31 of the secondary air conditioning equipment 3. This cooling medium supply equipment 4 circulates the cooling medium between the dehumidification / cooling section 21 and the cooling section 31, and has a cooling source 41 for cooling the cooling medium, a first circulation system 42 for circulating the cooling medium to the dehumidification / cooling section 21, and a second circulation system 43 for circulating the cooling medium to the cooling section 31. Furthermore, the cooling medium supply equipment 4 is configured to change the distribution ratio of the cooling medium circulated in the first circulation system 42 and the cooling medium circulated in the second circulation system 43, for example, by a flow rate ratio control device 44 such as flow rate adjustment valves 44a and 44b.

[0027] Furthermore, the air conditioning system 100 includes an air conditioning control device 5 for adaptively controlling (coordinatedly controlling) the primary air conditioning equipment 2, the secondary air conditioning equipment 3, and the cooling medium supply equipment 4 in response to fluctuations in the heat load in the environmental control room CR.

[0028] The air conditioning control device 5 includes a measuring unit 51 for measuring the temperature and / or humidity of the environmental control room CR, and an air conditioning control unit 52 that adaptively controls the primary air conditioning equipment 2, the secondary air conditioning equipment 3, and the cooling medium supply equipment 4 based on the temperature and / or humidity measured by the measuring unit 51. Alternatively, instead of having a measuring unit 51, the air conditioning control device 5 may include a receiving unit for receiving the temperature and / or humidity measured by the measuring unit 51.

[0029] The measuring unit 51 may measure the temperature and / or absolute humidity of the environmental control room CR. This measuring unit 51 may measure the absolute humidity of the environmental control room CR itself, or it may measure the temperature and relative humidity of the environmental control room CR and calculate the absolute humidity from those temperatures and relative humidity. The measuring unit 51 can be installed at any location in the environmental control room CR. In addition, multiple measuring units 5 may be installed in the environmental control room CR.

[0030] The air conditioning control unit 52 adjusts the distribution (ratio) of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 of the primary air conditioning equipment 2 and the cooling unit 31 of the secondary air conditioning equipment 3, respectively, so that the absolute humidity of the environmental control room falls within the target range, based on the absolute humidity measured by the measurement unit 51. If multiple measurement units 51 are provided, the air conditioning control unit 52 may use calculated values ​​obtained by averaging their measured values ​​or other calculations. The air conditioning control unit 52 is composed of a computer having a CPU, memory, input / output interface, AD converter, or display device such as a display.

[0031] Specifically, the air conditioning control unit 52 raises the set temperature of the cooling medium in the cooling medium supply equipment 4 and / or reduces the (overall) circulation flow rate of the cooling medium, based on the absolute humidity measured by the measurement unit 51, and adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 and the cooling unit 31, respectively. The adjustment of the cooling medium distribution is performed by controlling the flow rate ratio control device 44.

[0032] As a specific example of control, the air conditioning control unit 52 adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 and the cooling unit 31, respectively, so that the variation ranges of the temperature and humidity (relative humidity or absolute humidity) measured by the measurement unit 51 fall within a predetermined range (first stage control). In this first stage control, the air conditioning control unit 52 increases the distribution of the cooling medium to the dehumidification / cooling unit 21, for example.

[0033] Furthermore, if, as a result of the first stage of control described above, the variation ranges of temperature and humidity (relative humidity or absolute humidity) measured by the measurement unit 51 do not fall within the target range on the psychrometric chart (for example, temperature 23±2°C, relative humidity 50±5%RH, see Figure 2), the air conditioning control unit 52 lowers the set temperature of the cooling medium in the cooling medium supply equipment 4 (second stage of control). The air conditioning control unit 52 repeats the first and second stages of control described above.

[0034] For example, if the influence of outside air on the absolute humidity of the environmental control room CR is significant, as shown in Figure 3(a), it is possible to increase the set temperature of the cooling medium in the cooling medium supply equipment 4 (see Figure 2), increase the distribution of the cooling medium to the dehumidification / cooling unit 21, and decrease the distribution of the cooling medium to the cooling unit 31. In this way, by increasing the set temperature of the cooling medium in the cooling medium supply equipment 4, the amount of energy (enthalpy) can be reduced, and energy can be saved.

[0035] Furthermore, if the influence of outside air on the absolute humidity of the environmental control room CR is significant, as shown in Figure 3(b), it is possible to reduce the circulation flow rate of the cooling medium in the cooling medium supply equipment 4, increase the distribution of the cooling medium to the dehumidification / cooling unit 21, and decrease the distribution of the cooling medium to the cooling unit 31.

[0036] Furthermore, the air conditioning control unit 52 may adjust the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidifying / cooling unit 21 and the cooling unit 31, respectively, based on the temperature of the cooling medium flowing into the dehumidifying / cooling unit 21 (inlet temperature) and / or flowing out (outlet temperature), and the temperature of the cooling medium flowing into the cooling unit 31 (inlet temperature) and / or flowing out (outlet temperature). With this configuration, the optimal cooling medium can be supplied to the dehumidifying / cooling unit 21 of the primary air conditioning equipment 2 and the cooling unit 31 of the secondary air conditioning equipment 3, thereby saving energy in the air conditioning control of the environmental control room CR. In addition, the air conditioning control unit 52 can calculate the energy consumption of the dehumidifying / cooling unit 21 from the inlet temperature and outlet temperature of the dehumidifying / cooling unit 21, and calculate the energy consumption of the cooling unit 31 from the inlet temperature and outlet temperature of the cooling unit 31. As a result, the air conditioning control unit 52 can adjust the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 and the cooling unit 31, respectively, based on the energy consumption of the dehumidification / cooling unit 21 and the energy consumption of the cooling unit 31.

[0037] In addition, the air conditioning control unit 52 may change the set values ​​such as the set temperature of the primary air conditioning equipment 2 and / or the set values ​​such as the set temperature of the secondary air conditioning equipment 3 based on the absolute humidity measured by the measurement unit 51.

[0038] <Effects of this embodiment> According to the air conditioning equipment control system 100 of this embodiment configured as described above, the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 of the primary air conditioning equipment 2 and the cooling unit 31 of the secondary air conditioning equipment 3 is adjusted so that the absolute humidity (dew point temperature) of the environmental control room CR falls within the target range, based on the absolute humidity measured by the measurement unit 51. As a result, the optimal cooling medium can be supplied to the dehumidification / cooling unit 21 of the primary air conditioning equipment 2 and the cooling unit 31 of the secondary air conditioning equipment 3.

[0039] <Other Embodiments> For example, the air conditioning control unit 52 can adjust the distribution of cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 and the cooling unit 31, respectively, based on the absolute humidity measured by the measurement unit 51 and the production plan including personnel allocation to the environmental control room, the test schedule, the outside air temperature forecast, and / or the outside air humidity forecast. In this case, the receiving unit of the air conditioning control device 5 can receive information used for control, such as the production plan, the test schedule, the outside air temperature forecast, and / or the outside air humidity forecast. The production plan includes not only personnel allocation to the environmental control room CR (including the entry and exit of workers), but also production time and / or production conditions. By using the production plan in this way, fluctuations in absolute humidity occurring in the environmental control room based on the respiration or sweating of workers can be predicted in advance, and the temperature and / or absolute humidity of the environmental control room CR can be controlled with high accuracy.

[0040] Furthermore, the air conditioning control unit 52 can also adjust the distribution of the cooling medium supplied from the cooling medium supply equipment 4 to the dehumidification / cooling unit 21 and the cooling unit 31, respectively, by model predictive control, based on the absolute humidity measured by the measurement unit 51 and the target absolute humidity of the environmental control room.

[0041] Here, the predictive model used in model predictive control is a model that includes a production plan, including the allocation of personnel to the environmental control room (CR). In addition, the predictive model may include the test schedule, outside air temperature forecast, outside air humidity forecast, operating and / or stopping times of each air conditioning unit 2 and 3, set values ​​for each air conditioning unit 2 and 3, and time constants for temperature and / or humidity control by each air conditioning unit 2 and 3. Furthermore, the predictive model can be updated by machine learning based on the difference between actual values, etc.

[0042] Further, as shown in FIG. 4(b), the air-conditioning control unit 52 may use a learned model obtained by machine learning the relationship among the workers at each time in the environmental control room CR, the dew point temperature of the supply air supplied from the primary air-conditioning equipment 2 to the environmental control room CR, and the absolute humidity of the environmental control room CR. Here, in addition to the workers and the dew point temperature of the supply air, the explanatory variables of the learned model may include at least one of the supply air volume supplied from the primary air-conditioning equipment 2 to the environmental control room CR, the volume of the environmental control room CR, the specific enthalpy of the environmental control room CR at the previous time, or the temperature of the environmental control room CR.

[0043] In this embodiment, the learned model uses the data of "the workers at each time in the past environmental control room CR", "the dew point temperature of the supply air supplied from the past primary air-conditioning equipment 2 to the environmental control room CR", and "the measured absolute humidity of the past environmental control room CR", and learns these relationships by a machine learning algorithm. This learned model may be generated by the air-conditioning control unit 52 or by another information processing device.

[0044] In this case, as shown in FIG. 4(a), the air-conditioning control unit 52 inputs the workers and the dew point temperature of the supply air as input data into the learned model, and estimates the absolute humidity of the environmental control room CR by the learned model. In this case, the air-conditioning control unit 52 includes an absolute humidity estimation unit 521 having an input reception unit 52a that receives the input data, an estimation unit 52b that estimates the absolute humidity by the learned model, and an output unit 52c that outputs the estimated absolute humidity. In the air-conditioning control unit 52, the application controller 522 can adjust the distribution of the cooling medium supplied from the cooling medium supply facility 4 to the dehumidification / cooling unit 21 and the cooling unit 31 based on the estimation result (absolute humidity) obtained by this learned model.

[0045] The air-conditioning control unit 52 acquires the dew point temperature of the supply air from a dew point temperature sensor provided in the supply air duct between the primary air-conditioning equipment 2 and the environmental control room CR.

[0046] In addition, the air-conditioning control unit 52 can obtain the number of workers at each time by any one of the following (1) to (4). (1) When there is a plan for the workers, estimate the number of workers at each time based on the workers in that plan. (2) When there is data that can grasp the number of real-time entrants, estimate the number of workers at each time based on the number of workers at that time. (3) When there is information that can estimate the number of personnel such as the target production quantity, estimate the number of workers at each time based on that information. In addition, if unsteady production operations (for example, dealing with defective products, dealing with new products / new lot products) are planned, estimate and add the number of workers for unsteady production operations. (4) When there is data that can grasp the number of past entrants, estimate the number of workers at each time from the maximum number of workers at each time based on the past trend.

[0047] As shown in FIG. 5, the absolute humidity estimated from the current number of workers and the dew point temperature of the supply air supplied from the primary air-conditioning equipment 2 to the environmental control room CR using the learned model learned as described above is shown. As can be seen from FIG. 5, the absolute humidity of the environmental control room CR can be accurately estimated by the learned model. As a result, it is possible to grasp in advance the absolute humidity fluctuations caused by the entry and exit of workers and changes in the workload, and appropriately adjust the supply distribution of the cooling medium, so that the temperature and / or absolute humidity of the environmental control room can be accurately controlled.

[0048] Furthermore, although the measurement unit 51 of the above embodiment measures the absolute humidity, it may measure the temperature and / or relative humidity of the environmental control room. In this case, the air-conditioning control unit 52 may calculate the absolute humidity from the temperature and / or relative humidity of the environmental control room and adaptively control the primary air-conditioning equipment 2, the secondary air-conditioning equipment 3, and the cooling medium supply equipment 4 based on the absolute humidity. In addition, the air-conditioning control unit 52 may adaptively control the primary air-conditioning equipment 2, the secondary air-conditioning equipment 3, and the cooling medium supply equipment 4 based on the temperature and / or relative humidity of the environmental control room.

[0049] Although the environmental control room in the above embodiment was a clean room, as shown in Figure 6, it may also be a room (dry room) that controls a low dew point environment by removing moisture from the air. In this case, the primary air conditioning equipment 2 has cooling units 21a, 21b, a dehumidifying rotor 25 made of silica gel or the like, heating units 26a, 26b, and a blower fan 27, etc. In Figure 4, the configuration adjusts the distribution of the cooling medium between the cooling unit 21b that cools the air after it has passed through the dehumidifying roller 25 and the cooling unit 31 provided in the dry room CR. Alternatively, the configuration may also adjust the distribution of the cooling medium between the cooling unit 21a that cools the air before it has passed through the dehumidifying roller 25 and the cooling unit 31 provided in the dry room CR.

[0050] Furthermore, the environmental control room may also be a room (test room) used to test test specimens such as vehicles. In addition, the present invention is applicable to any air conditioning system that controls the temperature and / or humidity of a room.

[0051] Furthermore, various modifications and combinations of the embodiments are permitted, as long as they do not contradict the spirit of the present invention.

[0052] According to the present invention, it is possible to save energy in the air conditioning control of environmental control rooms such as clean rooms or dry rooms.

[0053] 100...Air conditioning system 2...Primary air conditioning equipment 3...Secondary air conditioning equipment 4...Cooling medium supply equipment 5...Air conditioning control device 51...Measurement unit 52...Air conditioning control unit

Claims

1. An air conditioning control device that controls a primary air conditioning system that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning system that conditioned the outside air supplied from the primary air conditioning system and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply system that supplied a cooling medium to the primary air conditioning system and the secondary air conditioning system, thereby controlling the temperature and / or humidity of the environmental control room, the air conditioning control device comprising an air conditioning control unit that adjusts the distribution of the cooling medium supplied from the cooling medium supply system to the primary air conditioning system and the secondary air conditioning system, respectively, based on the temperature and / or humidity of the environmental control room, so that the temperature and / or humidity of the environmental control room falls within a target range.

2. The air conditioning control device according to claim 1, wherein the cooling medium supply equipment circulates the cooling medium between the primary air conditioning equipment and the secondary air conditioning equipment, and the air conditioning control unit raises the set temperature of the cooling medium in the cooling medium supply equipment and / or reduces the circulation flow rate of the cooling medium, and adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively.

3. The air conditioning control device according to claim 1 or 2, wherein the air conditioning control unit adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on the absolute humidity of the environmental control room.

4. The air conditioning control device according to any one of claims 1 to 3, wherein the air conditioning control unit adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on a production plan that includes the allocation of personnel to the environmental control room.

5. The air conditioning control device according to any one of claims 1 to 4, wherein the air conditioning control unit uses a trained model obtained by machine learning the relationship between the number of workers in the environmental control room at each time, the dew point temperature of the supply air supplied to the environmental control room from the primary air conditioning equipment, and the absolute humidity of the environmental control room to estimate the absolute humidity of the environmental control room from the number of workers and the dew point temperature of the supply air, and adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, based on the estimated absolute humidity.

6. The air conditioning control device according to any one of claims 1 to 4, wherein the air conditioning control unit adjusts the distribution of the cooling medium supplied from the cooling medium supply equipment to the primary air conditioning equipment and the secondary air conditioning equipment, respectively, by model predictive control, based on the temperature and / or humidity measured by the measuring unit and the target temperature and / or target humidity of the environmental control room.

7. The air conditioning control unit uses a model that includes a production plan, including the allocation of personnel to the environmental control room, as the predictive model for the model predictive control, and the air conditioning control device according to claim 6.

8. An air conditioning system comprising: a primary air conditioning unit that conditioned outside air and supplied it to an environmental control room; a secondary air conditioning unit that conditioned the outside air supplied from the primary air conditioning unit and the air circulating in the environmental control room and supplied it to the environmental control room; a cooling medium supply unit that supplied a cooling medium to the primary air conditioning unit and the secondary air conditioning unit; a measuring unit that measured the temperature and / or humidity of the environmental control room; and an air conditioning control device according to any one of claims 1 to 7.

9. An air conditioning control method for controlling the temperature and / or humidity of an environmental control room by controlling a primary air conditioning system that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning system that conditioned the outside air supplied from the primary air conditioning system and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply system that supplied a cooling medium to the primary air conditioning system and the secondary air conditioning system, wherein the air conditioning control method adjusts the distribution of the cooling medium supplied from the cooling medium supply system to the primary air conditioning system and the secondary air conditioning system, respectively, based on the temperature and / or humidity of the environmental control room, so that the temperature and / or humidity of the environmental control room falls within a target range.

10. An air conditioning control program that controls a primary air conditioning system that conditioned outside air and supplied it to an environmental control room, a secondary air conditioning system that conditioned the outside air supplied from the primary air conditioning system and the air circulating in the environmental control room and supplied it to the environmental control room, and a cooling medium supply system that supplied a cooling medium to the primary air conditioning system and the secondary air conditioning system, thereby controlling the temperature and / or humidity of the environmental control room, wherein the program causes a computer to function as an air conditioning control unit, adjusting the distribution of the cooling medium supplied from the cooling medium supply system to the primary air conditioning system and the secondary air conditioning system, respectively, so that the temperature and / or humidity of the environmental control room falls within a target range.

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