Opening / closing device and sheet material processing device

Abstract

At least one of a pair of opening / closing members included in an opening / closing device includes: a body part extending in a width direction, the body part having a first surface facing the counterpart-side opening / closing member, a second surface facing a one-side end wall, and a pair of third surfaces respectively facing a pair of facing walls; and a first seal member disposed on the body part. The first seal member has: a first seal part that extends along the width direction on the first surface and that is in contact with a sheet material at a closed position; a second seal part that extends along the width direction on the second surface and that is in contact with the one-side end wall at least at the closed position; and a pair of third seal parts that respectively extend along the thickness direction on the pair of third surfaces and that are respectively in contact with the pair of third surfaces at least at the closed position.

Description

Opening and closing device and sheet material processing device

[0001] This disclosure relates to an opening and closing device and a sheet material processing device. This application claims priority based on Japanese Patent Application No. 2024-227870 filed with the Japan Patent Office on December 24, 2024, and incorporates its content herein by reference.

[0002] Patent Document 1 discloses a pretreatment chamber, a heating chamber, and a post-treatment chamber for performing a prescribed treatment on a stainless steel plate. The stainless steel plate is an example of a sheet material.

[0003] Japanese Unexamined Patent Application Publication No. 2011-174097

[0004] When a prescribed treatment is executed in the treatment chamber exemplified above, it is preferable that the treatment chamber be hermetically closed.

[0005] An object of this disclosure is to provide an opening and closing device capable of hermetically closing a treatment chamber for performing a prescribed treatment on a sheet material, and a sheet material processing device.

[0006] An opening / closing device according to at least one embodiment of the present disclosure is an opening / closing device for opening and closing a processing chamber configured for loading or unloading a long sheet material, comprising: a housing configured for the sheet material to pass through; a pair of opening / closing members arranged within the housing facing each other in the thickness direction of the sheet material with the sheet material in between, and configured to move relative to each other in the thickness direction between an open position away from the sheet material and a closed position that clamps the sheet material, wherein the housing includes a one-side end wall which is one end wall in the transport direction of the sheet material, and having a slit hole formed therein for the sheet material to pass through; and a pair of opposing walls arranged facing each other in the width direction of the sheet material with the sheet material in between, wherein at least one of the pair of opening / closing members includes a main body portion extending in the width direction, having a first surface facing the other opening / closing member, a second surface facing the one-side end wall, and a pair of third surfaces facing the pair of opposing walls, respectively; and a first sealing member disposed in the main body portion, wherein the first sealing member is The first surface has a first sealing portion that extends along the width direction and contacts the sheet material in the closed position; the second surface has a second sealing portion that extends along the width direction and contacts at least one side end wall in the closed position; and the pair of third sealing portions that extend along the thickness direction on the pair of third surfaces, and contact at least the pair of third surfaces in the closed position.

[0007] A sheet material processing apparatus according to at least one embodiment of the present disclosure comprises: a conveyor roller for conveying the sheet material along a predetermined conveyor path; a processing chamber disposed on the conveyor path for performing a predetermined processing on the sheet material; and the above-mentioned opening and closing device disposed on the upstream or downstream side of the conveyor path relative to the processing chamber.

[0008] According to this disclosure, an opening and closing device that can hermetically close a processing chamber for applying a specified treatment to a sheet material, and a sheet material processing device are provided.

[0009] This is a schematic diagram of a sheet material processing apparatus according to one embodiment. This is a schematic diagram of an opening / closing device according to one embodiment. This is a schematic cross-sectional view of an opening / closing member according to one embodiment. This is a schematic cross-sectional view of an opening / closing member according to one embodiment. This is a schematic cross-sectional view of a pair of opening / closing members in the closed position perspective view of an opening / closing member according to one embodiment. This is a schematic cross-sectional view of a first sealing member according to one embodiment. This is a schematic perspective view of an opening / closing member with additional components according to one embodiment. This is a schematic cross-sectional view of the opening / closing member shown in Figure 9. This is a schematic diagram of an opening / closing device with additional components according to one embodiment. This is a schematic cross-sectional view of a second sealing member according to one embodiment. This is a schematic cross-sectional view of a pair of first sealing members that sandwich a sheet material according to one embodiment. This is a schematic diagram of an opening / closing device according to another embodiment.

[0010] Hereinafter, several embodiments of this disclosure will be described with reference to the attached drawings. However, the dimensions, materials, shapes, relative arrangements, etc., of the components described as embodiments or shown in the drawings are not intended to limit the scope of this disclosure, but are merely illustrative examples. For example, expressions describing relative or absolute arrangements such as "in a certain direction," "along a certain direction," "parallel," "orthogonal," "center," "concentric," or "coaxial" should not only describe such arrangements strictly, but also represent states where there are tolerances or relative displacements of an angle or distance sufficient to achieve the same function. For example, expressions describing things being in an equal state such as "identical," "equal," and "homogeneous" should not only describe states where things are strictly equal, but also represent states where there are tolerances or differences sufficient to achieve the same function. For example, expressions describing shapes such as square or cylindrical should not only describe geometrically precise square or cylindrical shapes, but also shapes including concave and concave parts, chamfered parts, etc., to the extent that the same effect can be achieved. On the other hand, expressions such as "possessing," "including," or "having" a single component are not exclusive expressions that exclude the existence of other components. Furthermore, similar components may be denoted by the same symbol, and their explanations may be omitted.

[0011] <Overview of Sheet Material Processing Device 10> Figure 1 is a schematic diagram of a sheet material processing device 10 according to one embodiment of the present disclosure. The sheet material processing device 10 includes a conveyor roller 7 for conveying a long sheet material 5 along a predetermined conveyor path C, a processing chamber 20 for performing predetermined processing on the sheet material 5, an opening / closing device 1 for opening and closing the processing chamber 20, and a sheet material chamber 6 arranged on the opposite side of the processing chamber 20 from the opening / closing device 1. The processing chamber 20, the opening / closing device 1, and the sheet material chamber 6 are all arranged on the conveyor path C.

[0012] In the following explanation, the conveying direction of the sheet material 5 may be abbreviated as "conveying direction," the upstream side of the conveying path C as "upstream side," and the downstream side of the conveying path C as "downstream side." The conveying direction coincides with the longitudinal direction of the sheet material 5. Furthermore, the width direction of the sheet material 5 may be abbreviated as "width direction," and the thickness direction of the sheet material 5 as "thickness direction."

[0013] The conveying roller 7 includes a dispensing roller 8 positioned upstream of the sheet material chamber 6 and a winding roller 9 positioned downstream of the processing chamber 20. The dispensing roller 8 holds a dispensing roll 2 around which the sheet material 5 is wound, and is configured to rotate in the dispensing direction (arrow A1) that dispenses the sheet material 5. The winding roller 9 holds a winding roll 3 around which the sheet material 5 is wound, and is configured to rotate in the winding direction (arrow A2) that winds the sheet material 5. The sheet material 5 is stretched from the dispensing roller 8 to the winding roller 9. The material forming the sheet material 5 is metal, resin, or ceramic, etc.

[0014] The processing chamber 20 defines a processing space 20S for performing a specified process on the sheet material 5. The specified process can be any process. For example, the specified process is performed in an environment where the pressure in the processing space 20S is different from the pressure in the conveying space 6S of the sheet material chamber 6. More specifically, the specified process may include at least one of the following: a gas suction process for aspirating gas from within the processing space 20S; a gas supply process for supplying processing gas into the processing space 20S; a heating process for heating the sheet material 5; or a cooling process for cooling the sheet material 5.

[0015] For example, when a gas suction process or a gas supply process is performed in the processing space 20S, it is preferable to seal the processing space 20S hermetically from the viewpoint of preventing gas inflow or leakage. Similarly, when a heating process or a cooling process is performed in the processing space 20S, it is preferable to seal the processing space 20S hermetically from the viewpoint of preventing heat leakage from the processing space 20S to the outside or heat inflow.

[0016] Therefore, in one embodiment of the present disclosure, the opening / closing device 1 is configured to close the processing chamber 20 while a prescribed process is being performed in the processing space 20S. In the example shown in Figure 1, the opening / closing device 1 is located upstream of the processing chamber 20, and the opening / closing device 1 opens and closes the inlet 20I of the processing chamber 20. In other examples, the opening / closing device 1 may be located downstream of the processing chamber 20 (not shown), in which case the opening / closing device 1 opens and closes the outlet of the processing chamber 20.

[0017] The sheet material chamber 6 defines a transport space 6S through which the sheet material 5 passes. In the transport space 6S, the sheet material 5 may or may not undergo any processing during transport. In this example, the sheet material chamber 6 is located upstream of the opening / closing device 1.

[0018] The operation of the sheet material processing device 10 is as follows: The sheet material 5, fed out from the feed roller 8, passes through the sheet material chamber 6 and the opening / closing device 1 and is transported into the processing chamber 20. The opening / closing device 1 closes the entrance 20I, and the sheet material 5 is subjected to the prescribed processing in the closed processing chamber 20. After processing is complete, the sheet material 5 is discharged from the processing chamber 20 and then wound up by the winding roller 9.

[0019] Note that Figure 1 is merely a schematic diagram. The feed roller 8 may be housed in the first roller case, and the first roller case and the sheet material chamber 6 may be integrally constructed. Alternatively, one or more chambers may be placed between the first roller case and the sheet material chamber 6. In these chambers, some kind of chemical or physical treatment may be applied to the sheet material 5. Similarly, the winding roller 9 may be housed in the second roller case, and the processing chamber 20 and the second roller case may be integrally constructed. Furthermore, one or more chambers may be placed between the processing chamber 20 and the second roller case.

[0020] <Outline of Opening / Closing Device 1> As shown in Figures 1 and 2, the opening / closing device 1 includes a housing 30 through which the sheet material 5 passes. The housing 30 includes a one-side end wall 32 which is one end wall in the transport direction, a other-side end wall 34 opposite to the one-side end wall 32, a pair of opposing walls 33 arranged facing each other in the width direction with the sheet material 5 in between, and a pair of defined end walls 35 arranged facing each other in the thickness direction with the sheet material 5 in between. Each of the one-side end wall 32 and the other-side end wall 34 has a slit hole 39 that is long in the width direction for the sheet material 5 to pass through. The slit hole 39 of the other-side end wall 34 is in communication with the entrance 20I of the processing chamber 20.

[0021] The opening / closing device 1 further comprises a pair of opening / closing members 40 arranged facing each other in the thickness direction with a sheet material 5 in between within the housing 30. Each of the pair of opening / closing members 40 illustrated in Figures 1 and 2 is a movable body 45 configured to move in the thickness direction. Each of the pair of movable bodies 45 is powered by a pair of actuators (not shown). The actuators are air cylinders, hydraulic cylinders, solenoids, or motors.

[0022] Each of the pair of opening / closing members 40 (a pair of movable bodies 45) is configured to move between an open position away from the sheet material 5 and a closed position that clamps the sheet material 5. In Figures 1 and 2, the movable body 45 in the open position is shown by a dashed line, and the movable body 45 in the closed position is shown by a solid line. The opening / closing members 40 clamp the sheet material 5, thereby closing the entrance 20I of the processing chamber 20. Note that one of the pair of opening / closing members 40 may be a fixed body 46 (see Figure 14) instead of a movable body 45. Further details will be described later.

[0023] Since the pair of opening and closing members 40 in this example have symmetrical shapes in the thickness direction, only the shape of one of them will be described in detail below.

[0024] Figures 3 and 4 are schematic diagrams showing one of a pair of opening / closing members 40. The movable body 45 constituting the opening / closing member 40 includes a main body portion 50 extending in the width direction and a first sealing member 41 installed on the main body portion 50. This is just one example, but the main body portion 50 is longest in the width direction and shortest in the thickness direction. The main body portion 50 is formed of a metal material, for example, and more specifically, preferably stainless steel. The first sealing member 41 is preferably made of an elastic material, for example, a rubber material, and from the viewpoint of heat resistance, preferably made of fluororubber.

[0025] The main body 50 has a first surface 51 facing the opposing opening / closing member 40, a second surface 52 facing one end wall 32, a pair of third surfaces 53 facing a pair of opposing walls 33, and a fourth surface 54 opposite to the second surface 52. The first surface 51, the second surface 52, the pair of third surfaces 53, and the fourth surface 54 are all flat surfaces. A first gap G1 is formed between the second surface 52 and one end wall 32, a second gap G2 is formed between the fourth surface 54 and the other end wall 34, and a third gap G3 is formed between the third surface 53 and the opposing wall 33.

[0026] The first sealing member 41 has a first sealing portion 41a extending along the width direction on the first surface 51, a second sealing portion 41b extending along the width direction on the second surface 52, and a pair of third sealing portions 41c extending along the thickness direction on a pair of third surfaces 53.

[0027] The first sealing portion 41a extends continuously in the width direction along the entire width of the first surface 51. The second sealing portion 41b contacts one side end wall 32 along the entire width of the second surface 52. The pair of third sealing portions 41c each contact a pair of opposing walls 33. Each third sealing portion 41c may or may not connect the end of the first sealing portion 41a and the end of the second sealing portion 41b.

[0028] Figures 5 and 6 are schematic diagrams of a pair of opening / closing members 40, each in the closed position. The general operation of the opening / closing members 40 is as follows: As the pair of opening / closing members 40 move from the open position toward each other, the second seal portion 41b slides against one side end wall 32, and the third seal portion 41c slides against the opposing wall 33. At the moment each opening / closing member 40 reaches the closed position, the pair of first seal portions 41a sandwich the sheet material 5. In other words, one first seal portion 41a presses the sheet material 5 against the other first seal portion 41a. The portion of the first seal portion 41a that contacts the sheet material 5 is indented by elastic deformation and adheres tightly to the surface of the sheet material 5. The remaining portion of the first seal portion 41a contacts and adheres tightly to the other first seal portion 41a. As a result, the space between the pair of first seal portions 41a is airtightly sealed. At this time, the second sealing portion 41b is in contact with the one-side end wall 32, and the third sealing portion 41c is in contact with the opposing wall 33. Therefore, the space between the second sealing portion 41b and the one-side end wall 32, and the space between the third sealing portion 41c and the opposing wall 33 can also be airtightly sealed. As a result, the slit hole 39 in the one-side end wall 32 is not in communication with the slit hole 39 in the other-side end wall 34. Thus, the opening / closing device 1 can airtightly close the inlet 20I of the processing chamber 20. As a result, the processing chamber 20 is airtightly closed.

[0029] This disclosure is not limited to the embodiment shown in Figure 1. The processing chamber 20 may be located upstream of the opening / closing device 1, and the sheet material chamber 6 may be located downstream of the opening / closing device 1. Alternatively, the sheet material chamber 6 may not be provided. In the example shown in Figure 1, the one-sided end wall 32 is the upstream end wall of the housing 30, but this disclosure is not limited thereto, and the one-sided end wall 32 may be the downstream end wall of the housing 30. The second seal portion 41b may contact the one-sided end wall 32 only when the opening / closing member 40 is in the closed position, and the inner wall surface 32a of the one-sided end wall 32 (see Figure 8) may be a tapered surface inclined with respect to the thickness direction. Similarly, the third seal portion 41c may contact the opposing wall 33 only when the opening / closing member 40 is in the closed position, and the inner wall surface 33a of the opposing wall 33 (see Figure 8) may be a tapered surface inclined with respect to the thickness direction. The third seal portion 41c may be spaced apart from the end of the first seal portion 41a or the end of the second seal portion 41b. In this case, if the gap between the third seal portion 41c and the first seal portion 41a, or the gap between the third seal portion 41c and the second seal portion 41b is small, it is possible to make it difficult for gas to pass through. Even if at least one of these modifications is applied to the embodiment of Figure 1, it is possible to seal the processing chamber 20 hermetically.

[0030] The description of the technical advantages of the switchgear 1 according to one embodiment of this disclosure will continue. By closing the processing chamber 20, the switchgear 1 can make the sheet material chamber 6 and the processing chamber 20 non-communicating with each other. This makes it possible to maintain the differential pressure between the processing chamber 20 and the sheet material chamber 6 when performing a prescribed process in an environment where the pressure in the processing chamber 20 is different from the pressure in the sheet material chamber 6.

[0031] In some embodiments, the contact between the second seal portion 41b and one end wall 32, and the contact between the third seal portion 41c and the opposing wall 33 are maintained while the pair of opening / closing members 40 move from the open position to the closed position. That is, regardless of the position of the pair of opening / closing members 40, the second seal portion 41b is in contact with the one end wall 32, and the third seal portion 41c is in contact with the opposing wall 33. As a result, the opening / closing members 40 can more reliably prevent gas from passing between the second seal portion 41b and one end wall 32, and between the third seal portion 41c and the opposing wall 33. Therefore, the opening / closing device 1 can close the processing chamber 20 more airtightly.

[0032] <Details of the Opening / Closing Member 40> As shown in Figure 7, the main body 50 of the opening / closing member 40 (movable body 45) further includes a pair of first curved surfaces 55, a pair of second curved surfaces 56, and a pair of third curved surfaces 57. The pair of first curved surfaces 55 connect both ends 51E in the width direction of the first surface 51 to the pair of third surfaces 53, respectively. The first curved surfaces 55 smoothly connect the first surface 51 and the third surface 53. The pair of second curved surfaces 56 connect both ends 52E in the width direction of the second surface 52 to the pair of third surfaces 53, respectively. The second curved surfaces 56 smoothly connect the second surface 52 and the third surface 53. The pair of third curved surfaces 57 connect both ends 54E in the width direction of the fourth surface 54 to the pair of third surfaces 53, respectively. The third curved surfaces 57 smoothly connect the fourth surface 54 and the third surface 53.

[0033] A first seal groove 70 into which the first seal member 41 is fitted is formed on the outer surface of the main body portion 50. Although this is just one example, the first seal groove 70 is formed in a loop shape on the main body portion 50. The first seal groove 70 may also be a dovetail groove, where the width dimension increases towards the bottom of the groove. The first seal member 41 is fitted into the first seal groove 70 with its protrusion from the outer surface of the main body portion 50.

[0034] The first seal groove 70 includes a first groove portion 71 extending in the width direction on the first surface 51, a second groove portion 72 extending along the width direction on the second surface 52, a pair of third groove portions 73 extending along the thickness direction on a pair of third surfaces 53, a pair of first curved groove portions 75 formed on a pair of first curved surfaces 55, and a pair of second curved groove portions 76 formed on a pair of second curved surfaces 56.

[0035] The first groove 71 extends linearly along the entire width of the first surface 51, and the second groove 72 extends linearly along the entire width of the second surface 52. The third groove 73 extends at an inclination with respect to the thickness direction, and more specifically, it extends in a curved manner such that it moves further away from the first surface 51 in the thickness direction and closer to the second surface 52 in the conveying direction. The first curved groove 75 smoothly connects the end of the first groove 71 to one end of the third groove 73. The second curved groove 76 smoothly connects the end of the second groove 72 to the other end of the third groove 73.

[0036] The first sealing portion 41a of the first sealing member 41 fits into the first groove 71, and the second sealing portion 41b fits into the second groove 72. A pair of third sealing portions 41c fit into each of the pair of third grooves 73. Furthermore, a pair of first portions 41d constituting the first sealing member 41 fit into each of the pair of first curved grooves 75, and a pair of second portions 41e constituting the first sealing member 41 fit into each of the pair of second curved grooves 76. A part of the first portion 41d may contact the opposing wall 33. Also, a part of the second portion 41e may contact one side end wall 32, the opposing wall 33, or both.

[0037] The configuration in which the first sealing member 41 fits into the first sealing groove 70 makes it easier to attach the first sealing member 41 to the main body 50. Also, it prevents the first sealing member 41 from coming off the main body 50 while the opening / closing member 40 (movable body 45) moves toward the closed position. In particular, in an embodiment in which the second sealing portion 41b slides against one side end wall 32 and the third sealing portion 41c slides against the opposing wall 33, the risk of the first sealing member 41 coming off the main body 50 increases. In this respect, with this configuration, since the first sealing groove 70 restrains the first sealing member 41, it is possible to prevent the first sealing member 41 from coming off the main body 50. This technical advantage becomes even more pronounced when the first sealing groove 70 is a dovetail groove. With this configuration, it is possible to restrain the first sealing member 41 without using adhesive material, but this does not preclude the use of adhesive material as an auxiliary.

[0038] The first seal groove 70 is not limited to being formed in a loop shape. The first seal groove 70 may be composed of a first groove portion 71, a second groove portion 72, and a third groove portion 73 that are separated from each other. In this case, the first curved groove portion 75 is not formed on the first curved surface 55, and the second curved groove portion 76 is not formed on the second curved surface 56. In this modified example, the first seal member 41 is not an annular member, and the first seal portion 41a, the second seal portion 41b, and the third seal portion 41c are configured as separate entities. The first seal portion 41a fits into the first groove portion 71 over its entire length in the longitudinal direction. Similarly, the second seal portion 41b fits into the second groove portion 72 over its entire length in the longitudinal direction, and the third seal portion 41c fits into the third groove portion 73 over its entire length in the longitudinal direction. Furthermore, at least one of the pair of first curved surfaces 55 may be omitted. Similarly, at least one of the pair of second curved surfaces 56 may be omitted.

[0039] In some embodiments, the first sealing member 41 may be a single annular member. This annular member integrally includes a first sealing portion 41a, a second sealing portion 41b, a third sealing portion 41c, a pair of first portions 41d, and a pair of second portions 41e. The first sealing member 41 fits into the first sealing groove 70 so as to protrude from the outer surface of the main body portion 50 along the entire length of the longitudinal direction of the first sealing groove 70.

[0040] Figure 8 is a schematic diagram showing the relationship between the first sealing member 41 and the housing 30 according to one embodiment. The housing 30 has an arc-shaped first curved inner wall surface 37 that smoothly connects the inner wall surface 32a of one side end wall 32 and the inner wall surface 33a of the opposing wall 33. The second portion 41e that fits into the second curved groove 76 (see Figure 7) is in contact with the first curved inner wall surface 37 along its entire circumferential length. The contact state between the second portion 41e and the first curved inner wall surface 37 is maintained regardless of the position of the opening / closing member 40. Therefore, when the opening / closing member 40 moves toward the closed position, the second portion 41e slides against the first curved inner wall surface 37.

[0041] If the first sealing member 41 is composed of multiple separate members, there is a risk that gas may pass between these members. In this case, since the first sealing member 41 is a single annular member, the passage of gas can be suppressed. Therefore, the slit hole 39 (see Figure 1) in the one-sided end wall 32 can be more reliably kept out of communication with the inlet 20I of the processing chamber 20. Consequently, the processing chamber 20 can be sealed even more airtightly.

[0042] Further, according to the configuration in which the third groove portion 73 is curved and extends so as to approach the second surface 52 as it moves away from the first surface 51 in the thickness direction, the perimeter of the first seal member 41, which is an annular member, can be shortened as compared with the case where the third groove portion 73 extends parallel to the thickness direction. Further, according to the configuration in which the first portion 41d fits into the first curved groove portion 75 and the second portion 41e fits into the second curved groove portion 76, since the corner portion of the main body portion 50 that contacts the first portion 41d and the second portion 41e is rounded, the force acting on each of the first portion 41d and the second portion 41e is relaxed. Therefore, the risk of breakage of the first seal member 41 can be reduced. Further, since the second portion 41e contacts the first curved inner wall surface 37 of the housing 30 regardless of the position of the opening / closing member 40, it is possible to prevent gas from passing between the second portion 41e and the first curved inner wall surface 37. Therefore, the opening / closing device 1 can close the processing chamber 20 more airtightly.

[0043] <Additional components of the opening / closing member 40> Referring to FIGS. 9 and 10, additional components that the opening / closing member 40 may include will be described. The movable body 45 that constitutes the opening / closing member 40 may further include a second seal member 62. The second seal member 62 is preferably made of an elastic material, for example, formed of a rubber material, and is preferably formed of a fluororubber from the viewpoint of heat resistance. Note that the first seal member 41 and the second seal member may be formed of different materials, but are preferably made of the same material so as to deform uniformly with respect to pressure.

[0044] The second seal member 62 has a shape symmetric with respect to the first seal member 41 in the transport direction. The second seal member 62 includes a first extending seal portion 62a that extends along the width direction on the first surface 51, a second extending seal portion 62b that extends along the width direction on the fourth surface 54, and a pair of third extending seal portions 62c that extend along the thickness direction on the pair of third surfaces 53, respectively.

[0045] The first extending seal portion 62a extends continuously in the width direction across the entire length of the width direction of the first surface 51. The second extending seal portion 62b is in contact with the other side end wall 34 across the entire length of the width direction of the fourth surface 54. Each of the pair of third extending seal portions 62c is in contact with each of the pair of opposing walls 33. Each third extending seal portion 62c may or may not connect the end of the first extending seal portion 62a and the end of the second extending seal portion 62b.

[0046] Referring to FIG. 11, the function of the second seal member 62 during the operation of the opening and closing member 40 will be described. In the process of each of the pair of opening and closing members 40 moving from the open position to the closed position, the second extending seal portion 62b slides relative to the other side end wall 34, and the third extending seal portion 62c slides relative to the opposing wall 33. That is, with the contact states between the second extending seal portion 62b and the other side end wall 34 and between the third extending seal portion 62c and the opposing wall 33 maintained, the opening and closing member 40 moves toward the closed position.

[0047] At the timing when the pair of opening and closing members 40 reaches the closed position, the pair of first extending seal portions 62a sandwich the sheet material 5. In other words, one first extending seal portion 62a presses the sheet material 5 against the first extending seal portion 62a on the opposite side. The portion of the first extending seal portion 62a that contacts the sheet material 5 is recessed by elastic deformation and adheres to the surface of the sheet material 5. The remaining portion of the first extending seal portion 62a contacts and adheres to the first extending seal portion 62a on the opposite side. Since not only the first seal portion 41a but also the first extending seal portion 62a presses the sheet material 5 toward the opening and closing member 40 on the opposite side, the space between each opening and closing member 40 and the sheet material 5 can be sealed more airtightly. At this time, the second extending seal portion 62b is in contact with the other side end wall 34, and the third extending seal portion 62c is in contact with the opposing wall 33. Therefore, the space between the second extending seal portion 62b and the other side end wall 34 and the space between the third extending seal portion 62c and the opposing wall 33 can also be sealed airtightly.

[0048] Returning to Figures 9 and 10, the main body portion 50 of the movable body 45 may further have a second seal groove 80 into which the second seal member 62 is fitted. The second seal groove 80 is formed in a loop shape in the main body portion 50. The second seal groove 80 may be a dovetail groove, where the width dimension increases towards the bottom of the groove.

[0049] The second seal groove 80 includes a first extending groove portion 81 extending in the width direction on the first surface 51, a second extending groove portion 82 extending along the width direction on the fourth surface 54, a pair of third extending groove portions 83 extending along the thickness direction on a pair of third surfaces 53, a pair of first curved extending groove portions 85 formed on a pair of first curved surfaces 55, and a pair of second curved extending groove portions 87 formed on a pair of third curved surfaces 57. In Figure 9, only one of the pair of third extending groove portions 83 is shown. The same applies to the pair of first curved extending groove portions 85 and the pair of second curved extending groove portions 87.

[0050] The first extending groove 81 extends linearly along the entire width of the first surface 51, and the second extending groove 82 extends linearly along the entire width of the fourth surface 54. The third extending groove 83 extends at an inclination with respect to the thickness direction, and more specifically, it extends in a curved manner such that it moves further away from the first surface 51 in the thickness direction and closer to the fourth surface 54 in the transport direction. The first curved extending groove 85 smoothly connects the end of the first extending groove 81 to one end of the third extending groove 83. The second curved extending groove 87 smoothly connects the end of the second extending groove 82 to the other end of the third extending groove 83.

[0051] The first extended seal portion 62a of the second seal member 62 fits into the first extended groove portion 81, and the second extended seal portion 62b fits into the second extended groove portion 82. The pair of third extended seal portions 62c of the second seal member 62 fit into the pair of third extended groove portions 83, respectively. Furthermore, the pair of first curved extended groove portions 85 each fit into the pair of first defined portions 62d that constitute the second seal member 62, and the pair of second curved extended groove portions 87 each fit into the pair of second defined portions 62e that constitute the second seal member 62.

[0052] As shown in Figure 12, the housing 30 has an arc-shaped second curved inner wall surface 38 that smoothly connects the inner wall surface 34a of the other end wall 34 and the inner wall surface 33a of the opposing wall 33. The second defined portion 62e that fits into the second curved extension groove 87 (see Figure 9) is in contact with the second curved inner wall surface 38 along its entire circumferential length.

[0053] While the pair of opening / closing members 40 move from the open position to the closed position, the second extended sealing portion 62b slides against the other end wall 34, the third extended sealing portion 62c slides against the opposing wall 33, and the pair of second defined portions 62e slide against the pair of second curved inner wall surfaces 38. That is, regardless of the position of the opening / closing members 40, the second extended sealing portion 62b maintains contact with the opposing wall 33, the third extended sealing portion 62c maintains contact with the opposing wall 33, and the second defined portions 62e maintain contact with the second curved inner wall surface 38. With this configuration, the opening / closing members 40 can airtightly seal the space between the second extended sealing portion 62b and the other end wall 34, between the third extended sealing portion 62c and the opposing wall 33, and between the second defined portions 62e and the second curved inner wall surface 38. Therefore, the opening / closing device 1 can close the processing chamber 20 more airtightly.

[0054] Returning to Figure 11, each of the pair of main body portions 50 may further have a through hole 25 located between the first sealing portion 41a of the first sealing member 41 and the first extended sealing portion 62a of the second sealing member 62. The through hole 25 is open in the thickness direction. The widthwise position of the through hole 25 may be included in the widthwise range of the sheet material 5 (conveying path C). Also, there may be one through hole 25 or two or more.

[0055] The housing 30 may further include an exhaust port 28 connected to one end of the exhaust pipe 26. The other end of the exhaust pipe 26 is connected to a suction pump 27. In the example of Figure 11, the exhaust port 28 is formed in a defined end wall 35, but the disclosure is not limited thereto, and the exhaust port 28 may be formed in one end wall 32, an opposing wall 33, the other end wall 34, or the defined end wall 35.

[0056] When the pair of opening / closing members 40 are in the closed position, an intermediate space Sm, a first space S1, and a second space S2 are defined within the housing 30, aligned in the transport direction. The intermediate space Sm is located between the pair of first sealing portions 41a and the pair of first extending sealing portions 62a. The first space S1 is located on the opposite side of the first sealing portion 41a from the intermediate space Sm, and the second space S2 is located on the opposite side of the first extending sealing portion 62a from the intermediate space Sm. Furthermore, a pair of third spaces S3 are defined within the housing 30. The pair of third spaces S3 are located between the pair of opening / closing members 40 and the pair of defined end walls 35, respectively.

[0057] When the suction pump 27 is activated while the pair of opening / closing members 40 are in the closed position, the intermediate space Sm and the pair of third spaces S3 become substantially vacuumed.

[0058] At this time, as shown in Figure 13, the first seal portion 41a deforms toward the intermediate space Sm due to the differential pressure between the first space S1 and the intermediate space Sm. More specifically, the portion of the first seal portion 41a on the side of the end wall 32 deforms toward the intermediate space Sm (arrow Q). As a result, the first seal portion 41a pressing the sheet material 5 against the opposing opening / closing member 40 takes on a flatter shape, and the contact area between the first seal portion 41a and the sheet material 5 increases. By a similar principle, the first extended seal portion 62a, which is not shown in Figure 13, also takes on a flatter shape, and the contact area between the first extended seal portion 62a and the sheet material 5 increases. Therefore, the space between the first seal portion 41a and the sheet material 5, and the space between the first extended seal portion 62a and the sheet material 5 can be sealed more airtightly.

[0059] Furthermore, the second seal portion 41b deforms toward the third space S3 due to the differential pressure between the first space S1 and the third space S3. More specifically, the portion of the second seal portion 41b on the sheet material 5 side deforms toward the third space S3 (arrow R). As a result, the second seal portion 41b takes on a flatter shape, and the contact area between the second seal portion 41b and the one-sided end wall 32 increases. By a similar principle, the contact area between the second extended seal portion 62b and the other-sided end wall 34, the contact area between the third seal portion 41c and the opposing wall 33, and the contact area between the third extended seal portion 62c and the opposing wall 33 increase. Therefore, the space between the first seal member 41 and the housing 30, and the space between the second seal member 62 and the housing 30 can be sealed more airtightly.

[0060] Furthermore, even if gas that has flowed into the housing 30 through the slit hole 39 in one end wall 32 or the slit hole 39 in the other end wall 34 flows into the intermediate space Sm, the gas is drawn into the suction pump 27 through the through hole 25. This prevents gas from flowing into the processing chamber 20, or gas from leaking out of the processing chamber 20 into the sheet material chamber 6. Therefore, it becomes possible to maintain the differential pressure between the processing chamber 20 and the sheet material chamber 5.

[0061] Furthermore, it is conceivable that a force may be generated that attempts to create a small gap between the second seal portion 41b and the one-sided end wall 32 due to the pressure difference between the first space S1 and the third space S3. This force is indicated by the dashed arrow T. If a small gap is created, gas leakage will occur, making it difficult to seal the processing chamber 20 airtight. Similarly, if another small gap is created between the third seal portion 41c and the opposing wall 33, it will also be difficult to seal the processing chamber 20 airtight.

[0062] In this regard, if the first sealing groove 70 into which the annular sealing member 41 fits is a dovetail groove, it is difficult for the first sealing member 41 to move toward the bottom of the first sealing groove 70. Therefore, small gaps are less likely to occur between the first sealing member 41 and the housing 30, and gas leakage is less likely to occur. Thus, the opening / closing device 1 can hermetically close the processing chamber 20.

[0063] For similar reasons, if the second seal groove 80 into which the annular seal member 62 fits is a dovetail groove, gas leakage is less likely to occur, and the opening / closing device 1 can airtightly close the processing chamber 20.

[0064] <Prescribed processing in processing chamber 20> If the prescribed processing includes heating, the processing chamber 20 may be equipped with a heater for heating the processing space 20S. If the prescribed processing includes gas suction, the processing chamber 20 may be equipped with a gas discharge pipe for discharging gas from the processing space 20S. If the prescribed processing includes gas supply processing or cooling processing, the processing chamber 20 may be equipped with a gas supply pipe for supplying processing gas to the processing space 20S.

[0065] The specified treatment may be a treatment to generate allotropes on the surface of the sheet material 5 or a film deposition treatment to form a thin film. More specifically, the specified treatment may be a treatment using chemical vapor deposition, i.e., CVD treatment. The allotropes may be, for example, carbon allotropes, and more specifically, carbon nanotubes (CNTs). The CNTs may be single-walled carbon nanotubes (SWNTs) or multi-walled carbon nanotubes (MWNTs).

[0066] When generating carbon nanotubes on the surface of the sheet material 5, a sputtering process to generate a catalyst layer on the sheet material 5 may be performed in the sheet material chamber 6 or a chamber located upstream of the sheet material chamber 6. After the sheet material 5 with the catalyst layer formed on its surface is brought into the processing chamber 20, the processing chamber 20 may perform a CVD process to generate carbon nanotubes on the catalyst layer. If the opening / closing device 1 can hermetically close the processing chamber 20, it is possible to prevent impurities from contaminating the carbon nanotubes generated in the processing chamber 20. Therefore, it becomes possible to generate carbon nanotubes of high purity.

[0067] The above embodiment is merely an example. The prescribed treatment applied to the sheet material 5 in the processing chamber 20 may be a film deposition treatment using physical vapor deposition, or more specifically, a sputtering treatment. The film (thin film) formed on the sheet material 5 by sputtering may be the catalyst layer described above, or it may be a transparent conductive film used in solar cells or liquid crystal displays. The transparent conductive film may be ITO (Indium Tin Oxide) containing indium oxide and tin oxide, in which case the sheet material 5 may be formed from a polyester resin. The film (thin film) formed on the sheet material 5 may be silica (SiO ２ ), magnesium fluoride (MgF ２ ), or titanium dioxide (TiO ２ It may also be an optical thin film formed from materials such as ).

[0068] The prescribed processing performed in the processing chamber 20 may be vacuum deposition, painting, or lamination. Painting is the process of applying paint to the sheet material 5, and lamination is the process of attaching a transparent film or the like to the sheet material 5. In this case, a robotic arm for work may be placed inside the processing chamber 20.

[0069] <Other Embodiments> Figure 14 is a schematic diagram of an opening / closing device 1A according to another embodiment. The opening / closing device 1A includes a pair of opening / closing members 40A. One of the pair of opening / closing members 40A is the movable body 45 described above, and the other is a fixed body 46 fixed within the housing 30. The fixed body 46 includes a fixed end face 46a that faces the movable body 45. When the opening / closing member 40A, which is the movable body 45, moves from the open position to the closed position, the first sealing portion 41a presses the sheet material 5 against the fixed end face 46a. As a result, the space between the first sealing portion 41a and the sheet material 5, and the space between the fixed end face 46a and the sheet material 5 are sealed. When the opening / closing member 40A, which is the movable body 45, moves between the open position and the closed position, the opening / closing member 40A, which is the fixed body 46, is understood to move relative to the movable body 45 between the open position, which is away from the sheet material 5, and the closed position, which is sandwiching the sheet material 5. The main body portion 50 constituting the movable body 45 illustrated in Figure 14 may further include a second sealing member 62.

[0070] <Summary> The contents described in the above-mentioned embodiments can be understood, for example, as follows:

[0071] 1) An opening / closing device (1, 1A) according to at least one embodiment of the present disclosure is an opening / closing device for opening and closing a processing chamber (20) configured for loading or unloading a long sheet material (5), comprising: a housing (30) configured for the sheet material to pass through; a pair of opening / closing members (40, 40A) arranged within the housing facing each other in the thickness direction of the sheet material with the sheet material in between, and configured to move relative to each other in the thickness direction between an open position away from the sheet material and a closed position that clamps the sheet material, wherein the housing includes a one-side end wall (32) which is one end wall in the transport direction of the sheet material, and having a slit hole (39) formed therein for the sheet material to pass through; and a pair of opposing walls (33) arranged facing each other in the width direction of the sheet material with the sheet material in between, and at least one of the pair of opening / closing members is The first sealing member (41) is disposed on the main body, and includes a main body (50) extending in the width direction, having a first surface (51) facing the opposing opening / closing member, a second surface (52) facing the one-sided end wall, and a pair of third surfaces (53) facing the pair of opposing walls, respectively. The first sealing member has a first sealing portion (41a) extending along the width direction on the first surface and in contact with the sheet material in the closed position, a second sealing portion (41b) extending along the width direction on the second surface and in contact with the one-sided end wall at least in the closed position, and a pair of third sealing portions (41c) extending along the thickness direction on the pair of third surfaces, each in contact with the pair of third surfaces at least in the closed position.

[0072] According to the configuration described in 1) above, when the pair of opening / closing members sandwich the sheet material, the first sealing portion presses the sheet material against the opposing opening / closing member, thereby creating an airtight seal between the first sealing portion and the opposing opening / closing member. At the same time, the second sealing portion contacts one end wall, and the pair of third sealing portions contact the pair of opposing walls. The opening / closing members can create an airtight seal between the second sealing portion and one end wall, and between the third sealing portion and the opposing walls. This realizes an opening / closing device that can airtightly close the processing chamber. Note that "relative movement" in "a pair of opening / closing members configured to move relative to each other in the thickness direction between an open position and a closed position" means "the pair of opening / closing members move relative to each other," or in other words, "one of the pair of opening / closing members moves relative to the other."

[0073] 2) In some embodiments, the opening and closing device described in 1) above, wherein the main body further comprises: a first groove (71) extending along the width direction on the first surface into which the first seal portion fits; a second groove (72) extending along the width direction on the second surface into which the second seal portion fits; and a pair of third grooves (73) extending along the thickness direction on the pair of third surfaces into which the pair of third seal portions fits.

[0074] According to the configuration described in 2) above, the first sealing member fits into the groove (first sealing groove 70), making it easier to attach the first sealing member to the main body. In addition, the first sealing member can be prevented from coming off the main body while the pair of opening and closing members move relative to each other toward the closed position.

[0075] 3) In some embodiments, the opening and closing device is as described in 2) above, wherein the first sealing member is an annular member including the first sealing portion, the second sealing portion, and the pair of third sealing portions.

[0076] According to the configuration described in 3) above, the processing chamber can be sealed even more airtightly. In addition, since the first sealing member is a single annular member, it is possible to further simplify the attachment of the first sealing member to the main body.

[0077] 4) In some embodiments, the opening and closing device described in 3) above, wherein each of the pair of third grooves extends such that it moves away from the first surface in the thickness direction and approaches the second surface in the transport direction.

[0078] According to the configuration described in 4) above, the circumference of the annular member can be shortened compared to the case where the third groove extends parallel to the thickness direction.

[0079] 5) In some embodiments, the opening and closing device described in 4) above, wherein the main body further comprises: a pair of first curved surfaces (55) connecting both ends (51E) of the first surface in the width direction to the pair of third surfaces, respectively; and a pair of first curved grooves (75) formed on the pair of first curved surfaces, into which a pair of first portions (41d) of the first sealing member are respectively fitted.

[0080] According to the configuration described in 5) above, the corners of the main body that come into contact with the first part are rounded, which reduces the force acting on the first part. Therefore, the risk of the first sealing member breaking can be reduced.

[0081] 6) In some embodiments, the opening and closing device described in 4) or 5) above, wherein the main body further comprises: a pair of second curved surfaces (56) connecting both ends (52E) of the second surface in the width direction to the pair of third surfaces, respectively; and a pair of second curved grooves (78) formed on the pair of second curved surfaces, into which a pair of second portions (41e) of the first sealing member fit.

[0082] According to the configuration described in 6) above, the corners of the main body that come into contact with the second part are rounded, which reduces the force acting on the second part. Therefore, the risk of the first sealing member breaking can be reduced.

[0083] 7) In some embodiments, the opening and closing device is as described in any of 2) to 6) above, wherein the second sealing portion slides against the one-sided end wall and the pair of third sealing portions slide against the pair of opposing walls while each of the pair of opening and closing members moves relative to the other from the closed position to the open position.

[0084] According to the configuration described in 7) above, regardless of the relative positions of the pair of opening and closing members, the second sealing portion and one end wall are in contact, and the third sealing portion is in contact with the opposing wall. This makes it possible to more reliably prevent gas from passing between the second sealing portion and one end wall, and between the third sealing portion and the opposing wall. Therefore, the opening and closing device can close the processing chamber more airtightly.

[0085] 8) In some embodiments, an opening and closing device according to any one of 1) to 7) above, wherein at least one of the pair of opening and closing members further includes a second sealing member (62) disposed on the main body, the second sealing member having a first extended sealing portion (62a) that extends in the width direction on the first surface alongside the first sealing portion and contacts the sheet material in the closed position.

[0086] According to the configuration described in 8) above, when the pair of opening / closing members sandwich the sheet material, not only the first sealing portion but also the first extended sealing portion presses the sheet material toward the opposing opening / closing member. As a result, the space between each opening / closing member and the sheet material can be sealed even more airtightly.

[0087] 9) In some embodiments, the opening and closing device described in 8) above, wherein the main body is positioned between the first sealing portion of the first sealing member and the first extended sealing portion of the second sealing member and has a through hole (25) that is open in the thickness direction, and the housing further includes an exhaust port (28) connected to an exhaust pipe (26) configured to guide the gas in the intermediate space (Sm) formed between the first sealing portion and the first extended sealing portion when each of the pair of opening and closing members is in the closed position to a suction pump (27).

[0088] According to the configuration in 9) above, when the suction pump is activated while the pair of opening / closing members are in the closed position, the intermediate space becomes substantially a vacuum. As a result, the first seal portion and the first extended seal portion deform toward the intermediate space, and the first seal portion and the first extended seal portion pressing the sheet material against the opposing opening / closing member take on a flatter shape. This allows for a more airtight seal between the first seal portion and the sheet material, and between the first extended seal portion and the sheet material. Furthermore, even if gas flows into the intermediate space, the gas is sucked out by the suction pump located outside the housing. This prevents gas from flowing into the processing chamber, or prevents gas in the processing chamber from passing through the pair of opening / closing members in the transport direction and leaking out of the housing. Therefore, in an embodiment in which the sheet material chamber is provided on the opposite side of the housing from the processing chamber in the sheet material transport path, it becomes possible to maintain the differential pressure between the processing chamber and the sheet material chamber.

[0089] 10) A sheet material processing apparatus (10) according to at least one embodiment of the present disclosure comprises: a conveyor roller (7) for conveying the sheet material along a predetermined conveyor path (C); a processing chamber (20) disposed on the conveyor path for performing a predetermined processing on the sheet material; and an opening / closing device (1, 1A) according to any one of 1) to 9) above, disposed on the upstream or downstream side of the conveyor path relative to the processing chamber.

[0090] According to the configuration in 10) above, the same technical advantages as in 1) above can be obtained.

[0091] 11) In some embodiments, the sheet material processing apparatus (1) described in 10) further comprises a sheet material chamber (6) located on the opposite side of the processing chamber from the opening and closing device in the transport path, and configured for loading or unloading the sheet material, wherein the prescribed processing is a processing applied to the sheet material in an environment in which the pressure inside the processing chamber is different from the pressure inside the sheet material chamber.

[0092] According to the configuration described in 11) above, the opening and closing device can close the processing chamber, thereby preventing the sheet material chamber and the processing chamber from communicating with each other. This allows the differential pressure between the processing chamber and the sheet material chamber to be maintained when the prescribed processing is performed.

[0093] 1, 1A: Opening / closing device 2: Feed-out roll 3: Take-up roll 5: Sheet material 6: Sheet material chamber 6S: Conveying space 7: Conveying roller 8: Feed-out roller 9: Take-up roller 10: Sheet material processing device 20: Processing chamber 20I: Inlet 20S: Processing space 25: Through hole 26: Exhaust pipe 27: Suction pump 28: Exhaust port 30: Housing 32: One-sided end wall 32a, 33a, 34a: Inner wall surface 33: Opposing wall 34: Other-sided end wall 35: Standard end wall 37: First curved inner wall surface 38: Second curved inner wall surface 39: Slit hole 40, 40A: Opening / closing member 41: First sealing member 41a: First sealing part 41b: Second sealing part 41c: Third seal portion 41d: First portion 41e: Second portion 45: Movable body 46: Fixed body 46a: Fixed end face 50: Main body portion 51: First surface 51E, 52E, 54E: Both ends 52: Second surface 53: Third surface 54: Fourth surface 55: First curved surface 56: Second curved surface 57: Third curved surface 62: Second seal member 62a: First extended seal portion 62b: Second extended seal portion 62c: Third extended seal portion 62d: First defined portion 62e: Second defined portion 70: First seal groove 71: First groove portion 72: Second groove portion 73: Third groove portion 75: First curved groove portion 76 : Second curved groove 80 : Second seal groove 81 : First extending groove 82 : Second extending groove 83 : Third extending groove 85 : First curved extending groove 87 : Second curved extending groove A1, A2, Q, R, T : Arrow C : Conveyance path G1 : First gap G2 : Second gap G3 : Third gap S1 : First space S2 : Second space S3 : Third space Sm : Intermediate space

Claims

1. An opening and closing device for opening and closing a processing chamber configured for loading or unloading a long sheet material, comprising: a housing configured for the passage of the sheet material; a pair of opening and closing members arranged within the housing facing each other in the thickness direction of the sheet material with the sheet material in between, and configured to move relative to each other in the thickness direction between an open position away from the sheet material and a closed position that clamps the sheet material, wherein the housing includes a one-side end wall which is one end wall in the transport direction of the sheet material, and having a slit hole formed therein for the passage of the sheet material; and a pair of opposing walls arranged facing each other in the width direction of the sheet material with the sheet material in between, wherein at least one of the pair of opening and closing members includes a main body portion extending in the width direction, having a first surface facing the other opening and closing member, a second surface facing the one-side end wall, and a pair of third surfaces facing the pair of opposing walls, respectively; and a first sealing member disposed in the main body portion, wherein the first sealing member is An opening and closing device having: a first sealing portion extending along the width direction on the first surface and in contact with the sheet material in the closed position; a second sealing portion extending along the width direction on the second surface, which at least in contact with the one side end wall in the closed position; and a pair of third sealing portions extending along the thickness direction on the pair of third surfaces, which at least in contact with the pair of third surfaces in the closed position.

2. The opening and closing device according to claim 1, wherein the main body further comprises: a first groove extending along the width direction on the first surface into which the first sealing portion fits; a second groove extending along the width direction on the second surface into which the second sealing portion fits; and a pair of third grooves extending along the thickness direction on the pair of third surfaces, each of which the pair of third sealing portions fits.

3. The opening and closing device according to claim 2, wherein the first sealing member is an annular member including the first sealing portion, the second sealing portion, and the pair of third sealing portions.

4. The opening and closing device according to claim 3, wherein each of the pair of third grooves extends such that it moves away from the first surface in the thickness direction and approaches the second surface in the transport direction.

5. The opening and closing device according to claim 4, further comprising: a pair of first curved surfaces connecting both ends of the first surface in the width direction to the pair of third surfaces; and a pair of first curved grooves formed on the pair of first curved surfaces, into which a pair of first portions of the first sealing member are fitted.

6. The opening and closing device according to claim 4, wherein the main body further comprises: a pair of second curved surfaces connecting both ends of the second surface in the width direction to the pair of third surfaces, and a pair of second curved grooves formed on the pair of second curved surfaces, into which a pair of second portions of the first sealing member fit.

7. The opening and closing device according to claim 2, wherein the second sealing portion slides against the one-sided end wall and the pair of third sealing portions slide against the pair of opposing walls while each of the pair of opening and closing members moves relative to the other from the closed position to the open position.

8. The opening and closing device according to claim 1, wherein at least one of the pair of opening and closing members further includes a second sealing member disposed on the main body, the second sealing member having a first extending sealing portion that extends in the width direction alongside the first sealing portion on the first surface and contacts the sheet material in the closed position.

9. The opening / closing device according to claim 8, wherein the main body is positioned between the first sealing portion of the first sealing member and the first extended sealing portion of the second sealing member, and has a through hole formed therein that is open in the thickness direction, and the housing further includes an exhaust port connected to an exhaust pipe configured to guide the gas in the intermediate space formed between the first sealing portion and the first extended sealing portion when each of the pair of opening / closing members is in the closed position to a suction pump.

10. A sheet material processing apparatus comprising: a conveying roller for conveying the sheet material along a predetermined conveying path; a processing chamber disposed on the conveying path for performing a predetermined process on the sheet material; and an opening / closing device according to claim 1, disposed on the upstream or downstream side of the conveying path relative to the processing chamber.

11. The sheet material processing apparatus according to claim 10, further comprising a sheet material chamber located on the opposite side of the processing chamber from the opening and closing device in the transport path, and configured for loading or unloading the sheet material, wherein the prescribed processing is performed on the sheet material in an environment in which the pressure inside the processing chamber is different from the pressure inside the sheet material chamber.

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