Electronic device for outputting hierarchy-based structured ai project information and ui output method thereof

Abstract

An electronic device for outputting information about an AI project to be performed in a manufacturing process of a semiconductor device, according to the present disclosure, may comprise at least one processor for controlling a hierarchy-based structure to be output to a dashboard for outputting information about the AI project, wherein the dashboard may include: a first dashboard which manages a management parameter of execution equipment input from an input / output module or the AI project corresponding to a product and the execution equipment; a second dashboard which is output to an upper layer of the first dashboard and manages the execution equipment to which the AI project is applied or a recipe of the execution equipment; and a third dashboard which is output to an upper layer of the second dashboard and manages a fab in which the execution equipment is disposed or a process to which the recipe of the execution equipment is applied.

Description

Electronic device for outputting hierarchy-based structured AI project information and its UI output method

[0001] The present disclosure relates to an electronic device for outputting a UI and a method for outputting the UI thereof, and more specifically, to an electronic device for outputting hierarchy-based structured AI project information.

[0002] The manufacturing of semiconductor devices is carried out using tens or hundreds of operations or equipment; to execute each manufacturing process, manufacturing equipment is used, and a recipe defining detailed operating conditions is employed for its operation.

[0003] In this case, AI projects such as virtual metrology or advanced process control, which are used for the detailed adjustment of each recipe, are often identical across semiconductor processes or equipment. Furthermore, AI projects such as anomaly detection or predictive maintenance, which are used for the management of manufacturing equipment for each semiconductor device, are also often applied identically across each piece of manufacturing equipment. This is attributed to the phenomenon where new semiconductor devices are released after undergoing a performance improvement process every 1 to 1.5 years, and because even for the same device, the same process and recipe are applied to multiple similar pieces of manufacturing equipment for mass production.

[0004] In other words, to secure semiconductor manufacturing production volume, the same process is carried out using the same recipe on multiple identical or similar semiconductor manufacturing machines rather than a single semiconductor manufacturing machine through a process of horizontal or horizontal expansion.

[0005] Furthermore, semiconductor devices such as DRAM, NAND, and logic are managed under multiple product codes based on product type, process technology, capacity, operating speed, voltage and power, configuration and interface, package format, functions and special specifications, and customer customization; however, the manufacturing processes for each semiconductor device often proceed using the same recipe within the same process, even if the product codes differ.

[0006] In such an environment, when using a specific recipe for a particular process or recipe, variations in manufacturing quality occur between equipment due to differences in the manufacturing equipment used. To improve this, AI models such as process control or virtual measurement capable of fine-tuning recipes are created. In other words, in the case of semiconductor manufacturing equipment, results vary by machine even for identical equipment from the same manufacturer due to differences in consumables, parts, and installation environments. Therefore, when developing the aforementioned AI models, these circumstances must be reflected.

[0007] Therefore, even if the same semiconductor manufacturing process is carried out using the same recipe, if the product codes produced using that recipe or the manufacturing equipment applied differ, there is a need to create and manage each AI project separately, even if they perform the same or similar logic. Consequently, even for the same process, dozens or hundreds of AI projects performing similar logic must be created, and there is a need to create and manage them efficiently. In particular, considering that this phenomenon occurs across hundreds of manufacturing processes, the need for the efficient creation and management of AI projects increases even further.

[0008] Traditionally, on platforms offering a high degree of freedom for AI project implementation, AI projects for various processes and recipes were created individually and managed in the form of a single table that simply listed them. When creating each AI project, the processes and recipes to which the project was to be applied had to be defined one by one; subsequently, data meeting the defined conditions had to be collected separately for each project, or the entire dataset had to be collected and then filtered to find the matching data. After creating multiple AI projects, they were displayed in a table format to be shown on a single screen, and to search for a desired AI model, specific attributes such as process names and recipe names had to be repeatedly entered into filtering fields to find the model.

[0009] In other words, AI model creation and management were operated separately, and in a table-based UI, the AI ​​model information was displayed with the items listed under each attribute arranged in a single line.

[0010] Therefore, operators could only identify AI projects corresponding to desired processes and recipes by applying desired conditions and performing filtering. In cases where hundreds of thousands of AI projects are generated, such as in semiconductor manufacturing where variables like product codes, equipment used, and processes are considered, it is expected that it will be very inconvenient to efficiently identify and manage each AI project.

[0011] The purpose of the embodiments disclosed in this disclosure is to provide an electronic device that outputs hierarchy-based structured AI project information and a UI output method thereof, so that an operator can distinguish and identify multiple identical or similar AI projects applied to identical or similar processes or equipment at a glance due to the manufacturing process characteristics of semiconductor devices.

[0012] In addition, when a worker creates multiple identical or similar AI projects, attributes such as processes, recipes, fab names, and applied equipment that are pre-entered into a hierarchy-based structured UI are automatically entered into each AI project without the need to repeatedly input attributes for each AI project, thereby enabling the rapid creation of multiple AI projects.

[0013] The problems that this disclosure aims to solve are not limited to those mentioned above, and other unmentioned problems will be clearly understood by a person skilled in the art from the description below.

[0014] An electronic device for outputting information on an AI project to be performed in a manufacturing process of a semiconductor device according to the present disclosure for achieving the technical problem described above, comprising: at least one processor that controls a hierarchy-based structure to be output to a dashboard that outputs information on the AI ​​project; wherein the dashboard may include: a first dashboard that manages the AI ​​project corresponding to management parameters of the execution equipment input from the input / output module or a production product and the execution equipment; a second dashboard that is output to an upper layer of the first dashboard and manages the execution equipment to which the AI ​​project is applied or the recipe of the execution equipment; and a third dashboard that is output to an upper layer of the second dashboard and manages the Fab where the execution equipment is placed or the process to which the recipe of the execution equipment is applied.

[0015] In addition, a UI output method for an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure for achieving the aforementioned technical problem is a UI output method for an electronic device that outputs information about an AI project to be performed in a semiconductor device manufacturing process, wherein the method includes the step of outputting information about the AI ​​project to a dashboard by structuring it based on hierarchy in an input / output module, and the step may include: outputting the AI ​​project corresponding to management parameters of the execution equipment input from the input / output module or a production product and execution equipment to a first dashboard; outputting the execution equipment applied to the AI ​​project or the recipe of the execution equipment to a second dashboard which is a higher layer of the first dashboard; and outputting the Fab where the execution equipment is placed or the process to which the recipe of the execution equipment is applied to a third dashboard which is a higher layer of the second dashboard.

[0016] In addition to this, a computer program stored on a computer-readable recording medium for implementing the present disclosure may be further provided.

[0017] In addition to this, a computer-readable recording medium for recording a computer program for implementing the present disclosure may be further provided.

[0018] According to the aforementioned means for solving the problem disclosed herein, by reflecting the characteristics of the semiconductor manufacturing process where identical or similar recipes are often applied to each manufacturing equipment or where the same recipe is applied even if the product codes differ, context data related to an AI project is pre-structured into a hierarchy and displayed on a single screen, thereby eliminating the need for an operator to repeatedly input the context data when creating an AI project. Furthermore, when an operator wishes to explore a created AI project, they can grasp and verify information about the AI ​​model performing the project at a glance without the need to individually check or filter it through screen scrolling. Consequently, this provides the effect of easily verifying data for the AI ​​project to create an AI model and effectively manage the created AI model.

[0019] Furthermore, according to the aforementioned means for solving the problem of the present disclosure, it is possible to easily create an AI project and effectively manage the created AI model even when the same or similar manufacturing equipment is applied, not just a recipe.

[0020] In addition, according to the aforementioned means for solving the problem of the present disclosure, by considering the semiconductor process or equipment characteristics to which the same similar recipe is applied to the same similar equipment, the effect of easily creating and managing a new AI project according to the replication or sharing function of the first dashboard is provided.

[0021] The effects of the present disclosure are not limited to those mentioned above, and other unmentioned effects will be clearly understood by a person skilled in the art from the description below.

[0022] FIG. 1 is a simplified block diagram illustrating the configuration of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0023] FIG. 2 is an embodiment illustrating an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure, showing a process engineer's user interface-based input / output module.

[0024] FIG. 3 is an embodiment illustrating an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure, showing an input / output module based on an equipment engineer's user interface.

[0025] FIGS. 4 to 6 are embodiments illustrating the dashboard layout of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0026] FIG. 7 is a diagram illustrating a process-related product or equipment input process on a first dashboard of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0027] FIG. 8 is a diagram illustrating the process of inputting equipment-related parameters on a first dashboard of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0028] FIG. 9 is a diagram illustrating a master project setting process on a first dashboard of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0029] Throughout this disclosure, the same reference numerals denote the same components. This disclosure does not describe all elements of the embodiments, and general content in the art to which this disclosure pertains or content that overlaps between embodiments is omitted. The terms 'part, module, component, block' as used in the specification may be implemented in software or hardware, and depending on the embodiments, a plurality of 'parts, modules, components, blocks' may be implemented as a single component, or a single 'part, module, component, block' may include a plurality of components.

[0030] Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are directly connected but also cases where they are indirectly connected, and indirect connections include connections made via a wireless communication network.

[0031] Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0032] Throughout the specification, when it is stated that a component is located "on" another component, this includes not only cases where a component is in contact with another component, but also cases where another component exists between the two components.

[0033] The terms first, second, etc. are used to distinguish one component from another, and the components are not limited by the aforementioned terms.

[0034] Singular expressions include plural expressions unless there is an obvious exception in the context.

[0035] In each step, identification codes are used for convenience of explanation and do not describe the order of the steps; the steps may be performed differently from the specified order unless a specific order is clearly indicated in the context.

[0036] The operating principles and embodiments of the present disclosure will be described below with reference to the attached drawings.

[0037] In this specification, the term "device according to the present disclosure" includes all various devices capable of performing computational processing and providing results to a user. For example, the device according to the present disclosure may include all of a computer, a server device, and a portable terminal, or may be in the form of any one of these.

[0038] Here, the computer may include, for example, a laptop, desktop, laptop, tablet PC, slate PC, smartphone, etc. equipped with a web browser.

[0039] The above server device is a server that processes information by communicating with an external device, and may include an application server, a computing server, a database server, a file server, a game server, a mail server, a proxy server, and a web server.

[0040] The above portable terminal may include, for example, all types of handheld-based wireless communication devices such as PCS (Personal Communication System), GSM (Global System for Mobile communications), PDC (Personal Digital Cellular), PHS (Personal Handyphone System), PDA (Personal Digital Assistant), IMT (International Mobile Telecommunication)-2000, CDMA (Code Division Multiple Access)-2000, W-CDMA (W-Code Division Multiple Access), WiBro (Wireless Broadband Internet) terminals, smartphones, etc., as well as wearable devices such as watches, rings, bracelets, anklets, necklaces, glasses, contact lenses, or head-mounted devices (HMDs).

[0041] Functions related to artificial intelligence according to the present disclosure are operated through a processor and memory. The processor may be composed of one or more processors. In this case, the one or more processors may be general-purpose processors such as CPUs, APs, and DSPs (Digital Signal Processors), graphics-dedicated processors such as GPUs and VPUs (Vision Processing Units), or artificial intelligence-dedicated processors such as NPUs. The one or more processors control the processing of input data according to predefined operation rules or artificial intelligence models stored in memory. Alternatively, if the one or more processors are artificial intelligence-dedicated processors, the artificial intelligence-dedicated processors may be designed with a hardware structure specialized for processing a specific artificial intelligence model.

[0042] The predefined operating rules or artificial intelligence models are characterized by being created through learning. Here, being created through learning means that a predefined operating rules or artificial intelligence models configured to perform desired characteristics (or objectives) are created by a basic artificial intelligence model being trained using multiple learning data by a learning algorithm. Such learning may be performed on the device itself where the artificial intelligence according to the present disclosure is executed, or it may be performed through a separate server and / or system. Examples of learning algorithms include supervised learning, unsupervised learning, semi-supervised learning, or reinforcement learning, but are not limited to the examples described above.

[0043] FIG. 1 is a block diagram briefly illustrating the configuration of an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure.

[0044] Referring to FIG. 1, the electronic device (100) according to the present disclosure may include an input / output module (110), a communication module (120), a memory (130), and a processor (140). Hereinafter, the electronic device (100) is an electronic device that outputs hierarchy-based structured AI project information, and the method thereof is assumed to be implemented through the electronic device (100).

[0045] The input / output module (110) may be various interfaces or connection ports that receive user input or output information to the user. The input / output module (110) may be divided into an input module and an output module.

[0046] The input module receives user input from the user. The input module is for inputting video information (or signals), audio information (or signals), data, or information input by the user, and may include at least one of at least one camera, at least one microphone, and a user input unit. Voice data or image data collected by the input unit may be analyzed and processed into a user control command.

[0047] User input can take various forms, including key input, touch input, and voice input. Examples of input modules capable of receiving such user input include traditional keypads, keyboards, and mice; as well as touch sensors that detect user touch; microphones that receive voice signals; cameras that recognize gestures through image recognition; proximity sensors consisting of light or infrared sensors that detect user approach; motion sensors that recognize user movements using accelerometers or gyroscopes; and all other diverse forms of input means that detect or receive various types of user input. This is a comprehensive concept.

[0048] Here, the touch sensor can be implemented as a piezoelectric or capacitive touch sensor that detects touch through a touch panel or touch film attached to the display panel, or as an optical touch sensor that detects touch by an optical method. In addition, the input module may be implemented in the form of an input interface (USB port, PS / 2 port, etc.) that connects an external input device to receive user input, instead of a device that detects user input itself.

[0049] The output module can output various types of information and provide it to the user. The output module is a comprehensive concept that includes a display for outputting video, a speaker for outputting sound (and / or an amplifier connected thereto), a haptic device for generating vibration, and various other forms of output means. In addition, the output module may be implemented in the form of a port-type output interface that connects the individual output means described above.

[0050] For example, an output module in the form of a display can display text, still images, and videos. The term "display" refers to a broad concept of an image display device that includes all types of devices capable of performing image output functions, such as Liquid Crystal Displays (LCDs), Light Emitting Diode (LED) displays, Organic Light Emitting Diode (OLED) displays, Flat Panel Displays (FPDs), transparent displays, Curved Displays, flexible displays, 1D displays, holographic displays, projectors, and others. Such a display may also take the form of a touch display integrated with the touch sensor of an input module.

[0051] In other words, the input / output module (110) can receive user input or provide output to the user based on a user interface.

[0052] The communication module (120) can communicate with an external device. Accordingly, the device can transmit and receive information with the external device through the communication module. For example, the device can communicate with the external device using the communication module so that information stored and generated within the electronic device that outputs the AI ​​project is shared. The communication module (120) may include, for example, at least one of a wired communication module, a wireless communication module, a short-range communication module, and a location information module.

[0053] Here, communication, that is, the transmission and reception of data, can be performed via wired or wireless means. To this end, the communication module may be composed of a wired communication module that connects to the Internet, etc., via a Local Area Network (LAN); a mobile communication module that connects to a mobile communication network via a mobile communication base station to transmit and receive data; a short-range communication module that uses a Wireless Local Area Network (WLAN) family communication method such as Wi-Fi or a Wireless Personal Area Network (WPAN) family communication method such as Bluetooth or Zigbee; a satellite communication module that uses a Global Navigation Satellite System (GNSS) such as GPS; or a combination thereof. The wireless communication technology used for communication may include Narrowband Internet of Things (NB-IoT) for low-power communication. In this case, for example, NB-IoT technology may be an example of LPWAN (Low Power Wide Area Network) technology and may be implemented according to standards such as LTE Cat (category) NB1 and / or LTE Cat NB2, but is not limited to the names mentioned above. Additionally, or generally, wireless communication technology implemented in wireless devices according to various embodiments may perform communication based on LTE-M technology. In this case, for example, LTE-M technology may be an example of LPWAN technology and may be referred to by various names such as eMTC (enhanced Machine Type Communication).For example, LTE-M technology may be implemented in at least one of various standards such as 1) LTE CAT 0, 2) LTE Cat M1, 3) LTE Cat M2, 4) LTE non-BL (non-Bandwidth Limited), 5) LTE-MTC, 6) LTE Machine Type Communication, and / or 7) LTE M, and is not limited to the names mentioned above. Additionally or generally, wireless communication technology implemented in wireless devices according to various embodiments may include at least one of ZigBee, Bluetooth, and Low Power Wide Area Network (LPWAN) for low-power communication, and is not limited to the names mentioned above. As an example, ZigBee technology can create personal area networks (PANs) related to small / low-power digital communication based on various standards such as IEEE 802.15.4 and may be referred to by various names.

[0054] The memory (130) can store various types of information. The memory can store data temporarily or semi-permanently. For example, the memory may store an operating system (OS) for operating the first device and / or the second device, data for hosting a website, or data regarding a program or application (e.g., a web application) for generating Braille. In addition, the memory may store modules in the form of computer code as described above.

[0055] Examples of memory (130) may include a hard disk drive (HDD), a solid state drive (SSD), flash memory, ROM (Read-Only Memory), and RAM (Random Access Memory). These memories may be provided as built-in or removable types.

[0056] The processor (140) controls the overall operation of the electronic device (100). To this end, the processor (140) performs computation and processing of various information and can control the operation of the components of the first device and / or the second device.

[0057] The processor (140) may be implemented as a computer or a similar device according to hardware, software, or a combination thereof. Hardware-wise, the processor (140) may be provided in the form of an electronic circuit that processes electrical signals to perform control functions, and software-wise, it may be provided in the form of a program that drives the hardware processor. Meanwhile, unless otherwise specifically mentioned in the following description, the operation of the first device and / or the second device may be interpreted as being performed by the control of the processor (140). That is, the modules may be interpreted as the processor (140) controlling the first device and / or the second device to perform the following operations.

[0058] The processor (140) may be implemented with a memory that stores data for an algorithm or a program that reproduces the algorithm for controlling the operation of components within the device, and at least one sub-processor (not shown) that performs the aforementioned operation using the data stored in the memory. In this case, the memory and the processor may each be implemented as separate chips. Alternatively, the memory and the processor may be implemented as a single chip.

[0059] Additionally, the processor (140) may control one or a combination of the components described above in order to implement various embodiments according to the present disclosure, which will be described in the drawings below, on the device.

[0060] FIG. 2 is an embodiment illustrating an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure, showing a process engineer's user interface-based input / output module (110); FIG. 3 is an embodiment illustrating an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure, showing an equipment engineer's user interface-based input / output module (110); FIG. 4 to 6 are embodiments illustrating a dashboard layout of an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure; FIG. 7 is a diagram illustrating a product or equipment input process on the first dashboard of an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure. FIG. 8 is a diagram illustrating an equipment-related parameter input process on the first dashboard of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure. FIG. 9 is a diagram illustrating a master project setting process on a first dashboard of an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure.

[0061] Hereinafter, an electronic device (100) that outputs hierarchy-based structured AI project information according to the present disclosure and a method for outputting the UI thereof will be described with reference to the drawings.

[0062] An electronic device (100) for outputting hierarchy-based structured AI project information according to the present disclosure is an electronic device for outputting information on an AI project to be performed in a manufacturing process of a semiconductor device, and may include at least one processor (140) for controlling a hierarchy-based structure to be output to a dashboard that outputs information on the AI ​​project in a hierarchy-based structure.

[0063] In one embodiment, the dashboard may include a first dashboard (210) that manages the AI ​​project corresponding to the performance equipment management parameters or production products and performance equipment input from the input / output module (110), a second dashboard (220) that is output as an upper layer of the first dashboard (210) and manages the performance equipment to which the AI ​​project is applied or the recipe of the performance equipment, and a third dashboard (230) that is output as an upper layer of the second dashboard (220) and manages the fab where the performance equipment is placed or the process to which the recipe of the performance equipment is applied.

[0064] A dashboard refers to a user-based interface that collects information to allow one to understand the current status or condition of an object. In one embodiment, the dashboard may be output in various forms and may be implemented in a mixed form of nested diagrams and modular card layouts, a nested tab form, or a tree view form. This is not limited to the embodiments described as exemplary embodiments.

[0065] The hierarchy can be structured and output in the order of the first dashboard (210), the second dashboard (220), and the third dashboard (230).

[0066] According to one embodiment of the present disclosure, at least one processor (140) may be configured so that the first dashboard (210), the second dashboard (220), and the third dashboard (230) are displayed together on the screen of the input / output module (110).

[0067] In other words, the status of an AI project managed by one operator can be displayed on a single screen at once, making it easy to check the progress status, related information, or the processes, recipes, fabs, and equipment to which the AI ​​project belongs.

[0068] Specifically, as illustrated in FIG. 2, at least one processor (140) may be configured to output the AI ​​project corresponding to the production product and execution equipment input from the input / output module (110) to the first dashboard (210) when the worker information logged into the input / output module (110) corresponds to a process engineer, output the recipe of the execution equipment of the AI ​​project to the second dashboard (220), and output the process to which the recipe of the execution equipment is applied to the third dashboard (230).

[0069] Dozens or hundreds of AI projects can be applied to a single recipe within a semiconductor process, and these projects can be created and categorized based on the equipment used for execution or the products being produced. While the algorithms for these AI projects may be identical or similar, they can be distinguished as separate projects because the data used to train the AI ​​models may differ depending on the equipment or product.

[0070] Specifically, on the dashboard (210) that outputs Project 1 shown in FIG. 2, you can input production products and equipment that define Project 1 by pressing a "+" shaped input button (410).

[0071] In one embodiment, each project may be defined differently by receiving one production product and one execution equipment as input. Alternatively, in another embodiment, when intending to manage and learn data from multiple production products and multiple execution equipment as a single unit, data for multiple production products and multiple execution equipment may all be matched to a single project.

[0072] Once the production product and the equipment to be performed are defined, the recipe to be applied to Project 1, which is an AI project for the process, can also be determined by the second dashboard (220).

[0073] In other words, recipe information that can be applied to an AI project can be identified through a hierarchy-based structured dashboard, and an AI model can be created by easily collecting Recipe 1 data as a recipe for an AI model that performs Project 1 according to the identified recipe information.

[0074] Accordingly, the first dashboard (210) that manages Project 1 and outputs AI project information forms a hierarchy structure with the second dashboard (220) that manages recipes to be applied to Project 1.

[0075] An electronic device (100) according to one embodiment of the present disclosure can output a second dashboard (220) as a higher layer of a first dashboard (210). Referring to FIG. 2, the second dashboard (220) can be output as a diagram including the first dashboard (210).

[0076] In addition, once a recipe to be applied to Project 1 is determined, the process to be performed on Project 1 can also be determined. Among the multiple processes, the process in which the corresponding equipment and the corresponding recipe are performed can be specified by the third dashboard (230).

[0077] In other words, to create Project 1, processes or recipes are automatically assigned by checking a hierarchy-based structured dashboard without the need for the operator to input separate attributes. Additionally, when multiple AI projects are created within the same hierarchy as Project 1, the recipes and processes applied to the created AI projects can be identified and managed at a glance.

[0078] Accordingly, the second dashboard (220) defining the recipe of Project 1 forms a hierarchy structure with the third dashboard (230) defining the process in which the recipe will be carried out.

[0079] An electronic device (100) according to one embodiment of the present disclosure can output a third dashboard (230) as a higher layer of a second dashboard (220). Referring to FIG. 2, the third dashboard (230) can be output as a diagram including the second dashboard (220).

[0080] Alternatively, as another embodiment, at least one processor (140) may be configured to output the AI ​​project corresponding to the management parameters of the execution equipment input from the input / output module (110) to the first dashboard (210) when the worker information logged into the input / output module (110) corresponds to an equipment engineer, output the execution equipment of the AI ​​project to the second dashboard (220), and output the fab where the execution equipment is placed to the third dashboard (230).

[0081] Specifically, management parameters within the execution equipment defining Project 1 can be entered by pressing a "+" shaped input button (410) on the dashboard (210) that outputs Project 1 shown in FIG. 3.

[0082] In one embodiment, each project may be defined differently by receiving management parameters within a single execution device. Alternatively, in another embodiment, when intending to manage and learn data from multiple execution devices as a single unit, management parameters for multiple execution devices may be received and defined in a single project.

[0083] Once management parameters within the equipment are defined, the equipment to which Project 1, an AI project for the equipment, will be applied can also be determined by the second dashboard (220).

[0084] In other words, equipment information applicable to an AI project can be identified through a hierarchy-based structured dashboard, and based on the identified equipment information, data for Equipment 1 can be easily collected as manufacturing equipment to be used in the AI ​​model for performing Project 1, thereby enabling the creation of an AI model.

[0085] Accordingly, the first dashboard (210) managing Project 1 forms a hierarchy structure with the second dashboard (220) managing equipment to be applied to Project 1.

[0086] An electronic device (100) according to one embodiment of the present disclosure can output a second dashboard (220) as a higher layer of a first dashboard (210). Referring to FIG. 2, the second dashboard (220) can be output as a diagram including the first dashboard (210).

[0087] In addition, once the equipment to which Project 1 will be applied is determined, the fab where Project 1 will be performed can also be determined by the third dashboard (230).

[0088] Accordingly, the second dashboard (220) managing the recipe of Project 1 forms a hierarchy structure with the third dashboard (230) managing the fab where the equipment is to be placed.

[0089] An electronic device (100) according to one embodiment of the present disclosure can output a third dashboard (230) as a higher layer of a second dashboard (220). Referring to FIG. 3, the third dashboard (230) can be output as a diagram including the second dashboard (220).

[0090] Therefore, you can identify recipes and processes to which AI projects will be applied and create multiple AI projects, or identify manufacturing equipment and fabs to which AI projects will be applied and create multiple AI projects.

[0091] You can check the applied recipes or equipment based on the location of the AI ​​project, and manage the recipes or equipment applied to the created AI project.

[0092] Meanwhile, the target displayed on at least one of the first dashboard (210), the second dashboard (220), and the third dashboard (230) may include at least one of the name of the hierarchy target corresponding to each dashboard, a duplicate icon, a share icon, and a delete icon.

[0093] Referring to FIG. 2, a project name, Project_1, may be listed at the top of the first dashboard (210), a name, Recipe_1, may be listed at the top of the second dashboard (220), and a name, Process_1, may be listed at the top of the third dashboard (230). The operator can intuitively grasp at a glance what each project, recipe, and process is and the hierarchy of each parameter.

[0094] Additionally, the name displayed at the top can be automatically set as an attribute of the AI ​​project existing in the sub-hierarchy.

[0095] Considering the second dashboard (220) and the third dashboard (230), which are upper layers of any first dashboard (210), the recipe name corresponding to the second dashboard (220) and the process name corresponding to the third dashboard (230) can be automatically entered as attributes of the AI ​​project generated in the first dashboard (210).

[0096] By selecting corresponding recipes and processes from the first dashboard (210), second dashboard (220), and third dashboard (230) separated by a hierarchy structure, an AI project can be automatically created, and the selected recipes and processes can be automatically reflected as attributes of the AI ​​project. An AI project can be created without separate modifications or with only simple modifications, and the created AI project can be easily managed by being located on the hierarchy structure dashboards that display attributes.

[0097] Referring to FIG. 3, a project name, Project_1, may be listed at the top of the first dashboard (210), a name Equipment_1 may be listed at the top of the second dashboard (220), and a name Fab_1 may be listed at the top of the third dashboard (230). The operator can intuitively grasp at a glance what each project, equipment, and fab are and the hierarchy of each parameter.

[0098] Additionally, the name displayed at the top can be automatically set as an attribute of the AI ​​project existing in the sub-hierarchy.

[0099] For example, by clicking the duplicate icon within the first dashboard (210), the logic or algorithm of Project 1, or the settings for it, can be duplicated exactly as they are, and another project can be created as a new first dashboard (210) directly within the same second dashboard (220).

[0100] As mentioned above, there are tens or hundreds of pieces of equipment or processes in semiconductor equipment or semiconductor processes, and although the data handled may differ depending on the product being produced or the equipment being executed, they often use the same or similar logic.

[0101] Since it causes inconvenience to workers to individually input and manage each attribute whenever a new AI project is created, the information of Project 1, which is available when logging in with each worker's information, can be duplicated to create a new first dashboard (210) within the same second dashboard (220).

[0102] Alternatively, by clicking the duplicate icon within the second dashboard (220), the recipe name and all AI projects under it and their corresponding settings can be duplicated exactly as they are, thereby creating a new second dashboard (220) with a different recipe and AI projects under it directly within the same third dashboard (230).

[0103] You can duplicate the AI ​​model algorithm and related settings, recipe names, and other related attributes of Project 1 exactly as they are, or duplicate the AI ​​model algorithm and related settings, equipment names, and other related attributes of Project 1 exactly as they are.

[0104] In other words, you can create identical dashboards within the same hierarchy through duplication. When a dashboard corresponding to a higher hierarchy is duplicated, dashboards corresponding to its lower hierarchy can also be duplicated.

[0105] Alternatively, by clicking the duplicate icon within the third dashboard (230), the process name and the recipe name below it can be duplicated exactly as they are to immediately create a third dashboard (230) of a different process.

[0106] You can replicate the AI ​​model algorithm and related settings, process name, recipe name, and other related attributes of Project 1, or replicate the AI ​​model algorithm and related settings, fab name, equipment name, and other related attributes of Project 1.

[0107] In one embodiment, project, recipe, or process information within the first dashboard (210), second dashboard (220), and third dashboard (230) can be deleted by clicking the delete icon (340) on the first dashboard (210), second dashboard (220), and third dashboard (230).

[0108] Specifically, each AI project corresponding to the delete icon (340) can be deleted individually by clicking the delete icon (340) placed within the first dashboard (210). All AI projects to which the recipe corresponding to the delete icon (340) is applied can be deleted in bulk by clicking the delete icon (340) placed within the second dashboard (220). All recipes within the process and AI projects to which the recipe is applied can be deleted in bulk by clicking the delete icon (340) placed within the third dashboard (230).

[0109] Alternatively, you can delete project, equipment, or fab information within the first dashboard (210), second dashboard (220), or third dashboard (230) by clicking the delete icon (340) on the first dashboard (210), second dashboard (220), or third dashboard (230).

[0110] Specifically, each AI project corresponding to the delete icon (340) can be deleted individually by clicking the delete icon (340) placed within the first dashboard (210). All AI projects with execution equipment corresponding to the delete icon (340) can be deleted in bulk by clicking the delete icon (340) placed within the second dashboard (220). All execution equipment within the fab and AI projects with said execution equipment applied can be deleted in bulk by clicking the delete icon (340) placed within the third dashboard (230).

[0111] The semiconductor process may modify or update information regarding the recipe, process, equipment, or fab depending on external conditions. At this time, some information may be modified or updated while leaving it as is, but it may also be deleted and regenerated using the delete icon (340).

[0112] In one embodiment, project, recipe, and process information within the first dashboard (210), second dashboard (220), and third dashboard (230) can be shared with other workers by clicking the share icon (320) on the first dashboard (210), second dashboard (220), and third dashboard (230).

[0113] Specifically, by clicking the share icon (320) placed within the first dashboard (210), each AI project corresponding to the share icon (320) can be shared individually with other workers. By clicking the share icon (320) placed within the second dashboard (220), all AI projects to which the recipe corresponding to the share icon (320) has been applied can be shared collectively with other workers. By clicking the share icon (320) placed within the third dashboard (230), all recipes within the process corresponding to the share icon (320) and all AI projects to which the recipe has been applied can be shared collectively with other workers. Sharing can be configured for each hierarchy to provide relevant information only to workers with authority, taking into account the authority held by each worker.

[0114] Alternatively, as an example, project, equipment, and fab information within the first dashboard (210), second dashboard (220), and third dashboard (230) can be shared with other workers by clicking the share icon (320) on the first dashboard (210), second dashboard (220), and third dashboard (230).

[0115] Specifically, by clicking the share icon (320) placed within the first dashboard (210), each AI project corresponding to the share icon (320) can be shared individually with other workers. By clicking the share icon (320) placed within the second dashboard (220), all AI projects to which the execution equipment corresponding to the share icon (320) is applied can be shared collectively with other workers. By clicking the share icon (320) placed within the third dashboard (230), all execution equipment within the fab corresponding to the share icon (320) and all AI projects to which the execution equipment is applied can be shared collectively with other workers. Sharing can be set for each hierarchy so that relevant information is provided only to workers with authority, taking into account the authority held by each worker.

[0116] Accordingly, the authorized first dashboard (210), second dashboard (220), or third dashboard (230) can be shared with other authorized workers.

[0117] In this case, to prevent the management burden caused by too many dashboards being open simultaneously, you can set it so that only the dashboards you created are displayed, and allow shared dashboards to be displayed by clicking on them separately.

[0118] Additionally, a specific dashboard can be fixed at the front according to the operator's preference using a pin (310). For example, if the pin (310) of the third dashboard (230) for process 1 is activated, at least one processor (140) can position the third dashboard (230) for process 1 ahead of other third dashboards (230).

[0119] A second dashboard (220) that is lower in hierarchy than the third dashboard (230) can be placed at the very front, with the second dashboard (221) fixed by the pin (310), and the second dashboard (222) that is not fixed by the pin (310) can be placed behind it.

[0120] This allows the position of specific dashboards to be fixed to improve convenience for workers managing multiple AI projects at once.

[0121] Additionally, a creation dashboard may be output to create a new dashboard after the last dashboard. Referring to FIG. 2, the second dashboard (222) that outputs and manages recipe 2 is the last recipe hierarchy second dashboard (220), and at least one processor (140) may then output a creation dashboard (223) that creates a second dashboard that manages a new recipe.

[0122] Likewise, for the first dashboard (210) and the third dashboard (230), a generating dashboard capable of generating the first dashboard (210) or the third dashboard (230) can be generated after the last first dashboard (210) and the third dashboard (230).

[0123] The creation dashboard may be displayed in a different form to distinguish it from other dashboards, or it may be displayed with a guide message such as "create new recipe".

[0124] Accordingly, an electronic device (100) according to one embodiment of the present disclosure can improve worker convenience by allowing information managed by each dashboard to be easily copied, shared, or deleted while the hierarchy of the first dashboard (210), the second dashboard (220), and the third dashboard (230) is structured and output, or by adjusting the dashboard arrangement so that the dashboard according to the worker's preference is at the front.

[0125] Meanwhile, the target displayed on the first dashboard (210) may further include at least one of a production product or execution equipment input icon (410), a start icon (440) that commands the execution of the AI ​​project for equipment connected to the AI ​​project, an analysis icon (420) that commands analysis based on collected data, and an AI project setting icon (430).

[0126] Among the dashboards, the first dashboard (210) may have execution function icons for performing projects placed in addition to management function icons for copying, sharing, and deleting projects.

[0127] In one embodiment, after the first dashboard (210) for Project 1 is created, the input icon (410) can be clicked to receive input of a product to be created from Project 1 or an execution equipment to which Project 1 will be applied through the input / output module (110). Multiple AI projects with different product codes or execution equipment but identical recipes and processes can be created on the first dashboard (210), and when exploring the AI ​​projects, it is possible to manage them so that there is no need to filter tags containing process names or recipe names.

[0128] In other words, AI projects corresponding to the specific process or recipe you are looking for are located under, allowing you to intuitively identify specific AI projects on the dashboard.

[0129] Additionally, the analysis icon (420) can perform analysis on the collected data and generated AI model related to Project 1. The AI ​​project may include process control or virtual measurement calculations, and can analyze data for process control settings, the results of applying the process control AI model, or virtual measurement prediction values ​​using data obtained from a data repository within the semiconductor fab for process control or data obtained from a data repository within the semiconductor fab for virtual measurement calculations.

[0130] Additionally, if Project 1 is a project related to process control, the AI ​​project setting icon (430) can be set to generate a process control model according to the settings defined in the first dashboard (210) managing Project 1 and the collected data.

[0131] A process control model, which is an AI model that performs process control, can be created through the AI ​​project setting icon (430), and the created process control model can be deployed and operated through the start icon (440) described later.

[0132] Alternatively, if Project 1 is related to virtual measurement calculations, anomaly detection, or predictive maintenance, an AI model that performs such functions can be created.

[0133] The start icon (440) may be an icon that commands the start of data processing using a process control model generated independently of the operation of the execution equipment. Just like a switch, when the start icon (440) is clicked, AI processing of the data is performed, and when the start icon (440) is turned off, AI processing of the data can be stopped.

[0134] For example, if the execution equipment is currently running, data can be saved in real time and processed by AI when the start icon (440) is turned on. If the execution equipment is not currently running, data is not saved even if the start icon (440) is turned on. In this case, the start icon (440) can wait until the execution equipment is running, similar to a reservation setting function, and then start processing data together with the operation of the execution equipment.

[0135] When the start icon (440) is off and the execution equipment is running, the data collected in real time is backed up and stored in the database, but AI processing is not performed.

[0136] Through this, workers can manage the execution status of AI models within a project, create similar projects, or share them with other workers while clearly understanding the hierarchy structure of the AI ​​projects they manage.

[0137] In one embodiment, at least one processor (140) may be configured such that the first dashboard (210) is distinguished by a different shape or color depending on the nature of the corresponding AI project, or the first dashboard (210) is distinguished by a different shape or color depending on whether the start icon is executed.

[0138] As an example, although not illustrated in FIGS. 2 and 3, there are various types of AI projects, which can be classified into process control, virtual measurement, predictive maintenance, and anomaly detection depending on their nature. The operator can check which type of project a project is by double-clicking each project to open it, but the project can be distinguished by color or different form so that the type of each AI project can be identified even without the operator clicking.

[0139] For example, the first dashboard (210) of the AI ​​project performing process control can be displayed in red, and the first dashboard (210) of the AI ​​project performing virtual measurement can be displayed in yellow.

[0140] Alternatively, as an example, the first dashboard (210) of the project may be distinguished from the first dashboard (210) where AI processing has started and the first dashboard (210) where AI processing has not started, according to the start icon (440).

[0141] For example, the first dashboard (210) in which the start icon (440) is activated may display the color of the start icon (440) or the first dashboard (210) as green, and the first dashboard (210) in which the start icon (440) is not activated may display the color of the start icon (440) as gray or display the color of the first dashboard (210) as the original color of the first dashboard (210).

[0142] As another embodiment, in addition to color, the lines or shapes of the dashboard may be distinguished.

[0143] In one embodiment, the at least one processor (140) of the electronic device (100) according to the present disclosure may be configured to set one AI project as a master project representing a plurality of AI projects within the first dashboard (210), and to modify the plurality of AI projects collectively in the same manner as the master project when the master project is modified.

[0144] When multiple AI projects are created on the first dashboard (210), one of the multiple AI projects can be set as the master project to manage the multiple AI projects collectively.

[0145] For example, if it is necessary to modify multiple AI projects in the first dashboard (210) in bulk, all AI projects located in the same first dashboard (210) can be modified by modifying one AI project set as the master project.

[0146] Multiple AI projects may refer to all AI projects created within the first dashboard (210) at the time of setting the master project.

[0147] As one embodiment, as shown in FIG. 9, the master project may be displayed by displaying a crown-shaped icon, or by displaying a different appearance such as the color inside the diagram, the color of the border, or the shape of the border line. Alternatively, it may be displayed by attaching a tag-shaped icon with the words "Master Project" written inside the diagram. This is an exemplary embodiment and may include all markings that can distinguish the AI ​​project that is the master project from other AI projects.

[0148] As an example, to set a desired diagram as a master project, the desired diagram can be selected through a user-based interface including a mouse and set by right-clicking the mouse, etc.

[0149] As an example, to prevent accidental settings, a warning window may be displayed indicating that it is involved in the operation of all AI projects located on the same first dashboard (210) when set as a master project.

[0150] Meanwhile, at least one processor (140) may be configured to arrange the first dashboard (210), the second dashboard (220), and the third dashboard (230) in a mixed form of a nested diagram and a modular card layout, a nested tab form, a tree view form, or a mixed form of the structure according to pre-set or worker data input from the input / output module (110).

[0151] The electronic device (100) of the present disclosure can output and manage AI projects by structuring and outputting a first dashboard (210) that can accurately identify and manage multiple AI projects in which the same or similar algorithm is performed, and a second dashboard (220) and a third dashboard (230) that have a hierarchical structure with the first dashboard (210).

[0152] In this case, the method of outputting by structuring based on hierarchy is sufficient as long as it can represent the hierarchy, and is not limited to that.

[0153] For example, as shown in FIGS. 2 to 4, the hierarchy of the first dashboard (210), the second dashboard (220), and the third dashboard (230) can be represented by a combination of nested diagrams and modular card layouts.

[0154] Referring to FIG. 4, it can be intuitively seen that the upper layer of the first dashboard (210) is the second dashboard (220), and the upper layer of the second dashboard (220) is the third dashboard (230). At this time, through the names of each dashboard, one can identify recipe and process information related to the AI ​​project, or identify equipment and fab information related to the AI ​​project.

[0155] The hierarchy of each dashboard can be represented by distinguishing the sub-diagrams and parent diagrams to which each diagram belongs.

[0156] Alternatively, as shown in FIG. 5, the hierarchy of the first dashboard (210), the second dashboard (220), and the third dashboard (230) can be represented in a nested tab structure.

[0157] Referring to FIG. 5, it can be seen that each dashboard contains a sub-dashboard nested in the form of a tab, and the third dashboard (230) is separated by a tab to form a plurality of second dashboards (220), and the second dashboard (220) is separated by a tab to form a plurality of first dashboards (210). In other words, it can be intuitively understood that the upper layer of the first dashboard (210) is the second dashboard (220), and the upper layer of the second dashboard (220) is the third dashboard (230).

[0158] The hierarchy of each dashboard can be represented by separating it into sub-tabs and parent tabs.

[0159] In Fig. 5, the tabs are separated in the vertical direction, but as another embodiment, the tabs can be separated and output in the horizontal direction.

[0160] Alternatively, as shown in FIG. 6, the hierarchy of the first dashboard (210), the second dashboard (220), and the third dashboard (230) can be represented as a horizontal tree structure.

[0161] Referring to FIG. 6, it can be seen that although the dashboards do not overlap each other, a line from the third dashboard (230) is connected to a plurality of second dashboards (220), and a line from the second dashboard (220) becomes a plurality of first dashboards (210). In other words, it can be intuitively understood that the upper layer of the first dashboard (210) is the second dashboard (220), and the upper layer of the second dashboard (220) is the third dashboard (230).

[0162] Figure 6 uses a folder format as an exemplary embodiment, but can be output as a dashboard of a different format.

[0163] Alternatively, as shown in Fig. 6, the sub-dashboards were displayed and distinguished in a horizontal direction.

[0164] As shown in FIG. 6(a), the hierarchy of the first dashboard (210), second dashboard (220), and third dashboard (230) can be expressed as a vertical tree structure with the lower dashboards extending downward.

[0165] Additionally, as shown in FIG. 6(b), although the dashboards do not overlap each other, it can be seen that an arrow from the third dashboard (230) is connected to a plurality of second dashboards (220), and an arrow from the second dashboard (220) becomes a plurality of first dashboards (210). In other words, it can be intuitively seen that the upper layer of the first dashboard (210) is the second dashboard (220), and the upper layer of the second dashboard (220) is the third dashboard (230).

[0166] Alternatively, the hierarchy of the first dashboard (210), the second dashboard (220), and the third dashboard (230) can be expressed by combining the nested diagrams and modular card layouts shown in FIGS. 4 to 6, nested tabs, and tree views.

[0167] For example, you can represent a hierarchy by including a nested tab structure within a nested diagram.

[0168] In addition, as one embodiment, at least one processor (140) may be configured to output a warning window indicating duplicate AI project creation when the AI ​​project of the first dashboard (210), the input production product, and the execution equipment are identical to the first dashboard (210) and are created under the same third dashboard (230).

[0169] Multiple identical AI projects may be created for the same process, or multiple AI projects may be created for one piece of equipment and one product for different tests, even if the recipe is the same.

[0170] However, to prevent the creation of a previously generated AI project again, alarms or warnings may be provided to the worker.

[0171] As illustrated in FIG. 7, when an AI project for a process is produced, the production product or performance equipment input icon (410) can input one production product and one performance equipment.

[0172] Alternatively, multiple production products or multiple execution equipment may be entered into the production product or execution equipment input icon (410).

[0173] In a specific process operated with a specific recipe, an AI project can be managed for one production product and one execution equipment, but when intending to perform AI processing by combining data for multiple production products or multiple execution equipment, information on multiple production products or multiple execution equipment can be entered into the first dashboard (210) for management, and data obtained from a data repository within the semiconductor fab for the corresponding multiple production products or multiple execution equipment can be generated as training data.

[0174] Additionally, as shown in FIG. 8, when an AI project for equipment is created, a parameter input icon (411) can be placed instead of a production product or equipment input icon (410) to allow one or multiple management parameters for the equipment to be entered.

[0175] While an AI project can be managed for a single equipment management parameter in a specific piece of equipment of a specific fab, when performing AI processing by combining data for multiple management parameters, information on multiple management parameters can be entered into the first dashboard (210) to manage them, and data obtained from a data repository within the semiconductor fab for the corresponding multiple management parameters can be generated as training data.

[0176] In the above-described embodiment, the first dashboard (210), the second dashboard (220), and the third dashboard (230) are represented, but the number and hierarchy of dashboards can be newly added or set differently depending on the purpose. For example, if three or more hierarchical structures are required depending on the process area of ​​a process engineer or a client, more hierarchy-based structured dashboards can be output.

[0177] Meanwhile, a UI output method for an electronic device that outputs hierarchy-based structured AI project information according to the present disclosure is a UI output method for an electronic device that outputs information about an AI project to be performed in a semiconductor device manufacturing process, and includes the step of outputting information about the AI ​​project to a dashboard by structuring it hierarchy-based in an input / output module, wherein the step may include the step of outputting the AI ​​project corresponding to the management parameters of the execution equipment or the production product and the execution equipment input from the input / output module to a first dashboard (210), the step of outputting the execution equipment to which the AI ​​project is applied or the recipe of the execution equipment to a second dashboard (220) which is an upper layer of the first dashboard (210), and the step of outputting the fab where the execution equipment is placed or the process to which the recipe of the execution equipment is applied to a third dashboard (230) which is an upper layer of the second dashboard (220).

[0178] Content that overlaps with the above is omitted for the sake of brevity in the specification.

[0179] Meanwhile, the disclosed embodiments may be implemented in the form of a recording medium that stores instructions executable by a computer. The instructions may be stored in the form of program code and, when executed by a processor, may generate a program module to perform the operation of the disclosed embodiments. The recording medium may be implemented as a computer-readable recording medium.

[0180] Computer-readable recording media include all types of recording media that store instructions that can be decoded by a computer. Examples include ROM (Read Only Memory), RAM (Random Access Memory), magnetic tape, magnetic disk, flash memory, optical data storage devices, etc.

[0181] As described above, the disclosed embodiments have been explained with reference to the attached drawings. Those skilled in the art will understand that the present disclosure may be practiced in forms different from the disclosed embodiments without changing the technical spirit or essential features of the present disclosure. The disclosed embodiments are illustrative and should not be interpreted restrictively.

Claims

1. As an electronic device that outputs information on an AI project to be performed in the manufacturing process of a semiconductor device, At least one processor controlling a hierarchy-based structure to be displayed on a dashboard that outputs information about the above AI project; comprising, The above dashboard is, A first dashboard for managing the AI ​​project corresponding to the management parameters of the execution equipment input from the above input / output module or the production product and execution equipment; A second dashboard that is output as an upper layer of the first dashboard and manages the execution equipment to which the AI ​​project is applied or the recipe of the execution equipment; and A third dashboard that is output as an upper layer of the second dashboard and manages a fab where the execution equipment is placed or a process to which the recipe of the execution equipment is applied, An electronic device that outputs hierarchy-based structured AI project information.

2. In Paragraph 1, The above-mentioned at least one processor is, The first dashboard, second dashboard, and third dashboard are configured to be displayed together on the screen of the input / output module. An electronic device that outputs hierarchy-based structured AI project information.

3. In Paragraph 1, The above-mentioned at least one processor is, If the worker information corresponds to a process engineer, Output the AI ​​project corresponding to the production product and execution equipment input from the input / output module to the first dashboard, and Output the recipe of the execution equipment applied to the AI ​​project on the second dashboard above, and Configured to output the process to which the recipe of the execution equipment is applied to the third dashboard above. An electronic device that outputs hierarchy-based structured AI project information.

4. In Paragraph 1, The above-mentioned at least one processor is, If the worker information corresponds to an equipment engineer, Output the AI ​​project corresponding to the management parameters within the execution equipment input from the input / output module to the first dashboard, and Outputs the execution equipment applied to the AI ​​project on the second dashboard above, and Configured to output the fab where the execution equipment is placed on the third dashboard above. An electronic device that outputs hierarchy-based structured AI project information.

5. In Paragraph 3 or 4, The target displayed on at least one of the first dashboard, the second dashboard, and the third dashboard includes at least one of the name, duplicate icon, share icon, and delete icon of the hierarchy target corresponding to each dashboard. An electronic device that outputs hierarchy-based structured AI project information.

6. In Paragraph 5, The target displayed on the first dashboard above is, at least one of a production product or execution equipment input icon, a start icon that commands the execution of the AI ​​project for equipment connected to the AI ​​project, an analysis icon that commands analysis based on collected data, and an AI project settings icon. An electronic device that outputs hierarchy-based structured AI project information.

7. In Paragraph 3, The above-mentioned at least one processor is, Configured to output a warning window to the input / output module when the same first dashboard, which has the same AI project, input production product, and execution equipment as the first dashboard, is created under the same third dashboard. An electronic device that outputs hierarchy-based structured AI project information.

8. In Paragraph 3, The above-mentioned at least one processor is, The above-mentioned first dashboard is distinguished by different shapes or colors depending on the nature of the corresponding AI project, or The first dashboard is configured to be distinguished by different shapes or colors depending on whether the start icon is executed. An electronic device that outputs hierarchy-based structured AI project information.

9. In Paragraph 1, The above-mentioned at least one processor is, Configured to arrange the first dashboard, the second dashboard, and the third dashboard in at least one of a mixed structure of a nested diagram and a modular card layout, a nested tab structure, a tree view structure, and a mixed structure of said structures, according to pre-set or worker data input from the input / output module. An electronic device that outputs hierarchy-based structured AI project information.

10. In Paragraph 1, The above-mentioned at least one processor is, A second dashboard and a third dashboard, which are upper layers of an arbitrary first dashboard, are configured so that a recipe name corresponding to the second dashboard and a process name corresponding to the third dashboard are automatically entered as attributes of an AI project generated in the first dashboard. An electronic device that outputs hierarchy-based structured AI project information.

11. In Paragraph 1, The above-mentioned at least one processor is, A configuration in which, considering a second dashboard and a third dashboard which are upper layers of an arbitrary first dashboard, the execution equipment name corresponding to the second dashboard and the fab name corresponding to the third dashboard are automatically entered as attributes of an AI project generated in the first dashboard. An electronic device that outputs hierarchy-based structured AI project information.

12. In Paragraph 1, The above-mentioned at least one processor is, One AI project is set as a master project representing multiple AI projects within the first dashboard above, and When the above master project is modified, the above multiple AI projects are configured to be modified collectively in the same manner as the master project. An electronic device that outputs hierarchy-based structured AI project information.

13. A method for outputting a UI of an electronic device that outputs information of an AI project to be performed in a semiconductor device manufacturing process, wherein the method comprises: The input / output module includes a step of outputting information about the AI ​​project to a dashboard by structuring it based on hierarchy, and the step comprises: A step of outputting the management parameters of the execution equipment input from the above input / output module or the AI ​​project corresponding to the production product and the execution equipment to the first dashboard; A step of outputting execution equipment applied to the above AI project or a recipe of the said execution equipment to a second dashboard which is an upper layer of the first dashboard; and A step of outputting the Fab where the execution equipment is deployed or the process to which the recipe of the execution equipment is applied to a third dashboard which is an upper layer of the second dashboard; comprising UI output method of an electronic device that outputs hierarchy-based structured AI project information.

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