Invar alloy steel ingot and smelting method therefor
By using vacuum induction melting and vacuum arc remelting methods, the content of alloying elements and impurities in Invar alloys is strictly controlled, solving the problems of low purity, large element segregation, and many inclusions in Invar alloys, and producing high-quality Invar alloy steel ingots suitable for metal photomasks.
WO2026144690A1PCT designated stage Publication Date: 2026-07-09CHINA IRON & STEEL RESEARCH INSTITUTE GROUP CO LTD
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- CHINA IRON & STEEL RESEARCH INSTITUTE GROUP CO LTD
- Filing Date
- 2025-11-27
- Publication Date
- 2026-07-09
AI Technical Summary
Technical Problem
Existing Invar alloys suffer from low purity, large elemental segregation, numerous inclusions, and poor uniformity, which affects the yield of open-type metal photomasks.
Method used
By employing vacuum induction melting and vacuum arc remelting methods, the loss of alloying elements and the content of impurity elements are strictly controlled, and the refining time and casting process are precisely controlled. Combined with each step and process parameter of vacuum arc remelting, the purity and uniformity of the alloy are ensured.
Benefits of technology
Invar alloy steel ingots with high purity, few inclusions, small elemental segregation, and good uniformity were prepared, which are suitable for making metal photomasks and improve the production yield of photomasks.
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Smart Images
Figure CN2025137992_09072026_PF_FP_ABST
Abstract
The present application relates to the technical field of alloy preparation, and discloses an invar alloy steel ingot and a smelting method therefor, used for solving the problems in the prior art of low purity, large element segregation, a large variety of inclusions, and poor uniformity of invar alloys. The invar alloy steel ingot comprises the following components in percentage by mass: Ni: 35.5%-36.5%, C: ≤0.01%, Si: ≤0.05%, Mn: 0.30%-0.50%, Al: ≤0.02%, Mg: ≤0.05%, Zr: ≤0.05%, Ti: ≤0.05%, P: ≤0.005%, S: ≤0.001%, O: ≤0.0008%, N: ≤0.0005%, and the remaining being Fe and other inevitable impurities. The invar alloy steel ingot of the present application has high purity, low impurity content, small element segregation, few inclusions, and good uniformity.
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