Ozone generation device

Abstract

The purpose of the present disclosure is to provide a structure of an ozone generation device that effectively suppresses an overall temperature rise of the device. An ozone generation device (51) according to the present disclosure accommodates an inverter (4), a control and measurement instrument (2), and an ozone generator (5) in an accommodation space (S1) of a device housing (1). The device housing (1) is provided with an exhaust port (6) on an upper surface (F1). In the accommodation space (S1), among the inverter (4), the control and measurement instrument (2), and the ozone generator (5), the inverter (4) is disposed at a position closest to the upper surface (F1). Therefore, in the ozone generation device (51), the exhaust port (6) provided on the upper surface (F1) of the device housing (1) mainly exhausts heated gas that has been discharged from the inverter (4).

Description

Ozone generation device

[0001] The present disclosure relates to an ozone generation device in which an ozone generator, an inverter, and control / measurement equipment are housed in an apparatus housing.

[0002] In a conventional ozone generation device, there is a unit-type ozone generation device in which an ozone generator, an inverter, and control / measurement equipment are housed in an apparatus housing.

[0003] The ozone generator is a device that generates ozone gas, the control / measurement equipment is a device that performs control / measurement processing on the ozone generator and the inverter, and the inverter is a power supply unit that supplies AC power to the ozone generator. As such an ozone generation device, for example, there is an ozone generation unit in an ozone gas supply system disclosed in Patent Document 1.

[0004] FIGS. 16 and 17 are explanatory views schematically showing the structure of a conventional ozone generation device 60. An XYZ orthogonal coordinate system is shown in each of FIGS. 16 and 17.

[0005] As shown in these figures, the ozone generation device 60 includes an ozone generator 5, control / measurement equipment 2, an inverter 4, and an apparatus housing 61 that houses the ozone generator 5, the inverter 4, and the control / measurement equipment 2 in an accommodation space S61.

[0006] The control / measurement processing executed by the control / measurement equipment 2 includes ozone concentration measurement processing for measuring the ozone concentration, which is the concentration of ozone gas generated by the ozone generator 5, and inverter control processing for controlling the AC power of the inverter 4 so that the ozone concentration becomes the set ozone concentration.

[0007] As shown in FIGS. 16 and 17, the apparatus housing 61 has, for example, a quadrangular prism structure, has an accommodation space S61 inside, provides an exhaust port 66 on the upper surface F61 on the +Z direction side, and provides an intake port 67 on the side surface F63 on the +Y direction side. The intake port 67 is provided at a position closer to the ozone generator 5 than the control / measurement equipment 2 and the inverter 4.

[0008] The intake port 67 has an intake function that draws air from outside the device housing 61 into the containment space S61, and the exhaust port 66 has an exhaust function that guides air from the containment space S61 to the outside of the device housing 61.

[0009] Within the housing space S61 of the device enclosure 61, the ozone generator 5, inverter 4, and control / measuring equipment 2 are arranged in the order of height (+Z direction). Therefore, the order of proximity from the top surface F61 is control / measuring equipment 2, inverter 4, and ozone generator 5. In other words, the control / measuring equipment 2 is positioned close to the top surface F61.

[0010] In a conventional ozone generator 60 with this configuration, cooling air is supplied from outside the device housing 61 into the containment space S61 via an air intake port 67, and the cooling air is exhausted from the containment space S61 via an exhaust port 66, thereby performing an air-cooled cooling operation of the containment space.

[0011] As a result of the aforementioned cooling operation of the containment space, heated gas mainly generated from the control and measuring equipment 2 is exhausted from the exhaust port 6 provided in the device housing 61. On the other hand, the exhaust of heated gas discharged from the inverter 4 and the ozone generator 5 was carried out within the containment space S61.

[0012] This is because, since the control and measurement equipment 2 is located between the inverter 4 and the upper surface F61, and the control and measurement equipment 2 and inverter 4 are located between the ozone generator 5 and the upper surface F61, even when the above-mentioned containment space cooling operation is performed, most of the heated gas exhausted from the inverter 4 and ozone generator 5 will remain within the containment space S61.

[0013] Patent No. 5627027

[0014] As described above, in conventional ozone generators 60, the inverter 4 was not placed in close proximity to the upper surface F61 where the exhaust port 66 is located within the housing space S61. One reason for this was the concern that if the inverter 4 were placed in close proximity to the upper surface F61, dust would be discharged from the exhaust port 66 to the outside of the device housing 61.

[0015] The ozone generator 5 generally has its own water-cooling function, so it can cool 70-90% of the waste heat itself. On the other hand, the inverter 4 has a weak cooling function, so its cooling capacity is considerably lower compared to the ozone generator 5.

[0016] Generally, the amount of heat waste from the inverter 4 accounted for 5-15% of the total heat waste from the ozone generator 60. For example, if we assume that the amount of heat waste from the ozone generator 5 is C5 and the amount of heat waste from the inverter 4 is C4, with {C5:C4 = 7:1}, and that the amount of heat waste from the control and measuring equipment 2 C2 is negligible because {C2 << C4 < C5}, then the amount of heat waste from the inverter 4 C4 is approximately 12.5% ​​(1 / 8) of the total.

[0017] As described above, regarding the heat discharge amount C2 from the control and measurement device 2, the heat discharge amount C4 from the inverter 4, and the heat discharge amount C5 from the ozone generator 5, we assume that 80% of the heat discharge amount C5 can be cooled by the cooling function of the ozone generator 5 itself, and that the reduction rate of the heat discharge amount C4 by the inverter 4 itself is "0".

[0018] In this case, even if the above-described cooling operation of the containment space is performed, the remaining heat dissipation amount {(12 / 35) * C5 (= C5 / 5 + C4)} of heated gas is not exhausted, and the above remaining heat dissipation amount is 30% of the total heat dissipation amount of the device {(8 / 7) * C5}.

[0019] As a result, the conventional ozone generator 60 raises the temperature inside the containment space S61 by, for example, 5 to 15°C, and this temperature rise causes malfunctions in non-inverter equipment, including the control and measurement equipment 2 and the ozone generator 5.

[0020] In addition, the ozone generator 5 may be configured by a combination of multiple partial ozone generators, and the inverter 4 may be configured by a combination of multiple partial inverters corresponding to the multiple partial ozone generators. In this case, there was a problem that the heating caused by the exhaust heat from each other between the multiple partial inverters could lead to malfunctions.

[0021] This disclosure aims to provide a structure for an ozone generator that solves the above-mentioned problems and effectively suppresses the temperature rise of the entire device.

[0022] A first aspect of the ozone generating apparatus of the present disclosure is an ozone generating apparatus that generates ozone gas, comprising: an ozone generator that generates ozone gas; control and measurement equipment that performs control and measurement processing; an inverter that supplies AC power to the ozone generator; and an apparatus housing that houses the ozone generator, the inverter, and the control and measurement equipment in a housing space, wherein the control and measurement processing includes an ozone concentration measurement process that measures the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process that controls the AC power of the inverter so that the ozone concentration becomes a set ozone concentration, wherein the apparatus housing has an exhaust surface and an intake surface, the ozone generating apparatus comprises an intake port provided on the intake surface that has an intake function for taking in air from outside the apparatus housing into the housing space, and an exhaust port provided on the exhaust surface that has an exhaust function for leading air from the housing space to outside the apparatus housing, and the inverter is positioned closer to the exhaust surface than the ozone generator and the control and measurement equipment.

[0023] A second aspect of the ozone generating apparatus of the present disclosure is an ozone generating apparatus for generating ozone gas, comprising: an ozone generator for generating ozone gas; control and measurement equipment for performing control and measurement processing; an inverter for supplying AC power to the ozone generator; and an apparatus housing for housing the ozone generator, the inverter, and the control and measurement equipment within a housing space, wherein the control and measurement processing includes an ozone concentration measurement process for measuring the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process for controlling the AC power of the inverter so that the ozone concentration becomes a set ozone concentration, the apparatus housing having an inverter exhaust surface, and further comprising, in the housing space, an inverter exhaust duct provided between the fan installation area of ​​the inverter and the inverter exhaust surface, and an inverter exhaust port provided on the inverter exhaust surface having an exhaust function for guiding the gas discharged from the fan installation area of ​​the inverter to the outside of the apparatus housing via the inverter exhaust duct.

[0024] A third aspect of the ozone generator of the present disclosure is an ozone generator that generates ozone gas, comprising: an ozone generator that generates ozone gas; control and measurement equipment that performs control and measurement processing; an inverter that supplies AC power to the ozone generator; and a housing for the device that houses the ozone generator, the inverter, and the control and measurement equipment in a housing space, wherein the control and measurement processing includes an ozone concentration measurement process that measures the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process that controls the AC power of the inverter so that the ozone concentration becomes a set ozone concentration, and the housing space comprises a first partial housing space and a second partial housing space separated from each other The ozone generator and the control and measuring instruments are housed in the first partial housing space, and the inverter is housed in the second partial housing space. The housing has an inverter exhaust surface and an inverter intake surface. The ozone generator further includes an inverter intake port provided on the inverter intake surface, which has an intake function to draw air from outside the housing to the second partial housing space, and an inverter exhaust port provided on the inverter exhaust surface, which has an exhaust function to guide air from the second partial housing space to the outside of the housing.

[0025] An ozone generator according to the first aspect of this disclosure can perform an air-cooling operation of the containment space by supplying cooling air from outside the device housing to the containment space through an air intake port and exhausting the cooling air from the containment space through an exhaust port.

[0026] In the ozone generator according to the first aspect of this disclosure, the inverter is positioned closer to the exhaust surface than the ozone generator and the control and measuring equipment. Therefore, due to the above-described containment space cooling operation, most of the heated gas discharged from the inverter is exhausted to the outside through an exhaust port provided on the exhaust surface of the containment space.

[0027] As a result, the ozone generator according to the first aspect of this disclosure can effectively suppress the temperature rise of the entire ozone generator by preferentially releasing the heated gas generated from the inverter to the outside.

[0028] An ozone generator in a second aspect of this disclosure can perform an inverter cooling operation in which heated gas discharged from the fan installation area of ​​the inverter is exhausted to the outside of the device housing via an inverter exhaust duct and an inverter exhaust port.

[0029] Therefore, the heated gas discharged from the inverter fan area is directly exhausted to the outside via the inverter exhaust duct and inverter exhaust port.

[0030] In addition, since the heating gas propagates within the containment space via the inverter exhaust duct, the aforementioned heating gas does not diffuse outside the inverter exhaust duct.

[0031] As a result, the ozone generator according to the second aspect of this disclosure can effectively suppress the temperature rise of the entire ozone generator by releasing the heated gas discharged from the inverter to the outside of the device housing without diffusing heat into the containment space outside the inverter exhaust duct.

[0032] An ozone generator in a third aspect of the present disclosure can perform an air-cooling operation of the second partial containment space by supplying cooling air from outside the device housing to the second partial containment space via an inverter intake port and exhausting the cooling air from the second partial containment space via an inverter exhaust port.

[0033] As a result of the second partial containment space cooling operation described above, the heated and expanded hot gas discharged from the inverter propagates through the second partial containment space and is exhausted from the inverter exhaust port. In this process, since the first partial containment space is insulated from the second partial containment space, the temperature rise in the first partial containment space is suppressed.

[0034] As a result, the ozone generator of this disclosure can effectively suppress the temperature rise of the entire ozone generator by preferentially releasing the heated gas discharged from the inverter to the outside of the device housing.

[0035] The purpose, features, aspects, and advantages of this disclosure will become clearer from the following detailed description and accompanying drawings.

[0036] Figure 1 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 1. Figure 2 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 1. Figure 3 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 2. Figure 4 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 2. Figure 5 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 3. Figure 6 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 3. Figure 7 is a schematic explanatory diagram (part 1) showing the structure of the metal partition plate in the ozone generator according to Embodiment 3. Figure 8 is a schematic explanatory diagram (part 2) showing the structure of the metal partition plate in the ozone generator according to Embodiment 3. Figure 9 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 4. Figure 10 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 4. Figure 11 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 5. Figure 12 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 5. Figure 13 is a schematic explanatory diagram (part 1) showing the structure of the ozone generator according to Embodiment 6. Figure 14 is a schematic explanatory diagram (part 2) showing the structure of the ozone generator according to Embodiment 6. Figure 15 is a schematic explanatory diagram (part 3) showing the structure of the ozone generator according to Embodiment 6. Figure 16 is a schematic explanatory diagram (part 1) showing the structure of a conventional ozone generator. Figure 17 is a schematic explanatory diagram (part 2) showing the structure of a conventional ozone generator.

[0037] <Embodiment 1> Figures 1 and 2 are schematic explanatory diagrams showing the structure of an ozone generator 51 which is Embodiment 1 of the present disclosure. Figures 1 and 2 each show an XYZ Cartesian coordinate system. The ozone generator 51 of Embodiment 1 is an ozone generator according to the first aspect of the present disclosure.

[0038] As shown in Figures 1 and 2, the ozone generator 51 comprises an ozone generator 5 that generates ozone gas, a control and measurement device 2 that performs control and measurement processing on the ozone generator 5 and the inverter 4, an inverter 4 that supplies AC power to the ozone generator 5, and a device housing 1 that houses the ozone generator 5, the inverter 4, and the control and measurement device 2 in a housing space S1.

[0039] Specific components of the control and measurement device 2 could include, for example, an MFC (Mass Flow Controller), an ozone concentration meter, an APC (Automatic Pressure Controller), and an ozone control unit.

[0040] The MFC controls the flow rate of the raw material gas input to the ozone generator 5. The ozone concentration meter measures the ozone concentration of the ozone gas output by the ozone generator 5 and obtains the measured ozone concentration value. The APC automatically controls the internal pressure, which is the pressure inside the ozone generator 5. The ozone control unit performs PID control of the AC power supplied by the inverter 4 based on a comparison between the measured ozone concentration value measured by the ozone concentration meter and the set ozone concentration. In other words, the ozone control unit controls the AC power of the inverter 4 so that the measured ozone concentration value becomes the set ozone concentration. These components are disclosed, for example, in Patent Document 1.

[0041] The control and measurement device 2 includes the above-mentioned components and, as a control and measurement process, includes an ozone concentration measurement process that measures the ozone concentration (measured ozone concentration value), which is the concentration of ozone gas generated by the ozone generator 5, and an inverter control process that controls the AC power of the inverter 4 so that the ozone concentration reaches the set ozone concentration.

[0042] As mentioned above, the control and measurement process further includes the internal pressure control process of the ozone generator 5 and the raw material gas flow rate control process.

[0043] In this specification, "inverter" is used as a general term for ozone power supplies that supply AC power to the ozone generator 5. For example, the ozone power supply (2) disclosed in Figure 4 of Patent Document 1 is an example of inverter 4.

[0044] Note that the control and measurement device 2, the inverter 4, and the ozone generator 5 are each components realized by existing technologies.

[0045] Note that in the accommodation space S1, the illustration of the internal power line for supplying AC power from the inverter 4 to the ozone generator 5 and the internal signal lines for signal transmission and reception among the control and measurement device 2, the inverter 4, and the ozone generator 5 is omitted.

[0046] The device housing 1 has, for example, a quadrangular prism structure, has an accommodation space S1 inside, and has an exhaust port 6 provided on the upper surface F1 on the +Z direction side which is the exhaust surface. The exhaust port 6 has, for example, a cylindrical shape.

[0047] As shown in FIG. 2, the device housing 1 has an intake port 7 provided below the side surface F3 on the +Y direction side. The intake port 7 has, for example, a cylindrical shape. The side surface F3 serves as the intake surface. The intake port 7 is provided at a position closer to the ozone generator 5 than the control and measurement device 2 and the inverter 4.

[0048] The intake port 7 provided on the side surface F3 which is the intake surface has an intake function of taking air from the outside of the device housing 1 into the accommodation space S1, and the exhaust port 6 provided on the upper surface F1 which is the exhaust surface has an exhaust function of guiding air from the accommodation space S1 to the outside of the device housing 1. Note that the above-described intake function by the intake port 7 can be realized by existing technologies, and the above-described exhaust function by the exhaust port 6 can be realized by existing technologies using, for example, negative pressure.

[0049] Inside the accommodation space S1 of the device housing 1, along the height direction (+Z direction), the ozone generator 5, the control and measurement device 2, and the inverter 4 are arranged in this order. Therefore, the proximity to the upper surface F1 which is the exhaust surface is in the order of the inverter 4, the control and measurement device 2, and the ozone generator 5. That is, among the inverter 4, the control and measurement device 2, and the ozone generator 5 accommodated in the accommodation space S1, the inverter 4 is arranged at the position closest to the upper surface F1.

[0050] The ozone generator 51 of Embodiment 1, with this configuration, can perform an air-cooled cooling operation of the containment space by supplying cooling air from outside the device housing 1 into the containment space S1 via the intake port 7 and exhausting the cooling air from the containment space S1 via the exhaust port 6.

[0051] Therefore, in the above-described cooling operation of the containment space, the ozone generator 51 of Embodiment 1 employs an exhaust method in which the heated gas generated from the inverter 4 is exhausted to the outside through the exhaust port 6, and the heated gas from the ozone generator 5 and the control / measuring equipment 2 is exhausted within the containment space S1.

[0052] This is because the inverter 4 is located between the control / measurement device 2 and the upper surface F1, and the inverter 4 and the control / measurement device 2 are located between the ozone generator 5 and the upper surface F1. Therefore, most of the heated gas exhausted from the control / measurement device 2 and the ozone generator 5 remains within the containment space S1.

[0053] In this specification, the heated gas generated from the inverter 4 refers to the heated gas that is exhausted to the outside of the inverter 4 from a fan (not shown) provided on the inverter 4.

[0054] Since the ozone generator 5 is generally equipped with a water-cooling function, 70-90% of the waste heat can be cooled by the ozone generator 5 itself. On the other hand, the exhaust of the heated gas from the inverter 4 can be almost 100% done through the exhaust port 6 located close to the inverter 4 by the aforementioned containment space cooling operation.

[0055] As mentioned above, the amount of heat discharged by the inverter 4 was generally 5-15% of the total heat discharged by the ozone generator 51. For example, if we assume that the amount of heat discharged by the ozone generator 5 is C5 and the amount of heat discharged by the inverter 4 is C4, with {C5:C4 = 7:1}, and that the amount of heat discharged by the control and measuring equipment 2 C2 is negligible because {C2 << C4 < C5}, then the amount of heat discharged by the inverter 4 C4 is approximately 12.5% ​​(1 / 8) of the total.

[0056] In the above-mentioned relationship between the heat dissipation amounts C2 from the control and measurement device 2, C4 from the inverter 4, and C5 from the ozone generator 5, we assume that 80% of the heat dissipation amount C5 can be cooled by the cooling function of the ozone generator 5 itself, and that the reduction rate of the heat dissipation amount C4 by the inverter 4 itself is "0". On the other hand, the ozone generator 51 can cool almost 100% of the heat dissipation amount C4 of the inverter 4 by the above-mentioned containment space cooling operation.

[0057] Therefore, the ozone generator 51 of Embodiment 1 can reduce the amount of residual exhaust heat {(1 / 5)・C5} that is not exhausted by the above-described containment space cooling operation to 17.5% of the total exhaust heat amount of the device {(8 / 7)・C5}.

[0058] As a result, the temperature rise in the containment space S1 of the ozone generator 51 in Embodiment 1 is significantly suppressed compared to the temperature rise in the containment space S61 of the conventional ozone generator 60.

[0059] As described above, the ozone generator 51 of Embodiment 1, which is a first aspect of the present disclosure, can perform an air-cooled cooling operation of the containment space by supplying cooling air from outside the device housing 1 into the containment space S1 via the intake port 7 and exhausting the cooling air from the containment space S1 via the exhaust port 6.

[0060] In the ozone generator 51 of Embodiment 1, the inverter 4 is positioned closer to the upper surface F1, which is the exhaust surface, than the ozone generator 5 and the control / measuring equipment 2. Therefore, due to the above-described cooling operation of the containment space, most of the heated and expanded hot gas discharged from the inverter 4 is exhausted to the outside from the containment space S1 through the exhaust port 6 provided on the upper surface F1.

[0061] As a result, the ozone generator 51 of the first embodiment can effectively suppress the overall temperature rise of the ozone generator 51 by preferentially releasing the heated gas discharged from the inverter 4 to the outside of the device housing 1.

[0062] Therefore, the ozone generator 51 of Embodiment 1 can significantly reduce the possibility of malfunctions in non-inverter equipment, including the control and measurement equipment 2 and the ozone generator 5, due to temperature rise in the containment space S1. In addition, since the amount of exhaust gas required to cool the non-inverter equipment can be reduced, the power consumption of the ozone generator 51 can be reduced.

[0063] In addition, the ozone generator 5 may be configured by a combination of multiple partial ozone generators, and the inverter 4 may be configured by a combination of multiple partial inverters corresponding to the multiple partial ozone generators. In this case, the ozone generator 51 of Embodiment 1 can reliably avoid the possibility of failure due to heating caused by the exhaust heat between the multiple partial inverters.

[0064] <Embodiment 2> Figures 3 and 4 are schematic explanatory diagrams showing the structure of an ozone generator 52 according to Embodiment 2 of the present disclosure. Figures 3 and 4 each show an XYZ Cartesian coordinate system. The ozone generator 52 of Embodiment 2 is included in the second aspect of the present disclosure.

[0065] In the following description, components similar to those in the ozone generator 51 of Embodiment 1 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The description will focus on the distinctive features of the ozone generator 52 of Embodiment 2.

[0066] As shown in Figures 3 and 4, the ozone generator 52, like the ozone generator 51, comprises an ozone generator 5, control and measurement equipment 2, an inverter 4, and a device housing 1 that houses the ozone generator 5, inverter 4, and control and measurement equipment 2 within a housing space S1.

[0067] The device housing 1 has, for example, a rectangular prism structure and is provided with an exhaust port 6 on its upper surface F1. The exhaust port 6 has an exhaust function that guides air from the housing space S1 to the outside of the device housing 1.

[0068] Within the housing space S1 of the device enclosure 1, the ozone generator 5, inverter 4, and control / measuring equipment 2 are arranged in the order of height (+Z direction). Therefore, the order of proximity from the top surface F1 is control / measuring equipment 2, inverter 4, and ozone generator 5.

[0069] Furthermore, as shown in Figure 4, an air intake port 7 is provided below the side surface F3 on the +Y direction side. The air intake port 7 has an intake function that draws air from outside the device housing 1 into the housing space S1. The air intake port 7 is located closer to the ozone generator 5 compared to the control and measurement equipment 2 and the inverter 4.

[0070] The ozone generator 52 of the second embodiment supplies cooling air into the containment space S1 from outside the device housing 1 via the intake port 7, and exhausts the cooling air from the containment space S1 via the exhaust port 6, thereby performing an air-cooled cooling operation of the containment space.

[0071] As shown in Figure 4, in the accommodation space S1, the ozone generator 5 and control / measurement equipment 2 are not present in the inverter exhaust space S19 between the side surface F3, which is the inverter exhaust surface, and the inverter 4.

[0072] In addition, as shown in Figure 4, an inverter exhaust port 9, dedicated to the inverter 4, is provided above the intake port 7 on the side surface F3, which serves as the inverter exhaust surface.

[0073] The inverter 4 has a fan installation area 4a on its side facing the +Y direction. An exhaust fan (not shown) for exhausting gas generated inside the inverter 4 is provided in the fan installation area 4a. The fan installation area 4a is provided, for example, in a rectangular shape.

[0074] The inverter exhaust duct 8 has a shape, for example, that is a rectangular prism, in order to match the fan installation area 4a, and the inverter exhaust port 9 also has a shape, for example, that is a rectangular prism.

[0075] Therefore, the heat generated inside the inverter 4 is concentrated and blown out from the fan installation area 4a (where the fan is located). The fan installation area 4a is located at approximately the same height (+Z direction) as the inverter exhaust port 9, so as to face it in the Y direction.

[0076] Furthermore, as shown in Figure 4, in the inverter exhaust space S19 included in the housing space S1, an inverter exhaust duct 8 is provided between the fan installation area 4a of the inverter 4 and the side surface F3 which is the inverter exhaust surface. It is desirable that the inverter exhaust duct 8 be provided without any gap between the fan installation area 4a and the inverter exhaust port 9.

[0077] The inverter exhaust port 9 has an exhaust function that receives the heated gas blown out from the fan installation area 4a of the inverter 4 via the inverter exhaust duct 8 and guides the heated gas to the outside of the device housing 1.

[0078] An inverter 4 having a fan in the fan installation area 4a can be realized using existing technology, and the exhaust function described above by the inverter exhaust port 9 can be realized, for example, using existing technology that utilizes negative pressure.

[0079] Therefore, the ozone generator 52 of the second embodiment can perform an inverter cooling operation in which heated gas blown out from the fan installation area 4a of the inverter 4 is exhausted to the outside of the device housing 1 via the inverter exhaust duct 8 and the inverter exhaust port 9. The inverter cooling operation can be performed in parallel with the housing space cooling operation described above.

[0080] In this configuration, the ozone generator 52 of the second embodiment has an exhaust method in which the first exhaust treatment from the exhaust port 6 due to the containment space cooling operation described above, the second exhaust treatment from the inverter exhaust port 9 due to the inverter cooling operation described above, and the exhaust of the heated gas from the ozone generator 5 is carried out within the containment space S1.

[0081] The first exhaust treatment is the process of exhausting heated gas mainly generated from the control and measuring equipment 2 through the exhaust port 6. The second exhaust treatment is the process of exhausting heated gas generated from the inverter 4 through the inverter exhaust duct 8 and the inverter exhaust port 9.

[0082] The ozone generator 52 of the second embodiment can perform an inverter cooling operation, which exhausts the heated gas discharged from the fan installation area 4a of the inverter 4 to the outside of the device housing 1 via the inverter exhaust duct 8 and the inverter exhaust port 9.

[0083] Therefore, the heated and expanded hot gas discharged from the fan installation area 4a of the inverter 4 is directly exhausted to the outside of the device housing 1 via the inverter exhaust duct 8 and the inverter exhaust port 9.

[0084] In addition, since the heating gas propagates within the containment space S1 via the inverter exhaust duct 8, the aforementioned heating gas does not diffuse outside the inverter exhaust duct 8 in the inverter exhaust space S19.

[0085] As a result, the ozone generator 52 of the second embodiment can effectively suppress the overall temperature rise of the ozone generator 52 by directly releasing the heated gas discharged from the inverter 4 to the outside of the device housing 1 without diffusing heat into the containment space S1 (including the inverter exhaust space S19) outside the inverter exhaust duct 8.

[0086] In the ozone generator 52 of the second embodiment, the ozone generator 5 and the control / measurement equipment 2 are not located in the inverter exhaust space S19 between the side surface F3, which is the inverter exhaust surface, and the inverter 4. Therefore, the volume required to form the inverter exhaust duct 8 can be kept to the absolute minimum. This is because, when installing the inverter exhaust duct 8, there is no need to bypass the ozone generator 5 and the control / measurement equipment 2.

[0087] As a result, the ozone generator 52 of the second embodiment can minimize the increase in volume of the housing space S1 that occurs when installing the exhaust duct 8 for the inverter.

[0088] <Embodiment 3> Figures 5 and 6 are schematic explanatory diagrams showing the structure of an ozone generator 53 which is Embodiment 3 of the present disclosure. Figures 5 and 6 each show an XYZ Cartesian coordinate system. The ozone generator 53 of Embodiment 3 is included in the third aspect of the present disclosure.

[0089] Hereinafter, components similar to those in the ozone generator 51 of Embodiment 1 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The description will focus on the distinctive features of the ozone generator 53 of Embodiment 3.

[0090] As shown in Figures 5 and 6, the ozone generator 53, like the ozone generators 51 and 52, is equipped with a control and measurement device 2, an ozone generator 5, and an inverter 4.

[0091] The ozone generator 53 comprises an inverter 4 and a device housing 1 that houses the ozone generator 5, the inverter 4, and the control and measuring equipment 2 within a housing space S1. However, as will be described later, the housing space S1 is divided into a partial housing space S11 and a partial housing space S12.

[0092] The device housing 1 has, for example, a rectangular prism structure and is provided with an exhaust port 6 on its upper surface F1. The exhaust port 6 has an exhaust function that guides air from the housing space S1 to the outside of the device housing 1.

[0093] The device housing 1 has a housing space S1 inside which a partial housing space S11 and a partial housing space S12 are located. That is, as shown in Figures 5 and 6, the ozone generator 53 of Embodiment 3 is provided in the housing space S1 and includes a partition plate 11 that separates the housing space S1 into a partial housing space S11 which is a first partial housing space and a partial housing space S12 which is a second partial housing space.

[0094] The partition plate 11 should have poor thermal conductivity to enhance heat insulation and preferably have the property of being able to gas-separate the partial containment space S11 and the partial containment space S12. In other words, it is desirable that the partition plate 11 be able to separate the partial containment spaces S11 and S12 and that the separation strength be high. For this reason, it is not essential that the partition plate 11 be constructed with a relatively thin film thickness. When the constituent material of the partition plate 11 is metal, a structure with internal cavities is desirable because the internal cavities can reduce the thermal conductivity. Engineering plastics and the like can also be considered as other constituent materials for the partition plate 11.

[0095] Figures 7 and 8 are schematic diagrams illustrating the structure of a metal partition plate 11A, which is a specific example of a partition plate 11. The XYZ Cartesian coordinate system is shown in both Figures 7 and 8.

[0096] As shown in these figures, the metal partition plate 11A has a predetermined thickness Δ11 and exhibits a metal housing structure with a cavity C11 inside. Therefore, in the ozone generator 53 of Embodiment 3, the upper space on the +Z direction side of the upper surface F11 of the metal partition plate 11A becomes the partial housing space S11, and the lower space on the -Z direction side of the lower surface F12 of the metal partition plate 11A becomes the partial housing space S12.

[0097] Since the metal partition plate 11A has a closed cavity C11 inside, the thermal conductivity of the metal partition plate 11A itself can be reduced, thereby improving its heat insulation properties. Therefore, the ozone generator 53 of Embodiment 3 can separate the partial containment space S11 and the partial containment space S12 with high strength and in a heat-insulated state by providing the metal partition plate 11A in the containment space S1.

[0098] Thus, in the ozone generator 53 of Embodiment 3, the containment space S1 includes a partial containment space S11 and a partial containment space S12 that are separated from each other, and the space between the partial containment space S11 and the partial containment space S12 is insulated by a partition plate 11.

[0099] Then, the control and measuring equipment 2 and the ozone generator 5 are housed in the first partial housing space S11, and the inverter 4 is housed in the second partial housing space S12.

[0100] Within the partial housing space S11 of the device housing 1, the ozone generator 5 and the control / measuring equipment 2 are arranged in that order along the height direction (+Z direction). Therefore, the distance from the top surface F1 is closest to the control / measuring equipment 2 and then to the ozone generator 5.

[0101] Furthermore, as shown in Figure 6, an air intake port 7 is provided in the center of the side surface F3 on the +Y direction side. The air intake port 7 has an intake function that draws air from outside the device housing 1 into the partial containment space S11 included in the containment space S1. The air intake port 7 is located closer to the ozone generator 5 compared to the control and measurement equipment 2.

[0102] Therefore, the ozone generator 53 of the third embodiment can perform a first partial containment space cooling operation by air cooling, supplying cooling air from outside the device housing 1 to the partial containment space S11 via the intake port 7 and exhausting the cooling air from the partial containment space S11 via the exhaust port 6.

[0103] As shown in Figure 6, the control and measurement equipment 2 and the ozone generator 5 are housed in the partial housing space S11. Therefore, in the partial housing space S12, the ozone generator 5 and the control and measurement equipment 2 are not located between the side surface F3, which is both the inverter exhaust surface and the inverter intake surface, and the inverter 4.

[0104] In addition, as shown in Figure 6, on the side surface F3, which serves as both the inverter exhaust and inverter intake surface, an inverter intake / exhaust port 10 dedicated to the inverter 4 is provided below the intake port 7 and the partition plate 11. The inverter intake / exhaust port 10 is, for example, cylindrical in shape.

[0105] The inverter intake / exhaust port 10 has an exhaust function that guides air from the inverter 4 from the partial housing space S12 to the outside of the device housing 1, and an intake function that draws air from the outside of the device housing 1 into the partial housing space S12. In other words, one inverter intake / exhaust port 10 functions as both an inverter exhaust port and an inverter intake port. The exhaust and intake functions of the inverter intake / exhaust port 10 described above can be realized by existing technology.

[0106] The inverter 4 is positioned at approximately the same height as the inverter intake / exhaust port 10 (position in the +Z direction) so as to face the inverter intake / exhaust port 10 in the Y direction.

[0107] Therefore, the ozone generator 53 of Embodiment 3 can perform a second partial containment space cooling operation by air cooling, which involves supplying cooling air from outside the device housing 1 to the partial containment space S12 via the inverter intake / exhaust port 10 and exhausting the cooling air from the partial containment space S12 via the inverter intake / exhaust port 10. The second partial containment space cooling operation can be performed in parallel with the first partial containment space cooling operation described above.

[0108] In this configuration, the ozone generator 53 of Embodiment 3 has an exhaust method in which the first exhaust process from the exhaust port 6 associated with the first partial containment space cooling operation described above, the second exhaust process from the inverter intake / exhaust port 10 associated with the second partial containment space cooling operation described above, and the exhaust of the heated gas from the ozone generator 5 is carried out within the partial containment space S11.

[0109] The first exhaust treatment is the process of exhausting heated gas, mainly generated from the control and measuring equipment 2, to the outside of the device housing 1 via the exhaust port 6. The second exhaust treatment is the process of exhausting heated gas, generated from the inverter 4, to the outside of the device housing 1 via the inverter intake and exhaust port 10.

[0110] Furthermore, by providing a connector (not shown) for internal power lines on the partition plate 11, the AC current from the inverter 4 to the ozone generator 5 can be supplied without hindrance via the internal power lines (not shown) in the partial housing space S12, the connector for internal power lines provided on the partition plate 11, and the internal power lines (not shown) in the partial housing space S11.

[0111] Similarly, by providing a connector (not shown) for internal signal lines on the partition plate 11, signal exchange between the inverter 4 and the control / measuring equipment 2 and the inverter 4 can be performed without hindrance via the internal signal lines (not shown) in the partial housing space S12, the connector for internal signal lines provided on the partition plate 11, and the internal signal lines (not shown) in the partial housing space S11.

[0112] The ozone generator 53 of Embodiment 3, which is a third aspect of the present disclosure, can perform a second partial containment space cooling operation by air cooling, which involves supplying cooling air from outside the device housing 1 into the partial containment space S12 via the inverter intake / exhaust port 10 and exhausting the cooling air from the partial containment space S12 via the inverter intake / exhaust port 10.

[0113] Therefore, as a result of the second partial containment space cooling operation described above, the heated and expanded hot gas discharged from the inverter 4 propagates through the partial containment space S12 and is exhausted from the inverter intake / exhaust port 10. At this time, since the partial containment space S11 is insulated from the partial containment space S12 by the partition plate 11, the temperature rise in the partial containment space S11 is suppressed.

[0114] As a result, the ozone generator 53 of the third embodiment can effectively suppress the overall temperature rise of the ozone generator 53 by preferentially releasing the heated gas discharged from the inverter 4 to the outside of the device housing 1.

[0115] In addition, the ozone generator 53 of the third embodiment can relatively easily separate the partial containment space S11, which is the first partial containment space, and the partial containment space S12, which is the second partial containment space, by partition plates 11 provided in the containment space S1.

[0116] Furthermore, since the ozone generator 53 of the third embodiment is equipped with one inverter intake / exhaust port 10 having intake and exhaust functions, the number of components necessary to enable the second partial containment space cooling operation described above can be reduced to the minimum necessary one unit.

[0117] <Embodiment 4> Figures 9 and 10 are schematic explanatory diagrams showing the structure of an ozone generator 54 which is Embodiment 4 of the present disclosure. Figures 9 and 10 each show an XYZ Cartesian coordinate system. The ozone generator 54 of Embodiment 4 is included in the third aspect of the present disclosure.

[0118] Hereinafter, components similar to those in the ozone generator 51 of Embodiment 1 or the ozone generator 53 of Embodiment 3 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The description will focus on the distinctive features of the ozone generator 54 of Embodiment 4.

[0119] As shown in Figures 9 and 10, the ozone generator 54, like the ozone generators 51 and 52, comprises an ozone generator 5, control and measurement equipment 2, an inverter 4, and a device housing 1 that houses the ozone generator 5, inverter 4, and control and measurement equipment 2 within a housing space S1.

[0120] However, in the ozone generator 54 of Embodiment 4, similar to the ozone generator 53 of Embodiment 3, the housing space S1 includes a partial housing space S11 and a partial housing space S12 that are separated from each other, and the space between the partial housing space S11 and the partial housing space S12 is insulated by a partition plate 11. The ozone generator 5 and the control and measuring equipment 2 are housed in the partial housing space S11, and the inverter 4 is housed in the partial housing space S12.

[0121] As shown in Figure 10, since the control and measuring equipment 2 and the ozone generator 5 are housed in the partial housing space S11, the ozone generator 5 and the control and measuring equipment 2 are not located between the side surface F3, which is the inverter exhaust surface, and the inverter 4 in the partial housing space S12.

[0122] As shown in Figure 10, on the side surface F3 which serves as the inverter exhaust surface, an inverter exhaust port 13 dedicated to the inverter 4 is provided below the intake port 7.

[0123] The inverter exhaust port 13 has an exhaust function that guides air from the inverter 4 from the partial housing space S12 to the outside of the device housing 1. The exhaust function of the inverter exhaust port 13 described above can be realized, for example, by existing technology that utilizes negative pressure.

[0124] Furthermore, as shown in Figure 10, on the side surface F4 in the +X direction, which is the inverter intake surface, an inverter intake port 12 is provided at approximately the same height as the inverter 4 (position in the +Z direction), facing the inverter 4 in the X direction. Therefore, the inverter intake port 12 provided on the side surface F4, which is the inverter intake surface, is independent of the inverter exhaust port 13 provided on the side surface F3, which is the inverter exhaust surface.

[0125] The inverter air intake port 12 is, for example, cylindrical in shape and has an air intake function that draws air from outside the device housing 1 into the partial housing space S12. The above-mentioned air intake function by the inverter air intake port 12 can be realized by existing technology.

[0126] The ozone generator 54 of Embodiment 4, like the ozone generator 53 of Embodiment 3, can perform a first partial containment space cooling operation by air cooling, supplying cooling air from outside the device housing 1 to the partial containment space S11 via the intake port 7 and exhausting the cooling air from the partial containment space S11 via the exhaust port 6.

[0127] Furthermore, the ozone generator 54 of the fourth embodiment can perform a second partial containment space cooling operation by air cooling, which involves supplying cooling air from outside the device housing 1 into the partial containment space S12 via the inverter intake port 12 and exhausting the cooling air from the partial containment space S12 via the inverter exhaust port 13. The second partial containment space cooling operation can be performed in parallel with the first partial containment space cooling operation described above.

[0128] In this configuration, the ozone generator 54 of Embodiment 4 has an exhaust method in which the first exhaust process from the exhaust port 6 associated with the first partial containment space cooling operation described above, the second exhaust process from the inverter exhaust port 13 associated with the second partial containment space cooling operation described above, and the exhaust of the heated gas from the ozone generator 5 is carried out within the partial containment space S11.

[0129] The first exhaust treatment is the process of exhausting heated gas, mainly generated from the control and measuring equipment 2, to the outside of the device housing 1 via the exhaust port 6. The second exhaust treatment is the process of exhausting heated gas, generated from the inverter 4, to the outside of the device housing 1 via the inverter exhaust port 13.

[0130] The ozone generator 54 of Embodiment 4 can perform a second partial containment space cooling operation by air cooling, which involves supplying cooling air from outside the device housing 1 into the partial containment space S12 via the inverter intake port 12 and exhausting the cooling air from the partial containment space S12 via the inverter exhaust port 13.

[0131] As a result, the ozone generator 54 of Embodiment 4 can effectively suppress the overall temperature rise of the ozone generator 54, similar to the ozone generator 53 of Embodiment 3.

[0132] In addition, the ozone generator 54 of Embodiment 4, like the ozone generator 53 of Embodiment 3, can relatively easily separate the partial containment space S11 and the partial containment space S12 by a partition plate 11 provided in the containment space S1.

[0133] Furthermore, the ozone generator 54 of Embodiment 4 separately performs an intake process that takes in gas from the outside into the partial containment space S12 via the inverter intake port 12, and an exhaust process that discharges the heated gas, which is heated and expanded from the inverter 4 in the partial containment space S12, to the outside via the inverter exhaust port 13.

[0134] Therefore, the flow of cooling air within the partial containment space S12 is unidirectional, from the inverter intake port 12 to the inverter exhaust port 13. Consequently, the second partial containment space cooling operation by the ozone generator 54 in Embodiment 4 can enhance the cooling effect compared to the second partial containment space cooling operation by the ozone generator 53 in Embodiment 3.

[0135] <Embodiment 5> Figures 11 and 12 are schematic explanatory diagrams showing the structure of an ozone generator 55 according to Embodiment 5 of the present disclosure. Figures 11 and 12 each show an XYZ Cartesian coordinate system. The ozone generator 55 of Embodiment 5 is included in the second aspect of the present disclosure.

[0136] Hereinafter, components similar to those in the ozone generator 51 of Embodiment 1 or the ozone generator 52 of Embodiment 2 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The description will focus on the distinctive features of the ozone generator 55 of Embodiment 5.

[0137] As shown in Figures 11 and 12, the ozone generator 55, like the ozone generators 51 and 52, comprises an ozone generator 5, control and measurement equipment 2, an inverter 4, and a device housing 1 that houses the ozone generator 5, inverter 4, and control and measurement equipment 2 in a housing space S1.

[0138] The device housing 1 has, for example, a rectangular prism structure and has an internal storage space S1, and a multi-purpose exhaust port 16 is provided on the upper surface F1 which serves as the inverter exhaust surface. The multi-purpose exhaust port 16 has, for example, a cylindrical shape.

[0139] The dual-purpose exhaust port 16 has a first exhaust function that guides air from the containment space S1 to the outside of the device housing 1. The dual-purpose exhaust port 16 also has a second exhaust function that guides air from the inverter 4 to the outside of the device housing 1 via the inverter exhaust duct 18, which will be described later. The above-mentioned first and second exhaust functions of the dual-purpose exhaust port 16 can be realized, for example, by existing technology that utilizes negative pressure.

[0140] Within the housing space S1 of the device enclosure 1, the inverter 4, ozone generator 5, and control / measuring equipment 2 are arranged in the order of height (+Z direction). Therefore, the order of proximity from the top surface F1 is control / measuring equipment 2, ozone generator 5, and inverter 4.

[0141] Furthermore, as shown in Figure 12, an air intake port 7 is provided in the center of the side surface F3 on the +Y direction side. The air intake port 7 has an intake function that draws air from outside the device housing 1 into the containment space S1. The air intake port 7 is located closer to the ozone generator 5 compared to the control and measurement equipment 2 and the inverter 4.

[0142] The ozone generator 55 of Embodiment 5 supplies cooling air into the containment space S1 from outside the device housing 1 via the intake port 7 and exhausts the cooling air from the containment space S1 via the combined exhaust port 16, thereby performing an air-cooled containment space cooling operation. The first exhaust function of the combined exhaust port 16 described above is used when the containment space cooling operation is performed.

[0143] The inverter 4 has a fan installation area 4b on its side facing the +Y direction. The fan installation area 4b is provided in a rectangular shape, for example.

[0144] An exhaust fan (not shown) is provided in the fan installation area 4b to exhaust the gas generated inside the inverter 4. Therefore, the heat generated inside the inverter 4 is concentrated and blown out from the fan installation area 4b (the fan provided therein).

[0145] Furthermore, as shown in Figures 11 and 12, a tubular inverter exhaust duct 8 is provided between the fan installation area 4b of the inverter 4 and the shared exhaust port 16 in the accommodation space S1.

[0146] The inverter exhaust duct 18 is positioned such that one opening on the -Z direction side covers the fan installation area 4b when viewed from above in the XZ plane, and the other opening is provided in a rectangular shape, for example, to match the fan installation area 4b.

[0147] The inverter exhaust duct 18 is formed to extend in the +Z direction from one opening, straddling the ozone generator 5 and the control / measurement equipment 2, and the other opening on the +Z side is positioned so as to be covered by the combined exhaust port 16 when viewed from above in the XY plane. It is desirable that there be no gap between the fan installation area 4b and the combined exhaust port 16 of the inverter exhaust duct 18.

[0148] Thus, in the ozone generator 55 of Embodiment 5, the ozone generator 5 and the control and measurement equipment 2 are located between the upper surface F1, which is the inverter exhaust surface, and the inverter 4 in the containment space S1.

[0149] Hereinafter, at least one of the control / measurement equipment 2 and the ozone generator 5 may be referred to as "non-inverter equipment." That is, in the ozone generator 55 of Embodiment 5, non-inverter equipment is located between the upper surface F1 and the inverter 4 in the containment space S1.

[0150] Furthermore, the inverter exhaust duct 18 of the ozone generator 55 is installed in the containment space S1, straddling the control / measurement equipment 2 and the ozone generator 5, without coming into contact with either the control / measurement equipment 2 or the ozone generator 5. In other words, the inverter exhaust duct 18 is installed in the containment space S1, straddling the non-inverter equipment, without coming into contact with the non-inverter equipment.

[0151] Therefore, in addition to the above-described containment space cooling operation, the ozone generator 55 of Embodiment 5 can perform an inverter cooling operation in which heated gas blown out from the fan installation area 4b of the inverter 4 is exhausted to the outside of the device housing 1 via the inverter exhaust duct 8 and the combined exhaust port 16. The above-described second exhaust function of the combined exhaust port 16 is utilized when the inverter cooling operation is performed. The inverter cooling operation can be performed in parallel with the above-described containment space cooling operation.

[0152] Furthermore, the combined exhaust port 16 is divided into an area for the accommodation space cooling operation and an area for the inverter cooling operation, so that both the aforementioned accommodation space cooling operation and inverter cooling operation can be performed.

[0153] In this configuration, the ozone generator 55 of Embodiment 5 has an exhaust method in which the first exhaust treatment from the shared exhaust port 16 associated with the above-mentioned cooling operation of the containment space, the second exhaust treatment from the shared exhaust port 16 associated with the above-mentioned cooling operation of the inverter, and the exhaust of the heated gas from the ozone generator 5 are carried out within the containment space S1.

[0154] The first exhaust treatment is the process of exhausting heated gas mainly generated from the control and measuring equipment 2 to the outside of the device housing 1 via the combined exhaust port 16. The second exhaust treatment is the process of exhausting heated gas from the inverter 4 blown out from the fan installation area 4b to the outside of the device housing 1 via the inverter exhaust duct 18 and the combined exhaust port 16.

[0155] The ozone generator 55 of Embodiment 5 can perform an inverter cooling operation in which heated gas discharged from the fan installation area 4b of the inverter 4 is exhausted to the outside of the device housing 1 via the inverter exhaust duct 18 and the combined exhaust port 16.

[0156] Therefore, the heated and expanded hot gas discharged from the inverter 4 is directly exhausted to the outside of the device housing 1 from the fan installation area 4b of the inverter 4 via the inverter exhaust duct 18 and the combined exhaust port 16.

[0157] Since the heating gas propagates within the containment space S1 via the inverter exhaust duct 18, the aforementioned heating gas does not diffuse outside the inverter exhaust duct 18 within the containment space S1.

[0158] As a result, the ozone generator 55 of Embodiment 5 can effectively suppress the overall temperature rise of the ozone generator 55 by directly releasing the heated gas discharged from the inverter 4 to the outside of the device housing 1 without diffusing heat into the containment space S1 outside the inverter exhaust duct 18.

[0159] In addition, the inverter in the ozone generator 55 of Embodiment 5 can effectively suppress the temperature rise of the entire ozone generator 55 even when non-inverter equipment (control / measuring equipment 2 + ozone generator 5) is located between the upper surface F1, which serves as the inverter exhaust surface, and the inverter 4.

[0160] <Embodiment 6> Figures 13, 14, and 15 are schematic explanatory diagrams showing the structure of an ozone generator 56 which is Embodiment 6 of the present disclosure. Figures 13 to 15 each show an XYZ Cartesian coordinate system. The ozone generator 56 of Embodiment 6 is included in the third aspect of the present disclosure.

[0161] Hereinafter, components similar to those in the ozone generator 51 of Embodiment 1 or the ozone generator 53 of Embodiment 3 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The description will focus on the distinctive features of the ozone generator 56 of Embodiment 6.

[0162] As shown in Figures 13 to 15, the ozone generator 56, like the ozone generators 51 and 52, is equipped with an ozone generator 5, control and measurement equipment 2, and an inverter 4.

[0163] In the ozone generator 56, the device housing has a combined structure consisting of a first device housing 1A, which is an independent device housing, and a second device housing 1B, which is an independent device housing.

[0164] Then, the partial housing space S1A of the device housing 1A becomes the first partial housing space, and the partial housing space S1B of the device housing 1B becomes the second partial housing space.

[0165] The ozone generator 5 and control / measurement equipment 2 are housed in the first partial housing space, partial housing space S1A, and the inverter 4 is housed in the second partial housing space, partial housing space S1B.

[0166] An external power line L1 and an external signal line L2 are provided between the device housing 1A and the device housing 1B.

[0167] AC power can be supplied from the inverter 4 to the ozone generator 5 via the external power line L1. In other words, AC power can be supplied from the inverter 4 to the ozone generator 5 without any problems via the internal power line (not shown) in the partial housing space S1B, the external power line L1, and the internal power line (not shown) in the partial housing space S1A.

[0168] Similarly, signals can be exchanged between the inverter 4 and the ozone generator 5 and the control / measurement equipment 2 via the external signal line L2. In other words, signals can be exchanged between the inverter 4 and the control / measurement equipment 2 and the inverter 4 without any problems via the internal signal line (not shown) in the partial housing space S1B, the external signal line L2, and the internal signal line (not shown) in the partial housing space S1A.

[0169] Note that the illustration of the internal signal lines and internal power lines provided within the partial housing space S1A or S1B is omitted. The internal power lines are used to supply AC power from the inverter 4 to the ozone generator 5, and the internal signal lines are used to exchange signals between the control / measuring equipment 2, the inverter 4, and the ozone generator 5.

[0170] As shown in Figures 13 and 14, the device portion housing 1A has, for example, a rectangular prism structure and has a partial housing space S1A inside, and an exhaust port 6A is provided on the upper surface F1A of the device portion housing 1A. The exhaust port 6A is, for example, cylindrical.

[0171] The exhaust port 6A has an exhaust function that guides air from the partial housing space S1A to the outside of the device partial housing 1A. The exhaust function of the exhaust port 6A described above can be realized, for example, by existing technology that utilizes negative pressure.

[0172] As shown in Figure 14, an air intake port 7A is provided below the side surface F3A on the +Y direction side. The air intake port 7A is, for example, cylindrical in shape.

[0173] The air intake port 7A has an intake function that draws air from outside the device housing 1A into the partial containment space S1A. The air intake port 7A is located closer to the ozone generator 5 compared to the control and measurement equipment 2. The above-mentioned intake function of the air intake port 7A can be realized using existing technology.

[0174] As shown in Figures 13 and 15, the device partial housing 1B has, for example, a rectangular prism structure and has a partial housing space S1B inside, and an inverter exhaust port 6B is provided on the upper surface F1B of the device partial housing 1B which is the inverter exhaust surface. The inverter exhaust port 6B has, for example, a cylindrical shape.

[0175] The inverter exhaust port 6B has an exhaust function that guides air from the partial housing space S1B to the outside of the device partial housing 1B. The exhaust function of the inverter exhaust port 6B can be realized, for example, by existing technology that utilizes negative pressure.

[0176] As shown in Figure 15, an inverter air intake port 7B is provided below the side surface F3B on the +Y direction side. The inverter air intake port 7B is, for example, cylindrical in shape. The side surface F3B of the device housing 1B becomes the inverter air intake surface.

[0177] The inverter intake port 7B, located on the side surface F3B which serves as the inverter intake surface, has an intake function that draws air from outside the device housing 1B into the partial housing space S1B. The inverter intake port 7B is positioned at approximately the same height as the inverter 4 (at a position in the +Z direction) so as to face the inverter 4 in the Y direction. The above-mentioned intake function of the inverter intake port 7B can be realized using existing technology.

[0178] Within the partial housing space S1A of the device housing 1A, the ozone generator 5 and the control / measuring equipment 2 are arranged in that order along the height direction (+Z direction). Therefore, the order of proximity from the top surface F1A is the control / measuring equipment 2 and then the ozone generator 5.

[0179] As shown in Figures 13 to 15, the ozone generator 56 of Embodiment 6 is configured with a device housing made up of a combination of device partial housings 1A and 1B, thereby completely separating the housing space, which is a combination of partial housing spaces S1A and S1B, into partial housing space S1A and partial housing space S1B.

[0180] The device's partial housings 1A and 1B are provided independently of each other, and there is no thermal influence between the partial housing spaces S1A and S1B. Therefore, the partial housing space S1A, which is the first partial housing space, and the partial housing space S1B, which is the second partial housing space, are insulated from each other.

[0181] Thus, in the ozone generator 56 of Embodiment 6, the containment space includes a partial containment space S1A and a partial containment space S1B that are separated from each other, and the space between the partial containment space S1A and the partial containment space S1B is completely insulated.

[0182] Then, the ozone generator 5 and the control and measuring equipment 2 are housed in the first partial housing space S1A, and the inverter 4 is housed in the second partial housing space S1B.

[0183] As shown in Figures 13 to 15, since the control and measurement equipment 2 and the ozone generator 5 are housed in the partial housing space S1A, the ozone generator 5 and the control and measurement equipment 2 are not located between the upper surface F1B, which is the inverter exhaust surface, and the inverter 4 in the partial housing space S1B.

[0184] In addition, as shown in Figure 15, an inverter exhaust port 6B dedicated to the inverter 4 is provided on the upper surface F1B, which serves as the inverter exhaust surface. Alternatively, the inverter exhaust port 6B may be provided on the bottom surface F2B, which is closer to the inverter 4.

[0185] The ozone generator 56 of embodiment 6, with this configuration, can perform a first partial containment space cooling operation by air cooling, supplying cooling air from outside the device partial housing 1A to the partial containment space S1A via the intake port 7A, and exhausting the cooling air from the partial containment space S1A via the exhaust port 6A.

[0186] In addition, the ozone generator 56 of Embodiment 6 can perform a second partial containment space cooling operation by air cooling, which involves supplying cooling air from outside the device partial housing 1B to the partial containment space S1B via the inverter intake port 7B and exhausting the cooling air from the partial containment space S1B via the inverter exhaust port 6B. The second partial containment space cooling operation can be performed in parallel with the first partial containment space cooling operation described above.

[0187] The ozone generator 56 of Embodiment 6 has an exhaust configuration in which the first exhaust treatment from the exhaust port 6A associated with the first partial containment space cooling operation described above, the second exhaust treatment from the inverter exhaust port 6B associated with the second partial containment space cooling operation described above, and the exhaust of the heated gas from the ozone generator 5 is carried out within the partial containment space S11.

[0188] The first exhaust treatment is the process of exhausting heated gas, mainly generated from the control and measuring equipment 2, to the outside of the device housing 1A via the exhaust port 6A. The second exhaust treatment is the process of exhausting heated gas, generated from the inverter 4, to the outside of the device housing 1B via the inverter exhaust port 6B.

[0189] The ozone generator 56 of Embodiment 6 can perform a second partial housing space cooling operation by air cooling, which involves supplying cooling air from outside the partial housing 1B to the partial housing space S1B via the inverter intake port 7B, and exhausting the cooling air from the partial housing space S1B via the inverter exhaust port 6B.

[0190] Therefore, the heated and expanded hot gas discharged from the inverter 4 by the second partial housing space cooling operation described above propagates through the partial housing space S1B and is exhausted from the inverter exhaust port 6B. At this time, because the partial housing space S1A is insulated from the partial housing space S1B by the installation of the separate device partial housings 1A and 1B, the temperature rise in the partial housing space S1A of the device partial housing 1A is suppressed.

[0191] As a result, the ozone generator 56 of Embodiment 6 can effectively suppress the overall temperature rise of the ozone generator 56 by preferentially releasing the heated gas discharged from the inverter 4 to the outside of the device housing 1B.

[0192] In addition, the ozone generator 56 of Embodiment 6 can relatively easily increase the degree of thermal separation between the partial housing space S1A and the partial housing space S1B by designating the partial housing space S1A within the partial housing 1A as the first partial housing space and the partial housing space S1B within the partial housing 1B as the second partial housing space.

[0193] Although this disclosure has been described in detail, the above description is illustrative in all respects and the disclosure is not limited thereto. It is understood that countless variations not illustrated may be conceivable without falling outside the scope of this disclosure.

[0194] 1. Enclosure for the device 1A, 1B. Partial enclosure for the device 2. Control and measuring equipment 4. Inverter 4a, 4b. Fan installation area 5. Ozone generator 6, 6A. Exhaust port 8, 18. Exhaust duct for inverter 6B, 9, 13, 16. Exhaust port for inverter 7B, 12. Intake port for inverter 10. Intake and exhaust port for inverter 11. Partition plate 11A. Metal partition plate L1. External power line L2. External signal line S1. Accommodation space S11, S12, S1A, S1B. Partial accommodation space

Claims

1. An ozone generating apparatus for generating ozone gas, comprising: an ozone generator for generating ozone gas; control and measurement equipment for performing control and measurement processing; an inverter for supplying AC power to the ozone generator; and a device housing for housing the ozone generator, the inverter, and the control and measurement equipment within a housing space, wherein the control and measurement processing includes an ozone concentration measurement process for measuring the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process for controlling the AC power of the inverter so that the ozone concentration reaches a set ozone concentration; the device housing has an exhaust surface and an intake surface; the ozone generating apparatus comprises: an intake port provided on the intake surface having an intake function for taking in air from outside the device housing into the housing space; and an exhaust port provided on the exhaust surface having an exhaust function for leading air from the housing space to outside the device housing; and the inverter is positioned closer to the exhaust surface than the ozone generator and the control and measurement equipment.

2. An ozone generating apparatus for generating ozone gas, comprising: an ozone generator for generating ozone gas; control and measurement equipment for performing control and measurement processing; an inverter for supplying AC power to the ozone generator; and an apparatus housing for housing the ozone generator, the inverter, and the control and measurement equipment within a housing space, wherein the control and measurement processing includes an ozone concentration measurement process for measuring the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process for controlling the AC power of the inverter so that the ozone concentration reaches a set ozone concentration; the apparatus housing has an inverter exhaust surface; and the ozone generating apparatus further comprises: an inverter exhaust duct provided in the housing space between the fan installation area for exhaust of the inverter and the inverter exhaust surface; and an inverter exhaust port provided on the inverter exhaust surface, which has an exhaust function for guiding the gas discharged from the fan installation area of ​​the inverter to the outside of the apparatus housing via the inverter exhaust duct.

3. An ozone generating apparatus according to claim 2, wherein the ozone generator and the control and measuring equipment are not located in the inverter exhaust space, which is the space between the inverter exhaust surface and the inverter.

4. An ozone generating apparatus according to claim 2, wherein in the containment space, at least one non-inverter device, which is the ozone generator and the control / measuring device, is located between the inverter exhaust surface and the inverter, and the inverter exhaust duct is provided in the containment space, straddling the non-inverter device and without contacting the non-inverter device.

5. An ozone generating apparatus for generating ozone gas, comprising: an ozone generator for generating ozone gas; control and measurement equipment for performing control and measurement processing; an inverter for supplying AC power to the ozone generator; and an apparatus housing for housing the ozone generator, the inverter, and the control and measurement equipment within a housing space, wherein the control and measurement processing includes an ozone concentration measurement process for measuring the ozone concentration, which is the concentration of ozone gas generated by the ozone generator, and an inverter control process for controlling the AC power of the inverter so that the ozone concentration reaches a set ozone concentration, wherein the housing space includes a first partial housing space and a second partial housing space separated from each other, with insulation between the first partial housing space and the second partial housing space, the ozone generator and the control and measurement equipment housed in the first partial housing space, and the inverter housed in the second partial housing space, the apparatus housing having an inverter exhaust surface and an inverter intake surface, and the ozone generating apparatus is An ozone generator further comprising: an inverter intake port provided on the inverter intake surface and having an intake function for taking in air from outside the device housing into the second partial housing space; and an inverter exhaust port provided on the inverter exhaust surface and having an exhaust function for leading air from the second partial housing space to outside the device housing.

6. An ozone generating apparatus according to claim 5, further comprising a partition plate provided in the containment space and separating the containment space into a first partial containment space and a second partial containment space, wherein the partition plate insulates the first partial containment space and the second partial containment space.

7. An ozone generator according to claim 6, wherein the inverter intake port and the inverter exhaust port are a single unit of inverter intake and exhaust ports.

8. An ozone generator according to claim 6, wherein the inverter intake port and the inverter exhaust port are provided independently of each other.

9. An ozone generator according to claim 5, wherein the apparatus housing includes a combination of a first apparatus housing and a second apparatus housing, which are independent of each other, the first partial housing space is a housing space within the first apparatus housing, the second partial housing space is a housing space within the second apparatus housing, the inverter intake surface and the inverter exhaust surface are provided in the second apparatus housing, the ozone generator further comprises an external power line provided between the first apparatus housing and the second apparatus housing, the AC power is supplied from the inverter in the second apparatus housing to the ozone generator in the first apparatus housing via the external power line, the inverter intake port is provided on the inverter intake surface and has an intake function for taking in air from outside the second apparatus housing to the second partial housing space, and the inverter exhaust port is provided on the inverter exhaust surface and has an exhaust function for leading air from the second partial housing space to outside the second apparatus housing. Ozone generator.

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