Oxygen plasma raises piezoelectric surface resistivity to strengthen SiO2 bonding and preserve k2 in thinned acoustic wave substrates.
Vertically stacked acoustic resonators use support layers and air gaps to shrink RF filter size while easing frequency design and manufacturing.
A thin first dielectric and thicker second dielectric reduce band width ratio variation in LiNbO3 Rayleigh-wave SAW elements.
Opposed-axis piezoelectric layer stacks cut acoustic losses in BAW resonators while sustaining SHF and EHF filter operation.
A low-velocity and high-velocity film stack confines elastic wave energy, cutting propagation loss and raising Q in piezoelectric devices.
Single-crystal piezoelectric films keep thin BAW resonators effective above 5 GHz, improving Q factor and electro-mechanical coupling.
Odd and even IDT electrode grouping equalizes input and output impedance, improving matching flexibility and bandpass characteristics.
Composite-substrate coupled-cavity SAW filters improve thermal stability and electromechanical coupling while shrinking footprint and sharpening bands.
A stepped insertion layer in the resonator extension improves acoustic reflection, reducing energy leakage and preserving Sub-6 GHz signal strength.
Transfer printing moves epitaxial piezoelectric acoustic films onto functional substrates, preserving film quality while enabling optical, thermal, or magnetic coupling.
Alternating reflector finger widths in a lithium tantalate SH-wave device suppress Rayleigh spurious responses and improve attenuation.
A high-emissivity radiation layer on the lid manages IC heat, stabilizing crystal resonator temperature and reducing frequency deviation.
A polycrystalline spinel layer shifts higher-order spurious modes upward, improving out-of-band attenuation and quality factor in RF filters.
Optimized XBAR electrode thickness, pitch, and multi-mark IDT layout suppress spurious modes while improving selectivity and power handling.
Using shear-wave XBAR resonators in a matrix layout, this case addresses RF filtering above 3 GHz with wider bandwidth for 5G-era networks.
Oblique-edged XBAR diaphragms suppress spurious modes to improve isolation, rejection, and wideband RF filtering above 3 GHz.
Hydrogen-blocking dielectric bonding plus heat treatment and thinning preserve monodomain ferroelectric layers on insulating substrates.
Out-of-plane multi-arm vibration and rear-base support arms increase base deflection to improve drive level dependency in miniaturized resonators.
Localized low- and high-velocity IDT regions suppress lower-order transverse mode ripples while preserving higher-order mode behavior.
Using coupled bulk acoustic wave resonators with different shapes and similar areas, this case suppresses second harmonic response in RF filters.
A thin bonding layer within a four-layer acoustic stack reduces bonding stress, limits piezoelectric substrate warpage, and preserves wave characteristics.
Dual organic-layer cavities reflect acoustic waves back to the effective area, cutting wave loss while protecting the resonator.
A selectable RF filter bank plus a variable filter suppresses nearby interference without IF stages or PLLs, cutting size and power.
Non-uniform sidewall doping in a MEMS resonator controls the temperature coefficient of frequency to reduce thermal drift.
Varying IDT duty ratio between central and edge regions suppresses transverse spurious modes while avoiding added film cost and limiting insertion loss.
Dielectric strips and dummy fingers confine acoustic energy in an XBAR resonator, improving Bode Q and reducing insertion loss near anti-resonance.
A grinding trace aimed at the support corner keeps the side angle within 9.5° or less to prevent support-substrate separation.
A two-layer substrate places shield wiring between coupling and output paths to cut parasitic capacitance and preserve routing flexibility.
A Langasite tuning fork resonator with temperature compensation enables accurate downhole pressure sensing in high-temperature, high-pressure wells.
A conductive film on the resonator weight portion neutralizes insulator charge, reducing frequency fluctuation during MEMS tuning.
A cavity wall film absorbs radiant heat from the excitation electrode, improving acoustic wave device heat dissipation without direct support contact.
A convex piezoelectric surface confines main-mode acoustic energy in BAW resonators, raising quality factor without relying on a planar structure.
A swirling surface acoustic wave creates a low-pressure dark spot to selectively trap micro- and nano-objects without contact or markers.
A joining member covers base protrusions and contacts the lid wall to improve hermeticity, joining strength, and resonator stability.
Parallel XBAR sub-filters with split die thicknesses widen RF bandwidth and support higher-frequency filtering in compact designs.
Thin LiNbO3 or LiTaO3 Lamb wave resonators use tuned electrode gaps to reach mmWave 5G bands while improving interference rejection.
Independent heaters for the resonator, circuit, and die cut temperature gradients, improving frequency stability with lower power.
Composite epoxy, quarter-wave layers, and absorbent damping reduce ultrasonic reflections and improve fingerprint imaging through touch surfaces.
A multilayer ferroelectric border region is biased to lower coupling, suppressing BAW spurious modes while preserving high Q and low loss.
A bonding-formed boundary ring confines acoustic waves in FBAR resonators, reducing lateral leakage while simplifying fabrication.
Side-surface routing wiring replaces brittle through-hole processing and improves heat dissipation from the IDT electrode in WLP elastic wave packages.
High- and low-velocity layers confine boundary acoustic waves in a thinner piezoelectric substrate, cutting radiation loss in RF modules.
A buried high-density strip creates piston mode in a SAW resonator to cancel transverse wave vectors and improve passband insertion loss.
Single-crystal piezoelectric thin films help BAW RF filters keep high quality factor at sub-0.5 um thickness for 4.5G and 5G bands.
A scandium-alloy insertion layer in the resonator edge improves heat flow and mechanical stability for high-frequency, high-power 5G use.
Asymmetric interdigital electrode widths and angles raise capacitance while suppressing spurious emissions in thickness-shear acoustic wave devices.
Opposed d31 and d32 crystal coupling boosts disk resonator displacement per charge while minimizing quadrature error in gyroscopes.
A sloped insulating layer at the spacer interface blocks moisture ingress, protecting IDT electrodes while keeping the package low-profile.
A silicon oxide and piezoelectric stack on a thick silicon substrate suppresses higher-mode leakage and improves RF filter characteristics.
Acoustic velocity discontinuities in recessed FBAR frame regions refract transverse waves, suppressing spurious signals and stabilizing frequency response.
Bonding the temperature sensor to a first bump improves heat conduction near the quartz crystal, enabling more accurate frequency compensation.
A harmonic trap filter suppresses LTE-A carrier aggregation harmonics and IMD, cutting terminal sensitivity degradation from 5.08 dB to 0.16 dB.
Niobium alloy electrodes and rare-earth-doped piezoelectric layers cut BAW resonator frequency drift while supporting higher Q and lower series resistance.
Lumped capacitive and inductive elements model temperature-driven frequency shifts in acoustic microwave filters with less modeling effort.
Bottom-side electrodes keep the piezoelectric surface accessible for trimming and loading, improving frequency tuning and functional integration.
Surface acoustic wave outputs replace manual delay cables to align multi-channel signals with compact integration and precise compensation.
Detected film thickness errors are compensated before mass loading deposition to keep resonator frequency on target and improve yield.
Surface acoustic waves atomize liquid from cavity arrays into 1-5 μm droplets, improving lung drug delivery and narrowing droplet spread.
A reinforcing plate bonded to the protection device helps an electronic component module resist resin-molding pressure and preserve wave space.
Monolithic capacitive coupling reshapes acoustic filter response, moving Bragg resonance away from the passband for steeper skirts and lower loss.
Alternating acoustic-impedance reflectors and TCF compensation layers narrow Tx/Rx band gaps while stabilizing resonant frequency.
A bandgap-driven bias current scheme offsets resonator and varactor temperature drift to keep TCXO frequency stable across temperature changes.
A grounded shielding member spaced by a support part blocks external interference while preserving acoustic wave performance and bonding reliability.
Impurity-containing SiO2 barriers protect phosphorus-doped Si layers, limiting temperature-driven resonant frequency drift while preserving high Q.
One inductor shared across multiple series resonators creates LC attenuation poles, widening stop bands while reducing filter size and cost.
Oblique semicircular electrodes on a doubly rotated quartz vibrating piece suppress A-mode, B-mode, and flexure vibration while preserving Q factor.
Segmented guiding units and a diffraction cushion stabilize power and frequency while reducing acoustic damage in prolonged piezoelectric oscillation.
By moving inductance away from the antenna-side branch, this duplexer improves isolation for closely spaced bands while limiting reflectivity and loss.
Fluorine-doped silicon oxide layers improve acoustic wave frequency stability by compensating temperature drift with lower attenuation.
A shield electrode placed across the air gap between stacked acoustic wave filters blocks interference, improves isolation, and supports lower device height.
A low-capacitance third parallel arm resonator placed outside the pass band narrows the capacitive range and improves matching.