Wafer transfer system and wafer transfer method
CN114446847BActive Publication Date: 2026-08-28YANGTZE MEMORY TECH CO LTD
Patent Information
- Application Number
- CN202111622940.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-28
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2041-12-28
AI Technical Summary
Technical Problem
[0004]1、传送接触点较多，出现问题较难寻找原因；
Benefits of technology
[0022]根据本发明实施例的晶圆传送系统及晶圆传送方法，将待传送的晶圆放置在晶圆传送盒中进行翻转等动作，以完成晶圆所需的翻转(姿态调整)；在翻转等运动过程中，待传送的晶圆受到晶圆传送盒的保护，在保证传送安全性的同时，可提高翻转速度/整个传送过程的速度；进一步地，晶圆传送盒中设置有固定待传送的晶圆的卡槽，能够进一步保证传送安全性，并提高翻转速度。
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Figure CN114446847B_ABST
Abstract
The application discloses a wafer conveying system and a wafer conveying method. The wafer conveying system according to the embodiment of the application comprises a wafer conveying box used for placing a wafer to be conveyed; a bearing unit used for connecting with the wafer conveying box to bear the wafer conveying box; a transfer unit used for obtaining the wafer to be conveyed from the wafer conveying box and transferring the wafer to a base; and the base used for receiving the wafer to be conveyed. The wafer conveying system and the wafer conveying method according to the embodiment of the application improve the hourly productivity and processing effect of a wet batch processor.
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Citation Information
Patent Citations
Transfer apparatus for wafer cassette
CN101847594A
Apparatus and method for controlling schedule of wafertransfer
KR1020080018509A
Wafer inspection apparatus
KR1020100083630A