Single-walled carbon nanotube film and method and apparatus for manufacturing the same

Abstract

This invention relates to single-walled carbon nanotube films and methods and apparatus for their manufacture. This document discloses apparatus and methods for manufacturing large-diameter single-walled carbon nanotube films. Advantageously, large-diameter single-walled carbon nanotube films can be used as transparent electrodes with high transparency and low sheet resistance. In one embodiment, the method includes: supplying a support of carbon monoxide and a catalyst precursor through a first inlet at a temperature lower than the reaction temperature of the catalyst precursor; supplying heated carbon monoxide through a second inlet, such that the heated carbon monoxide is mixed with the support of carbon monoxide and the catalyst to form an aerosol; and reacting the aerosol in a reaction chamber to form a composite aerosol of single-walled carbon nanotubes, metal nanoparticles, carbon monoxide, and carbon dioxide. In this embodiment, the heated carbon monoxide heats the catalyst precursor, which reacts with the carbon monoxide to form carbon nanotubes.

Description

[0001] Cross-references to related applications

[0002] This application claims the benefit and priority of U.S. Provisional Patent Application Serial No. 62 / 944,241, filed December 5, 2019, entitled “Methods and Apparatus for the Fabrication of Single-Walled Carbon Nanotubes”, filed under 35 U.S. SC §119(e), the entire contents of which are incorporated herein by reference for all purposes. Technical Field

[0003] The present invention relates generally to conductive transparent films and their manufacturing equipment and methods. Background Technology

[0004] Energy-saving technologies benefit from conductive materials with advanced composition and design, performing multiple functions such as high transparency and conductivity. One example is organic light-emitting diodes (OLEDs), whose operation benefits from the introduction of effective charge into individual photonic layers, and whose optical transmittance at practical wavelengths is simultaneously very high. Transparent conductive oxides (TCOs) typically meet these opposing performance requirements on the surface. Indium tin oxide (ITO), with an In:Sn atomic ratio of approximately 10:1, is perhaps the most common TCO coating used to fabricate OLED anodes in typically bottom-up deposited layer device designs. This prevalent choice evolved from the widespread use of ITO in liquid crystal displays, which are electric field-driven devices rather than current-injection designs such as OLEDs. There are several well-documented reasons why ITO is not an ideal anode material for high-efficiency OLEDs, including inappropriate work function, difficulty in generating desired patterns, stability, bending on flexible substrates, the availability of high-quality indium, and the need for high-temperature processing, limiting the high-speed fabrication of integrated ITO substrates. Summary of the Invention

[0005] Various implementation schemes involve methods for producing single-walled carbon nanotubes, which include:

[0006] • Supported carbon monoxide and catalyst precursor are supplied to the mixing zone through the first inlet at a temperature lower than the reaction temperature of the catalyst precursor;

[0007] • Heated carbon monoxide is supplied to the mixing zone through a second inlet, so that the heated carbon monoxide is mixed with the carrier carbon monoxide and the catalyst to form an aerosol;

[0008] • The aerosol is reacted in a reaction chamber to form a composite aerosol comprising single-walled carbon nanotubes (SWCNTs), carbon monoxide, and carbon dioxide; and

[0009] • Expose the substrate to the composite aerosol to deposit an SWCNT film on the surface of the substrate.

[0010] In various other embodiments, the second inlet includes a nozzle.

[0011] In various other embodiments, the heated carbon monoxide is heated at a temperature of 1000°C–1100°C.

[0012] In various other embodiments, the pressure in the reaction chamber is greater than or equal to 10 atm.

[0013] In various other embodiments, the method also includes transferring carbon monoxide and carbon dioxide into an alkaline bath, wherein the alkaline bath absorbs the carbon dioxide.

[0014] In various other embodiments, the alkaline bath includes sodium hydroxide.

[0015] In various other embodiments, the method also includes reusing the carbon monoxide transferred through the first inlet and / or the second inlet.

[0016] In various other embodiments, the substrate includes a diaphragm filter.

[0017] In various other embodiments, the diaphragm filter comprises polyethylene terephthalate.

[0018] In various other implementations, the substrate is stored on a roll-to-roll system.

[0019] In various other embodiments, the catalyst precursor includes penta-(carbonxyl) iron.

[0020] In various other embodiments, the carbon monoxide support and the catalyst precursor are supplied at room temperature.

[0021] In various other embodiments, exposing the substrate to the composite aerosol allows the SWCNT membrane to be deposited onto the filter diaphragm while simultaneously allowing carbon monoxide and carbon dioxide to pass through the filter diaphragm.

[0022] In addition, various implementation schemes involve equipment for producing single-walled carbon nanotubes, including:

[0023] • Reaction chamber;

[0024] • The mixing zone connected to the reaction chamber;

[0025] • A first inlet configured to supply room-temperature carrier carbon monoxide gas and catalyst precursor to the mixing zone;

[0026] • A second inlet constructed to receive carbon monoxide gas;

[0027] • A pipe connected to the second inlet, wherein the pipe supplies carbon monoxide gas to the mixing zone;

[0028] • A heat source that is thermally connected to the pipeline and configured to heat carbon monoxide gas supplied through the pipeline and entering the mixing zone, wherein the carrier carbon monoxide gas and the catalyst precursor are configured to mix and react with the heated carbon monoxide gas to form an aerosol containing single-walled carbon nanotubes (SWCNTs).

[0029] • The deposition chamber connected to the reaction chamber via a transfer pipe; and

[0030] • A substrate support constructed to hold a substrate in place so that the surface of the substrate is exposed to the aerosol, thereby depositing a SWCNT film on the surface of the substrate.

[0031] In various other embodiments, the substrate includes a diaphragm filter.

[0032] In various other embodiments, the diaphragm filter comprises polyethylene terephthalate.

[0033] In various other embodiments, the substrate includes a flexible diaphragm filter.

[0034] In various other embodiments, the substrate support includes: a first roll configured to hold a first roll of unused flexible substrate, wherein the first roll is configured to supply unused flexible substrate in a path containing aerosols of large-diameter SWCNTs; and a second roll configured to store flexible substrate with deposited SWCNT films.

[0035] In various other embodiments, the aerosol also contains carbon monoxide and carbon dioxide, and the membrane filter is configured to filter out large-diameter SWCNTs from the aerosol while allowing carbon monoxide and carbon dioxide to pass through.

[0036] Furthermore, various embodiments involve transparent electrode films, including: a substrate; and a single-walled carbon nanotube film deposited on the surface of the substrate, wherein the single-walled carbon nanotube film has low sheet resistance, high transparency and surface roughness, and wherein the single-walled carbon nanotube film has a high level of entanglement. Attached Figure Description

[0037] This description will be more fully understood with reference to the following figures and data diagrams, which are presented as exemplary embodiments of the invention and should not be construed as a complete description of the scope of the invention.

[0038] Figure 1 This invention describes an apparatus for high-pressure carbon monoxide conversion to produce large-diameter single-walled carbon nanotubes according to the embodiments of the present invention.

[0039] Figure 2 illustrate Figure 1 A diagram of the device described in the document.

[0040] Figure 3 The instructions include Figure 1 and 2 Examples of many devices described herein include high-pressure carbon monoxide conversion reactors.

[0041] Figure 4 According to the embodiments of the present invention and Figure 1 and 2 A schematic representation of the deposition system connected to the equipment described in the figure.

[0042] Figure 5A and 5B Examples of membranes comprising large-diameter single-walled carbon nanotube membranes according to embodiments of the present invention are described.

[0043] Figure 6A These are scanning electron microscope images of large-diameter single-walled carbon nanotube films according to the embodiments of the present invention.

[0044] Figure 6B These are tunneling electron microscope images of large-diameter single-walled carbon nanotube films according to the embodiments of the present invention.

[0045] Figure 7 This invention describes a method for depositing large-diameter single-walled carbon nanotube films according to an embodiment of the present invention. Detailed Implementation

[0046] While considerable research has been conducted to date to identify alternative materials or structures for OLED anodes, the results appear to be limited. A comparison table (Table 1) summarizes key considerations when evaluating transparent anodes specifically for OLED light-emitting applications. At equivalent transmittance, their sheet resistance is approximately 3–6 times higher than that of ITO. Silver nanowire (Ag NW) networks exhibit equivalent or better quality factors, such as a wide sheet resistance of 10 Ω / □–300 Ω / □, high transmittance >90%, and low surface coverage (1%).

[0047] Table 1 Key parameters of various transparent conductors for OLED light emission.

[0048]

[0049] Ag NW networks have been investigated as a potential ITO alternative because they can reproduce the high surface conductivity and visual transparency of ITO. To achieve these performance specifications, integrated Ag NW electrodes have been extensively investigated as a novel electrode material to replace ITO. The development of these alternative electrode materials has progressed in recent years, demonstrating commercial viability through large-area Ag NW coatings on glass and plastic substrates, primarily as flexible Ag NW networks entering the market as transparent conductive films for touch sensors. However, while Ag NW networks exhibit many beneficial results as electrodes, such as high conductivity and transparency as well as low surface roughness, their poor adhesion to the substrate and the low thermal and electrical stability of nanoscale silver may ultimately make them unsuitable for use as electrodes.

[0050] Disadvantageously, the overall requirements for Ag NW flexible / flexible anodes used in OLED applications are extremely stringent, as even small defects can have detrimental effects on device performance. For example, locally protruding nanowires with height increases of only tens of nanometers (close to the thickness of most organic layers in OLEDs) will undoubtedly cause current leakage. Although smoothing techniques have been investigated, further improvements are needed for high-performance, long-lifetime OLEDs. Furthermore, while the stability of silver is often considered a critical issue for Ag NWs, it has not been adequately addressed by companies developing Ag NW-based integrated substrates.

[0051] To address the aforementioned issues, high-index colorless polymer-embedded single-walled carbon nanotube (SWCNT) films have been developed to achieve high conductivity, high transparency, operational stability, and mechanical durability. Advantageously, large-diameter SWCNTs have been found to possess improved high conductivity without sacrificing transparency. Currently, the sheet resistance of transparent conductive SWCNT films is approximately 40 ohms / square. With appropriate doping, their sheet resistance can be further reduced to less than 20 ohms / square. Furthermore, these transparent conductive SWCNT films can be mass-produced in high-volume quantities using methods such as roll-to-roll processes. High-pressure carbon monoxide conversion reactions can be used to improve the production of high-quality, large-diameter SWCNTs at low cost. SWCNTs can also serve as thermal conductors for heat dissipation and as electrode frameworks for mechanical durability.

[0052] Reliable, low-cost, polymer-embedded, high-conductivity transparent SWCNTs have been developed. These SWCNTs can be used as flexible anodes for OLED light emission. SWCNTs can be manufactured through repeated fabrication, which optimizes processing parameters. Implementing established schemes for high-volume coating strategies and providing relevant manufacturing standards helps produce high-quality electrodes. The fabricated polymer-embedded, high-conductivity transparent SWCNT flexible electrodes can be characterized by performance metrics and challenges such as electrical conductivity, light transmittance, mechanical durability, thermal conductivity, surface roughness, operational stability, light extraction efficiency, scalability, and cost. Furthermore, polymer-loaded / embedded polymer-embedded, high-conductivity transparent SWCNT flexible substrates can be integrated into OLED light-emitting panels and illuminators.

[0053] There is a high demand for flexible and thin luminaires designed and presented to cover a variety of applications such as general lighting in buildings, hospitals, and military facilities. Developed high-conductivity transparent SWCNT flexible anodes embedded with polymers can be used in these applications. In some embodiments, the developed high-conductivity transparent SWCNT flexible anodes embedded with polymers can also be integrated into OLED devices used in decorative lighting. The flexible shape factor of OLEDs allows for greater freedom in designing complex patterns and integrating lighting on uneven surfaces. In some embodiments, the developed high-conductivity transparent SWCNT flexible electrodes embedded with polymers can be integrated into touchpads, transparent and flexible electronics, and medical devices.

[0054] High-pressure carbon monoxide conversion is used to produce large-diameter SWCNTs.

[0055] As discussed earlier, high-pressure carbon monoxide conversion can be used to produce large-diameter SWCNTs that can be advantageously used as high-quality transparent conductive materials. Figure 1 An apparatus 100 for high-pressure carbon monoxide conversion according to an embodiment of the present invention is described. The apparatus 100 is configured to perform thermal decomposition of a catalyst precursor via a carbon monoxide (CO) flow. In some embodiments, the catalyst precursor is iron pentacarbonyl (Fe(CO)5, penta(carbonyl)iron).

[0056] The apparatus 100 includes an injection inlet 102 for injecting a catalyst precursor and a carrier CO. The catalyst precursor and carrier CO can be injected at a temperature below the reaction temperature of the catalyst precursor (e.g., room temperature). The apparatus 100 also includes a nozzle 104 configured to deliver heated CO to the catalyst precursor and carrier CO. The nozzle 104 can deliver heated CO at temperatures of about 1000°C–1100°C, about 1010°C–1090°C, about 1020°C–1080°C, about 1030°C–1070°C, or about 1040°C–1060°C. In some embodiments, the nozzle 104 can deliver heated CO at a temperature of about 1050°C. The injection inlet 102 and the nozzle 104 deliver their gaseous substances to a mixing zone 106 in which the catalyst precursor and carrier CO are mixed with the heated CO. The heated CO heats the catalyst precursor, which reacts with the CO.

[0057] Nozzle 104 may be connected to CO inlet 108, where CO can flow through conduit 110. In some embodiments, conduit 110 is a stainless steel pipe. In some embodiments, conduit 110 may be a channel drilled in the pipe wall. Conduit 110 may be in thermal contact with heating element 112, which may be positioned radially outward from conduit 110. As gaseous CO flows through conduit 110, heating element 112 can heat the CO to produce heated CO. After the catalyst precursor and carrier CO are mixed with the heated CO in mixing zone 106, the mixed gaseous material flows through reaction chamber 114 where the thermal decomposition of iron pentacarbonyl occurs to produce carbon nanotubes. Mixing zone 106 and reaction chamber 114 are maintained under high pressure due to the gas flow from injection inlet 102 and nozzle 104. In some embodiments, the pressure in mixing zone 106 and / or reaction chamber 114 may be 10 atm or higher.

[0058] In reaction chamber 114, high pressure and high temperature simultaneously decompose penta(carbonyl)ferric iron to form iron nanoparticles with diameters ranging from approximately 0.6 nm to 9 nm or approximately 2 nm to 9 nm. Around these iron nanoparticles, carbon monoxide undergoes an auto-oxidation-reduction reaction to form carbon nanotubes and carbon dioxide.

[0059] An example illustrating this process is shown in Equation 1:

[0060]

[0061] In Equation 1, CO gas is reduced to solid carbon and carbon dioxide gas. The solid carbon forms carbon nanotubes. The reaction can form an in-situ synthesized aerosol, which may include SWCNTs, metal nanoparticles (e.g., iron nanoparticles), carbon monoxide, and carbon dioxide. SWCNTs flow from reaction chamber 114 through outlet 116. The formed aerosol including SWCNTs can be transferred to one or more substrates, where SWCNTs can be deposited to form a uniform and consistent high conductivity SWCNT film on one or more substrates.

[0062] Carbon monoxide and carbon dioxide can be pumped back to the reactor and used as a carbon source again. Carbon monoxide and carbon dioxide can be exposed to an alkaline bath, which may include sodium hydroxide. Carbon dioxide can be absorbed by the sodium hydroxide to form sodium carbonate, which filters out the carbon dioxide, leaving only carbon monoxide for reuse.

[0063] Figure 2 Explanation combined Figure 1 A diagram of the device 100 described. Figure 2 Various instance sizes of the display device 100. As illustrated, pipe 110 may be a channel drilled in pipe wall 202. Pipe wall 202 may surround reaction chamber 114. Reaction chamber 114 may be 1.5 inches in diameter. The diameter of the entire pipe wall 202 surrounding reaction chamber 114 may be 2.75 inches. The diameter of each pipe 110 may be 0.375 inches. The reaction chamber extends from the nozzle ( Figure 1 (As shown in the image) The length from the outlet 116 can be 36 inches. These dimensions are exemplary, and other dimensions have been considered for other applications.

[0064] The feeding rates of carbon monoxide and catalyst precursors can be adjusted to produce large-diameter SWCNTs. In some embodiments, the carrier CO and catalyst precursor can be formed in situ into an aerosol, which flows through syringe 102. The in-situ formed SWCNT aerosol can be deposited onto a substrate to form a highly conductive transparent SWCNT film on the substrate. For all materials, adjusting the reaction conditions produces a highly conductive transparent SWCNT flexible anode with predetermined parameters embedded in the polymer.

[0065] High-pressure carbon monoxide conversion reactors produce large-diameter SWCNTs. In some embodiments, the diameter of the large-diameter SWCNTs is greater than 2 nm. The in-situ synthesized SWCNT aerosol can be deposited on one or more substrates to form a highly conductive transparent SWCNT film. In some embodiments, the resulting large-diameter SWCNT film has a sheet resistance of less than 40 ohms / square. The remaining gas after rinsing with an alkaline bath, such as sodium hydroxide solution, can be reused as a carbon source.

[0066] Figure 3 The explanation includes the combination Figure 1 and 2Examples of various embodiments of the discussed device 100 include a high-pressure carbon monoxide conversion reactor. The high-pressure carbon monoxide reactor includes one or more devices 100, one or more control panels 300, one or more compressors 302, one or more power supplies 304, and one or more gas lines 306. These components may be either electrically connected or physically connected (e.g., fluid or gaseous connections). For example, one or more control panels 300 may be connected to one or more gas supplies connected to gas lines 306 to control the supply of various gases. In some embodiments, the control panel 300 may include a processor and memory, which can be used to regulate the reaction feed rate, feed ratio, pressure, and temperature of each in device 100 to achieve a large diameter SWCNT.

[0067] Figure 4 It is in accordance with the embodiments and combinations of the present invention. Figure 1 and 2 A schematic diagram of a deposition system 400 connected to the discussed apparatus 100 is shown. The deposition system 400 connects the apparatus 100 to a deposition chamber 404 via a conduit 402. The deposition chamber 404 may accommodate a roll-to-roll deposition system 406 including a substrate 408. The conduit 402 sprays an aerosol containing SWCNT 402 onto the substrate 408, whereby the SWCNTs remain on the substrate 408 as an SWCNT film. The roll-to-roll deposition system 406 may include a new substrate roller 410a and a deposited substrate roller 410b. While the SWCNTs from the conduit 402 remain on a portion of the substrate 408, the substrate 408 is continuously renewed by rolling new substrate 408 to replace the deposited substrate 408. Although the positions of the new substrate roller 410a and the deposited substrate roller 410b are shown in a certain orientation, it should be understood that these rollers can be reversed, in which case their directions will be opposite. The moving speed of the substrate 408 can be controlled together with the supply rate of the device 100 to achieve a certain film thickness, thereby achieving a balance between the conductivity and transparency of the SWCNT film.

[0068] In some embodiments, substrate 408 may be a diaphragm filter, such as polyethylene terephthalate (PET; poly(ethylene terephthalate)), or other suitable material capable of capturing SWCNT 402 and passing it through other portions of the aerosol. Advantageously, the diaphragm filter allows for better flow through the chamber, which facilitates deposition. Substrate 408 may also be a flexible substrate. In some embodiments, the deposition system may be a single-substrate system instead of a roll-to-roll system, wherein a single substrate is placed within the system and SWCNTs are deposited onto the substrate. In these systems, the substrate may be a flexible or rigid substrate. In some embodiments, the deposition system may be a batch processing system capable of depositing on multiple substrates in a single chamber. Deposition system 400 also includes a gas outlet 412 connected to deposition chamber 404, from which filtered gas exits.

[0069] Example of a large-diameter SWCNT membrane

[0070] Figure 5A and 5B The description includes examples of large-diameter SWCNT membranes deposited using the methods and equipment described above. Figure 5A This describes an example of a large-diameter SWCNT film 502 on PET without any post-processing. These films 502 have a sheet resistance of approximately 200-300 Ω / square. Figure 5B This describes an example of a large-diameter SWCNT film 504 on PET undergoing post-processing. Post-processing may include acid treatment or oxidation processes. Acid treatment may involve exposing the deposited SWCNT film 504 to an acid such as chloroauric acid (HAuCl4) or nitric acid (HNO3). Oxidation processes may include an oxidizing agent. Post-processing can reduce sheet resistance and thus increase conductivity. In some cases, the post-treated film 504 may have a sheet resistance of about 40 Ω / square or lower. When post-processing includes chloroauric acid, the SWCNT film 504 may be doped with AuCl3. Post-processing can reduce transparency and thus balance conductivity and transparency. Post-processing can make the SWCNT film 504 more conductive and suitable for use as an electrode.

[0071] Figure 6A This is a scanning electron microscope image of a large-diameter SWCNT film deposited according to an embodiment of the present invention. Figure 6B This is a transmission electron microscope image of a large-diameter SWCNT film deposited according to an embodiment of the present invention. The modulation of the reactions discussed above can increase the diameter of the SWCNTs, improve the film's conductivity, and enhance its transparency.

[0072] Electrodes with low surface roughness are advantageous. The surface roughness of the polymer-embedded SWCNT flexible electrode can be tuned to the diameter of the SWCNT, but can also depend on the surface of the support substrate and the adhesion between the support substrate and the components of the SWCNT composite, resulting in prominent SWCNTs. Therefore, a particular support substrate can provide excellent roughness. In some embodiments, the support substrate can be treated with self-assembled small molecules to eliminate defects caused by attraction during the peeling process of separating the polymer-embedded SWCNT from the support substrate. In some embodiments, the support substrate is post-treated to smooth the manufactured polymer-embedded SWCNT flexible electrode.

[0073] Methods for depositing large-diameter SWCNT films

[0074] Figure 7This invention describes a method for depositing a large-diameter SWCNT film according to an embodiment of the present invention. In block 702, a support carbon monoxide and a catalyst precursor are supplied. The support carbon monoxide and the catalyst precursor are maintained at a temperature lower than the reaction temperature of the catalyst precursor and the support carbon monoxide (e.g., room temperature). In block 704, heated carbon monoxide is supplied to the support carbon monoxide and the catalyst precursor.

[0075] In block 706, heated carbon monoxide and a supported carbon monoxide are mixed together with a catalyst precursor. The heated carbon monoxide heats the catalyst precursor, which induces a reaction to form an aerosol containing large-diameter SWCNTs. In some embodiments, the aerosol may include single-walled carbon nanotubes, metal nanoparticles, carbon monoxide, and carbon dioxide.

[0076] In block 708, the substrate is exposed to the aerosol to deposit a carbon nanotube film on the surface of the substrate. In some embodiments, the substrate may be a membrane filter, such as a PET membrane. The membrane filter allows carbon nanotubes to be deposited onto it while allowing the remaining components of the aerosol to pass through.

[0077] Principle of Equivalence

[0078] While the foregoing description contains many specific embodiments of the invention, these should not be construed as limiting the scope of the invention, but rather as examples of one embodiment. Therefore, it should be understood that the invention may be practiced in ways other than those specifically described without departing from its scope and spirit. Consequently, the embodiments of the invention should be considered illustrative rather than restrictive in all respects. Therefore, the scope of the invention should not be determined by the illustrative embodiments, but by the appended claims and their equivalents.

Claims

1. A method for producing single-walled carbon nanotubes, the method comprising: Supported carbon monoxide and catalyst precursor are supplied to the mixing zone through the first inlet at a temperature lower than the reaction temperature of the catalyst precursor. Heated carbon monoxide is supplied to the mixing zone through a second inlet, so that the heated carbon monoxide is mixed with the supported carbon monoxide and the catalyst to form an aerosol. The aerosol was reacted in a reaction chamber to form a composite aerosol containing single-walled carbon nanotubes, carbon monoxide, and carbon dioxide. and The substrate is exposed to the composite aerosol to deposit a single-walled carbon nanotube film on the surface of the substrate. The single-walled carbon nanotubes mentioned above have a diameter greater than 2 nm; The pressure within the reaction chamber is greater than or equal to 10 atm; and The substrate is stored on a roll-to-roll system.

2. The method of claim 1, wherein the second inlet comprises a nozzle.

3. The method according to claim 1, wherein the heated carbon monoxide is at a temperature of 1000°C-1100°C.

4. The method of claim 1 further comprises transferring carbon monoxide and carbon dioxide to an alkaline bath, wherein the alkaline bath absorbs carbon dioxide.

5. The method according to claim 4, wherein the alkaline bath comprises sodium hydroxide.

6. The method of claim 4 further comprises reusing the carbon monoxide transferred through the first inlet and / or the second inlet.

7. The method of claim 1, wherein the substrate comprises a membrane filter.

8. The method of claim 7, wherein the membrane filter comprises polyethylene terephthalate.

9. The method of claim 1, wherein the catalyst precursor comprises iron pentacarbonoxy.

10. The method of claim 1, wherein the carbon monoxide support and the catalyst precursor are supplied at room temperature.

11. The method of claim 7, wherein exposing the substrate to the composite aerosol deposits a single-walled carbon nanotube membrane onto the filter diaphragm while allowing carbon monoxide and carbon dioxide to pass through the filter diaphragm.

12. Equipment for producing single-walled carbon nanotubes, comprising: Reaction chamber; The mixing zone connected to the reaction chamber; A first inlet is configured to supply room-temperature supported carbon monoxide gas and catalyst precursor to the mixing zone; A second inlet is constructed to receive carbon monoxide gas; A pipe connected to the second inlet, wherein the pipe supplies carbon monoxide gas to the mixing zone; A heat source is thermally connected to the pipeline and configured to heat carbon monoxide gas supplied through the pipeline and entering the mixing zone, wherein the carrier carbon monoxide gas and the catalyst precursor are configured to mix with the heated carbon monoxide gas and react to form an aerosol containing single-walled carbon nanotubes. The deposition chamber is connected to the reaction chamber via a transfer pipe; and A substrate support constructed to hold a substrate in place so that the surface of the substrate is exposed to the aerosol, thereby depositing a single-walled carbon nanotube film on the surface of the substrate; The single-walled carbon nanotubes mentioned above have a diameter greater than 2 nm; The substrate includes a flexible membrane filter; the substrate support includes: A first roll is configured to hold a first roll of unused flexible substrate, wherein the first roll is configured to supply unused flexible substrate in a path containing an aerosol containing single-walled carbon nanotubes having a diameter greater than 2 nm. and A second roller is constructed to store a flexible substrate on which a single-walled carbon nanotube film has been deposited.

13. The device of claim 12, wherein the substrate comprises a membrane filter.

14. The device of claim 13, wherein the diaphragm filter comprises polyethylene terephthalate.

15. The device of claim 13, wherein the aerosol further contains carbon monoxide and carbon dioxide, and wherein the membrane filter is configured to filter out single-walled carbon nanotubes having a diameter greater than 2 nm from the aerosol while allowing carbon monoxide and carbon dioxide to pass through.

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