Method and apparatus for cryogenic separation of air
By designing a three-tower system and a condenser-evaporator, the problem of existing equipment being unable to efficiently produce high-purity nitrogen and impure oxygen has been solved, achieving efficient air separation and meeting the needs of semiconductor and display manufacturing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LINDE AG
- Filing Date
- 2021-03-05
- Publication Date
- 2026-07-24
AI Technical Summary
Existing air separation equipment is unable to efficiently provide relatively large amounts of high-purity nitrogen and a certain amount of impure oxygen, which cannot meet the needs of fields such as semiconductor manufacturing and display manufacturing.
A three-tower system is adopted, including a high-pressure tower, a low-pressure tower, and an additional third distillation tower. By adjusting the pressure levels of each tower and the design of the condenser and evaporator, the pressure of nitrogen products is increased, and impure oxygen is extracted in the third distillation tower. Efficient separation is achieved by using an expander and a condenser and evaporator.
It has achieved efficient air separation for the production of high-purity nitrogen and impure oxygen, improving production efficiency and meeting the needs of fields such as semiconductor and display manufacturing.
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Figure CN115151771B_ABST
Abstract
Citation Information
Patent Citations
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