Method of operating a piezoelectric plasma generator

By modulating the peak amplitude of the input signal and adjusting the frequency and duty cycle through the control circuit, the problems of local burns and reliability issues in piezoelectric plasma generators when processing sensitive surfaces are solved, and more stable plasma generation is achieved.

CN115399074BActive Publication Date: 2025-12-23TDK ELECTRONICS AG
8 Cites 0 Cited by

Patent Information

Application Number
CN202080088679.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-12-20
Filing Date
2020-12-17
Publication Date
2025-12-23
Estimated Expiration
2040-12-17

AI Technical Summary

Technical Problem

Existing piezoelectric plasma generators are prone to localized burns and excessive temperature increases when processing sensitive surfaces, and have low reliability in high ionization voltage media and vacuum environments.

Method used

By modulating the peak amplitude of the input signal to periodically decrease and increase to levels below and above the ignition voltage of the plasma generator, and by adjusting the duty cycle and frequency in conjunction with the control circuit, energy input can be controlled and streaks can be avoided.

Benefits of technology

It effectively prevents localized burns, reduces temperature increases, and improves the reliability and stability of plasma generators, especially when dealing with sensitive surfaces and high-ionization-voltage media or vacuum environments.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

A method of operating a piezoelectric plasma generator (14) comprising applying an input signal (S in ) to a piezoelectric transformer (1) of the piezoelectric plasma generator (14), wherein an absolute value (|A peak |) of a peak amplitude of the input signal (S in ) is periodically reduced and increased to a level less than and greater than a strike voltage (V ig ) of the plasma generator (14) such that a plasma periodically collapses.
Need to check novelty before this filing date? Find Prior Art